TW201423170A - Polarized light irradiation device - Google Patents
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- TW201423170A TW201423170A TW102129147A TW102129147A TW201423170A TW 201423170 A TW201423170 A TW 201423170A TW 102129147 A TW102129147 A TW 102129147A TW 102129147 A TW102129147 A TW 102129147A TW 201423170 A TW201423170 A TW 201423170A
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Abstract
Description
本發明的實施方式涉及一種偏振光照射裝置。 Embodiments of the present invention relate to a polarized light irradiation device.
先前，在液晶面板的配向膜或視角補償薄膜的配向膜等的配向處理中，是使用偏振光照射裝置，所述偏振光照射裝置包括線狀的燈及線柵(wire grid)的偏振元件。這種偏振光照射裝置將燈與工件(work)的寬度方向平行地配置，並將偏振元件配置於燈與工件之間。而且，偏振光照射裝置僅使燈所照射的紫外線中偏振元件為規定方向的振動方向的紫外線通過，將所通過的紫外線照射至工件等，借此進行配向膜的配向處理。 Conventionally, in the alignment treatment of an alignment film of a liquid crystal panel or an alignment film of a viewing angle compensation film, a polarized light irradiation device including a linear lamp and a wire grid polarizing element is used. Such a polarized light irradiation device arranges the lamp in parallel with the width direction of the work, and arranges the polarizing element between the lamp and the workpiece. Further, the polarized light irradiation device passes only the ultraviolet light in the vibration direction of the predetermined direction in the ultraviolet light irradiated by the lamp, and irradiates the irradiated ultraviolet light to the workpiece or the like to perform the alignment treatment of the alignment film.
[專利文獻1]日本專利第4506412號公報 [Patent Document 1] Japanese Patent No. 4506412
然而，在現有技術中，伴隨著液晶面板的大型化即工件的大型化，將多個所述偏振元件配置於沿燈的長邊方向的不同位 置。這時，偏振光照射裝置優選更迅速地對偏振元件的安裝角度進行調整，以使多個偏振元件彼此的所通過的紫外線的振動方向與基準方向相一致。 However, in the prior art, a plurality of the polarizing elements are arranged in different positions along the longitudinal direction of the lamp in accordance with an increase in size of the liquid crystal panel, that is, an increase in size of the workpiece. Set. At this time, it is preferable that the polarized light irradiation device adjusts the mounting angle of the polarizing element more quickly so that the vibration direction of the ultraviolet rays passing through the plurality of polarizing elements coincides with the reference direction.
因此，本發明所要解決的問題在於提供一種偏振光照射裝置，所述偏振光照射裝置例如可以迅速地調整偏振元件的安裝角度，以使多個偏振元件彼此的所通過的紫外線的振動方向相對於基準方向為±0.1°以內。 Therefore, the problem to be solved by the present invention is to provide a polarized light irradiation device which can, for example, rapidly adjust the mounting angle of the polarizing element so that the vibration directions of the ultraviolet rays passing through the plurality of polarizing elements are opposite to each other. The reference direction is within ±0.1°.
實施方式的偏振光照射裝置包括線狀光源、多個第1偏振元件、可動部、第2偏振元件、受光單元及控制裝置。光源照射紫外線。第1偏振元件配置于沿光源的長邊方向的不同位置。可動部變更多個第1偏振元件的安裝角度。第2偏振元件被通過第1偏振元件的紫外線照射。受光單元接收通過第1偏振元件及第2偏振元件的紫外線。控制裝置根據所接收的紫外線的強度，控制可動部，以使通過第1偏振元件的紫外線的振動方向相對於基準方向為±0.1°以內，所述基準方向成為振動方向的基準。 The polarized light irradiation device of the embodiment includes a linear light source, a plurality of first polarizing elements, a movable portion, a second polarizing element, a light receiving unit, and a control device. The light source is exposed to ultraviolet light. The first polarizing element is disposed at different positions along the longitudinal direction of the light source. The movable portion changes the mounting angle of the plurality of first polarizing elements. The second polarizing element is irradiated with ultraviolet rays passing through the first polarizing element. The light receiving unit receives ultraviolet rays that have passed through the first polarizing element and the second polarizing element. The control device controls the movable portion such that the vibration direction of the ultraviolet ray passing through the first polarizing element is within ±0.1° with respect to the reference direction based on the intensity of the received ultraviolet ray, and the reference direction serves as a reference for the vibration direction.
偏振光照射裝置能夠迅速地調整偏振元件的安裝角度，以使多個偏振元件彼此的所通過的紫外線的振動方向相對於基準方向為±0.1°以內。 The polarized light irradiation device can quickly adjust the mounting angle of the polarizing element such that the vibration direction of the ultraviolet rays passing through the plurality of polarizing elements is within ±0.1° with respect to the reference direction.
1‧‧‧偏振光照射裝置 1‧‧‧Polarized light irradiation device
11‧‧‧光源 11‧‧‧Light source
12‧‧‧第1偏振部 12‧‧‧1st polarizing section
13‧‧‧可動部 13‧‧‧movable department
14‧‧‧第2偏振元件 14‧‧‧2nd polarizing element
15‧‧‧受光單元 15‧‧‧Light-receiving unit
16‧‧‧移動單元 16‧‧‧Mobile unit
17‧‧‧筒槽狀聚光鏡 17‧‧‧Cylinder concentrator
18‧‧‧保持構件 18‧‧‧Retaining components
19‧‧‧第1偏振元件 19‧‧‧1st polarizing element
19a‧‧‧框構件 19a‧‧‧Box components
19b‧‧‧線柵偏振元件 19b‧‧‧ Wire grid polarizing element
20‧‧‧控制裝置 20‧‧‧Control device
21‧‧‧構件用可動馬達(構件用可動部) 21‧‧‧ movable motor for components (movable part for components)
22‧‧‧元件用可動馬達(元件用可動部) 22‧‧‧Moving motor for components (movable part for components)
22a‧‧‧輸出軸 22a‧‧‧ Output shaft
23‧‧‧法線方向可動馬達 23‧‧‧Normal direction movable motor
24‧‧‧受光側可動部 24‧‧‧Light-receiving side movable part
25‧‧‧照度計 25‧‧‧ illuminance meter
61‧‧‧齒輪 61‧‧‧ Gears
62‧‧‧小齒輪 62‧‧‧Spindle
71‧‧‧測微計 71‧‧‧Micrometer
81‧‧‧齒條 81‧‧‧ rack
M、N、L‧‧‧方向 M, N, L‧‧ Directions
P‧‧‧軸心 P‧‧‧ Axis
Q‧‧‧水平軸 Q‧‧‧ horizontal axis
RD‧‧‧基準方向 RD‧‧‧ benchmark direction
ST31~ST33、ST41、ST91~ST93‧‧‧步驟 ST31~ST33, ST41, ST91~ST93‧‧‧ steps
UA、UB‧‧‧紫外線 UA, UB‧‧ UV
W‧‧‧工件 W‧‧‧Workpiece
X、Y、Z‧‧‧軸 X, Y, Z‧‧‧ axes
圖1是表示實施方式的偏振光照射裝置的整體構成的圖。 FIG. 1 is a view showing an overall configuration of a polarized light irradiation device according to an embodiment.
圖2是表示實施方式的偏振光照射裝置的整體構成的框圖。 FIG. 2 is a block diagram showing an overall configuration of a polarized light irradiation device according to an embodiment.
圖3是表示實施方式的偏振光照射裝置的控制裝置的處理的一例的流程圖。 3 is a flow chart showing an example of processing of a control device of the polarized light irradiation device according to the embodiment.
圖4是表示實施方式的偏振光照射裝置的控制裝置的處理的另一例的流程圖。 4 is a flow chart showing another example of processing of the control device of the polarized light irradiation device of the embodiment.
圖5是示意性地表示實施方式的偏振光照射裝置的可動部的構成的平面圖。 FIG. 5 is a plan view schematically showing a configuration of a movable portion of the polarized light irradiation device of the embodiment.
圖6是示意性地表示實施方式的變形例1的偏振光照射裝置的可動部的構成的平面圖。 FIG. 6 is a plan view schematically showing a configuration of a movable portion of a polarized light irradiation device according to a first modification of the embodiment.
圖7是示意性地表示實施方式的變形例2的偏振光照射裝置的可動部的構成的平面圖。 FIG. 7 is a plan view schematically showing a configuration of a movable portion of a polarized light irradiation device according to a second modification of the embodiment.
圖8(a)及圖8(b)是示意性地表示實施方式的變形例3的偏振光照射裝置的可動部的構成的平面圖。 (a) and (b) of FIG. 8 are plan views schematically showing a configuration of a movable portion of a polarized light irradiation device according to a third modification of the embodiment.
圖9是表示實施方式的變形例4的偏振光照射裝置的控制裝置的處理的一例的流程圖。 FIG. 9 is a flowchart showing an example of processing of a control device of a polarized light irradiation device according to a fourth modification of the embodiment.
實施方式的偏振光照射裝置1包括：線狀光源11，照射紫外線UA；多個第1偏振元件19，配置於沿所述光源11的長邊方向的不同位置，並且被所述光源11照射所述紫外線UA；可動部13，能夠變更所述多個第1偏振元件19的安裝角度；第2偏振 元件14，配置於與所述第1偏振元件19相對向的位置，被通過所述第1偏振元件19的所述紫外線UB照射；受光單元15接收通過所述第1偏振元件19及所述第2偏振元件14的所述紫外線；以及控制裝置20，根據所述受光單元15所接收的所述紫外線的強度，控制所述可動部13，以使通過所述多個第1偏振元件19的所述紫外線UB的振動方向相對於基準方向為±0.1°以內，所述基準方向成為振動方向的基準。 The polarized light irradiation device 1 of the embodiment includes a linear light source 11 that emits ultraviolet rays UA, and a plurality of first polarizing elements 19 that are disposed at different positions along the longitudinal direction of the light source 11 and that are illuminated by the light source 11 The ultraviolet ray UA; the movable portion 13 can change the mounting angle of the plurality of first polarizing elements 19; the second polarization The element 14 is disposed at a position facing the first polarizing element 19, and is irradiated by the ultraviolet ray UB of the first polarizing element 19; the light receiving unit 15 receives the first polarizing element 19 and the first The ultraviolet ray of the polarizing element 14 and the control device 20 control the movable portion 13 so as to pass through the plurality of first polarizing elements 19 according to the intensity of the ultraviolet ray received by the light receiving unit 15 The vibration direction of the ultraviolet ray UB is within ±0.1° with respect to the reference direction, and the reference direction is a reference for the vibration direction.
而且，所述可動部13包括元件用可動部22，所述元件用可動部22能夠變更圍繞著軸心P的安裝角度，所述軸心P是自所述光源11向所述第1偏振元件19的軸心。 Further, the movable portion 13 includes an element movable portion 22 that can change a mounting angle around the axis P, which is from the light source 11 to the first polarizing element The axis of 19 is.
而且，所述控制裝置20根據所述受光單元15所接收的所述紫外線的強度，算出所述紫外線UB的所述基準方向RD與通過所述第1偏振元件19的所述紫外線UB的振動方向所成的角度，並對所述可動部13進行控制，以使所述角度為±0.1°以內。 Further, the control device 20 calculates the reference direction RD of the ultraviolet ray UB and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19, based on the intensity of the ultraviolet ray received by the light receiving unit 15. The angle formed and the movable portion 13 are controlled such that the angle is within ±0.1°.
而且，更包括受光側可動部24，所述受光側可動部24使所述第2偏振元件14圍繞著所述軸心P旋轉，所述控制裝置20一面使所述第2偏振元件14圍繞著所述軸心P旋轉，一面算出所述受光單元15所接收的所述紫外線的強度最強的所述第2偏振元件14的方向與所述基準方向RD之間的角度，作為所述基準方向RD與通過所述第1偏振元件19的所述紫外線UB的振動方向所成的角度。 Further, the light-receiving side movable portion 24 is configured to rotate the second polarizing element 14 around the axis P, and the control device 20 surrounds the second polarizing element 14 The axis P is rotated to calculate an angle between the direction of the second polarizing element 14 having the strongest intensity of the ultraviolet ray received by the light receiving unit 15 and the reference direction RD as the reference direction RD. An angle formed by the vibration direction of the ultraviolet ray passing through the first polarizing element 19.
而且，更包括移動單元16，所述移動單元16使所述第2 偏振元件14及所述受光單元15沿所述光源11的長邊方向移動。 Moreover, a mobile unit 16 is further included, and the mobile unit 16 makes the second unit The polarizing element 14 and the light receiving unit 15 move in the longitudinal direction of the light source 11.
其次，根據附圖，說明本發明的實施方式的偏振光照射裝置1。圖1是表示實施方式的偏振光照射裝置的整體構成的圖，圖2是表示實施方式的偏振光照射裝置的整體構成的框圖，圖3是表示實施方式的偏振光照射裝置的控制裝置的處理的一例的流程圖，圖4是表示實施方式的偏振光照射裝置的控制裝置的處理的另一例的流程圖，圖5是示意性地表示實施方式的偏振光照射裝置的可動部的構成的平面圖。 Next, a polarized light irradiation device 1 according to an embodiment of the present invention will be described with reference to the drawings. 1 is a view showing an overall configuration of a polarized light irradiation device according to an embodiment, FIG. 2 is a block diagram showing an overall configuration of a polarized light irradiation device according to an embodiment, and FIG. 3 is a view showing a control device of the polarized light irradiation device according to the embodiment. FIG. 4 is a flowchart showing another example of the processing of the control device of the polarized light irradiation device according to the embodiment, and FIG. 5 is a view schematically showing the configuration of the movable portion of the polarized light irradiation device according to the embodiment. Floor plan.
圖1所示的實施方式的偏振光照射裝置1是對工件W(圖1中以兩點劃線表示)的表面照射預先設定的振動方向的紫外線UB的裝置，例如，用於液晶面板的配向膜或視角補償薄膜的配向膜等的製造。照射至工件W的表面的紫外線UB的振動方向根據工件W的構造、用途或所要求的規格而預先設定。例如，在所述液晶面板的配向膜用的製造裝置中，優選的是將紫外線UB的振動方向相對於基準方向RD設定在±0.1°以內。而且，偏振光照射裝置1在對工件W照射紫外線UB之前，調整第1偏振元件19的安裝角度，從而調整照射至工件W的紫外線UB的振動方向。再者，將工件W的寬度方向稱為X軸方向，將與X軸方向正交且為工件W的長邊方向稱為Y軸方向，將與Y軸方向及X軸方向正交的方向稱為Z軸方向。在本實施方式中，偏振光照射裝置1以X軸方向為基準方向RD，僅將相對於基準方向RD為±0.1°以內的紫外線 UB照射至工件W。 The polarized light irradiation device 1 of the embodiment shown in FIG. 1 is a device that irradiates the surface of the workpiece W (indicated by a two-dot chain line in FIG. 1) with ultraviolet rays UB in a predetermined vibration direction, for example, for alignment of liquid crystal panels. The production of an alignment film or the like of a film or a viewing angle compensation film. The vibration direction of the ultraviolet ray illuminating the surface of the workpiece W is set in advance according to the structure, use, or required specifications of the workpiece W. For example, in the manufacturing apparatus for the alignment film of the liquid crystal panel, it is preferable that the vibration direction of the ultraviolet ray UB is set within ±0.1° with respect to the reference direction RD. Further, the polarized light irradiation device 1 adjusts the mounting angle of the first polarizing element 19 before irradiating the workpiece W with the ultraviolet ray UB, thereby adjusting the vibration direction of the ultraviolet ray UB irradiated to the workpiece W. In addition, the width direction of the workpiece W is referred to as an X-axis direction, and the longitudinal direction of the workpiece W orthogonal to the X-axis direction is referred to as a Y-axis direction, and the direction orthogonal to the Y-axis direction and the X-axis direction is referred to as a direction orthogonal to the Y-axis direction and the X-axis direction. It is the Z axis direction. In the present embodiment, the polarized light irradiation device 1 uses the X-axis direction as the reference direction RD and only ultraviolet rays within ±0.1° with respect to the reference direction RD. The UB is irradiated to the workpiece W.
在這裏，所謂第1偏振元件19及第2偏振元件14，是指自紫外線UA取出僅在特定方向上振動的偏振成分的紫外線UB的元件，所述紫外線UA是光源11所照射，且一樣地在所有方向上振動。所謂紫外線UA、紫外線UB的振動方向，是指所述紫外線UA、紫外線UB的電場及磁場的振動方向。而且，所謂第1偏振元件19的安裝角度，是指圍繞著軸心P的N方向(圖1中以箭頭表示)的角度、以及圍繞著水平軸Q的L方向(圖1中以箭頭表示)的角度，所述軸心P是自光源11向第1偏振元件19的軸心，所述水平軸Q與光源11的長邊方向平行並且與自光源11向第1偏振元件19的軸心P正交。再者，在本實施方式中，軸心P與Z軸平行，水平軸Q與X軸平行。 Here, the first polarizing element 19 and the second polarizing element 14 are elements that extract ultraviolet rays UB of a polarization component that vibrates only in a specific direction from the ultraviolet rays UA, and the ultraviolet rays UA are irradiated by the light source 11, and the same Vibrate in all directions. The vibration direction of the ultraviolet ray UA and the ultraviolet ray refers to the vibration direction of the electric field and the magnetic field of the ultraviolet ray UA and the ultraviolet ray UB. Further, the mounting angle of the first polarizing element 19 means an angle around the axis P of the axis P (indicated by an arrow in FIG. 1) and an L direction around the horizontal axis Q (indicated by an arrow in FIG. 1). The axis P is the axis from the light source 11 to the first polarizing element 19, and the horizontal axis Q is parallel to the longitudinal direction of the light source 11 and to the axis P of the first polarizing element 19 from the light source 11. Orthogonal. Furthermore, in the present embodiment, the axis P is parallel to the Z axis, and the horizontal axis Q is parallel to the X axis.
偏振光照射裝置1如圖1及圖2所示，包括線狀光源11；第1偏振部12，包括多塊第1偏振元件19(僅圖1所示)；可動部13；第2偏振元件14(僅圖1所示)；受光單元15；移動單元16；以及控制裝置20。光源11是例如，高壓汞燈或金屬鹵化物燈(metal halide lamp)等管型燈，至少包括線狀的發光部。光源11將發光部的長邊方向配置成與圖1中的X軸方向成平行。光源11自線狀的發光部，例如照射波長為200nm至400nm的紫外線UA。光源11所照射的紫外線UA是具有各種振動方向成分的紫外線，即所謂非偏振的紫外線。光源11也可以設為如下構成：使例如能夠照射波長為200nm至400nm的紫外線UA的發光二極體 (light-emitting diode，LED)晶片、鐳射二極體(laser diode)、有機電致發光(electroluminescence，EL)等的小型燈相間隔而配置成直線狀。 As shown in FIGS. 1 and 2, the polarized light irradiation device 1 includes a linear light source 11; the first polarizing portion 12 includes a plurality of first polarizing elements 19 (shown only in FIG. 1); a movable portion 13; and a second polarizing element. 14 (shown only in FIG. 1); light receiving unit 15; moving unit 16; and control device 20. The light source 11 is, for example, a tube type lamp such as a high pressure mercury lamp or a metal halide lamp, and includes at least a linear light emitting portion. The light source 11 arranges the longitudinal direction of the light-emitting portion in parallel with the X-axis direction in Fig. 1 . The light source 11 is irradiated with a linear light-emitting portion, for example, ultraviolet ray having a wavelength of 200 nm to 400 nm. The ultraviolet rays UA irradiated by the light source 11 are ultraviolet rays having various vibration direction components, that is, so-called non-polarized ultraviolet rays. The light source 11 may be configured to enable, for example, a light-emitting diode capable of irradiating ultraviolet rays UA having a wavelength of 200 nm to 400 nm. A small lamp such as a light-emitting diode (LED) wafer, a laser diode, or an organic electroluminescence (EL) is arranged in a straight line at intervals.
而且，在本實施方式中，光源11配置於工件W的上方。此外，在光源11的上方，設置有截面為橢圓形的筒槽狀聚光鏡17。自光源11照射至筒槽狀聚光鏡17的紫外線UA借由筒槽狀聚光鏡17反射而形成為平行光，向工件W照射。 Further, in the present embodiment, the light source 11 is disposed above the workpiece W. Further, above the light source 11, a cylindrical louver 17 having an elliptical cross section is provided. The ultraviolet ray UA irradiated from the light source 11 to the cylindrical condensing mirror 17 is reflected by the cylindrical condensing mirror 17 to form parallel light, and is irradiated to the workpiece W.
第1偏振部12是與光源11相對向而配置，被紫外線UA照射，所述紫外線UA是自光源11照射且借由筒槽狀聚光鏡17而反射。第1偏振部12包括保持構件18及多個第1偏振元件19。保持構件18用於保持多個第1偏振元件19，形成為與光源11大致相等的長度的框狀。保持構件18在內側收納有多個第1偏振元件19。而且，保持構件18在其長邊方向與X軸方向平行的狀態下，借由未圖示的定位機構而定位並固定於工件W與光源11之間。 The first polarizing portion 12 is disposed to face the light source 11 and is irradiated with ultraviolet rays UA which are irradiated from the light source 11 and are reflected by the cylindrical condensing mirror 17 . The first polarizing portion 12 includes a holding member 18 and a plurality of first polarizing elements 19 . The holding member 18 is for holding the plurality of first polarizing elements 19 and is formed in a frame shape having a length substantially equal to that of the light source 11 . The holding member 18 accommodates a plurality of first polarizing elements 19 inside. Further, the holding member 18 is positioned and fixed between the workpiece W and the light source 11 by a positioning mechanism (not shown) in a state where the longitudinal direction thereof is parallel to the X-axis direction.
多個第1偏振元件19並排地配置于沿光源11的長邊方向即沿X軸方向的不同位置。多個第1偏振元件19收納於保持構件18內，被光源11照射紫外線UA。第1偏振元件19如圖5所示，包括框構件19a及線柵偏振元件19b，所述線柵偏振元件19b收納於框構件19a內。框構件19a收納於保持構件18內。線柵偏振元件19b是在石英玻璃等的基板上等間隔地平行配置有多個直線狀的電導體(例如鉻或鋁合金等的金屬線)的元件。電導體的 間距優選的是自光源11照射的紫外線UA的波長的1/3以下。線柵偏振元件19b使自光源11照射的紫外線UA中與電導體的長邊方向平行的偏振成分的大部分反射，並且使與電導體的長邊方向正交的偏振成分通過。再者，在本實施方式中，第1偏振元件19需要將電導體的長邊方向與Y軸平行而配置，從而僅使振動方向為X軸方向的紫外線UB通過。 The plurality of first polarizing elements 19 are arranged side by side at different positions along the longitudinal direction of the light source 11, that is, in the X-axis direction. The plurality of first polarizing elements 19 are housed in the holding member 18, and are irradiated with the ultraviolet rays UA by the light source 11. As shown in FIG. 5, the first polarizing element 19 includes a frame member 19a and a wire grid polarizing element 19b, and the wire grid polarizing element 19b is housed in the frame member 19a. The frame member 19a is housed in the holding member 18. The wire grid polarizing element 19b is an element in which a plurality of linear electric conductors (for example, metal wires such as chromium or aluminum alloy) are arranged in parallel at equal intervals on a substrate such as quartz glass. Electrical conductor The pitch is preferably 1/3 or less of the wavelength of the ultraviolet ray irradiated from the light source 11. The wire grid polarizing element 19b reflects a large part of the polarization component parallel to the longitudinal direction of the electric conductor among the ultraviolet rays UA irradiated from the light source 11, and passes a polarization component orthogonal to the longitudinal direction of the electric conductor. Further, in the present embodiment, the first polarizing element 19 needs to be disposed such that the longitudinal direction of the electric conductor is parallel to the Y-axis, and only the ultraviolet ray UB whose vibration direction is in the X-axis direction passes.
可動部13能夠變更第1偏振元件19的安裝角度。可動部13如圖1所示，包括構件用可動馬達21(相當於構件用可動部)、多個元件用可動馬達22(相當於元件用可動部)及多個法線方向可動馬達23(相當於法線方向可動部)。 The movable portion 13 can change the attachment angle of the first polarizing element 19. As shown in FIG. 1, the movable portion 13 includes a movable motor 21 for a member (corresponding to a movable portion for a member), a plurality of movable motors 22 for a component (corresponding to a movable portion for a component), and a plurality of normal movable motors 23 (corresponding to Movable in the normal direction).
構件用可動馬達21能夠變更保持構件18的圍繞著軸心P的N方向的安裝角度，所述軸心P是與Z軸平行的軸心(相當於自光源向第1偏振元件的軸心)。在保持構件18上安裝有一個構件用可動馬達21。 The member movable motor 21 can change the mounting angle of the holding member 18 in the N direction around the axis P, which is an axis parallel to the Z axis (corresponding to the axis from the light source to the first polarizing element) . A member movable motor 21 is attached to the holding member 18.
多個元件用可動馬達22與第1偏振元件19一一對應，且能夠變更所對應的第1偏振元件19的圍繞著軸心P的N方向的安裝角度。在本實施方式中，如圖5所示，將元件用可動馬達22的輸出軸22a直接安裝於框構件19a上，從而元件用可動馬達22對框構件19a與線柵偏振元件19b一體地變更圍繞著軸心P的N方向的安裝角度。而且，在本實施方式中，第1偏振元件19是線柵偏振元件19b能夠自平行于光源11的位置向圍繞著軸心P的N方向例如在約±1度以下的範圍旋轉。 The plurality of component movable motors 22 are in one-to-one correspondence with the first polarizing elements 19, and the mounting angle of the corresponding first polarizing elements 19 in the N direction around the axis P can be changed. In the present embodiment, as shown in FIG. 5, the output shaft 22a of the component movable motor 22 is directly attached to the frame member 19a, and the component movable motor 22 integrally changes the frame member 19a and the wire grid polarizing element 19b. The mounting angle of the axis P in the N direction. Further, in the present embodiment, the first polarizing element 19 is such that the wire grid polarizing element 19b can be rotated from a position parallel to the light source 11 in a direction around the axis P of the axis P, for example, within about ±1 degree.
多個法線方向可動馬達23與第1偏振元件19一一對應，且能夠變更所對應的第1偏振元件19的圍繞著水平軸Q的L方向的安裝角度，所述水平軸Q與X軸平行。在本實施方式中，法線方向可動馬達23變更線柵偏振元件19b的圍繞著水平軸Q的L方向的安裝角度。 The plurality of normal direction movable motors 23 are in one-to-one correspondence with the first polarizing element 19, and the mounting angle of the corresponding first polarizing element 19 in the L direction around the horizontal axis Q, which is the horizontal axis Q and the X axis, can be changed. parallel. In the present embodiment, the normal direction movable motor 23 changes the attachment angle of the wire grid polarization element 19b around the horizontal axis Q in the L direction.
第2偏振元件14配設於與第1偏振元件19相對向的位置，被通過第1偏振元件19的紫外線UB照射。第2偏振元件14配置於第1偏振部12的下方，且配置于與光源11之間夾著第1偏振部12的位置。而且，第2偏振元件14借由受光側可動部24(圖1所示)而沿圍繞著所述軸心P的N方向旋轉。在本實施方式中，第2偏振元件14形成為被照射如下紫外線UB的大小，所述紫外線UB通過多個第1偏振元件19中的一個第1偏振元件19。第2偏振元件14在石英玻璃等的基板上等間隔地平行配置有多個直線狀的電導體(例如鉻或鋁合金等的金屬線)。電導體的間距優選的是自光源11照射的紫外線UA的波長的1/3以下。第2偏振元件14使通過第1偏振元件19的紫外線UB中與電導體的長邊方向平行的偏振成分的大部分反射，且使與電導體的長邊方向正交的偏振成分通過。 The second polarizing element 14 is disposed at a position facing the first polarizing element 19 and is irradiated with the ultraviolet ray UB passing through the first polarizing element 19 . The second polarizing element 14 is disposed below the first polarizing portion 12 and is disposed at a position where the first polarizing portion 12 is interposed between the light source 11 and the light source 11 . Further, the second polarizing element 14 is rotated in the N direction around the axis P by the light receiving side movable portion 24 (shown in FIG. 1). In the present embodiment, the second polarizing element 14 is formed to be irradiated with a size of the ultraviolet ray UB that passes through one of the plurality of first polarizing elements 19 and the first polarizing element 19 . In the second polarizing element 14 , a plurality of linear electric conductors (for example, metal wires such as chromium or aluminum alloy) are arranged in parallel at equal intervals on a substrate such as quartz glass. The pitch of the electric conductor is preferably 1/3 or less of the wavelength of the ultraviolet ray irradiated from the light source 11. The second polarizing element 14 reflects most of the polarized component parallel to the longitudinal direction of the electric conductor in the ultraviolet ray UB passing through the first polarizing element 19, and passes a polarized component orthogonal to the longitudinal direction of the electric conductor.
受光單元15接收通過第1偏振元件19及第2偏振元件14的紫外線。受光單元15配置於第2偏振元件14的下方。受光單元15向照度計(illuminance meter)25輸出表示所接收的紫外線的資訊，照度計25算出所接收的紫外線的強度，並向控制裝置 20輸出所算出的所接收的紫外線的強度。 The light receiving unit 15 receives the ultraviolet rays that have passed through the first polarizing element 19 and the second polarizing element 14. The light receiving unit 15 is disposed below the second polarizing element 14. The light receiving unit 15 outputs information indicating the received ultraviolet ray to the illuminance meter 25, and the illuminometer 25 calculates the intensity of the received ultraviolet ray and supplies it to the control device. 20 outputs the calculated intensity of the received ultraviolet light.
移動單元16使第2偏振元件14及受光單元15一體地沿光源11的長邊方向移動。移動單元16包含眾所周知的馬達、球頭螺釘(ball screw)及直線導軌(linear guide)等而構成。 The moving unit 16 integrally moves the second polarizing element 14 and the light receiving unit 15 in the longitudinal direction of the light source 11. The moving unit 16 includes a well-known motor, a ball screw, a linear guide, and the like.
控制裝置20對構成偏振光照射裝置1的上述構成要素分別進行控制，使偏振光照射裝置1對工件W進行紫外線UB的照射。而且，控制裝置20在對工件W照射紫外線UB之前，使偏振光照射裝置1進行第1偏振元件19的安裝角度的調整。再者，控制裝置20以未圖示的微處理器(microprocessor)為主體而構成，並與顯示單元、未圖示的操作單元相連接，所述微處理器包括例如由中央處理器(central processing unit，CPU)等所構成的運算處理裝置，唯讀記憶體(read only memory，ROM)、隨機存取記憶體(random accessmemory，RAM)等，所述顯示單元顯示加工動作的狀態，所述操作單元用於操作員(operator)登記加工內容資訊等時。 The control device 20 controls the above-described constituent elements constituting the polarized light irradiation device 1 so that the polarized light irradiation device 1 irradiates the workpiece W with ultraviolet rays UB. Further, the control device 20 causes the polarized light irradiation device 1 to adjust the mounting angle of the first polarizing element 19 before irradiating the workpiece W with the ultraviolet ray UB. Further, the control device 20 is mainly constituted by a microprocessor (not shown), and is connected to a display unit or an operation unit (not shown) including, for example, a central processing unit (central processing). An arithmetic processing device including a unit, a CPU, or the like, a read only memory (ROM), a random access memory (RAM), or the like, wherein the display unit displays a state of a machining operation, the operation The unit is used when an operator registers processing content information and the like.
其次，參照圖3及圖4，說明實施方式的偏振光照射裝置1的控制裝置20的第1偏振元件19的安裝角度調整的處理的一例。再者，安裝角度調整是在如下時候進行：連同保持構件18一起更換了第1偏振部12整體時、或者更換了第1偏振部12的多個第1偏振元件19中的至少一個第1偏振元件19時等。 Next, an example of processing for adjusting the mounting angle of the first polarizing element 19 of the control device 20 of the polarized light irradiation device 1 according to the embodiment will be described with reference to FIGS. 3 and 4 . In addition, the mounting angle adjustment is performed by replacing at least one of the plurality of first polarizing elements 19 of the first polarizing unit 12 with the holding member 18, or replacing the first polarizing element 12 with the holding member 18; Element 19 and so on.
在本實施方式中，安裝角度調整將第1偏振元件19的安裝角度設為僅使如下紫外線UB通過的安裝角度，所述紫外線UB 是以X軸方向為基準方向RD，振動方向相對於基準方向RD為±0.1°以內的紫外線UB。即，在本實施方式中，基準方向RD(圖1中以一點劃線表示)與X軸平行，所述基準方向RD成為通過第1偏振元件19的紫外線UB的振動方向的基準。再者，所謂基準方向RD，是指將第1偏振元件19定位於理想的安裝角度時通過第1偏振元件19的紫外線UB的直線偏振成分(也稱為振動方向)。 In the present embodiment, the mounting angle adjustment is such that the mounting angle of the first polarizing element 19 is an attachment angle at which only the ultraviolet ray UB passes, and the ultraviolet UB is passed. The ultraviolet ray UB is within a range of ±0.1° with respect to the reference direction RD in the X-axis direction as the reference direction RD. In other words, in the present embodiment, the reference direction RD (indicated by a one-dot chain line in FIG. 1) is parallel to the X-axis, and the reference direction RD serves as a reference for the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19. In addition, the reference direction RD refers to a linearly polarized component (also referred to as a vibration direction) of the ultraviolet ray UB passing through the first polarizing element 19 when the first polarizing element 19 is positioned at a desired mounting angle.
首先，當自操作員發出調整動作的指令時，偏振光照射裝置1的控制裝置20開始安裝角度調整的處理。在安裝角度調整的處理中，控制裝置20在圖3所示的步驟ST31中，設為N=1，進入至步驟T32。 First, when an instruction from the operator to adjust the motion is issued, the control device 20 of the polarized light irradiation device 1 starts the process of mounting the angle adjustment. In the process of the installation angle adjustment, the control device 20 sets N=1 in step ST31 shown in FIG. 3, and proceeds to step T32.
在步驟ST32中，控制裝置20在移動單元16上將第2偏振元件14及受光單元15定位於多個第1偏振元件19中位於一端的一個第1偏振元件19的下方。並且，控制裝置20對光源11進行點燈，向第1偏振元件19照射一樣地在所有方向上振動的紫外線UA，並且借由受光側可動部24而使第2偏振元件14旋轉。於是，僅使如下紫外線UB向第2偏振元件14通過，所述紫外線UB是紫外線UA中與第1偏振元件19的線柵偏振元件19b的電導體正交的偏振成分的紫外線UB，即振動方向與第1偏振元件19的線柵偏振元件19b的電導體正交的紫外線UB。而且，第2偏振元件14也僅使如下紫外線通過，所述紫外線是與第1偏振元件19同樣地與電導體正交的偏振成分的紫外線，即振動方向與第2偏振元件14的電導體正交的紫外線。於是，受光單元15僅接收如 下紫外線，所述紫外線是光源11所照射的一樣地在所有方向上振動的紫外線UA中通過第1偏振元件19及第2偏振元件14的紫外線。 In step ST32, the control device 20 positions the second polarizing element 14 and the light receiving unit 15 on the moving unit 16 below one of the plurality of first polarizing elements 19 at one end of the first polarizing element 19. Then, the control device 20 lights the light source 11, and irradiates the first polarizing element 19 with the ultraviolet ray UA that vibrates in the same direction in all directions, and the second polarizing element 14 is rotated by the light receiving side movable portion 24. Then, only the ultraviolet ray UB which is the ultraviolet ray UB of the polarization component orthogonal to the electric conductor of the wire-grid polarizing element 19b of the first polarizing element 19 in the ultraviolet ray UA, that is, the vibration direction, is passed through to the second polarizing element 14 The ultraviolet ray orthogonal to the electric conductor of the wire grid polarizing element 19b of the first polarizing element 19. Further, the second polarizing element 14 also passes only ultraviolet rays which are ultraviolet rays having a polarization component orthogonal to the electric conductor similarly to the first polarizing element 19, that is, the vibration direction and the electric conductor of the second polarizing element 14 are positive. Paying ultraviolet light. Thus, the light receiving unit 15 only receives as In the ultraviolet ray, the ultraviolet ray which passes through the first polarizing element 19 and the second polarizing element 14 in the ultraviolet ray vibrating in all directions as irradiated by the light source 11 is ultraviolet rays.
這時，由於第1偏振元件19僅使紫外線UB通過並且第2偏振元件14在旋轉，因此受光單元15所接收的紫外線的強度與第2偏振元件14的旋轉進行聯動而發生變化，所述紫外線是照度計25向控制裝置20輸出的紫外線。接著，控制裝置20算出受光單元15所接收的紫外線的強度最強的圍繞著軸心P的N方向的第2偏振元件14的位置。接著，控制裝置20一面使第2偏振元件14圍繞著軸心P旋轉，一面算出受光單元15所接收的紫外線的強度最強的第2偏振元件14的位置的自基準方向RD算起的圍繞著軸心P的N方向的旋轉角度。接著，控制裝置20算出受光單元15所接收的紫外線的強度最強的第2偏振元件14的位置的自基準方向RD算起的旋轉角度(即，受光單元15所接收的紫外線的強度最強的第2偏振元件14的方向與基準方向RD之間的角度)，作為基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度。 At this time, since the first polarizing element 19 passes only the ultraviolet ray UB and the second polarizing element 14 rotates, the intensity of the ultraviolet ray received by the light receiving unit 15 changes in conjunction with the rotation of the second polarizing element 14, which is The ultraviolet light that the illuminometer 25 outputs to the control device 20. Next, the control device 20 calculates the position of the second polarizing element 14 in the N direction around the axis P which has the strongest intensity of the ultraviolet light received by the light receiving unit 15. Next, the control device 20 rotates the second polarizing element 14 around the axis P, and calculates the surrounding axis from the reference direction RD of the position of the second polarizing element 14 having the strongest intensity of the ultraviolet light received by the light receiving unit 15 The angle of rotation of the heart P in the N direction. Next, the control device 20 calculates the rotation angle from the reference direction RD of the position of the second polarizing element 14 having the strongest intensity of the ultraviolet light received by the light receiving unit 15 (that is, the second strongest intensity of the ultraviolet light received by the light receiving unit 15) The angle between the direction of the polarizing element 14 and the reference direction RD is an angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19.
並且，控制裝置20按照所述角度的情況，對元件用可動馬達22進行驅動(控制)，以使基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度為±0.1°以內。這樣一來，控制裝置20根據受光單元15所接收的紫外線的強度，算出基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的 角度，對可動部13的元件用可動馬達22進行控制，以使所述角度為±0.1°以內。然後，當基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度達到預先設定的例如0.1°等容許角度以下時，控制裝置20結束所述一個第1偏振元件19的安裝角度調整，進入至步驟ST33。 Further, the control device 20 drives (controls) the component movable motor 22 such that the angle between the reference direction RD and the vibration direction of the ultraviolet ray 216 passing through the first polarizing element 19 is ±0.1° in accordance with the angle. Within. In this way, the control device 20 calculates the reference direction RD and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19 based on the intensity of the ultraviolet light received by the light receiving unit 15. The angle of the movable portion of the movable portion 13 is controlled by the movable motor 22 so that the angle is within ±0.1. Then, when the angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19 reaches a predetermined allowable angle of, for example, 0.1 or less, the control device 20 ends the mounting of the one first polarizing element 19. The angle adjustment is made to proceed to step ST33.
在步驟ST33中，控制裝置20判定是否結束了所有的第1偏振元件19的安裝角度調整，如果尚未結束，則在步驟ST34中設為N=N+1，返回至步驟ST32。接著，控制裝置20對移動單元16進行驅動，將第2偏振元件14及受光單元15定位於另一個第1偏振元件19的下方，與剛才同樣地進行安裝角度調整。這樣一來，控制裝置20重複進行步驟ST32至步驟ST34，直至結束所有的第1偏振元件19的安裝角度調整為止，逐個依次進行多個第1偏振元件19的安裝角度調整。當結束所有的第1偏振元件19的安裝角度調整時，控制裝置20結束安裝角度調整的處理。 In step ST33, the control device 20 determines whether or not the mounting angle adjustment of all the first polarizing elements 19 has been completed. If not, the control unit 20 determines that N=N+1 is set in step ST34, and returns to step ST32. Next, the control device 20 drives the moving unit 16 to position the second polarizing element 14 and the light receiving unit 15 below the other first polarizing element 19, and adjusts the mounting angle in the same manner as before. In this way, the control device 20 repeats steps ST32 to ST34 until the mounting angle adjustment of all the first polarizing elements 19 is completed, and the mounting angle adjustment of the plurality of first polarizing elements 19 is sequentially performed one by one. When the mounting angle adjustment of all the first polarizing elements 19 is completed, the control device 20 ends the process of the mounting angle adjustment.
當結束所有的第1偏振元件19的安裝角度調整時，通過所有的第1偏振元件19的紫外線UB的振動方向與基準方向RD平行，或者所述紫外線UB的振動方向與基準方向RD所成的角度為容許角度以下即±0.1°以下。這樣，控制裝置20根據受光單元15所接收的紫外線的強度，對可動部13的元件用可動馬達22進行控制，以使通過多個第1偏振元件19的來自光源11的紫外線UB的振動方向相對於基準方向RD為±0.1°以內。 When the mounting angle adjustment of all the first polarizing elements 19 is completed, the vibration direction of the ultraviolet rays UB passing through all of the first polarizing elements 19 is parallel to the reference direction RD, or the vibration direction of the ultraviolet rays UB and the reference direction RD are formed. The angle is below the allowable angle, that is, ±0.1° or less. In this way, the control device 20 controls the component movable motor 22 of the movable portion 13 based on the intensity of the ultraviolet light received by the light receiving unit 15 so that the vibration direction of the ultraviolet ray UB from the light source 11 passing through the plurality of first polarizing elements 19 is relatively It is within ±0.1° in the reference direction RD.
而且，在更換了第1偏振部12整體等情況下，當多個第 1偏振元件19的所通過的紫外線UB的振動方向為相互平行時，本實施方式的偏振光照射裝置1對構件用可動馬達21進行控制而進行安裝角度調整，所述多個第1偏振元件19預先收納於保持構件18中。這時，在圖4中的步驟ST41中，控制裝置20在移動單元16上將第2偏振元件14及受光單元15定位於多個第1偏振元件19中任意的第1偏振元件19的下方。並且，控制裝置20對光源11進行點燈，並且使受光側可動部24讓第2偏振元件14旋轉。 Further, when the entire first polarizing unit 12 is replaced, etc., when a plurality of When the vibration direction of the ultraviolet ray UB passing through the polarizing element 19 is parallel to each other, the polarized light irradiation device 1 of the present embodiment controls the member movable motor 21 to adjust the mounting angle, and the plurality of first polarizing elements 19 are adjusted. It is accommodated in the holding member 18 in advance. At this time, in step ST41 in FIG. 4, the control device 20 positions the second polarizing element 14 and the light receiving unit 15 on the moving unit 16 below the arbitrary first polarizing element 19 among the plurality of first polarizing elements 19. Further, the control device 20 lights the light source 11 and causes the light receiving side movable portion 24 to rotate the second polarizing element 14.
接著，控制裝置20算出受光單元15所接收的紫外線的強度最強的圍繞著軸心P的N方向的第2偏振元件14的位置。控制裝置20算出受光單元15所接收的紫外線的強度最強的第2偏振元件14的位置的自基準方向RD算起的圍繞著軸心P的N方向的旋轉角度。控制裝置20將紫外線的強度最強的第2偏振元件14的位置的自基準方向RD算起的旋轉角度，作為基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度。控制裝置20按照所述角度的情況，對構件用可動馬達21進行驅動(控制)，以使基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度為±0.1°以內。並且，當基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度為容許角度以下時，控制裝置20結束安裝角度調整。 Next, the control device 20 calculates the position of the second polarizing element 14 in the N direction around the axis P which has the strongest intensity of the ultraviolet light received by the light receiving unit 15. The control device 20 calculates the rotation angle of the position of the second polarizing element 14 having the strongest intensity of the ultraviolet light received by the light receiving unit 15 from the reference direction RD in the N direction around the axis P. The rotation angle of the position of the second polarizing element 14 having the strongest ultraviolet ray from the reference direction RD is the angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19. The control device 20 drives (controls) the movable motor 21 for the member so that the angle between the reference direction RD and the vibration direction of the ultraviolet ray passing through the first polarizing element 19 is within ±0.1°. Further, when the angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19 is equal to or less than the allowable angle, the control device 20 ends the mounting angle adjustment.
所述構成的偏振光照射裝置1是在第1偏振元件19與受光單元15之間設置第2偏振元件14，並且根據受光單元15所接收的紫外線的強度，控制裝置20對可動部13進行控制。因此， 偏振光照射裝置1借由預先掌握通過第2偏振元件14的紫外線的振動方向等，能夠推測通過第1偏振元件19的紫外線UB的振動方向。因此，偏振光照射裝置1能夠推測通過第1偏振元件19的紫外線UB的振動方向，因此借由對可動部13進行控制，可以使通過多個第1偏振元件19的紫外線UB的振動方向相對於基準方向RD為±0.1°以內。因此，偏振光照射裝置1可以對第1偏振元件19的安裝角度進行調整，以使多個第1偏振元件19的所通過的紫外線UB的振動方向相對於基準方向RD為±0.1°以內。 In the polarized light irradiation device 1 configured as described above, the second polarizing element 14 is provided between the first polarizing element 19 and the light receiving unit 15, and the control device 20 controls the movable portion 13 based on the intensity of the ultraviolet light received by the light receiving unit 15. . therefore, In the polarized light irradiation device 1 , the direction of vibration of the ultraviolet ray passing through the first polarizing element 19 can be estimated by grasping the direction of vibration of the ultraviolet ray passing through the second polarizing element 14 or the like in advance. Therefore, since the polarized light irradiation device 1 can estimate the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19, the vibration direction of the ultraviolet ray UB passing through the plurality of first polarizing elements 19 can be controlled with respect to the movable portion 13 The reference direction RD is within ±0.1°. Therefore, the polarized light irradiation device 1 can adjust the mounting angle of the first polarizing element 19 such that the vibration direction of the ultraviolet ray UB passing through the plurality of first polarizing elements 19 is within ±0.1° with respect to the reference direction RD.
而且，偏振光照射裝置1中，可動部13的元件用可動馬達22能夠變更作為安裝角度的N方向的安裝角度，所述N方向圍繞著自光源11向第1偏振元件19的軸心P。因此，偏振光照射裝置1借由控制裝置20對元件用可動馬達22進行控制，可以使通過多個第1偏振元件19的紫外線UB的振動方向相對於基準方向RD為±0.1°以內。 Further, in the polarized light irradiation device 1, the element movable motor 22 of the movable portion 13 can change the mounting angle in the N direction as the mounting angle around the axis P of the first polarizing element 19 from the light source 11. Therefore, the polarized light irradiation device 1 controls the component movable motor 22 by the control device 20, so that the vibration direction of the ultraviolet ray UB passing through the plurality of first polarizing elements 19 can be within ±0.1° with respect to the reference direction RD.
而且，偏振光照射裝置1借由預先規定通過第2偏振元件的紫外線的振動方向等，可以根據受光單元15所接收的紫外線的強度，容易地算出基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度。因此，偏振光照射裝置1借由對元件用可動馬達22進行控制，可以使通過第1偏振元件19的紫外線UB的振動方向相對於基準方向RD為±0.1°以內。 In addition, the polarized light irradiation device 1 can easily calculate the reference direction RD and the ultraviolet ray passing through the first polarizing element 19 based on the intensity of the ultraviolet ray received by the light receiving unit 15 by the vibration direction of the ultraviolet ray passing through the second polarizing element. The angle formed by the direction of vibration of the UB. Therefore, the polarized light irradiation device 1 can control the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19 within ±0.1° with respect to the reference direction RD by controlling the movable motor 22 for the element.
偏振光照射裝置1將受光單元15所接收的紫外線最強的第2偏振元件14的自基準方向RD算起的旋轉角度，作為通過第 1偏振元件19的紫外線UB的振動方向。因此，偏振光照射裝置1可以容易且準確地推測通過第1偏振元件19的紫外線UB的振動方向。因此，可期待能夠對第1偏振元件19的安裝角度進行調整，以使多個第1偏振元件19的所通過的紫外線UB的振動方向相對於基準方向RD為±0.1°以內。 The polarization irradiation device 1 sets the rotation angle of the second polarizing element 14 having the strongest ultraviolet ray received by the light receiving unit 15 from the reference direction RD as the passage angle. The direction of vibration of the ultraviolet ray ur of the polarizing element 19. Therefore, the polarized light irradiation device 1 can easily and accurately estimate the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19. Therefore, it is expected that the mounting angle of the first polarizing element 19 can be adjusted so that the vibration direction of the ultraviolet ray UB passing through the plurality of first polarizing elements 19 is within ±0.1° with respect to the reference direction RD.
偏振光照射裝置1包括移動單元16，所述移動單元16使第2偏振元件14及受光單元15沿光源11的長邊方向移動，因此無須對應於各第1偏振元件19的各個而設置第2偏振元件14及受光單元15。因此，偏振光照射裝置1可以使第2偏振元件14及受光單元15的數量少於多個第1偏振元件19，可以針對多個第1偏振元件19，利用一組第2偏振元件14及受光單元15對第1偏振元件19的安裝角度進行調整。因此，偏振光照射裝置1可以抑制零件個數的增加或大型化。 The polarized light irradiation device 1 includes a moving unit 16 that moves the second polarizing element 14 and the light receiving unit 15 in the longitudinal direction of the light source 11. Therefore, it is not necessary to provide the second corresponding to each of the first polarizing elements 19. The polarizing element 14 and the light receiving unit 15 are provided. Therefore, the polarized light irradiation device 1 can make the number of the second polarizing elements 14 and the light receiving unit 15 smaller than the plurality of first polarizing elements 19, and can use the second polarizing element 14 and the light receiving unit for the plurality of first polarizing elements 19. The unit 15 adjusts the mounting angle of the first polarizing element 19. Therefore, the polarized light irradiation device 1 can suppress an increase in the number of parts or an increase in size.
其次，根據附圖，說明本發明的實施方式的變形例1~變形例3的偏振光照射裝置1。圖6是示意性地表示實施方式的變形例1的偏振光照射裝置的可動部的構成的平面圖，圖7是示意性地表示實施方式的變形例2的偏振光照射裝置的可動部的構成的平面圖，圖8(a)及圖8(b)是示意性地表示實施方式的變形例3的偏振光照射裝置的可動部的構成的平面圖。再者，在圖6至圖8(b)中，對與所述實施方式相同的部分標注相同符號，並省略說明。 Next, a polarized light irradiation device 1 according to Modification 1 to Modification 3 of the embodiment of the present invention will be described with reference to the drawings. FIG. 6 is a plan view schematically showing a configuration of a movable portion of a polarized light irradiation device according to a first modification of the embodiment, and FIG. 7 is a view schematically showing a configuration of a movable portion of a polarized light irradiation device according to a second modification of the embodiment. FIG. 8(a) and FIG. 8(b) are plan views schematically showing a configuration of a movable portion of a polarized light irradiation device according to a third modification of the embodiment. In addition, in FIGS. 6 to 8(b), the same portions as those in the above-described embodiments are denoted by the same reference numerals, and description thereof will be omitted.
在變形例1中，如圖6所示，在元件用可動馬達22與第 1偏振元件19的框構件19a之間設置有至少1個以上的齒輪61。在變形例1中，借由小齒輪(pinion)62與齒輪61相咬合，而利用元件用可動馬達22對第1偏振元件19的安裝角度進行調整，所述小齒輪62安裝於元件用可動馬達22的輸出軸22a上。 In Modification 1, as shown in FIG. 6, the movable motor 22 and the component are used. At least one or more gears 61 are provided between the frame members 19a of the polarizing element 19. In the first modification, the pinion 62 is engaged with the gear 61, and the mounting angle of the first polarizing element 19 is adjusted by the component movable motor 22, and the pinion 62 is attached to the movable motor for the component. 22 is on the output shaft 22a.
在變形例2中，如圖7所示，在第1偏振元件19的框構件19a上設置有測微計(micrometer)71等的推入螺釘。在變形例2中，借由元件用可動馬達22，對測微計71進行推或拉，而對第1偏振元件19的安裝角度進行調整。 In the second modification, as shown in FIG. 7, a push-in screw such as a micrometer 71 is provided on the frame member 19a of the first polarizing element 19. In the second modification, the micrometer 71 is pushed or pulled by the component movable motor 22, and the mounting angle of the first polarizing element 19 is adjusted.
在變形例3中，如圖8(a)及圖8(b)所示，在第1偏振元件19的框構件19a的外緣設置有齒條(rack)81。在變形例3中，在齒條81上咬合著小齒輪62，所述小齒輪62安裝於元件用可動馬達22的輸出軸22a上。在變形例3中，借由元件用可動馬達22，借由元件用可動馬達22使小齒輪62旋轉，借此對第1偏振元件19的安裝角度進行調整。而且，線柵偏振元件19b的方向也可以設為相對於圖1的實施方式，旋轉90度的方向，可以根據偏振光照射裝置1的用途而適時設定。 In the third modification, as shown in FIGS. 8(a) and 8(b), a rack 81 is provided on the outer edge of the frame member 19a of the first polarizing element 19. In the third modification, the pinion gear 62 is engaged with the rack 81, and the pinion gear 62 is attached to the output shaft 22a of the component movable motor 22. In the third modification, the component movable motor 22 rotates the pinion gear 62 by the movable motor 22, whereby the mounting angle of the first polarizing element 19 is adjusted. Further, the direction of the wire grid polarizing element 19b may be a direction rotated by 90 degrees with respect to the embodiment of Fig. 1, and may be set as appropriate according to the use of the polarized light irradiation device 1.
其次，根據附圖，說明本發明的實施方式的變形例4的偏振光照射裝置1。圖9是表示實施方式的變形例4的偏振光照射裝置的控制裝置的處理的一例的流程圖。 Next, a polarized light irradiation device 1 according to a fourth modification of the embodiment of the present invention will be described with reference to the drawings. FIG. 9 is a flowchart showing an example of processing of a control device of a polarized light irradiation device according to a fourth modification of the embodiment.
在變形例4中，在安裝角度調整的處理中，控制裝置20在圖9所示的步驟ST91中，一面對光源11進行點燈，借由受光 側可動部24使第2偏振元件14旋轉，一面使第2偏振元件14及受光單元15自第1偏振部12的一端的下方向另一端的下方移動。並且，控制裝置20與第2偏振元件14及受光單元15的移動進行聯動，而被輸入資訊，所述資訊表示通過多個第1偏振元件19中的每一個且通過第2偏振元件14的紫外線的強度。並且，控制裝置20算出所述基準方向RD與通過第1偏振元件19各個的紫外線UB的振動方向所成的角度。控制裝置20算出基準方向RD與通過所有的第1偏振元件19的紫外線UB的振動方向所成的角度時，進入至步驟ST92。 In the modification 4, in the process of the mounting angle adjustment, the control device 20 lights up toward the light source 11 in step ST91 shown in FIG. 9, by receiving light. The side movable portion 24 rotates the second polarizing element 14 while moving the second polarizing element 14 and the light receiving unit 15 from the lower end of the other end of the first polarizing portion 12 to the lower end. Further, the control device 20 is associated with the movement of the second polarizing element 14 and the light receiving unit 15, and receives information indicating the ultraviolet rays passing through each of the plurality of first polarizing elements 19 and passing through the second polarizing element 14. Strength of. Further, the control device 20 calculates an angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through each of the first polarizing elements 19. When the control device 20 calculates the angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through all of the first polarizing elements 19, the process proceeds to step ST92.
在步驟ST92中，控制裝置20按照所述角度的情況，對各元件用可動馬達22進行驅動(控制)，以使基準方向RD與通過第1偏振元件19的紫外線UB的振動方向所成的角度為±0.1°以內。接著，進入至步驟ST93。 In step ST92, the control device 20 drives (controls) the movable motor 22 for each element in accordance with the angle, so that the reference direction RD and the vibration direction of the ultraviolet ray UB passing through the first polarizing element 19 are at an angle. Within ±0.1°. Next, the process proceeds to step ST93.
在步驟ST93中，控制裝置20一面借由受光側可動部24使第2偏振元件14旋轉，一面使第2偏振元件14及受光單元15自第1偏振部12的一端的下方向另一端的下方移動。接著，控制裝置20判定基準方向RD與通過各第1偏振元件19的紫外線UB的振動方向所成的角度是否為預先設定的例如0.1度等容許角度以下，如果存在超過容許角度的第1偏振元件19，則將第2偏振元件14及受光單元15定位於超過容許角度的第1偏振元件19的下方，根據受光單元15所接收的紫外線的強度，對元件用可動馬達22進行控制，以使所述角度為容許角度以下。這樣一來，控制 裝置20進行所有的第1偏振元件19的安裝角度調整。變形例1~變形例4的偏振光照射裝置1可獲得與所述實施方式相同的效果。 In step ST93, the control device 20 rotates the second polarizing element 14 by the light-receiving side movable portion 24, and causes the second polarizing element 14 and the light-receiving unit 15 to be lower than the other end of the first polarizing portion 12 from the lower end. mobile. Next, the control device 20 determines whether or not the angle between the reference direction RD and the vibration direction of the ultraviolet ray UB passing through each of the first polarizing elements 19 is equal to or less than a predetermined allowable angle of, for example, 0.1 degrees, and if there is a first polarizing element that exceeds the allowable angle. 19, the second polarizing element 14 and the light receiving unit 15 are positioned below the first polarizing element 19 exceeding the allowable angle, and the movable motor 22 for the element is controlled according to the intensity of the ultraviolet light received by the light receiving unit 15 to The angle is below the allowable angle. In this way, control The device 20 performs mounting angle adjustment of all of the first polarizing elements 19. The polarized light irradiation device 1 of the first modification to the fourth modification can obtain the same effects as those of the above-described embodiment.
在所述實施方式中，揭示了進行第1偏振元件19的圍繞著軸心P的N方向的安裝角度的調整的示例，但是在本發明中，也可以對法線方向可動馬達23進行控制而對第1偏振元件19的L方向的安裝角度進行調整，所述L方向圍繞著與光源11的長邊方向平行的水平軸Q。作為對第1發光元件的19的圍繞著水平軸Q的L方向的安裝角度進行調整的方法，例如有如下方法，即，在第1偏振元件19的圖中的長邊部的中央部，以使第1偏振元件能夠沿方向L旋轉的方式而設置旋轉軸(無圖示)等，利用法線方向可動馬達23使第1偏振元件19的短邊部沿Z軸方向移動。或者，沿第1偏振元件19的至少一個短邊部，以使第1偏振元件能夠沿方向L旋轉的方式而設置旋轉軸(無圖示)，利用法線方向可動馬達23使第1偏振元件19的另一個短邊部沿Z軸方向移動，借此也可以調整L方向的安裝角度。例如，當多個第1偏振元件19的面方向能夠分別相對於工件W的面方向而確保平行度時，也可以自可動部13中省略法線方向可動馬達23(法線方向可動部)。而且，此外還可以省略構件用可動馬達21(構件用可動部)，而將可動部13設為只有多個元件用可動馬達22(元件用可動部)的構成。這時，可以簡化偏振光照射裝置1的構成。 In the above embodiment, an example of adjusting the mounting angle of the first polarizing element 19 around the axis P in the N direction is disclosed. However, in the present invention, the normal direction movable motor 23 may be controlled. The mounting angle of the first polarizing element 19 in the L direction is adjusted, and the L direction surrounds the horizontal axis Q parallel to the longitudinal direction of the light source 11. As a method of adjusting the mounting angle of the first light-emitting element 19 around the horizontal axis Q in the L direction, for example, there is a method in which the central portion of the long side portion in the drawing of the first polarizing element 19 is A rotation axis (not shown) or the like is provided so that the first polarization element can be rotated in the direction L, and the short side portion of the first polarization element 19 is moved in the Z-axis direction by the normal direction movable motor 23. Alternatively, a rotation axis (not shown) is provided along at least one short side portion of the first polarizing element 19 so that the first polarizing element can rotate in the direction L, and the first polarizing element is moved by the normal direction motor 23 in the normal direction. The other short side portion of 19 moves in the Z-axis direction, whereby the mounting angle in the L direction can also be adjusted. For example, when the plane directions of the plurality of first polarizing elements 19 can be parallelized with respect to the surface direction of the workpiece W, the normal direction movable motor 23 (normal direction movable portion) may be omitted from the movable portion 13. In addition, the movable motor 21 (member movable portion) may be omitted, and the movable portion 13 may be configured to have only a plurality of component movable motors 22 (component movable portions). At this time, the configuration of the polarized light irradiation device 1 can be simplified.
而且，在所述實施方式中，一面使第2偏振元件14旋轉， 一面利用受光單元15接收紫外線。然而，在本發明中，還可以不使第2偏振元件14旋轉，而利用受光單元15接收紫外線。這時，控制裝置20只要借由預先掌握通過第2偏振元件14的紫外線的振動方向或強度等，而根據受光單元15所接收的紫外線的強度，推測通過第1偏振元件19的紫外線UB的振動方向即可。 Further, in the above embodiment, the second polarizing element 14 is rotated, The ultraviolet light is received by the light receiving unit 15 at one side. However, in the present invention, it is also possible to receive ultraviolet rays by the light receiving unit 15 without rotating the second polarizing element 14. In this case, the control device 20 estimates the vibration direction of the ultraviolet ray passing through the first polarizing element 19 based on the intensity of the ultraviolet light received by the light receiving unit 15 by grasping the vibration direction or intensity of the ultraviolet light passing through the second polarizing element 14 in advance. Just fine.
此外，在所述實施方式中，第1偏振元件19是使如下紫外線UB通過，所述紫外線UB的振動方向相對於X軸方向(基準方向RD)為±0.1°以內。但是，在本發明中，通過第1偏振元件19的紫外線UB的振動方向並沒有特別限定，也可以根據工件W的商品編號或種類進行適當變更。 Further, in the above-described embodiment, the first polarizing element 19 passes the ultraviolet ray UB whose vibration direction is within ±0.1° with respect to the X-axis direction (reference direction RD). However, in the present invention, the direction of vibration of the ultraviolet ray UB passing through the first polarizing element 19 is not particularly limited, and may be appropriately changed depending on the product number or type of the workpiece W.
以上已說明本發明的若干實施方式及變形例，但是所述實施方式及變形例是作為示例起提示作用，並不打算限定發明的範圍。所述實施方式及變形例可以通過其他各種方式來實施，在沒有脫離發明主旨的範圍內，可以進行各種省略、置換、變更。所述實施方式及變形例包含于發明的範圍或主旨內，與此同樣地，包含於權利要求書中所記載的發明及其同等的範圍內。 The embodiments and the modifications of the present invention have been described above, but the embodiments and the modifications are intended to be illustrative, and are not intended to limit the scope of the invention. The above-described embodiments and modifications can be implemented in various other forms, and various omissions, substitutions and changes can be made without departing from the scope of the invention. The invention and the modifications are intended to be included within the scope of the invention and the scope of the invention.
1‧‧‧偏振光照射裝置 1‧‧‧Polarized light irradiation device
11‧‧‧光源 11‧‧‧Light source
12‧‧‧第1偏振部 12‧‧‧1st polarizing section
13‧‧‧可動部 13‧‧‧movable department
14‧‧‧第2偏振元件 14‧‧‧2nd polarizing element
15‧‧‧受光單元 15‧‧‧Light-receiving unit
16‧‧‧移動單元 16‧‧‧Mobile unit
17‧‧‧筒槽狀聚光鏡 17‧‧‧Cylinder concentrator
18‧‧‧保持構件 18‧‧‧Retaining components
19‧‧‧第1偏振元件 19‧‧‧1st polarizing element
19a‧‧‧框構件 19a‧‧‧Box components
19b‧‧‧線柵偏振元件 19b‧‧‧ Wire grid polarizing element
20‧‧‧控制裝置 20‧‧‧Control device
21‧‧‧構件用可動馬達(構件用可動部) 21‧‧‧ movable motor for components (movable part for components)
22‧‧‧元件用可動馬達(元件用可動部) 22‧‧‧Moving motor for components (movable part for components)
23‧‧‧法線方向可動馬達 23‧‧‧Normal direction movable motor
24‧‧‧受光側可動部 24‧‧‧Light-receiving side movable part
25‧‧‧照度計 25‧‧‧ illuminance meter
M、N、L‧‧‧方向 M, N, L‧‧ Directions
P‧‧‧軸心 P‧‧‧ Axis
Q‧‧‧水平軸 Q‧‧‧ horizontal axis
RD‧‧‧基準方向 RD‧‧‧ benchmark direction
UA、UB‧‧‧紫外線 UA, UB‧‧ UV
W‧‧‧工件 W‧‧‧Workpiece
X、Y、Z‧‧‧軸 X, Y, Z‧‧‧ axes
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| Application Number | Priority Date | Filing Date | Title |
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| JP2012273804A JP6201310B2 (en) | 2012-12-14 | 2012-12-14 | Polarized light irradiation device |
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| Publication Number | Publication Date |
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| TW201423170A true TW201423170A (en) | 2014-06-16 |
| TWI565978B TWI565978B (en) | 2017-01-11 |
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| TW102129147A TWI565978B (en) | 2012-12-14 | 2013-08-14 | Polarized light irradiation device |
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| JP (1) | JP6201310B2 (en) |
| CN (1) | CN103869543B (en) |
| TW (1) | TWI565978B (en) |
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| TWI678584B (en) * | 2015-09-18 | 2019-12-01 | 日商東芝照明技術股份有限公司 | Polarized light irradiation device |
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| JP5862616B2 (en) * | 2013-07-17 | 2016-02-16 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| JP2016064378A (en) * | 2014-09-25 | 2016-04-28 | 東芝ライテック株式会社 | Light irradiation device and light irradiation method |
| US20160231176A1 (en) * | 2015-02-05 | 2016-08-11 | Polarization Solutions, Llc | Light irradiation device having polarization measuring mechanism |
| JP6240654B2 (en) * | 2015-05-06 | 2017-11-29 | ウィア・コーポレーション | Optical alignment device |
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| US6243199B1 (en) * | 1999-09-07 | 2001-06-05 | Moxtek | Broad band wire grid polarizing beam splitter for use in the visible wavelength region |
| US6532111B2 (en) * | 2001-03-05 | 2003-03-11 | Eastman Kodak Company | Wire grid polarizer |
| US6874899B2 (en) * | 2002-07-12 | 2005-04-05 | Eastman Kodak Company | Apparatus and method for irradiating a substrate |
| JP4568064B2 (en) * | 2004-09-28 | 2010-10-27 | 株式会社 日立ディスプレイズ | Optical anisotropic axis measuring device |
| JP4506412B2 (en) * | 2004-10-28 | 2010-07-21 | ウシオ電機株式会社 | Polarizing element unit and polarized light irradiation device |
| JP4610368B2 (en) * | 2005-02-22 | 2011-01-12 | 大日本印刷株式会社 | Manufacturing apparatus for optical elements for liquid crystal display devices |
| JP2006323060A (en) * | 2005-05-18 | 2006-11-30 | Ushio Inc | Polarized-light irradiating device |
| JP5935546B2 (en) * | 2012-07-02 | 2016-06-15 | 東芝ライテック株式会社 | Polarized light irradiation device |
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| TWI678584B (en) * | 2015-09-18 | 2019-12-01 | 日商東芝照明技術股份有限公司 | Polarized light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI565978B (en) | 2017-01-11 |
| CN103869543B (en) | 2018-06-29 |
| JP2014119566A (en) | 2014-06-30 |
| CN103869543A (en) | 2014-06-18 |
| JP6201310B2 (en) | 2017-09-27 |
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