TW201406369A - Decomposable apparatus and methods for fabricating same - Google Patents

Abstract

The invention provides decomposing apparatus which comprises a fist sub-component and a first micro device comprising a decomposable material, wherein the sub-component comprises a drug, a medical kit, a micro-disease detection system, or an auto-navigation system. Also within the invention are methods for fabricating such apparatus.

Description

可降解器械及其製造方法 Degradable device and method of manufacturing same

本發明是有關於一種器械，且特別是有關於一種可降解器械。 This invention relates to an apparatus, and more particularly to a degradable apparatus.

【交互參照文獻】 [Inter-referenced literature]

本專利申請要求2011年8月2日提交的美國專利申請號13/196,622的優先權，在此藉由引用將其全部內容整合併入本文。 The present application claims priority to U.S. Patent Application Serial No. 13/196,622, filed on Aug.

許多當前和未來的醫療應用中涉及各種類型的在體內的(體內)醫療器械或設備應用。這種醫療器械或設備包括但不限於疾病檢測，藥物傳輸載體，外科手術設備，和用於綜合治療的特殊設備。對於這類醫療器械或設備在使用之後能夠在體內分解、降解或被驅散是十分必要的。 Many current and future medical applications involve various types of in vivo (in vivo) medical devices or device applications. Such medical devices or devices include, but are not limited to, disease detection, drug delivery vehicles, surgical devices, and special devices for integrated treatment. It is necessary for such medical devices or devices to be decomposed, degraded or dissipated in the body after use.

以單一的可生物降解(biodegradable)的具有生物相容性的聚合物(天然發生的、後來改性的或純合成的)為基礎的器械或器件一直延用至今。很多可降解特性限制了原材料的使用。由於化學穩定性的原因，金屬和無機材料往往不使用在這些器械或器件中。結果導致無機或金屬材料的機械穩定性或強度沒有得到所需的利用。 Devices or devices based on a single biodegradable biocompatible polymer (naturally occurring, later modified or purely synthetic) have been used to date. Many degradable properties limit the use of raw materials. Metal and inorganic materials are often not used in these devices or devices due to chemical stability. As a result, the mechanical stability or strength of the inorganic or metallic material is not obtained as desired.

在另一方面，有時，體內應用的醫療器械或器件的尺寸可以是幾個毫米(或幾個立方毫米的體積)大小。對於相對較大的器械降解到分子等級也是最可取的。然而，許多材料在體內不能降解到分子等級(例如，幾埃大小)。對於一個先進的功能強大的醫 療器械來說，即使有些材料可以是降解到小分子等級，但使其所有用到的材料都很好的降解到分子等級是很困難的。比如，有些材料在單獨使用時可以在體內的某些液體中降解，但當它們作為醫療器械的一部分使用時卻不能降解。另外，即使某些醫療器械尺寸已經達到最小，但是想驅散它也並不容易。因此，隨著對能進行微觀操作及相關的小型化的醫療器械和器件的需增加，如何消除或降解這類醫療器械和器件變得越來越重要，並提出了重大挑戰。 On the other hand, sometimes the size of a medical device or device for in vivo application may be a few millimeters (or a volume of several cubic millimeters). It is also preferable to degrade the relatively large device to the molecular level. However, many materials do not degrade to molecular levels (eg, a few angstroms in size) in vivo. For an advanced and powerful doctor For therapeutic devices, even if some materials can be degraded to a small molecular level, it is difficult to degrade all the materials used to the molecular grade. For example, some materials can degrade in certain fluids in the body when used alone, but they do not degrade when used as part of a medical device. In addition, even if some medical devices have reached the minimum size, it is not easy to disperse it. Therefore, as the demand for medical devices and devices capable of micromanipulation and related miniaturization increases, how to eliminate or degrade such medical devices and devices becomes more and more important and poses a major challenge.

例如，在疾病檢測和治療過程中，在某些特定情況下，需要醫療器械能在人類體內解體以繼續治療。傳統醫學療法使用具有相對長期、可控地和按比例釋放功能的藥物，以治療疾病。有些治療使用可降解的材料製造體內應用的醫療器械。但是，具有降解能力的材料的選擇是有限的。某些材料，例如玻璃或陶瓷，因為它們是不能降解的材料所以不能在製造這類器件的過程中被使用。 For example, during disease detection and treatment, in certain specific situations, medical devices need to be disintegrated in the human body to continue treatment. Traditional medical therapies use drugs with relatively long-term, controlled, and proportional release functions to treat disease. Some treatments use degradable materials to make medical devices for in vivo applications. However, the choice of materials with degradability is limited. Certain materials, such as glass or ceramics, cannot be used in the manufacture of such devices because they are non-degradable materials.

有一些新發展的療法，旨在實現相同的目的。藉由干擾與癌症或腫瘤生長所需要的特殊標記分子，進行靶向治療。顯微手術機器人能夠注入到人體的目標區域中治療疾病。 There are some newly developed therapies designed to achieve the same purpose. Targeted therapy is performed by interfering with the specific marker molecules required for cancer or tumor growth. Microsurgical robots can be injected into the target area of the body to treat disease.

檢測儀器也可以放置到人體內進行各種檢測。 The test instrument can also be placed in the human body for various tests.

然而，傳統的和新開發的檢測方法和治療方法面臨多重困難，如體內不同類型的醫療器械使用後的降解問題；治療過程中副產物的去除問題，如藥物載體或微型機器人；控制藥物適時釋 放的問題。有時，像小型化檢測儀這類醫療器械很難從人體中去除。這些缺點呼籲能夠克服上述存在問題的新的可降解器械，該器械不僅克服了存在的問題，而且也提高醫療檢測、藥物釋放和手術方面的精確度、安全性和特異性。 However, traditional and newly developed detection methods and treatment methods face multiple difficulties, such as degradation of different types of medical devices after use in the body; removal of by-products during treatment, such as drug carriers or micro-robots; Put the problem. Sometimes medical devices like miniaturized detectors are difficult to remove from the human body. These shortcomings call for new degradable instruments that overcome the above-mentioned problems, which not only overcome the problems, but also improve the accuracy, safety and specificity of medical testing, drug release and surgery.

本發明大體上涉及一類新穎的可降解器械，它採用最先進的微電子技術和製程將類似積木的構建塊和/或子部件與可降解材料進行整合。 The present invention generally relates to a novel class of degradable devices that incorporate building blocks and/or sub-assemblies of similar building blocks with degradable materials using state of the art microelectronics and processes.

一方面，本發明提供的醫療器械、微型器件、醫療儀器以及藥物載體(統稱為「器械」)，包括多個構建塊，這些構建塊至少有一個包括一種可降解並可導致所有構建塊(或器械)分解成更小的片或分子(例如，小至0.1微米)的材料。由於表面積大大增加，降解的微米或奈米級顆粒表現出完全不同于降解前宏觀物體的化學或物理性質，它們的化學性質更活躍更容易降解。例如，大小為100微米×100微米的塊可以降解成為0.1微米×0.1微米的小塊。構建塊的降解(或器械的分解)可以被觸發啟動，例如，藉由與之接觸的具有特定屬性(例如，酸性或離子強度)溶液、氣體或固體，或一個外部信號(例如，一個化學、機械、物理或磁信號)，或藉由存儲在器械中的媒介物或能量，或藉由與周圍物質(如血液或胃酸)的化學反應。本發明涉及多種新穎的方法和創新型的小型化的醫療器械，能夠更高效的更廣泛的應用于目前及未來的體內醫療器械領域，實現更多的設計選擇、處理能力和更多的材料在體內的醫療應用等。 In one aspect, the present invention provides medical devices, microdevices, medical devices, and drug carriers (collectively referred to as "devices"), including a plurality of building blocks, at least one of which includes a degradable and can cause all building blocks (or The device) breaks down into smaller pieces or molecules (eg, as small as 0.1 microns). Due to the greatly increased surface area, degraded micron or nanoscale particles exhibit chemical or physical properties that are completely different from macroscopic objects prior to degradation, and their chemical nature is more active and more susceptible to degradation. For example, a block of size 100 microns x 100 microns can be degraded into small pieces of 0.1 micron x 0.1 microns. Degradation of the building block (or decomposition of the device) can be triggered to initiate, for example, by contact with a solution having a specific property (eg, acidic or ionic strength), a gas or solid, or an external signal (eg, a chemical, Mechanical, physical or magnetic signals), either by means of a medium or energy stored in the device, or by chemical reaction with surrounding substances such as blood or stomach acid. The present invention relates to a variety of novel methods and innovative miniaturized medical devices that can be more efficiently and widely used in current and future in vivo medical device fields, enabling more design choices, processing capabilities, and more materials. Medical applications in the body, etc.

本發明涉及的器械具有寬範圍的設計、結構、功能和特點。上文提到的能夠分解或降解的器械包括，但不限於，電壓比較器、四點探針、計算器、邏輯電路、記憶體單元、微型切割器、微型錘、微型護罩、微型染料、微型梢、微型刀、微型針、微型集線器、微型鑷子、微型光吸收器、微型反射鏡、微型輪、微型濾波器、微型斬波器、微型粉碎機、微型泵、微型吸收器、微型信號檢測器、微型鑽孔機、微型抽吸器、微型測試儀、微型容器、微型注射器、信號發射器、信號發生器、摩擦感測器、電荷感測器、溫度感測器、硬度檢測器、聲波發生器、光波發生器、微型加熱器、熱發生器、微型致冷器和電荷發生器。在除了本發明的方法中，這些器械也可以藉由其他在本領域中已知或在其他地方描述了的方法來製造，例如，PCT/US2010/049298、PCT/US2011/024672、美國申請號12/416,280、PCT/US2011/042637和PCT/US2010/041001，所有這些內容藉由引用併入本文。 The device of the present invention has a wide range of designs, structures, functions, and features. Instruments capable of decomposing or degrading as mentioned above include, but are not limited to, voltage comparators, four-point probes, calculators, logic circuits, memory cells, micro-cutters, micro-hammers, micro-shims, micro-dyes, Miniature tips, micro-knives, micro-needle, micro-hubs, micro tweezers, micro-light absorbers, micro-mirrors, micro-wheels, micro-filters, micro choppers, micro-grinders, micro-pumps, micro-absorbers, miniature signal detection , micro-drills, micro-aspirator, micro-testers, micro-containers, micro-injectors, signal transmitters, signal generators, friction sensors, charge sensors, temperature sensors, hardness detectors, sound waves Generators, lightwave generators, microheaters, heat generators, micro-coolers and charge generators. In addition to the methods of the present invention, these devices can also be manufactured by other methods known in the art or described elsewhere, for example, PCT/US2010/049298, PCT/US2011/024672, U.S. Application No. 12 / 416, 280, PCT/US2011/042637 and PCT/US2010/041001, all of which are incorporated herein by reference.

在一些例子中，這些醫療器械的組成部分中至少有一個包括一種不可降解的材料。這類材料的例子包括不可降解的聚合物，如聚四氟乙烯(PTFE)、聚氯乙烯(PVC)、聚醯胺(PA，尼龍)、聚乙烯(PE)、聚碸、聚醚碸、聚丙烯(PP)、矽橡膠、聚苯乙烯、聚碳酸酯、聚酯、聚丙烯腈(PAN)、聚醯亞胺、聚醚醚酮(PEEK)、聚甲基丙烯酸甲酯(PMMA)、聚乙酸乙烯酯(PVAC)、聚苯醚、纖維素及其衍生物、聚環氧丙烷(PPO)，聚偏二氟乙烯(PVDF)、聚丁烯和它們的混合物，金屬或金屬化合物(例如，含有鈣、鎂、鋁、銅、鎢、銀的化合物或合金)，不可降解的無機鹽或化合物(例如，矽、氧化矽、磷酸根的化合物或磷酸鹽、氮化矽、碳化矽、氮氧化矽、氧化物，)，陶瓷(例如磷酸鈣陶瓷)，玻璃，有機材 料，生物材料或它們的複合物。儘管這些材料是不降解的，然而令人驚奇的發現是，在本發明的醫療器械中包含這些材料可增強此類醫療器械的穩定性和強度，使它們適用于一些完全由可降解材料構成的醫療器械不適用的情況。事實上，可以相信，本發明提出的將這些不可降解的材料引入在體內降解的醫療器械中是首創。此外，這種材料的引入大大增加了用於製造體內的可降解醫療器械的材料選擇性，這些器械一直以來完全由可降解材料構成(所以這些器械的物理性質如機械穩定性或強度是無法令人滿意的)。 In some instances, at least one of the components of the medical device includes a non-degradable material. Examples of such materials include non-degradable polymers such as polytetrafluoroethylene (PTFE), polyvinyl chloride (PVC), polyamidamine (PA, nylon), polyethylene (PE), polyfluorene, polyether oxime, Polypropylene (PP), ruthenium rubber, polystyrene, polycarbonate, polyester, polyacrylonitrile (PAN), polyimide, polyetheretherketone (PEEK), polymethyl methacrylate (PMMA), Polyvinyl acetate (PVAC), polyphenylene ether, cellulose and its derivatives, polypropylene oxide (PPO), polyvinylidene fluoride (PVDF), polybutylene and mixtures thereof, metals or metal compounds (eg a compound or alloy containing calcium, magnesium, aluminum, copper, tungsten, or silver, a non-degradable inorganic salt or compound (for example, a compound of cerium, cerium oxide, or phosphate or phosphate, cerium nitride, cerium carbide, nitrogen) Cerium oxide, oxide,), ceramic (such as calcium phosphate ceramic), glass, organic Materials, biological materials or their composites. Although these materials are not degradable, it has been surprisingly found that the inclusion of these materials in the medical device of the present invention enhances the stability and strength of such medical devices, making them suitable for use entirely of degradable materials. The case where the medical device is not applicable. In fact, it is believed that the present invention proposes to introduce these non-degradable materials into medical devices that degrade in vivo. In addition, the introduction of this material has greatly increased the material selectivity of the degradable medical devices used to manufacture the body, which have been constructed entirely of degradable materials (so the physical properties of these devices, such as mechanical stability or strength, cannot be Satisfied).

在一些例子中，用於組建本發明涉及的醫療器械的構建塊中有至少兩種材料，其中至少有一種是可降解的，這種材料的降解導致了整個構建塊的分解，因此能使這類器械降解至小塊或分子等級。 In some examples, there are at least two materials for constructing a medical device according to the present invention, at least one of which is degradable, and degradation of the material causes decomposition of the entire building block, thereby enabling Classes of devices degrade to small pieces or molecular grades.

在一些例子中，本發明提供了一種可降解器械，每個器械包括第一子部件和帶有可降解材料的第一微器件，子部件包括藥物、醫療裝備、微型疾病檢測系統或自動導航系統。 In some examples, the present invention provides a degradable device, each device comprising a first sub-assembly and a first micro-device with a degradable material, the sub-component comprising a drug, medical device, micro-disease detection system or auto-navigation system .

可降解材料包括聚(丙交酯-共-乙交酯)(PLGA)、聚(丙交酯)(PLA)、聚(L-乳酸)(PLLA)、聚(D，L-乳酸)(PDLLA)、聚乙醇酸(PGA)、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白質、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸(PMAA)、聚丙烯酸、聚乙二醇、藻酸鹽、膠原、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸鹽化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化 矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合物。在其他一些例字中，可降解性的材料包括聚(丙交酯-共-乙交酯)、聚(丙交酯)、聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、人工蛋白、聚氨基酸、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、藻酸鹽、膠原蛋白、明膠、透明質酸、有機材料、生物材料或它們的複合物。 Degradable materials include poly(lactide-co-glycolide) (PLGA), poly(lactide) (PLA), poly(L-lactic acid) (PLLA), poly(D,L-lactic acid) (PDLLA) ), polyglycolic acid (PGA), polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid (PMAA) , polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polysilicon, nitriding Bismuth, bismuth oxynitride, carbonization Niobium, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites thereof. In other examples, degradable materials include poly(lactide-co-glycolide), poly(lactide), poly(L-lactic acid), poly(D,L-lactic acid), poly Glycolic acid, polylactic acid, polyanhydride, poly(o-ether), artificial protein, polyamino acid, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid, polyacrylic acid, polyethylene glycol , alginate, collagen, gelatin, hyaluronic acid, organic materials, biological materials or complexes thereof.

在某些例子中，可降解材料由可降解的材料和其他微粒化的不可降解的材料組合而成。這些其他材料(如玻璃或陶瓷)被製成很小的尺寸。在這類複合材料中，可降解材料導致了複合材料的解體，並使微顆粒材料靈活可動。儘管這種尺寸的微顆粒不能降解，但它們在發揮作用以後可以藉由廢棄物系統無害地排出人體。 In some instances, the degradable material is a combination of a degradable material and other micronized, non-degradable materials. These other materials (such as glass or ceramic) are made in very small sizes. In such composites, the degradable material causes the composite to disintegrate and render the microparticulate material flexible. Although micro-particles of this size cannot be degraded, they can be harmlessly discharged into the human body by the waste system after they function.

在某些例子中，上述可降解材料可以藉由外部信號觸發啟動降解。該信號可以包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 In some instances, the above degradable material can be triggered to initiate degradation by an external signal. The signals may include electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biophysical, Bioelectromechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical, or Their combination.

在某些例子中，電特性是表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻 率；光學特性包括光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射；化學性質包括pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度；物理性質包括密度、形狀、體積或表面積；生物特性包括表面形狀、表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振；機械性能包括內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性，上述屬性可以是靜態的、動態的或持續變化的。 In some cases, the electrical properties are surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties of chromosomal DNA, capacitance or impedance; Nature refers to temperature or vibration frequency Rate; optical properties include light absorption, light transmission, light reflection, photoelectric properties, brightness or fluorescence emission; chemical properties including pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, reaction rate , oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, local charge density due to the nature and position of oxygen atoms or molecules, local ion concentration due to the nature and position of oxygen atoms and/or molecules, Local electric field density due to the nature and location of oxygen atoms and/or molecules, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, biological additives that trigger enhanced signal response, Chemicals that increase detection sensitivity, biochemicals that increase detection sensitivity, biological additives that increase detection sensitivity, or bonding strength; physical properties include density, shape, volume, or surface area; biological properties include surface shape, surface area, surface charge, surface Biological characteristics, surface chemistry, pH, electrolyte, ionic strength, electrical resistivity, cell concentration, biological, electrical, physical or chemical properties of biomarkers or solutions related to properties; acoustic properties including frequency, velocity of sound waves, spectral distribution of audio and intensity, sound intensity, acoustics Absorption or acoustic resonance; mechanical properties include internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility. The above properties can be static, Dynamic or continuously changing.

某些例子中，上述可降解材料可在一個特定時間降解。比如，特定時間的範圍可以從一秒到幾個星期(例如，從5秒到10天、從30秒至1週的範圍內、從2分鐘到4天、從5分鐘至3天、從小時至3天)。 In some instances, the above degradable materials can degrade at a particular time. For example, the specific time can range from one second to several weeks (eg, from 5 seconds to 10 days, from 30 seconds to 1 week, from 2 minutes to 4 days, from 5 minutes to 3 days, from hours) Up to 3 days).

某些例子中，可降解材料與特定的物質接觸時發生降解，例如，血液或膽汁酸或低pH的體液，觸發氣體，一定酸度的固體。 這樣的物質通常能相當有效的誘導可降解材料的化學降解。 In some instances, the degradable material degrades upon contact with a particular substance, for example, blood or bile acids or low pH body fluids, triggering gases, solids of certain acidity. Such materials are generally quite effective in inducing chemical degradation of degradable materials.

某些例子中，第一子部件整合於第一微型器件內部或附著於第一微器件的表面。 In some examples, the first sub-assembly is integrated within or attached to the surface of the first micro device.

某些例子中，第一子部件包括一種藥物。 In some examples, the first subcomponent includes a drug.

某些例子中，可降解材料可以在人體環境內降解。 In some instances, the degradable material can degrade in the human environment.

某些例子中，每個器械還包括至少另外一個微型器件，。在一些例子中，子部件可以被定位在兩個微型器件之間(例如夾在兩個微型器件之間形成三明治結構)。 In some instances, each device also includes at least one other micro device. In some examples, the sub-components can be positioned between two micro devices (eg, sandwiched between two micro devices to form a sandwich structure).

另一方面，本發明提供了一種輸運奈米藥物的器械，每個器械包括奈米藥物和帶有可降解材料的微型器件。 In another aspect, the invention provides a device for transporting nanomedicine, each device comprising a nanomedicine and a microdevice with a degradable material.

某些例子中，上述可降解材料包括聚(丙交酯-共-乙交酯)、聚(丙交酯)、聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、聚氨基酸、設計人工蛋白、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、褐藻膠、膠原蛋白、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸酯化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合物。 In some examples, the above degradable materials include poly(lactide-co-glycolide), poly(lactide), poly(L-lactic acid), poly(D,L-lactic acid), polyglycolic acid, Polylactic acid, polyanhydride, poly(o-ether), polyamino acid, artificial protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid, polyacrylic acid, polyethylene glycol, brown algae Gum, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, cerium, polycrystalline germanium, tantalum nitride, cerium oxynitride, tantalum carbide, aluminum , aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites thereof.

在某些例子中，可降解材料由可降解的材料和其他微粒化的 不可降解的材料組合而成。這些其他材料(如玻璃或陶瓷)被製成很小的尺寸。儘管這種尺寸的微顆粒不能降解，但它們在發揮作用以後可以藉由廢棄物系統無害地排出人體。 In some instances, the degradable material is made of degradable materials and other micronized A combination of non-degradable materials. These other materials (such as glass or ceramic) are made in very small sizes. Although micro-particles of this size cannot be degraded, they can be harmlessly discharged into the human body by the waste system after they function.

在某些例子中，上述可降解材料可以藉由外部信號觸發啟動降解。該信號可以包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 In some instances, the above degradable material can be triggered to initiate degradation by an external signal. The signals may include electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biophysical, Bioelectromechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical, or Their combination.

在某些例子中，電特性是表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻率；光學特性包括光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射；化學性質包括pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度；物理性質包括密度、形狀、體積或表面積；生物特性包括表面形狀、 表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振；機械性能包括內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性，上述屬性可以是靜態的、動態的或持續變化的。 In some cases, the electrical properties are surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties of chromosomal DNA, capacitance or impedance; Properties refer to temperature or vibration frequency; optical properties include light absorption, light transmission, reflection of light, photoelectric properties, brightness or fluorescence emission; chemical properties including pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate , reaction energy, reaction rate, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, local charge density due to the nature and position of oxygen atoms or molecules, due to the nature and location of oxygen atoms and/or molecules Local ion concentration caused, local electric field density due to the nature and location of oxygen atoms and/or molecules, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, trigger-enhanced Signal-responsive biological additives, chemicals that increase detection sensitivity, and improved detection sensitivity Biological chemicals, biological additives that increase detection sensitivity, or bonding strength; physical properties include density, shape, volume, or surface area; biological properties include surface shape, Surface area, surface charge, surface biological properties, surface chemistry, pH, electrolyte, ionic strength, electrical resistivity, cell concentration, biological, electrical, physical or chemical properties of the biomarker or solution associated with the property; acoustic properties including frequency, Sound wave velocity, audio and intensity spectral distribution, sound intensity, acoustic absorption or acoustic resonance; mechanical properties including internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity , plasticity or compressibility, the above properties can be static, dynamic or continuously changing.

某些例子中，上述可降解材料可在一個特定時間降解。比如，可降解時間的範圍可以從一秒到幾個星期(例如，從1秒到2週、從5秒至1週的範圍內、從1分鐘到4天、從20分鐘到1週、從3小時至10天)。 In some instances, the above degradable materials can degrade at a particular time. For example, the degradable time can range from one second to several weeks (eg, from 1 second to 2 weeks, from 5 seconds to 1 week, from 1 minute to 4 days, from 20 minutes to 1 week, from 3 hours to 10 days).

某些例子中，奈米藥物整合於微器件內部。 In some instances, nanomedicine is integrated into the microdevice.

某些例子中，器械內部還包括不止一種奈米藥物。 In some instances, the device also includes more than one type of nanomedicine.

某些例子中，器械還包括至少另外一個微型器件，其帶有可降解材料。 In some instances, the device also includes at least one other micro device with a degradable material.

某些例子中，至少兩種奈米藥物整合於至少兩種微型器件。 In some instances, at least two nano drugs are integrated into at least two micro devices.

某些例子中，器械還包括醫療設備、微型疾病檢測系統或自動導航系統。 In some instances, the device also includes medical equipment, a miniature disease detection system, or an automated navigation system.

例如，微疾病檢測系統檢測到的一種疾病，然後發送外部信 號給上述可降解材料觸發降解。該信號可以包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 For example, a disease detected by the micro-disease detection system, and then sent an external letter The above-mentioned degradable materials trigger degradation. The signals may include electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biophysical, Bioelectromechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical, or Their combination.

在某些例子中，電特性是表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻率；光學特性包括光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射；化學性質包括pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度；物理性質包括密度、形狀、體積或表面積；生物特性包括表面形狀、表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振；機械性 能包括內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性，上述屬性可以是靜態的、動態的或持續變化的。 In some cases, the electrical properties are surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties of chromosomal DNA, capacitance or impedance; Properties refer to temperature or vibration frequency; optical properties include light absorption, light transmission, reflection of light, photoelectric properties, brightness or fluorescence emission; chemical properties including pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate , reaction energy, reaction rate, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, local charge density due to the nature and position of oxygen atoms or molecules, due to the nature and location of oxygen atoms and/or molecules Local ion concentration caused, local electric field density due to the nature and location of oxygen atoms and/or molecules, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, trigger-enhanced Signal-responsive biological additives, chemicals that increase detection sensitivity, and improved detection sensitivity Biochemicals, biological additives that increase detection sensitivity, or bonding strength; physical properties include density, shape, volume, or surface area; biological properties including surface shape, surface area, surface charge, surface biological properties, surface chemistry, pH Value, electrolyte, ionic strength, electrical resistivity, cell concentration, biological, electrical, physical or chemical properties of the biomarker or solution associated with the property; acoustic properties including frequency, velocity of sound waves, spectral distribution of audio and intensity, sound intensity, acoustic absorption Oral resonance; mechanical Can include internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility. The above properties can be static, dynamic or continuously changing. .

在某些例子中，自動導航系統將器械導航至病變部位，器械在病變部位進行治療。 In some instances, the automated navigation system navigates the device to the lesion and the instrument is treated at the lesion.

在其他方面，本發明涉及的器械用於藥物傳輸，每個器械包括一個第一種藥物，一個包括了一種封裝第一種藥物的第一可降解材料的內部微器件，一個第二種藥物和一個包括了一種封裝第二種藥物的第二可降解材料的外部微器件，第一種藥物在內部微器件之中，第二種藥物置於內部微器件和外部微器件之間。 In other aspects, the invention relates to a device for drug delivery, each device comprising a first drug, an internal micro device comprising a first degradable material encapsulating a first drug, a second drug and An external microdevice comprising a second degradable material encapsulating a second drug, the first drug being in the internal micro device and the second drug being placed between the internal micro device and the external micro device.

某些例子中，第一種藥物和第二種藥物可以是相同的。 In some instances, the first drug and the second drug may be the same.

可降解材料包括聚(丙交酯-共-乙交酯)(PLGA)、聚(丙交酯)(PLA)、聚(L-乳酸)(PLLA)、聚(D，L-乳酸)(PDLLA)、聚乙醇酸(PGA)、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白質、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸(PMAA)、聚丙烯酸、聚乙二醇、藻酸鹽、膠原、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸鹽化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合物。在某些例子中，可降解材料由可降解的材料和其他微粒化的不可降解的材料組合而成。這些其他材料(如玻璃或陶瓷)被製成很小的尺寸。儘管這種尺寸的微顆粒不能降解，但它們在發 揮作用以後可以藉由廢棄物系統無害地排出人體。 Degradable materials include poly(lactide-co-glycolide) (PLGA), poly(lactide) (PLA), poly(L-lactic acid) (PLLA), poly(D,L-lactic acid) (PDLLA) ), polyglycolic acid (PGA), polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid (PMAA) , polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polysilicon, nitriding Niobium, niobium oxynitride, tantalum carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites thereof. In some instances, the degradable material is a combination of a degradable material and other micronized, non-degradable materials. These other materials (such as glass or ceramic) are made in very small sizes. Although microparticles of this size cannot be degraded, they are After the action, the human body can be discharged harmlessly by the waste system.

外部信號觸發內部微器件和外部微器件中的可降解材料的降解。該信號可以包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The external signal triggers degradation of the degradable material in the internal micro device and the external micro device. The signals may include electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biophysical, Bioelectromechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical, or Their combination.

例如，電特性是表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻率；光學特性包括光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射；化學性質包括pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度；物理性質包括密度、形狀、體積或表面積；生物特性包括表面形狀、表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生 物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振；機械性能包括內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性，上述屬性可以是靜態的、動態的或持續變化的。 For example, electrical properties are surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties of chromosomal DNA, capacitance or impedance; thermal properties refer to temperature Or vibrational frequency; optical properties include light absorption, light transmission, reflection of light, photoelectric properties, brightness or fluorescence emission; chemical properties including pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, Reaction rate, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, local charge density due to the nature and position of oxygen atoms or molecules, local ions due to the nature and position of oxygen atoms and/or molecules Concentration, local electric field density due to the nature and location of oxygen atoms and/or molecules, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal responses, biochemical additives that trigger enhanced signal responses, and organisms that trigger enhanced signal responses Additives, chemicals that improve detection sensitivity, and organisms that increase detection sensitivity Chemicals, biological additives that increase detection sensitivity, or bonding strength; physical properties include density, shape, volume, or surface area; biological properties including surface shape, surface area, surface charge, surface biological properties, surface chemistry, pH, electrolytes , ionic strength, electrical resistivity, cell concentration, properties related to biomarkers or solutions Physical, electrical, physical or chemical properties; acoustic properties include frequency, velocity of sound waves, spectral distribution of audio and intensity, sound intensity, acoustic absorption or acoustic resonance; mechanical properties including internal pressure, hardness, flow rate, viscosity, shear strength, pull Tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility, the above properties may be static, dynamic or continuously changing.

某些例子中，上述可降解材料可在一個特定時間降解，如從幾秒到幾週的時間。 In some instances, the above degradable materials can degrade at a particular time, such as from a few seconds to a few weeks.

內部微器件和外部微器件中的可降解材料可以同時或不同時降解。 The degradable materials in the internal micro devices and external micro devices can be degraded simultaneously or at different times.

器械還包括醫療裝備、微型疾病檢測系統或自動導航系統，他們整合於內部或外部微器件。例如，微疾病檢測系統檢測到的一種疾病，然後發送外部信號給上述可降解材料觸發降解。該信號可以包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。電特性是表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻率；光學特性包括光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射；化學性質包括pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、 氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度；物理性質包括密度、形狀、體積或表面積；生物特性包括表面形狀、表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振；機械性能包括內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性，上述屬性可以是靜態的、動態的或持續變化的。 The device also includes medical equipment, micro-disease detection systems or automated navigation systems that are integrated into internal or external micro-devices. For example, a disease detected by a micro-disease detection system then sends an external signal to the above-described degradable material to trigger degradation. The signals may include electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biophysical, Bioelectromechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical, or Their combination. Electrical properties are surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties, capacitance or impedance of chromosomal DNA; thermal properties refer to temperature or vibration Frequency; optical properties include light absorption, light transmission, light reflection, photoelectric properties, brightness or fluorescence emission; chemical properties including pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, reaction rate , Oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, local charge density due to the nature and position of oxygen atoms or molecules, local ion concentration due to the nature and position of oxygen atoms and/or molecules, due to Local electric field density of oxygen atoms and/or molecular properties and locations, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, biological additives that trigger enhanced signal response, enhance Chemicals that detect sensitivity, biochemicals that increase detection sensitivity, biological additives that increase detection sensitivity, or bonding strength; physical properties include density, shape, volume, or surface area; biological properties include surface shape, surface area, surface charge, surface organisms Characteristics, surface chemistry, pH, electrolytes, ionic strength, electrical resistivity, cell concentration, biological, electrical, physical or chemical properties of biomarkers or solutions related to properties; acoustic properties including frequency, velocity of sound waves, audio and intensity Spectrum distribution, sound intensity, acoustics Absorption or acoustic resonance; mechanical properties include internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility. The above properties can be static, Dynamic or continuously changing.

某些例子中，當微型器件接受到微型疾病檢測系統的信號時觸發內部或外部器件的材料的降解。 In some instances, the micro device triggers degradation of the material of the internal or external device when it receives a signal from the micro-disease detection system.

某些例子中，自動導航系統將器械導航至病變部位，器械在病變部位提供治療。 In some instances, the automated navigation system navigates the device to the lesion and the instrument provides treatment at the lesion.

另一方面本發明涉及一種可降解醫療器械的製造方法。每一種方法包括以下步驟：基板製備；可選擇性地澱積襯墊材料；向基板澱積第一材料，該第一材料是可降解的；圖案化第一材料，在第一材料之層中創建一個凹陷區域；向基板和第一材料澱積第 二材料，第二材料可以不同於第一材料；平坦化或回蝕刻第二材料並停止於第一材料；可選擇性地重複上述過程形成一層至少包含兩種材料的層，其中至少一種是可降解的材料，用以形成多個器件；然後去除基板。 In another aspect, the invention relates to a method of making a degradable medical device. Each method comprises the steps of: substrate preparation; selectively depositing a liner material; depositing a first material onto the substrate, the first material being degradable; patterning the first material in a layer of the first material Creating a recessed area; depositing a first substrate and a first material a second material, the second material may be different from the first material; flattening or etch back the second material and stopping at the first material; the above process may be selectively repeated to form a layer comprising at least two materials, at least one of which may be Degraded material to form multiple devices; then the substrate is removed.

本發明還涉及可降解器械的製造方法。每一種方法包括以下步驟：基板製備；可選擇性地澱積襯墊材料；向基板澱積第一材料，該第一材料是可降解的；在第一材料上澱積光阻，使其曝光於紫外線、可見光、電磁波、電子束或離子束，顯影光阻以形成特定的圖形；用留下的光阻作為遮罩蝕刻第一材料，形成特定的形貌，然後去除留下的光阻；向基板和第一材料澱積第二材料，第二材料可以不同於第一材料；平坦化或回蝕刻第二材料並停止於第一材料；重複上述過程形成至少包含兩種材料的層，其中至少一種是可降解材料，用以形成多個器件；然後去除基板。 The invention also relates to a method of making a degradable device. Each method comprises the steps of: preparing a substrate; selectively depositing a liner material; depositing a first material on the substrate, the first material being degradable; depositing a photoresist on the first material to expose the film Irradiating the photoresist to form a specific pattern in ultraviolet light, visible light, electromagnetic wave, electron beam or ion beam; etching the first material with the remaining photoresist as a mask to form a specific topography, and then removing the remaining photoresist; Depositing a second material to the substrate and the first material, the second material may be different from the first material; planarizing or etch back the second material and stopping at the first material; repeating the above process to form a layer comprising at least two materials, wherein At least one is a degradable material to form a plurality of devices; then the substrate is removed.

某些例子中，基板包括矽、氧化物、多晶矽、藍寶石、磷酸鹽化合物、鋯化合物或鈣的化合物。 In some examples, the substrate comprises a compound of cerium, oxide, polycrystalline germanium, sapphire, a phosphate compound, a zirconium compound, or calcium.

某些例子中，光阻(光致抗蝕劑)包括甲基丙烯酸、丙烯酸、α-(三氟甲基)丙烯酸樹脂、降冰片烯、乙烯基或具氟代醇的苯乙烯單體。 In some examples, the photoresist (photoresist) includes methacrylic acid, acrylic acid, alpha-(trifluoromethyl)acrylic resin, norbornene, vinyl or a styrene monomer having a fluoroalcohol.

某些例子中，第一材料包括氮化矽、碳化矽、氧氮化矽、氧化鋁、金屬(鋁合金、銅、銅合金和鎢)和半導體。 In some examples, the first material includes tantalum nitride, tantalum carbide, tantalum oxynitride, aluminum oxide, metals (aluminum alloy, copper, copper alloy, and tungsten) and a semiconductor.

某些例子中，具有特定波長的光可以是可見的或不可見的。 In some instances, light having a particular wavelength may be visible or invisible.

在某些情況下，第二材料也可以是可降解的。 In some cases, the second material may also be degradable.

上述第一可降解材料包括聚(丙交酯-共-乙交酯)(PLGA)、聚(丙交酯)(PLA)、聚(L-乳酸)(PLLA)、聚(D，L-乳酸)(PDLLA)、聚乙醇酸(PGA)、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白質、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸(PMAA)、聚丙烯酸、聚乙二醇、藻酸鹽、膠原、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸鹽化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合物。 The above first degradable materials include poly(lactide-co-glycolide) (PLGA), poly(lactide) (PLA), poly(L-lactic acid) (PLLA), poly(D,L-lactic acid) (PDLLA), polyglycolic acid (PGA), polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid (PMAA), polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polycrystalline germanium , tantalum nitride, niobium oxynitride, tantalum carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites thereof.

在某些例子中，可降解材料由可降解的材料和其他微粒化的不可降解的材料組合而成。這些其他材料(如玻璃或陶瓷)被製成很小的尺寸。儘管這種尺寸的微顆粒不能降解，但它們在發揮作用以後可以藉由廢棄物系統無害地排出人體。 In some instances, the degradable material is a combination of a degradable material and other micronized, non-degradable materials. These other materials (such as glass or ceramic) are made in very small sizes. Although micro-particles of this size cannot be degraded, they can be harmlessly discharged into the human body by the waste system after they function.

上述第二可降解材料包括聚(丙交酯-共-乙交酯)(PLGA)、聚(丙交酯)(PLA)、聚(L-乳酸)(PLLA)、聚(D，L-乳酸)(PDLLA)、聚乙醇酸(PGA)、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白質、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸(PMAA)、聚丙烯酸、聚乙二醇、藻酸鹽、膠原、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸鹽化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料 或它們的複合物。 The above second degradable materials include poly(lactide-co-glycolide) (PLGA), poly(lactide) (PLA), poly(L-lactic acid) (PLLA), poly(D,L-lactic acid) (PDLLA), polyglycolic acid (PGA), polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid (PMAA), polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polycrystalline germanium , tantalum nitride, niobium oxynitride, tantalum carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials Or their complex.

在某些例子中，可降解材料由可降解的材料和其他微粒化的不可降解的材料組合而成。這些其他材料(如玻璃或陶瓷)被製成很小的尺寸。儘管這種尺寸的微顆粒不能降解，但它們在發揮作用以後可以藉由廢棄物系統無害地排出人體。 In some instances, the degradable material is a combination of a degradable material and other micronized, non-degradable materials. These other materials (such as glass or ceramic) are made in very small sizes. Although micro-particles of this size cannot be degraded, they can be harmlessly discharged into the human body by the waste system after they function.

在某些例子中，上述可降解材料可以藉由外部信號啟動觸發降解。該信號可以包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 In some instances, the above degradable material can be triggered to initiate degradation by an external signal. The signals may include electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biophysical, Bioelectromechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical, or Their combination.

在某些例子中，電特性是表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻率；光學特性包括光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射；化學性質包括pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號 回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度；物理性質包括密度、形狀、體積或表面積；生物特性包括表面形狀、表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振；機械性能包括內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性，上述屬性可以是靜態的、動態的或持續變化的。 In some cases, the electrical properties are surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties of chromosomal DNA, capacitance or impedance; Properties refer to temperature or vibration frequency; optical properties include light absorption, light transmission, reflection of light, photoelectric properties, brightness or fluorescence emission; chemical properties including pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate , reaction energy, reaction rate, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, local charge density due to the nature and position of oxygen atoms or molecules, due to the nature and location of oxygen atoms and/or molecules Local ion concentration caused, local electric field density due to the nature and location of oxygen atoms and/or molecules, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, trigger-enhanced signal Responsive biological additives, chemicals that increase detection sensitivity, biochemicals that increase detection sensitivity, biological additives that increase detection sensitivity, or bonding strength; physical properties include density, shape, volume, or surface area; biological properties including surface shape, surface area , surface charge, surface biological properties, surface chemistry, pH, electrolytes, ionic strength, electrical resistivity, cell concentration, properties of biomarkers or biological, electrical, physical or chemical properties of the solution; acoustic properties including frequency, sound waves Velocity, audio and intensity spectral distribution, sound intensity, acoustic absorption or acoustic resonance; mechanical properties including internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, Plasticity or compressibility, the above properties can be static, dynamic or continuously changing.

某些例子中，上述可降解材料可在一個特定時間降解，如從幾秒到幾週的時間。 In some instances, the above degradable materials can degrade at a particular time, such as from a few seconds to a few weeks.

某些例子中，第二材料可以藉由化學拋光、機械拋光或化學機械拋光來平坦化。 In some examples, the second material can be planarized by chemical polishing, mechanical polishing, or chemical mechanical polishing.

某些例子中，蝕刻包括溼式蝕刻、乾式蝕刻和氣相蝕刻。 In some examples, etching includes wet etching, dry etching, and vapor phase etching.

某些例子中，製造方法包括以下步驟的重複：蝕刻現有材料、澱積另一種材料、平坦化已澱積材料、形成至少包括兩層的可降解器械。 In some examples, the method of fabrication includes repeating the steps of etching an existing material, depositing another material, planarizing the deposited material, and forming a degradable device comprising at least two layers.

本發明另一個方面提供用於製造可降解器械的方法，每一個都包括以下步驟：基板製備；可選擇性地澱積一層薄膜材料作為犧牲層，它可以在後續製程中被去除用以將器械與基板分離；向 基板澱積第一材料，第一材料是可降解的；利用微電子技術圖案化第一材料，在第一材料上形成凹陷區域；向第一材料和基板上澱積第二材料，其中，第二材料不同於第一材料；平坦化以除去第一材料上的第二材料，平坦化步驟終止於第一材料；任選地重複圖案化，澱積和平坦化上述一種或多種材料產生器械，每種材料和之前澱積的材料是不同的；可以藉由上文描述的澱積第一材料、圖案化第一材料、澱積第二材料、平坦化第二材料的步驟在同一基板上製備多個附加器件；去除可選的犧牲薄層將器械及附加器件同基板分離。 Another aspect of the invention provides a method for making a degradable device, each comprising the steps of: substrate preparation; selectively depositing a film material as a sacrificial layer that can be removed in a subsequent process for use in the device Separated from the substrate; Depositing a first material, the first material being degradable; patterning the first material by microelectronics to form a recessed region on the first material; depositing a second material on the first material and the substrate, wherein The second material is different from the first material; planarizing to remove the second material on the first material, the planarization step terminating at the first material; optionally repeating patterning, depositing and planarizing the one or more material generating devices described above, Each material is different from the previously deposited material; it can be prepared on the same substrate by the steps of depositing the first material, patterning the first material, depositing the second material, and planarizing the second material as described above. Multiple additional devices; removing the optional sacrificial layer separates the instrument and additional devices from the substrate.

本發明另一個方面提供用於製造可降解器械的方法，每一個都包括以下步驟：基板製備；可選擇性地澱積一層薄膜材料作為犧牲層，它可以在後續步驟中被去除用以將器械與基板分離；向基板澱積第一材料，第一材料是可降解的；利用微電子技術圖案化第一材料，在第一材料上形成凹陷區域；向第一材料和基板上澱積第二材料，其中，第二材料不同於第一材料；平坦化以除去第一材料上的第二材料，平坦化步驟終止於第一材料；對一種或一種以上的附加材料重複上述圖案化、澱積、平坦化步驟以形成附加形貌(如一種或一種以上結構複雜的功能單元，例如，一個包括電晶體、引線、互連線的電路)於是產生了可降解器械，其中一種或一種以上的附加材料是不同於已澱積材料的。重複上述澱積、圖案化、平坦化步驟，製備一種或一種以上的附加器件，它們可以和器械相連或不相連；去除可選的犧牲薄層使器械和附加器件與基板分離。 Another aspect of the invention provides a method for making a degradable device, each comprising the steps of: substrate preparation; selectively depositing a film material as a sacrificial layer, which can be removed in a subsequent step for use in the device Separating from the substrate; depositing a first material on the substrate, the first material being degradable; patterning the first material by microelectronics to form a recessed region on the first material; depositing a second onto the first material and the substrate a material, wherein the second material is different from the first material; planarizing to remove the second material on the first material, the planarization step terminating at the first material; repeating the patterning, deposition, and the one or more additional materials The planarization step to form an additional topography (such as one or more structurally complex functional units, such as a circuit including a transistor, a lead, an interconnect), thereby producing a degradable device, one or more of which are added The material is different from the material that has been deposited. The above deposition, patterning, and planarization steps are repeated to prepare one or more additional devices that may or may not be attached to the device; the optional sacrificial layer is removed to separate the device and the additional device from the substrate.

上述製造方法也可應用PCT/US2011/042637中描述的微電子 技術。 The above manufacturing method can also apply the microelectronics described in PCT/US2011/042637 technology.

本文涉及的「可降解材料」是指在生物體內(如人體)能夠降解的材料。可以用「可分解材料」代替。 As used herein, "degradable material" refers to a material that is degradable in an organism (such as a human body). It can be replaced by "decomposable material".

如本文所用的「部件」或「子部件」或「微器件」或「微型器件」通常是指一種或多種材料藉由微電子製程或技術製成的器件。一般，器件越複雜所需的材料就越複雜。這些器件包括但不僅限於，比較器、四點探針、計算器、邏輯設計電路、記憶體單元、微型切割器、微型錘、微型護罩、微型染料、微型梢、微型刀、微型針、微型集線器、微型鑷子、微型光吸收器、微型反射鏡、微型輪、微型濾波器、微型斬波器、微型粉碎機、微型泵、微型容器、微型信號檢測器、微型型鑽孔機、微型抽吸器、微型測試儀、微型容器、微型射器、信號發射器、信號發生器、摩擦感測器、電荷感測器、溫度感測器、硬度檢測器、聲波發電機、光波發生器、微型加熱器、熱發生器、微型製冷器和電荷發生器。 As used herein, "component" or "subcomponent" or "microdevice" or "microdevice" generally refers to a device made of one or more materials by microelectronics processes or techniques. In general, the more complex the device, the more complex the material is. These devices include, but are not limited to, comparators, four-point probes, calculators, logic design circuits, memory cells, micro-cutter, micro-hammer, micro-shield, micro-dye, micro-tip, micro-knife, micro-needle, miniature Hubs, micro dice, micro-light absorbers, micro mirrors, micro-wheels, micro-filters, micro choppers, micro-grinders, micro-pumps, micro-containers, micro-signal detectors, micro-drills, micro-suction , micro testers, micro-containers, micro-projectors, signal transmitters, signal generators, friction sensors, charge sensors, temperature sensors, hardness detectors, sonic generators, lightwave generators, micro-heating , heat generators, micro-refrigerators and charge generators.

「光阻」是指用於表面圖案化的光敏材料。例如，在蝕刻過程中可以用作硬遮罩。 "Photoresist" means a photosensitive material used for surface patterning. For example, it can be used as a hard mask during etching.

本文涉及的「藥物」指能夠消除疾病或降低疾病嚴重程度的有治療和藥物效果的化學或生物元素。例如，藥物包括但不僅限於小分子藥物或大分子藥物如蛋白質。 Reference herein to "drug" refers to a therapeutic or medicinal chemical or biological element that is capable of eliminating or reducing the severity of the disease. For example, drugs include, but are not limited to, small molecule drugs or macromolecular drugs such as proteins.

本文涉及的「奈米類藥物」或「奈米藥物」是指能夠消除疾病或降低疾病嚴重程度的有治療和藥物效果的化學或生物元素。 References to "nanopharmaceuticals" or "nanopharmaceuticals" as used herein refer to chemical or biological elements that have therapeutic and pharmaceutical effects that can eliminate or reduce the severity of the disease.

本文中涉及的「醫療裝備」是指能夠在生物體內執行醫療程式的裝備包括但不限於，醫藥管理、手術、疾病的檢測，醫療裝置植入以及清洗等裝備。 The term "medical equipment" as used herein refers to equipment capable of executing a medical procedure in a living body including, but not limited to, medical management, surgery, disease detection, medical device implantation, and cleaning.

本文涉及的「器械」是指至少包括一個器件並且能夠生物體內有醫療功能的儀器。 The term "device" as used herein refers to an instrument that includes at least one device and is capable of having a medical function in a living body.

本文涉及的「微(型)器件」是指藉由微電子或半導體製程製造的整合了多個器件的能夠在生物體內完成多種任務的器件。 The term "micro (type) device" as used herein refers to a device that is manufactured by microelectronics or semiconductor manufacturing and that integrates multiple devices to perform various tasks in a living body.

本文涉及的「微型疾病檢測系統」是指能夠基於生物體微觀等級之特性檢測生物體疾病的系統。 The "micro disease detection system" referred to herein refers to a system capable of detecting a disease of a living body based on the characteristics of the microscopic level of the living body.

本文涉及的「自動導航系統」是指按照內部預先設置好的指令或外部通信指令進行導航的系統。 The "automatic navigation system" referred to herein refers to a system that navigates according to internal preset commands or external communication commands.

本文涉及的「交錯結構」是指該結構至少由兩種基本幾何單元組成，其中一種單元環繞另一單元(例如6個立方體B包圍著一個立方體A)。在幾何上，這兩種類型的單元可以是相同的(例如，所有的立方體都是同一形狀和尺寸的)。但是它們可以具有不同的性質(如，包括不同的材料、不同的熱膨脹係數、不同的光吸收特性和不同的熔點)。這種「交錯結構」的特色是當兩種類型的基本單元中有一個能夠縮小、熔化、蒸發、溶解或者幾何參數發生變化時(例如，例如尺寸、體積或形狀)，整個結構會分解成很小片狀結構，降解後的最大尺寸和基本單元的最大尺寸是相等 的，這就導致整個結構的降解。例如，交錯結構是由兩種類型1立方微米的基本單元組成的1立方毫米的立方體，當其中一種基本單元縮小(尺寸上)，整個結構會降解為尺寸不大於1立方微粒的小片結構。 As used herein, "interlaced structure" means that the structure consists of at least two basic geometric units, one of which surrounds another (for example, six cubes B surround a cube A). Geometrically, the two types of cells can be the same (for example, all cubes are of the same shape and size). However, they may have different properties (eg, including different materials, different coefficients of thermal expansion, different light absorption characteristics, and different melting points). This "interlaced structure" is characterized in that when one of the two types of basic units can be reduced, melted, evaporated, dissolved, or the geometric parameters change (for example, size, volume, or shape), the entire structure is broken down into very Small piece structure, the maximum size after degradation and the maximum size of the basic unit are equal This leads to degradation of the entire structure. For example, the staggered structure is a 1 mm square cube composed of two types of basic units of 1 cubic micrometer. When one of the basic units is reduced (in size), the entire structure is degraded into a small piece structure having a size of not more than 1 cubic particle.

本文涉及的術語「降解」或「使降解」，無論是本身或其衍生詞(例如，「可降解」)，除非另有說明(例如，在分子等級上降解)，否則都指材料部分或完全降解或分解成更小的片或構建塊、部件或分子。或者換句話說，術語「降解」或「使降解」或「可降解的」，除非另有更多詳細說明(例如，在分子等級上降解)，一般是指，一個原始的物體(例如，尺寸1毫米×1毫米×1毫米的器械)被分離成更小的部分(例如，成其原始的尺寸的1/100，10微米×10微米×10微米)。具體而言，有至少兩個等級的降解。第一等級的降解是指，材料在特定的環境下，如在一種特定氣體、特定的溶液、特定的溫度或特定的光學能量，降解至分子等級。舉例說明，二氧化矽材料可以溶解於氫氟酸(HF)溶液中，這是在分子等級上的降解(溶解)。這種分子等級的降解不要求材料降解成最小的分子，而降解成較低分子量(或短鏈的聚合物分子)的分子。第二等級的降解是指，用本專利提供的方法製作的複合材料或結構從它的最初相對大的尺寸(例如，1毫米大小)，可以降解成更小尺寸的降解過程(例如，0.1微米的大小)。舉個例子，一塊複合材料長、寬、高分別是1000微米、500微米、1微米，由利用半導體製程製備的尺寸1立方微米的氧化矽或多晶矽組成。當該複合材料被浸沒在HF溶液中，二氧化矽溶解在溶液中，在1微米×500微米×1000微米的複合塊被降解成許多1微米×1微米×1微米的多晶矽片，尺寸遠小於原始的複合塊。第二個方法(其中本發 明特別涉及到的)的優點包括：(1)許多有用的材料由於它們不能降解，而不能用於體內使用的醫療器械；(2)複合材料和目前使用的生物材料或可生物降解的或生物相容的材料相比，更強大(例如，機械強)，更穩定(例如，化學)；(3)隨著可選擇材料的增加，將本文所公開的製造方法製備的複合材料應用於體內醫療領域，使其功能更強大、性能優異。 The term "degradation" or "degradation" as used herein, whether by itself or its derivatives (eg, "degradable"), refers to a material that is partially or completely unless otherwise stated (eg, degradation at the molecular level). Degrade or break down into smaller pieces or building blocks, parts or molecules. Or in other words, the terms "degradation" or "degradation" or "degradable", unless otherwise specified in detail (eg, degradation at the molecular level), generally refer to an original object (eg, size) A 1 mm x 1 mm x 1 mm device is separated into smaller portions (e.g., 1/100 of its original size, 10 microns x 10 microns x 10 microns). Specifically, there are at least two grades of degradation. The first level of degradation means that the material degrades to a molecular level under a particular environment, such as in a particular gas, a particular solution, a particular temperature, or a particular optical energy. By way of example, the ceria material can be dissolved in a hydrofluoric acid (HF) solution, which is degradation (dissolution) at the molecular level. This molecular grade degradation does not require degradation of the material to the smallest molecule, but to molecules of lower molecular weight (or short chain polymer molecules). The second grade of degradation means that the composite or structure made by the method provided by this patent can be degraded into a smaller size degradation process (e.g., 0.1 micron) from its initially relatively large size (e.g., 1 millimeter size). the size of). For example, a composite material having a length, a width, and a height of 1000 micrometers, 500 micrometers, and 1 micrometer, respectively, consists of cerium oxide or polycrystalline germanium having a size of 1 cubic micrometer prepared by a semiconductor process. When the composite material is immersed in the HF solution, the cerium oxide is dissolved in the solution, and the composite block of 1 μm × 500 μm × 1000 μm is decomposed into a plurality of polycrystalline ruthenium sheets of 1 μm × 1 μm × 1 μm, which is much smaller in size. The original composite block. The second method (where the hair The advantages of this particular include: (1) many useful materials that cannot be used for in vivo use because they cannot be degraded; (2) composite materials and currently used biomaterials or biodegradable or biological Compatible materials are more powerful (eg, mechanically strong), more stable (eg, chemical); (3) composite materials prepared by the manufacturing methods disclosed herein are applied to in vivo medical treatment as alternative materials increase The field makes it more powerful and performs well.

對於本發明涉及的器械的降解可以藉由一種或多種方法觸發，其中包括但不限於：(a)降解發生在生物體內(即體內)的特定環境中，且其例如一種氣體、一種固體、液體(如血流)、低pH值的流體(例如，在一個人的胃液、尿液或粘液中)，且器械放置於該環境或移入該環境；(b)一個能夠觸發降解一事件以降解器械的外部信號(例如，信號可觸發聲波、熱脈衝、雷射或電脈衝的發射以降解器械)(c)特定的媒介物釋放觸發降解，如預先存儲在器械中的氣體、液體或能量，在預編程的時間藉由遙控器或由外部信號開啟釋放。 Degradation of the device of the present invention can be triggered by one or more methods including, but not limited to, (a) degradation occurring in a particular environment within the body (ie, the body), and which is, for example, a gas, a solid, a liquid (eg, blood flow), a fluid with a low pH (eg, in a person's gastric fluid, urine, or mucus), and the device is placed in or moved into the environment; (b) a device capable of triggering a degradation event to degrade the device External signals (for example, signals can trigger the emission of sound waves, heat pulses, lasers or electrical pulses to degrade the instrument) (c) specific media release triggers degradation, such as gas, liquid or energy pre-stored in the instrument, in advance The programmed time is released by the remote control or by an external signal.

本發明涉及的可降解的器械通常包括與(1)能夠降解至分子等級的材料；(2)至少兩種材料構成的交錯結構，其中至少一種材料是可降解至分子等級的；(3)用於構成交錯結構的材料可以藉由信號、媒介物或其他方法觸發降解，兩種材料中至少一種可以在特定環境下減小尺寸。 The degradable device to which the present invention relates generally includes (1) a material capable of degrading to a molecular grade; (2) a staggered structure of at least two materials, at least one of which is degradable to a molecular grade; (3) The materials that make up the staggered structure can be triggered to degrade by signal, vehicle or other means, at least one of which can be reduced in size under certain circumstances.

本文涉及的術語「封裝」是指整合(其中被封裝的元件成為封裝材料的一部分)或包裹(其中被封裝的元件在封裝材料之中或被封裝材料包圍)。 The term "encapsulation" as used herein refers to integration (where the packaged component becomes part of the encapsulation material) or wrap (where the encapsulated component is enclosed within or surrounded by the encapsulation material).

「生物材料」是指天然存在的、可以或不可以改性的材料。這樣的生物材料的例子包括蛋白質、脫乙醯殼多糖、橡膠或有機矽聚合物。 "Biomaterial" means a material that is naturally occurring and that may or may not be modified. Examples of such biomaterials include protein, chitosan, rubber or organic bismuth polymers.

本文涉及的「有機材料」是指，在很大程度上是基於碳和氫的材料，可選擇性地可帶有他元素，如鹵素、氮或氧元素。它與無機材料形成對比。 As used herein, "organic material" means a material that is largely based on carbon and hydrogen and may optionally carry other elements such as halogen, nitrogen or oxygen. It is in contrast to inorganic materials.

本文涉及的術語「光阻」是指用於在一些工業過程，如光學微影和光刻(photoengraving)，以形成圖案化的表面塗層的光敏感材料。 The term "resistance" as used herein refers to a light-sensitive material used in some industrial processes, such as optical lithography and photoengraving, to form a patterned surface coating.

本發明一般涉及一類新穎的可降解的器械，其採用最先進的微電子技術和製程將構建塊、子部件和可降解材料整合在一起。利用這種新穎的方法，醫療器械的組成模組、設備和藥物傳輸器至少由兩種材料組成，其中至少一種材料可以被降解(或分解)，這將導致整個構建塊分解成更小的塊(例如，尺寸為0.1微米的小塊)。例如，一個(例如，一個立方體)尺寸為100微米×100微米×100微米的模組可以被降解成0.1微米×0.1微米×0.1微米的小塊。同時，由於的表面積大大增加，降解成的微米或奈米顆粒相對於相同的巨集物體表現出完全不同的化學或物理性能，它們的化學性質更加活躍、更容易降解。降解(或分解)，可以藉由與其接觸的特定的溶液、氣體或固體觸發。降解(或分解)，也可以藉由外部信號觸發。根據這種創新的方法，許多創新化小型化的醫 療器械、儀器儀錶、器械和載體可以更有效、更廣泛地應用于現有和未來的體內醫療應用領域，使更多的設計選擇、治療能力和更多的材料在體內醫療領域得到廣泛應用。 The present invention generally relates to a novel class of degradable devices that incorporate building blocks, sub-components, and degradable materials using state of the art microelectronics and processes. With this novel method, the component modules, devices, and drug delivery devices of the medical device are composed of at least two materials, at least one of which can be degraded (or decomposed), which causes the entire building block to be broken down into smaller pieces. (For example, a small piece of 0.1 micron size). For example, one (eg, one cube) module having a size of 100 micrometers by 100 micrometers by 100 micrometers can be degraded into small pieces of 0.1 micron x 0.1 micron x 0.1 micron. At the same time, due to the greatly increased surface area, the degraded micro or nano particles exhibit completely different chemical or physical properties relative to the same macro object, and their chemical properties are more active and more susceptible to degradation. Degradation (or decomposition) can be triggered by a specific solution, gas or solid that is in contact therewith. Degradation (or decomposition) can also be triggered by an external signal. According to this innovative approach, many innovative miniaturized doctors Therapeutic instruments, instruments, instruments, and carriers can be more effectively and widely used in existing and future in vivo medical applications, enabling more design choices, therapeutic capabilities, and more materials to be widely used in the in vivo medical field.

本發明涉及體內可降解醫療器械(例如，在一個人的器官或組織內)。每個器械包括至少一個子部件和至少一種可降解的材料。每個子部件都是多功能的，它可以是但不限於，藥物、醫療設備、一個微型疾病檢測系統或自動導航系統。可降解材料包括聚(丙交酯-共-乙交酯)(PLGA)、聚(丙交酯)(PLA)、聚(L-乳酸)(PLLA)、聚(D，L-乳酸)(PDLLA)、聚乙醇酸(PGA)、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白質、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸(PMAA)、聚丙烯酸、聚乙二醇、藻酸鹽、膠原、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸鹽化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合物。 The present invention relates to in vivo degradable medical devices (e.g., within a person's organs or tissues). Each device includes at least one sub-assembly and at least one degradable material. Each sub-assembly is versatile and can be, but is not limited to, a drug, a medical device, a miniature disease detection system or an automated navigation system. Degradable materials include poly(lactide-co-glycolide) (PLGA), poly(lactide) (PLA), poly(L-lactic acid) (PLLA), poly(D,L-lactic acid) (PDLLA) ), polyglycolic acid (PGA), polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid (PMAA) , polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polysilicon, nitriding Niobium, niobium oxynitride, tantalum carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites thereof.

本發明涉及的器械具有寬範圍的設計、結構、功能和特點。上文提到的能夠分解或降解的器械包括，但不限於，電壓比較器、四點探針、計算器、邏輯電路、記憶體單元、微型切割器、微型錘、微型護罩、微型染料、微型梢、微型刀、微型針、微型集線器、微型鑷子、微型光吸收器、微型反射鏡、微型輪、微型濾波器、微型斬波器、微型粉碎機、微型泵、微型吸收器、微型信號檢測器、微型鑽孔機、微型抽吸器、微型測試儀、微型容器、微型注射器、信號發射器、信號發生器、摩擦感測器、電荷感測器、溫度感測器、硬度檢測器、聲波發生器、光波發生器、微型加熱 器、熱發生器、微型致冷器和電荷發生器。在除了本發明的方法中，這些器械也可以藉由其他在本領域中已知或在其他地方描述了的方法來製造，例如，PCT/US2010/049298、PCT/US2011/024672、美國申請號12/416,280、PCT/US2011/042637和PCT/US2010/041001，所有這些內容藉由引用併入本文。 The device of the present invention has a wide range of designs, structures, functions, and features. Instruments capable of decomposing or degrading as mentioned above include, but are not limited to, voltage comparators, four-point probes, calculators, logic circuits, memory cells, micro-cutters, micro-hammers, micro-shims, micro-dyes, Miniature tips, micro-knives, micro-needle, micro-hubs, micro tweezers, micro-light absorbers, micro-mirrors, micro-wheels, micro-filters, micro choppers, micro-grinders, micro-pumps, micro-absorbers, miniature signal detection , micro-drills, micro-aspirator, micro-testers, micro-containers, micro-injectors, signal transmitters, signal generators, friction sensors, charge sensors, temperature sensors, hardness detectors, sound waves Generator, light wave generator, micro heating , heat generators, micro-coolers and charge generators. In addition to the methods of the present invention, these devices can also be manufactured by other methods known in the art or described elsewhere, for example, PCT/US2010/049298, PCT/US2011/024672, U.S. Application No. 12 / 416, 280, PCT/US2011/042637 and PCT/US2010/041001, all of which are incorporated herein by reference.

在某些例子中，可降解材料由可降解的材料和其他微粒化的不可降解的材料組合而成。這些其他材料(如玻璃或陶瓷)被製成很小的尺寸。儘管這種尺寸的微顆粒不能降解，但它們在發揮作用以後可以藉由廢棄物系統無害地排出人體。 In some instances, the degradable material is a combination of a degradable material and other micronized, non-degradable materials. These other materials (such as glass or ceramic) are made in very small sizes. Although micro-particles of this size cannot be degraded, they can be harmlessly discharged into the human body by the waste system after they function.

作為器械的關鍵組成部分，上述可降解的材料在一定條件下應能降解成更小的碎片，在外部信號的存在下降解。該信號可以包括例如，電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。電特性的例子包括但不限於，表面電荷、表面電位、靜止電位、電流、電場分佈、電偶極子、電四極子、三維電氣或電荷雲分佈、染色體DNA端粒電性能、電容或阻抗；熱性質是指溫度或振動頻率。光學特性的例子包括但不限於，光吸收、光傳輸、光的反射、光電性能、亮度或螢光發射。化學性質的例子包括但不限於，pH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、反應速率、氧氣濃度、氧氣消耗率、氧鍵合部位、氧鍵合強度、由於氧原子或分 子的性質和位置造成的局部電荷密度、由於氧原子和/或分子的性質和位置造成的局部離子濃度、由於氧原子和/或分子的性質和位置的局部電場密度、離子強度、催化行為、觸發增強的信號回應的化學添加劑、觸發增強的信號回應的生物化學添加劑、觸發增強的信號回應的生物添加劑、提高檢測靈敏度的化學品、提高檢測靈敏度的生物化學品、提高檢測靈敏度的生物添加劑、或鍵合強度。物理性質的例子包括但不限於，密度、形狀、體積或表面積。生物特性的例子包括但不限於，表面形狀、表面積、表面電荷、表面生物學特性、表面化學性質、pH值、電解質、離子強度、電阻率、細胞濃度、屬性有關的生物標記或溶液的生物、電氣、物理或化學性質；聲學特性包括頻率、聲波的速度、音頻和強度頻譜分佈、聲強、聲學吸收或聲共振。機械性能的例子包括但不限於，內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或可壓縮性。 As a key component of the device, the above degradable material should be able to degrade into smaller fragments under certain conditions and degrade in the presence of external signals. The signals may include, for example, electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, biological Physics, bioelectromechanical, bioelectrochemistry, biophotovoltaics, bioelectrothermal, biomechanical optics, biomechanical heat, biothermal light, bioelectrochemical light, bioelectromechanical optics, bioelectric thermophoto, bioelectrochemical machinery, physical or mechanical signals , or a combination of them. Examples of electrical properties include, but are not limited to, surface charge, surface potential, resting potential, current, electric field distribution, electric dipole, electric quadrupole, three-dimensional electrical or charge cloud distribution, telomere electrical properties of chromosomal DNA, capacitance or impedance; heat Nature refers to temperature or vibration frequency. Examples of optical properties include, but are not limited to, light absorption, light transmission, reflection of light, optoelectronic properties, brightness, or fluorescent emission. Examples of chemical properties include, but are not limited to, pH, chemical reactions, biochemical reactions, bioelectrochemical reactions, reaction rates, reaction energies, reaction rates, oxygen concentrations, oxygen consumption rates, oxygen bonding sites, oxygen bonding strength, Oxygen atom or fraction Local charge density due to the nature and position of the sub, local ion concentration due to the nature and position of oxygen atoms and/or molecules, local electric field density due to the nature and location of oxygen atoms and/or molecules, ionic strength, catalytic behavior, Chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, biological additives that trigger enhanced signal response, chemicals that increase detection sensitivity, biochemicals that increase detection sensitivity, biological additives that increase detection sensitivity, Or bond strength. Examples of physical properties include, but are not limited to, density, shape, volume, or surface area. Examples of biological properties include, but are not limited to, surface shape, surface area, surface charge, surface biological properties, surface chemistry, pH, electrolytes, ionic strength, electrical resistivity, cell concentration, properties related biomarkers or solution organisms, Electrical, physical, or chemical properties; acoustic properties include frequency, velocity of sound waves, spectral distribution of audio and intensity, sound intensity, acoustic absorption, or acoustic resonance. Examples of mechanical properties include, but are not limited to, internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity, or compressibility.

因此，整合在可降解材料上的子部件在體內(例如在人體)從器械被釋放從而開始治療。一個例子是，該器械包括了整合在可降解材料上的藥物。當器械降解或材料降解時，藥物開始釋放並用於治療疾病。 Thus, sub-components integrated on the degradable material are released from the device in vivo (eg, in the human body) to begin treatment. As an example, the device includes a drug that is integrated on a degradable material. When the device degrades or the material degrades, the drug begins to release and is used to treat the disease.

在一些例子中，上述可降解材料以可控的方式降解，例如，在特定時間內降解。在當前發明的最小或最大的時間週期沒有任何限制。特定的時間段取決於在不同的外科手術或治療的需求。這樣的時間週期的一些例子包括，例如，從幾秒鐘到幾個星期。 In some examples, the above degradable materials degrade in a controlled manner, for example, degradation over a specified period of time. There are no restrictions on the minimum or maximum time period of the current invention. The specific time period depends on the needs of the different surgical or treatment. Some examples of such time periods include, for example, from a few seconds to a few weeks.

在一些例子中，器械包括一個子部件和一種可降解的材料， 其特徵在於，它們被整合並佈置在一層。當施加外部信號的裝置，所述降解材料的降解，因此釋放的子部件進行進一步的治療。藥物的幾何尺在器械的製造過程中被決定。 In some examples, the device includes a sub-assembly and a degradable material. It is characterized in that they are integrated and arranged in one layer. When a device that applies an external signal, the degradation material degrades, and thus the released sub-assembly undergoes further treatment. The geometric rule of the drug is determined during the manufacture of the device.

在其他一些例子中，本發明涉及的器械包括兩個子部件和一種可降解材料，它們可以整合在同一層或兩層。這兩種子部件可以分別是，例如，一種藥物、一種醫療設備、一個微型疾病檢測系統或一個自動導航系統。它們可以是不同種類的藥物。當外部信號施加於可降解材料時，兩種子部件被釋放用於疾病診斷和治療。 In other examples, the device of the present invention comprises two sub-components and a degradable material that can be integrated in the same layer or in two layers. The two seed components can be, for example, a drug, a medical device, a miniature disease detection system, or an automated navigation system. They can be different kinds of drugs. When an external signal is applied to the degradable material, the two subcomponents are released for disease diagnosis and treatment.

在一些例子中，器械包括的子部件中至少有一個為微型疾病檢測系統。該系統可以進行體內(例如在人體)疾病檢測並向器械發送一個信號。該信號觸發可降解材料的降解進而導致整個器械的降解。 In some examples, at least one of the sub-components included in the device is a micro-disease detection system. The system can perform disease detection in the body (eg, in the human body) and send a signal to the device. This signal triggers degradation of the degradable material leading to degradation of the entire device.

本發明涉及的器械包括兩層可降解材料，這兩層材料封裝至少兩種藥物。作為一個例子，本發明涉及的器械包括內層可降解材料將第一藥物封裝於內層之中，和外層可降解材料將第二藥物封裝於內層可降解材料和外層可降解材料之間。第一和第二藥物可以是相同或不同的。 The device of the present invention comprises two layers of degradable material, the two layers of material encapsulating at least two drugs. As an example, the present invention relates to an apparatus comprising an inner layer of degradable material encapsulating a first drug in an inner layer, and an outer layer of degradable material encapsulating a second drug between the inner degradable material and the outer degradable material. The first and second drugs may be the same or different.

當接收到外部信號，例如電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力 學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合信號時外層材料開始降解，第二藥物被釋放用於治療。 When receiving external signals, such as electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biomechanical, bio-optical, biothermal, Biophysics, bioelectromechanical, bioelectrochemistry, biophotovoltaics, bioelectrical heating, biomechanical optics, biodynamics When the heat, biothermal light, bioelectrochemical light, bioelectromechanical optics, bioelectrothermal light, bioelectrochemical mechanical, physical or mechanical signals, or a combination thereof, the outer layer material begins to degrade and the second drug is released for treatment.

當接收到上述外部信號之後內層材料也將開始降解。封裝於內層的第一藥物將被釋放用於治療。 The inner layer material will also begin to degrade after receiving the above external signal. The first drug encapsulated in the inner layer will be released for treatment.

由於兩層材料不同時間降解，所以兩種藥物不同時間被釋放。 Since the two layers of material degrade at different times, the two drugs are released at different times.

本發明還進一步包括至少有上述兩種器械的整合結構，至少包括四種藥物。至少有兩種藥物包裹於內層可降解材料，至少兩種藥物位於內層和外層材料之間。處於同一層的藥物可以是相同的或不同的。 The invention still further includes an integrated structure of at least the two devices described above, comprising at least four drugs. At least two drugs are encapsulated in the inner degradable material, and at least two drugs are located between the inner and outer layers of material. The drugs in the same layer may be the same or different.

本發明提供了一種包括兩層可降解材料的醫療器械，每層包括兩種藥物，至少有一個子部件整合於一層或兩層可降解材料內。子部件件包括但不僅限於微型疾病檢測系統或自動導航系統。當微型疾病檢測系統整合於內層或外層可降解材料時，它會發送一種外部信號觸發降解過程。之後相應的層開始降解因此封裝的藥物得到釋放。 The present invention provides a medical device comprising two layers of degradable material, each layer comprising two drugs, at least one of which is integrated into one or two layers of degradable material. Subcomponent components include, but are not limited to, miniature disease detection systems or automated navigation systems. When the micro-disease detection system is integrated into the inner or outer degradable material, it sends an external signal to trigger the degradation process. The corresponding layer then begins to degrade and the encapsulated drug is released.

本發明還提供了一種製造可降解器械的過程，包括基板製備、向基板澱積第一材料、在第一材料上塗布光阻。合適的光阻包括但不僅限於甲基丙烯酸、丙烯酸、α-(三氟甲基)丙烯酸樹脂、降冰片烯、醋酸乙烯、和具氟代醇的苯乙烯單體。 The present invention also provides a process for making a degradable device comprising substrate preparation, depositing a first material onto a substrate, and coating a photoresist on the first material. Suitable photoresists include, but are not limited to, methacrylic acid, acrylic acid, alpha-(trifluoromethyl)acrylic resin, norbornene, vinyl acetate, and styrene monomers having a fluoroalcohol.

光阻可以藉由特定波長的光波、電磁波、電子束或離子束曝光及顯影。 The photoresist can be exposed and developed by light waves, electromagnetic waves, electron beams or ion beams of a specific wavelength.

然後用剩餘的光阻作為硬遮罩蝕刻第一材料(例如用乾式蝕刻、溼式蝕刻或氣相蝕刻)，將留在表面的光阻的形貌轉移到第一材料。 The first material is then etched using the remaining photoresist as a hard mask (eg, by dry etching, wet etching, or vapor phase etching) to transfer the topography of the photoresist remaining on the surface to the first material.

接下來向第一材料和基板澱積第二材料並平坦化(例如利用化學拋光、機械拋光或化學機械拋光)，終止於第一材料。可以選擇回蝕刻第二材料至第一材料，使部分第二材料保留在第一材料的凹陷區內。 A second material is then deposited onto the first material and the substrate and planarized (eg, using chemical polishing, mechanical polishing, or chemical mechanical polishing) to terminate in the first material. The second material may be etched back to the first material such that a portion of the second material remains in the recessed region of the first material.

最後，將基板去除從而形成了包括第一第二材料的可降解醫療器械，第一第二材料可以交替地排列和佈置。 Finally, the substrate is removed to form a degradable medical device comprising a first second material, which may be alternately arranged and arranged.

第一材料可以包括一種醫療設備、一個微型疾病檢測系統或自動導航系統。 The first material can include a medical device, a miniature disease detection system, or an automated navigation system.

接下來，去除部分光阻，留下的部分具有特定形貌。利用光阻作為硬遮罩平坦化第一材料，將光阻的形貌轉移到第一材料。再去除留下的光阻。 Next, part of the photoresist is removed, leaving a portion with a specific topography. The photoresist is used as a hard mask to planarize the first material, and the morphology of the photoresist is transferred to the first material. Then remove the remaining photoresist.

製造過程可包括上述步驟的重複，形成一層或多層整合了子部件的可降解材料。 The manufacturing process can include repeating the above steps to form one or more layers of degradable material incorporating the subcomponents.

可降解器械可以藉由外部信號觸發降解。適合信號可包括電 學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 Degradable instruments can trigger degradation by external signals. Suitable signals can include electricity Science, magnetism, electromagnetism, thermals, optics, acoustics, biology, chemistry, electromechanical, electrochemistry, optoelectronics, electrothermal, electrochemical machinery, biochemistry, biomechanics, bio-optics, biothermals, biophysics, bioelectromechanics, Bioelectrochemistry, biophotovoltaics, bioelectrothermal, biomechanical optics, biomechanical heat, biothermal light, bioelectrochemical light, bioelectromechanical optics, bioelectrothermal light, bioelectrochemical machinery, physical or mechanical signals, or combinations thereof.

上述信號存在時，器械降解成小塊。 When the above signal is present, the device degrades into small pieces.

下面展示了本發明涉及的器械(包括至少一個子部件和至少一種可降解材料)以及其製造過程的例子。這些例子僅提供了本發明的某些方面的說明，本發明並不局限於這些說明。 The following relates to an apparatus (including at least one sub-component and at least one degradable material) and an example of the manufacturing process thereof. These examples are merely illustrative of certain aspects of the invention, and the invention is not limited by the description.

圖1展示了一種製造可降解醫療器械的新穎製造流程。如圖1(a)所示，材料0102澱積於基板0101。光阻0103澱積於0102(如圖1(b))利用特定波長光波曝光並顯影(如圖1(c))。留下的光阻0103用作蝕刻0102形成特定形貌的硬遮罩(如圖1(d))。將光阻0103從材料0102去除(如圖1(e))。向基板0101和材料0102澱積材料0104(如圖1(f))。平坦化0104(例如利用機械拋光、化學拋光或化學機械拋光)(如圖1(g))。最後基板0101被去除(如圖1(h))從而形成可降解器械。當有外部信號啟動時，材料0104降解，因此器械降解成小塊，材料0102被釋放。 Figure 1 illustrates a novel manufacturing process for making a degradable medical device. As shown in FIG. 1(a), a material 0102 is deposited on the substrate 0101. Photoresist 0103 is deposited at 0102 (as in Figure 1(b)) and exposed and illuminated using a specific wavelength of light (Fig. 1(c)). The remaining photoresist 0103 is used as a hard mask to etch 0102 to form a particular topography (Fig. 1(d)). The photoresist 0103 is removed from the material 0102 (as in Figure 1 (e)). Material 0104 is deposited onto substrate 0101 and material 0102 (as in Figure 1 (f)). Plane 0104 (eg, using mechanical polishing, chemical polishing, or chemical mechanical polishing) (see Figure 1 (g)). Finally the substrate 0101 is removed (as in Figure 1 (h)) to form a degradable instrument. When an external signal is activated, material 0104 degrades, so the device degrades into small pieces and material 0102 is released.

重複圖1的步驟可形成一個包括至少兩個子部件的可降解醫療器械。 Repeating the steps of Figure 1 can form a degradable medical device that includes at least two sub-components.

圖2展示了另一種包含材料0201、0202和0203的新穎可降解醫療器械(如圖2(a))。材料0201是一種可降解材料，在外部信號觸發可降解。因此，材料0202和0203以小塊的形式從器械被釋放(如圖2(b))。 Figure 2 shows another novel degradable medical device comprising materials 0201, 0202 and 0203 (Fig. 2(a)). Material 0201 is a degradable material that triggers degradation upon external signals. Thus, materials 0202 and 0203 are released from the instrument in small pieces (Fig. 2(b)).

重複圖1所示的步驟可以製成更複雜的器械。具體來說，如圖3所示，器械可以分成兩層。材料0301，0302和0303相互整合排列為兩層。材料0301是可降解的，當有外加信號觸發時會降解。於是材料0302和0303以小塊的形式從器械被釋放。材料0302和0303的幾何尺寸取決於曝光後剩餘光阻的形狀。 Repeating the steps shown in Figure 1 can result in a more complex instrument. Specifically, as shown in Figure 3, the instrument can be divided into two layers. Materials 0301, 0302, and 0303 are integrated into each other in two layers. Material 0301 is degradable and degrades when triggered by an external signal. The materials 0302 and 0303 are then released from the instrument in small pieces. The geometry of materials 0302 and 0303 depends on the shape of the remaining photoresist after exposure.

本發明的另一個例子是一個帶有三層的可降解器械(如圖4(a))，其中至少三層材料整合於可降解材料並分成三個可降解層。一旦可降解材料降解，這三種材料將以小塊形式釋放(如圖4(b))。 Another example of the invention is a three-layer degradable instrument (Fig. 4(a)) in which at least three layers of material are integrated into a degradable material and divided into three degradable layers. Once the degradable material degrades, the three materials will be released in small pieces (Figure 4(b)).

按照上述方法，本發明還可以提供了帶有多層整合多種不同物質的可降解材料的、更複雜的醫療器械。 In accordance with the above method, the present invention can also provide a more complex medical device with multiple layers of degradable materials that integrate multiple different materials.

圖5展示了本發明涉及的奈米藥物傳輸器械的一個例子。這裹，可降解材料0501和奈米藥物0502整合在一起構成本發明的醫療器械(如圖5(a))。可降解材料0501在外部信號觸發時發生降解，該信號可包括例如，電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機 械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。然後奈米藥物0502被釋放用於治療。 Fig. 5 shows an example of a nano drug delivery device according to the present invention. This wrap, the degradable material 0501 and the nano drug 0502 are integrated to form the medical device of the present invention (Fig. 5(a)). The degradable material 0501 degrades when triggered by an external signal, which may include, for example, electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical , biomechanics, bio-optics, biothermals, biophysics, biomotors Mechanical, bioelectrochemical, biophotovoltaic, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, bioelectric, bioelectrochemical, physical or mechanical, or their combination. Nanomedicine 0502 is then released for treatment.

圖6展示了另一種奈米藥物傳輸器械。該例中，奈米藥物0602和0603與可降解材料0601整合於一層(如圖6(a))。藥物0602和0603是不同的。當有外部信號觸發時可降解材料0601發生降解。因此，奈米藥物0602和0603被釋放用於治療如圖6(b)所示。 Figure 6 shows another nano drug delivery device. In this example, the nano drugs 0602 and 0603 are integrated with the degradable material 0601 in one layer (Fig. 6(a)). Drugs 0602 and 0603 are different. The degradable material 0601 degrades when an external signal is triggered. Therefore, nano drugs 0602 and 0603 were released for treatment as shown in Fig. 6(b).

如圖7所示，該器械可以擴展成兩層器械。該例中，奈米藥物0702和0703整合於可降解材料0701並分佈成兩層。奈米藥物0702和奈米藥物0703可以是相同或不同的。當有外部信號施加于器械時，可降解材料0701發生降解，然後奈米藥物0702和0703以小塊形式被釋放用於疾病治療。 As shown in Figure 7, the device can be expanded into a two-layer instrument. In this example, nano drugs 0702 and 0703 were integrated into the degradable material 0701 and distributed in two layers. The nano drug 0702 and the nano drug 0703 may be the same or different. When an external signal is applied to the device, the degradable material 0701 degrades, and then the nano drugs 0702 and 0703 are released in small pieces for disease treatment.

可以理解的是，該種器械可以包括另外的多層可降解材料，在不同的層中整合其他材料和多種類型的藥物。 It will be appreciated that such an instrument may include additional layers of degradable material, incorporating other materials and multiple types of drugs in different layers.

圖8展示了本發明的另一例子。該例中，如圖8(a)所示的藥物攜帶器械包括藥物0803，內層可降解材料0804，藥物0801和外層可降解材料0802。內層可降解材料封裝藥物0803。藥物0801處於內層和外層可降解材料之間形成三明治結構。藥物0801可以和0803相同或不同(如圖8(a))。 Figure 8 illustrates another example of the invention. In this example, the drug carrying device shown in FIG. 8(a) includes a drug 0803, an inner degradable material 0804, a drug 0801, and an outer degradable material 0802. The inner layer of degradable material encapsulates the drug 0803. The drug 0801 forms a sandwich structure between the inner layer and the outer layer degradable material. The drug 0801 can be the same as or different from 0083 (Fig. 8(a)).

當醫療器械在人體內使用時，外層可降解材料在外部信號的觸發下降解。藥物0801首先從器械被釋放(圖8(b))。同樣地，內層可降解材料在外部信號觸發下開始降解，從而釋放藥物0803。 When the medical device is used in a human body, the outer degradable material degrades under the trigger of an external signal. The drug 0801 was first released from the device (Fig. 8(b)). Similarly, the inner degradable material begins to degrade under the trigger of an external signal, thereby releasing the drug 0803.

由於藥物0801和0803置於不同的兩層內，它們在不同時間釋放。藥物0801和0803可以是相同的或不同的。 Since the drugs 0801 and 0803 are placed in two different layers, they are released at different times. Drugs 0801 and 0083 can be the same or different.

圖8(c)展示了本發明的另一個例子，包括兩個內層可降解材料0816和0817，用以封裝藥物0812和0814。外層可降解材料0815被分成兩個部分，從而使兩種藥物0811和0813分別夾在0815層和0816、0817層之間形成三明治結構。藥物0811和0813可以是相同或不同的，藥物0812和0814可以是相同的或不同的。 Figure 8(c) shows another example of the invention comprising two inner degradable materials 0816 and 0817 for encapsulating the drugs 0812 and 0814. The outer degradable material 0815 is divided into two parts, so that the two drugs 0811 and 0813 are sandwiched between the layers 0815 and 0816, 0817, respectively, to form a sandwich structure. Drugs 0811 and 0813 may be the same or different and drugs 0812 and 0814 may be the same or different.

原則上，本發明涉及的醫療器械可包括多個隔間和內層。 In principle, the medical device to which the present invention relates may include a plurality of compartments and an inner layer.

圖9展示了本發明的另一個新穎實例，該器械包括內層可降解材料0904和外層可降解材料0902。藥物0903封裝於0904層內，藥物0901置於0904和0902層之間形成三明治結構。微型疾病檢測系統0905和0906分別整合於0904層和0902層(如圖9(a))。 Figure 9 illustrates another novel embodiment of the present invention comprising an inner layer of degradable material 0904 and an outer layer of degradable material 0902. Drug 0903 is packaged in the 0904 layer and drug 0901 is placed between the 0904 and 0902 layers to form a sandwich structure. The micro disease detection systems 0905 and 0906 are integrated in the 0904 layer and the 0902 layer, respectively (as shown in Fig. 9(a)).

檢測系統0906可以進行體內疾病檢測(例如人體內)。然後它將向0902層發送一個信號以啟動降解過程從而釋放藥物0901。同樣地，檢測系統0905將向0904層發送一個信號啟動0904層的降解過程從而釋放藥物0903。藥物0901和0903可以是相同或不同的。它們可以於不同時間釋放。 Detection system 0906 can perform in vivo disease detection (eg, in a human body). It will then send a signal to the 0902 layer to initiate the degradation process to release the drug 0901. Likewise, detection system 0905 will send a signal to the 0904 layer to initiate the degradation process of the 0904 layer to release the drug 0903. Drugs 0901 and 0903 can be the same or different. They can be released at different times.

該醫療器械內整合了自動導航系統，可以導航器械至病竈區以進行治療。 The medical device incorporates an automatic navigation system that navigates the device to the lesion area for treatment.

圖10展示了一種新的製造本發明涉及的可降解醫療器械的製造流程，該流程使用了微電子技術和製程。製程中，絕緣材料1002首先被澱積基板1001上(如圖10(a))，然後旋塗光阻1003(如圖10(b))。然後在遮罩下利用特定波長的光波(例如可見或不可見光)、電磁波、電子束或離子束對光阻曝光，之後顯影(如圖10(c))。 Figure 10 illustrates a novel manufacturing process for making a degradable medical device of the present invention using microelectronics technology and processes. In the process, the insulating material 1002 is first deposited on the substrate 1001 (as shown in FIG. 10(a)), and then the photoresist 1003 is spin-coated (as shown in FIG. 10(b)). The photoresist is then exposed to light under a mask using a specific wavelength of light (eg, visible or invisible light), electromagnetic waves, electron beams, or ion beams, followed by development (FIG. 10(c)).

接下來進行蝕刻製程，將光阻上的圖形轉移至材料1002上(如圖10(d))，在澱積絕緣材料1004(如圖10(e))之前去除光阻(如圖10(e))。平坦化已澱積的材料1004(利用機械拋光、化學拋光或化學機械拋光技術)，如圖10(g)所示。然後澱積導電材料1005(如圖10(h))，再利用微影和蝕刻製程圖案化(如圖10(i))。 Next, an etching process is performed to transfer the pattern on the photoresist to the material 1002 (as shown in FIG. 10(d)), and the photoresist is removed before depositing the insulating material 1004 (as shown in FIG. 10(e)) (FIG. 10 (e). )). The deposited material 1004 is planarized (using mechanical polishing, chemical polishing, or chemical mechanical polishing techniques) as shown in Figure 10(g). Conductive material 1005 is then deposited (Fig. 10(h)) and patterned using lithography and etching processes (Fig. 10(i)).

澱積另一導電材料1006(如圖10(j))並平坦化(利用機械拋光、化學拋光或化學機械拋光技術)，如圖10(k)所示。然後利用微影和蝕刻製程圖案化導電材料1006(如圖10(l))，接下來澱積絕緣材料1002。絕緣材料可與上一步步驟中的絕緣材料相同或不同(如圖10(m))。利用CMP製程平坦化絕緣材料1002(如圖10(n))，然後利用微影和蝕刻製程圖案化(如圖10(o))，接下來澱積(如圖10(p))並藉由CMP平坦化絕緣材料1006(如圖10(q))，它和相同層內的其他材料是不同的。 Another conductive material 1006 (as in Figure 10(j)) is deposited and planarized (using mechanical polishing, chemical polishing, or chemical mechanical polishing techniques) as shown in Figure 10(k). The conductive material 1006 is then patterned using a lithography and etching process (Fig. 10(l)), followed by deposition of an insulating material 1002. The insulating material may be the same as or different from the insulating material in the previous step (Fig. 10(m)). The insulating material 1002 is planarized by a CMP process (Fig. 10(n)), then patterned by lithography and etching processes (Fig. 10(o)), followed by deposition (Fig. 10(p)) and by The CMP planarizes the insulating material 1006 (Fig. 10(q)), which is different from the other materials in the same layer.

然後去除基板(如圖10(r))。至此，帶有可降解絕緣材料和可降解導電材料的基本結構製備完畢。它和圖10(r)所示的器件在電學上是等效的，圖10(r)所示的器件包括埋在絕緣層內的導電互連線。 The substrate is then removed (as in Figure 10(r)). At this point, the basic structure with the degradable insulating material and the degradable conductive material is prepared. It is electrically equivalent to the device shown in Figure 10(r), and the device shown in Figure 10(r) includes conductive interconnects buried within the insulating layer.

重複如圖10所示的b，c，d，e，f，g步驟，可製造包括多種(兩種以上)部件的可降解器械。如圖2(a)，該器械包括3種類型器件0201，0202和0203。如圖2(b)所示，當材料0201在給定的條件降解時，器件降解成小塊0202和0203。這些小塊的幾何形狀和尺寸取決於曝光用的光罩。 By repeating the steps b, c, d, e, f, g shown in Fig. 10, a degradable device comprising a plurality of (two or more) components can be manufactured. As shown in Figure 2(a), the device includes three types of devices 0201, 0202 and 0203. As shown in Figure 2(b), when material 0201 degrades under the given conditions, the device degrades into small pieces 0202 and 0203. The geometry and size of these patches depend on the reticle used for exposure.

當給定特殊信號或放置於特殊環境下或利用特別的蝕刻劑蝕刻時，絕緣材料1002和導電材料1005的幾何參數會變小(如尺寸)(如圖10(t))，然後，整個器械開始降解成小塊(如圖10(u))。 When given a special signal or placed in a special environment or etched with a special etchant, the geometrical parameters of the insulating material 1002 and the conductive material 1005 become smaller (such as size) (as shown in Figure 10 (t)), then, the entire device It begins to degrade into small pieces (Fig. 10(u)).

重複圖10所示的步驟，可以製造更加複雜的、帶有多種(不只一種)或多層可降解絕緣材料和導電材料的可降解器械(如圖10(v))。 By repeating the steps shown in Figure 10, a more complex degradable instrument with multiple (more than one) or multiple layers of degradable insulating material and conductive material can be fabricated (Fig. 10(v)).

圖11展示了用於製造可降解醫療器械的另一種方法。襯墊層1102和外層1103澱積於基板1101(如圖11(a))。利用微影和蝕刻製程圖案化層1103(如圖11(b))，襯墊層1104可選擇性地澱積在圖案化的1103層上(如圖11(c))。接下來，澱積層1105(如圖11(d))並利用CMP製程(如圖11(e))平坦化，然後去除基板1101。至此，可降解醫療器械製造完畢。 Figure 11 illustrates another method for making a degradable medical device. The pad layer 1102 and the outer layer 1103 are deposited on the substrate 1101 (as shown in Fig. 11(a)). Using a lithography and etch process patterning layer 1103 (as in Figure 11(b)), a liner layer 1104 can be selectively deposited over the patterned 1103 layer (Fig. 11(c)). Next, the layer 1105 is deposited (as shown in FIG. 11(d)) and planarized by a CMP process (as shown in FIG. 11(e)), and then the substrate 1101 is removed. At this point, the degradable medical device has been manufactured.

襯墊層1102和1104被蝕刻或在特定條件下溶解後(如圖11(f))，器械降解成小塊(如圖11(g))。 After the backing layers 1102 and 1104 are etched or dissolved under specific conditions (Fig. 11(f)), the device degrades into small pieces (Fig. 11(g)).

圖12展示了利用了MOS-FET電學性能製造一個可降解醫療器械的製造流程。首先在基板1205上利用微影和蝕刻製程形成溝槽1206(如圖12(b))。然後澱積材料1207並平坦化(如圖12(c))。接下來利用傳統微電子製程形成電晶體的源極、汲極及閘極(如圖12(d))。利用圖10描述的新穎製程製備絕緣介電質，交錯澱積並圖案化絕緣材料1208和1209(如圖12(e))。微影蝕刻接觸孔1210(如圖12(f))，澱積導電材料1211填充接觸孔並平坦化(如圖12(g))。1211做為電晶體的器件本體(源極、汲極及閘極)；1212是互連介層；1213為互連佈線，1214是互連接觸。 Figure 12 shows the manufacturing process for fabricating a degradable medical device using MOS-FET electrical performance. First, a trench 1206 is formed on the substrate 1205 by a lithography and etching process (as shown in Fig. 12(b)). Material 1207 is then deposited and planarized (Fig. 12(c)). Next, the source, the drain and the gate of the transistor are formed using a conventional microelectronic process (Fig. 12(d)). Insulating dielectrics are prepared using the novel process depicted in Figure 10, and the insulating materials 1208 and 1209 are interleaved and patterned (Fig. 12(e)). The lithography etch contact hole 1210 (as shown in FIG. 12(f)), and the conductive material 1211 is deposited to fill the contact hole and planarize (as shown in FIG. 12(g)). 1211 is the device body (source, drain and gate) of the transistor; 1212 is the interconnect layer; 1213 is the interconnect wiring, and 1214 is the interconnect contact.

利用同樣的製程可形成介層孔和互連(圖12(h))，於是產生具有互連的MOS-FET(即金屬氧化物半導體場效應電晶體)。圖12(h)中的器械和圖12(i)中的器械在電學上是等效的。基板研磨之後，可降解的MOS-FET製備完畢(如圖12(j))，然後在特定的環境下器械的子部件會分解或縮小導致整個醫療器械降解成小塊。 Via holes and interconnections can be formed using the same process (Fig. 12(h)), thus producing MOS-FETs (i.e., metal oxide semiconductor field effect transistors) having interconnections. The instrument of Figure 12(h) and the instrument of Figure 12(i) are electrically equivalent. After the substrate is ground, the degradable MOS-FET is prepared (Fig. 12(j)), and then the sub-components of the device are decomposed or shrunk in a specific environment, causing the entire medical device to degrade into small pieces.

應理解雖然本發明已結合其詳細說明而描述，但前文的描述係用以說明而非限制本發明範疇，本發明範疇係由後附申請專利範圍所定義。其他態樣、優點、及修改係在以下申請專利範圍的範疇內。本文中所參考的所有出版物或專利申請案之整體內容係 併入本文中作為參考。 It is to be understood that the invention has been described in connection with the detailed description of the invention, and the scope of the invention is defined by the scope of the appended claims. Other aspects, advantages, and modifications are within the scope of the following claims. The overall content of all publications or patent applications referenced herein is This is incorporated herein by reference.

0101‧‧‧基板 0101‧‧‧Substrate

0102‧‧‧材料 0102‧‧‧Materials

0103‧‧‧光阻 0103‧‧‧Light resistance

0104‧‧‧材料 0104‧‧‧Materials

0201‧‧‧材料 0201‧‧‧Materials

0202‧‧‧材料 0202‧‧‧Materials

0203‧‧‧材料 0203‧‧‧Materials

0301‧‧‧材料 0301‧‧‧Materials

0302‧‧‧材料 0302‧‧‧Materials

0303‧‧‧材料 0303‧‧‧Materials

0501‧‧‧可降解材料 0501‧‧‧degradable materials

0502‧‧‧奈米藥物 0502‧‧Non drug

0601‧‧‧可降解材料 0601‧‧‧degradable materials

0602‧‧‧奈米藥物 0602‧‧Non drug

0603‧‧‧奈米藥物 0603‧‧‧Nami drugs

0701‧‧‧可降解材料 0701‧‧‧degradable materials

0702‧‧‧奈米藥物 0702‧‧‧Nami drugs

0703‧‧‧奈米藥物 0703‧‧‧Nami drugs

0801‧‧‧藥物 0801‧‧‧ drugs

0802‧‧‧外層可降解材料 0802‧‧‧Outer degradable material

0803‧‧‧藥物 0803‧‧‧ drugs

0804‧‧‧內層可降解材料 0804‧‧‧ Inner degradable material

0811‧‧‧藥物 0811‧‧‧ drugs

0812‧‧‧藥物 0812‧‧‧ drugs

0813‧‧‧藥物 0813‧‧‧ drugs

0814‧‧‧藥物 0814‧‧‧ drugs

0815‧‧‧外層可降解材料 0815‧‧‧Outer degradable materials

0816‧‧‧內層可降解材料 0816‧‧‧Inner degradable material

0817‧‧‧內層可降解材料 0817‧‧‧ Inner degradable material

0901‧‧‧藥物 0901‧‧‧ drugs

0902‧‧‧外層可降解材料 0902‧‧‧Outer degradable materials

0903‧‧‧藥物 0903‧‧‧ Drugs

0904‧‧‧內層可降解材料 0904‧‧‧Inner degradable material

0905‧‧‧微型疾病檢測系統 0905‧‧‧Micro Disease Detection System

0906‧‧‧微型疾病檢測系統 0906‧‧‧Micro Disease Detection System

1001‧‧‧基板 1001‧‧‧Substrate

1002‧‧‧絕緣材料 1002‧‧‧Insulation materials

1003‧‧‧光阻 1003‧‧‧Light resistance

1004‧‧‧絕緣材料 1004‧‧‧Insulation materials

1005‧‧‧導電材料 1005‧‧‧Electrical materials

1006‧‧‧導電材料 1006‧‧‧Electrical materials

1101‧‧‧基板 1101‧‧‧Substrate

1102‧‧‧襯墊層 1102‧‧‧ liner layer

1103‧‧‧外層 1103‧‧‧ outer layer

1104‧‧‧襯墊層 1104‧‧‧ liner layer

1105‧‧‧層 1105‧‧ layer

1205‧‧‧基板 1205‧‧‧Substrate

1206‧‧‧溝槽 1206‧‧‧ trench

1207‧‧‧材料 1207‧‧‧Materials

1208‧‧‧絕緣材料 1208‧‧‧Insulation materials

1209‧‧‧絕緣材料 1209‧‧‧Insulation materials

1210‧‧‧接觸孔 1210‧‧‧Contact hole

1211‧‧‧導電材料 1211‧‧‧Electrical materials

1212‧‧‧互連介層 1212‧‧‧Interconnecting layer

1213‧‧‧互連佈線 1213‧‧‧Interconnection wiring

1214‧‧‧互連接觸 1214‧‧‧Interconnected contacts

圖1展示了一種可降解醫療器械的新穎製造過程，其中，製造過程中用到了微電子技術和製程。 Figure 1 illustrates a novel manufacturing process for a degradable medical device in which microelectronics technology and processes are used in the manufacturing process.

圖2展示了一種新穎可降解器械，其中有兩種藥物整合在可降解材料上，該可降解器械在人體內降解並釋放兩種藥物。 Figure 2 shows a novel degradable device in which two drugs are integrated on a degradable material that degrades in the human body and releases both drugs.

圖3展示了另一種新穎的可降解器械，其中兩種藥物整合於可降解材料，並分成兩層放置。 Figure 3 shows another novel degradable device in which two drugs are integrated into a degradable material and placed in two layers.

圖4展示了另一種可降解器械，其中三種藥物整合在可降解材料上，並佈置在三層。 Figure 4 shows another degradable device in which three drugs are integrated on a degradable material and placed in three layers.

圖5展示了一種奈米藥物輸送器械，其中奈米藥物顆粒整合在可降解材料上，並將在可降解材料降解時被釋放。 Figure 5 illustrates a nano drug delivery device in which nano drug particles are integrated on a degradable material and will be released upon degradation of the degradable material.

圖6展示了另一種奈米藥物輸送器械，其中兩種藥物整合在可降解材料上，並並在可降解材料降解時被釋放。 Figure 6 illustrates another nano drug delivery device in which two drugs are integrated on a degradable material and released upon degradation of the degradable material.

圖7展示了一種奈米藥物輸送器械，其中兩種藥物分兩層整合在可降解材料上，並在可降解材料溶解時被釋放。 Figure 7 illustrates a nano drug delivery device in which two drugs are integrated into a degradable material in two layers and released upon dissolution of the degradable material.

圖8展示了藥物輸送器械的陣列，包括帶有內層和外層的可降解材料以及至少兩種藥物。其中一種藥物包裹于可降解材料的內層，另一種材料位於內層可降解材料和外層可降解材料之間。這種排列使藥物在不同時間被釋放。 Figure 8 illustrates an array of drug delivery devices comprising a degradable material with an inner layer and an outer layer and at least two drugs. One of the drugs is wrapped in the inner layer of the degradable material and the other is between the inner degradable material and the outer degradable material. This arrangement allows the drug to be released at different times.

圖9展示了本發明涉及的一種器械，其中微型疾病檢測儀整合到可降解材料的內層和外層。微型疾病檢測儀向可降解材料發送外部信號並啟動降解。因此，封裝在層中的藥物被釋放。這兩種藥物在不同的時間被釋放。 Figure 9 illustrates an apparatus of the present invention in which a miniature disease detector is integrated into the inner and outer layers of the degradable material. The miniature disease detector sends an external signal to the degradable material and initiates degradation. Therefore, the drug encapsulated in the layer is released. Both drugs are released at different times.

圖10展示了一種新的利用微電子技術和製程用於製造本發明 涉及的可降解器械的流程。 Figure 10 illustrates a new use of microelectronics technology and processes for fabricating the present invention. The process involved in degradable instruments.

圖11展示了用於製造本發明的可降解器械的另一種方法。 Figure 11 illustrates another method for making the degradable device of the present invention.

圖12展示了用於製造本發明涉及的利用了MOS-FET(金屬氧化物半導體場效應電晶體)的功能的器械的製造流程。 Fig. 12 shows a manufacturing flow of an apparatus for manufacturing a function using a MOS-FET (Metal Oxide Semiconductor Field Effect Transistor) according to the present invention.

0101‧‧‧基板 0101‧‧‧Substrate

0102‧‧‧材料 0102‧‧‧Materials

0103‧‧‧光阻 0103‧‧‧Light resistance

0104‧‧‧材料 0104‧‧‧Materials

Claims (99)

一種可降解器械，包括一第一子部件和一第一微型器件，該第一微型器件包含了一可降解材料並整合於該第一子部件。 A degradable device comprising a first sub-assembly and a first micro-device, the first micro-device comprising a degradable material and integrated into the first sub-assembly. 如請求項1所述的器械，其特徵在於，子部件包括一藥物、一醫療裝備、一微型疾病檢測系統或一自動導航系統。 The device of claim 1, wherein the sub-component comprises a drug, a medical device, a micro-disease detection system or an automatic navigation system. 如請求項1所述的器械，其特徵在於，該可降解材料包括聚(丙交酯-共-乙交酯)，聚(丙交酯)，聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、褐藻膠、膠原蛋白、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸酯化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合材料或混合物。 The device according to claim 1, wherein the degradable material comprises poly(lactide-co-glycolide), poly(lactide), poly(L-lactic acid), poly(D,L) -lactic acid), polyglycolic acid, polylactic acid, polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid, Polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polycrystalline germanium, tantalum nitride , lanthanum oxynitride, tantalum carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites or mixtures thereof. 如請求項1所述的器械，其特徵在於，該可降解材料藉由一外部信號、存儲在該器械中的能量或媒介物、或者與具有一特定的物理或化學性質的一環境接觸後受激降解。 The device of claim 1 wherein the degradable material is contacted by an external signal, energy or medium stored in the device, or in contact with an environment having a particular physical or chemical property. Excited degradation. 如請求項4中所述的器械，其特徵在於，該信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物 光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The device of claim 4, wherein the signal comprises electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, Biomechanics, bio-optics, biothermals, biophysics, bioelectromechanics, bioelectrochemistry, biology Photoelectric, bioelectrical, biomechanical, biomechanical, biothermal, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical signals, or combinations thereof. 如請求項5中所述的器械，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；該光學性質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；該化學性質是PH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The device according to claim 5, characterized in that the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, DNA and The electrical properties, capacitance or electrical resistance of the chromosomal end; the thermal property is temperature or vibration frequency; the optical property is light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescence emission; the chemical property is pH, chemical reaction , biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, oxygen atom and/or molecular properties and local charge density caused by position, oxygen atom And/or local ion density, oxygen atom and/or molecular properties and positional local electric field density, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, and biosignals that trigger enhanced signal responses Chemical additives, biological additives that trigger enhanced signal response, chemicals that increase test sensitivity, increase testing Sensitive biochemicals, biological additives that increase test sensitivity, or bonding strength; the physical properties are density, shape, volume, or surface area; the biological properties are surface shape, surface area, surface charge, surface biological properties, surface chemistry, pH, electrolyte, ionic strength, electrical resistance, cell concentration, biomarker-related properties, or biological, electrical, physical, or chemical properties of the solution; the acoustic properties are frequency and spectral intensity distribution, acoustic intensity, acoustic absorption, or Acoustic resonance; the mechanical properties are internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility. The above properties may be static, dynamic or variable. of. 如請求項1所述的器械，其特徵在於，該可降解材料與具有一特定物理或化學性質的一環境接觸，該性質包括一定的溫度、濕度、PH值或離子強度。 The device of claim 1, wherein the degradable material is in contact with an environment having a specific physical or chemical property, the property comprising a certain temperature, humidity, pH or ionic strength. 如請求項1所述的器械，其特徵在於，該可降解材料在一所需的時間段內降解。 The device of claim 1 wherein the degradable material degrades over a desired period of time. 如請求項8所述的器械，其特徵在於，該所需的時間段範圍從一秒到兩週。 The device of claim 8 wherein the desired period of time ranges from one second to two weeks. 如請求項1所述的器械，其特徵在於，該第一子部件整合在該第一微型器件內部。 The device of claim 1, wherein the first sub-assembly is integrated inside the first micro device. 如請求項10所述的器械，其特徵在於，該第一子部件包括一藥物、一電壓比較器、一四點探針、一計算器、一邏輯電路、一記憶存儲單元、一微型切割器、一微型錘、一微型護罩、一微型染料、一微型梢、一微型刀、一微型針、一微型持線鉗、一微型鑷子、一微型光吸收器、一微型鏡、一微型輪、一微型濾波器、一微型斬波器、一微型粉碎機、一微型泵、一微型吸收器、一微型信號檢測器、一微型鑽孔機、一微型吸取器、一微型測試器、一微型容器、一微型注射器、一信號發送器、一信號發生器、一摩擦感測器、一電荷感測器、一溫度感測器、一硬度檢測器、一聲波發生器、一光波發生器、一熱發生器、一微型致冷器或一電荷發生器。 The device of claim 10, wherein the first subcomponent comprises a drug, a voltage comparator, a four-point probe, a calculator, a logic circuit, a memory storage unit, and a micro cutter. , a micro hammer, a miniature shield, a micro dye, a micro tip, a micro knife, a micro needle, a miniature wire cutter, a miniature forceps, a miniature light absorber, a micro mirror, a micro wheel, A micro filter, a micro chopper, a micro pulverizer, a micro pump, a micro absorber, a miniature signal detector, a micro drill, a micro suction device, a micro tester, a miniature container a micro injector, a signal transmitter, a signal generator, a friction sensor, a charge sensor, a temperature sensor, a hardness detector, a sound wave generator, a light wave generator, a heat A generator, a micro-refrigerator or a charge generator. 如請求項1所述的器械，其特徵在於，該第一子部件附著在該第一微型器件之表面。 The device of claim 1, wherein the first sub-assembly is attached to a surface of the first micro device. 如請求項12所述的器械，其特徵在於，該第一子部件包括一藥物、一電壓比較器、一四點探針、一計算器、一邏輯電路、一記憶存儲單元、一微型切割器、一微型錘、一微型護罩、一微型染料、一微型梢、一微型刀、一微型針、一微型持線鉗、一微型鑷子、一微型光吸收器、一微型鏡、一微型輪、一微型濾波器、一微型斬波器、一微型粉碎機、一微型泵、一微吸收器、一微型信號檢測器、一微型鑽孔機、一微型吸取器、一微型測試器、一微型容器、一微型注射器、一信號發送器、一信號發生器、一摩擦感測器、一電荷感測器、一溫度感測器、一硬度檢測器、一聲波發生器、一光波發生器、一熱發生器、一微型致冷器或一電荷發生器。 The device of claim 12, wherein the first sub-assembly comprises a drug, a voltage comparator, a four-point probe, a calculator, a logic circuit, a memory storage unit, and a micro cutter. , a micro hammer, a miniature shield, a micro dye, a micro tip, a micro knife, a micro needle, a miniature wire cutter, a miniature forceps, a miniature light absorber, a micro mirror, a micro wheel, a micro filter, a micro chopper, a micro pulverizer, a micro pump, a micro absorber, a miniature signal detector, a micro drill, a micro suction device, a micro tester, a miniature container a micro injector, a signal transmitter, a signal generator, a friction sensor, a charge sensor, a temperature sensor, a hardness detector, a sound wave generator, a light wave generator, a heat A generator, a micro-refrigerator or a charge generator. 如請求項1所述的器械，其特徵在於，該可降解性材料在人的體內環境中降解。 The device of claim 1, wherein the degradable material degrades in a human body environment. 如請求項14所述的器械，其特徵在於，該體內環境是血液、胃液或尿液。 The device of claim 14, wherein the in vivo environment is blood, gastric juice or urine. 如請求項1所述的器械，進一步包括至少一個額外的微型器件，該微型器件包括與第一微型器件中的該可降解材料相同或不同的一可降解材料。 The device of claim 1 further comprising at least one additional micro device comprising a degradable material that is the same as or different from the degradable material in the first micro device. 如請求項16所述的器械，其特徵在於，該子部件位於 兩個微型器件之間。 The device of claim 16 wherein the subcomponent is located Between two micro devices. 如請求項17所述的器械，其特徵在於，該第一子部件包括一藥物、一電壓比較器、一四點探針、一計算器、一邏輯電路、一記憶存儲單元、一微型切割器、一微型錘、一微型護罩、一微型染料、一微型梢、一微型刀、一微型針、一微型持線鉗、一微型鑷子、一微型光吸收器、一微型鏡、一微型輪、一微型濾波器、一微型斬波器、一微型粉碎機、一微型泵、一微型吸收器、一微型信號檢測器、一微型鑽孔機、一微型吸取器、一微型測試器、一微型容器、一微型注射器、一信號發送器、一信號發生器、一摩擦感測器、一電荷感測器、一溫度感測器、一硬度檢測器、一聲波發生器、一光波發生器、一熱發生器、一微型致冷器或一電荷發生器。 The device of claim 17, wherein the first sub-assembly comprises a drug, a voltage comparator, a four-point probe, a calculator, a logic circuit, a memory storage unit, and a micro cutter. , a micro hammer, a miniature shield, a micro dye, a micro tip, a micro knife, a micro needle, a miniature wire cutter, a miniature forceps, a miniature light absorber, a micro mirror, a micro wheel, A micro filter, a micro chopper, a micro pulverizer, a micro pump, a micro absorber, a miniature signal detector, a micro drill, a micro suction device, a micro tester, a miniature container a micro injector, a signal transmitter, a signal generator, a friction sensor, a charge sensor, a temperature sensor, a hardness detector, a sound wave generator, a light wave generator, a heat A generator, a micro-refrigerator or a charge generator. 如請求項16所述的器械，其特徵在於，該子部件整合於該等微型器件其中之一的內部。 The device of claim 16 wherein the subassembly is integrated into one of the ones of the micro devices. 如請求項19所述的器械，其特徵在於，該第一子部件包括一藥物、一電壓比較器、一四點探針、一計算器、一邏輯電路、一記憶存儲單元、一微型切割器、一微型錘、一微型護罩、一微型染料、一微型梢、一微型刀、一微型針、一微型持線鉗、一微型鑷子、一微型光吸收器、一微型鏡、一微型輪、微一型濾波器、一微型斬波器、一微型粉碎機、一微型泵、一微型吸收器、一微型信號檢測器、一微型鑽孔機、一微型吸取器、一微型測試器、一微型容器、一微型注射器、一信號發送器、一信號發生器、一摩擦感測器、一電荷感測器、一溫度感 測器、一硬度檢測器、一聲波發生器、一光波發生器、一熱發生器、一微型致冷器或一電荷發生器。 The device of claim 19, wherein the first subcomponent comprises a drug, a voltage comparator, a four-point probe, a calculator, a logic circuit, a memory storage unit, and a micro cutter. , a micro hammer, a miniature shield, a micro dye, a micro tip, a micro knife, a micro needle, a miniature wire cutter, a miniature forceps, a miniature light absorber, a micro mirror, a micro wheel, Micro-type filter, a miniature chopper, a micro-grinder, a micro-pump, a micro-absorber, a micro-signal detector, a micro-drill, a micro-absorber, a micro-tester, a miniature a container, a micro syringe, a signal transmitter, a signal generator, a friction sensor, a charge sensor, a sense of temperature a detector, a hardness detector, a sound wave generator, a light wave generator, a heat generator, a micro-refrigerator or a charge generator. 如請求項1所述的器械，其特徵在於，該器械包括一個或多個子部件或一個或多個微型器件，該等子部件和該等微型器件交錯排列，以至於當該子部件與該微型器件其中之一降解或改變其幾何參數時，該器械降解成更小的碎片。 The device of claim 1 , wherein the device comprises one or more sub-components or one or more micro-devices, the sub-components and the micro-devices being staggered such that when the sub-assembly is When one of the devices degrades or changes its geometric parameters, the device degrades into smaller pieces. 如請求項1所述的器械，其特徵在於，該器械可降解至0.1微米尺寸量級。 The device of claim 1 wherein the device is degradable to a size on the order of 0.1 micron. 如請求項1所述的器械，其特徵在於，該器械可降解至小於0.1微米尺寸量級。 The device of claim 1 wherein the device is degradable to a size on the order of less than 0.1 micron. 一種奈米藥物輸送器械，包括一奈米藥物和一微型器件，其中該微型器件包括一可降解材料，該奈米藥物附著於該微型器件或整合在該微型器件中。 A nano drug delivery device comprising a nanometer drug and a micro device, wherein the micro device comprises a degradable material attached to or integrated in the micro device. 如請求項24所述的器械，其特徵在於，可降解材料包括聚(丙交酯-共-乙交酯)，聚(丙交酯)，聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、褐藻膠、膠原蛋白、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸酯化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生 物材料或它們的複合材料或混合物。 The device of claim 24, wherein the degradable material comprises poly(lactide-co-glycolide), poly(lactide), poly(L-lactic acid), poly(D,L- Lactic acid), polyglycolic acid, polylactic acid, polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethacrylic acid, poly Acrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polycrystalline germanium, tantalum nitride, Niobium oxynitride, niobium carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, raw Material or a composite or mixture thereof. 如請求項24所述的器械，其特徵在於，該可降解材料藉由一外部信號、存儲在該器械中的能量或媒介物、或者與具有一特定的物理或化學性質的一環境接觸後受激降解。 The device of claim 24, wherein the degradable material is subjected to an external signal, energy or medium stored in the device, or contacted with an environment having a specific physical or chemical property. Excited degradation. 如請求項26中所述的器械，其特徵在於，該信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The device of claim 26, wherein the signal comprises electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, Biomechanics, Bio-optics, Bio-thermal, Biophysics, Bio-Electrical, Bioelectrochemistry, Bio-Optics, Bio-Electrical, Biomechanical, Biomechanical Heat, Biotherm, Bioelectrochemical, Bioelectromechanical, Bioelectric Light, bioelectrochemical mechanical, physical or mechanical signals, or a combination thereof. 如請求項27中所述的器械，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、粒端DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；該光學性質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；該化學性質是PH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生 物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The apparatus of claim 27, wherein the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, grain end The electrical properties, capacitance or electrical resistance of the DNA and the chromosomal end; the thermal property is the temperature or vibrational frequency; the optical property is light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescence emission; the chemical property is pH, Chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, oxygen atom and/or molecular property and local charge density caused by position, Local atomic density due to oxygen atom and/or molecular properties and position, local electric field density due to oxygen atom and/or molecular properties and position, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, and signal response to trigger enhancement Biochemical additives, triggering enhanced signal response Additives, chemicals that increase test sensitivity, biochemicals that increase test sensitivity, biological additives that increase test sensitivity, or bond strength; the physical properties are density, shape, volume, or surface area; the biological properties are surface shape, surface area , surface charge, surface biological properties, surface chemistry, pH, electrolyte, ionic strength, electrical resistance, cell concentration, biomarker-related properties, or biological, electrical, physical or chemical properties of the solution; Frequency and spectral intensity distribution, acoustic intensity, acoustic absorption or acoustic resonance; this mechanical property is internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or Compressibility, the above properties can be static, dynamic or variable. 如請求項26所述的器械，其特徵在於，該可降解材料與特定物理或化學性質的一環境接觸，該性質包括一定的溫度、濕度、PH值或離子強度。 The device of claim 26, wherein the degradable material is in contact with an environment of a particular physical or chemical nature, the property comprising a certain temperature, humidity, pH or ionic strength. 如請求項24所述的器械，其特徵在於，該可降解材料在一所需的時間段內降解。 The device of claim 24, wherein the degradable material degrades over a desired period of time. 如請求項30所述的器械，其特徵在於，該所需的時間段範圍從一秒到兩週。 The device of claim 30, wherein the desired period of time ranges from one second to two weeks. 如請求項24所述的器械，其特徵在於，該奈米藥物整合在該微型器件中。 The device of claim 24, wherein the nano drug is integrated in the micro device. 如請求項24所述的器械，進一步包括另外至少一奈米藥物。 The device of claim 24, further comprising an additional at least one nanometer drug. 如請求項33所述的器械，進一步包括另外至少一微型器件，其包含一可降解材料。 The device of claim 33, further comprising at least one other micro device comprising a degradable material. 如請求項34所述的器械，其特徵在於，該至少兩個奈米藥物整合於至少兩個不同的微型器件中。 The device of claim 34, wherein the at least two nano drugs are integrated into at least two different micro devices. 如請求項24所述的器械，進一步包括一醫療裝備、一微型疾病檢測系統或一自動導航系統。 The device of claim 24, further comprising a medical device, a miniature disease detection system, or an automatic navigation system. 如請求項36所述的器械，其特徵在於，該微型疾病檢測系統檢測疾病，並發出一外部信號以觸發該可降解材料的降解。 The device of claim 36, wherein the micro-disease detection system detects the disease and sends an external signal to trigger degradation of the degradable material. 請求項37中所述的器械，其特徵在於，該信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The device of claim 37, wherein the signal comprises electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, biological Mechanics, Bio-optics, Bio-thermal, Biophysics, Bio-Electro-Mechanical, Bioelectrochemistry, Bio-optoelectronics, Bio-Electrical Heating, Biomechanical Optics, Biomechanical Heat, Biothermal Light, Bioelectrochemical Light, Bioelectromechanical Optics, Bioelectric Hot Light , bioelectrochemical mechanical, physical or mechanical signals, or a combination thereof. 請求項38中所述的器械，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；該光學性 質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；該化學性質是PH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The device of claim 38, wherein the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, DNA, and chromosome Electrical property, capacitance or electrical resistance of the grain end; the thermal property is temperature or vibration frequency; the optical property Quality is light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescence emission; the chemical properties are pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption. Rate, oxygen bonding site, oxygen bonding strength, local charge density caused by oxygen atom and/or molecular properties and position, local ion density caused by oxygen atom and/or molecular properties and position, oxygen atom and/or molecular property and Position-induced local electric field density, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, biological additives that trigger enhanced signal response, chemicals that increase test sensitivity, increase testing Sensitive biochemicals, biological additives that increase test sensitivity, or bonding strength; the physical properties are density, shape, volume, or surface area; the biological properties are surface shape, surface area, surface charge, surface biological properties, surface chemistry, PH value, electrolyte, ionic strength, electrical resistance, cell concentration, raw a property related to a substance, or a biological, electrical, physical, or chemical property of a solution; the acoustic property is a frequency and spectral intensity distribution, acoustic intensity, acoustic absorption, or acoustic resonance; the mechanical property is internal pressure, hardness, flow rate, Viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility, the above properties may be static, dynamic or variable. 如請求項37所述的器械，其特徵在於，該可降解材料從該微型疾病檢測系統接收信號時，啟動其降解。 The device of claim 37, wherein the degradable material initiates degradation upon receipt of the signal from the micro-disease detection system. 如請求項36所述的器械，其特徵在於，該自動導航系統將該器械導航至一病變部位，該器械在該病變部位進行治療。 The device of claim 36, wherein the automated navigation system navigates the device to a lesion site where the device is treated. 如請求項24所述的器械，其特徵在於，該器械包括一 或多個奈米藥物和一個或多個微型器件，該等子部件和該等微型器件交錯排列，以至於當該子部件與該微型器件其中之一降解或改變其幾何參數時，該器械降解成更小的碎片。 The device of claim 24, wherein the device comprises a Or a plurality of nanomedicines and one or more micro-devices, the sub-components and the micro-devices being staggered such that when one of the sub-components and the micro-device degrades or changes its geometric parameters, the device degrades Into smaller pieces. 如請求項24所述的器械，其特徵在於，該器械可降解至0.1微米尺寸量級。 The device of claim 24, wherein the device is degradable to a size of 0.1 micron. 如請求項24所述的器械，其特徵在於，該器械可降解至小於0.1微米尺寸量級。 The device of claim 24, wherein the device is degradable to a size on the order of less than 0.1 micron. 一種醫療器械，包括至少兩個連接在一起的構建塊，其中至少一個構建塊包括在分子等級的一可降解材料，其他每一個構建塊包括在分子等級能夠或者不能夠降解的一材料，當至少一個構建塊降解後，該醫療器械或該等構建塊一起降解成小塊或分子。 A medical device comprising at least two building blocks joined together, wherein at least one building block comprises a degradable material at a molecular level, and each of the other building blocks comprises a material that is capable or not degradable at a molecular level, at least After degradation of a building block, the medical device or the building blocks together degrade into small pieces or molecules. 如請求項45所述的器械，其特徵在於，至少一個構建塊包括在分子等級不能夠降解或不能夠降解至分子等級的一材料。 The device of claim 45, wherein the at least one building block comprises a material that is not capable of degrading or capable of degrading to a molecular level at a molecular level. 如請求項45所述的器械，其特徵在於，該可降解材料包括蛋白質、多肽、多糖、聚酯、聚原酸酯、聚己內酯、聚對二氧環己酮、一有機材料或一生物材料。 The device of claim 45, wherein the degradable material comprises a protein, a polypeptide, a polysaccharide, a polyester, a polyorthoester, a polycaprolactone, a polydioxanone, an organic material or a biomaterials. 如請求項45所述的器械，其特徵在於，在分子等級不能夠降解的該材料包括聚(丙交酯-共-乙交酯)，聚(丙交酯)， 聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、褐藻膠、膠原蛋白、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸酯化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合材料或混合物。 The device according to claim 45, characterized in that the material which is not degradable at a molecular level comprises poly(lactide-co-glycolide), poly(lactide), Poly(L-lactic acid), poly(D,L-lactic acid), polyglycolic acid, polylactic acid, polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol , polyethylene oxide, polymethacrylic acid, polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate Compounds, oxides, cerium, polycrystalline germanium, cerium nitride, cerium oxynitride, cerium carbide, aluminum, aluminum alloys, copper, tungsten, silver, organic materials, biological materials or composites or mixtures thereof. 如請求項45所述的器械，其特徵在於，該可降解材料在體內與周圍環境相互作用後降解。 The device of claim 45, wherein the degradable material degrades after interacting with the surrounding environment in the body. 如請求項45述的器械，其特徵在於，該可降解材料在被一外部信號觸發後在體內分解，該外部信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The device of claim 45, wherein the degradable material is decomposed in the body after being triggered by an external signal comprising electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical , electrochemistry, optoelectronics, electrothermal, electrochemical machinery, biochemistry, biomechanics, bio-optics, biothermals, biophysics, bioelectromechanical, bioelectrochemistry, bio-optoelectronics, bioelectrical heating, biomechanical optics, biomechanical heat, biology Thermo-optic, bioelectrochemical, bioelectromechanical, biotherm, bioelectrochemical, physical or mechanical signals, or combinations thereof. 如請求項50所述的器械，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；該光學性質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；該化學性質是PH值、化學反應、生物化學反應、生物電化學 反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The device of claim 50, wherein the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, DNA, and chromosome The electrical properties, capacitance or electrical resistance of the grain end; the thermal property is the temperature or vibration frequency; the optical property is light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescent emission; the chemical property is pH, chemical reaction, Biochemical reaction, bioelectrochemistry Reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, oxygen atom and/or molecular properties and local charge density caused by position, oxygen atom and/or molecular properties and position Local ion density, oxygen atom and/or molecular properties and positional local electric field density, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, and signal responses that trigger enhancement Bioadditives, chemicals that increase test sensitivity, biochemicals that increase test sensitivity, biological additives that increase test sensitivity, or bond strength; the physical properties are density, shape, volume, or surface area; the biological properties are surface shapes, Surface area, surface charge, surface biological properties, surface chemistry, pH, electrolyte, ionic strength, electrical resistance, cell concentration, biomarker related properties, or biological, electrical, physical or chemical properties of the solution; Is the frequency and spectral intensity distribution, acoustic intensity, acoustics Acoustic resonance; the mechanical properties are internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility. The above properties can be static or dynamic. Or change. 如請求項45的器械，其特徵在於，該可降解材料在一所需的時間段內在幾何尺寸上完全或部分降解。 The device of claim 45, characterized in that the degradable material is completely or partially degraded geometrically over a desired period of time. 如請求項52的器械，其特徵在於，該所需的時間段範圍是1秒至兩週。 The apparatus of claim 52, wherein the desired period of time ranges from 1 second to two weeks. 如請求項45的器械，其特徵在於，該等構建塊交錯排列，以至於當該子部件和該微型器件其中之一改變其幾何參數或降解時，該器械降解成小塊。 The device of claim 45, wherein the building blocks are staggered such that when one of the subassembly and the microdevice changes its geometrical parameters or degrades, the device degrades into small pieces. 如請求項45的器械，其特徵在於，該器械可降解至0.1微米尺寸量級。 The device of claim 45, characterized in that the device is degradable to the order of 0.1 micron size. 如請求項45的器械，其特徵在於，該器械可降解至小於0.1微米尺寸量級。 The device of claim 45, wherein the device is degradable to a size on the order of less than 0.1 micron. 一種攜帶藥物的器械，包括一第一藥物、包括封裝該第一藥物的一第一可降解材料的一內部微型器件、一第二藥物和包括封裝該第二藥物的一第二可降解材料的一外部微型器件。其中，該第一藥物在該內部微型器件內，該第二藥物在該內部微型器件和該外部微型器件之間。 A drug-carrying device comprising a first drug, an internal micro device including a first degradable material encapsulating the first drug, a second drug, and a second degradable material including the second drug packaged An external micro device. Wherein the first drug is within the internal micro device and the second drug is between the internal micro device and the external micro device. 如請求項57的器械，其特徵在於，該第一藥物和該第二藥物是相同的。 The device of claim 57, wherein the first drug and the second drug are the same. 如請求項57的器械，其特徵在於，該第一或該第二可降解材料包括聚(丙交酯-共-乙交酯)，聚(丙交酯)，聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、褐藻膠、膠原蛋白、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸酯化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合材料或混合物。 The device of claim 57, wherein the first or second degradable material comprises poly(lactide-co-glycolide), poly(lactide), poly(L-lactic acid), poly (D, L-lactic acid), polyglycolic acid, polylactic acid, polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, poly Methacrylic acid, polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, antimony, polycrystalline germanium , tantalum nitride, niobium oxynitride, tantalum carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites or mixtures thereof. 如請求項57的器械，其特徵在於，該外部微型器件或該內部微型器件中的該可降解材料在有一外部信號施加時，受啟動降解。 The device of claim 57, wherein the externally degradable material in the external micro device or the internal micro device is activated to degrade upon application of an external signal. 如請求項60中所述的器械，其特徵在於，該信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The device of claim 60, wherein the signal comprises electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, Biomechanics, Bio-optics, Bio-thermal, Biophysics, Bio-Electrical, Bioelectrochemistry, Bio-Optics, Bio-Electrical, Biomechanical, Biomechanical Heat, Biotherm, Bioelectrochemical, Bioelectromechanical, Bioelectric Light, bioelectrochemical mechanical, physical or mechanical signals, or a combination thereof. 如請求項61中所述的器械，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；該光學性質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；化學性質是PH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密 度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The device of claim 61, wherein the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, DNA and The electrical properties, capacitance or electrical resistance of the chromosomal end; the thermal property is temperature or vibration frequency; the optical property is light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescence emission; chemical properties are pH, chemical reaction, Biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, oxygen atom and/or molecular properties and local charge density caused by position, oxygen atom and / or local ion density caused by molecular properties and location, local electric field density due to oxygen atom and/or molecular properties and position, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemicals that trigger enhanced signal response Additives, bio-additives that trigger enhanced signal response, chemicals that increase test sensitivity, increase testing Sensitive biochemicals, biological additives that increase test sensitivity, or bonding strength; the physical properties are dense Degree, shape, volume or surface area; the biological properties are surface shape, surface area, surface charge, surface biological properties, surface chemistry, pH, electrolyte, ionic strength, electrical resistance, cell concentration, biomarker related properties, or solution Biological, electrical, physical or chemical properties; the acoustic properties are frequency and spectral intensity distribution, acoustic intensity, acoustic absorption or acoustic resonance; the mechanical properties are internal pressure, hardness, flow rate, viscosity, shear strength, tensile Strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility, the above properties may be static, dynamic or variable. 如請求項60所述，該可降解材料在一所需的時間段內降解。 As described in claim 60, the degradable material degrades over a desired period of time. 如請求項63所述的器械，其特徵在於，該所需的時間段範圍從1秒至兩週。 The device of claim 63, wherein the desired period of time ranges from 1 second to two weeks. 如請求項60所述的器械，其特徵在於，該外部微型器件和該內部微型器件中的該等材料在相同時間或不同時間降解。 The device of claim 60, wherein the outer microdevice and the material in the inner micro device degrade at the same time or at different times. 如請求項56所述的器械，其特徵在於，進一步包括一醫療裝備、一微型疾病檢測系統或一自動導航系統，其整合在該內部微型器件或該外部微型器件裏。 The device of claim 56, further comprising a medical device, a micro-disease detection system or an automatic navigation system integrated in the internal micro device or the external micro device. 如請求項66所述，該微型疾病檢測系統檢測疾病並向該內部或該外部微型器件發送一外部信號以觸發其降解。 As described in claim 66, the micro-disease detection system detects the disease and sends an external signal to the internal or external micro-device to trigger its degradation. 如請求項67中所述的器械，其特徵在於，該信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The device of claim 67, wherein the signal comprises electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, Biomechanics, Bio-optics, Bio-thermal, Biophysics, Bio-Electrical, Bioelectrochemistry, Bio-Optics, Bio-Electrical, Biomechanical, Biomechanical Heat, Biotherm, Bioelectrochemical, Bioelectromechanical, Bioelectric Light, bioelectrochemical mechanical, physical or mechanical signals, or a combination thereof. 如請求項68中所述的器械，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；光學性質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；該化學性質是PH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、 聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The device of claim 68, wherein the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, DNA and The electrical properties, capacitance or electrical resistance of the chromosomal end; the thermal property is temperature or vibration frequency; the optical properties are light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescence emission; the chemical property is pH, chemical reaction, Biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption rate, oxygen bonding site, oxygen bonding strength, oxygen atom and/or molecular properties and local charge density caused by position, oxygen atom and / or local ion density caused by molecular properties and location, local electric field density due to oxygen atom and/or molecular properties and position, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemicals that trigger enhanced signal response Additives, bio-additives that trigger enhanced signal response, chemicals that increase test sensitivity, increase testing Sensitive biochemicals, biological additives that increase test sensitivity, or bonding strength; the physical properties are density, shape, volume, or surface area; the biological properties are surface shape, surface area, surface charge, surface biological properties, surface chemistry, pH, electrolyte, ionic strength, electrical resistance, cell concentration, biomarker-related properties, or biological, electrical, physical, or chemical properties of the solution; the acoustic properties are frequency and spectral intensity distribution, Acoustic strength, acoustic absorption or acoustic resonance; the mechanical properties are internal pressure, hardness, flow rate, viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility. It is static, dynamic, or changing. 如請求項67中所述的器械，其特徵在於，該內部或該外部微型器件中的該材料接收到來自於該微型疾病檢測系統的該信號後，受啟動降解。 The device of claim 67, wherein the material in the internal or external micro device is degraded upon initiation upon receipt of the signal from the micro-disease detection system. 如請求項66中所述的器械，其特徵在於，該自動導航系統將該器械導航至一病變部位，該器械在該病變部位進行治療。 The device of claim 66, wherein the automated navigation system navigates the device to a lesion site where the device is treated. 如請求項66中所述的器械，其特徵在於，該等藥物、該微型器件、與該醫療裝備、該微型疾病檢測系統或該自動導航系統交錯排列，以至於當該等藥物、該微型器件、該醫療裝備、該微型疾病檢測系統與該自動導航系統中至少一者改變其幾何參數或降解時，該器械降解成小塊。 The device of claim 66, wherein the drugs, the micro device, the medical device, the micro disease detection system, or the automatic navigation system are staggered such that the drugs, the micro device When the medical device, the micro-disease detection system, and at least one of the auto-navigation systems change their geometric parameters or degradation, the device degrades into small pieces. 如請求項57中所述的器械，其特徵在於，該等藥物和該微型器件交錯排列，以至於當該等藥物或該微型器件中至少一者改變其幾何參數或降解時，該器械降解成小塊。 The device of claim 57, wherein the drugs and the micro device are staggered such that when at least one of the drugs or the micro device changes its geometric parameters or degradation, the device degrades into Small pieces. 如請求項57中所述的器械，其特徵在於，該器械可以降解至0.1微米尺寸量級。 The device of claim 57, wherein the device is degradable to a size of 0.1 micron. 如請求項57中所述的器械，其特徵在於，該器械可以降解至小於0.1微米尺寸量級。 The device of claim 57, wherein the device is degradable to a size on the order of less than 0.1 micron. 一種製造一可降解器械的方法，包括：提供一個基板；可選擇性地，澱積一薄層材料，該薄層材料可在後續中去除，以分離所製造之該器械和該基板；澱積一第一材料至該基板，該第一材料可降解；用微電子技術圖案化該第一材料以在該第一材料上形成一凹陷區域；澱積一第二材料至該第一材料和該基板上，該第二材料和該第一材料是不同的；平坦化該第二材料以去除該第一材料上的該第二材料，並停止於該第一材料之層上；可選擇性地，以一或多個額外材料重複上述圖案化、澱積和平坦化步驟以產生器械，該一或多個額外材料之每一者是不同於就在此一額外材料之前所澱積之材料；可選擇性地，藉由重複上述步驟澱積一新的第一材料、圖案化該新的第一材料、澱積一新的第二材料或平坦化該新的第二材料，而在該相同基板上製造一個或多個附加部件；以及從該基板去除該可選薄層，從而將該器械和可選擇附加部件從該基板上分離。 A method of making a degradable device, comprising: providing a substrate; optionally, depositing a thin layer of material that can be subsequently removed to separate the fabricated device and the substrate; depositing a first material to the substrate, the first material is degradable; the first material is patterned by microelectronics to form a recessed region on the first material; a second material is deposited to the first material and the The second material and the first material are different on the substrate; the second material is planarized to remove the second material on the first material, and stops on the layer of the first material; optionally Repetitively patterning, depositing, and planarizing the steps described above with one or more additional materials to produce an instrument, each of the one or more additional materials being different than the material deposited prior to the additional material; Alternatively, by repeating the above steps, depositing a new first material, patterning the new first material, depositing a new second material, or planarizing the new second material is the same Manufacturing one or more additional substrates Member; and thereby separated from the substrate sheet optionally removed from the substrate, the apparatus and optionally additional components. 如請求項76所述的方法，其特徵在於，該基板包括矽、氧化物、多晶矽、藍寶石、磷酸鹽化合物、鋯化合物或鈣化合物。 The method of claim 76, wherein the substrate comprises ruthenium, an oxide, a polysilicon, a sapphire, a phosphate compound, a zirconium compound or a calcium compound. 如請求項76所述的方法，其特徵在於，該第一材料包括一藥物、一醫療裝備、一微型疾病檢測系統或一自動導航系統。 The method of claim 76, wherein the first material comprises a drug, a medical device, a micro-disease detection system, or an automatic navigation system. 如請求項76所述的方法，其特徵在於，該第二材料也是可降解的。 The method of claim 76, wherein the second material is also degradable. 如請求項76所述的方法，其特徵在於，該第一可降解材料包括聚(丙交酯-共-乙交酯)，聚(丙交酯)，聚(L-乳酸)、聚(D，L-乳酸)、聚乙醇酸、聚乳酸、聚酐、聚(鄰醚)、聚氨基酸、人工合成的蛋白、天然蛋白質、生物聚合物、聚乙烯醇、聚環氧乙烷、聚甲基丙烯酸、聚丙烯酸、聚乙二醇、褐藻膠、膠原蛋白、明膠、透明質酸、金屬鎂、鎂合金、鈣磷酸鹽陶瓷、玻璃、鈣化合物、磷酸酯化合物、氧化物、矽、多晶矽、氮化矽、氮氧化矽、碳化矽、鋁、鋁合金、銅、鎢、銀、有機材料、生物材料或它們的複合材料或混合物。 The method of claim 76, wherein the first degradable material comprises poly(lactide-co-glycolide), poly(lactide), poly(L-lactic acid), poly(D) , L-lactic acid), polyglycolic acid, polylactic acid, polyanhydride, poly(o-ether), polyamino acid, synthetic protein, natural protein, biopolymer, polyvinyl alcohol, polyethylene oxide, polymethyl Acrylic acid, polyacrylic acid, polyethylene glycol, alginate, collagen, gelatin, hyaluronic acid, magnesium metal, magnesium alloy, calcium phosphate ceramic, glass, calcium compound, phosphate compound, oxide, cerium, polycrystalline germanium, nitrogen Antimony, antimony oxynitride, niobium carbide, aluminum, aluminum alloy, copper, tungsten, silver, organic materials, biological materials or composites or mixtures thereof. 如請求項76所述的方法，其特徵在於，圖案化是藉由微影和蝕刻製程完成。 The method of claim 76, wherein the patterning is accomplished by a lithography and etching process. 如請求項76所述的方法，其特徵在於，平坦化是藉由拋光或回蝕刻製程完成。 The method of claim 76, wherein the planarizing is accomplished by a polishing or etch back process. 如請求項76所述的方法，其特徵在於，該附加部件包括一電壓比較器、一四點探針、一計算器、一邏輯電路、一記 憶存儲單元、一微型切割器、一微型錘、一微型護罩、一微型染料、一微型梢、一微型刀、一微型針、一微型持線鉗、一微型鑷子、一微型光吸收器、一微型鏡、一微型輪、一微型濾波器、一微型斬波器、一微型粉碎機、一微型泵、一微型吸收器、一微型信號檢測器、一微型鑽孔機、一微型吸取器、一微測試器、一微型容器、一微型注射器、一信號發送器、一信號發生器、一摩擦感測器、一電荷感測器、一溫度感測器、一硬度檢測器、一聲波發生器、一光波發生器、一熱發生器、一微型致冷器或一電荷發生器。 The method of claim 76, wherein the additional component comprises a voltage comparator, a four-point probe, a calculator, a logic circuit, and a Recalling a storage unit, a micro cutter, a micro hammer, a micro shield, a micro dye, a micro tip, a micro knife, a micro needle, a micro wire cutter, a miniature forceps, a miniature light absorber, a micro mirror, a micro wheel, a micro filter, a micro chopper, a micro pulverizer, a micro pump, a micro absorber, a micro signal detector, a micro drill, a micro suction device, a micro tester, a micro-container, a micro-injector, a signal transmitter, a signal generator, a friction sensor, a charge sensor, a temperature sensor, a hardness detector, and an acoustic wave generator , a light wave generator, a heat generator, a micro-refrigerator or a charge generator. 如請求項76所述的方法，其特徵在於，該可降解材料藉由一外部信號、存儲在該器械中的能量或媒介物、或者與具有一特定的物理或化學性質的一環境接觸後受激降解。 The method of claim 76, wherein the degradable material is subjected to an external signal, energy or medium stored in the device, or contacted with an environment having a specific physical or chemical property. Excited degradation. 如請求項84所述的方法，其特徵在於，所述信號包括電學、磁學、電磁學、熱學、光學、聲學、生物、化學、機電、電化學、光電、電熱、電化學機械、生化、生物機械學、生物光學、生物熱學、生物物理、生物電機械、生物電化學、生物光電、生物電熱、生物機械光學、生物力學熱、生物熱光、生物電化學光、生物機電光學、生物電熱光、生物電化學機械、物理或機械信號，或它們的組合。 The method of claim 84, wherein the signal comprises electrical, magnetic, electromagnetic, thermal, optical, acoustic, biological, chemical, electromechanical, electrochemical, optoelectronic, electrothermal, electrochemical, biochemical, Biomechanics, Bio-optics, Bio-thermal, Biophysics, Bio-Electrical, Bioelectrochemistry, Bio-Optics, Bio-Electrical, Biomechanical, Biomechanical Heat, Biotherm, Bioelectrochemical, Bioelectromechanical, Bioelectric Light, bioelectrochemical mechanical, physical or mechanical signals, or a combination thereof. 如請求項85所述的方法，其特徵在於，該電學性質為表面電荷、表面電勢、靜態電勢、電流，電場分佈、電偶極子、電四極子、三位電場或電荷雲分佈、DNA和染色體粒端的電學性質、電容或電阻；該熱學性質是溫度或振動頻率；該光學性 質是光吸收、光傳播、光反射、光電性質、亮度或螢光發射；該化學性質是PH值、化學反應、生物化學反應、生物電化學反應、反應速度、反應能量、氧濃度、氧消耗率、氧鍵合部位、氧鍵合強度、氧原子及/或分子性質及位置引起的局部電荷密度、氧原子及/或分子性質及位置引起的局部離子密度、氧原子及/或分子性質及位置引起的局部電場密度、離子強度、催化行為、觸發增強之信號回應的化學添加劑、觸發增強之信號回應的生物化學添加劑、觸發增強之信號回應的生物添加劑、增加測試靈敏度的化學品、增加測試靈敏度的生物化學品、增加測試靈敏度的生物添加劑、或鍵合強度；該物理性質為密度、形狀、體積或表面積；該生物性質是表面形狀、表面積、表面電荷、表面生物性質、表面化學性質、PH值、電解液、離子強度、電阻、細胞濃度、生物標誌物相關性質、或溶液的生物學、電學、物理學或化學性質；該聲學性質是頻率和光譜強度分佈、聲學強度、聲學吸收或聲學共振；該機械性質是內部壓力、硬度、流速、黏度、剪切強度、拉伸強度、斷裂應力、黏附性、機械共振頻率、彈性、塑性或壓縮性，上述性質可以是靜態、動態或變化的。 The method of claim 85, wherein the electrical property is surface charge, surface potential, static potential, current, electric field distribution, electric dipole, electric quadrupole, three-position electric field or charge cloud distribution, DNA, and chromosome Electrical property, capacitance or electrical resistance of the grain end; the thermal property is temperature or vibration frequency; the optical property Quality is light absorption, light propagation, light reflection, photoelectric properties, brightness or fluorescence emission; the chemical properties are pH, chemical reaction, biochemical reaction, bioelectrochemical reaction, reaction rate, reaction energy, oxygen concentration, oxygen consumption. Rate, oxygen bonding site, oxygen bonding strength, local charge density caused by oxygen atom and/or molecular properties and position, local ion density caused by oxygen atom and/or molecular properties and position, oxygen atom and/or molecular property and Position-induced local electric field density, ionic strength, catalytic behavior, chemical additives that trigger enhanced signal response, biochemical additives that trigger enhanced signal response, biological additives that trigger enhanced signal response, chemicals that increase test sensitivity, increase testing Sensitive biochemicals, biological additives that increase test sensitivity, or bonding strength; the physical properties are density, shape, volume, or surface area; the biological properties are surface shape, surface area, surface charge, surface biological properties, surface chemistry, PH value, electrolyte, ionic strength, electrical resistance, cell concentration, raw a property related to a substance, or a biological, electrical, physical, or chemical property of a solution; the acoustic property is a frequency and spectral intensity distribution, acoustic intensity, acoustic absorption, or acoustic resonance; the mechanical property is internal pressure, hardness, flow rate, Viscosity, shear strength, tensile strength, fracture stress, adhesion, mechanical resonance frequency, elasticity, plasticity or compressibility, the above properties may be static, dynamic or variable. 如請求項84所述的方法，其特徵在於，該可降解材料與具有一特定物理或化學性質的一環境接觸，該性質包括一定的溫度、濕度、PH值或離子強度。 The method of claim 84, wherein the degradable material is in contact with an environment having a specific physical or chemical property, the property comprising a certain temperature, humidity, pH or ionic strength. 如請求項76所述的方法，其特徵在於，該可降解材料在一所需的時間段內降解。 The method of claim 76, wherein the degradable material degrades over a desired period of time. 如請求項88所述的器械，其特徵在於，該所需的時間段範圍從一秒到兩週。 The device of claim 88, wherein the desired period of time ranges from one second to two weeks. 如請求項76所述的方法，其特徵在於，可藉由回蝕刻去除該第一材料上的該第二材料並在該第一材料的凹陷區域留下該第二材料。 The method of claim 76, wherein the second material on the first material is removed by etch back and the second material is left in the recessed region of the first material. 如請求項76所述的方法，進一步包括重複蝕刻一現存材料、澱積另一材料、平坦化該另外澱積的材料的步驟，從而形成一個至少有兩層的可降解器械。 The method of claim 76, further comprising the step of repeatedly etching an existing material, depositing another material, and planarizing the additionally deposited material to form a degradable device having at least two layers. 如請求項76所述的方法，其特徵在於，所有部件和器械都由複合材料組成，其中至少一種材料可以在分子等級上降解或降解至分子等級。 The method of claim 76, wherein all of the components and instruments are comprised of a composite material, wherein at least one of the materials can be degraded or degraded to a molecular level at a molecular level. 如請求項76所述的方法，其特徵在於，該可降解器械可降解至0.1微米尺寸量級。 The method of claim 76, wherein the degradable device is degradable to a size of 0.1 micron. 如請求項76所述的方法，其特徵在於，該可降解器械可降解至小於0.1微米尺寸量級。 The method of claim 76, wherein the degradable device is degradable to a size on the order of less than 0.1 micron. 一種製造一可降解器械的方法，包括：提供一個基板；可選擇性地，澱積一薄層材料，該薄層材料可在後續中去除，以分離所要製造之一材料堆疊和該基板；澱積一第一材料至該基板，該第一材料可降解； 用微影和蝕刻製程圖案化該第一材料以在該第一材料上形成一凹陷區域；澱積一第二材料至該第一材料和該基板上，該第二材料和該第一材料是不同的；平坦化該第二材料以去除該第一材料上的該第二種材料，並停止於停止第一材料之層上；可選擇性地，以一或多個額外材料重複上述圖案化、澱積和平坦化的步驟以建構額外特徵，因而產生該降解器械，其中該一或多個額外材料之每一者是不同於就在此一額外材料之前所澱積之材料；可選擇性地，重複澱積、圖案化、澱積或平坦化步驟，以製造一個或多個附加器件，這些器件可以與該器械相連或不連；以及去除該可選薄層，從而將該器械和可選擇附加器件與該基板分離。 A method of making a degradable device, comprising: providing a substrate; optionally, depositing a thin layer of material that can be subsequently removed to separate a stack of materials to be fabricated and the substrate; Forming a first material to the substrate, the first material being degradable; Patterning the first material with a lithography and etching process to form a recessed region on the first material; depositing a second material onto the first material and the substrate, the second material and the first material being Differentiating the second material to remove the second material on the first material and stopping on stopping the layer of the first material; optionally, repeating the patterning with one or more additional materials a step of depositing and planarizing to construct additional features, thereby producing the degradation device, wherein each of the one or more additional materials is different from the material deposited prior to the additional material; Repeating the steps of depositing, patterning, depositing or planarizing to produce one or more additional devices that may or may not be attached to the device; and removing the optional thin layer to thereby The additional device is selected to be separated from the substrate. 如請求項95所述的方法，其特徵在於，該等附加器件包括電壓比較器、四點探針、計算器、邏輯電路、記憶存儲單元、微型切割器、微型錘、微型護罩、微型染料、微型梢、微型刀、微型針、微型持線鉗、微型鑷子、微型光吸收器、微型鏡、微型輪、微型濾波器、微型斬波器、微型粉碎機、微型泵、微型吸收器、微型信號檢測器、微型鑽孔機、微型吸取器、微測試器、微型容器、微型注射器、信號發送器、信號發生器、摩擦感測器、電荷感測器、溫度感測器、硬度檢測器、聲波發生器、光波發生器、熱發生器、微型致冷器和電荷發生器。 The method of claim 95, wherein the additional device comprises a voltage comparator, a four-point probe, a calculator, a logic circuit, a memory storage unit, a micro-cutter, a micro-hammer, a micro-shield, a micro-dye , micro tips, micro knives, micro needles, miniature wire tongs, miniature tweezers, micro light absorbers, micro mirrors, micro wheels, micro filters, miniature choppers, micro pulverizers, micro pumps, micro absorbers, miniatures Signal detectors, micro-drills, micro-absorbers, micro-testers, micro-containers, micro-injectors, signal transmitters, signal generators, friction sensors, charge sensors, temperature sensors, hardness detectors, Acoustic generators, lightwave generators, heat generators, micro-coolers and charge generators. 如請求項95所述的方法，其特徵在於，所有部件和器械都由複合材料組成，其中至少一材料可以在分子等級上降解或降解至分子等級。 The method of claim 95, wherein all of the components and instruments are comprised of a composite material, wherein at least one of the materials can be degraded or degraded to a molecular level at a molecular level. 如請求項95所述的方法，其特徵在於，該器械可降解至0.1微米尺寸量級。 The method of claim 95, wherein the device is degradable to a size of 0.1 micron. 如請求項95所述的方法，其特徵在於，該器械可降解至小於0.1微米尺寸量級。 The method of claim 95, wherein the device is degradable to a size on the order of less than 0.1 micron.