TW201341134A - Robot hand and robot - Google Patents
Robot hand and robot Download PDFInfo
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- TW201341134A TW201341134A TW101131317A TW101131317A TW201341134A TW 201341134 A TW201341134 A TW 201341134A TW 101131317 A TW101131317 A TW 101131317A TW 101131317 A TW101131317 A TW 101131317A TW 201341134 A TW201341134 A TW 201341134A
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- fork
- pair
- liquid crystal
- crystal glass
- fastening
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S294/00—Handling: hand and hoist-line implements
- Y10S294/901—Plate lifting clamp
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
本發明揭示的實施形態是有關對象物搬運用的機器人手及具備該機器人手的機器人。 The embodiment disclosed in the present invention relates to a robot hand for carrying an object and a robot including the robot hand.
以往，對象物搬運用的機器人手已為人知(例如，參閱日本專利文獻1)。該習知技術的機器人手(基板搬運用手)是透過手安裝用板被安裝於機器人(自動搬運裝置)的手安裝部。並且，具備：配置在較對象物(基板)的周緣部更外側的臂部，及安裝於該臂部，把持著對象物的周緣部的基板把持部。 Conventionally, a robot hand for carrying an object has been known (for example, refer to Japanese Patent Laid-Open Publication No. Hei. The robot hand (substrate transfer hand) of the prior art is attached to the hand attachment portion of the robot (automatic conveyance device) through the hand attachment plate. Further, the present invention includes an arm portion that is disposed outside the peripheral edge portion of the object (substrate), and a substrate holding portion that is attached to the arm portion and holds the peripheral edge portion of the object.
基板把持部的基材把持材是由：引導構件(把持母材)；移動．引導該引導構件的導件；及支撐對象物內面的支撐銷所構成。引導構件可沿著固定於臂部的導件朝臂部的長方向移動，並以螺栓固定在預定的位置。又，引導構件具備基板引導部與基板對面部。基板引導部是在接收對象物時，即使對象物的位置有著多少偏移的場合，仍可將對象物引導至基板對面部所圍繞的部分。基板對面部是間隔預定的間隙配置與把持在支撐銷上的對象物的端面相對，以防止對象物偏移。 The substrate holding material of the substrate holding portion is composed of: a guiding member (holding base material); moving. A guide guiding the guiding member; and a support pin supporting the inner surface of the object. The guiding member is movable along the guide fixed to the arm toward the longitudinal direction of the arm and fixed at a predetermined position by bolts. Further, the guiding member includes a substrate guiding portion and a substrate facing surface. The substrate guiding portion can guide the object to a portion surrounded by the substrate to the face even when the position of the object is slightly shifted when the object is received. The substrate is disposed at a predetermined gap between the substrate and the end surface of the object held on the support pin to prevent the object from being displaced.
〔專利文獻1〕日本特開平11-254374號公報 [Patent Document 1] Japanese Patent Laid-Open No. Hei 11-254374
上述習知技術的機器人手是藉著改變引導構件之螺栓的固定位置，可變更對象物的支撐位置，可使用於搬運彼此尺寸不同之對象物的環境。如上述，當搬運對象物用的機器人手使用於搬運彼此尺寸不同對象物的環境的場合，每變更搬運對象的對象物的尺寸時，為了間隔預定間隙與對象物相對，有進行變更引導構件的固定位置之安裝更換的必要。一般，在示範時，針對每一對象物的搬運尺寸，設定引導構件的固定位置並預先記錄標記，在變更搬運對象的對象物尺寸時，藉配置固定引導構件使其與上述示範時記錄的標記一致地進行安裝更換。為此，安裝更換費時，則不能稱之為作業性良好。 In the above-described robot hand of the prior art, by changing the fixing position of the bolt of the guiding member, the supporting position of the object can be changed, and an environment for transporting objects having different sizes from each other can be used. As described above, when the robot hand for transporting the object is used to transport the environment of the object having different sizes, when the size of the object to be transported is changed, the guide member is changed to face the object with a predetermined gap therebetween. It is necessary to install and replace the fixed position. In general, in the demonstration, the fixed position of the guiding member is set for the transport size of each object, and the mark is recorded in advance. When the size of the object to be transported is changed, the fixed guiding member is disposed to be marked with the above-described exemplary recording. Install and replace consistently. For this reason, when the installation and replacement fee is charged, it cannot be said that the workability is good.
本發明是有鑒於以上的問題所研創而成，以提供可容易進行階段性變更的機器人手及機器人為目的。 The present invention has been made in view of the above problems, and aims to provide a robot hand and a robot that can be easily changed in stages.
為解決上述課題，根據本發明之一觀點，設置於機器人臂，搬運對象物用的機器人手中，具備：可載放上述對象物的至少一個叉子；在上述叉子的長方向彼此分開配置的一對第1固定構件；及分別配置在上述一對第1固定構件之間，限制載放於上述叉子的上述對象物之上述長方向移動的一對第1引導構件，上述一對第1引導構件的至少一方運用可將上述叉子的長方向位置選擇性設定於複數位置所構成的機器人手。 In order to solve the above problems, the robot arm is provided in a robot arm for transporting an object, and includes at least one fork on which the object can be placed, and a pair that is disposed apart from each other in the longitudinal direction of the fork. a first fixing member; and a pair of first guiding members that are disposed between the pair of first fixing members and that restrict movement in the longitudinal direction of the object placed on the fork, and the pair of first guiding members At least one of the robot hands is configured to selectively set the longitudinal position of the fork to a plurality of positions.
根據本發明的機器人手及機器人，可容易進行安裝更換。 According to the robot hand and the robot of the present invention, it is easy to install and replace.
以下，針對一實施形態一邊參閱圖式一邊說明如下。 Hereinafter, an embodiment will be described below with reference to the drawings.
如第1圖表示，本實施形態的機器人1是將收納於未圖示之匣的薄板狀液晶玻璃基板W(對象物)搬運至預定區域的多關節機器人。該機器人1，具有：可在預定方向行走的行走台車2；安裝於行走台車2的固定基台3；升降臂4；水平基台5；以對稱構造連結於水平基台5的左臂6L及右臂6R。並且，行走台車2並非必要，機器人也可固定於架台等。 As shown in Fig. 1, the robot 1 of the present embodiment is a multi-joint robot that transports a thin plate-shaped liquid crystal glass substrate W (object) housed in a crucible (not shown) to a predetermined area. The robot 1 includes a traveling carriage 2 that can travel in a predetermined direction, a fixed base 3 attached to the traveling carriage 2, a lifting arm 4, a horizontal base 5, and a left arm 6L that is coupled to the horizontal base 5 in a symmetrical structure and Right arm 6R. Further, the traveling trolley 2 is not necessary, and the robot can be fixed to the gantry or the like.
升降臂4具有前端連結於固定基台3的第1升降連桿4a，及前端連結於水平基台5的第2升降連桿4b，第1升降連桿4a是以第1旋繞軸7為中心旋繞，第2升降連桿4b是以第2旋繞軸8為中心旋繞，使配置在較升降臂4上側的水平基台5、左臂6L及右臂6R上下移動。 The lift arm 4 has a first lift link 4a whose front end is coupled to the fixed base 3, and a second lift link 4b whose front end is coupled to the horizontal base 5. The first lift link 4a is centered on the first winding shaft 7 The second lifting link 4b is wound around the second winding shaft 8 so that the horizontal base 5, the left arm 6L, and the right arm 6R disposed on the upper side of the lifting arm 4 move up and down.
水平基台5是以第3旋繞軸20為中心旋繞，並使得左臂6L及右臂6R在水平方向旋繞。 The horizontal base 5 is wound around the third winding shaft 20, and the left arm 6L and the right arm 6R are wound in the horizontal direction.
左臂6L具有連結於水平基台5的第1左連桿6La及前端具備液晶玻璃基板W搬運用的左手9L的第2左連桿6Lb，第1左連桿6La是以第3旋繞軸10L為中心旋繞， 第2左連桿6Lb是以第4旋繞軸11L為中心旋繞，使左手9L進退移動。 The left arm 6L has a first left link 6La connected to the horizontal base 5 and a second left link 6Lb having a left hand 9L for transporting the liquid crystal glass substrate W at the tip end, and the first left link 6La is a third winding shaft 10L. Centered around, The second left link 6Lb is wound around the fourth winding shaft 11L, and moves the left hand 9L forward and backward.
右臂6R具有連結於水平基台5的第1右連桿6Ra及前端具備液晶玻璃基板W搬運用的右手9R的第2右連桿6Rb，第1右連桿6Ra是以第3旋繞軸10R為中心旋繞，第2右連桿6Rb是以第4旋繞軸11R為中心旋繞，使右手9R進退移動。 The right arm 6R has a first right link 6Ra connected to the horizontal base 5 and a second right link 6Rb having a right hand 9R for transporting the liquid crystal glass substrate W at the tip end, and the first right link 6Ra is a third winding shaft 10R. The second right link 6Rb is wound around the fourth winding shaft 11R so that the right hand 9R moves forward and backward.
左手9L及右手9R雖是將上下方向的位置偏移配置(該例中，左手9L是配置在上側、右手9R是配置在下側)，但是，基本上彼此為相同的構造，分別具有可載放液晶玻璃基板W的3個叉子12。再者，叉子12的數量，不限於該例的3個，也可以是1個或2個或4個以上。 The left hand 9L and the right hand 9R are arranged to be displaced in the vertical direction (in this example, the left hand 9L is disposed on the upper side and the right hand 9R is disposed on the lower side), but basically have the same structure, and are respectively mountable. Three forks 12 of the liquid crystal glass substrate W. Further, the number of the forks 12 is not limited to three in this example, and may be one or two or four or more.
再者，左臂6L及右臂6R(以下，該等總稱為「臂6」)是分別相當於申請專利範圍記載的機器人臂。又，左手9L及右手9R(以下，該等總稱為「手9」)是分別相當於申請專利範圍記載的機器人手。 Further, the left arm 6L and the right arm 6R (hereinafter, these are collectively referred to as "arm 6") are robot arms respectively corresponding to the scope of the patent application. Further, the left hand 9L and the right hand 9R (hereinafter, these are collectively referred to as "hand 9") are robot hands respectively described in the patent application scope.
如以上基本構成的機器人1藉著臂6的擺動，使得手9朝向前方移動，並將升降臂4朝上方驅動，可使手9向上方移動，將匣內的液晶玻璃基板W載放在叉子12上。隨後，擺動臂6，將手9朝著後方移動使水平基台5旋繞，使得臂6在水平方向旋繞。並且，擺動臂6，將手9朝著前方移動，使升降臂4朝向下方驅動，可使得手9向下方移動，將載放於叉子12上的液晶玻璃基板W載放在預定的區域。如上述，機器人1可將收納於匣的液晶玻璃 基板W搬運到預定的區域。 The robot 1 basically constructed as described above moves the hand 9 forward by the swing of the arm 6, and drives the lifting arm 4 upward, so that the hand 9 can be moved upward, and the liquid crystal glass substrate W in the crucible is placed on the fork. 12 on. Subsequently, the arm 6 is swung, and the hand 9 is moved rearward to wind the horizontal base 5 so that the arm 6 is wound in the horizontal direction. Further, the swing arm 6 moves the hand 9 forward, and the lift arm 4 is driven downward, so that the hand 9 can be moved downward, and the liquid crystal glass substrate W placed on the fork 12 is placed in a predetermined region. As described above, the robot 1 can house the liquid crystal glass housed in the crucible The substrate W is transported to a predetermined area.
在此，本實施形態中，作為機器人1的搬運對象，準備彼此尺寸不同的3種類的液晶玻璃基板W。本例中，準備最大尺寸(例如，730×920)的液晶玻璃基板W1(參閱後述的第2圖及第3圖)；第2大尺寸(例如，680×880)的液晶玻璃基板W2(參閱後述的第4圖及第5圖)；及最小尺寸(例如，620×750)的液晶玻璃基板W3(參閱後述的第6圖及第7圖)。叉子12皆可載放該等3種類的液晶玻璃基板W1~W3。 In the present embodiment, three kinds of liquid crystal glass substrates W having different sizes from each other are prepared as the object of transportation of the robot 1. In this example, a liquid crystal glass substrate W1 having a maximum size (for example, 730×920) (see FIGS. 2 and 3 to be described later) and a second large-size (for example, 680×880) liquid crystal glass substrate W2 are prepared (see 4th and 5th drawings to be described later; and a liquid crystal glass substrate W3 having a minimum size (for example, 620 × 750) (see FIGS. 6 and 7 to be described later). Each of the three types of liquid crystal glass substrates W1 to W3 can be placed on the fork 12.
雖在第1圖中省略圖示，但為防止載放於叉子12上的液晶玻璃基板W朝著叉子12長方向(以下適當稱之為「叉子長方向」)的偏移(限制載放於叉子12上的液晶玻璃基板W的叉子長方向的移動)，在叉子12上，從載放於該等叉子12上的液晶玻璃基板W的叉子長方向兩端分別間隔預定的間隙(例如，0.5mm的餘隙)固定一對引導構件13(第1引導構件。參閱後述的第2圖等)使其相對。因此，每當變更搬運對象的液晶玻璃基板W的尺寸時，在液晶玻璃基板W與叉子長方向間隔預定的間隙使其相對地進行變更引導構件13固定位置的安裝更換。再者，上述的餘隙和液晶玻璃基板W的尺寸比較必須設定十分地小。餘隙一旦過大時，液晶玻璃基板W在一對引導構件13之間會有大的移動，而導致產生衝擊施加於液晶玻璃基板W等的問題。另一方面，餘隙過小時，則不容許有液晶玻璃基板W的公差或機器人1等之機械類的 時效變化等，導致液晶玻璃基板W不能收納於一對引導構件13之間。 Although not shown in the first drawing, the liquid crystal glass substrate W placed on the fork 12 is prevented from shifting in the longitudinal direction of the fork 12 (hereinafter referred to as "fork long direction" as appropriate). On the fork 12, the forks 12 are spaced apart from each other by a predetermined gap (for example, 0.5) from the longitudinal direction of the liquid crystal glass substrate W placed on the forks 12, respectively. The clearance of mm) is fixed by the pair of guide members 13 (the first guide member, see FIG. 2 described later, etc.). Therefore, when the size of the liquid crystal glass substrate W to be transported is changed, the liquid crystal glass substrate W is changed in a predetermined gap from the fork length direction to change the mounting position of the guide member 13 at a fixed position. Further, the above-described clearance and the size comparison of the liquid crystal glass substrate W must be set to be extremely small. When the clearance is too large, the liquid crystal glass substrate W has a large movement between the pair of guiding members 13, which causes a problem that an impact is applied to the liquid crystal glass substrate W or the like. On the other hand, when the clearance is too small, the tolerance of the liquid crystal glass substrate W or the mechanical type of the robot 1 or the like is not allowed. The aging change or the like causes the liquid crystal glass substrate W not to be accommodated between the pair of guiding members 13.
在此，在說明安裝更換之前，說明左手9L及右手9R所具備的3個叉子12。 Here, before describing the installation and replacement, the three forks 12 provided in the left hand 9L and the right hand 9R will be described.
第2圖~第7圖中，左手9L及右手9R所具備的3個叉子12是彼此相同的構造，在叉子長方向彼此分開的兩處，分別具有沿著叉子長方向孔設在上面的螺絲14緊固用的複數個螺孔12a、12b、12c、12d、12e、12f，並分別具有沿著叉子長方向豎立設置在上面的支撐液晶玻璃基板W的複數個銷12g。並且，在對應各叉子12上的叉子長方向的上述兩處，配置有在叉子長方向彼此分開的一對固定構件15(第1固定構件)。詳細而言，一對固定構件15是分別配置在各叉子12上的沿著對應機器人1的裝置基準等所設定之叉子長方向的預定位置(以下適當稱之為「預定的長方向位置」)。 In the second to seventh figures, the three forks 12 provided in the left hand 9L and the right hand 9R have the same structure, and the screws are provided on the two sides of the fork in the longitudinal direction of the fork. 14 a plurality of screw holes 12a, 12b, 12c, 12d, 12e, and 12f for fastening, and each of which has a plurality of pins 12g for supporting the liquid crystal glass substrate W which are vertically disposed along the longitudinal direction of the fork. Further, a pair of fixing members 15 (first fixing members) that are separated from each other in the longitudinal direction of the fork are disposed at the two places corresponding to the fork length direction of each of the forks 12. Specifically, the pair of fixing members 15 are predetermined positions that are disposed on the respective forks 12 along the fork length direction set by the device reference or the like of the corresponding robot 1 (hereinafter referred to as "predetermined long-direction position" as appropriate) .
一對固定構件15，在該例中具有兩個沿著叉子長方向形成長孔形之插穿螺絲14並緊固於叉子12上的螺孔12a用的長孔15a(第1插穿孔)，將兩個螺絲14插穿於各長孔15a並緊固於各螺孔12a，分別固定在上述預定的長方向位置。並且，上述「長孔形」是意味著設置長軸方向的尺寸較短軸方向的尺寸大的孔的形狀。各長孔15a是分別設定使叉子12的短方向的長度較螺絲14的軸部長，且較螺絲14的頭部短，並設定使叉子12的長方向的長度至少比上述短方向的長度長。 a pair of fixing members 15, which in this example have two long holes 15a (first insertion holes) for forming the long holes in the long direction of the fork and fastened to the screw holes 12a of the fork 12, Two screws 14 are inserted through the respective long holes 15a and fastened to the respective screw holes 12a, and are fixed to the predetermined long-direction positions, respectively. In addition, the above-mentioned "long hole shape" means a shape in which a hole having a large dimension in the longitudinal direction and a large axial direction is provided. Each of the long holes 15a is set such that the length of the fork 12 in the short direction is smaller than the axial direction of the screw 14, and is shorter than the head of the screw 14, and the length of the fork 12 in the longitudinal direction is set to be at least longer than the length in the short direction.
又，一對固定構件15即使在進行安裝更換時，不變更固定位置，即搬運對象為液晶玻璃基板W1~W3的其中之一的場合仍可固定在相同位置，將上述一對引導構件13分別配置在固定於上述預定的長方向位置的一對固定構件15之間，以該固定構件15為基準，設定固定位置。具體而言，上述一對引導構件13是分別構成可將沿著叉子的長方向的叉子長方向位置選擇性設定在固定於上述預定的長方向位置的一對固定構件15之間的複數個位置。 Further, even when the pair of fixing members 15 are mounted and replaced, the fixed position is not changed, that is, when the object to be transported is one of the liquid crystal glass substrates W1 to W3, the fixing member 15 can be fixed at the same position, and the pair of guiding members 13 can be respectively fixed. The fixing member 15 is disposed between the pair of fixing members 15 fixed in the predetermined long-direction position, and the fixing position is set based on the fixing member 15. Specifically, each of the pair of guiding members 13 is configured to selectively set a position in the longitudinal direction of the fork along the longitudinal direction of the fork to a plurality of positions between the pair of fixing members 15 fixed to the predetermined long-direction position. .
再者，第2圖~第8圖表示的例中，插穿於固定構件15的各長孔15a，並緊固於叉子12上的各螺孔12a，使得固定構件15與叉子12緊固的兩個螺絲14是相當於申請專利範圍記載的第1緊固構件，緊固著該等兩個螺絲14的各螺孔12a是相當於申請專利範圍記載的第1緊固孔。 Further, in the examples shown in FIGS. 2 to 8 , the long holes 15 a of the fixing member 15 are inserted and fastened to the respective screw holes 12 a of the fork 12 so that the fixing member 15 is fastened to the fork 12 . The two screws 14 are the first fastening members described in the patent application, and the screw holes 12a to which the two screws 14 are fastened are the first fastening holes described in the patent application.
以下，針對安裝更換加以說明。 The following describes the installation and replacement.
首先，使用第2圖及第3圖，針對上述3種類的液晶玻璃基板W1~W3之中，以最大尺寸的液晶玻璃基板W1為搬運對象的場合說明。 First, the liquid crystal glass substrate W1 of the largest size among the three types of liquid crystal glass substrates W1 to W3 is described as the object of transportation.
如第2圖及第3圖表示，以液晶玻璃基板W1為搬運對象的場合，在左手9L及右手9R所具備的各叉子12上，分別配置有一對固定構件15及一對引導構件13。一對固定構件15是如上述，被分別固定在上述預定的長方向位置。 As shown in FIG. 2 and FIG. 3, when the liquid crystal glass substrate W1 is to be transported, a pair of fixing members 15 and a pair of guiding members 13 are disposed on each of the forks 12 provided in the left hand 9L and the right hand 9R. The pair of fixing members 15 are fixed to the predetermined longitudinal direction positions as described above.
一對引導構件13是由：將支撐著載放於叉子12上的液晶玻璃基板W的襯墊131a豎立設置在液晶玻璃基板W 側上端部的平板部131，及從平板部131上的襯墊131a在固定構件15側以螺絲16固定的引導部132所構成。平板部131在該例中具有兩個沿著叉子長方向形成長孔形的插穿螺絲14並緊固於叉子12上的螺孔12b~12f其中之一用的長孔131b(第2插穿孔)。各長孔131b被分別設定使叉子12短方向的長度較螺絲14的軸部長，且螺絲14的頭部較短，並且叉子長方向的長度至少比上述短方向的長度長。 The pair of guiding members 13 are: the spacer 131a supporting the liquid crystal glass substrate W placed on the fork 12 is erected on the liquid crystal glass substrate W The flat plate portion 131 at the upper end portion and the guide portion 132 fixed from the fixing member 15 side by the screw 16 from the spacer 131a on the flat plate portion 131 are formed. In this example, the flat plate portion 131 has two long holes 131b for inserting the insertion screw 14 along the longitudinal direction of the fork and fastening the screw holes 12b to 12f on the fork 12 (the second insertion hole ). Each of the long holes 131b is set such that the length of the fork 12 in the short direction is smaller than the axial direction of the screw 14, and the head of the screw 14 is short, and the length in the longitudinal direction of the fork is at least longer than the length in the short direction.
以液晶玻璃基板W1為搬運對象的場合，首先，將一對引導構件13，分別配置在固定於上述預定的長方向位置的一對固定構件15之間。詳細而言，一對引導構件13分別配置使得和平板部131的液晶玻璃基板W1相反側的面碰觸並抵接於接近側固定構件15的液晶玻璃基板W1側的面。並在此狀態下，將兩個螺絲14緊固在插穿於各長孔131b的螺孔12b、12c，可使得一對引導構件13分別固定在叉子12上。藉上述，引導構件13是在一對固定構件15之間的複數個位置中，使引導部132的端面相對於載放在叉子12上的液晶玻璃基板W1的端面在叉子長方向間隔預定的間隙成相對地，藉著叉子12上的固定構件15固定在形成液晶玻璃基板W1側的位置。 When the liquid crystal glass substrate W1 is to be transported, first, the pair of guiding members 13 are disposed between the pair of fixing members 15 fixed to the predetermined longitudinal position. Specifically, the pair of guiding members 13 are disposed so as to be in contact with the surface on the opposite side to the liquid crystal glass substrate W1 of the flat plate portion 131 and abut against the surface on the liquid crystal glass substrate W1 side of the side fixing member 15 . In this state, the two screws 14 are fastened to the screw holes 12b, 12c inserted through the long holes 131b, so that the pair of guiding members 13 are respectively fixed to the fork 12. By the above, the guide member 13 is in a plurality of positions between the pair of fixing members 15, and the end surface of the guide portion 132 is spaced apart from the end surface of the liquid crystal glass substrate W1 placed on the fork 12 by a predetermined gap in the longitudinal direction of the fork. In the opposite direction, the fixing member 15 on the fork 12 is fixed at a position on the side where the liquid crystal glass substrate W1 is formed.
再者，第2圖及第3圖表示的例中，抵接於配置在上述預定長度方向位置的一對固定構件15的液晶玻璃基板W1側的面的和一對引導構件13的平板部131的液晶玻璃基板W1相反側的面是相當於申請專利範圍記載的第1抵 接面。又，插穿於引導構件13的平板部131的各長孔131b，緊固於叉子12上的螺孔12b、12c，並緊固引導構件13與叉子12的兩個螺絲14是相當於申請專利範圍記載的第2緊固構件，緊固該等兩個螺絲14的螺孔12b、12c是相當於申請專利範圍記載的第2緊固孔。 In the example shown in FIGS. 2 and 3, the surface of the pair of fixing members 15 disposed on the liquid crystal glass substrate W1 side in the predetermined longitudinal direction and the flat plate portion 131 of the pair of guiding members 13 are in contact with each other. The surface on the opposite side of the liquid crystal glass substrate W1 corresponds to the first one described in the patent application scope. Junction. Further, the long holes 131b inserted into the flat plate portion 131 of the guiding member 13 are fastened to the screw holes 12b, 12c on the fork 12, and the two screws 14 for fastening the guiding member 13 and the fork 12 are equivalent to the patent application. In the second fastening member described in the range, the screw holes 12b and 12c for fastening the two screws 14 are the second fastening holes described in the patent application.
如上述進行安裝更換，成為搬運對象的液晶玻璃基板W1可使其端面從一對引導構件13的引導部132端面的叉子長方向的兩端分別間隔預定的間隙相對地支撐於叉子12上的銷12g及引導構件13的平板部131上的襯墊131a並載放在叉子12上。 In the liquid crystal glass substrate W1 to be transported, the end surface of the liquid crystal glass substrate W1 to be conveyed is supported by the pin on the fork 12 from the both ends of the end surface of the guide portion 132 of the pair of guide members 13 with a predetermined gap therebetween. 12g and the pad 131a on the flat plate portion 131 of the guiding member 13 are placed on the fork 12.
接著，使用第4圖及第5圖，針對上述3種類的液晶玻璃基板W1~W3之中，以第2大尺寸的液晶玻璃基板W2為搬運對象的場合說明。 Next, a description will be given of a case where the second large-sized liquid crystal glass substrate W2 is transported among the three types of liquid crystal glass substrates W1 to W3 among the three types of liquid crystal glass substrates W1 to W3.
如第4圖及第5圖表示，以液晶玻璃基板W2為搬運對象的場合，在左手9L及右手9R所具備的各叉子12上，分別配置一對固定構件15；對應液晶玻璃基板W1~W3的尺寸所準備之彼此叉子長方向尺寸不同的2種類的一對中間構件17A(參閱第4圖及第5圖)及一對中間構件17B(參閱後述的第6圖及第7圖)之中，叉子長方向尺寸小的一對中間構件17A；及一對引導構件13。再者，第4圖及第5圖表示的例中，中間構件17A是相當於申請專利範圍記載的第1中間構件。一對固定構件15是如上述，被分別固定在上述預定的長方向位置。 As shown in FIG. 4 and FIG. 5, when the liquid crystal glass substrate W2 is to be transported, a pair of fixing members 15 are disposed on each of the forks 12 provided in the left hand 9L and the right hand 9R; and the liquid crystal glass substrates W1 to W3 are provided. Two types of intermediate members 17A (see FIGS. 4 and 5) and a pair of intermediate members 17B (see FIGS. 6 and 7 to be described later) which are different in size in the longitudinal direction of the fork prepared by the same size a pair of intermediate members 17A having a small fork length direction and a pair of guiding members 13. Further, in the examples shown in Figs. 4 and 5, the intermediate member 17A is the first intermediate member described in the patent application. The pair of fixing members 15 are fixed to the predetermined longitudinal direction positions as described above.
一對中間構件17A在該例中具有1個沿著叉子長方向 形成長孔形的螺絲14插穿並緊固於叉子12上的螺孔12b~12d其中之一用的長孔17Aa(第3插穿孔)。長孔17Aa是設定使叉子12的短方向較螺絲14的軸部長，但較螺絲14的頭部短，並設定使叉子長方向的長度，至少比上述短方向的長度短。 A pair of intermediate members 17A have one longitudinal direction along the fork in this example The long-hole-shaped screw 14 is inserted and fastened to the long hole 17Aa (the third insertion hole) for one of the screw holes 12b to 12d on the fork 12. The long hole 17Aa is set such that the short direction of the fork 12 is smaller than the axial direction of the screw 14, but is shorter than the head of the screw 14, and is set to have a length in the longitudinal direction of the fork, which is at least shorter than the length in the short direction.
以液晶玻璃基板W2為搬運對象的場合，首先，將一對中間構件17A分別配置在固定於上述預定長方向位置的一對固定構件15之間。詳細而言，一對中間構件17A是分別配置使得與液晶玻璃基板W2相反側的面碰觸並抵接於接近側之固定構件15的液晶玻璃基板W2側的面上。並且，在此狀態下，將螺絲14插穿長孔17Aa並緊固於螺孔12b，使得一對中間構件17A分別被固定在叉子12上。之後，將一對引導構件13分別配置在固定於叉子12上的一對中間構件17A之間。詳細而言，一對引導構件13是分別配置使得與平板部131的液晶玻璃基板W2相反側的面碰觸並抵接於接近側之中間構件17A的液晶玻璃基板W2側的面上。並且，在此狀態下，將兩個螺絲14插穿各長孔131b並緊固於螺孔12c、12d，使得一對引導構件13分別被固定在叉子12上。根據上述，中間構件17A被固定在叉子12上的固定構件15和該固定構件15接近側的引導構件13之間，引導構件13是在一對固定構件15之間的複數個位置中，使引導部132的端面相對於載放在叉子12上的液晶玻璃基板W2的端面在叉子長方向間隔預定的間隙相對地固定於較叉子12上的固定構件15接近 液晶玻璃基板W2側的位置。 When the liquid crystal glass substrate W2 is to be transported, first, the pair of intermediate members 17A are disposed between the pair of fixing members 15 fixed to the predetermined longitudinal direction. Specifically, the pair of intermediate members 17A are disposed such that the surfaces on the opposite side to the liquid crystal glass substrate W2 are in contact with each other and abut against the surface of the liquid crystal glass substrate W2 on the side closer to the fixing member 15 on the side. Further, in this state, the screw 14 is inserted through the long hole 17Aa and fastened to the screw hole 12b, so that the pair of intermediate members 17A are respectively fixed to the fork 12. Thereafter, the pair of guiding members 13 are respectively disposed between the pair of intermediate members 17A fixed to the fork 12. Specifically, the pair of guiding members 13 are disposed so as to be in contact with the surface on the opposite side to the liquid crystal glass substrate W2 of the flat plate portion 131 and abut against the surface of the liquid crystal glass substrate W2 on the side of the intermediate member 17A on the approach side. Further, in this state, the two screws 14 are inserted through the respective long holes 131b and fastened to the screw holes 12c, 12d, so that the pair of guiding members 13 are respectively fixed to the fork 12. According to the above, the intermediate member 17A is fixed between the fixing member 15 on the fork 12 and the guiding member 13 on the approaching side of the fixing member 15, and the guiding member 13 is in a plurality of positions between the pair of fixing members 15 to guide The end surface of the portion 132 is relatively close to the fixing member 15 fixed to the fork 12 with respect to the end surface of the liquid crystal glass substrate W2 placed on the fork 12 at a predetermined gap in the longitudinal direction of the fork. The position on the side of the liquid crystal glass substrate W2.
再者，第4圖及第5圖表示的例中，與抵接在配置於上述預定的長方向位置的一對固定構件15的液晶玻璃基板W2側的面之一對中間構件17A的液晶玻璃基板W2相反側的面是相當於申請專利範圍記載的第2抵接面。並且，在一對固定構件15的液晶玻璃基板W2側的面使得與液晶玻璃基板W2相反側的面抵接而固定在叉子12上的一對中間構件17A之抵接於液晶玻璃基板W2側的面的與一對引導構件13的液晶玻璃基板W2相反側的面是相當於申請專利範圍記載的第3抵接面。另外，插穿引導構件13的平板部131的各長孔131b，並緊固於叉子12上的螺孔12c、12d，使得引導構件13與叉子12緊固的兩個螺絲14是相當於申請專利範圍記載的第2緊固構件，緊固該等兩個螺絲14的螺孔12c、12d是相當於申請專利範圍記載的第2緊固孔。此外，插穿中間構件17A的長孔17Aa，並緊固於叉子12上的螺孔12b，使得中間構件17A與叉子12緊固的兩個螺絲14是相當於申請專利範圍記載的第3緊固構件，緊固該螺絲14的螺孔12b是相當於申請專利範圍記載的第3緊固孔。 In the example shown in FIGS. 4 and 5, the liquid crystal glass of the intermediate member 17A is in contact with one of the faces of the pair of fixing members 15 disposed on the liquid crystal glass substrate W2 side in the predetermined long-direction position. The surface on the opposite side of the substrate W2 corresponds to the second abutting surface described in the patent application. Further, the surface of the pair of fixing members 15 on the liquid crystal glass substrate W2 side is brought into contact with the surface on the opposite side to the liquid crystal glass substrate W2, and the pair of intermediate members 17A fixed to the fork 12 are in contact with the liquid crystal glass substrate W2 side. The surface on the opposite side to the liquid crystal glass substrate W2 of the pair of guiding members 13 corresponds to the third abutting surface described in the patent application. Further, the long holes 131b of the flat plate portion 131 of the guide member 13 are inserted and fastened to the screw holes 12c, 12d on the fork 12, so that the two screws 14 for guiding the guide member 13 to the fork 12 are equivalent to the patent application. In the second fastening member described in the range, the screw holes 12c and 12d for fastening the two screws 14 are the second fastening holes described in the patent application. Further, the long hole 17Aa of the intermediate member 17A is inserted and fastened to the screw hole 12b of the fork 12, so that the two screws 14 fastened to the intermediate member 17A and the fork 12 are equivalent to the third fastening described in the patent application. The member, the screw hole 12b for fastening the screw 14 is a third fastening hole corresponding to the scope of the patent application.
如上述進行安裝更換，搬運對象的液晶玻璃基板W2使其端面從一對引導構件13的引導部132的端面的叉子長方向兩端分別間隔預定的間隙相對地，一邊支撐在叉子12上的銷12g及引導構件13的平板部131上的襯墊131a並載放於叉子12上。 In the liquid crystal glass substrate W2 to be transported, the end surface of the liquid crystal glass substrate W2 to be transported is supported by the pin 12 from the both ends of the end surface of the guide portion 132 of the pair of guide members 13 with a predetermined gap therebetween. 12g and the pad 131a on the flat plate portion 131 of the guiding member 13 are placed on the fork 12.
接著，使用第6圖及第7圖，針對上述3種類的液晶玻璃基板W1~W3之中，以尺寸最小的液晶玻璃基板W3為搬運對象的場合說明。 Next, the liquid crystal glass substrate W3 having the smallest size among the three types of liquid crystal glass substrates W1 to W3 described above will be described with reference to FIGS. 6 and 7 .
如第6圖及第7圖表示，以液晶玻璃基板W3為搬運對象的場合，在左手9L及右手9R所具備的各叉子12上，分別配置有一對固定構件15；上述兩種類之一對中間構件17A及一對中間構件17B之中，叉子長方向尺寸較大的一對中間構件17B；及一對引導構件13。再者，第6圖及第7圖表示的例中，中間構件17B是相當於申請專利範圍記載的第1中間構件。一對固定構件15是如上述，分別被固定上述預定的長方向位置。 As shown in Fig. 6 and Fig. 7, when the liquid crystal glass substrate W3 is to be transported, a pair of fixing members 15 are disposed on each of the forks 12 provided in the left hand 9L and the right hand 9R; Among the members 17A and the pair of intermediate members 17B, a pair of intermediate members 17B having a large fork length direction and a pair of guiding members 13 are provided. Further, in the examples shown in Figs. 6 and 7, the intermediate member 17B is the first intermediate member described in the patent application. The pair of fixing members 15 are fixed to the predetermined longitudinal direction positions as described above.
一對中間構件17B在該例中具有1個沿著叉子長方向形成長孔形的將兩個螺絲14插穿緊固於叉子12上之螺孔12c、12d用的長孔17Ba(第3插穿孔)。長孔17Ba是設定使叉子12的短方向的長度較螺絲14的軸部長，且較螺絲14的頭部短，並設定使叉子長方向的長度至少比上述短方向的長度長。 In this example, the pair of intermediate members 17B have a long hole 17Ba for inserting the two screws 14 into the screw holes 12c and 12d fastened to the fork 12 in the form of a long hole in the longitudinal direction of the fork (the third insertion) perforation). The long hole 17Ba is set such that the length of the fork 12 in the short direction is shorter than the axial direction of the screw 14, and is shorter than the head of the screw 14, and is set such that the length in the longitudinal direction of the fork is at least longer than the length in the short direction.
以液晶玻璃基板W3為搬運對象的場合，首先，將一對中間構件17B分別配置於固定在上述預定的長方向位置的一對固定構件15之間。詳細而言，一對中間構件17B是分別配置使得與液晶玻璃基板W3相反側的面碰觸並抵接於接近側固定構件15的液晶玻璃基板W3側的面。並在此狀態下，將兩個螺絲14插穿於長孔17Ba並緊固在螺孔12c、12d，使一對中間構件17B分別固定在叉子12 上。隨後，將一對引導構件13分別配置在固定於叉子12上的一對中間構件17B之間，詳細而言，一對引導構件13是分別配置使得與平板部131的液晶玻璃基板W3相反側的面碰觸並抵接於接近側中間構件17B的液晶玻璃基板W3側的面。並在此狀態下，將兩個螺絲14插穿於各長孔131b並緊固在螺孔12e、12f，使一對引導構件13分別固定在叉子12上。如上述，中間構件17B被固定在叉子12上的固定構件15與接近該固定構件15側的引導構件13之間，引導構件13藉著叉子12上的固定構件15固定在成為液晶玻璃基板W3側的位置，以使得一對固定構件15之間的複數個位置中的引導部132的端面相對於載放在叉子12上的液晶玻璃基板W3的端面於叉子長方向間隔預定的間隙成相對向。 When the liquid crystal glass substrate W3 is to be transported, first, the pair of intermediate members 17B are disposed between the pair of fixing members 15 fixed to the predetermined longitudinal position. Specifically, the pair of intermediate members 17B are disposed such that the surfaces on the opposite side to the liquid crystal glass substrate W3 are in contact with each other and abut against the liquid crystal glass substrate W3 side of the proximity side fixing member 15 . And in this state, the two screws 14 are inserted through the long holes 17Ba and fastened to the screw holes 12c, 12d, so that the pair of intermediate members 17B are respectively fixed to the fork 12 on. Subsequently, the pair of guiding members 13 are respectively disposed between the pair of intermediate members 17B fixed to the fork 12, and in detail, the pair of guiding members 13 are disposed so as to be opposite to the liquid crystal glass substrate W3 of the flat plate portion 131, respectively. The surface touches and abuts on the surface on the side of the liquid crystal glass substrate W3 of the side intermediate member 17B. In this state, the two screws 14 are inserted through the respective long holes 131b and fastened to the screw holes 12e, 12f, so that the pair of guiding members 13 are respectively fixed to the fork 12. As described above, the intermediate member 17B is fixed between the fixing member 15 on the fork 12 and the guiding member 13 on the side close to the fixing member 15, and the guiding member 13 is fixed to the side of the liquid crystal glass substrate W3 by the fixing member 15 on the fork 12. The position is such that the end faces of the guide portions 132 in the plurality of positions between the pair of fixing members 15 are opposed to each other with respect to the end faces of the liquid crystal glass substrates W3 placed on the fork 12 by a predetermined gap in the longitudinal direction of the fork.
再者，第6圖及第7圖表示的例中，抵接於配置在上述預定的長方向位置的一對固定構件15的液晶玻璃基板W3側的面的和一對中間構件17B的液晶玻璃基板W3相反側的面是相當於申請專利範圍記載的第2抵接面。並且，在一對固定構件15的液晶玻璃基板W3側的面上，使得與液晶玻璃基板W3相反側的面抵接地固定在叉子12上的一對中間構件17B的抵接於液晶玻璃基板W3側的面之與一對引導構件13的液晶玻璃基板W3相反側的面是相當於申請專利範圍記載的第3抵接面。此外，插穿於引導構件13的平板部131的各長孔131b，並緊固在叉子12上的螺孔12e、12f，使得引導構件13與叉子12緊固的兩 個螺絲14是相當於申請專利範圍記載的第2緊固構件，緊固該等兩個螺絲14的螺孔12e、12f是相當於申請專利範圍記載的第2緊固孔。再者，插穿於中間構件17B的長孔17Ba，並緊固在叉子12上的螺孔12c、12d，使得中間構件17B與叉子12緊固的兩個螺絲14是相當於申請專利範圍記載的第3緊固構件，緊固該等兩個螺絲14的螺孔12c、12d是相當於申請專利範圍記載的第3緊固孔。 In the example shown in Fig. 6 and Fig. 7, the liquid crystal glass of the pair of intermediate members 17B on the surface of the pair of fixing members 15 disposed on the liquid crystal glass substrate W3 side in the predetermined longitudinal direction is abutted. The surface on the opposite side of the substrate W3 corresponds to the second abutting surface described in the patent application. In the surface of the pair of fixing members 15 on the liquid crystal glass substrate W3 side, the pair of intermediate members 17B fixed to the fork 12 on the surface opposite to the liquid crystal glass substrate W3 are in contact with the liquid crystal glass substrate W3 side. The surface on the opposite side to the liquid crystal glass substrate W3 of the pair of guiding members 13 is a third abutting surface corresponding to the patent application. Further, the long holes 131b of the flat plate portion 131 of the guiding member 13 are inserted, and the screw holes 12e, 12f on the fork 12 are fastened, so that the guiding member 13 and the fork 12 are fastened. The screws 14 are the second fastening members described in the patent application, and the screw holes 12e and 12f for fastening the two screws 14 are the second fastening holes described in the patent application. Further, the long holes 17Ba inserted into the intermediate member 17B are fastened to the screw holes 12c, 12d on the fork 12, so that the two screws 14 fastened to the intermediate member 17B and the fork 12 are equivalent to those described in the patent application. In the third fastening member, the screw holes 12c and 12d for fastening the two screws 14 are the third fastening holes described in the patent application.
如上述進行安裝更換時，搬運對象的液晶玻璃基板W3是使其端面從一對引導構件13的引導部132端面的叉子長方向的兩端分別間隔預定的間隙相對地，一邊支撐於叉子12上的銷12g及引導構件13的平板部131上的襯墊131a並載放在叉子12上。 When the mounting and replacement are performed as described above, the liquid crystal glass substrate W3 to be transported is supported on the fork 12 so that the end faces thereof are opposed to each other by a predetermined gap from the both ends in the longitudinal direction of the end surface of the guide portion 132 of the pair of guide members 13 . The pin 12g and the pad 131a on the flat plate portion 131 of the guiding member 13 are placed on the fork 12.
如以上說明，本實施形態的機器人1是在左臂6L及右臂6R具備左手9L及右手9R，使用該等左手9L及右手9R搬運液晶玻璃基板W。 As described above, the robot 1 of the present embodiment includes the left hand 9L and the right hand 9R in the left arm 6L and the right arm 6R, and the liquid crystal glass substrate W is transported using the left hand 9L and the right hand 9R.
在此，一般之搬運液晶玻璃基板W的方式有藉著設置在手的適當吸附構件一邊真空吸附液晶玻璃基板W進行搬運的吸附方式及設置在手的叉子上一邊載放液晶玻璃基板W並進行搬運的非吸附方式。吸附方式的場合，藉吸附構件一邊真空吸附液晶玻璃基板W一邊進行手的移動，雖可防止液晶玻璃基板W的位置偏移並進行液晶玻璃基板W的搬運，但因吸附會使得液晶玻璃基板W彎曲，在形成於液晶玻璃基板W的吸附面上的塗層會有產生不勻之虞。非吸附方式的場合，在液晶玻璃基板W的 下側移動叉子，隨後並使得叉子上升將液晶玻璃基板W載放於叉子上，在其狀態下進行手的移動，搬運液晶玻璃基板W。以上非吸附方式的場合，一般為防止載放於叉子上的液晶玻璃基板W的位置偏移，在叉子上，相對於液晶玻璃基板W在長方向間隔預定的間隙成相對地配置一對引導構件。使用叉子上配置有一對引導構件的手，可一邊防止載放於叉子上的液晶玻璃基板W的位置偏移並可搬運液晶玻璃基板W。 Here, in the embodiment in which the liquid crystal glass substrate W is transported, the liquid crystal glass substrate W is placed on the fork of the hand by a suction method in which the liquid crystal glass substrate W is vacuum-adsorbed by a suitable adsorption member provided in the hand, and the liquid crystal glass substrate W is placed thereon. Non-adsorbing method of handling. In the case of the adsorption method, the liquid crystal glass substrate W is vacuum-adsorbed by the adsorption member, and the movement of the liquid crystal glass substrate W is prevented, and the liquid crystal glass substrate W is prevented from being transported. However, the liquid crystal glass substrate W is adsorbed by the adsorption. Bending, the coating formed on the adsorption surface of the liquid crystal glass substrate W may cause unevenness. In the case of non-adsorption method, on the liquid crystal glass substrate W The lower side moves the fork, and then the fork is raised to place the liquid crystal glass substrate W on the fork, and the hand is moved in the state to carry the liquid crystal glass substrate W. In the case of the non-adsorption method described above, generally, the positional deviation of the liquid crystal glass substrate W placed on the fork is prevented, and a pair of guiding members are disposed opposite to each other with a predetermined gap in the longitudinal direction of the liquid crystal glass substrate W on the fork. . A hand having a pair of guiding members disposed on the fork can prevent the position of the liquid crystal glass substrate W placed on the fork from being shifted and can transport the liquid crystal glass substrate W.
又，在此，可考慮將臂的前端具備上述叉子上配置有一對引導構件的手的機器人，使用於搬運彼此尺寸不同之液晶玻璃基板W的環境的場合。此時，在每變更成搬運對象的液晶玻璃基板W的尺寸時，有進行變更引導構件的固定位置的安裝更換來間隔預定的間隙與液晶玻璃基板W成相對的必要。一般在示範時，對液晶玻璃基板W的各尺寸，設定引導構件的固定位置並預先記錄標記，在變更搬運對象的液晶玻璃基板W的尺寸時，藉配置固定引導構件使其與上述示範時記錄的標記一致地進行安裝更換。為此，安裝更換費時，則不能稱之為作業性良好。 In addition, a robot having a hand on which a pair of guide members are disposed on the fork is provided in the front end of the arm, and is used in an environment in which liquid crystal glass substrates W having different sizes are transported. At this time, when changing the size of the liquid crystal glass substrate W to be transported, it is necessary to change the mounting position of the guide member and to replace the liquid crystal glass substrate W with a predetermined gap therebetween. Generally, in the demonstration, the fixing position of the guiding member is set for each size of the liquid crystal glass substrate W, and the mark is recorded in advance. When the size of the liquid crystal glass substrate W to be transported is changed, the fixing guide member is disposed to be recorded with the above-described example. The markings are consistently installed and replaced. For this reason, when the installation and replacement fee is charged, it cannot be said that the workability is good.
因此，本實施形態中，左手9L及右手9R具有：可載放液晶玻璃基板W的3個叉子12；在叉子12上的叉子長方向彼此分開所配置的一對固定構件15；及一對引導構件13。一對引導構件13分別被配置在一對固定構件15之間，限制載放於叉子12上之液晶玻璃基板W的叉子長方向的移動。並且，一對引導構件13分別構成可將叉子12 上的叉子長方向位置選擇性地設定在一對固定構件15之間的複數個位置。藉此，即使用於搬運彼此尺寸不同之液晶玻璃基板W的環境的場合，仍可以配置在叉子12上的固定構件15為基準設定引導構件13的固定位置，所已容易進行安裝更換。又，根據液晶玻璃基板W的各尺寸，預先準備在叉子12上配置引導構件13的手使得與液晶玻璃基板W的間隙間隔著預定的間隔，在搬運液晶玻璃基板W時，與根據成為搬運對象的液晶玻璃基板W的尺寸來更換手的場合比較，不但可大幅刪減成本並可提升作業性。 Therefore, in the present embodiment, the left hand 9L and the right hand 9R have three forks 12 on which the liquid crystal glass substrate W can be placed, and a pair of fixing members 15 that are disposed apart from each other in the longitudinal direction of the fork on the fork 12; Member 13. The pair of guiding members 13 are disposed between the pair of fixing members 15, respectively, and restrict the movement of the liquid crystal glass substrate W placed on the fork 12 in the longitudinal direction of the fork. And, a pair of guiding members 13 respectively constitute a fork 12 The upper fork position in the upper direction is selectively set at a plurality of positions between the pair of fixing members 15. Thereby, even in the case of conveying the environment of the liquid crystal glass substrates W of different sizes, the fixing member 15 disposed on the fork 12 can be set as the reference fixing position of the guiding member 13, and the mounting and replacement can be easily performed. In addition, the hand of the guide member 13 is placed on the fork 12 in advance so as to be spaced apart from the gap of the liquid crystal glass substrate W by a predetermined interval, and when the liquid crystal glass substrate W is transported, When the size of the liquid crystal glass substrate W is changed to the hand, the cost can be greatly reduced and the workability can be improved.
又，本實施形態中，尤其一對引導構件13是分別配置使得與平板部131的液晶玻璃基板W1相反側的面，碰觸並抵接於固定在叉子12上的預定長方向位置的一對固定構件15的液晶玻璃基板W1側的面上(參閱第2圖及第3圖)。且，一對引導構件13是分別配置使得與平板部131的液晶玻璃基板W2、W3相反側的面，碰觸並抵接於中間構件17A、17B的液晶玻璃基板W2、W3側的面上(參閱第4圖~第7圖)。一邊將引導構件13碰觸配置在固定於叉子12上的固定構件15，或將引導構件13碰觸配置在叉子12上所固定之碰觸配置於固定在叉子12上的固定構件15的中間構件17A、17B，藉此可容易且確實配置使得引導構件13相對於載放在叉子12上的液晶玻璃基板W在叉子長方向間隔預定的間隙成相對。 Further, in the present embodiment, in particular, the pair of guiding members 13 are disposed so as to face each other on the opposite side of the liquid crystal glass substrate W1 of the flat plate portion 131, and abut against a predetermined longitudinal position fixed to the fork 12. The surface of the fixing member 15 on the liquid crystal glass substrate W1 side (see FIGS. 2 and 3). Further, the pair of guiding members 13 are disposed so as to face the liquid crystal glass substrates W2 and W3 on the side opposite to the liquid crystal glass substrates W2 and W3 of the flat plate portion 131, and abut against the surfaces of the intermediate members 17A and 17B on the liquid crystal glass substrates W2 and W3 side ( See Figure 4 ~ Figure 7). The guide member 13 is placed against the fixing member 15 fixed to the fork 12, or the guiding member 13 is brought into contact with the intermediate member of the fixing member 15 fixed to the fork 12 by the contact fixedly disposed on the fork 12. 17A, 17B, whereby the guiding member 13 can be easily and surely arranged such that the liquid crystal glass substrate W placed on the fork 12 is opposed to each other with a predetermined gap in the longitudinal direction of the fork.
又，本實施形態中，尤其是固定構件15、引導構件 13及中間構件17A、17B具有沿著叉子長方向形成長孔形的長孔15a、長孔131b及長孔17Aa、17Ba。藉此，可提升將固定構件15及引導構件13及中間構件17A、17B固定於叉子12上時的組裝性。 Moreover, in this embodiment, in particular, the fixing member 15 and the guiding member The intermediate members 17A and 17B have long holes 15a, long holes 131b, and long holes 17Aa and 17Ba which are formed in a long hole shape along the longitudinal direction of the fork. Thereby, the assemblability when the fixing member 15 and the guide member 13 and the intermediate members 17A and 17B are fixed to the fork 12 can be improved.
再者，實施的形態不限於上述內容，只要在不脫離其主旨及技術思想的範圍內皆可進行種種的變形。以下，說明其變形例。 In addition, the form of the implementation is not limited to the above, and various modifications can be made without departing from the spirit and scope of the invention. Hereinafter, a modification will be described.
第8圖~第13圖中，本變形例的左手9L及右手9R具有可載放上述液晶玻璃基板W的5個叉子112A、112B、112C、112D、112E。再者，叉子112的數量不限於如該例的5個，也可以是1個或2個或4個以上。叉子112A~112E(以下適當將該等總稱為「叉子112」)可載放上述3種類的液晶玻璃基板W1~W3的任一種類。 In the eighth to thirteenth drawings, the left hand 9L and the right hand 9R of the present modification have five forks 112A, 112B, 112C, 112D, and 112E on which the liquid crystal glass substrate W can be placed. Further, the number of the forks 112 is not limited to five as in this example, and may be one or two or four or more. The forks 112A to 112E (hereinafter collectively referred to as "fork 112" as appropriate) can carry any of the three types of liquid crystal glass substrates W1 to W3.
又，本變形例中，為防止載放於叉子112上的液晶玻璃基板W朝叉子112短方向(以下適當稱為「叉子短方向」)的偏移(限制載放在叉子112上的液晶玻璃基板W在叉子短方向的移動)，在上述5個叉子112A~112E之中，第1個叉子112A上和第5個叉子112E上，固定著根據液晶玻璃基板W1~W3的尺寸所準備的彼此叉子短方向尺寸不同的3種類之一對引導構件113A(參閱第8圖及第9圖)、一對引導構件113B(參閱第10圖及第11圖)及一對引導構件113C(參閱第12圖及第13圖)的 其中之一，以使得從載放於叉子112上的液晶玻璃基板W的叉子短方向兩端分別間隔預定的間隙(例如，0.5mm的餘隙)成相對。因此，在每變更成為搬運對象的液晶玻璃基板W的尺寸時，進行變更引導構件113的種類更換使其在液晶玻璃基板W與叉子短方向間隔預定的間隙成相對。 Further, in the present modification, in order to prevent the liquid crystal glass substrate W placed on the fork 112 from being displaced in the short direction of the fork 112 (hereinafter referred to as "fork short direction" as appropriate) (Limiting the liquid crystal glass placed on the fork 112) The substrate W is moved in the short direction of the fork, and among the five forks 112A to 112E, the first fork 112A and the fifth fork 112E are fixed to each other according to the sizes of the liquid crystal glass substrates W1 to W3. One of the three types of guides having different sizes in the short direction of the fork (see FIGS. 8 and 9), a pair of guiding members 113B (see FIGS. 10 and 11), and a pair of guiding members 113C (see the 12th) Figure and Figure 13) One of them is such that the two ends of the fork in the short direction of the liquid crystal glass substrate W placed on the fork 112 are opposed to each other by a predetermined gap (for example, a clearance of 0.5 mm). Therefore, when the size of the liquid crystal glass substrate W to be transported is changed, the type of the change guide member 113 is replaced so that the liquid crystal glass substrate W faces the gap in the short direction of the fork in a predetermined gap.
第1叉子112A與第5叉子112E是形成彼此對稱的構造，沿著叉子長方向以適當的間隙在三處分別具有沿著叉子短方向孔設於上面的緊固著螺絲114的複數個螺孔112a、112b、112c。並在對應叉子112A、112E上的叉子長方向的上述三處，在兩個叉子112A、112E間於叉子短方向彼此分開配置有一對固定構件115(第2固定構件)的一方或另一方。亦即，在叉子112A上的上述三處分別配置著一對固定構件115的一方，而在叉子112E上的上述三處分別配置著一對固定構件115的另一方。詳細而言，一對固定構件115是分別配置在根據叉子112A、112E上的沿機器人1的裝置基準等所設定之叉子短方向的預定位置(以下，適當稱為「預定的短方向位置」)。 The first fork 112A and the fifth fork 112E are configured to be symmetrical with each other, and have a plurality of screw holes for fastening the screws 114 provided on the upper side of the fork in the short direction along the longitudinal direction of the fork. 112a, 112b, 112c. One or the other of the pair of fixing members 115 (second fixing members) is disposed between the two forks 112A and 112E in the short direction of the forks at the three positions in the longitudinal direction of the forks corresponding to the forks 112A and 112E. That is, one of the pair of fixing members 115 is disposed at each of the three places on the fork 112A, and the other of the pair of fixing members 115 is disposed at each of the three places on the fork 112E. Specifically, the pair of fixing members 115 are respectively disposed at predetermined positions in the short direction of the fork set along the forks 112A and 112E along the device reference of the robot 1 (hereinafter, referred to as "predetermined short-direction position" as appropriate) .
一對固定構件115在該例中具有兩個沿著叉子短方向形成長孔形之插穿螺絲114並緊固於叉子112A上或叉子112E上的螺孔112a用的長孔115a，兩個螺絲114插穿各長孔115a並緊固於各螺孔112a，分別固定在上述預定的短方向位置。設定使得各長孔115a的各個叉子長方向的長度較螺絲114的軸部長，且較螺絲114的頭部短，並設 定使叉子短方向的長度至少比上述長方向的長度長。又，一對固定構件115即使在進行安裝更換時不變更固定位置，即搬運對象為液晶玻璃基板W1~W3的任意其中之一的場合仍可固定在相同的位置。 The pair of fixing members 115 have, in this example, two long holes 115a for inserting the long holes in the short direction of the fork and fastening the screw holes 112a on the fork 112A or the fork 112E, two screws 114 is inserted through each of the long holes 115a and fastened to each of the screw holes 112a, and is fixed to the predetermined short-direction position. The length of each of the long holes 115a in the longitudinal direction is set to be shorter than the axial direction of the screw 114, and is shorter than the head of the screw 114. The length of the fork in the short direction is set to be at least longer than the length in the longitudinal direction. Further, the pair of fixing members 115 can be fixed at the same position even when the fixing target is not changed at the fixing position, that is, when the object to be transported is one of the liquid crystal glass substrates W1 to W3.
又，上述五個叉子112A~112E之中，第2個叉子112B與第4個叉子112D是與上述實施形態的叉子12大致相同的構造，在每變更成為搬運對象的液晶玻璃基板W的尺寸時，進行變更上述引導構件13之固定位置的安裝更換，以間隔預定的間隙在液晶玻璃基板W和叉子長方向成對向(參閱上述第2圖~第7圖)。 In the above-described five forks 112A to 112E, the second fork 112B and the fourth fork 112D have substantially the same structure as the fork 12 of the above-described embodiment, and the size of the liquid crystal glass substrate W to be transported is changed. The mounting and replacement of the fixing position of the guide member 13 are changed, and the liquid crystal glass substrate W is opposed to the fork length direction with a predetermined gap therebetween (see FIGS. 2 to 7).
又，上述五個叉子112A~112E之中，第3個叉子112C具有沿著叉子長方向豎立設置在上面的支撐液晶玻璃基板W的複數個銷112Ca。 Further, among the five forks 112A to 112E, the third fork 112C has a plurality of pins 112Ca that support the liquid crystal glass substrate W that are vertically disposed along the longitudinal direction of the fork.
以下，針對安裝更換說明。 The following is for installation replacement instructions.
首先，使用第8圖及第9圖，針對以上述三種類的液晶玻璃基板W1~W3之中，尺寸最大的液晶玻璃基板W1為搬運對象的場合加以說明。 First, the case where the liquid crystal glass substrate W1 having the largest size among the three types of liquid crystal glass substrates W1 to W3 is the object to be transported will be described with reference to FIG. 8 and FIG.
如第8圖及第9圖表示，以液晶玻璃基板W1為搬運對象的場合，在左手9L及右手9R所具備第1個叉子112A上與第5個叉子112E上，分別配置著一對固定構件115的一方或另一方，及上述三種類的一對引導構件113A、一對引導構件113B及一對引導構件113C之中，叉子短方向尺寸最小的一對引導構件113A的一方或另一方。再者，第8圖及第9圖表示的例中，引導構件113A 是相當於申請專利範圍記載的第2引導構件。一對固定構件115是如上述，被分別固定在上述預定的短方向位置。 In the case where the liquid crystal glass substrate W1 is to be transported, the left hand 9L and the right hand 9R are provided with a pair of fixing members on the first fork 112A and the fifth fork 112E, respectively. One or the other of the pair of guide members 113A having the smallest dimension in the short direction of the fork, one or the other of the three types of the pair of the guide members 113A, the pair of the guide members 113B, and the pair of the guide members 113C. Furthermore, in the examples shown in FIGS. 8 and 9, the guiding member 113A It is equivalent to the second guiding member described in the patent application. The pair of fixing members 115 are fixed to the predetermined short-direction positions, respectively, as described above.
一對引導構件113A是由：將支撐著載放於叉子112上的液晶玻璃基板W的襯墊231a豎立設置在液晶玻璃基板W側的上端部的平板部231A，及藉平板部231A上的襯墊231a以螺絲116固定在固定構件115側的引導部232所構成。平板部231A在該例中具有兩個沿著叉子短方向形成長孔形的插穿螺絲114並緊固於叉子112A上或叉子112E上的螺孔112b、112c用的長孔231Aa。各長孔231Aa是分別設定使叉子長方向的長度較螺絲114的軸部長，且較螺絲114的頭部短，並設定使叉子短方向的長度至少比上述長方向的長度長。 The pair of guiding members 113A are: a flat plate portion 231A that supports the spacer 231a of the liquid crystal glass substrate W placed on the fork 112 on the liquid crystal glass substrate W side, and a lining on the flat plate portion 231A. The pad 231a is constituted by a guide portion 232 to which the screw 116 is fixed to the fixing member 115 side. The flat plate portion 231A has, in this example, two long holes 231Aa for inserting the long holes in the short direction of the fork and fastening the screw holes 112b, 112c on the fork 112A or the fork 112E. Each of the long holes 231Aa is set such that the length in the longitudinal direction of the fork is smaller than the axial direction of the screw 114, and is shorter than the head of the screw 114, and the length in the short direction of the fork is set to be at least longer than the length in the longitudinal direction.
以液晶玻璃基板W1為搬運對象的場合，首先，將一對引導構件113A分別配置在固定於上述預定的短方向位置的一對固定構件115之間。詳細而言，一對引導構件113A是將與平板部231A的液晶玻璃基板W1相反側的面分別配置在碰觸並抵接於接近側之固定構件115的液晶玻璃基板W1側的面上。並在此狀態下，將兩個螺絲114插穿各長孔231Aa並緊固於螺孔112b、112c，可將一對引導構件113A分別固定在叉子112A、112E上。根據上述，引導構件113A是藉著叉子112A、112E上的固定構件115固定在成為液晶玻璃基板W1側的位置，以使得引導部232的端面在叉子短方向間隔預定的間隙和載放在叉子112上的液晶玻璃基板W1的端面成相對。 When the liquid crystal glass substrate W1 is to be transported, first, the pair of guiding members 113A are disposed between the pair of fixing members 115 fixed to the predetermined short-direction position. Specifically, the pair of guiding members 113A are disposed on the surface of the liquid crystal glass substrate W1 on the side opposite to the liquid crystal glass substrate W1 of the flat plate portion 231A, and are in contact with the fixing member 115 on the approaching side. In this state, the two screws 114 are inserted through the long holes 231Aa and fastened to the screw holes 112b, 112c, and the pair of guiding members 113A can be fixed to the forks 112A, 112E, respectively. According to the above, the guiding member 113A is fixed to the position on the side of the liquid crystal glass substrate W1 by the fixing members 115 on the forks 112A, 112E, so that the end faces of the guiding portions 232 are spaced apart by a predetermined gap in the short direction of the fork and placed on the fork 112. The end faces of the upper liquid crystal glass substrate W1 are opposed to each other.
再者，第8圖及第9圖表示的例中，和抵接於配置在上述預定的短方向位置的一對固定構件115之液晶玻璃基板W1側的面的一對引導構件113A的液晶玻璃基板W1是相當於申請專利範圍記載的第4抵接面。 In the example shown in Figs. 8 and 9, the liquid crystal glass of the pair of guiding members 113A abutting on the surface of the pair of fixing members 115 disposed on the liquid crystal glass substrate W1 side in the predetermined short direction position. The substrate W1 is a fourth abutting surface described in the patent application.
如上述進行安裝更換，並進行變更叉子112B、112D上的引導構件13的固定位置的安裝更換(參閱第2圖及第3圖)，搬運對象物的液晶玻璃基板W1，使其叉子短方向側的端面從一對引導構件113A的引導部232的端面的叉子短方向的兩端分別間隔預定的間隙相對，並使其叉子長方向側的端面從一對引導構件13的引導部132的端面的叉子長方向的兩端分別間隔預定的間隙相對地，一邊支撐於叉子112A、112E上的引導構件113A的平板部231A上的襯墊231a；叉子112B、112D上的銷12g及引導構件13的平板部131上的襯墊131a；及叉子112C上的銷112Ca並載放在叉子112上。 The mounting and replacement are performed as described above, and the mounting position of the guide member 13 on the forks 112B and 112D is changed and replaced (see FIGS. 2 and 3), and the liquid crystal glass substrate W1 of the object is conveyed so that the fork is short-side. The end faces of the end faces in the short direction of the end faces of the guide portions 232 of the pair of guide members 113A are opposed to each other with a predetermined gap therebetween, and the end faces on the long side of the fork are formed from the end faces of the guide portions 132 of the pair of guide members 13. The both ends of the fork in the longitudinal direction are respectively supported by the spacer 231a on the flat plate portion 231A of the guiding member 113A on the forks 112A, 112E, and the flat plate 12g on the forks 112B, 112D and the flat plate of the guiding member 13 The pad 131a on the portion 131 and the pin 112Ca on the fork 112C are placed on the fork 112.
接著，使用第10圖及第11圖，針對以上述三種類的液晶玻璃基板W1~W3之中，第2大尺寸的液晶玻璃基板W2為搬運對象的場合加以說明。 Next, a case where the second large-sized liquid crystal glass substrate W2 is transported among the three types of liquid crystal glass substrates W1 to W3 described above will be described with reference to FIG. 10 and FIG.
如第10圖及第11圖表示，以液晶玻璃基板W2為搬運對象的場合，在左手9L及右手9R所具備第1個叉子112A上與第5個叉子112E上，分別配置著一對固定構件115的一方或另一方，及上述三種類的一對引導構件113A、一對引導構件113B及一對引導構件113C之中，叉子短方向尺寸第2小的一對引導構件113B的一方或另 一方。再者，第10圖及第11圖表示的例中，引導構件113B是相當於申請專利範圍記載的第2引導構件。一對固定構件115是如上述，被分別固定在上述預定的短方向位置。 In the case where the liquid crystal glass substrate W2 is to be transported, the left hand 9L and the right hand 9R are provided with a pair of fixing members on the first fork 112A and the fifth fork 112E, respectively. One or the other of the pair of guide members 113A, the pair of guide members 113B, and the pair of guide members 113C of the above-described three types, one or the other of the pair of guide members 113B having the second smallest dimension in the short direction of the fork One party. Further, in the examples shown in Figs. 10 and 11 , the guiding member 113B is a second guiding member described in the patent application. The pair of fixing members 115 are fixed to the predetermined short-direction positions, respectively, as described above.
一對引導構件113B是由：將支撐著載放於叉子112上的液晶玻璃基板W的襯墊231a豎立設置在液晶玻璃基板W側的上端部的平板部231B，及藉平板部231B上的襯墊231a以螺絲116固定在固定構件115側的引導部232所構成。平板部231B在該例中具有兩個沿著叉子短方向形成長孔形的插穿螺絲114並緊固於叉子112A上或叉子112E上的螺孔112b、112c用的長孔231Ba。各長孔231Ba是分別設定使叉子長方向的長度較螺絲114的軸部長，且較螺絲114的頭部短，並設定使叉子短方向的長度至少比上述長方向的長度長。 The pair of guiding members 113B are: a flat plate portion 231B that supports the spacer 231a of the liquid crystal glass substrate W placed on the fork 112 on the liquid crystal glass substrate W side, and a lining on the flat plate portion 231B. The pad 231a is constituted by a guide portion 232 to which the screw 116 is fixed to the fixing member 115 side. In this example, the flat plate portion 231B has two long holes 231Ba for inserting the long holes in the short direction of the fork and fastening the screw holes 112b, 112c on the fork 112A or the fork 112E. Each of the long holes 231Ba is set such that the length in the longitudinal direction of the fork is smaller than the axial direction of the screw 114, and is shorter than the head of the screw 114, and the length in the short direction of the fork is set to be at least longer than the length in the longitudinal direction.
以液晶玻璃基板W2為搬運對象的場合，首先，將一對引導構件113B分別配置在固定於上述預定的短方向位置的一對固定構件115之間。詳細而言，一對引導構件113B是將與平板部231B的液晶玻璃基板W2相反側的面分別配置在碰觸並抵接於接近側之固定構件115的液晶玻璃基板W2側的面上。並在此狀態下，將兩個螺絲114插穿各長孔231Ba並緊固於螺孔112b、112c，可將一對引導構件113B分別固定在叉子112A、112E上。根據上述，引導構件113B是藉著叉子112A、112E上的固定構件115固定在成為液晶玻璃基板W2側的位置，以使得引 導部232的端面在叉子短方向間隔預定的間隙和載放在叉子112上的液晶玻璃基板W2的端面成相對。 When the liquid crystal glass substrate W2 is to be transported, first, the pair of guiding members 113B are disposed between the pair of fixing members 115 fixed to the predetermined short-direction position. Specifically, the pair of guiding members 113B are disposed on the surface of the liquid crystal glass substrate W2 on the side opposite to the liquid crystal glass substrate W2 of the flat plate portion 231B, and are in contact with the fixing member 115 on the approaching side. In this state, the two screws 114 are inserted through the long holes 231Ba and fastened to the screw holes 112b, 112c, and the pair of guiding members 113B can be fixed to the forks 112A, 112E, respectively. According to the above, the guiding member 113B is fixed to the position on the side of the liquid crystal glass substrate W2 by the fixing member 115 on the forks 112A, 112E, so that the guiding member 113B The end faces of the guide portions 232 are opposed to each other at a predetermined gap in the short direction of the fork and the end faces of the liquid crystal glass substrate W2 placed on the fork 112.
再者，第10圖及第11圖表示的例中，和抵接於配置在上述預定的短方向位置的一對固定構件115的液晶玻璃基板W2側的面之一對引導構件113B的液晶玻璃基板W2相反側的面是相當於申請專利範圍記載的第4抵接面。 Further, in the examples shown in FIGS. 10 and 11 , the liquid crystal glass of one of the faces on the liquid crystal glass substrate W2 side of the pair of fixing members 115 disposed in the predetermined short direction position is in contact with the guide member 113B. The surface on the opposite side of the substrate W2 corresponds to the fourth abutting surface described in the patent application.
如上述進行安裝更換，並進行變更叉子112B、112D上的引導構件13的固定位置的安裝更換(參閱第4圖及第5圖)，搬運對象物的液晶玻璃基板W2，使其叉子短方向側的端面從一對引導構件113B的引導部232的端面的叉子短方向的兩端分別間隔預定的間隙相對，並使其叉子長方向側的端面從一對引導構件13的引導部132的端面的叉子長方向的兩端分別間隔預定的間隙相對地，一邊支撐於叉子112A、112E上的引導構件113B的平板部231B上的襯墊231a；叉子112B、112D上的銷12g及引導構件13的平板部131上的襯墊131a；及叉子112C上的銷112Ca並載放在叉子112上。 The mounting and replacement are performed as described above, and the mounting position of the guide member 13 on the forks 112B and 112D is changed and replaced (see FIGS. 4 and 5), and the liquid crystal glass substrate W2 of the object is conveyed so that the fork is short-side. The end faces of the end faces in the short direction of the end faces of the guide portions 232 of the pair of guide members 113B are opposed to each other with a predetermined gap therebetween, and the end faces on the long side of the fork are formed from the end faces of the guide portions 132 of the pair of guide members 13. The both ends of the fork in the longitudinal direction are respectively supported by the spacer 231a on the flat plate portion 231B of the guiding member 113B on the forks 112A, 112E with a predetermined gap therebetween; the pin 12g on the forks 112B, 112D and the flat plate of the guiding member 13 The pad 131a on the portion 131 and the pin 112Ca on the fork 112C are placed on the fork 112.
接著，使用第12圖及第13圖，針對以上述三種類的液晶玻璃基板W1~W3之中，最小尺寸的液晶玻璃基板W3為搬運對象的場合加以說明。 Next, a case where the liquid crystal glass substrate W3 having the smallest size among the three types of liquid crystal glass substrates W1 to W3 is transported will be described with reference to FIGS. 12 and 13 .
如第12圖及第13圖表示，以液晶玻璃基板W3為搬運對象的場合，在左手9L及右手9R所具備第1個叉子112A上與第5個叉子112E上，分別配置著一對固定構件115的一方或另一方，及上述三種類的一對引導構件 113A、一對引導構件113B及一對引導構件113C之中，叉子短方向尺寸最大的一對引導構件113C的一方或另一方。再者，第12圖及第13圖表示的例中，引導構件113C是相當於申請專利範圍記載的第2引導構件。一對固定構件115是如上述，被分別固定在上述預定的短方向位置。 In the case where the liquid crystal glass substrate W3 is to be transported, the left hand 9L and the right hand 9R are provided with a pair of fixing members on the first fork 112A and the fifth fork 112E, respectively. One or the other of 115, and a pair of guiding members of the above three types Among the 113A, the pair of guiding members 113B and the pair of guiding members 113C, one or the other of the pair of guiding members 113C having the largest dimension in the short direction of the fork. In the examples shown in FIGS. 12 and 13 , the guiding member 113C is a second guiding member described in the patent application. The pair of fixing members 115 are fixed to the predetermined short-direction positions, respectively, as described above.
一對引導構件113C是由：平板部231C及藉螺絲116固定於平板部231C上的固定構件115側的引導部232所構成。平板部231C在該例中具有兩個沿著叉子短方向形成長孔形的插穿螺絲114並緊固於叉子112A上或叉子112E上的螺孔112b、112c用的長孔231Ca。各長孔231Ca是分別設定使叉子長方向的長度較螺絲114的軸部長，且較螺絲114的頭部短，並設定使叉子短方向的長度至少比上述長方向的長度長。 The pair of guiding members 113C are composed of a flat plate portion 231C and a guide portion 232 on the side of the fixing member 115 fixed to the flat plate portion 231C by a screw 116. In this example, the flat plate portion 231C has two long holes 231Ca for forming the elongated hole-shaped insertion screws 114 in the short direction of the fork and fastened to the screw holes 112b, 112c on the fork 112A or the fork 112E. Each of the long holes 231Ca is set such that the length in the longitudinal direction of the fork is smaller than the axial direction of the screw 114, and is shorter than the head of the screw 114, and the length in the short direction of the fork is set to be at least longer than the length in the longitudinal direction.
以液晶玻璃基板W3為搬運對象的場合，首先，將一對引導構件113C分別配置在固定於上述預定的短方向位置的一對固定構件115之間。詳細而言，一對引導構件113C是將與平板部231C的液晶玻璃基板W3相反側的面分別配置在碰觸並抵接於接近側之固定構件115的液晶玻璃基板W3側的面上。並在此狀態下，將兩個螺絲114插穿各長孔231Ca並緊固於螺孔112b、112c，可將一對引導構件113C分別固定在叉子112A、112E上。根據上述，引導構件113C是藉著叉子112A、112E上的固定構件115固定在成為液晶玻璃基板W3側的位置，以使得引 導部232的端面在叉子短方向間隔預定的間隙和載放在叉子112上的液晶玻璃基板W3的端面成相對。 When the liquid crystal glass substrate W3 is to be transported, first, the pair of guiding members 113C are disposed between the pair of fixing members 115 fixed to the predetermined short-direction position. Specifically, the pair of guiding members 113C are disposed on the surface of the liquid crystal glass substrate W3 on the side opposite to the fixing member 115 on the approaching side, respectively, on the surface opposite to the liquid crystal glass substrate W3 of the flat plate portion 231C. In this state, the two screws 114 are inserted through the long holes 231Ca and fastened to the screw holes 112b and 112c, and the pair of guiding members 113C can be fixed to the forks 112A and 112E, respectively. According to the above, the guiding member 113C is fixed to the position on the side of the liquid crystal glass substrate W3 by the fixing member 115 on the forks 112A, 112E, so that the guiding member 113C The end faces of the guide portions 232 are opposed to each other at a predetermined gap in the short direction of the fork and the end faces of the liquid crystal glass substrate W3 placed on the fork 112.
再者，第12圖及第13圖表示的例中，和抵接於配置在上述預定的短方向位置的一對固定構件115的液晶玻璃基板W3側的面之一對引導構件113C的液晶玻璃基板W3相反側的面是相當於申請專利範圍記載的第4抵接面。 In the example shown in Fig. 12 and Fig. 13, the liquid crystal glass of one of the faces on the liquid crystal glass substrate W3 side of the pair of fixing members 115 disposed at the predetermined short direction position is in contact with the guide member 113C. The surface on the opposite side of the substrate W3 corresponds to the fourth abutting surface described in the patent application.
如上述進行安裝更換，並進行變更叉子112B、112D上的引導構件13的固定位置的安裝更換(參閱第6圖及第7圖)，搬運對象物的液晶玻璃基板W3，使其叉子短方向側的端面從一對引導構件113C的引導部232的端面的叉子短方向的兩端分別間隔預定的間隙相對，並使其叉子長方向側的端面從一對引導構件13的引導部132的端面的叉子長方向的兩端分別間隔預定的間隙相對地，一邊支撐於叉子112B、112D上的銷12g及引導構件13的平板部131上的襯墊131a：及叉子112C上的銷112Ca並載放在叉子112上。 The mounting and replacement are performed as described above, and the mounting position of the guide member 13 on the forks 112B and 112D is changed and replaced (see FIGS. 6 and 7), and the liquid crystal glass substrate W3 of the object is conveyed so that the fork is short-side. The end faces of the end faces in the short direction of the end faces of the guide portions 232 of the pair of guide members 113C are opposed to each other with a predetermined gap therebetween, and the end faces on the long side of the fork are made from the end faces of the guide portions 132 of the pair of guide members 13. Both ends of the fork in the longitudinal direction are opposed to each other with a predetermined gap therebetween, and the pins 12g on the forks 112B and 112D and the pad 131a on the flat plate portion 131 of the guiding member 13 and the pin 112Ca on the fork 112C are placed and placed. On the fork 112.
本變形例中，具有：叉子112A、112E間在叉子短方向彼此分開所配置的一對固定構件115，及分別配置在一對固定構件115之間，限制載放於叉子112A、112E上的液晶玻璃基板W側的叉子短方向的移動的一對引導構件113A、113B、113C。並且，一對引導構件113A、113B、113C分別配置使得與平板部231A、231B、231C的液晶玻璃基板W1、W2、W3相反側的面，碰觸並抵接於固定在叉子112A、112E上的預定的短方向位置之一對固定構件 115的液晶玻璃基板W1、W2、W3側的面上。藉此可容易且確實地配置使引導構件113在叉子短方向間隔預定的間隙和載放在叉子112上的液晶玻璃基板W成相對。 In the present modification, a pair of fixing members 115 disposed between the forks 112A and 112E in the short direction of the fork are disposed, and are disposed between the pair of fixing members 115, respectively, and the liquid crystals placed on the forks 112A and 112E are restricted. A pair of guiding members 113A, 113B, and 113C that move the fork in the short direction on the glass substrate W side. Further, the pair of guiding members 113A, 113B, and 113C are disposed so as to face the surfaces of the flat plate portions 231A, 231B, and 231C on the opposite sides of the liquid crystal glass substrates W1, W2, and W3, and are in contact with and fixed to the forks 112A and 112E. One of the predetermined short-direction positions of the fixed member The surface on the side of the liquid crystal glass substrates W1, W2, and W3 of 115. Thereby, the liquid crystal glass substrate W placed on the fork 112 can be easily and surely arranged such that the guide member 113 is spaced apart by a predetermined gap in the short direction of the fork.
以上是分別針對一對引導構件13，將叉子長方向位置構成為可選擇性設定在複數個位置，但不限於此，也可以僅一對引導構件13的一方，將叉子長方向位置構成為可選擇性設定於複數的位置。 In the above, the pair of guiding members 13 are configured to be selectively set at a plurality of positions in the longitudinal direction of the fork. However, the present invention is not limited thereto, and only one of the pair of guiding members 13 may be configured to have a position in the longitudinal direction of the fork. Selectively set to the plural position.
並且以上，雖例示準備彼此尺寸不同的三種類的液晶玻璃基板W的場合作為機器人1的搬運對象，但是不限於此，也可運用於準備彼此尺寸不同的兩種類的液晶玻璃基板W的場合或準備彼此尺寸不同的四種類以上的液晶玻璃基板W的場合。 In the above, the three types of liquid crystal glass substrates W having different sizes are prepared as the object to be transported by the robot 1. However, the present invention is not limited thereto, and may be applied to the case of preparing two types of liquid crystal glass substrates W having different sizes. When four or more types of liquid crystal glass substrates W having different sizes from each other are prepared.
進一步在上述中，對象物雖是以液晶玻璃基板W，但不限於此，對象物也可以是其他物(例如半導體基板等)。 Further, in the above, the object is a liquid crystal glass substrate W, but the invention is not limited thereto, and the object may be another material (for example, a semiconductor substrate or the like).
又如以上所說明之外，也可適當組合根據上述實施形態或各變形例的手法來利用。 Further, as described above, the method according to the above embodiment or each modification may be used as appropriate.
此外，雖不逐一予以例示，但上述實施形態或各變形例在不脫離其主旨的範圍內，可施以種種的變更加以實施。 In addition, the above-described embodiment or each modification can be implemented in various modifications without departing from the spirit and scope of the invention.
1‧‧‧機器人 1‧‧‧Robot
6‧‧‧臂(機器人臂) 6‧‧‧arm (robot arm)
6L‧‧‧左臂(機器人臂) 6L‧‧‧Left arm (robot arm)
6R‧‧‧右臂(機器人臂) 6R‧‧‧Right arm (robot arm)
9‧‧‧手(機器人手) 9‧‧‧Hand (robot hand)
9L‧‧‧左手(機器人手) 9L‧‧‧left hand (robot hand)
9R‧‧‧右手(機器人手) 9R‧‧‧Right hand (robot hand)
12‧‧‧叉子 12‧‧‧ fork
12a~f‧‧‧螺孔 12a~f‧‧‧ screw holes
13‧‧‧引導構件(第1引導構件) 13‧‧‧Guiding member (first guiding member)
14‧‧‧螺絲 14‧‧‧ screws
15‧‧‧固定構件(第1固定構件) 15‧‧‧Fixed members (1st fixing member)
15a‧‧‧長孔(第1插穿孔) 15a‧‧‧ long hole (1st perforation)
17A、B‧‧‧中間構件(第1中間構件) 17A, B‧‧‧ intermediate members (1st intermediate member)
17Aa、Ba‧‧‧長孔(第3插穿孔) 17Aa, Ba‧‧ long hole (3rd perforation)
112‧‧‧叉子 112‧‧‧ fork
112A~E‧‧‧叉子 112A~E‧‧‧ fork
113A~C‧‧‧引導構件(第2引導構件) 113A~C‧‧‧Guiding member (2nd guiding member)
115‧‧‧固定構件(第2固定構件) 115‧‧‧Fixed members (2nd fixing member)
131b‧‧‧長孔(第2插穿孔) 131b‧‧‧ long hole (2nd perforation)
W‧‧‧液晶玻璃基板(對象物) W‧‧‧Liquid glass substrate (object)
W1~3‧‧‧液晶玻璃基板(對象物) W1~3‧‧‧Liquid glass substrate (object)
第1圖是表示一實施形態的機器人之整體構成的透視圖。 Fig. 1 is a perspective view showing the overall configuration of a robot according to an embodiment.
第2圖是以最大尺寸的液晶玻璃基板為搬運對象的場合之安裝更換說明用的說明圖。 Fig. 2 is an explanatory view for explaining the installation and replacement in the case where the liquid crystal glass substrate having the largest size is to be transported.
第3圖是相當於第2圖中的III-III剖面的剖面圖。 Fig. 3 is a cross-sectional view corresponding to the III-III cross section in Fig. 2.
第4圖是以第二大尺寸的液晶玻璃基板為搬運對象的場合之安裝更換說明用的說明圖。 Fig. 4 is an explanatory view for explaining the installation and replacement in the case where the liquid crystal glass substrate of the second largest size is to be transported.
第5圖是相當於第4圖中的V-V剖面的剖面圖。 Fig. 5 is a cross-sectional view corresponding to the V-V cross section in Fig. 4.
第6圖是以最小尺寸的液晶玻璃基板為搬運對象的場合之安裝更換說明用的說明圖。 Fig. 6 is an explanatory view for explaining the installation and replacement in the case where the liquid crystal glass substrate having the smallest size is to be transported.
第7圖是相當於第6圖中的VII-VII剖面的剖面圖。 Fig. 7 is a cross-sectional view corresponding to the VII-VII cross section in Fig. 6.
第8圖是在叉子的短方向也配置引導構件的變形例中，以最大尺寸的液晶玻璃基板為搬運對象的場合的安裝更換說明用的說明圖。 FIG. 8 is an explanatory view for explaining the installation and replacement in the case where the liquid crystal glass substrate having the largest size is to be transported, in the modified example in which the guide member is disposed in the short direction of the fork.
第9圖是相當於第8圖中的IX-IX剖面的剖面圖。 Fig. 9 is a cross-sectional view corresponding to the IX-IX cross section in Fig. 8.
第10圖是以第2大尺寸的液晶玻璃基板為搬運對象的場合的安裝更換說明用的說明圖。 Fig. 10 is an explanatory view for explaining the mounting and replacement in the case where the liquid crystal glass substrate of the second largest size is to be transported.
第11圖是相當於第10圖中的XI-XI剖面的剖面圖。 Fig. 11 is a cross-sectional view corresponding to the XI-XI cross section in Fig. 10.
第12圖是以最小尺寸的液晶玻璃基板為搬運對象的場合的安裝更換說明用的說明圖。 Fig. 12 is an explanatory view for explaining the installation and replacement in the case where the liquid crystal glass substrate having the smallest size is to be transported.
第13圖是相當於第12圖中的XIII-XIII剖面的剖面圖。 Fig. 13 is a cross-sectional view corresponding to the XIII-XIII cross section in Fig. 12.
9L‧‧‧左手(機器人手) 9L‧‧‧left hand (robot hand)
9R‧‧‧右手(機器人手) 9R‧‧‧Right hand (robot hand)
12‧‧‧叉子 12‧‧‧ fork
12e、12f‧‧‧螺孔 12e, 12f‧‧‧ screw holes
12g‧‧‧銷 12g‧‧ sales
13‧‧‧引導構件(第1引導構件) 13‧‧‧Guiding member (first guiding member)
14‧‧‧螺絲 14‧‧‧ screws
15‧‧‧固定構件(第1固定構件) 15‧‧‧Fixed members (1st fixing member)
15a‧‧‧長孔(第1插穿孔) 15a‧‧‧ long hole (1st perforation)
16‧‧‧螺絲 16‧‧‧ screws
131‧‧‧平板部 131‧‧‧ Flat section
131a‧‧‧襯墊 131a‧‧‧ liner
131b‧‧‧長孔(第2插穿孔) 131b‧‧‧ long hole (2nd perforation)
132‧‧‧引導部 132‧‧‧Guide Department
W1‧‧‧液晶玻璃基板(對象物) W1‧‧‧ liquid crystal glass substrate (object)
Claims (7)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011195859A JP5403378B2 (en) | 2011-09-08 | 2011-09-08 | Robot hand and robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201341134A true TW201341134A (en) | 2013-10-16 |
Family
ID=47864129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101131317A TW201341134A (en) | 2011-09-08 | 2012-08-29 | Robot hand and robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5403378B2 (en) |
| KR (1) | KR101495958B1 (en) |
| CN (2) | CN202805187U (en) |
| TW (1) | TW201341134A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI790731B (en) * | 2020-09-16 | 2023-01-21 | 日商芝浦機械電子裝置股份有限公司 | Substrate transfer device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103434842B (en) * | 2013-09-04 | 2015-08-19 | 深圳市华星光电技术有限公司 | Mechanical arm fork and mechanical arm |
| CA2937211A1 (en) * | 2014-02-19 | 2015-08-27 | Comau S.P.A. | Roller hemming head having a replaceable roller-carrying unit |
| CN112476431B (en) * | 2020-11-02 | 2022-03-04 | 合肥欣奕华智能机器有限公司 | Substrate transfer robot control method, device, system, apparatus, and medium |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2529260Y2 (en) * | 1990-05-23 | 1997-03-19 | 東芝機械株式会社 | Chuck device |
| JP2573759B2 (en) * | 1991-07-18 | 1997-01-22 | 大日本スクリーン製造株式会社 | Substrate positioning device |
| JP2555849Y2 (en) * | 1992-09-17 | 1997-11-26 | 大日本スクリーン製造株式会社 | Rotary substrate processing equipment |
| JPH11254374A (en) * | 1998-03-10 | 1999-09-21 | Toray Ind Inc | Substrate carrying hand, substrate carrying method, and device and method for manufacturing color filter |
| JP2000003951A (en) * | 1998-06-16 | 2000-01-07 | Tokyo Electron Ltd | Transfer device |
| US6322116B1 (en) * | 1999-07-23 | 2001-11-27 | Asm America, Inc. | Non-contact end effector |
| JP4770041B2 (en) * | 2001-03-26 | 2011-09-07 | 東レ株式会社 | Substrate transfer hand and color filter manufacturing equipment |
| JP4038653B2 (en) * | 2001-12-03 | 2008-01-30 | 株式会社安川電機 | Wafer transfer fork |
| US7641247B2 (en) * | 2002-12-17 | 2010-01-05 | Applied Materials, Inc. | End effector assembly for supporting a substrate |
| CN2798472Y (en) * | 2005-06-02 | 2006-07-19 | 海信集团有限公司 | Workpiece assembling equipment for adjusting liquid crystal TV |
| KR100949502B1 (en) * | 2005-06-20 | 2010-03-24 | 엘지디스플레이 주식회사 | Conveyance device for liquid crystal display |
| JP2007142239A (en) * | 2005-11-21 | 2007-06-07 | Jel:Kk | Substrate-holding apparatus |
| DE112009000297B4 (en) * | 2008-02-06 | 2024-07-04 | Ulvac, Inc. | Robot hand for substrate transfer |
-
2011
- 2011-09-08 JP JP2011195859A patent/JP5403378B2/en active Active
-
2012
- 2012-08-29 TW TW101131317A patent/TW201341134A/en unknown
- 2012-09-07 CN CN2012204539455U patent/CN202805187U/en not_active Expired - Fee Related
- 2012-09-07 KR KR20120099360A patent/KR101495958B1/en not_active IP Right Cessation
- 2012-09-07 CN CN2012103313634A patent/CN102990643A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI790731B (en) * | 2020-09-16 | 2023-01-21 | 日商芝浦機械電子裝置股份有限公司 | Substrate transfer device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130028015A (en) | 2013-03-18 |
| CN102990643A (en) | 2013-03-27 |
| JP2013056390A (en) | 2013-03-28 |
| CN202805187U (en) | 2013-03-20 |
| JP5403378B2 (en) | 2014-01-29 |
| KR101495958B1 (en) | 2015-02-25 |
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