CN102990643A - Robot hand and robot - Google Patents
Robot hand and robot Download PDFInfo
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- CN102990643A CN102990643A CN2012103313634A CN201210331363A CN102990643A CN 102990643 A CN102990643 A CN 102990643A CN 2012103313634 A CN2012103313634 A CN 2012103313634A CN 201210331363 A CN201210331363 A CN 201210331363A CN 102990643 A CN102990643 A CN 102990643A
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- China
- Prior art keywords
- fork
- pair
- guide member
- liquid crystal
- side direction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S294/00—Handling: hand and hoist-line implements
- Y10S294/901—Plate lifting clamp
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The invention provides a robot hand and a robot, which are easy to replace and adjust. Each of a left hand (9L) and a right hand (9R) that are arranged on a left arm (6L) and a right arm (6R) comprises three forks (12), capable of carrying a liquid crystal glass substrate (W); a pair of fixing components (15), which are disposed separately in the long-side direction of the forks (12); and a pair of guiding components (13), which are configured between the pair of fixing components (15) to limit the movement of the liquid crystal glass substrate (W) on the forks (12) in the long-side direction. At least one of the pair of guiding components (13) is configured selectively at multiple positions in the long-side direction of the forks (12).
Description
Technical field
Embodiment disclosed by the invention relates to the robot and the robot with this robot for delivery of object.
Background technology
In the past, the robot for delivery of object was known (for example, with reference to patent documentation 1).The robot of the prior art (substrate is carried and used hand) is installed via hand and is installed on the hand installation portion of robot (automatic conveying device) with plate.And then this robot has: be configured in object (substrate) circumference the outside arm and be installed on this arm and control the substrate grasping section of the circumference of object.
The base material of substrate grasping section is controlled parts and is made of guide member (controlling mother metal), supporting pin mobile and that guide the guiding piece of this guide member and support the back side of object.Guide member can move at the long side direction of arm along the guiding piece that is fixed on the arm, and uses bolt screw to be fixed on desired locations.And guide member has substrate-guided and real estate to section.Even in the situation that the position of substrate-guided object when receiving object is offset slightly, also object can be directed to the part of section being surrounded by real estate.Real estate is configured to prevent the object skew with that the end face that is held in the object on the supporting pin is separated predetermined gap is opposed to section.
[patent documentation 1] Japanese kokai publication hei 11-254374 communique
The robot of above-mentioned prior art is by changing the fixed position based on bolt screw of guide member, thereby can change the Support Position of object, thereby can be used for the environment of the object that delivery size differs from one another.Like this, in the situation of the environment of the object that will differ from one another for delivery of size for delivery of the robot of object, each change is during as the size of the object of object conveyor, all need to be with the changing to produce and adjust of fixed position of changing guide member across the opposed mode of predetermined gap with object.Generally, when teaching, each size according to object, set the fixed position of guide member and record mark, in change during as the size of the object of object conveyor, by guide member being disposed in the mode consistent with the mark that is recorded when the above-mentioned teaching and fixing, change to produce and adjust.Therefore, change to produce to adjust and take time and energy, workability be cannot say for sure well.
Summary of the invention
The present invention finishes in view of the above problems, the purpose of this invention is to provide a kind of can changing easily and produces robot and the robot that adjusts.
In order to solve above-mentioned problem, according to a viewpoint of the present invention, use a kind of robot, described robot is located on the robots arm, and for delivery of object, described robot has: at least one fork, described fork can load described object; A pair of the 1st fixed part, described a pair of the 1st fixed part disposes at the long side direction of described fork separated from one anotherly; And a pair of the 1st guide member, described a pair of the 1st guide member is configured in respectively between described a pair of the 1st fixed part, restriction is positioned in described object on the described fork in the movement of described long side direction, at least one party in described a pair of the 1st guide member constitutes, and optionally is set as a plurality of positions in the position of the long side direction of described fork.
According to robot of the present invention and robot, can change easily to produce and adjust.
Description of drawings
Fig. 1 is the integrally-built stereogram of the robot of an embodiment of expression.
Fig. 2 produces the key diagram adjusted at the liquid crystal glass base with the size maximum as changing in the situation of object conveyor for explanation.
Fig. 3 be with Fig. 2 in the suitable sectional view in III-III cross section.
Fig. 4 produces the key diagram adjusted at the liquid crystal glass base that size is second largest as changing in the situation of object conveyor for explanation.
Fig. 5 be with Fig. 4 in the suitable sectional view in V-V cross section.
Fig. 6 produces the key diagram adjusted at the liquid crystal glass base with the size minimum as changing in the situation of object conveyor for explanation.
Fig. 7 be with Fig. 6 in the suitable sectional view in VII-VII cross section.
Fig. 8 is for illustrating that the short side direction at fork also disposes the variation of guide member, produces the key diagram of adjusting at the liquid crystal glass base with the size maximum as changing in the situation of object conveyor.
Fig. 9 be with Fig. 8 in the suitable sectional view in IX-IX cross section.
Figure 10 produces the key diagram adjusted at the liquid crystal glass base that size is second largest as changing in the situation of object conveyor for explanation.
Figure 11 be with Figure 10 in the suitable sectional view in XI-XI cross section.
Figure 12 produces the key diagram adjusted at the liquid crystal glass base with the size minimum as changing in the situation of object conveyor for explanation.
Figure 13 be with Figure 12 in the suitable sectional view in XIII-XIII cross section.
Label declaration
1: robot; 6: arm (robots arm); 6L: left arm (robots arm); 6R: right arm (robots arm); 9: hand (robot); 9L: left hand (robot); 9R: the right hand (robot); 12: fork; 12a～12f: screwed hole; 13: guide member (the 1st guide member); 14: screw; 15: fixed part (the 1st fixed part); 15a: slotted hole (the 1st runs through patchhole); 17A, 17B: intermediate member (the 1st intermediate member); 17Aa, 17Ba: slotted hole (the 3rd runs through patchhole); 112: fork; 112A～112E: fork; 113A～113C: guide member (the 2nd guide member); 115: fixed part (the 2nd fixed part); 131b: slotted hole (the 2nd runs through patchhole); W: liquid crystal glass base (object); W1～W3: liquid crystal glass base (object).
The specific embodiment
Below, with reference to embodiment of description of drawings.
As shown in Figure 1, the robot 1 of present embodiment is the laminal liquid crystal glass base W(object that will be accommodated in the not shown box) be transported to the articulated robot of presumptive area.This robot 1 has: can be towards the walking carriage 2 of predetermined direction walking; Be installed in the fixed pedestal section 3 on the walking carriage 2; Lifting arm 4; Horizontal base section 5; And the left arm 6L and the right arm 6R that are connected with horizontal base section 5 with symmetrical structure.In addition, not necessarily need walking carriage 2, robot can be fixed on pallet etc.
The configuration (in this example, left hand 9L is configured in upside, and right hand 9R is configured in downside) of staggering of the position of the above-below direction of left hand 9L and right hand 9R, but be mutually the same structure basically, 3 forks 12 that can load liquid crystal glass base W had respectively.In addition, fork 12 quantity is defined as 3 unlike this example, also can be 1, more than 2 or 4.
In addition, following they are referred to as " arm 6 " of left arm 6L and right arm 6R() be equivalent to respectively the robots arm that claims are put down in writing.And, following they are referred to as " hand 9 " of left hand 9L and right hand 9R() and be equivalent to respectively the robot of claims record.
By arm 6 is swung, make hand 9 move to the place ahead by the robot 1 of above basic comprising, drives upward by making lifting arm 4, make hand 9 move to the top, the liquid crystal glass base W in the box is positioned in pitches on 12.Afterwards, swing by making arm 6, make hand 9 move to the rear, by making 5 revolutions of horizontal base section, arm 6 is turned round in the horizontal direction.Then, swing by making arm 6, make hand 9 move to the place ahead, drive downwards by making lifting arm 4, make hand 9 move to the below, the liquid crystal glass base W that is positioned on the fork 12 is positioned in presumptive area.By more than, the liquid crystal glass base W that robot 1 will be accommodated in the box is transported to presumptive area.
Here, in the present embodiment, as the object conveyor of robot 1,3 kinds of liquid crystal glass base W that size differs from one another have been prepared.In this example, prepared: the size maximum (for example, 730 * 920) liquid crystal glass base W1(is with reference to Fig. 2 described later and Fig. 3), size second largest (for example, 680 * 880) liquid crystal glass base W2(is with reference to Fig. 4 described later and Fig. 5), and (for example, 620 * 750) liquid crystal glass base W3(of size minimum is with reference to Fig. 6 described later and Fig. 7).Fork 12 either party that can load among these 3 kinds of liquid crystal glass base W1～W3.
And, in Fig. 1, omitted diagram, for the liquid crystal glass base W that prevents from being positioned on the fork 12 is offset (movement that restriction is positioned in the fork long side direction of the liquid crystal glass base W on the fork 12) at the long side direction (following suitably be called " fork long side direction ") of fork 12, on fork 12, separate respectively the opposed mode of predetermined gap (for example, the gap of 0.5mm) with the two ends with the fork long side direction that is positioned in the liquid crystal glass base W on this fork 12 and be fixed with a pair of guide member 13(the 1st guide member.Reference Fig. 2 described later etc.).Therefore, each change is during as the size of the liquid crystal glass base W of object conveyor, all the changing to produce and adjust (section Qu り Change え) of fixed position to change guide member 13 across the opposed mode of predetermined gap at the fork long side direction with liquid crystal glass base W.In addition, above-mentioned gap need to be set as and compare enough little than the size of liquid crystal glass base W.When excesssive gap, liquid crystal glass base W can be significantly mobile between a pair of guide member 13, thereby generation applies the unfavorable conditions such as impact to liquid crystal glass base W.On the other hand, when the gap is too small, do not allow mechanical timeliness variation of the tolerance of liquid crystal glass base and robot 1 etc. etc., may cause that liquid crystal glass base W is not incorporated in the situation between a pair of guide member 13.
Here, before the adjustment of exchange product describes, 3 forks 12 that are provided on left hand 9L and the right hand 9R are described.
In Fig. 2～Fig. 7,3 forks 12 that are provided on left hand 9L and the right hand 9R are mutually the same structures, have respectively along fork long side direction a plurality of screwed hole 12a, 12b, 12c, 12d, 12e, 12f that arrange at upper surface, that be used for trip bolt 14 at 2 positions that the fork long side direction is separated from each other, erect a plurality of pin 12g setting, that be used for supporting liquid crystal glass base W but also have respectively along the fork long side direction at upper surface.And above-mentioned 2 positions corresponding with the fork long side direction on each fork 12 are to dispose a pair of fixed part 15(the 1st fixed part in fork long side direction mode separated from one another).In detail, a pair of fixed part 15 be configured in respectively respectively pitch on 12, according to the precalculated position along the fork long side direction (following suitably be called " predetermined long side direction position ") of the settings such as device benchmark of robot.
A pair of fixed part 15 has 2 slotted hole 15a(the 1st and runs through patchhole in this example), this slotted hole 15a forms the slotted hole shape along the fork long side direction, for making screw 14 run through insertion and screw 14 being fastened in the screwed hole 12a that pitches on 12, be inserted in each slotted hole 15a and be fastened in each screwed hole 12a by 2 screws 14 are run through, thereby described a pair of fixed part 15 is separately fixed at above-mentioned predetermined long side direction position.In addition, above-mentioned " slotted hole shape " refers to be configured to make the shape in the size of the long axis direction hole larger than the size of short-axis direction.Each slotted hole 15a is configured to respectively, and is long and shorter than the head of screw 14 at the axial region of the Length Ratio screw 14 of fork 12 short side direction, and the length than above-mentioned short side direction is long at least to be configured to length at the fork long side direction.
And, a pair of fixed part 15, even when changing the product adjustment, do not change the fixed position yet, namely, under being the situation of the either party among liquid crystal glass base W1～W3, object conveyor all is fixed on same position, above-mentioned a pair of guide member 13 is configured in respectively between a pair of fixed part 15 that is fixed in above-mentioned predetermined long side direction position, sets the fixed position take this fixed part 15 as benchmark.Specifically, above-mentioned a pair of guide member 13 constitutes respectively, optionally is set as a plurality of positions between a pair of fixed part 15 that is fixed on above-mentioned predetermined long side direction position along the fork long side direction position of fork long side direction.
In addition, in the example of Fig. 2～shown in Figure 8, run through in each the slotted hole 15a that is inserted into fixed part 15 and be fastened in fork each screwed hole 12a on 12 and make 2 fastening screws 14 of fixed part 15 and fork 12, the 1st secure component that is equivalent to claims record, each the screwed hole 12a that is used for fastening these 2 screws 14 is equivalent to the 1st fastener hole of claims record.
Below, exchange is produced to adjust and is described.
At first, use Fig. 2 and Fig. 3, to describing as the situation of object conveyor with the liquid crystal glass base W1 of the size maximum among above-mentioned 3 kinds of liquid crystal glass base W1～W3.
As shown in Figures 2 and 3, in the situation of liquid crystal glass base W1 as object conveyor, dispose respectively a pair of fixed part 15 and a pair of guide member 13 on 12 being located at respectively pitching on left hand 9L and the right hand 9R.As mentioned above, a pair of fixed part 15 is separately fixed at above-mentioned predetermined long side direction position.
A pair of guide member 13 is made of flat part 131 and guide portion 132, flat part 131 erects in the upper end of liquid crystal glass base W side and is provided with liner 131a, this liner be used for to support the liquid crystal glass base W that is positioned on the fork 12, guide portion 132 use screws 16 be fixed on the flat part 131 than the position of liner 131a by fixed part 15 sides.Flat part 131 has 2 slotted hole 131b(the 2nd and runs through patchhole in this example), this slotted hole 131b forms the slotted hole shape along the fork long side direction, for making screw 14 run through insertion and screw 14 being fastened in the either party of the screwed hole 12b～12f on the fork 12.Each slotted hole 131b is configured to respectively, and is long and shorter than the head of screw 14 at the axial region of the Length Ratio screw 14 of fork 12 short side direction, and the length than above-mentioned short side direction is long at least to be configured to length at the fork long side direction.
In with the situation of liquid crystal glass base W1 as object conveyor, at first, a pair of guide member 13 is configured in respectively between a pair of fixed part 15 that is fixed in above-mentioned predetermined long side direction position.In detail, a pair of guide member 13 is configured to respectively, the face that is positioned at liquid crystal glass base W1 opposition side of flat part 131 with from close to the touching and butt by the face of liquid crystal glass base W1 side of fixed part 15.And then, be inserted in each slotted hole 131b and be fastened in screwed hole 12b, the 12c by under this state, 2 screws 14 being run through, thereby a pair of guide member 13 is separately fixed on the fork 12.By more than, guide member 13 separates the opposed mode of predetermined gap with the end face of guide portion 132 and the end face that is positioned in the liquid crystal glass base W1 on the fork 12 at the fork long side direction, is fixed in a plurality of positions between a pair of fixed part 15, than the position of the fixed part 15 on the fork 12 by liquid crystal glass base W1 side.
In addition, in Fig. 2 and example shown in Figure 3, be equivalent to the 1st bearing surface of claims record with the face that is positioned at liquid crystal glass base W1 opposition side by the flat part 131 face butt, a pair of guide member 13 of liquid crystal glass base W1 side of a pair of fixed part 15 that is configured in above-mentioned predetermined long side direction position.And, make guide member 13 and pitch 12 2 fastening screws 14 thereby run through in each slotted hole 131b of the flat part 131 that is inserted into guide member 13 and be fastened in each screwed hole 12b, 12c on the fork 12, the 2nd secure component that is equivalent to claims record, the screwed hole 12b, the 12c that are used for fastening these 2 screws 14 are equivalent to the 2nd fastener hole of claims record.
By producing adjustment by above changing, liquid crystal glass base W1 as object conveyor, two ends with the fork long side direction of the end face of the guide portion 132 of its end face and a pair of guide member 13 separate respectively the opposed mode of predetermined gap, are positioned on the fork 12 when being supported by the liner 131a on the flat part 131 of the pin 12g on the fork 12 and guide member 13.
Below, use Fig. 4 and Fig. 5, to describing as the situation of object conveyor with the second largest liquid crystal glass base W2 of the size among above-mentioned 3 kinds of liquid crystal glass base W1～W3.
As shown in Figure 4 and Figure 5, in the situation of liquid crystal glass base W2 as object conveyor, dispose respectively a pair of fixed part 15 on 12 being located at respectively pitching on left hand 9L and the right hand 9R; Prepare according to the size of liquid crystal glass base W1～W3, fork long side direction size differs from one another 2 kinds, a pair of intermediate member 17A(is with reference to Fig. 4 and Fig. 5) and a pair of intermediate member 17B(with reference to Fig. 6 described later and Fig. 7) in, pitch the little a pair of intermediate member 17A of long side direction size; And a pair of guide member 13.In addition, in Fig. 4 and example shown in Figure 5, intermediate member 17A is equivalent to the 1st intermediate member of claims record.As mentioned above, a pair of fixed part 15 is separately fixed at above-mentioned predetermined long side direction position.
A pair of intermediate member 17A has 1 slotted hole 17Aa(the 3rd and runs through patchhole in this example), this slotted hole 17Aa forms the slotted hole shape along the fork long side direction, for making screw 14 run through insertion and screw 14 being fastened in the either party of the screwed hole 12b～12d on the fork 12.Slotted hole 17Aa is configured to, and is long and shorter than the head of screw 14 at the axial region of the Length Ratio screw 14 of fork 12 short side direction, and the length than above-mentioned short side direction is long at least to be configured to length at the fork long side direction.
In with the situation of liquid crystal glass base W2 as object conveyor, at first, a pair of intermediate member 17A is configured in respectively between a pair of fixed part 15 that is fixed in above-mentioned predetermined long side direction position.In detail, a pair of intermediate member 17A is configured to respectively, the face that is positioned at liquid crystal glass base W2 opposition side with from close to the face by liquid crystal glass base W2 side of fixed part 15 touch and butt.And then, be inserted in the slotted hole 17Aa and be fastened in the screwed hole 12b by under this state, screw 14 being run through, thereby a pair of intermediate member 17A is separately fixed on the fork 12.Afterwards, a pair of guide member 13 is configured in respectively between a pair of intermediate member 17A that is fixed on the fork 12.In detail, a pair of guide member 13 is configured to respectively, the face that is positioned at liquid crystal glass base W2 opposition side that makes flat part 131 with from close to the face by liquid crystal glass base W2 side of intermediate member 17A touch and butt.And then, be inserted in each slotted hole 131b and be fastened in screwed hole 12c, the 12d by under this state, 2 screws 14 being run through, thereby a pair of guide member 13 is separately fixed on the fork 12.By more than, intermediate member 17A is fixed between the fixed part 15 and the guide member 13 close to this fixed part 15 of fork on 12, guide member 13 separates the opposed mode of predetermined gap with the end face of guide portion 132 and the end face that is positioned in the liquid crystal glass base W2 on the fork 12 at the fork long side direction, is fixed in a plurality of positions between a pair of fixed part 15, than the position of the fixed part 15 on the fork 12 by liquid crystal glass base W2 side.
In addition, in Fig. 4 and example shown in Figure 5, be equivalent to the 2nd bearing surface of claims record with the face that the is positioned at liquid crystal glass base W2 opposition side face butt, a pair of intermediate member 17A by liquid crystal glass base W2 side of a pair of fixed part 15 that is configured in above-mentioned predetermined long side direction position.And, be equivalent to the 3rd bearing surface of claims record with the face that is positioned at liquid crystal glass base W2 opposition side by a pair of guide member 13 of the face butt of liquid crystal glass base W2 side of a pair of intermediate member 17A, described a pair of intermediate member 17A is fixed in the mode by the face butt of liquid crystal glass base W2 side of the face that is positioned at liquid crystal glass base W2 opposition side and a pair of fixed part 15 and pitches on 12.And, make guide member 13 and pitch 12 2 fastening screws 14 thereby run through in each slotted hole 131b of the flat part 131 that is inserted into guide member 13 and be fastened in screwed hole 12c, the 12d on the fork 12, the 2nd secure component that is equivalent to claims record, the screwed hole 12c, the 12d that are used for fastening these 2 screws 14 are equivalent to the 2nd fastener hole of claims record.And, make intermediate member 17A and pitch 12 fastening screws 14 thereby run through in the slotted hole 17Aa that is inserted into intermediate member 17A and be fastened in the screwed hole 12b that pitches on 12, the 3rd secure component that is equivalent to claims record, the screwed hole 12b that is used for fastening this screw 14 is equivalent to the 3rd fastener hole of claims record.
By producing adjustment by above changing, liquid crystal glass base W2 as object conveyor, two ends with the fork long side direction of the end face of the guide portion 132 of its end face and a pair of guide member 13 separate respectively the opposed mode of predetermined gap, are positioned on the fork 12 when being supported by the liner 131a on the flat part 131 of the pin 12g on the fork 12 and guide member 13.
Below, use Fig. 6 and Fig. 7, to describing as the situation of object conveyor with the liquid crystal glass base W3 of the size minimum among above-mentioned 3 kinds of liquid crystal glass base W1～W3.
As shown in Figure 6 and Figure 7, in the situation of liquid crystal glass base W3 as object conveyor, dispose respectively a pair of fixed part 15 on 12 being located at respectively pitching on left hand 9L and the right hand 9R; Among above-mentioned 2 kinds, a pair of intermediate member 17A and a pair of intermediate member 17B, the large a pair of intermediate member 17B of fork long side direction size; And a pair of guide member 13.In addition, in Fig. 6 and example shown in Figure 7, intermediate member 17B is equivalent to the 1st intermediate member of claims record.As mentioned above, a pair of fixed part 15 is separately fixed at above-mentioned predetermined long side direction position.
A pair of intermediate member 17B has 1 slotted hole 17Ba(the 3rd and runs through patchhole in this example), this slotted hole 17Ba forms the slotted hole shape along the fork long side direction, for making 2 screws 14 run through insertion and screw 14 being fastened in screwed hole 12c, the 12d that pitches on 12.Slotted hole 17Ba is configured to long at the axial region of the Length Ratio screw 14 of fork 12 short side direction and shorter than the head of screw 14, and the length than above-mentioned short side direction is long at least to be configured to length at the fork long side direction.
In with the situation of liquid crystal glass base W3 as object conveyor, at first, a pair of intermediate member 17B is configured in respectively between a pair of fixed part 15 that is fixed in above-mentioned predetermined long side direction position.In detail, a pair of intermediate member 17B is configured to respectively, the face that is positioned at liquid crystal glass base W3 opposition side with from close to the face by liquid crystal glass base W3 side of fixed part 15 touch and butt.And then, be inserted in the slotted hole 17Ba and be fastened in screwed hole 12c, the 12d by under this state, 2 screws 14 being run through, thereby a pair of intermediate member 17B is separately fixed on the fork 12.Afterwards, a pair of guide member 13 is configured in respectively between a pair of intermediate member 17B that is fixed on the fork 12.In detail, a pair of guide member 13 is configured to respectively, the face that is positioned at liquid crystal glass base W3 opposition side that makes flat part 131 with from close to the face by liquid crystal glass base W3 side of intermediate member 17B touch and butt.Then, be inserted in each slotted hole 131b and be fastened in screwed hole 12e, the 12f by under this state, 2 screws 14 being run through, thereby a pair of guide member 13 is separately fixed on the fork 12.By more than, intermediate member 17B is fixed between the fixed part 15 and the guide member 13 close to this fixed part 15 of fork on 12, guide member 13 separates the opposed mode of predetermined gap with the end face of guide portion 132 and the end face that is positioned in the liquid crystal glass base W3 on the fork 12 at the fork long side direction, is fixed in a plurality of positions between a pair of fixed part 15, than the position of the fixed part 15 on the fork 12 by liquid crystal glass base W3 side.
In addition, in Fig. 6 and example shown in Figure 7, be equivalent to the 2nd bearing surface of claims record with the face that the is positioned at liquid crystal glass base W3 opposition side face butt, a pair of intermediate member 17B by liquid crystal glass base W3 side of a pair of fixed part 15 that is configured in above-mentioned predetermined long side direction position.And, with a pair of intermediate member 17B be equivalent to the 3rd bearing surface of claims record by the face that the is positioned at liquid crystal glass base W3 opposition side face butt, a pair of guide member 13 of liquid crystal glass base W3 side, described a pair of intermediate member 17B is fixed in the mode by the face butt of liquid crystal glass base W3 side of the face that is positioned at liquid crystal glass base W3 opposition side and a pair of fixed part 15 and pitches on 12.And, make guide member 13 and pitch 12 2 fastening screws 14 thereby run through in each slotted hole 131b of the flat part 131 that is inserted into guide member 13 and be fastened in screwed hole 12e, the 12f on the fork 12, the 2nd secure component that is equivalent to claims record, the screwed hole 12e, the 12f that are used for fastening these 2 screws 14 are equivalent to the 2nd fastener hole of claims record.And, make intermediate member 17B and pitch 12 2 fastening screws 14 thereby run through in the slotted hole 17Ba that is inserted into intermediate member 17B and be fastened in screwed hole 12c, the 12d that pitches on 12, the 3rd secure component that is equivalent to claims record, the screwed hole 12c, the 12d that are used for fastening these 2 screws 14 are equivalent to the 3rd fastener hole of claims record.
By producing adjustment by above changing, liquid crystal glass base W3 as object conveyor, two ends with the fork long side direction of the end face of the guide portion 132 of its end face and a pair of guide member 13 separate respectively the opposed mode of predetermined gap, are positioned on the fork 12 when being supported by the liner 131a on the flat part 131 of the pin 12g on the fork 12 and guide member 13.
As described above, the robot 1 of present embodiment has left hand 9L and right hand 9R at left arm 6L and right arm 6, carries liquid crystal glass base W with this left hand 9L and right hand 9R.
Here, generally, as the mode of carrying liquid crystal glass base W, suction type and non-suction type are arranged, suction type is to carry when using the suitable adsorption element that is located on hand that liquid crystal glass base W is carried out vacuum suction, and non-suction type is to carry when being positioned in liquid crystal glass base W on the fork of being located at hand.In the situation of suction type, carry out the movement of hand when by the use adsorption element liquid crystal glass base W being carried out vacuum suction, can in the position skew that prevents liquid crystal glass base W, carry liquid crystal glass base W, however very possible owing to adsorb and make liquid crystal glass base W warpage or produce spot in the coating of the adsorption plane that is formed at liquid crystal glass base W.In the situation of non-suction type, make fork move to the downside of liquid crystal glass base W, fork is risen and liquid crystal glass base W is positioned on the fork, by under this state, carrying out the movement of hand, carry liquid crystal glass base W.In the situation of this non-suction type, general, in order to prevent from being positioned in the position skew of the liquid crystal glass base W on the fork, on fork, dispose a pair of guide member to separate the opposed mode of predetermined gap with liquid crystal glass base W at long side direction.By using the hand that disposes a pair of guide member at fork, can in the position skew that prevents from being positioned in the liquid crystal glass base W on the fork, carry liquid crystal glass base W.
And here, consideration will have at the end of arm the situation of the environment of the liquid crystal glass base W that differs from one another for delivery of size in robot that above-mentioned fork disposes the hand that a pair of guide member forms.In this case, each change is during as the size of the liquid crystal glass base W of object conveyor, all need to be to separate the changing to produce and adjust of fixed position that the opposed mode of predetermined gap changes guide member with liquid crystal glass base W.Generally, when teaching, each size according to liquid crystal glass base W, set the fixed position of guide member and record mark, in change during as the size of the liquid crystal glass base W of object conveyor, by guide member being disposed in the mode consistent with the mark that is recorded when the above-mentioned teaching and fixing, change to produce and adjust.Therefore, change to produce to adjust and take time and energy, workability be cannot say for sure well.
Therefore, in the present embodiment, left hand 9L and right hand 9R have: 3 forks 12 that can load liquid crystal glass base W; The a pair of fixed part 15 of the fork long side direction configuration separated from one another on fork 12; And a pair of guide member 13.A pair of guide member 13 is configured in respectively between a pair of fixed part 15, and restriction is positioned in the liquid crystal glass base W of fork on 12 in the movement of fork long side direction.And then a pair of guide member 13 constitutes respectively, and the fork long side direction position on fork 12 optionally is set as a plurality of positions between a pair of fixed part 15.Thus, even in the situation about in the environment of the liquid crystal glass base W that delivery size differs from one another, using, also can set the fixed position of guide member 13 for benchmark to be configured in the fixed part 15 of fork on 12, thereby can change easily and produce adjustment.And, in advance according to each size of liquid crystal glass base W, preparation so that with the gap of liquid crystal glass base W be that the mode of predetermined space is when being disposed at guide member 13 in hand on the fork 12 and carrying liquid crystal glass base W, with compare according to the situation of changing hand as the size of the liquid crystal glass base W of object conveyor, cutting down cost significantly, and can improve workability.
And, in the present embodiment particularly, a pair of guide member 13 is configured to respectively, and the face that is positioned at liquid crystal glass base W1 opposition side of flat part 131 and the face by liquid crystal glass base W1 side that is fixed on a pair of fixed part 15 of pitching the predetermined long side direction position on 12 are touched and butt (with reference to Fig. 2 and Fig. 3).And a pair of guide member 13 is configured to respectively, the face by liquid crystal glass base W2, W3 side of the face that is positioned at liquid crystal glass base W2, W3 opposition side of flat part 131 and intermediate member 17A, 17B is touched and butt (with reference to Fig. 4～Fig. 7).By making guide member 13 and the fixed part 15 that is fixed on the fork 12 touch configuration, perhaps make guide member 13 be fixed on the fork 12 and touch configuration with the intermediate member 17A, the 17B that are fixed on fixed part 15 on the fork 12 and touch configuration, can be with guide member 13 to separate the opposed mode of predetermined gap easily and reliably configuration with the liquid crystal glass base W that is positioned on the fork 12 at the fork long side direction.
And in the present embodiment particularly, fixed part 15, guide member 13 and intermediate member 17A, 17B have slotted hole 15a, slotted hole 131b and slotted hole 17Aa, the 17Ba that forms the slotted hole shape along the fork long side direction.Thus, can improve assembleability when being fixed on fixed part 15 and guide member 13 and intermediate member 17A, 17B on the fork 12.
In addition, embodiment is not limited to foregoing, can carry out various distortion in the scope that does not break away from its purport and technological thought.Below, such variation is described.
(1) short side direction at fork also disposes the situation of guide member
In Fig. 8～Figure 13, the left hand 9L of this variation and right hand 9R have 5 forks 112A, 112B, 112C, 112D, the 112E that can load described liquid crystal glass base W.In addition, fork 112 quantity is defined as 5 unlike this example, also can be 1, more than 2 or 4.Fork suitably is generically and collectively referred to as it " fork 112 " below 112A～112E() also can load the either party among described 3 kinds of liquid crystal glass base W1～W3.
And, in this variation, in order to prevent from being positioned in liquid crystal glass base W on the fork 112 short side direction (following suitably be called " fork the short side direction ") skew of fork 112 (restriction is positioned in liquid crystal glass base W on the fork 112 in the movement of fork short side direction), pitch on the 112E with the 5th on the 1st the fork 112A in above-mentioned 5 fork 112A～112E, separating respectively the opposed mode of predetermined gap (for example, the gap of 0.5mm) with two ends with the fork short side direction that is positioned in the liquid crystal glass base W of fork on 112 is fixed with and prepares according to the size of liquid crystal glass base W1～W3,3 kinds of differing from one another of fork short side direction size, a pair of guide member 113A(is with reference to Fig. 8 and Fig. 9), a pair of guide member 113B(is with reference to Figure 10 and Figure 11) and a pair of guide member 113C(with reference to Figure 12 and Figure 13) the either party.Therefore, each change is during as the size of the liquid crystal glass base W of object conveyor, to separate the changing to produce and adjust of kind that the opposed mode of predetermined gap changes guide member 113 with liquid crystal glass base W at the fork short side direction.
The 1st fork 112A and the 5th fork 112E are the structures that is mutually symmetrical, and have respectively at 3 positions along fork short side direction a plurality of screwed hole 112a, 112b, 112c that arrange at upper surface, that be used for trip bolt 114 with suitable gap along the fork long side direction.And, at fork long side direction corresponding above-mentioned 3 positions of fork on 112A, the 112E, between 2 forks 112A, the 112E to dispose a pair of fixed part 115(the 2nd fixed part in fork short side direction mode separated from one another) in a side or the opposing party.That is to say that above-mentioned 3 positions on fork 112A dispose respectively the side in a pair of fixed part 115, above-mentioned 3 positions on fork 112E dispose respectively the opposing party in a pair of fixed part 115.In detail, a pair of fixed part 115 be configured in respectively fork on 112A, the 112E, according to the precalculated position along the fork short side direction (following suitably be called " the short side direction position of being scheduled to ") of setting such as device benchmark of robot 1.
A pair of fixed part 115 has 2 slotted hole 115a in this example, this slotted hole 115a forms the slotted hole shape along the fork short side direction, be used for that screw 114 is run through and insert and screw 114 is fastened in the screwed hole 112a on the upper or fork 112E of fork 112A, be inserted in each slotted hole 115a and be fastened in each screwed hole 112a by 2 screws 114 are run through, thereby this a pair of fixed part 115 is separately fixed at above-mentioned predetermined short side direction position.Each slotted hole 115a is configured to respectively long at the axial region of the Length Ratio screw 114 of fork long side direction and shorter than the head of screw 114, and the length than above-mentioned long side direction is long at least to be configured to length at the fork short side direction.And a pair of fixed part 115 even also do not change the fixed position changing when produce adjusting, that is, all is fixed on same position under object conveyor is the situation of the either party among liquid crystal glass base W1～W3.
And, above-mentioned 5 forks among 112A～112E the 2nd fork 112B and the 4th fork 112D be with above-mentioned embodiment in the roughly the same structure of fork 12, each change is during as the size of the liquid crystal glass base W of object conveyor, all to separate the changing and produce and adjust of fixed position that the opposed mode of predetermined gap changes described guide member 13 (with reference to described Fig. 2～Fig. 7) with liquid crystal glass base W at the fork long side direction.
And 3rd the fork 112Cs of above-mentioned 5 forks among 112A～112E have along the fork long side direction and erect a plurality of pin 112Ca setting, that support liquid crystal glass base W at upper surface.
Below, exchange is produced to adjust and is described.
At first, use Fig. 8 and Fig. 9, to describing as the situation of object conveyor with the liquid crystal glass base W1 of the size maximum among above-mentioned 3 kinds of liquid crystal glass base W1～W3.
Such as Fig. 8 and shown in Figure 9, in with the situation of liquid crystal glass base W1 as object conveyor, dispose respectively a side or the opposing party among a pair of guide member 113A of a side in a pair of fixed part 115 or the fork short side direction size minimum among the opposing party and above-mentioned 3 kinds a pair of guide member 113A, a pair of guide member 113B and a pair of guide member 113C on being located at left hand 9L and right hand 9R the 1st fork 112A and on the 5th fork 112E.In addition, in Fig. 8 and example shown in Figure 9, guide member 113A is equivalent to the 2nd guide member of claims record.As mentioned above, a pair of fixed part 115 is separately fixed at above-mentioned predetermined short side direction position.
A pair of guide member 113A is made of flat part 231A and guide portion 232, flat part 231A erects in the upper end of liquid crystal glass base W side and is provided with liner 231a, this liner be used for to support the liquid crystal glass base W that is positioned on the fork 112, guide portion 232 use screws 116 be fixed on the flat part 231A than the position of liner 231a by fixed part 115 sides.Flat part 231A has 2 slotted hole 231Aa in this example, this slotted hole 231Aa forms the slotted hole shape along the fork short side direction, is used for that screw 114 is run through and inserts and screw 114 is fastened in screwed hole 112b, the 112c on the upper or fork 112E of fork 112A.Each slotted hole 231Aa is configured to respectively long at the axial region of the Length Ratio screw 114 of fork long side direction and shorter than the head of screw 114, and the length than above-mentioned long side direction is long at least to be configured to length at the fork short side direction.
In with the situation of liquid crystal glass base W1 as object conveyor, at first, a pair of guide member 113A is configured in respectively between a pair of fixed part 115 that is fixed in above-mentioned predetermined short side direction position.In detail, a pair of guide member 113A is configured to respectively, the face that is positioned at liquid crystal glass base W1 opposition side that makes flat part 231A with from close to the face by liquid crystal glass base W1 side of fixed part 115 touch and butt.And then, be inserted in each slotted hole 231Aa and be fastened in screwed hole 112b, the 112c by under this state, 2 screws 114 being run through, thereby a pair of guide member 113A is separately fixed on fork 112A, the 112E.By more than, guide member 113A separates predetermined gap opposed mode with the end face that is positioned in the liquid crystal glass base W1 on the fork 112 at the fork short side direction with the end face of guide portion 232, is fixed on the position that the ratio fixed part 115 of pitching on 112A, the 112E leans on liquid crystal glass base W1 side.
In addition, in Fig. 8 and example shown in Figure 9, with the face that the is positioned at liquid crystal glass base W1 opposition side face butt, a pair of guide member 113A by liquid crystal glass base W1 side of a pair of fixed part 115 that is configured in above-mentioned predetermined short side direction position, be equivalent to the 4th bearing surface of claims record.
By changing when produce adjusting by above, also change fork 112B, adjustment (with reference to Fig. 2 and Fig. 3) is produced in changing of the fixed position of the guide member 13 on the 112D, thereby the liquid crystal glass base W1 as object conveyor, it is opposed to separate respectively predetermined gap with the two ends of the fork short side direction of the end face of the guide portion 232 of the end face of its fork short side direction side and a pair of guide member 113A, and the end face of its fork long side direction side separates respectively the opposed mode of predetermined gap with the two ends of the fork long side direction of the end face of the guide portion 132 of a pair of guide member 13, by pitching 112A, liner 231a on the flat part 231A of guide member 113A on the 112E, fork 112B, liner 131a on pin 12g on the 112D and the flat part 131 of guide member 13, and the pin 112Ca of fork on the 112C is positioned on the fork 112 when supporting.
Below, use Figure 10 and Figure 11, to describing as the situation of object conveyor with the second largest liquid crystal glass base W2 of the size among above-mentioned 3 kinds of liquid crystal glass base W1～W3.
As shown in Figure 10 and Figure 11, in with the situation of liquid crystal glass base W2 as object conveyor, dispose respectively a side or the opposing party among the little a pair of guide member 113B of a side in a pair of fixed part 115 or the fork short side direction size among the opposing party and above-mentioned 3 kinds a pair of guide member 113A, a pair of guide member 113B and a pair of guide member 113C second on being located at left hand 9L and right hand 9R the 1st fork 112A and on the 5th fork 112E.In addition, in Figure 10 and example shown in Figure 11, guide member 113B is equivalent to the 2nd guide member of claims record.As mentioned above, a pair of fixed part 115 is separately fixed at above-mentioned predetermined short side direction position.
A pair of guide member 113B is made of flat part 231B and guide portion 232, flat part 231B erects in the upper end of liquid crystal glass base W side and is provided with liner 231a, this liner be used for to support the liquid crystal glass base W that is positioned on the fork 112, guide portion 232 use screws 116 be fixed on the flat part 231B than the position of liner 231a by fixed part 115 sides.Flat part 231B has 2 slotted hole 231Ba in this example, this slotted hole 231Ba forms the slotted hole shape along the fork short side direction, is used for that screw 114 is run through and inserts and screw 114 is fastened in screwed hole 112b, the 112c on the upper or fork 112E of fork 112A.Each slotted hole 231Ba is configured to respectively long at the axial region of the Length Ratio screw 114 of fork long side direction and shorter than the head of screw 114, and the length than above-mentioned long side direction is long at least to be configured to length at the fork short side direction.
In with the situation of liquid crystal glass base W2 as object conveyor, at first, a pair of guide member 113B is configured in respectively between a pair of fixed part 115 that is fixed in above-mentioned predetermined short side direction position.In detail, a pair of guide member 113B is configured to respectively, the face that is positioned at liquid crystal glass base W2 opposition side that makes flat part 231B with from close to the face by liquid crystal glass base W2 side of fixed part 115 touch and butt.And then, be inserted in each slotted hole 231Ba and be fastened in screwed hole 112b, the 112c by under this state, 2 screws 114 being run through, thereby a pair of guide member 113B is separately fixed on fork 112A, the 112E.By more than, guide member 113B separates predetermined gap opposed mode with the end face that is positioned in the liquid crystal glass base W2 on the fork 112 at the fork short side direction with the end face of guide portion 232, is fixed on the position that the ratio fixed part 115 of pitching on 112A, the 112E leans on liquid crystal glass base W2 side.
In addition, in Figure 10 and example shown in Figure 11, with the face that the is positioned at liquid crystal glass base W2 opposition side face butt, a pair of guide member 113B by liquid crystal glass base W2 side of a pair of fixed part 115 that is configured in above-mentioned predetermined short side direction position, be equivalent to the 4th bearing surface of claims record.
By changing when produce adjusting by above, also change fork 112B, adjustment (with reference to Fig. 4 and Fig. 5) is produced in changing of the fixed position of the guide member 13 on the 112D, thereby the liquid crystal glass base W2 as object conveyor, it is opposed to separate respectively predetermined gap with the two ends of the fork short side direction of the end face of the guide portion 232 of the end face of its fork short side direction side and a pair of guide member 113B, and the end face of its fork long side direction side separates respectively the opposed mode of predetermined gap with the two ends of the fork long side direction of the end face of the guide portion 132 of a pair of guide member 13, by pitching 112A, liner 231a on the flat part 231B of guide member 113B on the 112E, fork 112B, liner 131a on pin 12g on the 112D and the flat part 131 of guide member 13, and the pin 112Ca of fork on the 112C is positioned on the fork 112 when supporting.
Below, use Figure 12 and Figure 13, to describing as the situation of object conveyor with the liquid crystal glass base W3 of the size minimum among above-mentioned 3 kinds of liquid crystal glass base W1～W3.
Such as Figure 12 and shown in Figure 13, in with the situation of liquid crystal glass base W3 as object conveyor, dispose respectively a side or the opposing party among a pair of guide member 113C of a side in a pair of fixed part 115 or the fork short side direction size maximum among the opposing party and above-mentioned 3 kinds a pair of guide member 113A, a pair of guide member 113B and a pair of guide member 113C on being located at left hand 9L and right hand 9R the 1st fork 112A and on the 5th fork 112E.In addition, in Figure 12 and example shown in Figure 13, guide member 113C is equivalent to the 2nd guide member of claims record.As mentioned above, a pair of fixed part 115 is separately fixed at above-mentioned predetermined short side direction position.
A pair of guide member 113C is made of flat part 231C and guide portion 232, and guide portion 232 use screws 116 are fixed on fixed part 115 sides on the flat part 231C.Flat part 231C has 2 slotted hole 231Ca in this example, this slotted hole 231Ca forms the slotted hole shape along the fork short side direction, is used for that screw 114 is run through and inserts and screw 114 is fastened in screwed hole 112b, the 112c on the upper or fork 112E of fork 112A.Each slotted hole 231Ca is configured to respectively long at the axial region of the Length Ratio screw 114 of fork long side direction and shorter than the head of screw 114, and the length than above-mentioned long side direction is long at least to be configured to length at the fork short side direction.
In with the situation of liquid crystal glass base W3 as object conveyor, at first, a pair of guide member 113C is configured in respectively between a pair of fixed part 115 that is fixed in above-mentioned predetermined short side direction position.In detail, a pair of guide member 113C is configured to respectively, the face that is positioned at liquid crystal glass base W3 opposition side that makes flat part 231C with from close to the face by liquid crystal glass base W3 side of fixed part 115 touch and butt.And then, be inserted in each slotted hole 231Ca and be fastened in screwed hole 112b, the 112c by under this state, 2 screws 114 being run through, thereby a pair of guide member 113C is separately fixed on fork 112A, the 112E.By more than, guide member 113C separates predetermined gap opposed mode with the end face that is positioned in the liquid crystal glass base W3 on the fork 112 at the fork short side direction with the end face of guide portion 232, is fixed on the position that the ratio fixed part 115 of pitching on 112A, the 112E leans on liquid crystal glass base W3 side.
In addition, in Figure 12 and example shown in Figure 13, with the face that the is positioned at liquid crystal glass base W3 opposition side face butt, a pair of guide member 113C by liquid crystal glass base W3 side of a pair of fixed part 115 that is configured in above-mentioned predetermined short side direction position, be equivalent to the 4th bearing surface of claims record.
By changing when produce adjusting by above, also change fork 112B, adjustment (with reference to Fig. 6 and Fig. 7) is produced in changing of the fixed position of the guide member 13 on the 112D, thereby the liquid crystal glass base W3 as object conveyor, it is opposed to separate respectively predetermined gap with the two ends of the fork short side direction of the end face of the guide portion 232 of the end face of its fork short side direction side and a pair of guide member 113C, and the end face of its fork long side direction side separates respectively the opposed mode of predetermined gap with the two ends of the fork long side direction of the end face of the guide portion 132 of a pair of guide member 13, by pitching 112B, liner 131a on pin 12g on the 112D and the flat part 131 of guide member 13, and the pin 112Ca of fork on the 112C is positioned on the fork 112 when supporting.
In this variation, have a pair of fixed part 115 and a pair of guide member 113A, 113B, 113C, described a pair of fixed part 115 is configured between fork 112A, the 112E at the fork short side direction separated from one anotherly, described a pair of guide member 113A, 113B, 113C are configured in respectively between a pair of fixed part 115, and restriction is positioned in the liquid crystal glass base W of fork on 112A, the 112E in the movement of fork short side direction.And then, a pair of guide member 113A, 113B, 113C are configured to respectively, and the face that is positioned at liquid crystal glass base W1, W2, W3 opposition side of flat part 231A, 231B, 231C and the face by liquid crystal glass base W1, W2, W3 side that is fixed on a pair of fixed part 115 of pitching the predetermined short side direction position on 112A, the 112E are touched and butt.Thus, can be with guide member 113 to separate the opposed mode of predetermined gap easily and reliably configuration with the liquid crystal glass base W that is positioned on the fork 112 at the fork short side direction.
(2) other
More than, constitute respectively for a pair of guide member 13 and to make fork long side direction position alternative be set as a plurality of positions, yet be not limited to this, also can constitute the side in a pair of guide member 13 only, fork long side direction position optionally can be set as a plurality of positions.
And more than, example illustrates the situation of having prepared 3 kinds of liquid crystal glass base W that size differs from one another as the object conveyor of robot 1, yet be not limited to this, the situation that also can be applied to prepare the situation of 2 kinds of liquid crystal glass base W that size differs from one another and prepare the liquid crystal glass base W more than 4 kinds that size differs from one another.
And more than, object being set as liquid crystal glass base W, yet being not limited to this, object can be other (such as semiconductor substrate etc.).
And, except the above, the method appropriate combination of above-mentioned embodiment and each variation can also be utilized.
In addition, though there is not one by one illustration, above-mentioned embodiment and each variation are to be applied in various changes to implement in the scope that does not break away from its purport.
Claims (7)
1. robot, described robot is located on the robots arm, and for delivery of object, described robot is characterised in that,
Described robot has:
At least one fork, described fork can load described object;
A pair of the 1st fixed part, described a pair of the 1st fixed part disposes at the long side direction of described fork separated from one anotherly; And
A pair of the 1st guide member, described a pair of the 1st guide member are configured in respectively between described a pair of the 1st fixed part, and restriction is positioned in described object on the described fork in the movement of described long side direction,
At least one party in described a pair of the 1st guide member constitutes, and optionally is set as a plurality of positions in the position of the long side direction of described fork.
2. robot according to claim 1 is characterized in that,
At least one party in described a pair of the 1st guide member has the 1st bearing surface, described the 1st bearing surface and described the 1st fixed part butt close to the 1st guide member.
3. robot according to claim 1 and 2 is characterized in that,
Described fork has:
The 1st fastener hole, it is used for fastening the 1st secure component, and described the 1st secure component carries out fastening to described the 1st fixed part and described fork; And
The 2nd fastener hole, it is used for fastening the 2nd secure component, and described the 2nd secure component carries out fastening to described the 1st guide member and described fork,
Described the 1st fixed part has the 1st and runs through patchhole, and the described the 1st runs through patchhole is used for making described the 1st secure component to run through insertion and described the 1st secure component is fastened in described the 1st fastener hole,
Described the 1st guide member has the 2nd and runs through patchhole, and the described the 2nd runs through patchhole is used for making described the 2nd secure component to run through insertion and described the 2nd secure component is fastened in described the 2nd fastener hole,
The described the 1st runs through patchhole and the described the 2nd runs through patchhole and forms the slotted hole shape along described long side direction.
4. robot according to claim 1 and 2 is characterized in that,
Described robot also has intermediate member, and described intermediate member is configured between described the 1st fixed part and described the 1st guide member close to the 1st fixed part, and described intermediate member has the 2nd bearing surface with described the 1st fixed part butt,
At least one party in described a pair of the 1st guide member has the 3rd bearing surface, described the 3rd bearing surface and the described intermediate member butt that is connected to described the 1st fixed part.
5. robot according to claim 4 is characterized in that,
Described fork has:
The 1st fastener hole, it is used for fastening the 1st secure component, and described the 1st secure component carries out fastening to described the 1st fixed part and described fork;
The 2nd fastener hole, it is used for fastening the 2nd secure component, and described the 2nd secure component carries out fastening to described the 1st guide member and described fork; And
The 3rd fastener hole, it is used for fastening the 3rd secure component, and described the 3rd secure component carries out fastening to described intermediate member and described fork,
Described the 1st fixed part has the 1st and runs through patchhole, and the described the 1st runs through patchhole is used for making described the 1st secure component to run through insertion and described the 1st secure component is fastened in described the 1st fastener hole,
Described the 1st guide member has the 2nd and runs through patchhole, and the described the 2nd runs through patchhole is used for making described the 2nd secure component to run through insertion and described the 2nd secure component is fastened in described the 2nd fastener hole,
Described intermediate member has the 3rd and runs through patchhole, and the described the 3rd runs through patchhole is used for making described the 3rd secure component to run through insertion and described the 3rd secure component is fastened in described the 3rd fastener hole,
The described the 1st runs through patchhole, the described the 2nd runs through patchhole and the described the 3rd and runs through patchhole and form the slotted hole shape along described long side direction.
6. robot according to claim 1 and 2 is characterized in that,
Described robot has:
A pair of the 2nd fixed part, described a pair of the 2nd fixed part disposes at the short side direction of described fork separated from one anotherly; And
A pair of the 2nd guide member, described a pair of the 2nd guide member are configured in respectively between described a pair of the 2nd fixed part, and restriction is positioned in described object on the described fork in the movement of described short side direction,
At least one party in described a pair of the 2nd guide member has the 4th bearing surface, described the 4th bearing surface and described the 2nd fixed part butt close to the 2nd guide member.
7. robot, described robot have the robots arm and are located at robot on this robots arm, and described robot is characterised in that,
Described robot has:
At least one fork, described fork can load object;
A pair of the 1st fixed part, described a pair of the 1st fixed part disposes at the long side direction of described fork separated from one anotherly; And
A pair of the 1st guide member, described a pair of the 1st guide member are configured in respectively between described a pair of the 1st fixed part, and restriction is positioned in described object on the described fork in the movement of described long side direction,
At least one party in described a pair of the 1st guide member constitutes, and optionally is set as a plurality of positions in the position of the long side direction of described fork.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011195859A JP5403378B2 (en) | 2011-09-08 | 2011-09-08 | Robot hand and robot |
| JP2011-195859 | 2011-09-08 |
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| CN102990643A true CN102990643A (en) | 2013-03-27 |
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| CN2012204539455U Expired - Fee Related CN202805187U (en) | 2011-09-08 | 2012-09-07 | Robot hand and robot |
| CN2012103313634A Pending CN102990643A (en) | 2011-09-08 | 2012-09-07 | Robot hand and robot |
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| CN2012204539455U Expired - Fee Related CN202805187U (en) | 2011-09-08 | 2012-09-07 | Robot hand and robot |
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| Country | Link |
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| JP (1) | JP5403378B2 (en) |
| KR (1) | KR101495958B1 (en) |
| CN (2) | CN202805187U (en) |
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| CN112476431A (en) * | 2020-11-02 | 2021-03-12 | 合肥欣奕华智能机器有限公司 | Substrate transfer robot control method, device, system, apparatus, and medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103434842B (en) * | 2013-09-04 | 2015-08-19 | 深圳市华星光电技术有限公司 | Mechanical arm fork and mechanical arm |
| CA2937211A1 (en) * | 2014-02-19 | 2015-08-27 | Comau S.P.A. | Roller hemming head having a replaceable roller-carrying unit |
| JP7425701B2 (en) * | 2020-09-16 | 2024-01-31 | 芝浦メカトロニクス株式会社 | Board transfer device |
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| CN2798472Y (en) * | 2005-06-02 | 2006-07-19 | 海信集团有限公司 | Workpiece assembling equipment for adjusting liquid crystal TV |
| CN1885101A (en) * | 2005-06-20 | 2006-12-27 | Lg.菲利浦Lcd株式会社 | Substrate conveyance device for fabrication of liquid crystal display device |
| CN101939834A (en) * | 2008-02-06 | 2011-01-05 | 爱发科股份有限公司 | Robot hand for substrate transportation |
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| JPH11254374A (en) * | 1998-03-10 | 1999-09-21 | Toray Ind Inc | Substrate carrying hand, substrate carrying method, and device and method for manufacturing color filter |
| JP2007142239A (en) * | 2005-11-21 | 2007-06-07 | Jel:Kk | Substrate-holding apparatus |
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- 2011-09-08 JP JP2011195859A patent/JP5403378B2/en active Active
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- 2012-09-07 CN CN2012204539455U patent/CN202805187U/en not_active Expired - Fee Related
- 2012-09-07 KR KR20120099360A patent/KR101495958B1/en not_active IP Right Cessation
- 2012-09-07 CN CN2012103313634A patent/CN102990643A/en active Pending
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| JPH0413283U (en) * | 1990-05-23 | 1992-02-03 | ||
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| JP2002289664A (en) * | 2001-03-26 | 2002-10-04 | Toray Ind Inc | Substrate carrying hand and substrate carrying method, color filter manufacturing apparatus using these and manufacturing method thereof |
| JP2003168717A (en) * | 2001-12-03 | 2003-06-13 | Yaskawa Electric Corp | Wafer transport fork |
| CN1726589A (en) * | 2002-12-17 | 2006-01-25 | 应用材料股份有限公司 | End effector assembly for supporting substrates |
| CN2798472Y (en) * | 2005-06-02 | 2006-07-19 | 海信集团有限公司 | Workpiece assembling equipment for adjusting liquid crystal TV |
| CN1885101A (en) * | 2005-06-20 | 2006-12-27 | Lg.菲利浦Lcd株式会社 | Substrate conveyance device for fabrication of liquid crystal display device |
| CN101939834A (en) * | 2008-02-06 | 2011-01-05 | 爱发科股份有限公司 | Robot hand for substrate transportation |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112476431A (en) * | 2020-11-02 | 2021-03-12 | 合肥欣奕华智能机器有限公司 | Substrate transfer robot control method, device, system, apparatus, and medium |
| CN112476431B (en) * | 2020-11-02 | 2022-03-04 | 合肥欣奕华智能机器有限公司 | Substrate transfer robot control method, device, system, apparatus, and medium |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130028015A (en) | 2013-03-18 |
| JP2013056390A (en) | 2013-03-28 |
| CN202805187U (en) | 2013-03-20 |
| JP5403378B2 (en) | 2014-01-29 |
| KR101495958B1 (en) | 2015-02-25 |
| TW201341134A (en) | 2013-10-16 |
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Application publication date: 20130327 |