201248711 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種同時對貼合有2片脆性材料基板之貼 合基板等之兩表面進行劃線之劃線裝置。 【先前技術】 液晶顯示裝置等液晶面板成為貼合有2片玻璃板之結 構。於自貼合有2片玻璃板之貼合基板切割出液晶面板之 情形時’必需於貼合基板之上表面及下表面形成劃線。因 此，作為用以同時對兩表面劃線之劃線裝置，已知專利文 獻1之劃線裝置。其係藉由使於前端具有劃線輪之一對劃 線頭沿與貼合基板之面平行之方向移動而對貼合基板之兩 表面進行劃線者。 [先前技術文獻] [專利文獻] [專利文獻1]國際公開WO 2009/1 57440號公報 【發明内容】 [發明所欲解決之問題] 於以先前之劃線裝置進行劃線時，首先，最初使於前端 具有劃線輪之一對劃線頭接近貼合基板之上下兩表面，且 於劃線開始位置待機。此時，於存在貼合基板之板厚資料 之輸入錯誤或操作錯誤之情形時，存在上下之劃線輪之刀 穴碰撞而使刃尖文到損傷之缺陷。於劃線輪上產生有損傷 之情形時，存在之後無法正常地進行劃線而導致於切割出 之液晶面板等產生不合格品之問題。 162748.doc 201248711 本發明係著眼於該先前之問題而完成者，其目的在於， 於同時對貼合基板之兩表面進行劃線之劃線裝置中，即便 存在基板之板厚資料之輸入錯誤或操作錯誤等，亦可不使 劃線輪相互接觸，從而可提前防止切斷後之貼合基板中之 不合格品之產生》 [解決問題之技術手段] 為解決該課題’本發明之劃線裝置包括：第1劃線頭， 其自上方對脆性材料之貼合基板之第1面劃線；及第2劃線 頭’其自下方對上述貼合基板之第2面劃線；且藉由使上 述第1、第2劃線頭及上述貼合基板之至少一者與上述貼合 基板之面平行地相對移動，而同時自上述貼合基板之兩表 面進行劃線，且上述第丨劃線頭包括：第丨劃線輪，其朝上 述貼合基板之第1面配置且旋轉自如；及第丨凸部，其隔著 上述第1劃線輪且於劃線時之相對平行移動方向之前後配 置成一對；並且上述第丨凸部之前端於與上述貼合基板之 面垂直之方向上，位於較上述第丨劃線輪之前端更靠上方 僅第1距離處，上述第2劃線頭包括：第2劃線輪，其朝上 述貼合基板之第2面配置且旋轉自如；及第2凸部，其隔著 上述第2劃線輪且於劃線時之相對平行移動方向之前後配 置成-對；並且上述第2凸部之前端於與上述貼合基板之 面垂直之方向i ’位於較上述第2劃線輪之前端 僅第2距離處’且將上述第“巨離及第2距離均 為劃線對象之上述貼合基板之厚度之丨/2。 … 此處，上述第！釗線頭之第i凸部亦可設為具有與上述第 162748.doc 201248711 1劃線輪之旋轉軸平行之旋轉軸之輥。 此處’上述第2劃線頭之第2凸部亦可設為具有與上述第 2劃線輪之旋轉軸平行之旋轉軸之輥。 此處’上述第1、第—Γ , 罘凸°卩亦可包括具有較上述貼合基板 低之剛性且可彈性變形之構件。 [發明之效果] 根據具有所述特徵之本發明，於同時對貼合基板之兩表 面劃線之劃線裝置中，於劃線輪之劃線方向之前後設置凸 部，由於按照基板之厚度設定與貼合基板之面垂直之方向 上之自凸部至劃線輪為止之第1、第2距離，故而即便存在 基板之板厚資狀輸人錯誤_作錯誤，劃線輪亦不會相 互接觸。因此’可防止劃線輪之損傷，從而可提前防止於 切斷後之貼合基板中產生不合格品。 【實施方式】 圖1A、圖⑺係自側面觀察本實施形態之劃線裝置之概 略圖。如該等圆所示，左右_對支柱1〇a、1〇b安裝於基座 11及塊體i2a、！2b上。於該支柱間之上部平行地設置有可 動導引支柱13a、13b，於下方平行地設置有可動導引支柱 ‘1扑。可動導引支柱仏、_4卜叫自使橫滑 動構件15、i6分別沿X軸方向（左右方向）移動。於橫滑動構 件15、16上且於z抽方向（上下方向）上分別言史置有用以使割 線頭移動之縱滑動構件17、18。於縱滑動構件17之下端部 設置有劃線頭19。於縱滑動構件18之上端部設置有劃線頭 20。劃線頭19、20係於其前端保持劃線輪者。 162748.doc 201248711 此處’劃線頭19係第1劃線頭，劃線頭2〇係第2劃線頭。 又，縱滑動構件17、18構成使該等劃線頭向相互接近或離 開之方向移動之移動部，可動導引支柱13a、13b、i4a、 14b及橫滑動構件15、16構成使劃線頭19、“沿乂軸方向移 動之移動部。 圖2係詳細地表示該上下劃線頭丨9、2〇之圖，省略表示 周邊之構件。於本實施形態中，於上側之劃線頭丨9之下 端’劃線輪22係以其旋轉軸22a為中心旋轉自如地設置。 於劃線輪22之行進方向（X軸方向）之前後設置有一對親23、 24。輥23、24分別包括與劃線輪22之旋轉軸223平行之旋 轉軸23a、24a，且係旋轉自如地被保持之第1凸部。 下方之劃線頭20亦同樣地，於其上端部，劃線輪32以旋 轉轴32a為中心旋轉自如地設置。於劃線輪32之行進方向 (X軸方向）之前後設置有一對輥33、34。輥33、34分別包括 與劃線輪32之旋轉軸32a平行之旋轉軸33a、34a，且係旋 轉自如地被保持之第2凸部。 此處，劃線輪22之下端構成為較左右輥23 ' 24之下端略 罪下方。將劃線輪2 2之下端與左右親2 3、2 4之下端於z車由 方向上之間隔設為第1距離dl。 關於下方之劃線頭20，劃線輪32之上端構成為較設置為 左右一對之輥33、34之上端略靠上方。將劃線輪32之上端 與左右輥33、34之上端於z軸方向上之間隔設為第2距離 d2 ^第2距離d2亦可與dl不同’但此處，設為與上側之割 線頭19之第1距離dl相同（dl=d2=d)。 162748.doc 201248711 此處，若將應劃線之貼合基板之厚度設為τ，則距離廿設 定為滿足以下不等式 d<T/2 …⑴ 之值。該值d例如設為〇.5 mm。再者，於距離以、d2不同 之情形時，任一距離均設為未達厚度丁之1/2。 左右輥23、24、33、34可使用具有較成為劃線對象之脆 性材料基板低之剛性且可彈性變形之材料，例如聚縮醛、 氣乙烯、聚乙基酮等合成樹脂材料或硬質橡膠材料等。 接著，對使用具有該一對劃線頭之劃線裝置對貼合基板 劃線時之動作進行說明。首先，使劃線頭19、2〇沿χ轴方 向移動至上下輥23及33與貼合基板4〇對向之位置。其次， 如圖3所不，使縱滑動構件丨7朝下方向移動，使縱滑動構 件18朝上方向移動，從而使劃線頭19、2〇接近貼合基板 40。此時，以劃線輪22之下端位置成為較貼合基板之上 略靠下方且劃線輪32之上端位置較貼合基板之下 表面略罪上方之方式，設定劃線輪22之下端及劃線輪之 上端於z軸方向上之位置。於該狀態下如圖4A、圖術斤 不’使撗滑動構件15、16沿可動導引支柱m、nb、 14b於χ軸方向上移動。如此一來，劃線輪uu移 動至貼合基板40上，進而藉由使其沿χ軸方向移動，而同 夺子貼D基板40之上下兩表面劃線。而且，若至橫滑動構 件15、16到達貼合基板4()之右端為止而結束劃線，則結束 上下各1條劃線。 此處，由於貼合基板40之厚度τ、及劃線輪之前端與輥 162748.doc 201248711 之引端之距離d之間滿足上述不等式⑴，故而即便於因板 厚資料之輸入錯誤或操作錯誤而導致劃線頭^ 9及劃線頭 較特定位置而過於接近之情形時，如圖$所示輥U^先 32彼此之接 接觸貼合基板4〇’故而亦可防止劃線輪22、 觸。藉此，可防止劃線輪22、32之刃尖之損傷 士圖6所示，於對貼合基板40之劃線結束時，迅速 使劃線頭19上升’並且使劃線頭2〇下降而使其等相互離 開然而’此時若延遲其等離開之時機，則存在劃線輪 22 32彼此如以虛線所示般靠近之情況。於該情形時，由 U於後方之轉24、34先接觸貼合基板扣，故而亦可防 止劃線輪22、32彼此之接觸。 於〜反方向進行劃線之情形時，親23、33與槪Μ、Μ之 功月t·顛倒^來’於最初之設定時能夠以親Μ、Μ防止劃線 輪3 2之接觸’於劃線之結束時能夠以輥23、33防止劃 線輪22' 32之接觸。 再者纟實施形態中係於割線輪之左右設置一對親，但 亦可僅設置突起部而代替輥23、24、33、34，且使該突起 之則^與劃線輪之前端之位置關係滿足上述式⑴。即便 m形時’因於劃線輪接觸之前突起部與貼合基板接 觸，故而亦可防止劃線輪之接觸。 實施形態中係於劃線輪之左右設置一對輥，代替 此圖7表不劃線頭19之變形例之自下方觀察之圖。如該 邕形例般，亦可配置具有與劃線輪22之旋轉軸平行之旋轉 軸且左右各有—對之4個輥53a、53b及54a、54b。下方之 I62748.doc 201248711 劃線頭2 0亦相同。 又，亦可設置高度調整機構，以可根據成為劃線對象之 貼合基板之厚度Τ而使輥23、24於2軸方向上之位置、輥 33、34於ζ軸方向上之位置、及圖7之變形例之輥53a〜 之位置上下移動。如此，可防止劃線輪直接干擾各種厚度 之貼合基板。 再者，於本實施形態中，以貼合有2片脆性材料基板之 貼合脆性材料基板為對象進行了說明。其中包括例如使玻 璃基板相互貼合之電聚顯示面板、有機EL(Electr〇[Technical Field] The present invention relates to a scribing device for scribing both surfaces of a bonded substrate or the like to which two sheets of a brittle material substrate are bonded at the same time. [Prior Art] A liquid crystal panel such as a liquid crystal display device has a structure in which two glass plates are bonded together. When a liquid crystal panel is cut out from a bonded substrate in which two glass sheets are bonded to each other, it is necessary to form a scribe line on the upper surface and the lower surface of the bonded substrate. Therefore, as a scribing device for scribing both surfaces at the same time, a scribing device of Patent Document 1 is known. This is performed by scribing the two surfaces of the bonded substrate by moving one of the scribing wheels at the tip end in a direction parallel to the surface of the bonded substrate. [Prior Art Document] [Patent Document 1] [Patent Document 1] International Publication No. WO 2009/1 57440 SUMMARY OF INVENTION [Problems to be Solved by the Invention] When scribing with a conventional scribing device, first, initially The front end has one of the scribing wheels, and the scribing head is close to the upper and lower surfaces of the bonding substrate, and stands by at the starting position of the scribing. At this time, in the case where there is an input error or an operation error in the sheet thickness data of the bonded substrate, there is a defect that the blade of the upper and lower scribing wheels collides and the blade edge is damaged. When there is a damage in the scribing wheel, there is a problem that the scribing cannot be performed normally after the scribing, and the defective liquid crystal panel or the like is generated. 162748.doc 201248711 The present invention has been made in view of the above problems, and an object thereof is to provide an erroneous input of a plate thickness data of a substrate even if a scribe line device for staking both surfaces of a bonded substrate is simultaneously In the case of an operation error or the like, the scribing wheels may not be brought into contact with each other, and the occurrence of defective products in the bonded substrate after the cutting may be prevented in advance. [Technical means for solving the problem] To solve the problem, the scribing device of the present invention includes a first scribing head which is lined with a first surface of the bonding substrate of the brittle material from above; and a second scribing head which is scribed to the second surface of the bonding substrate from below; At least one of the first and second scribing heads and the bonded substrate are relatively moved in parallel with the surface of the bonded substrate, and are simultaneously scribed from both surfaces of the bonded substrate, and the first scribe line The head includes: a second scribing wheel disposed to be rotatable on a first surface of the bonded substrate; and a second convex portion interposed between the first scribing wheel and in a direction parallel to the parallel movement Configured in pairs before and after; and The front end of the second convex portion is located at a distance from the front surface of the bonded substrate, and is located at a first distance above the front end of the first scribing wheel, and the second scribing head includes: a second row a reel that is disposed to be rotatable on a second surface of the bonded substrate; and a second convex portion that is disposed in a pair before and after a direction parallel to the parallel movement of the second scribing wheel; And the front end of the second convex portion is located at a second distance from the front end of the second scribing wheel in the direction i′ perpendicular to the surface of the bonded substrate, and the first “large distance and the second distance are both厚度/2 of the thickness of the bonded substrate of the scribe target. Here, the ith convex portion of the 钊 钊 head may be set to have a rotation axis parallel to the 162748.doc 201248711 1 scribing wheel The roller of the rotating shaft. Here, the second convex portion of the second scribing head may be a roller having a rotation axis parallel to the rotation axis of the second scribing wheel. - Γ , 罘 卩 卩 can also include a member having a lower rigidity and elastic deformation than the above-mentioned bonded substrate. [Effect of the Invention] According to the present invention having the above feature, in the scribing device for scribing both surfaces of the bonded substrate, the convex portion is provided before the scribing direction of the scribing wheel, because the thickness of the substrate is The first and second distances from the convex portion to the scribing wheel in the direction perpendicular to the surface to which the substrate is bonded are set. Therefore, even if there is an error in the thickness of the substrate, the scribing wheel does not Therefore, it is possible to prevent damage to the scribing wheel, and it is possible to prevent defective products from being generated in the bonded substrate after cutting. [Embodiment] FIG. 1A and FIG. 7 show the scribing device of the present embodiment from the side. As shown in the circle, the left and right _ pair of pillars 1A and 1B are attached to the base 11 and the blocks i2a and !2b. The movable guide pillars are disposed in parallel with the upper portion of the pillars. 13a, 13b, and a movable guide strut '1 flap is provided in parallel below. The movable guide stays 仏 and _4 are caused to move the horizontal slide members 15 and i6 in the X-axis direction (left-right direction), respectively. Vertical sliding members 17, 18 for use in the z-drawing direction (up-and-down direction) are provided on the lateral sliding members 15, 16 to move the cutting head, respectively. A scribing head 19 is provided at a lower end portion of the vertical sliding member 17. A scribing head 20 is provided at an upper end portion of the vertical sliding member 18. The scribing heads 19, 20 are attached to the front end of the scribing wheel. 162748.doc 201248711 Here, the scribing head 19 is the first scribing head, and the scribing head 2 is the second scribing head. Further, the vertical sliding members 17 and 18 constitute a moving portion for moving the scribing heads toward or away from each other, and the movable guiding stays 13a, 13b, i4a, 14b and the lateral sliding members 15 and 16 constitute a scribing head. 19. "moving portion moving in the direction of the yaw axis. Fig. 2 is a view showing the upper and lower scribe lines 丨9, 2〇 in detail, and the members showing the periphery are omitted. In the present embodiment, the scribing head 丨9 on the upper side is omitted. The lower end' scribing wheel 22 is rotatably provided around the rotation axis 22a. A pair of pros 23 and 24 are provided before the traveling direction (X-axis direction) of the scribing wheel 22. The rollers 23 and 24 respectively include The rotating shafts 23a and 24a of the scribing wheel 22 are parallel to the rotating shafts 23a and 24a, and are rotatably held by the first convex portion. Similarly, the lower scribing head 20 is rotated at the upper end portion thereof by the scribing wheel 32. The shaft 32a is rotatably provided at the center. A pair of rollers 33, 34 are provided before the traveling direction (X-axis direction) of the scribing wheel 32. The rollers 33, 34 respectively include rotation parallel to the rotating shaft 32a of the scribing wheel 32. The shafts 33a and 34a are rotatably held by the second convex portion. Here, The lower end of the scribing wheel 22 is configured to be slightly lower than the lower end of the left and right rollers 23'24. The lower end of the scribing wheel 2 2 and the lower end of the left and right pro 2 3, 2 4 are set to the first interval in the direction of the z-vehicle. The distance from the upper end of the scribing wheel 32 is set to be slightly above the upper end of the pair of left and right rolls 33, 34. The upper end of the scribing wheel 32 and the left and right rolls 33, 34 are formed. The interval between the upper end and the z-axis direction is the second distance d2. The second distance d2 may be different from dl. However, the first distance d1 is the same as the first distance dl of the upper secant head 19 (dl=d2=d). 162748.doc 201248711 Here, when the thickness of the bonded substrate to be scribed is τ, the distance 廿 is set to a value satisfying the following inequality d < T/2 (1). The value d is set to, for example, 〇.5. In addition, when the distance is different from that of d2, any distance is set to 1/2 of the thickness. The left and right rolls 23, 24, 33, and 34 can use brittle materials having a more scribed object. A material that is low in rigidity and elastically deformable, such as a synthetic resin material such as polyacetal, vinylidene or polyethyl ketone, or a hard rubber material. The operation of scribing the bonded substrate using the scribing device having the pair of scribing heads will be described. First, the scribing heads 19 and 2 are moved in the z-axis direction to the upper and lower rollers 23 and 33 and attached. Next, as shown in Fig. 3, the vertical sliding member 丨 7 is moved downward, and the vertical sliding member 18 is moved upward, so that the scribing heads 19 and 2 are close to each other. The substrate 40. At this time, the scribing wheel 22 is set such that the lower end position of the scribing wheel 22 is slightly lower than the upper surface of the bonding substrate and the upper end position of the scribing wheel 32 is slightly above the lower surface of the substrate. The lower end and the upper end of the scribing wheel are located in the z-axis direction. In this state, as shown in Fig. 4A, the squeegee members 15 and 16 are moved in the z-axis direction along the movable guide struts m, nb, and 14b. In this manner, the scribing wheel uu is moved to the bonding substrate 40, and further, by moving it in the z-axis direction, the upper and lower surfaces of the D-substrate 40 are scribed. When the horizontal sliding members 15 and 16 reach the right end of the bonded substrate 4 () and the scribing is completed, one of the upper and lower scribe lines is completed. Here, since the thickness τ of the bonded substrate 40 and the distance d between the front end of the scribing wheel and the leading end of the roller 162748.doc 201248711 satisfy the above inequality (1), even if the input of the plate thickness data is incorrect or the operation error occurs. When the scribing head ^ 9 and the scribing head are too close to a specific position, as shown in FIG. $, the rollers U ^ 32 are in contact with each other to adhere to the substrate 4 〇 ', thereby preventing the scribing wheel 22, touch. Thereby, it is possible to prevent the damage of the tip of the scribing wheels 22 and 32 as shown in FIG. 6. When the scribing of the bonded substrate 40 is completed, the scribing head 19 is quickly raised and the scribing head 2 is lowered. However, if they are separated from each other, however, if the timing of the departure is delayed, there is a case where the scribing wheels 22 32 are close to each other as indicated by a broken line. In this case, the U-turns 24, 34 are brought into contact with the bonded substrate fasteners first, so that the scribing wheels 22, 32 can be prevented from coming into contact with each other. When the line is crossed in the opposite direction, the pro 23, 33 and the gongs and gongs of the t · · 颠 颠 来 来 来 来 来 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于At the end of the scribing, the contact of the scribing wheel 22' 32 can be prevented by the rollers 23, 33. Further, in the embodiment, a pair of pros are provided on the right and left sides of the sprocket, but only the protrusions may be provided instead of the rollers 23, 24, 33, and 34, and the position of the protrusion and the front end of the scribing wheel may be provided. The relationship satisfies the above formula (1). Even in the case of the m-shape, the contact of the scribing wheel can be prevented because the projection portion comes into contact with the bonding substrate before the scribing wheel contacts. In the embodiment, a pair of rollers are provided on the right and left sides of the scribing wheel, instead of the view of the modification of the scribing head 19 shown in Fig. 7 as viewed from below. As in the case of the 邕 shape, four rollers 53a, 53b and 54a, 54b having a pair of rotation axes parallel to the rotation axis of the scribing wheel 22 and having the right and left pairs may be disposed. The I62748.doc 201248711 underline is also the same. Further, a height adjusting mechanism may be provided so that the positions of the rolls 23 and 24 in the two-axis direction, the positions of the rolls 33 and 34 in the z-axis direction, and the positions of the rolls 23 and 24 in accordance with the thickness 贴 of the bonded substrate to be scribed The position of the roller 53a to the modification of Fig. 7 is moved up and down. In this way, it is possible to prevent the scribing wheel from directly interfering with the bonded substrates of various thicknesses. Further, in the present embodiment, a bonded brittle material substrate to which two sheets of brittle material substrates are bonded has been described. Among them, for example, an electropolymer display panel in which glass substrates are bonded to each other, and an organic EL (Electr〇)
Luminescence，電致發光）顯示面板等平板顯示面板、及對 矽基板、藍寶石基板等貼合玻璃基板之半導體基板等。 [產業上之可利用性] 本發明可適用於自上下同時對貼合基板劃線之劃線裝 置。 【圖式簡單說明】 圖1A係本發明之實施形態之劃線裝置之側視圖。 圖1B係本發明之實施形態之劃線裝置之側視圖。 圖2係表示本實施形態之上下劃線頭之圖。 圖3係表示劃線前之劃線頭之位置之圖。 圖4A係表示本實施形態之劃線裝置之劃線時之動作之 圖。 圖4B係表示本實施形態之劃線裝置之劃線時之動作之 圖。 圖5係表示於劃線前劃線頭之輥接觸於脆性材料基板之 I62748.doc 201248711 狀態之圖。 圖6係表示劃線結束時之劃線頭及輥之動作之圖。 圖7係表示本發明之實施形態之劃線頭及親之變形例之 【主要元件符號說明】 10a 、 10b 支柱 13a 、 13b 可動導引支柱 14a 、 14b 可動導引支柱 15 橫滑動構件 16 橫滑動構件 17 縱滑動構件 18 縱滑動構件 19 釗線頭 20 釗線頭 22 釗線輪 22a 旋轉軸 23 輥 23a 旋轉轴 24 輥 24a 旋轉軸 32 劃線輪 32a 旋轉軸 33 輥 33a 旋轉軸 162748.doc •10- 201248711 34 輥 34a 旋轉軸 40 貼合基板 53a、 _ 53b 輥 54a、 54b 輥 T 厚度 162748.doc -11Luminescence, electroluminescence, flat panel display panels such as display panels, and semiconductor substrates bonded to glass substrates such as tantalum substrates and sapphire substrates. [Industrial Applicability] The present invention is applicable to a scribing device for scribing a substrate to be bonded from the top to the bottom. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A is a side view of a scribing apparatus according to an embodiment of the present invention. Fig. 1B is a side view of a scribing apparatus according to an embodiment of the present invention. Fig. 2 is a view showing the underlined head on the upper embodiment. Fig. 3 is a view showing the position of the scribing head before scribing. Fig. 4A is a view showing the operation of the scribing device of the embodiment when scribing. Fig. 4B is a view showing the operation of the scribing device of the embodiment when scribing. Fig. 5 is a view showing a state in which the roller of the scribing head is in contact with the substrate of the brittle material in the state of I62748.doc 201248711. Fig. 6 is a view showing the operation of the scribing head and the roller at the end of scribing. Fig. 7 is a view showing a slash head and a modification of the embodiment of the present invention. [Main element symbol description] 10a, 10b struts 13a, 13b movable guide struts 14a, 14b movable guide struts 15 horizontal sliding members 16 are laterally slid Member 17 Longitudinal sliding member 18 Longitudinal sliding member 19 Twisting head 20 Twisting head 22 Crimping reel 22a Rotary shaft 23 Roller 23a Rotary shaft 24 Roller 24a Rotary shaft 32 Scribing wheel 32a Rotary shaft 33 Roller 33a Rotary shaft 162748.doc • 10- 201248711 34 Roller 34a Rotating shaft 40 Bonding substrate 53a, _ 53b Rollers 54a, 54b Roller T Thickness 162748.doc -11