TW201247561A - Production method for glass plate and glass plate production device - Google Patents
Production method for glass plate and glass plate production device Download PDFInfo
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- TW201247561A TW201247561A TW101110897A TW101110897A TW201247561A TW 201247561 A TW201247561 A TW 201247561A TW 101110897 A TW101110897 A TW 101110897A TW 101110897 A TW101110897 A TW 101110897A TW 201247561 A TW201247561 A TW 201247561A
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- glass sheet
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B18/00—Shaping glass in contact with the surface of a liquid
- C03B18/02—Forming sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B18/00—Shaping glass in contact with the surface of a liquid
- C03B18/02—Forming sheets
- C03B18/18—Controlling or regulating the temperature of the float bath; Composition or purification of the float bath
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Compositions (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
201247561 六、發明說明: 【發明所屬之技術領域】 本發明係關於-種玻璃板之製造方法及玻璃板製造裝 置。 ’ 【先前技術】 先前’有€用下拉法等各種方法製造玻璃板之方法。例 如,作為製造玻璃板之一種方法之溢流下拉法中,首先, 使流入成形體中之熔融玻璃自成形體溢出。然後,使溢出 之溶融玻璃於成形體之下端部合流而成形為連續之片狀玻 璃(平板玻璃)。再者,將於成形體之下端部合流之平板玻 璃進一步搬送至下方。然後,將平板玻璃切割為所需之大 小而製成玻璃板。 此處成形體中,為應對由於自重或高溫之熔融玻璃之 重置等引起之蠕變而支撐下端部之情況較多。例如,於專 利文獻1(日本專利第4193115號公報)中揭示之發明中,於 洲·里調節構造體(相當於成形體)之長度方向之兩側端的下 端部,分別配置有用以支撐流量調節構造體之支撐構件。 並且’ 一端之支撐構件係藉由加壓裝置而加壓。 【發明内容】 [發明所欲解決之問題] —般而言’由於成形時之熔融玻璃為高溫,故而於操作 則使成形體之周邊之溫度升溫,而使成形體之溫度上升。 然而’有如下之虞:加壓裝置對支撐構件之加壓與成形體 周邊之溫度之升溫使成形體發生位置偏移,即相對於成形 163250.doc 201247561 裝置内之其他構成構件之相對的位置偏移,並因該位置偏 移而導致平板玻璃之搬送路徑發生偏移,而所承受之來自 報之牽引力變得不均。因&,業界擔心玻璃板之品質降 低,例如,玻璃板之翹曲或者玻璃板之板厚偏差變大。 又,近年來,使用下拉法所製造之玻璃板有薄型化之傾 向。此處,玻璃板越薄越容易因較小之應力而變形。因 此,玻璃板越薄,由藉由升溫至高溫而產生之成形體之位 置偏移(相對於成形裝置内之其他構成構件之位置偏移)而 導致之玻璃板之變形的問題越顯著β 上述專利文獻1中,由於未考慮到上述成形體之位置偏 移,故而存在無法充分防止因成形體之位置偏移而導致之 玻璃板之翹曲等變形的問題。 近年來,對液晶顯示器或有機EL(Electr〇 Luminescence,電致發光)顯示器等平板顯示器(亦稱作 FPD(Flat Pane! Display)) ’業界要求畫面顯示之高精細化 及輕量化。為實現平板顯示器之輕量化,業界亦要求FpD 所含有之玻璃板之輕量化,因此玻璃板方面存在進一步薄 板化之傾向。另一方面’為實現FpD之畫面顯示之高精細 化,業界亦要求上述之玻璃板之趣曲等變形及玻璃板之板 厚偏差更小。如此,業界對液晶顯示器或有機£匕顯示器等 FPD用之玻璃板要求同時實現薄型化與_之降低,但存 在玻璃板越薄包括翹曲之變形越大的問題。 因此,本發明之課題在於提供—餘 你捉種可進一步抑制玻璃 品質之降低(例如,包括祐斑+ a 匕枯玻塥板之翹曲之變形或者破 163250.doc 201247561 板之板厚偏差之增大)的玻璃板之製造方法及玻璃板製造 裝置。 [解決問題之技術手段] 本發明之玻璃板之製造方法係利用下拉法之玻璃板之製 造方法,其具備推壓步驟、升溫步驟、炫解步驟、成形步 驟、及切割步驟。推壓步驟係沿上述成形體之一個方向推 壓上述成形體’以對成形體中由升溫而引起之成形體之相 對之位置偏移進行規制。升溫步驟係藉由升溫裝置使經推 壓之成形體之周邊溫度升溫。熔解步驟係將玻璃原料熔解 而製成熔融玻璃。成形步驟係藉由經升溫之成形體使熔融 玻璃成形為平板玻璃。切割步驟係將平板玻璃切割而形成 玻璃板。藉此可進一步抑制玻璃板之品質之降低。 較佳為,上述成形體於一個方向上較長,且上述推壓步 驟係經由为別支樓上述成形體之長度方向之兩側端的支撐 構件而對上述成形體進行推壓。 又,較佳為,升溫步驟中,成形體之周邊之溫度以 5°C〜30°C/h之升溫速度而升溫。 又’較佳為,玻璃板之板厚為〇.5 mrn以下。 又,較佳為,玻璃板之翹曲未達0.2 mm。 又,較佳為,推壓步驟中,藉由對支撐構件施加自成形 體之外側朝向成形體側之荷重而推壓成形體。 又,較佳為,上述玻璃板為液晶顯示器用或者有機]51^顯 示器用之玻璃板》 又,較佳為,上述玻璃板所使用之玻璃之失透溫度為 163250.doc 201247561 1050。。〜1250〇C。 又,較佳為,上述玻璃板中分別含有50〜7〇重量%之 Si02、0〜15重量%之 B2〇3、5~25 重量。/〇之 Al2〇3、〇~1〇 重量 %之MgO ' 〇〜20重量%iCaO、0〜20重量%之SrO、0〜1〇重 量%之BaO、5〜20重量%之R〇(R係選自Mg、Ca、Sr及Ba之 玻璃板所含有之全部成分之至少一種)。 進而,較佳為,上述玻璃板所使用之玻璃之應變點為 675°C以上。 本發明之玻璃板製造裝置之前提為其係使用下拉法之玻 璃板製造裝置,該下拉法係藉由使流入成形體中之熔融玻 璃自成形體溢出,使溢出之熔融玻璃於成形體之下端部合 流,藉此而成形平板玻璃。玻璃板製造裝置具備支撐構 件、升溫裝置、加壓裝置、及控制部。 支撐構件係支撐成形體之一個方向上之兩侧端。 升溫裝置係使成形體之周邊之溫度升溫。 加壓裝置係自成形體之兩端部之至少一端經由支撐構件 而推壓成形體。 控制部係以於利用升溫裝置使成形體之周邊之溫度升溫 前藉由加壓裝置對成形體進行推壓的方式進行控制。藉由 該玻璃板製造裝置,可進一步抑制玻璃板之品質之降低, 例如,包括玻璃板之翹曲之變形的增大及玻璃板之板厚偏 差的增大。 [發明之效果] 本發明t,可進一步抑制破璃板之品質之降低,例如, 163250.doc201247561 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method for producing a glass plate and a glass plate manufacturing device. [Prior Art] A method of manufacturing a glass sheet by various methods such as a down-draw method has been used. For example, in the overflow down-draw method as a method of producing a glass sheet, first, the molten glass flowing into the molded body is allowed to overflow from the molded body. Then, the overflowed molten glass is joined to the lower end portion of the molded body to form a continuous sheet glass (flat glass). Further, the flat glass which is joined at the lower end of the molded body is further conveyed to the lower side. Then, the flat glass was cut into a desired size to prepare a glass plate. In the molded body, the lower end portion is often supported in order to cope with creep due to resetting of the molten glass by its own weight or high temperature. For example, in the invention disclosed in Japanese Laid-Open Patent Publication No. 4193115, the lower end portions of the both ends of the longitudinal direction of the Yuzhou-Li adjustment structure (corresponding to the molded body) are respectively arranged to support the flow rate adjustment. The support member of the structure. And the support member at one end is pressurized by a pressurizing device. SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] In general, since the molten glass at the time of molding is at a high temperature, the temperature of the periphery of the molded body is increased while the temperature of the molded body is raised by the operation. However, there are the following: the pressurization of the support member by the pressurizing means and the temperature rise around the molded body cause the molded body to be displaced, that is, relative to the other constituent members in the apparatus 163250.doc 201247561 The offset is caused by the offset of the position, and the transport path of the flat glass is shifted, and the traction force from the report becomes uneven. Due to &, the industry is concerned about the deterioration of the quality of the glass sheet, for example, the warpage of the glass sheet or the variation in the thickness of the glass sheet becomes large. Further, in recent years, glass sheets produced by the down-draw method have a tendency to be thinner. Here, the thinner the glass sheet, the easier it is to deform due to the small stress. Therefore, the thinner the glass sheet, the more pronounced the problem of the deformation of the glass sheet caused by the positional displacement of the molded body (the positional deviation with respect to the other constituent members in the forming apparatus) caused by the temperature rise to a high temperature. In Patent Document 1, since the positional displacement of the molded body is not considered, there is a problem that deformation such as warpage of the glass sheet due to the positional displacement of the molded body cannot be sufficiently prevented. In recent years, flat panel displays (also referred to as FPD (Flat Pane! Display)) such as liquid crystal displays or organic EL (Electr® Luminescence) displays have been required to have high definition and light weight. In order to reduce the weight of flat panel displays, the industry has also demanded that the glass sheets contained in FpDs be lighter. Therefore, there is a tendency for further thinning of glass sheets. On the other hand, in order to achieve high definition of FpD screen display, the industry also requires distortion of the above-mentioned glass plate and the variation in thickness of the glass plate. As described above, the glass plate for FPD such as a liquid crystal display or an organic display is required to be simultaneously reduced in thickness and reduced in size, but the thinner the glass plate, the greater the deformation including warpage. Therefore, the object of the present invention is to provide a reduction in the quality of the glass (for example, including the deformation of the warp + a 匕 塥 塥 或者 或者 或者 或者 或者 或者 或者 或者 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 A method for producing a glass plate and a glass plate manufacturing device. [Technical means for solving the problem] The method for producing a glass sheet according to the present invention is a method for producing a glass sheet by a down-draw method comprising a pressing step, a temperature increasing step, a releasing step, a forming step, and a cutting step. The pressing step presses the formed body ' in one direction of the formed body to regulate the relative positional displacement of the formed body due to the temperature rise in the formed body. In the heating step, the temperature around the pressed molded body is raised by the temperature increasing means. The melting step melts the glass raw material to form a molten glass. In the forming step, the molten glass is formed into a flat glass by a heated body. The cutting step cuts the flat glass to form a glass sheet. Thereby, the deterioration of the quality of the glass plate can be further suppressed. Preferably, the molded body is long in one direction, and the pressing step presses the molded body via a support member which is a side member of both ends of the molded body in the longitudinal direction of the other branch. Further, preferably, in the temperature increasing step, the temperature around the molded body is raised at a temperature rising rate of 5 ° C to 30 ° C / h. Further, it is preferable that the thickness of the glass plate is 〇.5 mrn or less. Further, it is preferable that the warpage of the glass sheet is less than 0.2 mm. Further, in the pressing step, the molded body is preferably pressed by applying a load from the outer side of the molded body toward the side of the molded body to the supporting member. Further, it is preferable that the glass plate is a glass plate for a liquid crystal display or an organic film. Further, it is preferable that the glass used in the glass plate has a devitrification temperature of 163250.doc 201247561 1050. . ~1250〇C. Further, it is preferable that the glass plate contains 50 to 7 wt% of SiO 2 , 0 to 15 wt% of B 2 〇 3 and 5 to 25 wt%, respectively. /〇 Al2〇3, 〇~1〇% by weight of MgO '〇~20% by weight of iCaO, 0~20% by weight of SrO, 0~1〇% by weight of BaO, 5~20% by weight of R〇(R It is at least one selected from the group consisting of Mg, Ca, Sr, and Ba. Further, it is preferable that the glass used in the glass plate has a strain point of 675 ° C or higher. The glass sheet manufacturing apparatus of the present invention has been previously proposed as a glass sheet manufacturing apparatus using a down-draw method in which molten glass flowing into a molded body is overflowed from the molded body, and the molten glass is overflowed at the lower end of the formed body. The parts merge to form a flat glass. The glass sheet manufacturing apparatus includes a supporting member, a temperature increasing device, a pressurizing device, and a control unit. The support members support both side ends in one direction of the formed body. The temperature rising device heats the temperature around the molded body. The pressurizing device presses the molded body from at least one end of both end portions of the molded body via the support member. The control unit controls the shape of the molded body by a pressurizing device before the temperature of the periphery of the molded body is raised by the temperature increasing device. According to the glass sheet manufacturing apparatus, the deterioration of the quality of the glass sheet can be further suppressed, for example, the increase in the warpage of the glass sheet and the increase in the sheet thickness deviation of the glass sheet. [Effects of the Invention] According to the present invention, the deterioration of the quality of the glass frit can be further suppressed, for example, 163250.doc
S 201247561 包括玻璃板之翹曲之變形的增大及玻璃板之板厚偏差的增 大。 【實施方式】 以下,一面參照圖式,一面對使用本實施形態之玻璃板 製造裝置100製造玻璃板之玻璃板之製造方法進行說明。 (1)玻璃板之製造方法之概要 圖1係本實施形態之玻璃板之製造方法之一部分的流程 圖°以下,利用圖1對玻璃板之製造方法進行說明。 如圖1所示,玻璃板係經由包括熔解步驟ST1、澄清步驟 ST2、均質化步驟ST3、供給步驟ST4、及成形步驟ST5之 各種步驟而製造。以下,對該等步驟進行詳細敍述。 熔解步驟ST1中,加熱玻璃原料而使其熔解。玻璃原料 含有Si〇2、AhO3等組成。完全熔解之玻璃原料成為熔融 玻璃。 澄清步驟ST2係將熔融玻璃澄清。具體而言,係使溶融 玻璃中所含有之氣體成分自熔融玻璃釋放,或者使熔融玻 璃中所含有之氣體成分吸收至熔融玻璃中。 均質化步驟ST3中’使熔融玻璃均質化。再者,於該步 驟中,對結束澄清之熔融玻璃之溫度進行調整。 供給步驟ST4中’將熔融玻璃供給至進行成形之成形裝 置300(後述)。於該步驟中,以成為適於使平板玻璃s(}(參 照圖3 )開始成形之溫度之方式冷卻炫融玻璃。 成形步驟ST5中,使熔融玻璃成形為片狀之平板玻璃 SG 〇本實施形態中’熔融玻璃係藉由溢流下拉法而連續地 163250.doc 201247561S 201247561 includes an increase in the warpage of the glass sheet and an increase in the thickness deviation of the glass sheet. [Embodiment] Hereinafter, a method of manufacturing a glass sheet for manufacturing a glass sheet using the glass sheet manufacturing apparatus 100 of the present embodiment will be described with reference to the drawings. (1) Outline of the method for producing a glass sheet Fig. 1 is a flow chart showing a part of a method for producing a glass sheet according to the present embodiment. Hereinafter, a method for producing a glass sheet will be described with reference to Fig. 1 . As shown in Fig. 1, the glass sheet is produced through various steps including a melting step ST1, a clarification step ST2, a homogenization step ST3, a supply step ST4, and a molding step ST5. Hereinafter, the steps will be described in detail. In the melting step ST1, the glass raw material is heated and melted. The glass raw material contains Si〇2, AhO3 and the like. The fully melted glass material becomes molten glass. The clarification step ST2 clarifies the molten glass. Specifically, the gas component contained in the molten glass is released from the molten glass, or the gas component contained in the molten glass is absorbed into the molten glass. In the homogenization step ST3, the molten glass is homogenized. Further, in this step, the temperature of the molten glass which ends the clarification is adjusted. In the supply step ST4, the molten glass is supplied to the molding apparatus 300 (described later) for molding. In this step, the glazing glass is cooled so as to be suitable for forming the flat glass s (see FIG. 3). In the forming step ST5, the molten glass is formed into a sheet-like flat glass SG. In the form, 'melted glass is continuously 163250 by the overflow down-draw method. 201247561
成形為片狀從而形成平板玻璃SG。其後,平板玻璃板SG 係於切割步驟中以每段特定之長度進行切割,而製成玻璃 板G(參照圖3)。 再者,其後,於切割步驟中切割為特定之長度之玻璃板 G係經進-步切割’進行磨削•研磨、清洗、檢查而成為玻 璃板(未賦予記號而僅表達為玻璃板者係指最終製造而成 之玻璃板),其應用於例如液晶顯示器等平板顯示器等之 - 製造中。 (2)玻璃板製造裝置100之概要 圖2係以玻璃板製造裝置1〇〇所包含之熔解裝置2〇〇為主 而表不之模式圖。圖3係於垂直於玻璃板製造裝置1〇〇所包 含之成形裝置300或配置於成形裝置3〇〇之周邊之設備•構 件之水平面之方向上進行切割之情形時之剖面圖。以下, 對玻璃板製造裝置100進行說明。 玻璃板製造裝置100主要具有熔解裝置2〇〇(參照圖2)及 成形裝置300(參照圖2及圖3) » (2-1)熔解裝置200之構成 炼解裝置200係用以進行熔解步驟ST1 '澄清步驟8丁2、 均質化步驟ST3、及供給步驟ST4之裝置。 . 如圖2所示,熔解裝置200具有熔解槽2〇1、澄清槽2〇2、 - 授:摔槽203、及第1配管204、第2配管205 » 熔解槽201係用以熔解玻璃原料之槽。於熔解槽2〇ι中進 行熔解步驟ST1。 澄清槽202係用以自炫解於熔解槽2〇 1中之玻璃除去、.包之 163250.doc ·8·It is formed into a sheet shape to form a sheet glass SG. Thereafter, the flat glass plate SG is cut at a specific length per segment in the cutting step to form a glass plate G (refer to Fig. 3). Further, the glass plate G which is cut into a specific length in the cutting step is subjected to grinding, polishing, cleaning, and inspection to be a glass plate (not given a mark but only expressed as a glass plate). It refers to a glass plate finally manufactured, which is used in the manufacture of a flat panel display such as a liquid crystal display. (2) Outline of Glass Plate Manufacturing Apparatus 100 Fig. 2 is a schematic view showing a melting apparatus 2〇〇 included in the glass sheet manufacturing apparatus 1A. Fig. 3 is a cross-sectional view showing a state in which the forming device 300 included in the glass sheet manufacturing apparatus 1 is cut or the surface of the apparatus/component disposed around the forming apparatus 3 is cut. Hereinafter, the glass sheet manufacturing apparatus 100 will be described. The glass sheet manufacturing apparatus 100 mainly has a melting apparatus 2 (see FIG. 2) and a molding apparatus 300 (see FIGS. 2 and 3). (2-1) The melting apparatus 200 is configured to perform a melting step. ST1 'Clarification step 8 2, homogenization step ST3, and supply device of step ST4. As shown in FIG. 2, the melting apparatus 200 has a melting tank 2〇1, a clarification tank 2〇2, a sinking tank 203, a first piping 204, and a second piping 205. The melting tank 201 is used to melt glass raw materials. Slot. The melting step ST1 is performed in the melting tank 2〇. The clarification tank 202 is used for self-decoration of the glass in the melting tank 2〇1, and the package is 163250.doc·8·
S 201247561 槽。藉由將自熔解槽201送入之熔融玻璃於澄清槽2〇2中進 一步加熱,而促進熔融玻璃中之氣泡之消泡。於澄清槽 202中進行澄清步驟ST2。 攪拌槽203具有包括收容熔融玻璃之容器、旋轉軸、安 裝於該旋轉軸上之複數之攪拌翼的攪拌裝置。作為容器、 旋轉轴、及攪拌翼,例如,可利用鉑等鉑族元素或鉑族元 素合金製造者,並無特別限定。藉由驅動部(未圖示)之驅 動而使旋轉軸旋轉,藉此,安裝於旋轉軸之攪拌翼攪拌熔 融玻璃。於搜拌槽203中進行均質化步驟ST3。 第1配管204、及第2配管205為例如鉑或鉑合金製造之配 管。第1配管204為連接澄清槽202與攪拌槽203之配管。第 2配管205為連接攪拌槽2〇3與成形裝置3〇〇之配管。 (2-2)成形裝置3〇〇之構成 成形裝置300係用以進行成形步驟ST5之裝置。 如圖3所示,成形裝置300具有成形體3 1〇、冷卻輥33〇、 33〇、傳送輥35〇a〜35〇h。以下’對該等構成進行說明。 (2-2-1)成形體 310 圖4係成形裝置3〇〇所包含之成形體31〇之概略前視圖。 如圖3所示,成形體310位於成形裝置3〇〇之上方部分, 具有使自熔解裝置200流出之熔融玻璃成形為片狀之玻璃 (即平板玻璃SG)之功能。成形體310於垂直方向上切割之 剖面形狀具有楔形形狀,例如由具有耐火性之碑而構成。 如圖4所示’於成形體31〇中,於熔融玻璃流動方向(以 下稱作第1方向)之上游側形成有供給口 3丨丨。經由該供給 163250.doc 201247561 口 311,自熔解裝置2〇〇流出之熔融玻璃被供給至成形體 31〇(成形裝置3〇〇)。 如圖3或圖4所示,於成形體31〇中,沿其長度方向形成 有朝上方開放之凹槽312。凹槽312係以隨著自第丨方向之 上游側向第1方向之下游側而逐漸變淺之方式而形成。 再者,於成形體31〇之第丨方向之上游側部分及下游侧部 分,分別配置有作為檢測成形體31〇之溫度之檢測機構的 成形體溫度感測器(未圖示)。 於成形體310中,於凹槽312中溢出之熔融玻璃沿其兩側 面向下方流動,於下端部313合流。其後,於下端部313合 流之熔融玻璃成為片狀之平板玻璃板§(3,進一步向下方流 動。 (2-2-2)冷卻親330、330 冷卻輥330、330係配置於成形體31〇之下方。又,冷卻 輥330、330配置於平板玻璃板S(}之厚度方向之兩側、且平 板玻璃板SG之寬度方向之兩側部分。冷卻親33〇、33〇藉由 與於成形體310之下端部313合流之平板玻璃板sg相接觸, 而將該平板玻璃板SG冷卻。又,冷卻輥330、33〇將平板玻 璃板SG拉伸至所需之厚度,同時使平板玻璃板SG之兩端 部冷卻、高黏度化而抑制平板之寬度方向之收縮。 (2-2-3)傳送輥 350a 〜350hS 201247561 slot. The defoaming of the bubbles in the molten glass is promoted by further heating the molten glass fed from the melting tank 201 in the clarification tank 2〇2. A clarification step ST2 is performed in the clarification tank 202. The agitation vessel 203 has a stirring device including a vessel for accommodating molten glass, a rotating shaft, and a plurality of agitating blades mounted on the rotating shaft. The container, the rotating shaft, and the stirring blade are, for example, those produced by using a platinum group element such as platinum or a platinum group element alloy, and are not particularly limited. The rotating shaft is rotated by the driving of a driving portion (not shown), whereby the stirring blade attached to the rotating shaft stirs the molten glass. The homogenization step ST3 is performed in the search tank 203. The first pipe 204 and the second pipe 205 are pipes made of, for example, platinum or a platinum alloy. The first pipe 204 is a pipe connecting the clarification tank 202 and the stirring tank 203. The second pipe 205 is a pipe connecting the stirring tank 2〇3 and the forming device 3〇〇. (2-2) Configuration of Forming Apparatus 3 The forming apparatus 300 is a apparatus for performing the forming step ST5. As shown in Fig. 3, the forming apparatus 300 has a molded body 3 1〇, cooling rolls 33〇, 33〇, and conveying rolls 35〇a to 35〇h. The following description will be made of these configurations. (2-2-1) Molded body 310 Fig. 4 is a schematic front view of a molded body 31 included in the molding apparatus 3''. As shown in Fig. 3, the molded body 310 is located above the molding apparatus 3, and has a function of forming the molten glass flowing out of the melting apparatus 200 into a sheet-like glass (i.e., flat glass SG). The cross-sectional shape of the formed body 310 cut in the vertical direction has a wedge shape, and is constituted, for example, by a monument having fire resistance. As shown in Fig. 4, in the molded body 31, a supply port 3 is formed on the upstream side in the flow direction of the molten glass (hereinafter referred to as the first direction). Through the supply 163250.doc 201247561 port 311, the molten glass flowing out of the melting device 2 is supplied to the molded body 31 (forming device 3). As shown in Fig. 3 or Fig. 4, in the molded body 31, a groove 312 which is open upward is formed along the longitudinal direction thereof. The groove 312 is formed to gradually become shallower as it goes from the upstream side in the second direction to the downstream side in the first direction. Further, a molded body temperature sensor (not shown) as a detecting means for detecting the temperature of the molded body 31 is disposed in the upstream side portion and the downstream side portion in the second direction of the molded body 31. In the formed body 310, the molten glass overflowing in the groove 312 flows downward along both sides thereof, and merges at the lower end portion 313. Then, the molten glass joined to the lower end portion 313 is a sheet-shaped flat glass plate § (3, further flows downward. (2-2-2) Cooling pro 330, 330 Cooling rolls 330, 330 are disposed on the molded body 31 Further, the cooling rolls 330 and 330 are disposed on both sides in the thickness direction of the flat glass plate S (} and on both sides in the width direction of the flat glass plate SG. The cooling pro is 33 〇, 33 〇 The flat glass sheets sg joined by the lower end portions 313 of the formed body 310 are in contact with each other, and the flat glass sheets SG are cooled. Further, the cooling rolls 330, 33 拉伸 stretch the flat glass sheets SG to a desired thickness while making the flat glass Both ends of the plate SG are cooled and highly viscous to suppress shrinkage in the width direction of the flat plate. (2-2-3) Transfer rollers 350a to 350h
傳送親350a〜350h係於上下方向上隔開特定之間隔而配 置於冷卻輥330、330之下方。又,傳送輥35〇a〜35〇h配置 於平板玻璃板SG之厚度方向之兩側,其將平板玻璃板SG 163250.doc . jq s 201247561 向鉛垂方向下方牵引。藉此,對平板玻璃板SG進行自黏性 區域經黏彈性區域向彈性區域推移之緩冷。 (2-3)配置於成形裝置3〇〇之周邊之設備•構件 玻璃板製造裝置100中除熔解裝置2〇〇及成形裝置3〇〇以 外’亦具有下述構件•設備等。 (2-3-1)間隔構件 320、320 如圖3所示,間隔構件320、320係配置於成形體3 1〇之下 端部313附近之板狀構件。具體而言,間隔構件32〇、32〇 係配置於成形體3 10與冷卻輥33 〇、330之間。間隔構件 320、320係以成為大致水平之方式配置於平板玻璃板SGi 厚度方向的兩側❶間隔構件32〇、32〇係作為隔熱材料而發 揮功能。即,間隔構件32〇、32〇係藉由間隔其上下之空 間’而抑制熱自間隔構件320、320之上側向下側轉移。 (2-3-2)隔熱構件340a〜340h 隔熱構件340a〜340h係於冷卻輥330、330之下方於上下 方向上隔開特定之間隔而配置,且與各傳送輥35〇a〜35〇h 於上下方向上交替配置的板狀構件。隔熱構件34〇a〜34〇h 係以成為大致水平之方式而配置於平板玻璃板§(3之厚度方 向的兩側。藉由設置複數之隔熱構件,而可獨立控制之空 間(與複數之隔熱構件之上下相鄰之隔熱構件彼此之間的 空間)增加’易於對緩冷條件進行調整。即,可有效地抑 制玻璃板中發生内部應變。 (2_3_3)第1加熱器(未圖示) 第1加熱器係使平板玻璃板SG附近之環境溫度升溫之設 163250.doc 201247561 備’其複數配置於上下方向及平板玻璃板SG之寬度方向β 第1加熱器係用以對由傳送輥350a〜350h牽引之平板玻璃板 S G適當進行溫度控制。 (2-3-4)第2加熱器380 圖5係用於表示第2加熱器38〇於自正面觀察成形體31〇之 情形時的配置之圓。 第2加熱器380係作為藉由使成形體3 1〇之周邊之溫度(以 下稱作周邊溫度)升溫而間接地使成形體31〇之溫度升溫的 升溫裝置而發揮功能。再者,周邊溫度包括包圍成形體 3 10之空間之環境溫度。如圖5所示,第2加熱器38〇複數配 置於成形體3 10之附近。藉此,可使成形體3 1〇之表面溫度 大致均勻地升溫’且可減少由升溫時之成形體31〇之局部 性溫度差而產生之應力所引起的熱震導致成形體3 1〇發生 破損β (2-3-5)第1支撐構件41〇及第2支撐構件420 為應對成形體310之中央部之下方部分之蠕變,如圖4所 不,第1支撐構件410及第2支撐構件42〇分別以與成形體 31〇之長度方向之兩側端之下方部分相接觸的方式而配 置。藉此,對成形體310之長度方向之兩側端的下方部分 進行支撐。所謂下方部分,係指比成形體31〇中產生之彎 曲力矩之中立線(或令立面)更往下方之部分。再者,一般 認為,成形體之料係由於其自重或高溫线融玻璃之重 量等而產生。第1支撐構件41〇及第2支撐構件42〇中使用例 如與構成成形體310之碑的熱膨脹係數不同之碑,但並不 I63250.doc 201247561 限定於此。 (2-3·6)加壓裝置 加壓裝置中使用有氣缸。加壓裝置係藉由對第1支撐構 件410及第2支撐構件之一者進行加壓而對第1支撐構件及 第2支撐構件420施加荷重的加壓裝置。本實施形態中,加 壓裝置422配置於第2支撐構件420附近。具體而言,加壓 裝置422係隔著耐熱性較高之板構件421而配置於第2支撐 構件420之於成形體310之長度方向上的外側。 再者’由於在加壓裝置422對第2支撐構件420進行加壓 之情形時對成形體310施加長度方向之壓縮應力,故而於 未經加壓之支撐構件(此處為第1支撐構件410)之附近配置 有用以固定未經加壓之支撐構件之固定構件•設備。本實 施形態中,於未經加壓之第1支撐構件410之附近配置有固 定構件•設備511。更具體而言,固定構件•設備5 11係隔著 耐熱性較高之板構件411而配置於第1支撐構件410之於成 形體3 1 0之長度方向上的外側。 藉此,即便於對第1支撐構件410及第2支撐構件420之至 少一者進行加壓之情形時,未經加壓之支撐構件(此處為 第1支撐構件410)亦受到來自固定構件或固定設備(此處為 固定構件•設備511)之反作用力(此處為如圖4所示之箭頭 Ρ1)。即,第1支撐構件410及第2支撐構件420成為藉由加 壓裝置422向成形體3 10側施加荷重(如圖4所示之箭頭pi、 ?2)之狀態。藉此,成形體310成為經由第1支撐構件410及 第2支撐構件420而自成形體310之長度方向之外側被推壓 163250.doc •13· 201247561 的狀態。 (3)控制裝置(未圖示) 控制裝置包括CPU、ROM、RAM、硬碟等β 控制裝置係對用以驅動冷卻親3 3 0 ' 3 3 0及傳送輥 350a〜350h之驅動馬達(未圖示)、第!加熱器、第2加熱器 380、加壓裝置422等進行控制。即,控制裝置係作為控制 上述设備之控制部而發揮功能。控制裝置亦可接受來自使 用者之輸入而進行各種控制。又,控制裝置例如可僅設置 一個,亦可設置複數之分別控制上述驅動馬達、上述加熱 器 '加壓裝置之控制裝置。關於對第2加熱器38〇及加壓裝 置422之控制,之後進行敍述。 (4)成形裝置300中之平板玻璃板sg之成形 以下’針對在成形裝置3〇〇中成形平板玻璃板sg之過程 進行說明。 首先’如圖4所示’自熔解裝置2〇〇經由供給口 311供給 至成形體310之熔融玻璃流至成形體31〇之凹槽312。然 後,於凹槽3 12中溢出。於凹槽3丨2中溢出之熔融玻璃沿成 形體310之兩側面流向下方,如圖3所示,於下端部313中 0心。其後’於下端部3丨3中合流之熔融玻璃成為片狀之 平板玻璃板SG’進一步流向下方。 平板玻璃板SG藉由配置於厚度方向之兩侧之冷卻輥 330、330,而將宽度方向之兩端部夾持使其向鉛垂方向下 方下降,並且將其冷卻。由冷卻輥33〇、33〇下引之平板玻 璃板SG藉由傳送輥35〇a〜35〇h而進一步向下方下降。其 I63250.doc -14- 201247561 後’以每段特定之長度切割由傳送輥35〇3〜35〇11下引之平 板玻璃板SG。 (5)成形體310之設置 成形體3 10之設置係考慮到冷卻輥no、330及傳送輥 • 35〇3〜35011等之位置,以成形體3 10位於應正規安裝之第1 位置之方式而進行。具體而言,第丨位置例如可藉由在成 形體3 10之下端部3 13固定絲線並使該絲線向錯垂下方下垂 而決定。更具體而言’第1位置係如下所述之位置:自成 形體3 10之下端部3 13向下方下垂之絲線不與間隔構件 320、320、冷卻輥330、330、隔熱構件340a〜340h、及傳 送親350a~3 50h等相接觸,而通過至切割平板玻璃板sg之 空間。再者,第1位置之決定之方法並不限定於此。 再者,設置成形體310後’使預先配置於成形體31〇之長 度方向之兩侧方之第1支撐構件41〇及第2支撐構件420與成 形體310之兩側端之下方部分相接觸。具體而言,藉由控 制加壓裝置422而向第1支撐構件41〇及第2支撐構件420施 加荷重,將第1支撐構件410及第2支撐構件420推壓向成形 體310。即,沿一個方向推壓成形體3丨〇。具體而言,成形 體3 10係經由第1支撐構件410及第2支撐構件420自長度方 向之外側進行推壓。 再者’較理想為’使加壓裝置422對第2支撐構件420之 加壓開始的時間為成形體3 10之溫度達到室溫(例如,顯示 〇〜3 0 C左右)或室溫之附近。例如,若考慮施工者之操作 性’則較理想為成形體3 10之溫度為150。(:以下,更理想為 163250.doc •15· 201247561 100°C以下、80°c以下、50°C以下、30°C以下、25°c以 下。 並且,於藉由加壓裝置422向第2支撐構件420施加特定 之壓力的狀態下’再次確認成形體3 1〇之位置是否位於第1 位置。此時’於成形體31〇之位置偏離於第1位置(包括傾 斜)之情形時’停止加壓裝置422’並例如’藉由於成形體 310與第1支撐構件410或第2支撐構件420之間添加水泥等 而調整成形體310之位置。再者,成形體310之位置之調整 方法並不限定於此。另一方面,於成形體310配置於第1位 置之情形時,於藉由加壓裝置422向第2支撐構件420施加 特定之壓力的狀態下(即,推壓成形體3 10之狀態下),開始 成形體310之升溫處理。 (6)成形體310之升溫 於成形體310設置於第1位置並藉由加壓裝置422及固定 構件•設備5 11對其推壓之狀態下,控制裝置係以成形體 31〇之溫度成為特定之溫度(例如,1〇〇〇。0〜12〇〇。〇之方式 藉由第2加熱器380控制成形體310之周邊溫度。即,控制 裝置係基於成形體310之溫度對第2加熱器380進行控制。 其原因在於,由於開始操作後流至成形體31〇之熔融玻璃 為約1000 C〜1400。(:之高溫,因此必需預先對成形體31〇之 溫度進行升溫。 此處,成形體310之周邊溫度係以特定之升溫速度進行 升溫。再者,成形體310之周邊溫度與成形體31〇之表面溫 度成為大致相同之溫度。即,成形體31〇之表面溫度亦可 163250.doc 201247561 以特定之升溫速度進行升溫。 所謂特定之升溫速度,較理想為5°C〜30°C /h。升溫速度 之上限較理想為30°C /h,原因在於抑制由熱震導致之成形 體之破損。再者,升溫速度之上限更理想為依序為 10°c /h、12°C /h、15°c /h。此種情形時’由於成形體310之 表面與内部之溫度差不會變得過大,故而可進一步減少成 形體310破損之虞。 又’升溫速度之下限較理想為5。(: /h,原因在於擔心若 成形體之周邊溫度之升溫時間增長,則會對玻璃板之生產 性產生影響’因此要避免該情況。再者,升溫速度之下限 更理想為7。(: /h。此種情形時,可進一步提高玻璃板之生 產性。 (7)玻璃板之較佳形態 以下,對使用本發明所製造之玻璃板之較佳形態進行說 明。再者,並不限定於下述形態。 玻璃板之厚度較佳設為0.1 mm〜3 mm。進而,作為平板 顯示器用之玻璃板,較佳為0.01〜丨.〇 mm。且,按較佳之 順序,更佳之上限值為0.4 mm、0.5 mm、(Kg mm、ί ο mm、1.5 mm。進而 按較佳之順序,更佳之下限值為0.3 mm、0.2顏。例如,由於平板顯示器用之玻璃板要求輕 量化及薄板化,故而玻璃板之厚度越薄越好。另一方面’ 玻璃板之厚度越薄,則顯示器製造步驟中越容易產生玻璃 板之破損。若考慮到該等情况, 則平板顯示器用之玻璃板 之厚度較佳為0,01〜1,0 mm, mm,進而較 163250.doc 17 201247561 佳為0.2〜0.8 mm。 此處,若玻璃板之厚度為〇·5 mm以下,尤其是未達〇 5 mm,則會關係到玻璃板之變形或破損,且成形體之位置 偏移之影響變得顯著。由於因成形體之位置偏移而產生 之、施加於玻璃板之輥(冷卻輥及傳送輥)之牵引力的不 均,而於玻璃板中產生應力分佈,最壞之情形達到玻璃板 之變形或破損,但厚度為0.5 mm以下之玻璃板之情形時, 即便較小之應力分佈亦容易產生變形並且破損。即,玻$ 板之厚度越是未達0.5 mm、為0.4 mm以下,則抑制成形體 之位置偏移之本發明的效果越顯著。即,若玻璃板之厚度 為0.01 mm以上且為0.5 mm以下,則本發明之效果顯著, 若為0.01 mm以上且未達0.5 mm,則本發明之效果更加顯 著,若為0.01 mm以上且為0.4 mm以下,則本發明之效果 進一步顯著。 又’玻璃板之板厚偏差較佳為0〜20 μιη。且,按較佳之 順序’更佳之玻璃板之板厚偏差的上限值為5 μηι以下(例 如’ 0〜5 μιη)、10 μπι以下(例如,〇〜1〇 gm)。於本發明中 可實現如上所述之板厚偏差。 又’關於玻璃板之翹曲’於進行測定之情形時,赵曲之 最大值較佳為處於0至0.2 mm之範圍内。且,按較佳之順 序’更佳之玻璃板之翹曲的上限值為〇.〇1 min以下(〇〜〇.〇1 mm)、〇.〇5 mm 以下(0〜0.05 mm)、〇· 1 mm 以下(〇〜〇」 mm)、0.15 mm 以下(0〜0.15 mm)。 若關於玻璃板之翹曲之測定進行更加詳細之說明,則首 163250.doc . ig _ 201247561 先’自玻璃板切下複數塊之小板(約4〇〇 mm見方)。繼而, 對各小板於正反各處測定角4處與中央部4處之翹曲(即, 對共計16處之翹曲進行測定)。例如,於對8塊小板之翹曲 進行測定之情形時,獲得16處><8塊共計128處之翹曲之測 定資料。且,該測定資料中之最大值較佳為處於上述範圍 内。再者,本實施形態中,以對複數之小板進行測定而得 之勉曲的最大值作為玻璃板之魅曲。 又’較佳為,玻璃板之大小為寬度方向之長度為5〇〇 mm_3500 mm,長度方向之長度為500 mm-3500 mm。 又’關於玻璃板之種類,較佳為梦玻璃、銘石夕玻璃、 鋁硼矽玻璃、鈉鈣玻璃、鹼金屬矽玻璃、鹼金屬鋁矽玻 璃、鹼金屬鋁鍺玻璃。 又’玻璃板較佳為用於平板顯示器(液晶顯示器、有機 EL顯示器、或者電漿顯示器等)用之玻璃板、太陽電池用 之面板 '及覆蓋玻璃。再者’所謂覆蓋玻璃,係例如為保 護AV(Audio Video’聲視訊號)設備(移動終端等)之顯示畫 面或殼體而對玻璃板進行化學性或者物理性之強化的強化 玻璃°此處,近年來,由於液晶顯示器或者有機EL顯示器 方面要求高精度之晝面顯示,故而要求減少用於液晶顯示 器或者有機EL顯示器之玻璃板之翹曲及板厚之偏差。因 此’可抑制成形體之位置偏移、減少玻璃板之翹曲及板厚 偏差的本發明更佳。又,用作顯示部等之保護層等之覆蓋 玻璃方面要求較高之表面品質。因此,用於覆蓋玻璃之玻 璃板方面要求減少翹曲及板厚偏差,因此可抑制成形體之 163250.doc 19 201247561 位置偏移、減少玻璃板之翹曲及板厚偏差的本發明更佳。 又,作為平板顯示器(液晶顯示器或電漿顯示器等)用之 玻璃基板,可例示玻璃板以重量%表示而含有以下成分 者。下述括號内之表示係各成分之較佳含有率。以後,% 表示係指重量%。The transfer pro-350a to 350h are disposed below the cooling rolls 330 and 330 at a predetermined interval in the vertical direction. Further, the conveying rollers 35A1 to 35〇h are disposed on both sides in the thickness direction of the flat glass plate SG, and the flat glass plate SG 163250.doc.jq s 201247561 is pulled downward in the vertical direction. Thereby, the flat glass plate SG is slowly cooled in the self-adhesive region through the viscoelastic region to the elastic region. (2-3) Equipment and members disposed around the molding apparatus 3A The glass sheet manufacturing apparatus 100 has the following members, equipment, and the like in addition to the melting apparatus 2 and the molding apparatus 3'. (2-3-1) Spacer members 320 and 320 As shown in Fig. 3, the partition members 320 and 320 are plate-like members disposed near the end portion 313 of the molded body 3 1〇. Specifically, the spacer members 32A and 32 are disposed between the molded body 310 and the cooling rolls 33A and 330. The spacer members 320 and 320 are disposed on the both sides of the flat glass plate SGi in the thickness direction, and the spacer members 32, 32 are used as a heat insulating material to function as a heat insulating material. That is, the spacer members 32, 32 are prevented from being transferred from the upper side to the lower side of the spacer members 320, 320 by spacing the upper and lower spaces thereof. (2-3-2) Heat-insulating members 340a to 340h The heat-insulating members 340a to 340h are disposed at a predetermined interval in the vertical direction below the cooling rolls 330 and 330, and are connected to the respective conveying rollers 35〇a-35. 〇h A plate-shaped member that is alternately arranged in the up and down direction. The heat insulating members 34A1 to 34〇h are disposed on the two sides in the thickness direction of the flat glass plate in a substantially horizontal manner. The space can be independently controlled by providing a plurality of heat insulating members (and The space between the upper and lower insulating members of the plurality of heat insulating members is increased. It is easy to adjust the slow cooling conditions. That is, the internal strain in the glass plate can be effectively suppressed. (2_3_3) The first heater ( Not shown) The first heater is used to raise the temperature of the ambient temperature in the vicinity of the flat glass plate SG. 163250.doc 201247561 "The plural number is arranged in the vertical direction and the width direction of the flat glass plate SG. The flat glass plate SG which is pulled by the transport rollers 350a to 350h is appropriately temperature-controlled. (2-3-4) Second heater 380 FIG. 5 is a view showing that the second heater 38 is viewed from the front side. In the case of the arrangement, the second heater 380 functions as a temperature increasing device that indirectly raises the temperature of the molded body 31 by heating the temperature around the molded body 3 1 (hereinafter referred to as the ambient temperature). Function. Again, ambient temperature The degree includes the ambient temperature of the space surrounding the molded body 30. As shown in Fig. 5, the second heater 38 is disposed in the vicinity of the molded body 310. Thereby, the surface temperature of the molded body 3 1 can be made substantially uniform. The thermal shock caused by the local temperature difference caused by the local temperature difference of the molded body 31 at the time of temperature rise causes the molded body 3 1〇 to be broken. β (2-3-5) The first supporting member 41〇 The second support member 420 is configured to cope with the creep of the lower portion of the central portion of the molded body 310. As shown in Fig. 4, the first support member 410 and the second support member 42 are respectively formed in the longitudinal direction of the molded body 31. The lower portions of the both side ends are arranged in contact with each other. Thereby, the lower portion of the both ends of the molded body 310 in the longitudinal direction is supported. The lower portion means the bending moment generated in the ridge of the molded body 31. The line (or the façade) is further downward. Further, it is considered that the material of the formed body is generated by its own weight or the weight of the high-temperature wire-melting glass, etc. The first support member 41 and the second support member 42 For example, and using the formed body 310 The thermal expansion coefficient of the monument is different, but it is not limited to I63250.doc 201247561. (2-3·6) The cylinder is used in the pressurizing device, and the pressurizing device is used for the first supporting member 410 and One of the second support members pressurizes and applies a load to the first support member and the second support member 420. In the present embodiment, the pressurizing device 422 is disposed in the vicinity of the second support member 420. Specifically, The pressurizing device 422 is disposed on the outer side in the longitudinal direction of the molded body 310 of the second support member 420 via the plate member 421 having high heat resistance. In addition, since the compressive stress in the longitudinal direction is applied to the molded body 310 when the pressurizing device 422 pressurizes the second supporting member 420, the unsupported supporting member (here, the first supporting member 410) A fixing member/device for fixing the unpressurized support member is disposed in the vicinity of the). In the present embodiment, the fixing member/equipment 511 is disposed in the vicinity of the first support member 410 that is not pressurized. More specifically, the fixing member/equipment 5 11 is disposed outside the longitudinal direction of the forming body 310 in the first supporting member 410 via the plate member 411 having high heat resistance. Thereby, even when at least one of the first support member 410 and the second support member 420 is pressurized, the unpressurized support member (here, the first support member 410) is also subjected to the fixing member. Or the reaction force of the fixture (here, the fixing member • the device 511) (here, the arrow Ρ 1 shown in Fig. 4). In other words, the first support member 410 and the second support member 420 are in a state of applying a load (arrows pi, ? 2 as shown in Fig. 4) to the side of the molded body 3 10 by the pressing device 422. As a result, the molded body 310 is pressed by the first support member 410 and the second support member 420 from the outer side in the longitudinal direction of the molded body 310 by 163250.doc •13·201247561. (3) Control device (not shown) The control device includes a CPU, a ROM, a RAM, a hard disk, etc., and a beta control device for driving the cooling motor 3 3 0 '3 3 0 and the transport rollers 350a to 350h (not Illustration), the first! The heater, the second heater 380, the pressurizing device 422, and the like are controlled. That is, the control device functions as a control unit that controls the above-described device. The control device also accepts various inputs from the user for various controls. Further, for example, only one control device may be provided, and a plurality of control devices for controlling the drive motor and the heater 'pressurizing device, respectively, may be provided. The control of the second heater 38 and the pressurizing device 422 will be described later. (4) Forming of the flat glass sheet sg in the forming apparatus 300 The following describes the process of forming the flat glass sheet sg in the forming apparatus 3A. First, as shown in Fig. 4, the molten glass supplied from the melting device 2 to the formed body 310 via the supply port 311 flows to the groove 312 of the molded body 31. Then, it overflows in the groove 3 12 . The molten glass overflowing in the recess 3丨2 flows downward along both sides of the forming body 310, as shown in Fig. 3, at the lower end portion 313 in the center of the zero. Then, the flat glass plate SG' in which the molten glass joined in the lower end portion 3丨3 is formed into a sheet shape flows further downward. The flat glass sheets SG are held by the cooling rolls 330 and 330 disposed on both sides in the thickness direction, and are sandwiched at both ends in the width direction to be lowered downward in the vertical direction, and are cooled. The flat glass plate SG which is guided by the cooling rolls 33A, 33〇 is further lowered downward by the conveying rollers 35〇a to 35〇h. Its I63250.doc -14- 201247561 is followed by cutting the flat glass plate SG which is guided by the conveying rollers 35〇3 to 35〇11 for each specific length. (5) The molded body 310 is provided in a manner that the position of the cooling rolls no, 330 and the conveying rolls, 35〇3 to 35011, etc., is such that the formed body 3 10 is located at the first position to be properly mounted. And proceed. Specifically, the second position can be determined, for example, by fixing the wire at the lower end portion 3 13 of the forming body 3 10 and causing the wire to sag downward. More specifically, the 'first position' is a position as follows: the wire that hangs downward from the lower end portion 3 13 of the molded body 3 10 does not overlap with the partition members 320, 320, the cooling rolls 330, 330, and the heat insulating members 340a to 340h. And the transfer pro 350a~3 50h and other phases are in contact, and pass to the space of cutting the flat glass plate sg. Furthermore, the method of determining the first position is not limited to this. Further, after the molded body 310 is provided, the first support member 41 and the second support member 420 which are disposed on both sides in the longitudinal direction of the molded article 31 are brought into contact with the lower portions of the both side ends of the molded body 310. . Specifically, the first support member 41A and the second support member 420 are biased by the control pressurizing device 422, and the first support member 410 and the second support member 420 are pressed against the molded body 310. That is, the formed body 3丨〇 is pressed in one direction. Specifically, the molded body 3 10 is pressed from the outer side in the longitudinal direction via the first support member 410 and the second support member 420. Further, 'preferably' is such that the pressing of the pressurizing device 422 to the second supporting member 420 is started such that the temperature of the molded body 3 10 reaches room temperature (for example, about 〇~3 0 C) or near room temperature. . For example, it is preferable that the temperature of the molded body 3 10 is 150 in consideration of the operability of the constructor. (The following is more preferably 163250.doc • 15·201247561 100° C. or less, 80° C. or less, 50° C. or less, 30° C. or less, 25° C. or less. Further, by the pressurizing device 422 2 When the support member 420 applies a specific pressure, it is confirmed again that the position of the molded body 3 1 is at the first position. At this time, when the position of the molded body 31 is deviated from the first position (including the inclination) The pressurizing device 422 ′ is stopped and the position of the molded body 310 is adjusted by adding cement or the like between the molded body 310 and the first support member 410 or the second support member 420. Further, the position of the molded body 310 is adjusted. On the other hand, when the molded body 310 is placed at the first position, a specific pressure is applied to the second support member 420 by the pressurizing device 422 (that is, the molded body is pressed). In the state of 3 10, the temperature rising treatment of the molded body 310 is started. (6) The temperature rise of the molded body 310 is set at the first position, and is pressed by the pressurizing device 422 and the fixing member/equipment 5 11 In the state, the control device is formed by the molded body 31 The degree becomes a specific temperature (for example, 1 〇〇〇 0 to 12 〇〇. The method is to control the peripheral temperature of the formed body 310 by the second heater 380. That is, the control device is based on the temperature of the molded body 310. 2. The heater 380 is controlled. The reason is that the molten glass flowing to the molded body 31 after the start of the operation is about 1000 C to 1400. (The high temperature is required, so that it is necessary to raise the temperature of the molded body 31 预先 in advance. The temperature of the periphery of the molded body 310 is raised at a specific temperature increase rate. Further, the temperature around the molded body 310 is substantially the same as the surface temperature of the molded body 31. That is, the surface temperature of the molded body 31 is also 163250.doc 201247561 The temperature is raised at a specific temperature increase rate. The specific temperature rise rate is preferably 5 ° C to 30 ° C / h. The upper limit of the temperature increase rate is preferably 30 ° C / h, because the heat is suppressed. Further, the upper limit of the temperature increase rate is more preferably 10 ° C / h, 12 ° C / h, 15 ° c / h. In this case, 'because of the surface of the formed body 310 The temperature difference from the inside does not change If the size of the molded article 310 is too large, the lower limit of the temperature rise rate is preferably 5. (: /h, because the temperature of the peripheral temperature of the molded body increases, the production of the glass plate is caused. Sexuality affects 'Therefore, this situation should be avoided. Furthermore, the lower limit of the heating rate is more preferably 7. (: /h. In this case, the productivity of the glass sheet can be further improved. (7) The preferred form of the glass sheet Hereinafter, preferred embodiments of the glass sheet produced by using the present invention will be described. Furthermore, it is not limited to the following form. The thickness of the glass plate is preferably set to 0.1 mm to 3 mm. Further, as the glass plate for a flat panel display, 0.01 to 丨.〇 mm is preferable. Further, in a preferred order, the upper limit is preferably 0.4 mm, 0.5 mm, (Kg mm, ί ο mm, 1.5 mm. Further, in a preferred order, the lower limit is 0.3 mm, 0.2 Å. For example, Since the glass plate for flat panel displays is required to be lighter and thinner, the thickness of the glass plate is as thin as possible. On the other hand, the thinner the thickness of the glass plate, the more likely the glass plate is damaged during the manufacturing process of the display. In these cases, the thickness of the glass plate for the flat panel display is preferably 0,01~1, 0 mm, mm, and is preferably 0.2 to 0.8 mm compared to 163250.doc 17 201247561. Here, if the thickness of the glass plate is 〇·5 mm or less, especially if it is less than 5 mm, it is related to the deformation or breakage of the glass sheet, and the influence of the positional displacement of the formed body becomes remarkable. The unevenness of the traction force applied to the rolls of the glass sheet (the cooling roll and the transfer roll), and the stress distribution in the glass plate, and the worst case is the deformation or breakage of the glass plate, but the glass plate having a thickness of 0.5 mm or less In case of even small The stress distribution is also prone to deformation and breakage. That is, the thickness of the glass plate is less than 0.5 mm and 0.4 mm or less, and the effect of the present invention which suppresses the positional displacement of the molded body is more remarkable. When the thickness is 0.01 mm or more and 0.5 mm or less, the effect of the present invention is remarkable. If the thickness is 0.01 mm or more and less than 0.5 mm, the effect of the present invention is more remarkable. If it is 0.01 mm or more and 0.4 mm or less, the present invention is The effect of the invention is further remarkable. Further, the thickness deviation of the glass plate is preferably 0 to 20 μm. Further, in a preferred order, the upper limit of the thickness deviation of the glass plate is preferably 5 μηι or less (for example, '0~ 5 μιη), 10 μπι or less (for example, 〇~1〇gm). In the present invention, the thickness deviation as described above can be achieved. And in the case of the measurement of the warpage of the glass sheet, Zhao Quzhi The maximum value is preferably in the range of 0 to 0.2 mm, and, in a preferred order, the upper limit of the warpage of the better glass plate is 〇.〇1 min or less (〇~〇.〇1 mm), 〇 〇5 mm or less (0 to 0.05 mm), 〇·1 mm or less (〇 〇"mm), 0.15 mm or less (0~0.15 mm). If the measurement of the warpage of the glass plate is described in more detail, the first 163250.doc. ig _ 201247561 first 'cut the small piece from the glass plate The plate (about 4 mm square). Then, the warpage of the corner 4 and the central portion 4 is measured in each of the small plates (i.e., the warpage of a total of 16 places is measured). For example, When the warpage of eight small plates was measured, measurement data of warpage of a total of 128 pieces of 16 pieces of <8 pieces was obtained. Further, the maximum value in the measurement data is preferably within the above range. Further, in the present embodiment, the maximum value of the distortion obtained by measuring a plurality of small plates is used as the embossing of the glass plate. Further, it is preferable that the size of the glass plate is 5 mm mm to 3,500 mm in the width direction and 500 mm to 3,500 mm in the length direction. Further, regarding the type of the glass plate, it is preferably Dream Glass, Mingshixi Glass, Aluminium Boron Glass, Soda Calcium Glass, Alkali Metal Bismuth Glass, Alkali Metal Alumina Glass, and Alkali Metal Alumina Glass. Further, the glass plate is preferably a glass plate for a flat panel display (a liquid crystal display, an organic EL display, or a plasma display), a panel for a solar cell, and a cover glass. In addition, the so-called cover glass is a tempered glass that chemically or physically strengthens the glass plate, for example, to protect the display screen or the casing of an AV (Audio Video's audio-visual) device (mobile terminal). In recent years, since a liquid crystal display or an organic EL display requires high-precision kneading display, it is required to reduce variations in warpage and thickness of a glass plate used for a liquid crystal display or an organic EL display. Therefore, the present invention which can suppress the positional displacement of the molded body, reduce the warpage of the glass sheet, and the variation in the thickness of the sheet is more preferable. Further, it is used as a cover layer for a display portion or the like to cover a glass having a high surface quality. Therefore, in order to reduce the warpage and the thickness deviation of the glass sheet for covering the glass, the present invention which suppresses the positional displacement of the formed body, reduces the warpage of the glass sheet, and the variation in the thickness of the sheet is more preferable. Further, as a glass substrate for a flat panel display (such as a liquid crystal display or a plasma display), the glass plate may be exemplified by the following components in terms of % by weight. The following brackets indicate the preferred content of each component. In the future, % means % by weight.
Si02 : 50〜70%(55〜65%、57〜64%、58〜62%);Si02: 50~70% (55~65%, 57~64%, 58~62%);
Al2〇3 : 5〜25%(1〇〜20〇/〇、12〜18〇/〇、15〜18%); B2〇3 : 0〜150/〇(5〜15〇/〇、6〜13%、7〜12%)。 此時’亦可含有下述組成作為任意成分。Al2〇3: 5~25% (1〇~20〇/〇, 12~18〇/〇, 15~18%); B2〇3: 0~150/〇 (5~15〇/〇, 6~13 %, 7~12%). In this case, the following composition may also be contained as an optional component.
MgO : 0〜10%(下限為〇.01%、下限為〇 5%、上限為5%、 上限為4%、上限為2%);MgO : 0 to 10% (lower limit is 〇.01%, lower limit is 〇 5%, upper limit is 5%, upper limit is 4%, upper limit is 2%);
CaO · 0〜20°/。(下限為1。/。、下限為3%、下限為4%、上限 為9%、上限為8°/。、上限為7%、上限為6%);CaO · 0~20°/. (The lower limit is 1%, the lower limit is 3%, the lower limit is 4%, the upper limit is 9%, the upper limit is 8°/., the upper limit is 7%, and the upper limit is 6%);
SrO : 0〜20%(下限為0.5%、下限為3%、上限為9%、上 限為8%、上限為7%、上限為6%);SrO: 0 to 20% (lower limit is 0.5%, lower limit is 3%, upper limit is 9%, upper limit is 8%, upper limit is 7%, upper limit is 6%);
BaO : 0〜10%(上限為8%、上限為3%、上限為1%、上限 為 0.2%);BaO: 0 to 10% (upper limit is 8%, upper limit is 3%, upper limit is 1%, upper limit is 0.2%);
Zr02 : 0~10〇/〇(0〜5%、〇〜4%、〇〜ι〇/0、〇〜〇 1〇/〇) 〇 又’尤佳為含有 Si02 50〜70%、B203 5〜18%、Α12〇;5Zr02 : 0~10〇/〇 (0~5%, 〇~4%, 〇~ι〇/0, 〇~〇1〇/〇) 〇又' is especially good for containing SiO 50 50~70%, B203 5~ 18%, Α12〇; 5
10〜25¼、MgO 0〜1〇%、Ca0 〇〜2〇%、Sr〇 〇〜2〇%、Ba〇 0〜10%、RO 5〜20〇/〇(其中,R為選自Mg、Ca、心及以之玻 璃板所含有之全部成分中之至少一種)β進而較佳為含有 R,20超過0.20%且為2.0%以下(其中,R|為選自Li、Na&K 之玻璃板所含有之全部成分中之至少一種又,較佳為 •20· 163250.doc 9 201247561 含有澄清劑共計0.05〜1.5%,且實質上不含As203、Sb203 及PbO。又’進而較佳為玻璃中之氧化鐵之含量為 0.01 〜0.2%。 又’較佳為含有 Si〇2 50〜70%、Β2〇3 0〜15%、Α12〇310~251⁄4, MgO 0~1〇%, Ca0 〇~2〇%, Sr〇〇~2〇%, Ba〇0~10%, RO 5~20〇/〇 (where R is selected from Mg, Ca And at least one of β and, in addition, all of the components contained in the glass plate, and further preferably contains R, 20 in excess of 0.20% and less than 2.0% (wherein R| is a glass plate selected from the group consisting of Li, Na&K) At least one of all the components contained is preferably 20. 163250.doc 9 201247561 contains a clarifier totaling 0.05 to 1.5%, and substantially does not contain As203, Sb203 and PbO. Further, it is preferably in glass. The content of iron oxide is 0.01 to 0.2%. Further, it is preferably contained in the range of 50 to 70%, Β2〇3 0 to 15%, and Α12〇3.
5~250/〇、MgO 〇〜1〇〇/0、CaO 0〜20%、SrO 0〜20%、BaO 0〜10%、RO 5〜20%(其中,r係選自Mg、Ca、Sr及Ba之玻 璃板所含有之全部成分中之至少一種)。 進而’於將玻璃板用於平板顯示器之玻璃基板之情形 時’就抑制形成於平板顯示器之玻璃基板中之TFT(Thin Film Transistor,薄膜電晶體)之破壞的觀點而言,較佳為 無鹼玻璃(實質上不含鹼金屬成分之玻璃)。另一方面,為 提高玻璃之熔解性’亦可微量含有鹼金屬成分。此種情形 時,較佳為含有R'O超過0.05%且為2.0%以下(其中,R,係 選自Li、Na及K之玻璃板所含有之全部成分中之至少一 種),更佳為含有R'2〇超過0.1 %且為2.0%以下《又,作為 澄清劑’較佳為實質上不含As2〇3及PbO。又,作為澄清 劑’較佳為含有至少氧化錫。又,進而較佳為玻璃中之氧 化鐵之含量為0.01〜0.2%。 為平板顯示器之輕量化,較佳為SrO + BaO為〇〜1〇〇/0。 又’除輕量化之觀點以外’考慮到環境負荷,進而較佳為 BaO為0〜2重量%。 藉由使玻璃板之玻璃組成成為如上所述之組成範圍,而 可製成滿足液晶顯示器或者有機EL顯示器等平板顯示器之 玻璃基板所要求之特性(TFT之破壞之抑制及輕量化)的玻 163250.doc 201247561 璃板。更詳細而言,可實現應變點滿足65〇r以上之玻璃 板。又’可實現密度為2.6 g/cm3以下之玻璃板。又,可實 現揚氏模數為70 GPa以上之玻璃板。進而,可實現失透溫 度為125〇t:以下之玻璃板。失透溫度為1250°C以下之玻璃 板可使用溢流下拉法而製造。但,由於實現失透溫度未達 1050°C並且滿足平板顯示器之玻璃基板所要求之上述特性 (TFT之破壞之抑制及輕量化)較為困難,故而較佳為將失 透溫度設為1050°C~1250°C。 此處,若將熔融玻璃於失透溫度附近長時間保持,則熔 融玻璃中析出晶體,發生失透》因此,流過成形體310之 壁面近處之熔融玻璃的溫度必需保持高於失透溫度《因 此’要求:自成形體3 10流下之熔融玻璃分離後,使熔融 玻璃之溫度接近失透溫度,進而藉由將熔融玻璃之溫度急 速冷卻以使熔融玻璃不發生失透。即,流過成形體3丨〇之 壁面近處之熔融玻璃的溫度較佳為高出失透溫度1〇〇Ca 上,進而較佳為高出20°C以上。藉由使其高出失透溫度 10°C以上’而即便自成形體310之支撐磚產生散熱而於熔 融玻璃之溫度上產生不均,或即便藉由因自支撐磚溶出成 分而產生之玻璃組成之不均而導致產生失透溫度之不均, 亦可充分抑制失透發生》 如上所述,於製造玻璃板作為液晶顯示器或者有機 不器等平板顯不器之玻璃基板之情形時,較佳為使失透溫 度達到1050 C〜1250°C之高溫,因此必需使玻璃基板製造 中之成形體310之溫度亦達到1〇5〇t〜135〇<t。此處,使成 163250.doc -22·5~250/〇, MgO 〇~1〇〇/0, CaO 0~20%, SrO 0~20%, BaO 0~10%, RO 5~20% (where r is selected from Mg, Ca, Sr And at least one of all the components contained in the glass plate of Ba). Further, in the case where the glass plate is used for a glass substrate of a flat panel display, it is preferably an alkali-free viewpoint from the viewpoint of suppressing destruction of a TFT (Thin Film Transistor) formed in a glass substrate of a flat panel display. Glass (glass that is substantially free of alkali metal components). On the other hand, in order to improve the meltability of the glass, an alkali metal component may be contained in a small amount. In this case, it is preferred to contain R'O in an amount of more than 0.05% and not more than 2.0% (wherein R is at least one selected from the group consisting of Li, Na, and K), and more preferably R'2〇 is contained in an amount of more than 0.1% and not more than 2.0%. Further, as a clarifying agent, it is preferable that substantially no As2〇3 and PbO are contained. Further, it is preferred that the clarifying agent' contains at least tin oxide. Further, it is further preferred that the content of the iron oxide in the glass is 0.01 to 0.2%. For the weight reduction of the flat panel display, it is preferable that SrO + BaO is 〇~1〇〇/0. Further, in addition to the viewpoint of weight reduction, it is preferable that BaO is 0 to 2% by weight in consideration of environmental load. By setting the glass composition of the glass plate to the above-described composition range, it is possible to produce a glass 163250 which satisfies the characteristics required for the glass substrate of a flat panel display such as a liquid crystal display or an organic EL display (suppression and weight reduction of the TFT). .doc 201247561 Glass plate. More specifically, a glass plate having a strain point of 65 〇r or more can be realized. Further, a glass plate having a density of 2.6 g/cm3 or less can be realized. Further, a glass plate having a Young's modulus of 70 GPa or more can be realized. Further, a glass plate having a devitrification temperature of 125 〇t: or less can be realized. A glass plate having a devitrification temperature of 1250 ° C or less can be produced by an overflow down-draw method. However, since it is difficult to achieve the devitrification temperature of less than 1050 ° C and satisfy the above-mentioned characteristics (suppression and weight reduction of destruction of the TFT) required for the glass substrate of the flat panel display, it is preferable to set the devitrification temperature to 1050 ° C. ~1250 °C. When the molten glass is held in the vicinity of the devitrification temperature for a long period of time, crystals are precipitated in the molten glass and devitrification occurs. Therefore, the temperature of the molten glass flowing near the wall surface of the molded body 310 must be kept higher than the devitrification temperature. Therefore, it is required that after the molten glass flowing down from the molded body 3 10 is separated, the temperature of the molten glass is brought close to the devitrification temperature, and the temperature of the molten glass is rapidly cooled to prevent devitrification of the molten glass. Namely, the temperature of the molten glass flowing near the wall surface of the molded body 3 is preferably higher than the devitrification temperature 1 〇〇 Ca, and more preferably higher than 20 °C. By making it higher than the devitrification temperature by 10 ° C or more, even if heat is generated from the support brick of the molded body 310, unevenness occurs in the temperature of the molten glass, or even if the glass is eluted by the self-supporting brick. When the composition is uneven, unevenness in devitrification temperature is generated, and devitrification can be sufficiently suppressed. As described above, when a glass plate is produced as a glass substrate of a flat panel display such as a liquid crystal display or an organic device, Preferably, the devitrification temperature is brought to a high temperature of 1050 C to 1250 ° C. Therefore, it is necessary to make the temperature of the formed body 310 in the production of the glass substrate to 1 〇 5 〇 t 135 〇 lt. Here, make 163250.doc -22·
S 201247561 形體310自常溫升溫後,使熔融玻璃開始流向成形體310 時,若熔融玻璃溫度與成形體溫度存在差異,則因該溫度 差而成形體310發生損傷。因此,較佳為預先使成形體3 1〇 升溫’但越是於製造失透溫度較高之玻璃之情形時,升溫 之溫度越大。該結果為’越容易產生上述升溫時之成形體 310之位置偏移。因此’於製造玻璃板作為失透溫度達到 1050°C〜1250°C之高溫之液晶顯示器或有機EL顯示器等平 板顯示器之玻磷基板的情形時’即便將成形體31〇升溫至 1050 C〜1350°C亦可抑制成形體310之位置偏移的本發明較 佳。 又’作為應用於太陽電池用之玻璃基板之玻璃板,例 如,可例不玻璃板以重量%表示含有以下成分者。下述括 號内之表示係各成分之較佳含有率。S 201247561 When the molten body 30 starts to flow to the molded body 310 after the temperature rises from the normal temperature, if the molten glass temperature differs from the molded body temperature, the molded body 310 is damaged by the temperature difference. Therefore, it is preferable to raise the temperature of the molded body 3 1 预先 in advance, but the temperature is higher as the temperature at which the glass having a higher devitrification temperature is produced. As a result, the positional shift of the molded body 310 at the time of the above temperature rise is more likely to occur. Therefore, when manufacturing a glass plate as a glass-phosphorus substrate of a flat panel display such as a liquid crystal display or an organic EL display having a devitrification temperature of 1050 ° C to 1250 ° C, the temperature of the molded body 31 is raised to 1050 C to 1350. The present invention which is also capable of suppressing the positional displacement of the formed body 310 is preferable. Further, as a glass plate to be applied to a glass substrate for a solar cell, for example, the glass plate may be exemplified as containing the following components by weight %. The indications in the following brackets indicate the preferred content of each component.
Si02 : 50~70%(55〜65%、57〜64%、57〜62%); AI2O3 : 5~20%(9~18%、12〜17%);Si02: 50~70% (55~65%, 57~64%, 57~62%); AI2O3: 5~20% (9~18%, 12~17%);
Na20 : 6〜30〇/〇(7〜20〇/〇、8〜18%、1〇〜15〇/〇)。 此時,亦可含有下述組成作為任意成分。Na20 : 6~30〇/〇 (7~20〇/〇, 8~18%, 1〇~15〇/〇). In this case, the following composition may be contained as an optional component.
Li20 : 〇〜8。/〇(0〜6。/。、〇〜2%、〇〜〇 6%、〇〜〇, 〇〜0.2%); B2〇3 : 0〜5%(〇〜2%、〇〜1%、。〜〇 8%); 上限 下限 下限為1%、下限為2%、上限為㈣ 為5%、上限為4。/〇);Li20 : 〇~8. /〇 (0~6./., 〇~2%, 〇~〇6%, 〇~〇, 〇~0.2%); B2〇3: 0~5% (〇~2%, 〇~1%, ~〇8%); The upper limit lower limit is 1%, the lower limit is 2%, the upper limit is (4) is 5%, and the upper limit is 4. /〇);
Mg〇:〇〜㈣(下限為1%、下限為2%、下限為州 為4%、上限為9%、上限為8%、上限為7%)·, 163250.doc •23· 201247561Mg〇: 〇~(4) (lower limit is 1%, lower limit is 2%, lower limit is state 4%, upper limit is 9%, upper limit is 8%, upper limit is 7%)·, 163250.doc •23·201247561
Ca〇 : 〇〜20%(下限為0·1%、下限為ι%、下限為2%、上 限為·、上限為5%、上限為4%、上限為3%);Ca〇 : 〇~20% (lower limit is 0·1%, lower limit is ι%, lower limit is 2%, upper limit is ·, upper limit is 5%, upper limit is 4%, upper limit is 3%);
Zr〇2 : 0〜10%(0 〜5%、〇 〜4%、〇〜1%、〇〜〇 。 尤其是,作為化學強化之覆蓋玻璃或太陽電池用玻璃 板,較佳為含有 Si02 50〜70%、A1203 5〜20%、Na20 6〜30〇/〇、K20 0〜1〇〇/0、MgO 〇〜i〇%、Ca〇 〇〜2〇%。 再者,近年來為實現平板顯*器之畫面顯示之進一步高 精細化,業界要求使用有p_Si(低溫多晶矽)·τρτ或氧化物 半導體而非a-Si(非晶矽).TFT之顯示器。此處,psi(低溫 多晶矽)TFT或氧化物半導體之形成步驟中,存在比α_Zr〇2 : 0 to 10% (0 to 5%, 〇~4%, 〇~1%, 〇~〇. In particular, as a chemically strengthened cover glass or a glass plate for a solar cell, it is preferable to contain SiO 2 50 ~70%, A1203 5~20%, Na20 6~30〇/〇, K20 0~1〇〇/0, MgO 〇~i〇%, Ca〇〇~2〇%. The display of the display is further refined, and the industry requires the use of a display having p_Si (low temperature polysilicon)·τρτ or an oxide semiconductor instead of an a-Si (amorphous germanium) TFT. Here, psi (low temperature polysilicon) In the formation step of the TFT or the oxide semiconductor, there is a ratio α_
Si.TFT之形成步驟更高溫之熱處理步驟。因此,要求形成 有P-Si«TFT或氧化物半導體之玻璃板之熱收縮率較小。為 減小熱收縮率,較佳為提高應變點,但應變點較高之玻璃 有失透溫度變高之傾向。為抑制失透而必需將成形時之熔 融破璃溫度保持高於失透溫度,因此為製造失透溫度較高 之玻璃板’必需升高成形裝置3〇〇内之環境及成形體31〇之 溫度。此處,若成形裝置3〇〇内之環境溫度變高,則於成 形體3 1 0與支撐構件之間產生變形或摩擦阻力,由此引起 容易產生成形體3 10與支撐構件之間產生間隙之問題或位 置偏移之問題。即’本發明適於例如使用有應變點為 65 5 °C以上之玻璃的玻璃板之製造。尤其是,進而適於使 用有適於P-Si.TFT或氧化物半導體之應變點為675°C以 上、應變點為68〇t以上之玻璃的玻璃板之製造,尤其適 於使用有應變點為690°C以上之玻璃的玻璃板之製造。The step of forming the Si. TFT is a heat treatment step of a higher temperature. Therefore, it is required that the glass plate on which the P-Si «TFT or the oxide semiconductor is formed has a small heat shrinkage rate. In order to reduce the heat shrinkage rate, it is preferred to increase the strain point, but the glass having a higher strain point tends to have a devitrification temperature. In order to suppress devitrification, it is necessary to maintain the temperature of the molten glass at the time of forming higher than the devitrification temperature. Therefore, in order to manufacture a glass plate having a high devitrification temperature, it is necessary to raise the environment and the molded body in the forming apparatus 3. temperature. Here, if the ambient temperature in the forming device 3 becomes high, deformation or frictional resistance is generated between the molded body 310 and the supporting member, thereby causing a gap between the formed body 3 10 and the supporting member to be easily generated. Problem or positional offset problem. That is, the present invention is suitable for the production of, for example, a glass plate having a glass having a strain point of 65 5 ° C or more. In particular, it is further suitable to use a glass plate having a strain point of 675 ° C or higher and a strain point of 68 〇 or more suitable for a P-Si. TFT or an oxide semiconductor, and is particularly suitable for use with a strain point. Manufacture of glass sheets of glass above 690 ° C.
163250.doc . 24 - S 201247561 又,本發明適於使用有失透溫度為1 l〇〇°C〜1250°C之玻 璃的玻璃板之製造’本發明更適於使用有失透溫度為 1150〜1250°C之玻璃的玻璃板之製造,進而適於使用有失 透溫度為1180〜1250°C之玻璃的玻璃板之製造,尤其適於 使用有失透溫度為1200°C〜1250。〇之玻璃的玻璃板之製 造。 於將應變點為675°C以上(或者失透溫度為115〇〜i250t:) 之玻璃用於玻璃板之情形時,作為玻璃組成,例如,可例 示玻璃板以重量%表示含有以下成分者。以下所示之%為 重量%。 含有 Si02 52〜78%、Al2〇3 3〜25%、B2〇3 3〜15%、及 RO(其中’ R係選自Mg、Ca、Sr及Ba之玻璃板所含有之全 部成分中之至少一種)3-20%,重量比(Si〇2 + A1203)/B203 處於7〜20之範圍内。 進而’為進一步提高應變點,較佳為重量比(si〇2 + AhOO/RO為7.5以上。進而,為提高應變點,較佳為將β_ OH值設為0.1〜〇,3 mme進而’就抑制TFT之破壞之觀點而 言’較佳為無鹼玻璃(實質上不含鹼金屬成分之玻璃)。另 一方面’於熔解時為使電流流向熔解槽201而非玻璃,亦 可含有R2〇(其中’ R係選自Li、Na及K之玻璃板所含有之 全部成分中之至少一種)〇 〇1〜〇 8%而使玻璃之比電阻降 低°或者’為使玻璃之比電阻降低,較佳為含有0.01〜1 % 之Fe2〇3 °進而’為實現較高之應變點並且防止失透溫度 之上升’較佳為使Ca0/R0為0.65以上。又,藉由使失透溫 163250.doc •25· 201247561 度為1250。〇以下,而可應用溢流下拉法。又,若考慮玻璃 板應用於行動通訊終端等行動設備,則就輕量化之觀點而 言較佳為SrO及BaO之共計含量為0%以上且未達2%。 (各成分)163250.doc. 24 - S 201247561 Further, the present invention is suitable for the manufacture of a glass plate having a glass having a devitrification temperature of 1 l ° ° C to 1250 ° C. The present invention is more suitable for use with a devitrification temperature of 1150. The production of a glass plate of ~1250 ° C glass is further suitable for the production of a glass plate having a glass having a devitrification temperature of 1180 to 1250 ° C, and is particularly suitable for use with a devitrification temperature of 1200 ° C to 1250. The glass plate of the glass of enamel is made. In the case of using a glass having a strain point of 675 ° C or higher (or a devitrification temperature of 115 〇 to 150 t:), the glass composition may, for example, be a glass plate containing the following components in weight %. The % shown below is % by weight. Containing SiO 2 52 to 78%, Al 2 〇 3 3 to 25%, B 2 〇 3 3 to 15%, and RO (where R is selected from all of the components contained in the glass plates of Mg, Ca, Sr, and Ba) One) 3-20%, the weight ratio (Si〇2 + A1203) / B203 is in the range of 7~20. Further, in order to further increase the strain point, it is preferably a weight ratio (si 〇 2 + Ah OO / RO is 7.5 or more. Further, in order to increase the strain point, it is preferable to set the β OH value to 0.1 〇, 3 mme and then ' From the viewpoint of suppressing the destruction of the TFT, 'it is preferably an alkali-free glass (a glass substantially free of an alkali metal component). On the other hand, in order to cause a current to flow to the melting tank 201 instead of glass during melting, R2 may be contained. (wherein 'R is at least one selected from the group consisting of all of the components of the glass plates of Li, Na, and K) 〇〇1 to 〇8% to lower the specific resistance of the glass or to reduce the specific resistance of the glass. Preferably, it contains 0.01 to 1% of Fe 2 〇 3 ° and thus 'to achieve a higher strain point and prevent an increase in devitrification temperature' is preferably such that Ca0/R0 is 0.65 or more. Further, by devitrification temperature 163250 .doc •25· 201247561 degrees is 1250. The following can be applied to the overflow down-draw method. Also, considering the use of glass plates for mobile devices such as mobile communication terminals, SrO and BaO are preferred from the viewpoint of weight reduction. The total content is 0% or more and less than 2%. (Ingredients)
Si〇2為構成玻璃板之玻璃之骨架的成分,具有提高玻璃 之化學耐久性與耐熱性之效果。於Si02之含有率過低之情 形時無法充分獲得化學耐久性與耐熱性之效果,若si02之 含有率過高則容易引起玻璃失透,難以成形,並且黏性上 升,玻璃之均質化變得困難。Si〇2 is a component of the skeleton of the glass constituting the glass plate, and has an effect of improving the chemical durability and heat resistance of the glass. When the content of SiO 2 is too low, the effect of chemical durability and heat resistance cannot be sufficiently obtained. If the content of SiO 2 is too high, the glass is devitrified, it is difficult to form, and the viscosity is increased, and the homogenization of the glass becomes difficult.
Al2〇3為構成玻璃之骨架之成分,具有提高玻璃之化學 耐久性與耐熱性之效果。又,具有提高蝕刻速度之效果。 於八丨2〇3之含有率過低之情形時無法充分獲得玻璃之化學 耐久性與耐熱性之效果。另一方面,若Ai2〇3之含有率過 南’則玻璃之黏性上升而難以熔解,並且耐酸性降低。 B2〇3為降低玻璃之黏性、促進玻璃之熔解及澄清之成 为°若B2〇3之含有率過低,則玻璃之耐酸性降低玻璃之均 質化變得困難。Al2〇3 is a component constituting the skeleton of the glass and has an effect of improving the chemical durability and heat resistance of the glass. Moreover, it has an effect of increasing the etching rate. When the content of gossip 2〇3 is too low, the chemical durability and heat resistance of the glass cannot be sufficiently obtained. On the other hand, if the content ratio of Ai2〇3 is too large, the viscosity of the glass rises and it is difficult to melt, and the acid resistance is lowered. B2〇3 is to reduce the viscosity of the glass and promote the melting and clarification of the glass. If the content of B2〇3 is too low, the acid resistance of the glass is lowered and the homogenization of the glass becomes difficult.
MgO及CaO為降低玻璃之黏性、促進玻璃之熔解及澄清 之成分。又,於鹼土金屬中,由於Mg及Ca使玻璃之密度 上升之比率較小,故而為用於使所得之玻璃輕量化並且提 向熔解性之有利之成分。但,若其MgO及CaO之含有率過 咼’則玻璃之化學耐久性降低。MgO and CaO are components that reduce the viscosity of the glass and promote the melting and clarification of the glass. Further, in the alkaline earth metal, since Mg and Ca increase the ratio of the density of the glass to a small extent, it is an advantageous component for making the obtained glass lighter and improving the meltability. However, if the content of MgO and CaO exceeds 咼', the chemical durability of the glass is lowered.
SrO及BaO為降低玻璃之黏性、促進玻璃之熔解及澄清 之成分。又’亦為提高玻璃原料之氧化性而提高澄清性之 163250.docSrO and BaO are components that reduce the viscosity of the glass and promote the melting and clarification of the glass. Also, to improve the oxidizability of glass raw materials and improve clarification. 163250.doc
S • 26 · 201247561 成分。但,若SrO及BaO之含有率過高,則玻璃之密度上 升,無法實現玻璃板之輕量化,且玻璃之化學耐久性降 低。S • 26 · 201247561 Ingredients. However, when the content ratio of SrO and BaO is too high, the density of the glass rises, the weight of the glass sheet cannot be reduced, and the chemical durability of the glass is lowered.
Li2〇為降低玻璃之黏度、提高玻璃之熔解性及成形性之 成分。又,LhO為提高玻璃之揚氏模數之成分。然而,若Li2 is a component that lowers the viscosity of the glass and improves the meltability and formability of the glass. Further, LhO is a component that increases the Young's modulus of the glass. However, if
LhO之含有率過高’則玻璃容易失透,因此難以應用下拉 法。If the content of LhO is too high, the glass is easily devitrified, so it is difficult to apply the pull-down method.
Na20及K20為降低玻璃之高溫黏度、提高玻璃之炫融性 或成形性之成分。又’為改善玻璃之耐失透性之成分。於 Na2〇或Κ2〇之含有率過低之情形時玻璃之熔解性降低,用 於熔解之成本升高。又,由於容易引起玻璃失透且耐失透 性亦降低,故而難以應用使玻璃溢出之下拉法。另一方 面,若Na2〇或Κ2〇之含有率過高,則亦會產生由於玻璃平 衡變差而導致之耐失透性降低。 再者,Li20、Na20、Κ20為有自玻璃溶出而使TFT特性 劣化之虞、且有增大玻璃之熱膨脹係數而於熱處理時使基 板破損之虞的成分’因此於用作平板顯示器之玻璃基板 (例如’液晶顯示器之玻璃基板、有機LE顯示器之玻璃基 板)之情形時’大量含有之情況欠佳,而應將其總量限制 於2.0重量。/〇以下。然而,於玻璃中含有特定量之上述成 分’藉此’可將TFT特性之劣化或玻璃之熱膨脹抑制於一 疋範圍内’並且可提高玻璃之驗性度,使價數變化之金屬 之氧化變得容易,且使澄清性得以發揮。Na20 and K20 are components that lower the high-temperature viscosity of glass and improve the glare or formability of glass. Also, it is a component for improving the resistance to devitrification of glass. When the content of Na2〇 or Κ2〇 is too low, the meltability of the glass is lowered, and the cost for melting is increased. Further, since the glass is devitrified and the devitrification resistance is also lowered, it is difficult to apply a method of pulling the glass under the overflow. On the other hand, if the content of Na2〇 or Κ2〇 is too high, there is a decrease in resistance to devitrification due to deterioration of the glass balance. In addition, Li20, Na20, and Κ20 are components which are degraded from the glass and deteriorate the TFT characteristics, and have a coefficient of increase in thermal expansion coefficient of the glass to break the substrate during heat treatment. Therefore, it is used as a glass substrate for a flat panel display. (For example, in the case of 'glass substrate for liquid crystal display, glass substrate for organic LE display), 'the case of a large amount is not good, and the total amount should be limited to 2.0% by weight. /〇The following. However, the glass contains a specific amount of the above-mentioned component 'by this', which can degrade the deterioration of the TFT characteristics or the thermal expansion of the glass within a range of ', and can improve the degree of inspection of the glass, and the oxidation of the metal having a valence change becomes Easy and clarifying.
Zr〇2為提高玻璃之失透溫度附近之黏性或應變點之成 163250.doc -27· 201247561 分。又’ Zr〇2亦為提高玻璃之耐熱性之成分。然而,若Zr〇2 is to increase the viscosity or strain point near the devitrification temperature of the glass. 163250.doc -27· 201247561 points. Further, Zr〇2 is also a component for improving the heat resistance of glass. However, if
Zr〇2之含有率過高,則失透溫度上升,耐失透性降低。When the content ratio of Zr〇2 is too high, the devitrification temperature rises and the devitrification resistance decreases.
Ti〇2為降低玻璃之高溫黏度之成分。然而,若Ti〇2之含 有率過高,則耐失透性降低。進而,玻璃發生著色,用作 電子設備之顯不畫面之覆蓋玻璃等欠佳。又,因玻璃發生 著色而紫外線穿透率降低’因此於進行使用紫外線硬化樹 脂之處理之情形時,產生無法充分使紫外線硬化樹脂硬化 之不良情況。 於玻璃板之玻璃原料中,可添加澄清劑作為使玻璃中之 氣泡消泡之成分。作為澄清劑,只要為環境負荷較小、玻 璃之澄清性優異者,則並無特別限制,例如,可列舉選自 氧化錫、氧化鐵、氧化鈽、氧化铽、氧化鉬及氧化鎢等金 屬氧化物中之至少一種。 此處,液晶顯示器或有機EL顯示器等平板顯示器之玻璃 基板中對於泡之要求特別嚴格。因此,作為用於玻璃板之 製造之澄清劑,較佳為至少合右窃& μ 1碑主〆3有氧化錫、氧化鐵、氧化 筛氧化# &化翻及氧化鎢等金屬氧化物中澄清效果尤 高之氧化錫。 再者,AS2〇3、Sb2〇3及pb〇係於熔融玻璃中發生伴隨價 數變化之反應、具有澄清玻璃之效果的物質,但由於Ti〇2 is a component that lowers the high temperature viscosity of the glass. However, if the content of Ti〇2 is too high, the devitrification resistance is lowered. Further, the glass is colored, and it is not preferable as a cover glass for displaying an image of an electronic device. In addition, when the glass is colored, the ultraviolet ray transmittance is lowered. Therefore, when the treatment with the ultraviolet ray-curable resin is performed, the ultraviolet ray-curable resin is not sufficiently cured. A clarifying agent may be added to the glass raw material of the glass plate as a component for defoaming bubbles in the glass. The clarifying agent is not particularly limited as long as it has a small environmental load and excellent clarification of the glass, and examples thereof include metal oxides selected from the group consisting of tin oxide, iron oxide, cerium oxide, cerium oxide, molybdenum oxide, and tungsten oxide. At least one of them. Here, the requirements for bubbles in the glass substrate of a flat panel display such as a liquid crystal display or an organic EL display are particularly strict. Therefore, as a clarifying agent for the manufacture of a glass plate, it is preferred that at least the right thief & μ 1 monument main 〆 3 has tin oxide, iron oxide, oxidized sieve oxidation # & A tin oxide with a particularly high clarification effect. Further, AS2〇3, Sb2〇3, and pb〇 are substances which react with the change in the valence and have the effect of clarifying glass in the molten glass, but
As2〇3、Sb2〇3及Pb〇為環境負荷較大之物質,故而於本實 施形態之玻璃板中’破射實質上不含AS2〇3'Sb2〇3及 抑〇。再者,於本說明書中,所謂實質上不含As2〇3、 Sb203及Pb〇 ’係指未達G G1 %重量且除雜質以外有意識地 163250.doc 201247561 使不含有。 (8)特徵 (8-1) 先前’成形體中,為應對由自重或高溫之溶融玻璃之重 量等引起之蠕變而支撐下端部之情況較多。例如,於專利 文獻1(日本專利第4193115號公報)所揭示之發明中,於流 量調節構造體(相當於成形體)之長度方向之兩側端的下端 部分別配置有用以支撐流量調節構造體之支撐構件。並 且’藉由加壓裝置對其中一端之支撐構件進行加壓。 此處,一般而言,由於供給至成形體之熔融玻璃為約 1000C〜1400C之尚溫,故而若於不使成形體31〇升溫之狀 態下使炼融玻璃開始流向成形體3 10,則由於溶融玻璃與 成形體3 10之溫度差而成形體3 10發生損傷。因此,使成形 體之啟動後對成形體之周邊之溫度升溫。然而,有藉由加 壓裝置對支撐構件之加壓、成形體之周邊之溫度之升溫, 而成形體之位置偏移並由此導致平板玻璃之搬送路徑發生 偏移之虞。因此,擔心所承受之來自親(冷卻觀及傳送輥) 之牽引力不均,玻璃板之品質降低。 又’近年來,使用下拉法所製造之玻璃板有薄型化之傾 向。此處,玻璃板越薄,越容易因較小之應力而產生變 形。因此,玻璃板越薄,由上述成形體之位置偏移而導致 之玻璃板之變形的問題越顯著。 因此,本實施形態中,控制裝置中,於使成形體310之 周邊溫度升溫前,沿一個方向對成形體3 10進行推壓(相當 163250.doc •29· 201247561 於推壓步驟)。具體而言,控制裝置藉由控制加壓裝置 422,而將成形體310向一個方向推壓。更具體而言,將成 形體310向長度方向推壓。此時,加壓裝置422藉由將第2 支撐構件420向成形體310側加壓,而對第1支撐構件41〇及 第2支撐構件420施加荷重(施加荷重)。然後,藉由加壓裝 置422而加壓之第2支撐構件420推壓成形體310之長度方向 之兩側端。藉此’經由第1支撐構件41〇及第2支撐構件 420,對由成形體3 1 〇之升溫而引起之相對之位置偏移進行 規制,甚至固定成形體310»尤其是,藉由推壓成形體31〇 之長度方向之兩側端的下方部分,而可抑制成形體31〇之 下方部分之蠕變。 於是’控制裝置於藉由加壓裝置422而對第2支撐構件 420加壓並對第1支撐構件410及第2支撐構件420施加荷重 的狀態(即,推壓成形體310之狀態)下,藉由第2加熱器380 使成形體310之周邊溫度升溫(相當於升溫步驟)。藉由沿成 形體310之長度方向推壓成形體310,而可有效地抑制由成 形體310之升溫而引起之位置偏移。 本實施形態中,藉由對第1支撐構件410及第2支揮構件 420施加朝向成形體31〇之方向之荷重,而首先對第1支樓 構件410及第2支撐構件420之動作進行規制。然後,藉由 對該種狀態之第1支撐構件410及第2支撐構件420施加自成 形體3 10之外側朝向成形體3 10側之荷重,而經由第1支撑 構件41 0及第2支撐構件4 2 0對成形體3 10之長度方向之兩側 端的下方部分(甚至成形體3 10整體)之位置偏移(由成形體As2〇3, Sb2〇3, and Pb〇 are substances having a large environmental load, and therefore, in the glass plate of the present embodiment, the shot is substantially free of AS2〇3'Sb2〇3 and suppressed. Further, in the present specification, the term "As2〇3, Sb203, and Pb〇' is not substantially contained, and means that the weight is not up to G1% and is intentionally 163250.doc 201247561. (8) Characteristics (8-1) In the prior art, the lower end portion is often supported in order to cope with creep caused by the weight of the molten glass of its own weight or high temperature. For example, in the invention disclosed in the patent document 1 (Japanese Patent No. 4193115), the lower end portions of the both ends of the flow regulating structure (corresponding to the molded body) in the longitudinal direction are respectively disposed to support the flow regulating structure. Support member. And the support member at one end thereof is pressurized by a pressurizing means. Here, in general, since the molten glass supplied to the molded body is at a temperature of about 1000 C to 1400 C, the molten glass starts flowing to the molded body 3 10 without heating the molded body 31 则, because The molten glass is inferior to the temperature of the formed body 3 10 and the molded body 3 10 is damaged. Therefore, the temperature of the periphery of the molded body is raised after the start of the formed body. However, there is a pressurization of the support member by the pressurizing means, and the temperature of the periphery of the molded body is raised, and the position of the formed body is shifted, thereby causing the transfer path of the flat glass to be displaced. Therefore, it is feared that the traction force from the pro (cooling view and the conveying roller) is uneven, and the quality of the glass plate is lowered. Further, in recent years, the glass plate produced by the down-draw method has a tendency to be thinner. Here, the thinner the glass sheet, the easier it is to deform due to the small stress. Therefore, the thinner the glass sheet, the more significant the problem of deformation of the glass sheet caused by the positional displacement of the above-mentioned molded body. Therefore, in the present embodiment, the control device presses the molded body 3 10 in one direction before the temperature of the periphery of the molded body 310 is raised (corresponding to 163250.doc • 29·201247561 in the pressing step). Specifically, the control device pushes the formed body 310 in one direction by controlling the pressurizing device 422. More specifically, the shaped body 310 is pressed in the longitudinal direction. At this time, the pressurizing device 422 applies a load (application load) to the first support member 41A and the second support member 420 by pressurizing the second support member 420 toward the molded body 310 side. Then, the second support member 420 pressurized by the pressurizing means 422 presses both ends of the molded body 310 in the longitudinal direction. Thereby, the relative positional displacement caused by the temperature rise of the molded body 3 1 is regulated by the first support member 41 and the second support member 420, and even the molded body 310 is fixed, in particular, by pushing The lower portion of both ends of the molded body 31 in the longitudinal direction of the molded body 31 can suppress the creep of the lower portion of the molded body 31. Then, the control device pressurizes the second support member 420 by the pressurizing device 422 and applies a load to the first support member 410 and the second support member 420 (that is, a state in which the molded body 310 is pressed). The temperature of the periphery of the molded body 310 is raised by the second heater 380 (corresponding to the temperature increasing step). By pressing the formed body 310 in the longitudinal direction of the formed body 310, the positional deviation caused by the temperature rise of the shaped body 310 can be effectively suppressed. In the present embodiment, by applying the load to the first support member 410 and the second support member 420 in the direction of the molded body 31, the operation of the first branch member 410 and the second support member 420 is first regulated. . Then, the first support member 410 and the second support member 420 in this state are applied with load from the outer side of the molded body 3 10 toward the molded body 3 10 side, and pass through the first support member 41 0 and the second support member. Positional deviation of the lower portion of both sides of the longitudinal direction of the formed body 3 10 (even the entire molded body 3 10) is offset by the formed body
I63250.doc .30- S 201247561 310之升溫而引起之相對之位置偏移)進行規制,甚至固定 成形體310。並且’由於在該狀態下使成形體3 10之周邊溫 度升溫’故而可抑制包括成形體3 1〇之傾斜之位置偏移。 此處’若發生成形體之位置偏移,則擔心至少以下之影 響。首先’平板玻璃之成形時,平板玻璃之正反面或寬度 方向之溫度分佈產生不均,容易產生平板玻璃之板厚之不 均(板厚偏差)。若產生平板玻璃之板厚之不均,則該流下 之熔融玻璃或者平板玻璃與包覆成形體等之爐之爐壁或加 熱器的距離偏離預想之距離。因此,於平板玻璃之寬度方 向上’產生實際之平板玻璃之溫度與基準溫度(將成形體 设置於理想之位置之情形時的玻璃板之溫度)之差。該種 情形時’有時於緩冷步驟(本實施形態中,相當於藉由傳 送輥350a〜350h將平板玻璃向下方牵引之步驟)中,亦會對 平板玻璃之寬度方向之溫度的控制產生影響。因此,擔心 無法充分除去玻璃板之内部應變。又,由於預想之平板玻 璃之搬送路徑發生偏移’故而擔心平板玻璃所受之來自傳 送輥之牵引力變得不穩定而玻璃板發生翹曲。進而,擔心 於成形體下端之熔融玻璃之貼合產生異常。 再者’作為產生之成形體之位置偏移,例如,可預想成 形體之第1方向之上游側與下游側之任一側發生偏移,與 配置於下方之各種輥形成「扭轉」之位置關係。於該種情 形時,如上所述,設置於下方之加熱器或輥等與平板玻璃 的位置關係與成形體處於正規之位置之情形時相比發生偏 移’因此擔心平板玻璃之溫度分佈產生不均。 I63250.doc 31 201247561 另一方面,本實施形態中,由於可抑制成形體31〇之位 置偏移,故而可維持玻璃板之品質。即,可抑制包括玻璃 板之板厚偏差或者勉曲之變形。 如上所述之成形體之位置偏移係起因於例如:若成形體 之周邊之溫度升高,則為應對成形體之螺變而配置之支撐 構件或成形體會膨脹。此時,預想由於支撐構件與成形體 之間產生之摩擦阻力或變形而發生成形體之位置偏移。 且,預想若於該狀態下藉由加壓裝置對支撐構件加壓,則 發生成形體傾斜等位置偏移。 一般而言,成形體310所使用之磚較佳為不僅具有耐火 性•耐熱性並且含有可抑制蠕變之Zr〇2等的成形體專用 碑’另一方面,包括第1支撐構件41〇及第2支撐構件420之 支撐構件所使用之碑較佳為具有耐火性•财熱性之磚^例 如,若於由成形體3 10之加熱而引起膨脹時無規制,則成 形體310與支撐構件可自由地、個別地移動,而成形體31〇 與支樓構件之間產生變形或摩擦阻力,因此產生成形體 3 1〇與支撐構件之間產生間隙之問題,或產生位置偏移之 問題°另一方面’若以如本實施形態之方式於成形體3 i 〇 之加熱前沿一個方向、較佳為沿長度方向對成形體31〇進 行加壓’則成形體31 〇與支撐構件成為一體而可維持形體 310與支樓構件之間之接觸面’因此可規制膨脹方向。 另一方面’本實施形態中,如上述之方式,藉由對第1 支撑構件410及第2支撐構件420施加朝向成形體310之方向 之荷重’而經由第1支撐構件410及第2支撐構件420對由成 I63250.doc -32- 201247561 形體310之升溫而引起之相對之位置偏移進行規制,甚至 固定成形體310。且,由於在該狀態下使成形體310之周邊 溫度升溫,故而可抑制包括成形體3 1 〇之傾斜之位置偏 移。 (8-2) 成形體310之周邊溫度之升溫速度為5°C〜30°C/h ^藉 此,抑制成形體310之破損,且可抑制玻璃板之生產性之 降低。 再者,成形體3 10之周邊溫度之升溫速度更理想為 5〜20°C/h ’進而較佳為5〜15°C/h ,進而較佳為 6°C〜10°C/h。該種情形時,可進一步減少成形體310之破 損之虞,並且可提高玻璃板之生產性。 (8-3) 本實施形態中,藉由加壓裝置422對第2支撐構件420進 行加壓,而對第1支撐構件410及第2支撐構件420施加荷 重。 此處,可藉由使用氣缸等加壓裝置422,而輕易地對第1 支撐構件410及第2支撐構件420施加荷重。 (9)變形例 以上,已基於圖式對本發明之實施形態進行說明,具體 之構成並不限於上述實施形態,可於不偏離發明之主旨之 範圍内進行變更。I63250.doc .30 - S 201247561 310 relative temperature shift caused by the temperature rise) is regulated and even the shaped body 310 is fixed. Further, since the temperature of the periphery of the molded body 3 10 is raised in this state, the positional deviation including the inclination of the molded body 3 1〇 can be suppressed. Here, if the positional displacement of the molded body occurs, there is a fear that at least the following influence will occur. First, when the flat glass is formed, the temperature distribution in the front and back or the width direction of the flat glass is uneven, and unevenness (thickness deviation) of the flat glass is likely to occur. If the thickness of the flat glass is uneven, the distance between the molten glass or the flat glass which flows down and the furnace wall or the heater of the coated body or the like is deviated from the expected distance. Therefore, the difference between the temperature of the actual flat glass and the reference temperature (the temperature of the glass sheet when the formed body is placed at the desired position) is generated in the width direction of the flat glass. In this case, in some cases, in the slow cooling step (in the present embodiment, the step of pulling the flat glass downward by the conveying rollers 350a to 350h), the temperature in the width direction of the flat glass is also controlled. influences. Therefore, there is a fear that the internal strain of the glass sheet cannot be sufficiently removed. Further, since the transport path of the flat glass is expected to shift, it is feared that the traction force from the transfer roller of the flat glass becomes unstable and the glass plate warps. Further, there is a concern that the bonding of the molten glass at the lower end of the molded body is abnormal. In addition, as the positional displacement of the molded body to be produced, for example, it is expected that the upstream side and the downstream side of the first direction of the molded body are shifted, and the respective rolls disposed below are formed to be "twisted". relationship. In this case, as described above, the positional relationship between the heater or the roller disposed below and the flat glass is offset from that in the case where the molded body is in the normal position. Therefore, it is feared that the temperature distribution of the flat glass does not occur. All. I63250.doc 31 201247561 On the other hand, in the present embodiment, since the displacement of the molded body 31 is suppressed, the quality of the glass plate can be maintained. Namely, it is possible to suppress the variation in the thickness of the glass sheet or the distortion of the sheet. The positional displacement of the molded body as described above is caused by, for example, when the temperature of the periphery of the molded body is increased, the support member or the molded body disposed to cope with the deformation of the molded body expands. At this time, it is expected that the positional displacement of the molded body occurs due to frictional resistance or deformation generated between the support member and the formed body. Further, it is expected that when the support member is pressurized by the pressurizing device in this state, positional displacement such as inclination of the molded body occurs. In general, the brick used for the molded body 310 is preferably a molded article special not only having fire resistance and heat resistance but also containing Zr 〇 2 which can suppress creep, and the like, and includes the first support member 41 and The monument used for the support member of the second support member 420 is preferably a brick having fire resistance and heat resistance. For example, if it is irregularly caused by expansion by heating of the formed body 3 10, the formed body 310 and the support member may be Freely and individually moving, and deformation or frictional resistance occurs between the formed body 31〇 and the branch member, thereby causing a problem of a gap between the formed body 3 1〇 and the support member, or a problem of positional displacement. On the other hand, if the molded body 31 is pressed in one direction, preferably in the longitudinal direction, in the heating front of the molded body 3 i as in the embodiment, the molded body 31 is integrated with the support member. Maintaining the contact surface between the body 310 and the branch member's can thus regulate the direction of expansion. On the other hand, in the above-described embodiment, the load is applied to the first support member 410 and the second support member 420 in the direction of the molded body 310, and the first support member 410 and the second support member are passed through the first support member 410 and the second support member. 420 regulates the relative positional shift caused by the temperature rise of the shape of I63250.doc -32 - 201247561, and even fixes the formed body 310. Further, since the temperature of the periphery of the molded body 310 is raised in this state, the positional deviation including the inclination of the molded body 3 1 〇 can be suppressed. (8-2) The temperature rise rate of the peripheral temperature of the molded body 310 is 5 ° C to 30 ° C / h. Thereby, the breakage of the molded body 310 is suppressed, and the productivity of the glass sheet can be suppressed from being lowered. Further, the temperature rise rate of the peripheral temperature of the molded body 3 10 is more preferably 5 to 20 ° C / h ' and further preferably 5 to 15 ° C / h, more preferably 6 ° C to 10 ° C / h. In this case, the breakage of the formed body 310 can be further reduced, and the productivity of the glass sheet can be improved. (8-3) In the present embodiment, the second support member 420 is pressurized by the pressurizing device 422, and a load is applied to the first support member 410 and the second support member 420. Here, the first support member 410 and the second support member 420 can be easily loaded by using the pressurizing device 422 such as an air cylinder. (9) Modifications The embodiments of the present invention have been described above based on the drawings, and the specific configuration is not limited to the above-described embodiments, and modifications may be made without departing from the scope of the invention.
(9-1)變形例1A 圖6係本變形例1A之成形體310之概略前視圖。 163250.doc •33· 201247561 上述實施形態中,已對藉由加壓裝置對第1支撐構件410 及第2支撐構件420之一者加壓進行說明,但並不限定於 此’亦可藉由加壓裝置對第1支撐構件410及第2支撐構件 420兩者均進行加壓》 如圖6所示’該種情形時,於第1支撐構件410之附近, 隔著板構件411亦配置有加壓裝置412。 並且,第1支撐構件410及第2支撐構件420係分別藉由加 壓裝置412、422而向成形體3 10側推壓(如圖6所示之箭頭 P3、P2) 藉此,對由成形體310之升溫而引起之相對之位 置偏移進行規制,甚至固定成形體310。因此,於該種情 形時亦可抑制成形體310之位置偏移》(9-1) Modification 1A FIG. 6 is a schematic front view of a molded body 310 of the modification 1A. 163250.doc •33·201247561 In the above embodiment, one of the first support member 410 and the second support member 420 is pressurized by the pressurizing device, but the present invention is not limited thereto. The pressurizing device pressurizes both the first support member 410 and the second support member 420. As shown in Fig. 6, in this case, in the vicinity of the first support member 410, the plate member 411 is also disposed. Pressurizing device 412. Further, the first support member 410 and the second support member 420 are pressed toward the molded body 3 10 by the pressurizing devices 412 and 422, respectively (arrows P3 and P2 shown in FIG. 6). The relative positional shift caused by the temperature rise of the body 310 is regulated, and even the formed body 310 is fixed. Therefore, the positional shift of the formed body 310 can also be suppressed in the case of the case.
(9-2)變形例1B 圖7係本變形例1B之成形體310之概略前視圖。 例如’於將如第1支撐構件410或第2支撐構件420之支撐 成形體3 10之支稽構件載置於載置構件上之情形時,預想 由於支撐構件與載置構件之間產生之摩擦阻力或變形,而 導致產生支撐構件之位置偏移。且,若於該狀態下藉由加 壓裝置對支撐構件進行加壓,則擔心產生成形體傾斜等位 置偏移^ 此處’所謂載置構件,為實現載置支撐構件之功能者即 可’例如’可為地板’亦可為如圖7所示之塊狀構件6U、 612。再者’亦可配置複數之塊狀構件611、612。 然而,即便於該種情形時’若藉由採用與上述實施形態 相同之構成•方法而於成形體310加熱前沿一個方向、較佳(9-2) Modification 1B FIG. 7 is a schematic front view of a molded body 310 of the modification 1B. For example, when a member such as the support member 310 of the first support member 410 or the second support member 420 is placed on the mounting member, the friction between the support member and the mounting member is expected. Resistance or deformation causes a displacement of the support member. When the support member is pressurized by the pressurizing device in this state, there is a concern that a positional displacement such as a tilt of the molded body may occur. Here, the so-called mounting member may be a function of mounting the supporting member. For example, 'may be a floor' may also be a block member 6U, 612 as shown in FIG. Further, a plurality of block members 611 and 612 may be disposed. However, even in such a case, it is preferable to heat the leading edge in one direction, preferably by using the same configuration and method as the above embodiment.
163250.doc _Μ· S 201247561 為沿長度方向對成形體310進行加壓,則成形體310與支樓 構件成為一體而可維持成形體3 10與支撐構件之間之接觸 面’因此可規制膨脹方向。即,於經由第〗支撐構件41〇及 第2支撐構件42〇對由成形體31〇之升溫而引起之相對之位 置偏移進行規制、甚至固定成形體31〇的狀態下,使周邊 溫度升溫,因此可抑制成形體3 10之位置偏移,且可維持 玻璃板之品質’即’可防止由玻璃板之翹曲、内部應變而 引起之變形之增大,進而可防止產生傷痕。因此,本發明 亦可用於該種情形。 再者’本變形例中,成形體310所使用之磚較佳為不僅 具有耐火性•耐熱性且含有可抑制蠕變之Zr〇2等的成形體 專用磚,另一方面,包括第1支撐構件410及第2支撐構件 42〇之支撐構件、進而塊狀構件611、612所使用之磚較佳 為具有耐火性•耐熱性之磚。 (9-3)變形例ic 上述實施形態中,已說明支撐成形體310之構件為第1支 樓構件410與第2支撐構件420兩者,但並不限定於此,亦 可為此以上。又,第1支撐構件410與第2支撐構件420亦可 為一體性構成者。 (9-4)變形例id 除上述實施形態以外,例如,亦可預先算出成形體 310、第1支撐構件410、及第2支撐構件420之膨脹量,減 少作為加壓裝置而使用之氣缸之活塞的移動距離。 (9-5)變形例1Ε 163250.doc -35· 201247561 上述實施形態中’使用氣缸作為加壓裝置,但並不限定 於此,可適當使用已知之加壓裝置。 [實施例] 以下,對本發明之實施例進行說明。 實施例1中’發明者於使成形體3 10之周邊溫度升溫前, 開始對成形體310經由第1支撐構件410及第2支撐構件420 進行推壓。然後’於對成形體310之推壓後,使成形體31〇 之周邊溫度以1 〇 C /h之升溫速度升溫。其後,以成為如下 所示之組成之方式,將玻璃原料熔解而製成熔融玻璃,並 進行熔融玻璃之澄清。繼而’於攪拌槽中對澄清後之炫融 破璃進行攪拌’以如上所述之方法將攪拌後之熔融玻璃供 給至經升溫之成形體310,而成形為平板玻璃。進而,切 割平板玻璃’製造厚度為0·7 mm、大小為2200 mmx25〇〇 mm之液晶顯示器用之玻璃板。再者,製造而得之顯示器 用之玻璃板的失透溫度為1170。〇,應變點為67〇°C。163250.doc _Μ· S 201247561 In order to pressurize the formed body 310 in the longitudinal direction, the formed body 310 and the branch member are integrated to maintain the contact surface between the molded body 3 10 and the support member. Therefore, the expansion direction can be regulated. . In other words, in the state where the relative displacement due to the temperature rise of the molded body 31 is regulated by the first support member 41 and the second support member 42, and the molded body 31 is fixed, the peripheral temperature is raised. Therefore, the positional displacement of the molded body 3 10 can be suppressed, and the quality of the glass sheet can be maintained, that is, the deformation caused by the warpage of the glass sheet and the internal strain can be prevented, and the occurrence of scratches can be prevented. Therefore, the present invention can also be applied to such a case. In the present modification, the brick used for the molded body 310 is preferably a molded body-dedicated brick which not only has fire resistance and heat resistance but also contains Zr 〇 2 which can suppress creep, and includes the first support. The brick used for the member 410 and the support member of the second support member 42 and the block members 611 and 612 is preferably a brick having fire resistance and heat resistance. (9-3) Modification ic In the above embodiment, the member supporting the molded body 310 has been described as both the first branch member 410 and the second support member 420. However, the present invention is not limited thereto, and may be used for the above. Further, the first support member 410 and the second support member 420 may be integrally formed. (9-4) Modification id In addition to the above-described embodiment, for example, the amount of expansion of the molded body 310, the first support member 410, and the second support member 420 may be calculated in advance, and the cylinder used as the pressurizing device may be reduced. The moving distance of the piston. (9-5) Modification 1Ε 163250.doc -35·201247561 In the above embodiment, the cylinder is used as the pressurizing device, but the present invention is not limited thereto, and a known pressurizing device can be suitably used. [Examples] Hereinafter, examples of the invention will be described. In the first embodiment, the inventor starts pressing the molded body 310 via the first support member 410 and the second support member 420 before the temperature of the periphery of the molded body 3 10 is raised. Then, after pressing the molded body 310, the temperature around the molded body 31 is raised at a temperature increase rate of 1 〇 C /h. Thereafter, the glass raw material is melted to form a molten glass so as to have a composition as shown below, and the molten glass is clarified. Then, the clarified fragile glass was stirred in a stirring tank. The molten glass after the stirring was supplied to the temperature-raminated formed body 310 as described above to form a flat glass. Further, the flat glass was cut to produce a glass plate for a liquid crystal display having a thickness of 0·7 mm and a size of 2200 mm x 25 mm. Further, the devitrification temperature of the glass plate for the display obtained was 1,170. Hey, the strain point is 67 ° ° C.
Si02 60% AI2O3 19.5% B2O3 10%Si02 60% AI2O3 19.5% B2O3 10%
CaO 5%CaO 5%
SrO 5%SrO 5%
Sn〇2 0.5% 又,作為實施例2,本發明者除將製造之玻璃板之厚产 設為〇·4 mm以夕卜,以與上述實施例_之方 二 晶顯示器用之玻璃板。 ^ I63250.doc -36- 201247561 然後,自實施例1及實施例2中所製造之液晶顯示器用之 玻璃板分別切下380 mmx420 mm之玻璃板’對該等玻璃板 之翹曲進行測定。此時’該等玻璃板之翹曲均為0.15 mm 以下。因此’ 2200 mm x2500 mm之液晶顯示器用之玻璃板 的翹曲亦為0.15 mm以下。 作為實施例3 ’本發明者於使成形體3 10之周邊溫度升溫 前,開始對成形體3 10經由第1支撐構件410及第2支撐構件 420進行推壓。然後,於對成形體310之推壓後,使成形體 3 10之周邊溫度以10°C /h之升溫速度升溫。此後,以成為 如下所示之組成(重量%表示)之方式,將玻璃原料熔解而 製成溶融玻璃,並進行熔融玻璃之澄清。繼而,於搜拌槽 中對澄清後之炼融玻璃進行擾摔,利用如上所述之方法將 攪拌後之熔融玻璃供給至經升溫之成形體310,而成形為 平板玻璃。進而’切割平板玻璃,製造厚度為〇.7 mm、大 小為2200 mmx2500 mm之液晶顯示器用之玻璃板。再者, 製造而得液晶顯示器用之玻璃板的失透溫度為123〇〇c,應 變點為71 51。Sn 〇 2 0.5% Further, as the second embodiment, the inventors of the present invention have a glass plate for a two-crystal display of the above-described embodiment except that the thickness of the produced glass plate is 〇·4 mm. ^ I63250.doc -36- 201247561 Then, the glass plates for liquid crystal displays manufactured in Examples 1 and 2 were respectively cut into glass plates of 380 mm x 420 mm, and the warpage of the glass plates was measured. At this time, the warpage of the glass sheets was 0.15 mm or less. Therefore, the warpage of the glass plate for the 2200 mm x 2500 mm liquid crystal display is also 0.15 mm or less. In the third embodiment, the inventors of the present invention started pressing the molded body 3 10 via the first support member 410 and the second support member 420 before the temperature of the periphery of the molded body 3 10 was raised. Then, after pressing the molded body 310, the temperature around the molded body 3 10 was raised at a temperature increase rate of 10 ° C /h. Thereafter, the glass raw material is melted to form a molten glass so as to have a composition (weight %) as shown below, and the molten glass is clarified. Then, the clarified molten glass is disturbed in the search tank, and the stirred molten glass is supplied to the heated molded body 310 by the method described above to be formed into a flat glass. Further, the flat glass was cut to produce a glass plate for a liquid crystal display having a thickness of 〇.7 mm and a size of 2200 mmx2500 mm. Further, the devitrification temperature of the glass plate for liquid crystal display manufactured was 123 〇〇c, and the strain point was 71 51.
Si〇2 61.5% Al2〇3 20% B203 8.4% CaO 10% Sn〇2 0.1% 又’作為實施例4 設為0.4 mm以外,^ 163250.doc 本發明者除將製造之玻璃板之厚度 轉上述實施例3相同之方法,製造液 •37- 201247561 晶顯示器用之玻璃板。 然後,自實施例3及實施例4中所製造之液晶顯示器用之 玻璃板分別切下380 mm><420 mm之玻璃板,對該等玻璃板 之勉曲進行測定。此時,該等玻璃板之翹曲均為015 mm 以下°因此,2200 mm><2500 mm之液晶顯示器用之玻璃板 之翹曲亦為0.15 mm以下。 再者’作為比較例1,本發明者於使成形體3 1〇之周邊溫 度以特定速度(此處為l〇°C /h)升溫至特定溫度(此處為 1200°C)後開始對成形體310進行推壓,除該方面以外,以 與實施例1相同之方法進行玻璃板之製造。 又,作為比較例2,本發明者於使成形體3 1 0之周邊溫度 以特定速度(此處為l〇°C /h)升溫至特定溫度(此處為 120(TC)後開始對成形體310進行推壓,除該方面以外,以 與實施例2相同之方法進行玻璃板之製造。 進而,作為比較例3,本發明者於使成形體31〇之周邊溫 度以特定速度(此處為1〇。〔: /h)升溫至特定溫度(此處為 1200°C)後開始對成形體310進行推壓,除該方面以外,以 與實施例3相同之方法進行玻璃板之製造。 進而’作為比較例4,本發明者於使成形體3 1 〇之周邊溫 度以特定速度(此處為1(TC /h)升溫至特定溫度(此處為 1200°C)後開始對成形體310進行推壓,除該面以外,以實 施例4相同之方法進行玻璃板之製造。 然後’自所製造之液晶顯示器用之玻璃板(22〇〇 mm><2500 mm)切下380 mm><420 mm之玻璃板,對玻璃板之 163250.doc 38, 201247561 紐曲進行測定。此時,比較例1及比較例3之玻璃板之翹曲 的最大值超過〇.2〇 mme又,比較例2及比較例4之玻璃板 之翹曲的最大值超過〇.3 〇 mm。 因此’本發明可用於玻璃板之品質之提高。 [產業上之可利用性] 本發明可以各種方式應用於使用成形裝置製造玻璃板的 玻璃板之製造方法及玻璃板製造裝置中。 【圖式簡單說明】 圖1係本實施形態之玻璃板之製造方法的流程圖。 圖2係以玻璃板製造裝置所包含之熔解裝置為主而表示 之模式圖。 圖3係於垂直於玻璃板製造裝置所包含之成形裝置或配 置於成形裝置之周邊之設備•構件的水平面之方向上進行 切割之情形時的剖面圖。 圖4係成形體之概略之正面模式圖。 圖5係用以表示第2加熱器於自正面觀察成形體之情形時 之配置的模式圖。 圖6係變形例丨八之成形體之概略之正面模式圖。 圖7係變形例1B之成形體之概略之正面模式圖。 【主要元件符號說明】 163250.doc 100 玻璃板製造裝置 300 成形裝置 310 成形體 311 供給口 凹槽 下端部 第2加熱器(升溫裝置) 第1支撐構件(支撐構件) 板構件 加壓裝置 第2支撐構件(支撐構件) 板構件 加壓裝置 固定構件•設備 玻璃板 平板玻璃 箭頭_ 箭頭Si〇2 61.5% Al2〇3 20% B203 8.4% CaO 10% Sn〇2 0.1% Further, as Example 4, it is set to 0.4 mm, ^ 163250.doc The present inventors transferred the thickness of the manufactured glass plate to the above. In the same manner as in Example 3, the production liquid was used for the glass plate for the crystal display of 37-201247561. Then, glass plates for liquid crystal displays manufactured in Example 3 and Example 4 were cut out of glass plates of 380 mm > 420 mm, respectively, and the distortion of the glass plates was measured. At this time, the warpage of the glass sheets is 015 mm or less. Therefore, the warpage of the glass sheets for the liquid crystal display of 2200 mm > 2500 mm is also 0.15 mm or less. In addition, as the comparative example 1, the inventors started to raise the temperature of the periphery of the molded body 3 1〇 at a specific speed (here, 10 ° C / h) to a specific temperature (here, 1200 ° C). The molded body 310 was pressed, and in addition to this, a glass plate was produced in the same manner as in Example 1. Further, as a comparative example 2, the inventors of the present invention started the temperature forming at a specific temperature (here, 10 ° C / h) at a specific temperature (here, 10 ° C / h) to a specific temperature (here, 120 (TC)). In addition to this, the glass 310 was produced in the same manner as in Example 2. Further, as Comparative Example 3, the inventors made the temperature around the molded body 31 at a specific speed (here) After the temperature was raised to a specific temperature (here, 1200 ° C), the molded body 310 was pressed, and the glass plate was produced in the same manner as in Example 3 except for the above. Further, as a comparative example 4, the inventors started the molded body after the temperature of the periphery of the molded body 3 1 以 was raised to a specific temperature (here, 1200 ° C) at a specific speed (here, 1 (TC / h)). The glass was pressed in the same manner as in Example 4 except that the surface was pressed. Then, 'the glass plate for the liquid crystal display (22 〇〇 mm >< 2500 mm) was cut and cut 380 mm>;<420 mm glass plate, for glass plate 163250.doc 38, 201247561 At this time, the maximum value of the warpage of the glass sheets of Comparative Example 1 and Comparative Example 3 exceeded 〇.2〇mme, and the maximum value of the warpage of the glass sheets of Comparative Example 2 and Comparative Example 4 exceeded 〇.3 〇 Therefore, the present invention can be applied to the improvement of the quality of the glass sheet. [Industrial Applicability] The present invention can be applied to a method of manufacturing a glass sheet for manufacturing a glass sheet using a molding apparatus and a glass sheet manufacturing apparatus in various manners. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method of manufacturing a glass sheet according to the present embodiment. Fig. 2 is a schematic view showing a melting apparatus included in a glass sheet manufacturing apparatus. Fig. 3 is a view perpendicular to a glass sheet. A cross-sectional view of a molding apparatus included in a manufacturing apparatus or a case where it is cut in the direction of a horizontal plane of equipment and members around the molding apparatus. Fig. 4 is a schematic front view of the molded body. Fig. 6 is a schematic front view showing a molded body of a modified example. Fig. 7 is a schematic view showing a molded body of a modified example. Front view. [Main element symbol description] 163250.doc 100 Glass plate manufacturing apparatus 300 Molding apparatus 310 Molded body 311 Supply port groove lower end second heater (heating device) First support member (support member) Plate member plus Pressing device 2nd support member (support member) Plate member pressurizing device fixing member • Equipment glass plate flat glass arrow _ arrow
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JP2004203691A (en) * | 2002-12-26 | 2004-07-22 | Nippon Electric Glass Co Ltd | Apparatus and method for shaping glass sheet |
JP4193115B2 (en) * | 2003-03-20 | 2008-12-10 | 日本電気硝子株式会社 | Sheet glass forming apparatus and sheet glass forming method |
JP4821260B2 (en) * | 2005-10-20 | 2011-11-24 | 日本電気硝子株式会社 | Liquid crystal plate glass heating apparatus, liquid crystal plate glass furnace, and liquid crystal plate glass manufacturing method |
-
2012
- 2012-03-19 CN CN201280000557.4A patent/CN102811959B/en active Active
- 2012-03-19 KR KR1020127013152A patent/KR20120132676A/en not_active Application Discontinuation
- 2012-03-19 WO PCT/JP2012/001900 patent/WO2012132309A1/en active Application Filing
- 2012-03-19 JP JP2012514669A patent/JPWO2012132309A1/en active Pending
- 2012-03-28 TW TW101110897A patent/TW201247561A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI717330B (en) * | 2014-12-19 | 2021-02-01 | 美商康寧公司 | Methods and apparatuses for isopipe support and sag mitigation |
Also Published As
Publication number | Publication date |
---|---|
WO2012132309A1 (en) | 2012-10-04 |
JPWO2012132309A1 (en) | 2014-07-24 |
KR20120132676A (en) | 2012-12-07 |
CN102811959B (en) | 2015-04-29 |
CN102811959A (en) | 2012-12-05 |
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