201238071 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種太陽能電池電極製作設備及其方 法。 【先前技術】 由於石化能源短缺，人們對環保重要性的認知提高。 因此，人們近年來不斷地積極研發替代能源與再生能源的 相關技術’希望可以減少目前人類對於石化能源的依賴程 度以及使用石化能源時對環境帶來的影響。在眾多的替代 能源與再生能源的技術中’以太陽能電池⑽arc罐受矚 目。原因在於太陽能電池可直接將太陽能轉換成電能，且 發電過私中不會產生一氧化碳或氮化物等有害物質，不會 對環境造成污染。 石夕是各種半導體產業中最為重要且廣泛使用的電子材 料。現今，矽晶圓的生產供應已是相當成熟的技術，再加 上石夕的能隙適合吸收太陽光，使得矽晶太陽能電池成為目 前使用最廣泛的太陽能電池。一般單晶矽或多晶矽太陽電 池的構造包含下列幾層.外部電極(C〇n(jucting grid)、抗反 射層（Anti-reflective layer)、N型與p型半導體層及内部電 極(Back contact electrode)。當p型及N型半導體層互相接 觸時，N型半導體層内的電子會湧入p型半導體層中，以 填補其内的電洞。在P-N接面附近，因電子_電洞的結合形 成一個載子空乏區’而P型及N型半導體層中也因分別帶 有負、正電荷’因此形成一個内建電場。當太陽光照射到 201238071 运P_N結構時’ p型和N型半導體層因吸收太陽光而產生 電子-電洞對。由於空乏區所提供的内建電場，可以讓半導 體内所產生的電子在電池内流動，因此若經由電極把電子 引出，就可以形成一個完整的太陽能電池。 外部電極的材料一般為鎳、銀、鋁、銅及鈀等金屬的 各種搭配組合，且為了傳導足夠的電子流量，該電極與基 板之間必須要有足夠大的傳導面積。但是，為降低外部電 極對於太陽入射光的遮蔽率，外部電極覆蓋於基板上的表 面積又必須盡可能地小。因此，對於外部電極的結構設計 而言，其必須能夠兼顧低電阻以及低光遮蔽率的特性。是 以，目刚的外部電極結構主要可分為匯流電極(busbar)及指 狀電極(finger)兩大結構。其中，匯流電極的截面積尺寸大 於指狀電極的截面積尺寸。換言之，匯流電極如同樹木的 主幹而指狀電極則如同樹木的分枝散布到電池表面各處， 因此，電子藉由指狀電極以匯集到匯流電極，並藉由匯流 電極以匯出至外部負載。換言之，尺寸較大的匯流電極有 助於提咼電子流量，而尺寸較小的指狀電極則有助於降低 光遮蔽率。 目前形成於基板上之外部電極（包含匯流電極與指狀 電極）’皆疋藉由網版印刷技術（SCreen print)印刷於基板 上。然而’網版印刷技術對於要印刷出具有較細寬度之指 狀電極是有其極限的。因此，在追求更高之光電轉換效率 的太陽能電池市場中，以網版印刷技術製作的外部電極的 技術將會因為無法降低太陽能電池的光遮蔽率而遭遇到技 術瓶頸。 201238071 【發明内容】 為解決習知技術之問題，本發明之一技術樣態是一種 太陽能電池電極製作設備，其主要是在製作太陽能電池的 過程中，藉由在圖樣滾輪(pattern roll)上所刻出之溝槽對容 納於溝槽中之電極材料塑型，進而使得經塑型之電極材料 在轉印至太陽能電池之基板上之後，形成外部電極之指狀 電極。由於本發明藉由圖樣滾輪上所刻出之溝槽使基板上 之指狀電極成形，因此相較於習知採用網版印刷技術所形 成之指狀電極，能夠形成更細（寬度更小）以及高長寬比 (aspect ratio)之指狀電極。進一步來說，更細之指狀電極於 基板上的遮光少，因此可使得基板之受光面積更大，進而 使得製作完成之太陽能電池具有較好之電性效果以及更高 之光電轉換效率。 根據本發明一實施方式，一種太陽能電池電極製作設 備用以於基板上形成複數個指狀電極。至少一匯流電極位 於於基板上。太陽能電池電極製作設備包含有圖樣滾輪以 及轉印滾輪。圖樣滾輪包含有複數個溝槽。溝槽用以容納 電極材料。並且，溝槽大體上相互平行。轉印滾輪可相對 圖樣滾輪滾動，致使電極材料由溝槽中分離而附著至轉印 滚輪上。轉印滾輪亦可相對基板滾動，致使經附著之電極 材料隨即由轉印滾輪轉印至基板上以形成指狀電極。其 中，每一指狀電極皆對應一溝槽，並且指狀電極與匯流電 極大體上垂直。 本發明之另一技術樣態是一種太陽能電池電極製作方 201238071 法。 根據本發明另一實施方式，一種太陽能電池電極製作 方法用以於基板上形成外部電極。外部電極包含至少一匯 流電極以及複數個指狀電極。太陽能電池電極製作方法包 含下列步驟。以網版印刷技術於基板上印刷至少匯流電 極。以圖樣滾輪所包含之複數個溝槽容納電極材料，其中 溝槽大體上相互平行。使圖樣滾輪相對轉印滾輪滚動，致 使電極材料由溝槽中分離而附著至轉印滾輪上。使轉印滾 輪相對基板滾動，致使經附著之電極材料由轉印滚輪轉印 至基板上以形成指狀電極，其中每一指狀電極皆對應一溝 槽，並且指狀電極與匯流電極大體上垂直。 【實施方式】 以下將以圖式揭露本發明之複數個實施方式，為明確 說明起見，許多實務上的細節將在以下敘述中一併說明。 然而，應暸解到，這些實務上的細節不應用以限制本發明。 也就是說，在本發明部分實施方式中，這些實務上的細節 是非必要的。此外，為簡化圖式起見，一些習知慣用的結 構與元件在圖式中將以簡單示意的方式繪示之。 本發明之一技術態樣是一種太陽能電池電極製作設 備。更具體地說，其主要是在製作太陽能電池的過程中， 藉由在圖樣滾輪上所刻出之溝槽對容納於溝槽中之電極材 料塑型，進而使得經塑型之電極材料在轉印至太陽能電池 之基板上之後，形成外部電極之指狀電極。由於本發明藉 由圖樣滾輪上所刻出之溝槽使基板上之指狀電極成形，因 201238071 此相較於習知採用網版印刷技術所形成之指狀電極，能夠 形成更細（寬度更小）以及高長寬比之指狀電極。進一步來 S ' ^、田之私狀電極於基板上的遮光少，因此可使得基板 =受光面積更大，進而使得製作完成之太陽能電池具有較 好之電性效果以及更高之光電轉換效率。 2照第1A圖以及第1B圖。第1A圖為繪示依照本 實施方式之太陽能電池電極製作設備i於基板3〇上 =狀電極34b的侧視圖。第1B圖為繪示第Μ圖中之 圖樣滚輪1 〇的立體視圖。 21A目與第1B圖所^本實施方式之太陽能電池 1=備1主要可用來於太m也 複數個指狀電極34b。太陽能電池電極 "^之圖樣滾輪10可包含有複數個溝槽100。圖樣 $ 〇 t溝槽1〇0可用來容納電極材料％。並且，圖樣 對Λ 輪12可與圖樣滾輪10接觸，並相 中致使容納於圖樣滾輪10之溝槽_ 雷中t離而附著至轉印滾輪η的外表面上。同二槽： 電池電極製作設備！之轉㈣於太％此 並相㈣亦可與基板30接觸， I相對基板3G滾動，致使附著 電極材料34a隨即由轉印滾：= 卜表面的 指狀電極34b。其中，#并㈣轉印至基板％上以形成 槽_所形成。 母^狀電極34b皆由—對應之溝 201238071 請參照第2A圖以及第2B圖。第2A圖為繪示第ia 圖中之太陽能電池3的局部示意圖。第2B圖騎示第2a 圖中之太陽能電池3的局部放大圖。 如第2A圖與第2B圖所示，太陽能電池3可包含至少 一匯流電極32。於本實施方式中，在製作太陽能電池3之 =電極時，太陽能電池3之匯流電極32可先藉由網版印 刷技術形成於基板30上。接著，太陽能電池3之指狀電極 34b再藉由本發明之太陽能電池電極製作設備丨轉印至基 板3〇上，並與匯流電極32交疊。藉此，太陽能電池^ ，，電極32與指狀電極34b即可相互電性連接。其中，太 陽旎電池3之指狀電極34b與匯流電極32大體上垂直。 請參照第3A圖、第3B圖以及第4圖。第3a圖為緣 二中之圖樣滾輪1〇之另一實施方式的立體視圖。 f圖為綠示第3八圖中之圖樣滾輪50的局部放大圖。 第4圖為繪示第2Β圖中之太陽能電池 局部放大圖。 魏方式的 50中如與第3Β圖所示’於本實施方式之圖樣滚輪 ’圖樣滾輪50上之溝槽5〇〇包含複數個斷開部5〇2。 ”體來說’相較於第1Β圖中之圖樣滾輪W上的每 ===樣態，而本實施方式之圖樣滾輪5: ^ J 〇〇白為包含有兩個斷開部502的樣態，如 、盖抽遍所不。然於一實施方式中’圖樣滾輪50上的 =據St;斷開部搬的數量並不以第3Α圖為限， 與改變求或製造上的限制等因素而彈性地調整 201238071 如第3B圖與第4圖所示，於本實施方式中，藉由在第 3A圖之圖樣滚輪50上的溝槽500設置斷開部502，可以 於本發明之太陽能電池電極製作設備1在基板30上轉印並 成形指狀電極74b時，使得指狀電極74b包含複數個缺口 74c，並且每一缺口 74皆由一對應之斷開部502所形成。 由於本發明是藉由轉印之方式製作指狀電極74b，因此指 狀電極74b每一缺口 74c之寬度WO必然會與其所對應之 斷開部502的寬度WS相等。 此外，如第4圖所示，於本實施方式中，每一指狀電 極74b之缺口 74c皆恰好位於匯流電極32的上方。由於太 陽能電池3之匯流電極32必須與指狀電極74b電性連接， 因此每一指狀電極74b之缺口 74c的寬度WO皆小於匯流 電極32之寬度WB。由此可知，由於每一缺口 74c之寬度 WO與其所對應之斷開部502的寬度WS相等，因此在刻 出本實施方式之圖樣滾輪50上的溝槽500時，必須使得每 一斷開部502的寬度WS皆小於匯流電極32之寬度WB。 藉此，才能使得具有缺口 74c之指狀電極74b在其缺口 74c 恰好位於匯流電極32上的情況下，仍然可與匯流電極32 相互搭接。 相較於藉由第1B圖之圖樣滾輪100所製作之指狀電極 34b(如第2B圖所示為完整無斷開之樣態），藉由第3A圖之 圖樣滾輪50所製作之具有缺口 74c且缺口 74c恰好位於匯 流電極32上的指狀電極74b(如第4圖所示），其與匯流電 極32搭接的部份較少（亦即，指狀電極74b與匯流電極32 重疊的部份較少），因此在基板30上由匯流電極32與指狀 10 201238071 電極74b所組成之外部電極，整體來看會比第2B圖中匯流 電極32與指狀電極34b所組成之外部電極更為平坦。因 此，在太1%能電池3後續之焊接製程中，藉由第3 a圖之 圖樣滾輪5 0所製作之較為平坦的外部電極，可以承受更大 的焊接操作範圍。換言之，較為平坦的外部電極於後續進 行銅帶鍍錫（ribbon tabbing)的程序時，比較不易發生焊接問 題。例如，焊接之後匯流電極32進行剝離測試(peenng test) 時的斷裂問題。 請參照第5圖。第5圖為繪示第2B圖中之太陽能電池 3之再一實施方式的局部放大圖。 如第5圖所示’於本實施方式中，同樣為了達到在基 板30上獲得較為平坦之外部電極的目的，太陽能電池3之 匯流電極92也可進一步包含有本體部92a以及複數個突出 部92b。其中’太陽能電池3之每一指狀電極74b的寬度 WF皆可小於匯流電極92任一突出部92b之寬度WP，並 且匯流電極92之每一突出部92b之寬度WP皆可小於本體 部92a之寬度WM。由於本發明是藉由轉印之方式製作太 陽能電池3之指狀電極74b ’因此每一指狀電極74b之寬 度WF必然會與其所對應之溝槽500的寬度WG相等。換 言之，圖樣滚輪50之每一溝槽500的寬度WG皆可小於匯 流電極92任一突出部92b之寬度WP，並且匯流電極92 之每一突出部92b的寬度WP皆可小於本體部92a之寬度 WM。 另外，於本實施方式中，匯流電極92之每一突出部 92b皆可與本體部92a垂直。在此條件下’若要達到使指 201238071 狀電極74b搭接匯流電極92的目的，指狀電極74b之任一 缺口 74c之寬度WO必須小於該缺口 74c之間之突出部92b 之長度LP與本體部92a之寬度WM之和。換言之，於本 實施方式之圖樣滾輪50上對應該缺口 74c之斷開部502的 寬度WS也必須小於該缺口 74c之間之突出部92b之長度 LP與本體部92a之寬度WM之和，如第5圖所示。 本發明之另一技術樣態是一種太陽能電池電極製作方 法。 根據本發明另一實施方式，一種太陽能電池電極製作 方法用以於基板上形成外部電極。外部電極包含至少一匯 流電極以及複數個指狀電極。太陽能電池電極製作方法包 含下列步驟。以網版印刷技術於基板上印刷至少匯流電 極。以圖樣滾輪所包含之複數個溝槽容納電極材料，其中 溝槽大體上相互平行。使圖樣滾輪相對轉印滾輪滾動，致 使電極材料由溝槽中分離而附著至轉印滾輪上。使轉印滾 輪相對基板滾動，致使經附著之電極材料由轉印滾輪轉印 至基板上以形成指狀電極，其中每一指狀電極皆對應一溝 槽，並且指狀電極與匯流電極大體上垂直。 由以上對於本發明之具體實施例之詳述，可以明顯地 看出，本發明之太陽能電池電極製作設備及其方法，主要 是在製作太陽能電池的過程中，藉由在圖樣滾輪上所刻出 之溝槽對容納於溝槽中之電極材料塑型，進而使得經塑型 之電極材料在轉印至太陽能電池之基板上之後，形成外部 電極之指狀電極。由於本發明藉由圖樣滾輪上所刻出之溝 槽使基板上之指狀電極成形，因此相較於習知採用網版印 12 201238071 之指狀電極，能角形成更細(寬度更小)以及 二^指狀電極。進一步來說，更細之指狀電極於基 板上的遮光少，因此可使得基 得製作完成之太又先面積更大’進而使 光電轉換效率。電4較好之電性效果以及更高之 =本發明已以實施方式揭露如上，然其並非用以限 Sin二3丄任何熟習此技藝者’在不脫離本發明之精神和 圍春d作各種之更動與潤飾，因此本發明之保護範 圍虽視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 雷j =圖為繪示依照本發明一實施方式之太陽能電池 °製作设備於基板上製作指狀電極的側視圖。 第1B圖為繪示第1A圖甲之圖樣滾輪的立體視圖。 圖 第2A圖為繪示第1A圖中之太陽能電池的局部示意 圖 第2B圖為繪示第2A圖中之太陽能電池的局部放大 第3A圖為繪示第1A^中之圖樣滾輪之另一實施方 的立體視圖。 第3B圖為繚示第3A圖中之圖樣滾輪的局部放大圖。 第4圖為繪示第2B圖中之太陽能電池之另一實施方 的局部放大圖。 二 第5圖為繪示第2B圖中之太陽能電池之再一實施方式 的局部放大圖。 ^ 201238071 【主要元件符號說明】 1 :太陽能電池電極製作設備10、50 :圖樣滾輪 100、500 :溝槽 3 :太陽能電池 32、92 :匯流電極 34b、74b :指狀電極 74c :缺口 92b :突出部 WB :匯流電極之寬度 WG :溝槽之寬度 WM :本體部之寬度 WP :突出部之寬度 12 :轉印滾輪 30 :基板 34a :電極材料 502 :斷開部 92a :本體部 LP :突出部之長度 WO :缺口之寬度 WF :指狀電極之寬度 WO :缺口之寬度 WS :斷開部之寬度 14201238071 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a solar cell electrode manufacturing apparatus and a method therefor. [Prior Art] Due to the shortage of petrochemical energy, people's awareness of the importance of environmental protection has increased. Therefore, in recent years, people have been actively researching and developing technologies related to alternative energy and renewable energy. It hopes to reduce the current human dependence on petrochemical energy and the environmental impact of using petrochemical energy. In many alternative energy and renewable energy technologies, solar cell (10) arc cans are being used. The reason is that solar cells can directly convert solar energy into electrical energy, and no harmful substances such as carbon monoxide or nitride are generated during power generation and will not pollute the environment. Shi Xi is the most important and widely used electronic material in various semiconductor industries. Nowadays, the production and supply of silicon wafers is quite mature technology, and the energy gap of Shixi is suitable for absorbing sunlight, making twin crystal solar cells the most widely used solar cells. Generally, the structure of a single crystal germanium or polycrystalline germanium solar cell comprises the following layers: an external electrode (C〇n (jucting grid), an anti-reflective layer, an N-type and a p-type semiconductor layer, and an internal electrode (Back contact electrode) When the p-type and N-type semiconductor layers are in contact with each other, electrons in the N-type semiconductor layer are poured into the p-type semiconductor layer to fill the holes therein. In the vicinity of the PN junction, due to the electron_hole Combined with the formation of a carrier depletion region' and the P-type and N-type semiconductor layers also have a negative and positive charge, respectively, thus forming a built-in electric field. When the sunlight hits the 201238071 P_N structure, the p-type and the N-type The semiconductor layer generates electron-hole pairs by absorbing sunlight. Due to the built-in electric field provided by the depletion region, electrons generated in the semiconductor can flow in the battery. Therefore, if the electrons are taken out through the electrodes, a complete image can be formed. The external electrode material is generally a combination of various metals such as nickel, silver, aluminum, copper and palladium, and in order to conduct sufficient electron flow, the electrode and the substrate must have A large enough conductive area. However, in order to reduce the shielding rate of the external electrode to the incident light of the sun, the surface area of the external electrode covering the substrate must be as small as possible. Therefore, for the structural design of the external electrode, it must be able to balance Low resistance and low light shielding rate. Therefore, the external electrode structure can be mainly divided into two major structures: busbar and finger. Among them, the cross-sectional area of the bus electrode is larger than the finger shape. The cross-sectional area of the electrode. In other words, the bus electrode is like the trunk of the tree and the finger electrode is distributed like a branch of the tree to the surface of the battery. Therefore, the electron is collected by the finger electrode to the bus electrode and is connected by the bus electrode. In order to remit to an external load. In other words, a larger size of the bus electrode helps to extract the electron flow, while a smaller finger electrode helps to reduce the light shielding rate. The external electrode currently formed on the substrate (including Both the bus electrode and the finger electrode are printed on the substrate by SCreen print. However, 'screen printing There is a limit to the printing of finger electrodes with a thinner width. Therefore, in the solar cell market pursuing higher photoelectric conversion efficiency, the technology of external electrodes made by screen printing technology will be impossible. In order to solve the problem of the prior art, one of the technical aspects of the present invention is a solar cell electrode fabrication apparatus, which is mainly in the process of fabricating a solar cell, in order to solve the problem of the prior art. Forming the electrode material contained in the trench by a groove engraved on the pattern roll, thereby forming the molded electrode material after being transferred onto the substrate of the solar cell Finger electrode of the external electrode. Since the present invention shapes the finger electrodes on the substrate by the grooves engraved on the pattern roller, it is possible to form a thinner (smaller width) than the finger electrodes formed by the conventional screen printing technique. And a finger electrode with a high aspect ratio. Further, the thinner finger electrodes have less light-shielding on the substrate, so that the light-receiving area of the substrate is made larger, so that the completed solar cell has better electrical effects and higher photoelectric conversion efficiency. According to an embodiment of the invention, a solar cell electrode is fabricated to form a plurality of finger electrodes on a substrate. At least one bus electrode is located on the substrate. The solar cell electrode making apparatus includes a pattern roller and a transfer roller. The pattern wheel contains a plurality of grooves. The trench is used to accommodate the electrode material. Also, the grooves are substantially parallel to each other. The transfer roller can be rolled relative to the pattern roller, causing the electrode material to be separated from the groove and attached to the transfer roller. The transfer roller can also roll relative to the substrate such that the attached electrode material is then transferred by the transfer roller onto the substrate to form a finger electrode. Each of the finger electrodes corresponds to a trench, and the finger electrodes are substantially perpendicular to the bus electrodes. Another technical aspect of the present invention is a solar cell electrode fabrication method 201238071. According to another embodiment of the present invention, a solar cell electrode fabrication method is used to form an external electrode on a substrate. The external electrode includes at least one bus electrode and a plurality of finger electrodes. The solar cell electrode fabrication method includes the following steps. At least the sinking electrode is printed on the substrate by screen printing. The plurality of grooves included in the pattern roller accommodate the electrode material, wherein the grooves are substantially parallel to each other. The pattern roller is caused to roll relative to the transfer roller, so that the electrode material is separated from the groove and adhered to the transfer roller. Rolling the transfer roller relative to the substrate, causing the attached electrode material to be transferred onto the substrate by the transfer roller to form a finger electrode, wherein each of the finger electrodes corresponds to a groove, and the finger electrode and the bus electrode are substantially vertical. [Embodiment] The embodiments of the present invention are disclosed in the following drawings. For the sake of clarity, a number of practical details will be described in the following description. However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the present invention, these practical details are not necessary. Moreover, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings. One aspect of the present invention is a solar cell electrode fabrication apparatus. More specifically, in the process of fabricating a solar cell, the electrode material contained in the trench is shaped by a groove engraved on the pattern roller, thereby causing the molded electrode material to be rotated. After being printed on the substrate of the solar cell, a finger electrode of the external electrode is formed. Since the present invention shapes the finger electrodes on the substrate by the grooves engraved on the pattern roller, since 201238071 is thinner than the finger electrodes formed by the conventional screen printing technology, the width can be formed. Small) and high aspect ratio finger electrodes. Further, S ' ^, Tian's private electrode has less shading on the substrate, so that the substrate = light receiving area is larger, so that the completed solar cell has better electrical effect and higher photoelectric conversion efficiency. 2 Photographs 1A and 1B. Fig. 1A is a side view showing the solar cell electrode fabrication apparatus i according to the present embodiment on the substrate 3? Fig. 1B is a perspective view showing the drawing wheel 1 〇 in the figure. 21A and FIG. 1B are solar cells of the present embodiment. 1=Preparation 1 is mainly used for a plurality of finger electrodes 34b. The pattern electrode 10 of the solar cell electrode "^ may include a plurality of trenches 100. The pattern $ 〇 t trench 1 〇 0 can be used to accommodate the electrode material %. Further, the pattern facing wheel 12 is in contact with the pattern roller 10, and is caused to be attached to the outer surface of the transfer roller n by the groove_ley contained in the pattern roller 10. Same two slots: Battery electrode making equipment! The turn (4) is too%. The phase (4) can also be in contact with the substrate 30, and the I is rolled relative to the substrate 3G, so that the attached electrode material 34a is then transferred by the transfer roller: = the surface of the finger electrode 34b. Here, #和(四) is transferred onto the substrate % to form a groove_. The parent electrode 34b is composed of - corresponding groove 201238071 Please refer to FIG. 2A and FIG. 2B. Fig. 2A is a partial schematic view showing the solar cell 3 in the ia diagram. Fig. 2B is a partial enlarged view of the solar cell 3 in Fig. 2a. As shown in Figs. 2A and 2B, the solar cell 3 may include at least one bus electrode 32. In the present embodiment, when the = electrode of the solar cell 3 is fabricated, the bus electrode 32 of the solar cell 3 can be first formed on the substrate 30 by a screen printing technique. Next, the finger electrode 34b of the solar cell 3 is transferred onto the substrate 3 by the solar cell electrode manufacturing apparatus of the present invention, and overlaps with the bus electrode 32. Thereby, the solar cell, the electrode 32 and the finger electrode 34b can be electrically connected to each other. Among them, the finger electrode 34b of the solar cell 3 is substantially perpendicular to the bus electrode 32. Please refer to FIG. 3A, FIG. 3B and FIG. Fig. 3a is a perspective view of another embodiment of the pattern roller 1〇 in the rim 2. Figure f is a partially enlarged view of the pattern roller 50 in the eighth embodiment. Fig. 4 is a partially enlarged view showing the solar cell in Fig. 2; The groove 5' on the pattern roller 50 of the present embodiment, as shown in Fig. 3, and the groove 5' on the pattern roller 50 of the present embodiment, includes a plurality of disconnecting portions 5〇2. "Comparatively" compared to each === state on the pattern wheel W in the first drawing, and the pattern roller 5 of the present embodiment: ^ J 〇〇 white is a sample containing two breaking portions 502 In the embodiment, the number of the disconnecting portion is not limited to the third drawing, and the limitation of the manufacturing or manufacturing is changed. Factors are elastically adjusted 201238071 As shown in FIGS. 3B and 4, in the present embodiment, the solar energy of the present invention can be provided by providing the disconnecting portion 502 in the groove 500 on the pattern roller 50 of FIG. When the battery electrode manufacturing apparatus 1 transfers and shapes the finger electrode 74b on the substrate 30, the finger electrode 74b includes a plurality of notches 74c, and each of the notches 74 is formed by a corresponding breaking portion 502. Since the finger electrodes 74b are formed by transfer, the width WO of each of the notches 74c of the finger electrodes 74b is necessarily equal to the width WS of the corresponding breaking portion 502. Further, as shown in Fig. 4, In this embodiment, the notch 74c of each of the finger electrodes 74b is located at the bus electrode 32. Since the bus electrode 32 of the solar cell 3 must be electrically connected to the finger electrode 74b, the width WO of the notch 74c of each of the finger electrodes 74b is smaller than the width WB of the bus electrode 32. Thus, it is known that each gap The width WO of the 74c is equal to the width WS of the corresponding breaking portion 502. Therefore, when the groove 500 on the pattern roller 50 of the present embodiment is engraved, the width WS of each of the breaking portions 502 must be made smaller than the bus electrode. The width WB of 32. Thereby, the finger electrode 74b having the notch 74c can still overlap with the bus electrode 32 in the case where the notch 74c is located on the bus electrode 32. Compared with the first electrode BB The finger electrode 34b of the pattern roller 100 (as shown in FIG. 2B is a complete unbroken state), the notch 74c is formed by the pattern roller 50 of FIG. 3A and the notch 74c is located at the bus electrode. The finger electrode 74b on the 32 (as shown in FIG. 4) has less overlap with the bus electrode 32 (that is, the finger electrode 74b overlaps with the bus electrode 32), so Busbar electrode on substrate 30 32 and the external electrode composed of the finger 10 201238071 electrode 74b, as a whole, is flatter than the external electrode composed of the bus electrode 32 and the finger electrode 34b in Fig. 2B. Therefore, after the battery 1 is too 1% In the soldering process, the flatter external electrode made by the pattern roller 50 of Fig. 3a can withstand a larger welding operation range. In other words, the flatter external electrode is subsequently tinned with copper ribbon (ribbon) When tabbing), the soldering problem is less likely to occur. For example, the problem of fracture when the bus electrode 32 is subjected to a peeling test after soldering. Please refer to Figure 5. Fig. 5 is a partially enlarged view showing still another embodiment of the solar cell 3 in Fig. 2B. As shown in FIG. 5, in the present embodiment, the bus electrode 92 of the solar cell 3 may further include a body portion 92a and a plurality of protrusions 92b for the purpose of obtaining a relatively flat external electrode on the substrate 30. . The width WF of each of the finger electrodes 74b of the solar cell 3 may be smaller than the width WP of any of the protrusions 92b of the bus electrode 92, and the width WP of each of the protrusions 92b of the bus electrode 92 may be smaller than that of the body portion 92a. Width WM. Since the present invention is to form the finger electrodes 74b' of the solar cell 3 by transfer, the width WF of each of the finger electrodes 74b is necessarily equal to the width WG of the groove 500 corresponding thereto. In other words, the width WG of each of the grooves 500 of the pattern roller 50 may be smaller than the width WP of any of the protrusions 92b of the bus electrode 92, and the width WP of each of the protrusions 92b of the bus electrode 92 may be smaller than the width of the body portion 92a. WM. Further, in the present embodiment, each of the protruding portions 92b of the bus electrode 92 may be perpendicular to the body portion 92a. Under the condition that the width WO of any of the notches 74c of the finger electrodes 74b must be smaller than the length LP of the protrusions 92b between the notches 74c and the body for the purpose of bringing the 201238071 electrode 74b to overlap the bus electrode 92. The sum of the widths WM of the portions 92a. In other words, the width WS of the breaking portion 502 corresponding to the notch 74c in the pattern roller 50 of the present embodiment must also be smaller than the sum of the length LP of the protruding portion 92b between the notch 74c and the width WM of the body portion 92a, as described in Figure 5 shows. Another aspect of the present invention is a method of fabricating a solar cell electrode. According to another embodiment of the present invention, a solar cell electrode fabrication method is used to form an external electrode on a substrate. The external electrode includes at least one bus electrode and a plurality of finger electrodes. The solar cell electrode fabrication method includes the following steps. At least the sinking electrode is printed on the substrate by screen printing. The plurality of grooves included in the pattern roller accommodate the electrode material, wherein the grooves are substantially parallel to each other. The pattern roller is caused to roll relative to the transfer roller, so that the electrode material is separated from the groove and adhered to the transfer roller. Rolling the transfer roller relative to the substrate, causing the attached electrode material to be transferred onto the substrate by the transfer roller to form a finger electrode, wherein each of the finger electrodes corresponds to a groove, and the finger electrode and the bus electrode are substantially vertical. From the above detailed description of specific embodiments of the present invention, it can be clearly seen that the solar cell electrode manufacturing apparatus and method thereof of the present invention are mainly carved out on the pattern wheel during the process of fabricating the solar cell. The groove shapes the electrode material accommodated in the groove, so that the shaped electrode material forms a finger electrode of the external electrode after being transferred onto the substrate of the solar cell. Since the present invention shapes the finger electrodes on the substrate by the grooves engraved on the pattern roller, the energy angle is formed thinner (smaller width) than the finger electrodes of the screen printing 12 201238071. And two finger electrodes. Further, the thinner finger electrodes have less shading on the substrate, so that the base is made too large and the area is larger, and the photoelectric conversion efficiency is further improved. The electrical effect of the electric 4 is better and higher. The present invention has been disclosed in the above embodiments, but it is not intended to limit the use of Sin 2, any skilled person in the art, without departing from the spirit of the present invention. Various modifications and refinements are intended, and the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Ray j = a side view of a solar cell manufacturing apparatus according to an embodiment of the present invention for producing a finger electrode on a substrate. FIG. 1B is a perspective view showing the roller of the pattern of FIG. 1A. 2A is a partial schematic view showing a solar cell in FIG. 1A, FIG. 2B is a partial enlarged view showing a solar cell in FIG. 2A, and FIG. 3A is a view showing another implementation of the pattern roller in FIG. Stereo view of the square. Fig. 3B is a partial enlarged view showing the pattern roller in Fig. 3A. Fig. 4 is a partially enlarged plan view showing another embodiment of the solar cell of Fig. 2B. Fig. 5 is a partially enlarged view showing still another embodiment of the solar cell of Fig. 2B. ^ 201238071 [Description of main component symbols] 1 : Solar cell electrode fabrication equipment 10, 50: pattern roller 100, 500: trench 3: solar cell 32, 92: bus electrode 34b, 74b: finger electrode 74c: notch 92b: protruding Portion WB: width of the bus electrode WG: width of the groove WM: width of the body portion WP: width of the protrusion portion 12: transfer roller 30: substrate 34a: electrode material 502: disconnection portion 92a: body portion LP: protrusion portion Length WO: width of the notch WF: width of the finger electrode WO: width of the notch WS: width of the breaking portion 14