201234151 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種在對例如LSI製造工廠之化合物半導 體工廠等進行再開發或於人工作業工廠中，利用1少包含 、 離線裝置之一個或複數個處理裝置，而管理製造發光 . 體（LED)或半導體雷射元件等之半導體發光元件等之半導 體元件時之生產之生產管理系統及使用其之生產管理方 法。 【先前技術】 根據專利文獻1.，在先前之LSI製造工廠等中，具有如下 功能：自半導體製造裝置中設定之晶圓處理條件而計算晶 圓處理所需時間之功能；基於同條件之實效值之統計而計 算參數中未設定之晶圓搬運時間、或腔室之處理條件穩定 化時間之功能；自藉由該2個功能而求出之時間，計算晶 圓處理之結束預測時刻之功能；預測時刻因半導體製造裝 置之問題而自最初預測脫離之情形時，修正預測時刻之功 能；在自與修正之有無無關之該結束預測時刻而追溯指定 半導體製造裝置之使用者之-定時間之時點，將特定之信 . 號通知至 MES(Manufacturing Execution System :製造執行 、 系統）或MCS之功能；或藉由信號塔之點亮裝置之變化或 裝置附帶之蜂鳴器之鳴動而通知至使用者之功能。 又，為線上官理離線裝置，在先前，如圖5所示，使用 將可線上於進行工序管理之主機裝置⑻之個人電腦1〇2組 入離線裝置103，經由個人電腦102而讀取離線裝置ι〇3之 160337.doc 201234151 裝置狀態資訊之方法。 [先前技術文獻] [專利文獻] [專利文獻1]曰本特開2009-43950號公報 【發明内容】 [發明所欲解決之問題] 在上述先前之構成中’將個人電腦1〇2等之線上機器名 入離線裝置103時，隨著裝置之改造，不僅花費開發費 用，各裝置中需要開發之部分較多，向離線裝置1〇3較多 之生產工序之應用較為困難。 一直追求對LSI工廠之化合物半導體工廠進行再開發戋 於人工作業工廠之活用時，以低投資而將離線之人工處^ 進行符合線上之管理，從而實現節約人力與防止作業失誤 之技術。 ' 本發明係解決上述先前之問題者，目的在於提供一種在 具有人工搬運/離線裝置之生產線i，線上管理裝置狀 態，以低投資進行適於裝置管理與節約人力之導航功能， 藉此：即使是具有離線裝置之生產線，仍可實現基於生產 管理系統之虛擬線上管理之生產管理系統及使用其之生產 管理方法。 [解決問題之技術手段] 考X月之生產吕理系統，其在使用至少包含離線裝置之 -個或複數個處理裝置而製造半導體元件之半導體製造工 序中’其包含··主機裝置’其係對於該—個或複數個處理 J60337.doc 201234151 裝置具有批次之處理流程進展管理功能；及管理個人電 腦’其係讀取以點亮'非點亮而通知附加於該離線裝置之 裝置運轉狀況之信號塔信號，並將該離線裝置之裝置狀辑 資訊傳送至該主機裝置；且，該主機裝置基㈣至少b 離線裝置之-個或複數個處理裝置之裝置狀態資訊，經由 對應之該處理裝置之該管理個人電腦，使包含該離線裝置 之-個或複數個處理裝置之各批次之作業指示資訊輸出， 藉此達成上述目的。 又，較好的是’在本發明之生產管理系統中，自上述至 少=含離線裝置之—個或複數個處理裝置同時檢測作業所 耑仏號時，上述主機裝置綜合判斷批次之處理優先順序、 作業者當前地點等之生產條件，並經由該至少包含離線裝 置之-個或複數個處理袭置之各自之管理個人電腦，使作义 業指示資訊輸出。 再者，較好的是，在本發明之生產管理系統中上述主 機裝置由自上述至少包含離線裝置之一個或複數個處理裝 置分別讀取之處理開始信號、與預先登錄之製程時間，預 測處理結束時刻’並經由該至少包含離線裝置之一個或複 數個處理裝置之各自之管理個人電腦，使作業預約指示資 訊輸出。 再者，較好的是，在本發明之生產管理系統中，上述管 理個人電腦將上述裝置狀態資訊上傳至上述主機裝置，該 主機裝置基於經上傳之裝置狀態資訊，將批次之作業指示 資下載至與其對應之管理個人電腦。 160337.doc 201234151 發月之生產管理方法為利用本發明之上述生產管理系 統之生產管理方法，其讀取以點亮'非點亮而通知附加於 上述離線裝置之裝置運轉狀況之信號塔信號，由管理個人 電腦將該離線裝置之裝置狀態資訊傳送至該主機裝置，該 主機裝置係基於該離線裝置之裝置狀態資訊，經由該管理 個人電腦，使該離線裝置之批次之作業指示資訊輸出藉 此達成上述目的。 基於上述構成，以下，茲說明本發明之作用。 在本發明中，具有對於—個或複數個處理裝置具有批次 之處理進展管理功能之主機裝置、與讀取以點亮、非點京 而通知附加於離線裝置之裝置運轉狀況之信號塔信號而 離線裝置之裝置狀態資訊傳送至主機裝置之管理個人電 腦，且主機裝置基於至少包含離線裝置之一個或複數個處 理裝置之裝置狀態資訊，經由對應之處理裝置之管理個人 電腦，使包含離線裝置之一個或複數個處理裝置之各批次 之作業指示資訊輸出。 /此，讀取離線裝置之信號塔信號（包含警告信號），自 官理個人電腦傳送裝置狀態資訊至進行工序管理之主機裝 置，而能夠主機裝置進行亦包含離線裝置生產管理，從而 即使是具有離線裝置之生產線，仍可實現基於生產管理系 統之虛擬線上管理。因此，可以低投f，在小規模生產 :、局部性之分散生產線上’有效且確實地進行與線上控 制同等之生產管理。 [發明之效果] 160337.doc 201234151 基於以上，根據本發明，讀取離線裝置之信號塔信號 (包含警告信號），自管理個人電腦，傳送裝置狀態資訊至 進行工序管理之主機裝置，以主機裝置，亦包含離線裝 置’而進行生產管理’因此即使是具有離線裝置之生產 線’仍可實現基於生產管理系統之虛擬線上管理，從而可 以低投資’在小規模生產線.局部性之分散生產線上，有 效且確實地進行與線上控制同等之生產管理。 【實施方式】 以下，關於本發明之生產管理系統及使用其之生產管理 方法之實施形態，茲參照圖式詳細說明。 圖1係顯示本發明之實施形態中之生產管理系統之要部 構成例及其動作之方塊圖。 在圖1中，本實施形態之生產管理系統丨具有：各管理個 人電腦2’其係對包含離線裝置之複數個處理裝置之各者 付與獨特之ID ;主機裝置3，其係設為可與各管理個人電 腦W別交換資訊；及讀卡機4，其係設為將複數個生產作 業（複數個生產批次）中各個付與獨特之m及處理資訊（流 程）之寅料卡（RF-ID)自資料卡賦與裝置（未圖示）賦與作業 者’而可自該資料卡讀取各作業者之生產資訊。 ;資料卡中ΐ入人有搭載稱為標籤晶片之記憶體之ic晶 片及天線’且以使作業者一目了然之方式而於卡片表面上 記載有「將哪個堆料機之哪個生產作業即晶以批次)人工 搬運至哪個處理裝置而逸 „ 夏旳進仃作業」。資料卡，以迴避處理 裝置中之輸入失誤之方式， 式於1C晶片内登錄資料，藉由讀 160337.doc 201234151 切4,容易且確實可讀取，以條 精由條形碼，容易且確實可讀取 己生產條件， # m 4〇 /st ^ c日曰片内之登錄資料， 係獲知例如處理所t之批次 料。 要如何之處理之資 作為生產作業之晶厘（批次）之作 _ 理個人電腦21 + ”曰/、資§fl，顯示於管 之資料=1 或藉由連接於管理個人電腦2 :置、裝置’資料卡之内容經覆寫而得以顯示。 6又置於例如離線裝置等之處理裝置 腦2，分別連接於主機裝置 ㈣個人電 夂W 殘衷罝3與°貝卡機4。管理個人電腦2將 =業者之生產資訊上傳至主機裝置3,基於上傳之生產 »主機裝置3將作業指示資訊下載至與其對應之管理 =腦2中，言之’管理個人電腦2，#由作業者將處 開、、，。束時寫入生產批次資訊(批次心流程資訊)之作 :者之資料卡觸碰或靠近讀卡機4’而讀取該資料卡之内 容，經由管理個人電腦2而傳送至主機裝置3。主機裝置 3’基於該傳送之資料卡之内容（生產批次資訊），掌握:批 次之處理狀況(進展管理、正常處理之校對)，使符合該批 次進展狀況之作業指示、晶£(批次）之取出指示、下一工 序之處理裝置選定與其搬運指示顯示於管理個人電腦2之 顯示晝面，且將作業歷程自動收集於主機裝置3之資料庫 中〇 圖2係顯示圖丨之生產管理系統丨中之管理個人電腦2與主 機裝置3之軟體構成例之方塊圖。 如圖2所示，本實施形態之生產管理系統丨中之管理個人 160337.doc 201234151 電腦2具有：CPU(中央運算處理裝置⑵，其係作為進行入 體之控制之控制部；輸入裝置22，其係用以相對cpu^ 行指令輸入之鍵盤'滑鼠、觸控面板及筆輸入裝置，進而 經由通訊網路（例如網際網路或内部網路）而進行接收輪 入’顯不部23,其係於顯示晝面上顯示初期晝面、選擇場 面、基於㈣21之控制結果晝面及操作輸入畫面等. R〇M 24，其係作為記憶控制程式及其資料等之可電腦讀 取之可讀取記錄媒體；及讓25，其係作為於起動時續 取控制程式及其資料等，而作為於基於咖以之各控制時 讀取.記憶資料之操作記憶體而動作之記憶部。 本貫施形態之生產管理系統丨中之主機裝置3具有： CPU(中央運算處理裝置）31，其係除了作為進行全體之控 制之控制部；及資料庫32，其係作為記憶控制程式及其資 料等之可電腦讀取之可讀取記錄媒體、及作為於起 動時^取控制程式及其資料等，而作為於基於CPU 31之各 控制時讀取.記憶資料之操作記憶體而動作之記憶部之 RAM之外’記憶大量之生產資訊。 作為可續取記錄媒體之R〇M，除了硬碟之外，可以攜帶 自由之光碟、磁光碟、磁碟及1(：記憶體等而構成。該控制 程式及其資料等雖記憶mROM，但該控制程式及其資料， 可自其它可讀取記錄媒體，或，經由無線、有線或網際網 路等而下載至ROM。 管理個人電腦2中之CPU 21具有：資料輸入機構211，其 係基於控制程式及其資料，將以讀卡機4讀取之批次ID及 160337.doc 201234151 其工序内谷加以資料輸入；流程對照機構212 ,其係流程 對照資料輸入機構211資料輸入之批次1〇及其工序内容作 為生產資訊疋否正確；對照結果顯示控制機構2丨3，其係 於顯不晝面上顯示流程對照機構212進行之對照結果及其 後之處理内容（處理參數）；參數序號發行機構214，其係若 對照結果作為作業指示正確，則發行對應於批次ID之參數 序號；處理結束通知機構215，其係將對於該批次m之處 理結束之狀況通知至主機裝置3 ;處理歷程傳送機構216， 其係處理歷程寫入後，將該處理裝置之處理歷程資料傳送 至主機裝置3 ;下一工序内容顯示控制機構217，其係於顯 示晝面上顯示控制「晶匣之取出」之訊息，且使「入庫堆 料機j或「下一工序之處理裝置」顯示。 對照結果顯示控制機構213，若對照結果作為作業指示 正確，則於顯示畫面上顯示控制「警告」及其「搬運目的 地」。 主機裝置3中之CPU 31具有：參數登錄機構3ιι ’其係基 於控制程式及其資料’ #收對應於管理個人電腦2之批次 ID之參數序號之發行，將對應於參數序號之參數（工序内 容）登錄於資料庫32中；處理開始指示機構312，其係基於 參數登錄機構311之對應於參數序號之參數内容（工序内容） 之且錄後’經由管理個人電腦2而相對處理裝置指示「處 理開始」；處理歷程寫入指示機構3]3，其係接收處理結 束通知，以相對該處理裝置之管理個人電腦2而寫入該處 理裝置之處理歷程資料之方式指示；處理歷程登錄機構 I60337.doc 201234151 314，其係接收來自管理個人電腦2之傳送處理歷程資料， 而將該處理裝置之處理歷程資料登錄於資料庫32中；及下 一工序内容顯示指示機構315,其係於管理個人電腦2中進 行下一工序内容之顯示指示。 基於上述構成，茲說明利用本實施形態之生產管理系統 1 ’作業者進行生產處理之情形之一例。 圖3係顯示包含利用圖i之生產管理系統丨而進行生產處 理之情形之作業者之作業處理之生產管理系統1之動作例 之流程圖。 首先，如圖3所示，在步驟81中，由作業者操作構成資 料卡賦與裝置5之堆料機管理個人電腦51而選擇「卡片輸 出資訊」。作為「卡片輸出資訊」，相對作業者指示自哪 個堆料機取出哪個晶匣（批次）而人工搬運至哪個處理 置。 此後，在步驟S2,作業者操作堆料機管理個人電腦“而 自資料卡印表機5 2印刷輸出資料卡5 3。 接者，在步驟S3，作業者依據印刷輸出之資料卡53之内 容而使該經指示之晶匣（批次）自源極堆料機54出庫。 其後，在步驟S4,作業者將出庫之晶匿（批次）人工搬運 至特定之處理裝置中， 進而，在步驟S5中，作業者將人工搬運之晶£(批次）安 置於裝置裝載機，且以讀卡機4讀取資料卡53之内容。 作為Βθ匣之女置」，作業者將晶匣（批次）安置於該 處理裝置巾。藉由使資料卡接近於安置於該處理裝置之讀 160337.doc 201234151 卡機4,而進行「批次ID/工序讀取」，從而讀卡機*可益 讀取失誤地正確讀取以該處理裝置進行處理之批次⑴及其 工序内容。 以上之步驟S1〜S5,係作業者實行藉由堆料機管理個人 電腦51及資料卡53而指示之事件，且使讀卡機4讀取資料 卡53之内容之作業者之作業。 接著，在步驟S6，在管理個人電腦2中，資料輸入機構 211資料輸入以讀卡機4讀取之該處理裝置中進行處理之批 次ID及其工序内容，流程對照機構212進行各該處理裝置 之流程對照，進行「晶E驗證、參數校對」，對照結果顯 示控制機構2U將其對照結果及其後之作業内容顯示於顯 示。卩23。即，没置於该處理裝置之管理個人電腦2，確認 讀卡機4讀取之批次ID及其工序内容作為作業指示是否正 確。若讀卡機4讀取之批次ID及其工序内容（流程）正確， 則管理個人電腦2在其顯示畫面上相對作業者進行接收確 認。即，若該批次ID及其工序内容正確，則作為接收確 認，作業者可對處理裝置指示處理開始，管理個人電腦2 之參數序號發行機構214發行對應於批次ID之參數序號， 在步驟S7，主機裝置3接收對應於該批次ID之參數序號， 主機裝置3之參數登錄機構3丨丨將晶匣（批次）及參數（工序内 容）登錄至資料庫32中。 在步驟S8中，藉由主機裝置3之參數登錄機構311之對應 於批次ID之參數序號之登錄後，處理開始指示機構312相 對處理裝置自動指示「處理開始 I60337.doc 12 201234151 在步驟S6中’作為流程對照機構212對照之結果，若該 批次ID及其工序内容不正確（否）’則對照結果顯示控制機 構213於該管理個人電腦2之表示畫面上顯示控制「警告」 及其「搬運目的地」。 以上之步驟S6〜S8係管理個人電腦2及主機裝置3進行之 動作。 接著，在步驟S9中’於顯示畫面上發佈「警告」之情形 時，作業者自該處理裝置取出晶匣（批次），將該晶匿（批 次）人工搬運至正規之搬運目的地之處理裝置。 再者，在步驟S8中，基於處理開始指示機構312之「處 理開始指示」，處理裝置開始處理，於一定時間後，處理 裝置結束其處理。處理裝置，在步驟31〇，管理個人電腦2 之處理結束通知機構215，將對於該晶匣（批次）之處理結束 之狀況通知至主機裝置3，主機裝置3之處理歷程寫入指示 機構313接收該處理結束通知，在步驟su，以相對該處理 裝置之管理個人電腦2寫入處理歷程之資料之方式指示， 管理個人電腦2之處理歷程傳送機構216將該處理裝置之處 理歷程資料傳送至主機裝置3 ^在主機裝置3中，接收來自 管理個人電腦2之處理歷程資料，主機聚置3之處理歷程登 錄機構314將該處理裝置之處理歷程資料登錄至資料庫 中。 ^者，在步驟812,主機裝置3判斷相對該晶匿（批次）處 理疋否結束，若相對該晶匣（批次）處理結束（yes卜則主 為裝'置3之下一工序内谷顯示指示機構315 ,在步驟S13 , 160337.doc -13- 201234151 於管理個人電腦2中 個人電腦2之下—工戽卜—工序内容之顯示指示’管理 内谷顯示控制機構2〗7於其顯 上顯示控制「晶g之取 ^ 再 /、.，"貞不畫面 ^ 」之讯心，且使「入庫堆料換 顯不於管理個人電腦2之顯 4機」 者自裝置裝載機卸下該曰㈣\ 。依據該指示，作業 m蚀訪曰 日日匣（批次）而搬運至特定指示堆料 機，使該曰曰厘（批次）入庫至特定指示堆料機。 4 在步驟S12中’若相對該晶厘（批 (NO)，則主機裝置3之 禾、··。束 .^ςΐ4 上 工序内谷顯示指示機構315，在 步驟叫，於管理個人電腦2中進行下—工序内容之二 示’管理個人電腦2之下—工&^ 工序内谷顯示控制機構2丨7， 其顯示晝面上顯示「晶匿之取出」之訊息，且使「下」 序之處理裝置」顯示於管理個人電腦2之顯示晝面上 據該指示，作章者自拉要壯# ^ 一作系者自褒置裝載機卸下該晶Ε (批次）而搬運 至下—一工序之處理裝置，作業者在步驟S5,將該晶厘（批 次）女置於裝置裝載機，且將資料卡靠近讀卡機 機4讀取卡片資訊。. 。貫卞 以上之步驟S1〇〜Sl4,係管理個人電腦2及主機裝置 行之動作。 +另，作業者’該處理裝置之處理之間，進行其他工作， 若於管理個人電腦2之顯示畫面上顯示「晶匣之取出」及 「向下一工序之搬運」之指示，則自該處理裝置進行」「晶 匣之取出」，於下一工序中人工搬運該晶匣（批次卜 概言之，在管理個人電腦2中，具有：資料輸入機構2ΐι 資料輪入以讀卡機4讀取之批次10及其工序内容之資料輸 160337.doc -14- 201234151 入步驟’流程對照機構212流程對照輸入之批次ID及其工 序内谷作為生產資訊是否正確之流程對照步驟；對照結果 顯不控制機構213於顯示畫面上顯示控制流程對照機構212 進行之對照結果及其後之作業内容之對照結果顯示控制步 驟，右對照結果作為作業指示正確，則參數序號發行機構 214發行對應於批次ID之參數序號之參數序號發行步驟； 處理結束通知機構215將相對批次m處理裝置之處理結束 之狀况通知至主機裝置3之處理結束通知步驟；處理裝置 之處理歷程寫入後，處理歷程傳送機構216將該處理裝置 之處理歷程資料傳送至主機裝置3之處理歷程傳送步驟； 下一工序内容顯示控制機構217於顯示畫面上顯示控制 曰曰匣之取出」之訊息，且顯示控制「入庫堆料機」或 下工序之處理裝置」之下一工序内容顯示控制步驟。 在主機裝置3中’具有：接收參數序號之發行，參數登 錄機構311將對應於參數序號之參數内容登錄於資料庫中 之參數&錄步驟，參數内容之登錄後，處理開始指示機構 3 12對處理裝置指示 接收處理結束通知， 「處理開始」之處理開始指示步驟； 處理歷程寫入指示機構3丨3以相對管 理個人電腦2而寫入處理歷程資料之方式指示之處理歷程 寫入指示步驟；處理歷程登錄機構314接收來自管理個人 電腦2之傳送處理歷程資料，而將處理農置之處理歷程資 料登錄於資料庫32令之處理歷程登錄步驟；及下一工序内 容顯示指示機構315於管理個人電腦2中進行下一工序内容 之顯示指示之下一工序内容顯示指示步驟。 160337.doc •15· 201234151 已說明作為主機裝置3與作業者之作業界面之管 理個人電腦2及讀卡機4 ’接著，利用圖像細說明，即使 Γ有離線裝置作為處理裝置之生產線，仍將實現基於生產 管理系統1之虛擬線上管理之管理個人電腦2之其他功能。 基於以上之本實施形態之生產管理系統i，操作員即作 業者’藉由在決定之週期下以人王搬運而巡迴預先決定之 根，依據顯示於管理個人電腦2之顯示畫面或資料卡（RF_ ID標藏）之作業指示用畫面之生產資訊，即使離線裝置中 不會自動接收批次之處理裝置，仍可確實進行正破之作業 处理，、批_人搬運·下一工序處理。藉此在具有人工搬運/ 離線裝置之生產線上，進行適於作業管理及節約人力之導 航而確實實現作業之效率化及防止作業失誤。 圖4係圖1之生產管理系統中之離線裝置即複數個處理裝 置、管理個人電腦2及主機裝置3之配置圖。 在圖4中，於離線裝置6中設置有以可確認處理裝置為異 常（警報）或運轉、非運轉（維護（強制停止）、可處理、處理 中、處理結束、處理等待）等之方式而點亮顯示之信號塔 61 °玄離線裝置6之彳§號塔61廣泛用於本來之目的即檢測 運轉、非運轉等之裝置狀態。管理個人電腦2讀取包含該 裝置狀態資訊之信號塔信號/警告信號（以下簡稱為信號塔 k號），使離線裝置ό虛擬線上化而可即時資訊取得離線裝 置ό之裝置狀態。於與該信號塔61連接之信號線62，設置 璜取各種信號之解碼裝置63，以可與管理個人電腦2進行 線上通訊之電子機器讀取’藉此，無需改造離線裝置6之 160337.doc 201234151 裝置本體’而將離線裝置6之裝置狀態自管理個人電腦2傳 送其裝置狀態資訊至進行工序管理之主機裝置3。 遠生產管理系統丨具有：主機裝置3，其對至少包含一個 或複數個離線裝置6之_個或複數個處理裝置，具有批次 之處理流程進展管理功能；及各管理個人電腦2，其係讀 取以點受、非點亮而通知附加於離線裝置6之裝置運轉狀 況之信號塔信號（包含警報信號），而將離線裝置6之裝置狀 態資訊（異常（警報）或運轉、非運轉狀態資訊；裝置是否可 用之資訊）傳送至主機裝置3 ;且主機裝置3基於至少包含 離線裝置6之一個或複數個處理裝置之各裝置狀態資訊（異 常（警報）或運轉、非運轉狀態資訊；裝置是否可用之資 訊），經由各管理個人電腦2而輸出批次之作業指示資訊。 該情形，在主機裝置3中，自複數個離線裝置6同時檢測 作業所需之信號時，综合判斷批次之處理優先順序、作業 者田刖地點等，而向各離線裝置6之管理個人電腦2輸出作 業指示資訊。即，自至少包含離線裝置6之一個或複數個 處理裝置同時檢測作業所需之信號時，主機裝置3綜合判 斷批次之處理優先順序、作業者當前地點等之生產條件， 經由至少包含離線裝置6之一個或複數個處理裝置之各者 之各管理個人電腦2而使作業指示資訊輸出。又，由自離 線裝置6讀取之信號塔信號中所含之處理開始信號、與預 先登錄之離線裝置6之製程時間，預測處理結束時刻，而 向各離線裝置6之管理個人電腦2輪出作業預約指示。主機 裝置3由自至少包含離線裝置6之一個或複數個處理裝置分 I60337.doc •17- 201234151 別讀取之處理開始信號、與 理結束時刻，經由至少包含離線裝置6之==預測處 理裝置之各者之各管理個人電腦2 :編處 輸出。 使忭菜預約指示資訊 可考量經由該各管理個人電腦乂批次 〜 :於各管理個人電腦2之顯示部。之 章或圖樣等進行顯千鈐山^ 重由上’以文201234151 6. TECHNOLOGICAL FIELD OF THE INVENTION [Technical Field] The present invention relates to a re-development of a compound semiconductor factory or the like, for example, an LSI manufacturing plant, or a one or a plurality of off-line devices in a manual factory A production management system for producing a semiconductor element such as a semiconductor light-emitting element such as a semiconductor (LED) or a semiconductor laser element, and a production management method using the same. [Prior Art] According to Patent Document 1. In the conventional LSI manufacturing plant or the like, the function of calculating the time required for wafer processing from the wafer processing conditions set in the semiconductor manufacturing apparatus; The value of the value is calculated to calculate the wafer transfer time that is not set in the parameter or the processing condition stabilization time of the chamber; the function of calculating the end time of the wafer processing from the time obtained by the two functions The function of correcting the predicted time when the predicted time is deviated from the initial prediction due to the problem of the semiconductor manufacturing apparatus; and the time of the user who specifies the semiconductor manufacturing apparatus is traced to the end of the forecasting time regardless of the presence or absence of the correction. At the time, the specific letter. is notified to the MES (Manufacturing Execution System) or MCS function; or notified by the change of the lighting device of the signal tower or the buzzer attached to the device. The function of the person. Further, as an online official offline device, as shown in FIG. 5, a personal computer 1〇2 that can be used for the host device (8) that performs the process management is incorporated into the offline device 103, and the offline computer 103 is read offline. Device ι〇3 160337.doc 201234151 Method of device status information. [Prior Art Document] [Patent Document 1] [Patent Document 1] JP-A-2009-43950 SUMMARY OF INVENTION [Problems to be Solved by the Invention] In the above-described prior art, 'a personal computer 1〇2, etc. When the online device is entered into the offline device 103, it is not only costly to develop, but also requires a lot of development in each device, and it is difficult to apply the production process to the offline device. We have been pursuing the re-development of the compound semiconductor factory of the LSI factory. When it is used in the manual operation factory, the offline manual unit is managed with low investment, and the technology for saving manpower and preventing operation errors is realized. The present invention is directed to solving the above-mentioned prior problems, and an object of the present invention is to provide a production line i having a manual handling/off-line device, to manage the state of the device on-line, and to perform a navigation function suitable for device management and labor saving with low investment, thereby: It is a production line with offline devices, and it is still possible to realize a production management system based on virtual online management of production management systems and a production management method using the same. [Technical means for solving the problem] In the semiconductor manufacturing process in which a semiconductor device is manufactured using at least one or a plurality of processing devices including an offline device, the system includes the "host device" For the one or more processing, the J60337.doc 201234151 device has a batch process flow management function; and the management personal computer 'is read to light up 'non-lighting' to notify the device operating status attached to the offline device Signal tower signal, and transmitting device information of the offline device to the host device; and, the host device base (4) at least b device information of one or more processing devices of the offline device, corresponding to the processing The management personal computer of the device outputs the work instruction information of each batch including one or a plurality of processing devices of the offline device, thereby achieving the above object. Moreover, it is preferable that in the production management system of the present invention, when the operation number is detected from at least the above-mentioned at least one or more of the offline devices, the host device comprehensively judges that the processing of the batch is prioritized. The production conditions of the order, the current location of the operator, and the like are outputted by the management personal computer including at least one or a plurality of processing devices of the offline device. Furthermore, in the production management system of the present invention, preferably, the host device is processed by a processing start signal read from one or more processing devices including at least the offline device, and a pre-registered process time, and a prediction process. The end time 'and the job reservation instruction information is output via the respective management personal computers including at least one of the offline devices or the plurality of processing devices. Furthermore, in the production management system of the present invention, the management personal computer uploads the device status information to the host device, and the host device indicates the operation of the batch based on the uploaded device status information. Download to the corresponding management PC. 160337.doc 201234151 The production management method of the monthly production is a production management method using the above-described production management system of the present invention, which reads a signal tower signal for notifying the operation state of the device attached to the offline device to illuminate 'non-lighting, Transmitting the device status information of the offline device to the host device by the management personal computer, and the host device is configured to output the batch operation instruction information of the offline device based on the device status information of the offline device. This achieves the above objectives. Based on the above configuration, the action of the present invention will be described below. In the present invention, there is a host device having a batch processing progress management function for one or a plurality of processing devices, and a signal tower signal for reading the operation state of the device attached to the offline device by lighting or not. And the device status information of the offline device is transmitted to the management personal computer of the host device, and the host device includes the offline device according to the device status information of at least one of the offline devices or the management device of the corresponding processing device. The job instruction output of each batch of one or a plurality of processing devices. / /, read the signal tower signal (including the warning signal) of the offline device, from the official PC transfer device status information to the host device for process management, and the host device can also include the offline device production management, so that even The production line of the offline device can still realize virtual online management based on the production management system. Therefore, it is possible to carry out production management that is equivalent to online control in an efficient and reliable manner on a small-scale production: a localized production line with low investment. [Effect of the Invention] 160337.doc 201234151 Based on the above, according to the present invention, the signal tower signal (including the warning signal) of the offline device is read, and the personal computer is transferred, the device status information is transmitted to the host device for performing process management, and the host device is used. It also includes offline devices' for production management' so that even a production line with offline devices can realize virtual online management based on production management system, so that it can be low-invested in small-scale production lines and localized production lines. And the production management is the same as online control. [Embodiment] Hereinafter, embodiments of the production management system and the production management method using the same according to the present invention will be described in detail with reference to the drawings. Fig. 1 is a block diagram showing an example of the configuration of a main part of the production management system and an operation thereof in the embodiment of the present invention. In FIG. 1, the production management system of the present embodiment has: each management personal computer 2' assigns a unique ID to each of a plurality of processing devices including an offline device; and the host device 3 is configured to be Exchange information with each management personal computer; and card reader 4, which is a data card for paying each of a plurality of production operations (a plurality of production batches) with unique m and processing information (process) ( The RF-ID is assigned to the operator from the data card assignment device (not shown), and the production information of each operator can be read from the data card. In the data card, the intruder has an ic chip and an antenna that carries a memory called a tag chip, and the operator can clearly indicate which production operation of the stacker is the crystal on the surface of the card so that the operator can see at a glance. Batch) Which processing device is manually transported to the „ 旳 旳 旳 旳 仃 。. The data card, in order to avoid input errors in the processing device, registers the data in the 1C chip, and reads 160337.doc 201234151 to cut 4, which is easy and readable, and is easily and readable by the barcode. Take the production conditions, # m 4〇/st ^ c, the registration data in the film, and know the batch materials of the processing unit. How to deal with the capital as a production operation (batch) _ _ personal computer 21 + 曰 /, capital § fl, displayed in the tube information = 1 or by connecting to the management PC 2: set The contents of the device's data card are displayed by overwriting. 6 The device 2 is placed in the brain 2 of the processing device, for example, an offline device, and is connected to the host device (4), the personal power device W, and the Bekager machine 4. Management The personal computer 2 uploads the manufacturer's production information to the host device 3, and downloads the job instruction information based on the uploaded production»host device 3 to the corresponding management=brain 2, saying that 'management of the personal computer 2, # by the operator The opening, the , and the bundle are written into the production batch information (batch heart flow information): the data card of the person touches or approaches the card reader 4' and reads the content of the data card, and manages the individual The computer 2 transmits to the host device 3. The host device 3' grasps the processing status of the batch (progress management, proofreading of normal processing) based on the content of the transmitted data card (production batch information), so that the batch is matched. Work instructions for progress, crystal £ (batch) The removal instruction and the processing device of the next process are selected and displayed along the display screen of the management personal computer 2, and the work history is automatically collected in the database of the host device 3. FIG. 2 shows the production management of the image. A block diagram of a software configuration example of the management PC 2 and the host device 3 in the system. As shown in Fig. 2, the management person in the production management system of the present embodiment 160337.doc 201234151 The computer 2 has: a CPU (central operation) The processing device (2) is a control unit for performing control of the in-body; the input device 22 is for a keyboard 'mouse, a touch panel and a pen input device for inputting commands relative to the cpu, and further via a communication network (for example) The Internet or the internal network is used to receive the round-up display section 23, which displays the initial screen on the display screen, selects the scene, and based on (4) 21 control result screen and operation input screen. R〇M 24, which is a computer-readable readable recording medium as a memory control program and its data; and 25, which is used as a control program and its data during startup. And the memory unit that operates in the operation memory that reads the memory data in the control of each of the coffee makers. The host device 3 in the production management system of the present embodiment has a CPU (Central Processing Unit) 31, It is a control unit that controls the whole of the system; and a database 32, which is a computer-readable readable recording medium such as a memory control program and its data, and a control program for starting and controlling it. As a data, etc., as a memory of the memory unit that operates based on the operation memory of the memory data read and read by the CPU 31, a large amount of production information is memorized. As a reproducible recording medium, R〇M, in addition to In addition to the hard disk, you can carry a free disc, a magneto-optical disc, a magnetic disc, and a memory (1:: memory). Although the control program and its data and the like memorize the mROM, the control program and its data can be downloaded to the ROM from other readable recording media or via wireless, wired or internet. The CPU 21 of the management personal computer 2 has: a data input unit 211, which inputs the batch ID read by the card reader 4 and the data in the process of the process in the process of reading the batch ID read by the card reader 4; The comparison mechanism 212 is configured to compare the batch input of the data input unit 211 and the content of the process as the production information. The control result shows that the control mechanism 2丨3 is displayed on the display surface. The comparison result by the mechanism 212 and the subsequent processing content (processing parameter); the parameter number issuing unit 214, if the comparison result is correct as the job instruction, issues the parameter number corresponding to the batch ID; the processing end notification mechanism 215, It notifies the host device 3 of the status of the processing of the batch m; the processing history transfer mechanism 216, after the processing history is written, transfers the processing history data of the processing device to the host device 3; The content display control unit 217 is configured to display a message for controlling the "removal of the wafer" on the display surface, and to make "input stocker j or "next Order processing device of "display. The comparison result display control means 213 displays the control "warning" and its "transport destination" on the display screen if the comparison result is correct as the job instruction. The CPU 31 in the host device 3 has a parameter registration mechanism 3 ιι 'based on the control program and its data'. The receipt of the parameter number corresponding to the batch ID of the management personal computer 2, which corresponds to the parameter number parameter (process The content is recorded in the database 32; the processing start instruction unit 312 is based on the parameter content (process content) corresponding to the parameter number of the parameter registration unit 311, and is instructed by the management PC 2 after the recording. Processing start instruction; processing history writing instruction means 3] 3, which receives the processing end notification, and indicates the manner in which the processing history data of the processing apparatus is written with respect to the management personal computer 2 of the processing apparatus; processing history registration mechanism I60337 .doc 201234151 314, which receives the processing history data from the management personal computer 2, and registers the processing history data of the processing device in the database 32; and the next operation content display instruction mechanism 315, which is attached to the management individual The computer 2 performs an indication of the display of the contents of the next process. Based on the above configuration, an example of a case where the production management system 1' operator of the present embodiment performs production processing will be described. Fig. 3 is a flow chart showing an operation example of the production management system 1 including the work processing of the operator in the case where the production management system of Fig. i is used for the production process. First, as shown in Fig. 3, in step 81, the operator operates the stacker managing personal computer 51 constituting the material card assigning device 5 to select "card output information". As the "card output information", it is instructed by the operator which tank (batch) is taken out from which stacker and manually transferred to which processing. Thereafter, in step S2, the operator operates the stacker to manage the personal computer "and prints the output data card 53 from the data card printer 5 2. In step S3, the operator outputs the contents of the data card 53 according to the print. And the indicated wafers (batch) are taken out from the source stacker 54. Thereafter, in step S4, the operator manually transports the insufficiency (batch) of the outbound storage to a specific processing device, and further, In step S5, the operator places the manually-loaded crystal (batch) on the device loader, and reads the contents of the data card 53 by the card reader 4. As the female 置 匣 ,, the operator will smash the crystal (Batch) is placed in the treatment device towel. By making the data card close to the reading 160337.doc 201234151 card machine 4 placed in the processing device, the "batch ID/process reading" is performed, so that the card reader* can correctly read the error correctly. The batch (1) and its process contents processed by the processing device. In the above steps S1 to S5, the operator performs an operation instructed by the stacker to manage the personal computer 51 and the data card 53, and causes the card reader 4 to read the contents of the data card 53 by the operator. Next, in step S6, in the management personal computer 2, the material input unit 211 inputs the batch ID and the process contents processed by the processing device read by the card reader 4, and the flow comparison unit 212 performs each processing. In the flow comparison of the device, "crystal E verification, parameter calibration" is performed, and the comparison result display control unit 2U displays the comparison result and the subsequent work contents on the display.卩 23. That is, the management PC 2 that is not placed in the processing device confirms whether the batch ID read by the card reader 4 and its operation contents are correct as the job instruction. When the lot ID read by the card reader 4 and the process contents (flow) thereof are correct, the management personal computer 2 receives the confirmation on the display screen with respect to the operator. In other words, if the batch ID and the content of the process are correct, the operator can instruct the processing device to start processing, and the parameter number issuing unit 214 managing the personal computer 2 issues the parameter number corresponding to the lot ID, in the step. S7, the host device 3 receives the parameter number corresponding to the lot ID, and the parameter registration unit 3 of the host device 3 registers the wafer (batch) and the parameter (process content) in the database 32. In step S8, after the registration of the parameter number corresponding to the lot ID of the parameter registration means 311 of the host device 3, the process start instruction means 312 automatically instructs the processing device to "process start I60337.doc 12 201234151 in step S6. As a result of the comparison with the flow control unit 212, if the batch ID and the content of the process are incorrect (NO), the comparison result display control unit 213 displays the control "warning" and its "display" on the display screen of the management personal computer 2. Handling destinations." The above steps S6 to S8 manage the operations performed by the personal computer 2 and the host device 3. Next, when the "warning" is issued on the display screen in step S9, the operator takes out the wafer (batch) from the processing device, and manually transports the crystal (batch) to the normal transfer destination. Processing device. Further, in step S8, based on the "processing start instruction" of the processing start instruction means 312, the processing means starts the processing, and after a certain period of time, the processing apparatus ends the processing. In step 31, the processing device manages the processing completion notification unit 215 of the personal computer 2, and notifies the host device 3 of the completion of the processing of the wafer (batch), and the processing history of the host device 3 is written to the pointing mechanism 313. Receiving the processing end notification, in step su, instructing the processing history transfer mechanism 216 of the management personal computer 2 to transfer the processing history data of the processing device to the management PC 2 of the processing device. The host device 3^ receives the processing history data from the management personal computer 2 in the host device 3, and the processing history registration unit 314 of the host aggregation unit 3 registers the processing history data of the processing device in the database. If yes, in step 812, the host device 3 determines whether the processing of the seeding (batch) is finished, and if the processing is completed with respect to the wafer (batch), the main device is installed in the next step. The valley display indication mechanism 315, in step S13, 160337.doc -13-201234151, under the personal computer 2 in the management personal computer 2 - the display of the operation content indication "management valley display control mechanism 2" 7 It shows the control of "grass g, then /,.,"贞不屏^", and makes "the storage stack is not changed to the personal computer 2". Remove the 曰 (4)\. According to the instruction, the operation m is carried out to the specific indicator stocker after the day (the batch), and the 曰曰 (batch) is warehousing to the specific indicator stocker. In step S12, if the crystal is used (the batch (NO), the host device 3, the beam, the beam, the display unit 315 in the process, and the step is called in the management PC 2 The following - the second part of the process description 'management of the personal computer 2 under the work & ^ process valley display control Structure 2丨7, which displays the message “Pickup Removal” on the display side, and displays the “Down” processing device” on the display screen of the management PC 2 according to the instruction. To be strong, the operator removes the wafer (batch) from the loader and transports it to the processing unit of the next process, and the operator places the crystal (batch) female in the device in step S5. Loader, and the data card is close to the card reader machine 4 to read the card information. The above steps S1〇~Sl4 are used to manage the actions of the personal computer 2 and the host device. + In addition, the operator's processing Between the processing of the device, other work is performed. If the instruction to "delete the wafer" and "deliver the next step" are displayed on the display screen of the management personal computer 2, "the crystal processing is performed from the processing device" "Remove", manually transporting the wafer in the next process (Batch Bu, in the management PC 2, has: data input mechanism 2ΐι data is inserted into the batch 10 read by the card reader 4 and The data of the operation content is transferred 160337.doc -14- 201234151 into the step ' The flow comparison mechanism 212 compares the input batch ID and the in-process valley as a process comparison step of whether the production information is correct; the comparison result display control unit 213 displays the control result of the control flow comparison mechanism 212 on the display screen and thereafter. The comparison result display control step of the work contents, and the right comparison result is correct as the job instruction, the parameter number issuing means 214 issues the parameter number issuing step corresponding to the parameter number of the lot ID; the process end notifying means 215 processes the relative lot m The processing completion notification step of the device is notified to the processing end notification step of the host device 3; after the processing history of the processing device is written, the processing history transmission mechanism 216 transmits the processing history data of the processing device to the processing history transmission step of the host device 3. The next step of the content display control means 217 displays the message "Control" is displayed on the display screen, and displays the next step content display control step for controlling the "stocking machine" or the processing device of the next process. In the host device 3, 'has: the issuance of the parameter number is received, and the parameter registration unit 311 registers the parameter content corresponding to the parameter number in the parameter & recording step in the database. After the parameter content is registered, the processing start instruction unit 3 12 The processing device instructs the processing device to end the notification of the processing start notification, the processing start instruction step of the "processing start"; and the processing history writing instruction instruction step of the processing history writing instruction unit 丨3 to write the processing history data relative to the management personal computer 2 The processing history registration unit 314 receives the transmission processing history data from the management personal computer 2, and registers the processing history data of the processing farm in the data base 32 to process the processing history registration step; and the next operation content display instruction unit 315 manages The display of the next process content in the personal computer 2 indicates the next process content display instruction step. 160337.doc •15· 201234151 The management of the personal computer 2 and the card reader 4 as the work interface between the host device 3 and the operator has been described. Then, using the detailed description of the image, even if the offline device is used as the production line of the processing device, Other functions of managing the personal computer 2 based on the virtual online management of the production management system 1 will be realized. According to the production management system i of the present embodiment described above, the operator, that is, the operator's tour of the predetermined root by the person in the decision cycle, is displayed on the display screen or the data card displayed on the management personal computer 2 ( The production information of the job instruction screen for the RF_ID is marked. Even if the offline processing device does not automatically receive the batch processing device, the job processing can be surely performed, and the batch_person handling and the next processing are performed. In this way, on the production line with the manual handling/off-line device, it is possible to carry out the operation management and save manpower to ensure the efficiency of the work and prevent the operation errors. 4 is a configuration diagram of an offline device, that is, a plurality of processing devices, a management personal computer 2, and a host device 3 in the production management system of FIG. 1. In FIG. 4, the offline device 6 is provided with a method of confirming that the processing device is abnormal (alarm) or operation, non-operation (maintenance (forced stop), processable, processing, processing end, processing wait), and the like. The signal tower that lights up the display 61 ° 玄 离线 offline unit 6 彳 号 tower 61 is widely used for the purpose of detecting the operation, non-operation, etc. The management personal computer 2 reads the signal tower signal/warning signal (hereinafter referred to as the signal tower k number) including the status information of the device, so that the offline device can be virtualized online and the offline information can be obtained by the instant information. On the signal line 62 connected to the signal tower 61, a decoding device 63 for extracting various signals is provided for reading by an electronic device for performing on-line communication with the personal computer 2, thereby eliminating the need to modify the offline device 6 of 160337.doc The device body of 201234151 transmits the device status information of the offline device 6 from the management personal computer 2 to the host device 3 for performing process management. The remote production management system has: a host device 3 having at least one or a plurality of offline devices 6 or a plurality of processing devices, having a batch process flow management function; and each management PC 2 Reading a signal tower signal (including an alarm signal) that notifies the operation state of the device attached to the offline device 6 by point reception and non-lighting, and the device status information (abnormal (alarm) or operation, non-operation state of the offline device 6 is read. Information; whether the device is available for transmission) to the host device 3; and the host device 3 is based on at least one device status information (abnormal (alarm) or operational, non-operational status information of at least one of the offline devices 6; Whether or not the information is available), the job instruction information of the batch is output via each management PC 2. In this case, in the host device 3, when a plurality of offline devices 6 simultaneously detect signals required for the job, the batch processing priority order, the operator's field location, and the like are collectively determined, and the personal computers are managed to the offline devices 6. 2 Output job instruction information. That is, when at least one of the offline devices 6 or a plurality of processing devices simultaneously detects a signal required for the job, the host device 3 comprehensively determines the processing priority of the batch, the current location of the operator, and the like, including at least the offline device. Each of the six or a plurality of processing devices manages the personal computer 2 to output the job instruction information. Further, the processing start signal included in the signal tower signal read from the offline device 6 and the processing time of the offline device 6 registered in advance are predicted to be processed, and the management PC 2 of each offline device 6 is rotated. Job appointment instructions. The host device 3 is composed of a processing start signal that is read from at least one of the offline devices 6 or a plurality of processing devices, and a processing end time, and a prediction processing device that includes at least the offline device 6 Each of the management PCs 2: edit output. The order information for the leek can be considered. The batches of the management PCs can be considered to be ~: on the display unit of each management PC 2. The chapter or the pattern, etc.
Mm 或於異常（警報）時等藉由蜂鳴 仃曰頻輪出，藉此對作業者· 作為使用該生產管理系統1之生產管理方法：Γ二理 ::電腦2讀取以點亮、非點亮而通知附加於離二： =::=號塔信號(包含警報信號)，將二 =置狀態資讯傳送至主機裝置3,主機裝置3基於離線裝 置6之裝置狀態資訊’經由管理個人電腦2,使離線裝置之 批次之作業指示資訊輸出。即，本實施形態之生產管理方 法’係由各管理個人電腦2讀取以點亮、非點亮而通知附 加於離線裝置6之裝置運轉狀況之信號塔信號（包含Μ奸 號)，將至少包含離線裝置6之一個或複數個處理裝置之‘ 置狀態資訊分別傳送至主機裝置3,主機裝置3基於至少^ 含離線裝置6之一個或複數個處理裝置之裝置狀態資訊， 經由對應之各管理個人電腦2，使至少包含離線裝置6之一 個或複數個處理裝置之批次之作業指示資訊輪出。該情 形，管理個人電腦2將裝置狀態資訊上傳至主機裝置3，主 機裝置3基於上傳之裝置狀態資訊，將批次之作業指示資 讯分別下載至與其對應之各管理個人電腦2中。 160337.doc •18· 201234151 藉由以上，自包含離線裝置6之裝置狀態資訊（運轉、非 運轉狀態資訊）之信號塔信號而即時掌握裝置之運轉、非 運轉狀態’藉此’進行王序f理之主機裝置3可於各離線 裝置6之管理個人電腦2之顯示畫面上準確顯示指示進行中 之生產作業（批次）搬運/處理指示n於位在看不到信 號塔61之位置之作#者，藉由顯示於各離線裝置6之管^ 個人電腦2之顯示畫面上之指示’仍可確實得知處理結 束。與此同時，當產生作業所需之信號之情形時，進行工 序管理之主機裝置3判斷優先順序，向各離線裝置6之管理 個人電腦2之顯示畫面顯示指示，藉此可管理作業之優先 順序再者，由於可自處理開始時刻預測處理結束時刻， 藉由組入向作業者發出先行（預定）作業指示等之功能，可 提问作業者之作業效率（節約人力再者，主機裝置3可自 動合計離線裝置6之裝置運轉狀況資料，可即時且正確地 進行先前手動合計之運轉率管理’從而可實現生產線平衡 等之工序改善。 、 如以上般，雖利用本發明之較佳實施形態而例示本發 明，但本發明不應限定於該實施形態而加以解釋。應理解 本發明僅基於專利中請範圍而解釋其範圍。本領域技術人 員應理解，根據本發明之具體之較佳實施形態之記載，基 於本發明之記載及技術常識，可實施等價之範圍。本說明 書中引用之專利、專利巾請案及文獻，其内容本身與具體 記載於本說明書者相同，其内容係作為對於本說明書之參 考而援用。 160337.doc 19 201234151 [產業上之可利用性] 在對LSI製造工廠之化合物半導體工廠等進行再開發或 在人工作業工廠中，在管理使用包含離線裝置之一個或複 數個處理裝置而製造發光二極體（LED)或半導體雷射元件 等之半導體發光元件等之半導體元件時之生產之生產管理 系統及生產管理方法之領域中，由於自管理個人電腦讀取 離線裝置之信號塔信號（包含警告信號）’並傳送裝置狀態 資訊至進行工序管理之主機裝置，以主機裝置進行亦包含 離線裝置之生產管理，因此，即使是具有離線裝置之生產 線，仍可實現基於生產管理系統之虛擬線上管理，以低投 資，在小規模生產線、局部性之分散生產線上，可有效且 確實地進行與線上控制同等之生產管理。 【圖式簡單說明】 圖1係顯示本發明之實施形態中之生產管理系統之要部 構成例及其動作之方塊圖。 圖2係顯示圖i之生產管理系統中之管理個人電腦與主機 裝置之軟體構成例之方塊圖。 圖3係顯示包含利用圖】之生產管理系統而進行生產處理 之情形之作業者之作業處理之生產管理系統之動作例之流 程圖。 圖4係圖1之生產管理系統中之離線裝置即複數個處理裝 置、官理個人電腦及主機裝置之配置圖。 圖5係用以說明先前之生產管理系統中具有離線裝置之 生產線仍貫現虛擬性線上管理之情形之說明圖。 160337.doc 201234151 【主要元件符號說明】 1 生產管理系統 2 管理個人電腦 3 主機裝置 4 讀卡機 5 資料'卡賦與裝置 6 離線裝置 21 CPU(中央運算處理裝置） 22 輸入裝置 23 顯示部 24 ROM 25 RAM 31 CPU(中央運算處理裝置） 32 資料庫 51 堆料機管理個人電腦 52 資料卡印表機 53 資料卡 54 源極堆料機 61 信號塔 62 信號線 63 解碼裝置 211 貢料輸入機構 212 流程對照機構 213 對照結果顯示控制機構 160337.doc •21 · 201234151 214 參數序號發行機構 215 處理結束通知機構 216 處理歷程傳送機構 217 下一工序内容顯示控制機構 311 參數登錄機構 312 處理開始指示機構 313 處理歷程寫入指示機構 314 處理歷程登錄機構 315 下一工序内容顯示指示機構 160337.doc -22-Mm or the abnormality (alarm), etc., by the buzzer, and the operator is used as the production management method using the production management system 1: Γ二理:: The computer 2 reads to light up, Not lit, the notification is attached to the two: =::= tower signal (including the alarm signal), and the second=set status information is transmitted to the host device 3, and the host device 3 is based on the device status information of the offline device 6 The personal computer 2 outputs the job instruction information of the batch of the offline device. In other words, the production management method of the present embodiment is a signal tower signal (including a scam number) that is read by each management personal computer 2 to notify the operation state of the device attached to the offline device 6 by lighting or not lighting, and at least The status information of one or more processing devices including the offline device 6 is transmitted to the host device 3, respectively, and the host device 3 is based on at least one device state information of one or more processing devices of the offline device 6, via corresponding management The personal computer 2 causes the job instruction information of at least one of the offline devices 6 or a plurality of processing devices to be rotated. In this case, the management personal computer 2 uploads the device status information to the host device 3, and the host device 3 downloads the job instruction information of the batch to each of the management personal computers 2 corresponding thereto based on the uploaded device status information. 160337.doc •18· 201234151 By the above, the signal tower signal including the device status information (operation, non-operation status information) of the offline device 6 is used to instantly grasp the operation and non-operation state of the device. The host device 3 can accurately display on the display screen of the management personal computer 2 of each offline device 6 that the ongoing production operation (batch) handling/processing instruction n is in the position where the signal tower 61 is not visible. #者, by the indication displayed on the display screen of the personal computer 2 of each offline device 6, it is still possible to know that the processing is finished. At the same time, when a signal required for the job is generated, the host device 3 that performs the process management determines the priority order, and displays an instruction to the display screen of the management personal computer 2 of each offline device 6, thereby managing the priority of the job. Furthermore, since the processing start time can be predicted from the processing start time, the work efficiency of the operator can be questioned by the function of issuing the advance (predetermined) work instruction or the like to the operator (saving the manpower, the host device 3 can automatically By summarizing the device operating status data of the offline device 6, the operation rate management of the previous manual total can be performed immediately and accurately, thereby improving the process such as balance of the production line. As described above, the preferred embodiment of the present invention is exemplified. The present invention is not to be construed as being limited to the embodiment. It is to be understood that It is described that the equivalent range can be implemented based on the description of the present invention and technical common sense. The cited patents, patents, and documents are the same as those specifically described in the present specification, and the contents thereof are used as a reference for the present specification. 160337.doc 19 201234151 [Industrial Applicability] In the right A semiconductor semiconductor factory in an LSI manufacturing plant is redeveloped or a semiconductor light-emitting device that manufactures a light-emitting diode (LED) or a semiconductor laser device by using one or a plurality of processing devices including an off-line device in a manual factory. In the field of production management systems and production management methods for the production of semiconductor components, the signal tower signal (including the warning signal) of the offline device is read from the management personal computer and the device status information is transmitted to the host device for process management. The production management of the offline device is also carried out by the host device. Therefore, even the production line with the offline device can realize the virtual online management based on the production management system, with low investment, on the small-scale production line and the localized scattered production line. Can be effectively and reliably controlled with online [Brief Description of the Drawings] Fig. 1 is a block diagram showing an example of the configuration of the main part of the production management system and its operation in the embodiment of the present invention. Fig. 2 is a diagram showing the management in the production management system of Fig. i. A block diagram showing an example of the configuration of the software of the personal computer and the host device. Fig. 3 is a flow chart showing an operation example of the production management system including the work process of the operator in the case where the production management system of the drawing is used for the production process. FIG. 5 is a configuration diagram of an offline device in the production management system of FIG. 1 , which is a plurality of processing devices, a government personal computer, and a host device. FIG. 5 is a diagram for explaining that the production line with an offline device in the previous production management system still has virtuality. Explanation of the situation of online management 160337.doc 201234151 [Description of main component symbols] 1 Production management system 2 Management of personal computers 3 Host device 4 Card reader 5 Data 'card assignment and device 6 Offline device 21 CPU (Central processing device 22 Input device 23 Display unit 24 ROM 25 RAM 31 CPU (Central Processing Unit) 32 Library 51 Machine management personal computer 52 data card printer 53 data card 54 source stacker 61 signal tower 62 signal line 63 decoding device 211 tributary input mechanism 212 flow comparison mechanism 213 control result display control mechanism 160337.doc • 21 · 201234151 214 parameter number issuing unit 215 processing completion notification unit 216 processing history transmission unit 217 next step content display control unit 311 parameter registration unit 312 processing start instruction unit 313 processing history writing instruction unit 314 processing history registration unit 315 next step content display Indication agency 160337.doc -22-