201233271 四、指定代表圖： (一） 本案指定代表圖為：第（3)圖。 (二） 本代表圖之元件符號簡單說明： 5〜工具； 1 6 a ~受壓部； 1 9〜馬達； 19b〜定子； 20〜電源（換流器電源）； 2 9〜檢知裝置； 16~轉子軸； 17e〜電極構材； 19a〜轉子； 19c〜線圈； 21〜三相電源； 30〜控制部（NC裝置）; 31〜感測器構造（接觸感測器）；〇電容器。 五、 本案若有化學式時，請揭示最能顯示發明特徵的化學式， 益 〇 六、 發明說明： 【發明所屬之技術領域】 本發明係關於將類似如印刷線路板等的工件加工的加 工裝置’詳言之’係關於檢測工具和工作件之接觸的感測 器構成。 【先則技術】 —般已知有印刷線路板穿孔機，其係藉由馬達使轉子 轴旋轉’藉由安裝在該轉子軸尖端的鑽頭而在印刷線路板 (工作件）上鑽孔。此種印刷線路板穿孔機為了連接形成 2 201233271 於不同層的電路之間，而在 (貫通孔）、盲六（帶底孔）， 來越薄，同時也更進一步地 的加工精度。 印刷線路板上穿設許多的通孔 但是近幾年來，印刷線路板越 多層化，因此被要求要有更高 更詳細地說’上述印刷線路板穿孔機，為了加工出從 鑽頭尖端到達印刷線路板的表面的位置起算具㈣設深度 的孔’為了更提升加工精度，正確地檢測出鑽頭尖端到達 印刷線路板表面就變得很重要了。因此，在過去已提出一 種裝置，其係將印刷線路板31於絕緣的狀態下放置在加工 σ 3 0上同時將私測被轉子軸6誘發的軸電壓V 〇之中的 所疋電壓Vi 1、Vi 2的比較器44與壓力腳20連接（參照專 利文獻1)。 上述專利文獻1記載的印刷線路板穿孔加工機為，在 .印刷線路板31上穿孔時’首先’從換流器電源i i向定子 線圈50提供交流電壓使轉子軸6旋轉，在該轉子轴6正在 旋轉的狀態下使支架4下降。當支架4開始下降時，先是 壓力腳20的軸襯41接觸到印刷線路板31的表面。繼之， 藉由空氣氣缸的收縮，在壓力腳2 0和印刷線路板抵接的狀 態下，僅使心軸下降，使鑽頭14的尖端到達印刷線路板 31的表面。當鑽頭ι4接觸到印刷線路板31時，透過印刷 線路板31表面的銅箔31c、壓力腳20的軸襯41而將軸電 壓V0輪出到比較器44。繼之，NC裝置23接收到表示該比 較盗44檢测到特定電壓π丨、Vi2的事實之檢出信號，藉 P刷線路板穿孔加工機檢測得知鑽頭14已到達印刷線 201233271 路板31的表面。 [先行技術文獻] [專利文獻] [專利文獻1]專利第41 84575號公報 【發明内容】 像這樣地，使用將交流電壓提供給定子線圈5〇而在轉 子軸6誘發的軸電壓V〇,就能正確地檢知出鑽頭η和印 刷線路板31的接觸。不過，通常工作件係由金屬製的 銷和夾具等固定的狀態下被載置在加工台上，所以，❹ 處於框體接地的狀態，但是在上述專利文獻！記載的印:201233271 IV. Designated representative map: (1) The representative representative of the case is: (3). (2) A brief description of the symbol of the representative figure: 5~tool; 1 6 a ~ pressure part; 1 9~ motor; 19b~ stator; 20~ power supply (inverter power supply); 2 9~ detection device; 16~rotor shaft; 17e~electrode member; 19a~rotor; 19c~coil; 21~three-phase power supply; 30~ control unit (NC device); 31~sensor structure (contact sensor); tantalum capacitor. 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention. Benefits 6. Technical Fields of the Invention The present invention relates to a processing apparatus for processing a workpiece like a printed wiring board or the like. In detail, it is a sensor assembly that relates to the contact between the inspection tool and the workpiece. [Prior Art] A printed wiring board punch is generally known which rotates a rotor shaft by a motor to drill a printed wiring board (work piece) by a drill bit attached to the tip end of the rotor shaft. Such a printed circuit board punching machine is thinner and has a further processing precision in order to connect between the circuits of the different layers in the form of 201233271, (through holes) and blind six (with bottom holes). There are many through holes in the printed circuit board. However, in recent years, the printed circuit boards have become more multi-layered. Therefore, it is required to have a higher and more detailed description of the above-mentioned printed circuit board punching machine in order to process the printed circuit from the tip of the drill bit. The position of the surface of the board is calculated from the tool (4) The depth of the hole. In order to improve the machining accuracy, it is important to correctly detect the tip of the drill bit reaching the surface of the printed wiring board. Therefore, in the past, a device has been proposed in which the printed wiring board 31 is placed in the insulated state on the processing σ 3 0 while the measured voltage Vi 1 among the shaft voltages V 诱发 induced by the rotor shaft 6 is privately measured. The comparator 44 of the Vi 2 is connected to the pressure leg 20 (see Patent Document 1). In the printed wiring board perforating machine described in Patent Document 1, when the printed wiring board 31 is perforated, an AC voltage is first supplied from the inverter power supply ii to the stator coil 50 to rotate the rotor shaft 6, and the rotor shaft 6 is rotated. The holder 4 is lowered while being rotated. When the bracket 4 starts to descend, the bushing 41 of the pressure foot 20 first comes into contact with the surface of the printed wiring board 31. Then, by the contraction of the air cylinder, only the mandrel is lowered and the tip end of the drill bit 14 reaches the surface of the printed wiring board 31 in a state where the pressure leg 20 abuts on the printed wiring board. When the drill bit ι4 contacts the printed wiring board 31, the shaft voltage V0 is rotated to the comparator 44 through the copper foil 31c on the surface of the printed wiring board 31 and the bushing 41 of the pressure leg 20. Then, the NC device 23 receives the detection signal indicating that the comparison thief 44 detects the specific voltages π 丨, Vi 2 , and detects that the drill bit 14 has reached the printing line 201233271 by the P-brush circuit board boring machine. s surface. [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] Patent No. 41 84575 SUMMARY OF THE INVENTION As described above, the shaft voltage V 诱发 induced on the rotor shaft 6 by supplying an alternating current voltage to the stator coil 5 〇 is used. The contact between the drill bit η and the printed wiring board 31 can be accurately detected. However, in general, the workpiece is placed on the processing table while being fixed by a metal pin or a jig. Therefore, the frame is grounded, but the above patent document! Recorded record:
線路板穿孔機中’為了檢測出透過鑽頭14、印刷線路板W 以及壓力腳20的軸襯而施加於轉子軸6的軸電壓v〇,必 須使印刷線路板31與加工台絕緣，不能使用上述的金屬性 的銷，而必須特地採用由絕緣材料（例如陶究）所做成的. 銷。另外，以導電性材料形成和比較器連接的壓力腳20的 軸襯41 ’同時，必須以絕緣性材料形成固持該軸襯的 支架40。 因此，本發明之目標為，提供一種加工裝置，其無須 特思使工作件與加工A紹絡 , σ絕緣，也能夠使用軸電壓，正確地 檢知出工作件表面和鑽頭尖端的接觸。 [用以解決課題的手段] 本發明加工裝置（J )，苴 世，、已括.轉子軸（16)，其尖端安 裳用以加工工作件（2)的工且 "(5 ) 在絕緣的狀態下以自由 4 201233271 轉動的方式被支撐；安裝於該轉子軸（16)上的轉子（i9a); 和該轉子（19a)—起形成馬達（19)的定子（19b);電源 (2〇)，其係提供交流電壓給設置於該等定子（19b)或轉子 U 9 a)產生旋轉磁場的線圈（丨9 c);以及在工作件（2)被接地 的狀態下承載工作件之加工台（3);該加工裝置係為由該馬 達（19)使該轉子軸（16)轉動以加工工作件（2)，其特徵在於 包括：在被絕緣的狀態下靠近該轉子軸（16)配置，在和該 轉子軸（16)之間形成電容器（c)的電極構材（17e);連接該 電極構材(1 7e) ’檢知由於交流電壓被提供給前述線圈(1 9。) 而在該轉子軸（16)誘發的電壓（v〇)的檢知裝置（29);控制 部（30)，當該檢知裝置（29)已檢知出的電壓（v〇)變成未被 檢測出時，判斷為該工具（5)的尖端已接觸到工作件（2)。 另外’更具體地說，以此為佳：藉由空氣軸承（⑺以 ·:由轉動的方式支撐該轉子軸（16)，以絕緣構材⑽使該 二氣軸承（1 7)的上端部絕緣而形成該電極構材（1 &)。 此外，上述括號内的符號，係用於和圖式對照之物， 但此係為為了使得發明易於理解的權宜之計，並不會對申 。月專利範圍的構成造成絲毫影響。 [發明的效果] 依據申°月專利範圍第1項之發明，在轉子軸以及在被 !緣的狀態下靠近該轉子軸配置的電極構材之間形成電容 益’藉由將檢知褒置與該電極構材連接，能夠不透過工作 ^力工蛉旋轉的轉子軸所誘發的電壓（軸電壓）。 藉此’能夠用金屬製的銷容易地將卫作件固^在加工台， 5 201233271 並且，藉由檢知裝置不再檢測到 地檢知屮u t 釉電壓的事貫，能夠精確 出工具和工作件的接觸。 =中請專利範_ 2項的發明，藉由用空氣轴 ;=在能夠以些微的摩擦損失使該轉子軸高速轉動， 並且月b夠在不和空氧姑7辰垃t π 釉承接觸而絕緣的狀態下支撐之。另 外，以絕緣構材使該空氣轴承 )丄^ °卩絕緣而形成該電極 構材’猎此’能夠不改變加 咖广 交 裝置的基本構造而檢知到軸 電壓，以達到零件的共通化。 【實施方式】 [加工裝置的概略構成] _ Η下針對本發明的實施形態進行說明。如第i圖所 不’作為加工工作件的加工裝置的印刷線路板穿孔機^包 括：承載作為卫作件的印刷線純2的加卫台3;尖端安 裝鑽頭(工具)5的心轴6 ;嵌合於該心軸6的尖端，在鑽頭 5之前和印刷線路板2接觸，並把該印刷線路板2按壓在 °上的[力腳7。上述印刷線路板2，係由絕緣層和 電路乂互層積而形《，在其表面上貼有用以形成電路圖形 的銅箱^，如第2圖所示，係由2根基準銷9a、9b而固 定在加工台上。具體言在加工台3的表面上，形成方 形的溝10、-側面形成為v字形狀的溝u，—側的基準銷 9a***方形的溝10，並由夾具板12固定之(第2圖的2點 鎖線的狀態）’限制住印刷線路板2向Y軸方向的移動。另 外，另一側的基準銷叫访λ 輞扑***一側面為V字形狀的溝！丨中， 6 201233271 泫基準銷9b由夾具板13固定在V字部分1 ia，藉此，限 制印刷線路板2向X輛方向的移動。 另方面，如第1圖所示，配置為和上述加工台3相 ΐ的“軸6係構成為包括：圓筒形狀的主體部丄5、尖端安 裝了加工印刷線路板2的鑽頭5的轉子軸16、以自由轉動 的方式支it該轉子軸16的空氣軸承17'使轉子軸16轉動 的馬達19 ’該空氣軸承】7，係以徑向空氣轴承口a在徑方 向支樓轉子軸16，以推力空氣軸承17b在上下方向支樓轉 軸6 °亥L向二氣軸承1 7 a係由從空氣軸承的主體部分 17c向轉子軸16在徑方向噴出壓縮空氣的許多的喷出口構 成’並且’推力空氣軸纟m係由，在嵌插了設置在轉子 轴16的上端部的圓王裒狀的受壓冑16a的空氣轴承主體部分 Π。的縫隙部l7d’在受壓部16a從上下喷出壓縮空氣的複 數個喷出口構成。 另外，上述馬達19係由下列構成：將銅材於轉子軸 16中央部形成端環狀的轉子（轉動子）〗“；配置於和心軸 的主體部15的轉子19a面對的位置的定子（固定子）丨化， 當交流電壓從換流器電源2〇提供給定子m的線圈W 時，產生變動的磁場（旋轉磁場）而使轉子（轉子軸i6)i9a 轉動。此外，換流器電源20將從三相電源21輸入的商務 交流電屢轉換為頻率高的交流電壓。 上述心軸6的主體部15，固定於相對於制台22之 上下方向（z軸方向）自由移動的鞍座23,該橫滑台22係以 可在左右方向（γ軸方向）自由移動的方式，由設置於床面 7 201233271 25的平交軌（未圖示）支撐為跨越加工台 3。另外，上述加In the circuit board punching machine, in order to detect the shaft voltage v〇 applied to the rotor shaft 6 through the bushing of the drill 14, the printed wiring board W, and the pressure leg 20, the printed wiring board 31 must be insulated from the processing table, and the above-mentioned The metal pin, but must be specially made of insulating material (such as ceramics). Further, the bushing 41' of the pressure leg 20 which is connected to the comparator is formed of a conductive material. At the same time, the bracket 40 for holding the bushing must be formed of an insulating material. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a processing apparatus which is capable of accurately inspecting the contact between the surface of the workpiece and the tip of the drill by using the shaft voltage without the need to insulate the workpiece from the machining A and σ. [Means for Solving the Problem] The processing apparatus (J) of the present invention, which has been included in the rotor shaft (16), has its tip end and is used to process the workpiece (2) and "(5) In the insulated state, it is supported by the rotation of the freewheel 4 201233271; the rotor (i9a) mounted on the rotor shaft (16); and the rotor (19a) together with the stator (19b) forming the motor (19); 2)), which provides an alternating voltage to a coil (丨9c) provided in the stator (19b) or the rotor U9a) to generate a rotating magnetic field; and carries the working member in a state where the working member (2) is grounded a processing table (3); the processing device is configured to rotate the rotor shaft (16) by the motor (19) to process the workpiece (2), characterized by comprising: approaching the rotor shaft in an insulated state ( 16) Configuring, forming an electrode member (17e) of the capacitor (c) between the rotor shaft (16); connecting the electrode member (17 e) to detect that the AC coil is supplied to the coil (1 9 And the detecting device (29) for the voltage (v〇) induced by the rotor shaft (16); the control unit (30), when the detecting device (29) has been inspected The voltage (v〇) becomes not detected when determines that the tool (5) has a contact tip to work piece (2). In addition, more specifically, it is preferable that the upper end portion of the two-air bearing (17) is made of an insulating member (10) by an air bearing ((7) to: support the rotor shaft (16) in a rotating manner) The electrode member (1 &) is formed by insulation. Further, the symbols in the above parentheses are used for comparison with the drawings, but this is an expedient measure for making the invention easy to understand, and does not apply to The composition of the patent range of the month has no effect at all. [Effect of the invention] According to the invention of claim 1 of the patent application, the rotor shaft and the electrode member disposed adjacent to the rotor shaft in the state of the edge are formed. By connecting the detecting means to the electrode member, it is possible to easily pass the voltage (axis voltage) induced by the rotor shaft that is rotated by the working force. This enables the metal pin to be easily used. The workpiece is fixed on the processing table, 5 201233271 and, by detecting that the device no longer detects the luminescence voltage of the 屮ut, the contact between the tool and the workpiece can be accurately determined. The invention of the item, by using the air shaft; The micro-friction loss causes the rotor shaft to rotate at a high speed, and the moon b is supported in a state in which it is not insulated from the contact of the air galvanic glaze. In addition, the air bearing is made of an insulating member. The formation of the electrode member 'hunting this' can detect the shaft voltage without changing the basic structure of the Jiajiajiao device to achieve the commonality of the parts. [Embodiment] [Schematic Configuration of Processing Apparatus] _ Next, an embodiment of the present invention will be described. The printed circuit board punching machine as the processing device for processing the workpiece as in the figure i includes: a lifting table 3 carrying the printing line pure 2 as a manufacturing member; a mandrel 6 of the tip mounting drill (tool) 5 The tip end of the mandrel 6 is fitted to the printed wiring board 2 before the drill bit 5, and the printed wiring board 2 is pressed against the [force leg 7]. The printed wiring board 2 is formed by laminating an insulating layer and a circuit board, and a copper case for forming a circuit pattern is attached to the surface thereof. As shown in Fig. 2, the two reference pins 9a, 9b are provided. It is fixed on the processing table. Specifically, on the surface of the processing table 3, a square groove 10 is formed, and a side surface is formed into a v-shaped groove u, and the side reference pin 9a is inserted into the square groove 10 and fixed by the jig plate 12 (Fig. 2) The state of the 2-point lock line) 'limits the movement of the printed wiring board 2 in the Y-axis direction. In addition, the other side of the reference pin called λ 辋 *** insert a groove with a V-shaped side!丨中, 6 201233271 The 泫 reference pin 9b is fixed to the V-shaped portion 1 ia by the jig plate 13, whereby the movement of the printed wiring board 2 in the X direction is restricted. On the other hand, as shown in Fig. 1, the "shaft 6" arranged to be in contact with the processing table 3 is configured to include a main body portion 5 having a cylindrical shape and a rotor of a drill 5 having a tip on which the printed wiring board 2 is processed. The shaft 16, the motor 19' that rotates the rotor shaft 16 by the air bearing 17' of the rotor shaft 16 in a freely rotatable manner, the air bearing 7 is a radial air bearing port a in the radial direction of the branch rotor shaft 16 In the up-and-down direction of the thrust air bearing 17b, the 6-axis L-to-two-air bearing 17a is composed of a plurality of discharge ports that discharge compressed air from the main body portion 17c of the air bearing to the rotor shaft 16 in the radial direction. The thrust air shaft 纟m is formed by inserting the air bearing main body portion 圆 of the round ridge-shaped pressure receiving dam 16a provided at the upper end portion of the rotor shaft 16. The slit portion 17d' is ejected from the upper and lower sides in the pressure receiving portion 16a. The motor 19 is composed of a plurality of discharge ports. The motor 19 is configured to form a rotor (rotator) in which a copper material is formed in an end ring shape at a central portion of the rotor shaft 16, and is disposed on the main body portion 15 of the mandrel. The stator 19a faces the stator Stator) of Shu, when the AC voltage from the inverter power supply to the stator m 2〇 coil W, generating a magnetic field variation (rotating magnetic field) so that the rotor (rotor shaft i6) i9a rotated. Further, the inverter power source 20 repeatedly converts the commercial alternating current input from the three-phase power source 21 into an alternating current voltage having a high frequency. The main body portion 15 of the mandrel 6 is fixed to a saddle 23 that is freely movable with respect to the upper and lower directions (z-axis direction) of the table 22, and the horizontal slide table 22 is movable in the left-right direction (γ-axis direction). The method is supported by the leveling rail (not shown) provided on the bed surface 7 201233271 25 to straddle the processing table 3. In addition, the above addition
橫滑台22使心軸6 & Y軸方向移動，同時，藉由使加工台 。而且’當加工位置 而能在印刷線路板上 3在X軸方向移動，以決定加工位置。 被決定時，藉由鞍座23讓心軸下降，所 穿孔。此外’使鞍座23在Z軸方向下降時，在鑽頭5之 壓力腳7的軸襯7a接觸到印刷線路板2,但是該壓力腳7 係由一對的空氣氣缸26所支撐，藉由該空氣氣缸26的伸 縮’而能夠使其與心軸6相對移動。 [接觸感測器的構成] 繼之，基於第1圖以及第3圖，說明檢測出鑽頭5已 到達印刷線路板2表面的事實的感測器構造（以下稱之為 接觸感測器）31。穿設有上述噴出口 17a、17b的空氣轴承 17的主體部分17c，其上端部17e係藉由絕緣構材27，被 固定於對心軸6的主體部15、空氣轴承17的下方部17f 絕緣的狀態下。這上端部17e，在其下方側的空氣軸承i 了 的主體部分17 c的空氣軸承的下方部17 f之間設有間隙， 形成配置了轉子軸1 6的受壓部1 6a的該縫隙部丨7d，同時， 成為對地電阻高的電極構材，在和該轉子軸16的受麗部 l6a之間形成電容器C。 上述轉子軸1 6 ’係藉由空氣軸承17 ’以可自由轉動的 方式支撐於從周圍浮起的狀態下。亦即，轉子輛16係在與 周遭（心軸的主體部i 5、空氣軸承17)電氣絕緣的狀態下被 8 201233271 支樓，但是當換流器電源20向定子1 9b的線圈1 9c提供3 相交流電壓時，就產生若干的所謂零相電壓，藉由此零相 電壓’透過馬達19的線圈19c和框（例如空氣軸承i 7的下 方部17f)等和轉子19a之間的浮游容量，在轉子誘發 誘導電壓（以下稱之為軸電壓）V〇 (數V程度）。而且，當轴 電壓V0被誘發時，在與轉子軸16之間形成電容器的上述 電極構材17e上也誘發電壓，檢知該軸電壓v〇的檢知裝置 29與該電極構材i7e連接。The slide table 22 moves the mandrel 6 & Y axis direction while at the same time making the processing table. Further, 'the processing position can be moved on the printed wiring board 3 in the X-axis direction to determine the processing position. When it is decided, the mandrel is lowered by the saddle 23 and perforated. Further, when the saddle 23 is lowered in the Z-axis direction, the bushing 7a of the presser foot 7 of the drill 5 contacts the printed wiring board 2, but the presser foot 7 is supported by a pair of air cylinders 26, by the The expansion and contraction of the air cylinder 26 allows it to move relative to the mandrel 6. [Configuration of Contact Sensor] Next, based on the first and third figures, a sensor structure (hereinafter referred to as a contact sensor) 31 for detecting the fact that the drill 5 has reached the surface of the printed wiring board 2 will be described. . The main body portion 17c of the air bearing 17 through which the discharge ports 17a and 17b are provided is insulated from the main body portion 15 of the mandrel 6 and the lower portion 17f of the air bearing 17 by the insulating member 27. Under the state. The upper end portion 17e is provided with a gap between the lower portion 17f of the air bearing of the main body portion 17c of the air bearing i on the lower side thereof, and the gap portion of the pressure receiving portion 16a of the rotor shaft 16 is formed. In the case of 丨7d, at the same time, the electrode member having a high resistance to the ground is formed, and a capacitor C is formed between the ridge portion 16a of the rotor shaft 16. The rotor shaft 16' is rotatably supported by the air bearing 17' in a state of being floated from the periphery. That is, the rotor unit 16 is erected by the 8 201233271 branch in a state of being electrically insulated from the surroundings (the main body portion i 5 of the mandrel, the air bearing 17), but when the inverter power source 20 is supplied to the coil 19c of the stator 1 9b. When the three-phase AC voltage is applied, a number of so-called zero-phase voltages are generated, whereby the zero-phase voltage 'passes through the coil 19c of the motor 19 and the frame (for example, the lower portion 17f of the air bearing i7) and the floating capacity between the rotor 19a. In the rotor, the induced voltage (hereinafter referred to as the shaft voltage) V 〇 (the number of V) is induced. Further, when the shaft voltage V0 is induced, a voltage is induced also on the electrode member 17e which forms a capacitor with the rotor shaft 16, and the detecting means 29 for detecting the shaft voltage v? is connected to the electrode member i7e.
另外，固定上述印刷線路板2的基準銷9a、9b，係由 鐵等的金屬製，而且，加工台3業同樣是鋼材等的金屬製， 印刷線路板2其表面的銅箔2a係透過基準銷9a、9b而被 框體接地(接地）。因此，當鑽頭5的尖端接觸印刷線路板 2的表面時’轉子軸16的電位為〇、也不會在電極構材誘 發電麼。上述檢知裝置29,和控制印刷線路板穿孔機的Μ 裝置（控制部）30連接，其檢知軸電壓v〇，並且，當鑽頭5 到達印刷線路板2表面上使得本來已檢知到的軸^ v〇變 得檢知不到時’將檢知信號輸出i NC裝置3〇。而且，NC 裝置30基於從該檢知裝置29傳來 1寻木的杈知信號，判斷鑽頭 5的尖端已到達印刷線路板2的表 衣Φ上了’並以此時心軸 位置作為穿孔加工的基準位置（〇點位置）。 接觸感測器31係由該等轉子舳〗 寺褥于釉16、電極構材17e、檢 知裝置29以及NC裝置30構成，μ λ产絲 再风藉由在轉子軸16和電極 構材1 7e之間形成電容器c，可以兀* J 乂不透過其他的構材（例如 印刷線路板），而檢測得知誘發於韓 放％轉動的轉子軸16的電壓 9 201233271 vo’並且，依據該軸電壓v〇的變化而檢出鑽頭5尖端和印 刷線路板2表面的接觸，因此能正麵測得知鑽頭5尖端 的位置。 卜。軸6 ’其上下方向（Z軸方向）移動範圍有受到 限制’當使心軸6開始下降以後經過特定的時間(例如心軸 6從上端位置到印刷線路板2表面移動所需要的時間），也 ’又有攸檢知裝置29收到檢知信號時’ Nc裝置3〇判斷為鑽 頭5受到折損。 =說明本發明實施形態的印刷線路板穿孔裝置i的動 作。操作者，當執行印刷線路板2的穿孔時，首先，將印 刷線路板2載置於加卫台3±，並且，使用以鐵等的導電 性材料做成的基準銷9a、9b，將印刷線路板2固定在加工 台3上。 當印刷線路板2被載置於加工台3上眸 σ d上時，啟動換流器 電源20以向定子19b的線目…提供交流電壓，使轉子軸 16轉動。當交流電壓被供應至定子⑽的線圈W時在 轉子軸16誘發軸電壓v〇，同時檢知裝置29 檢知軸電壓V 0。 ° 繼之，NC裝置30，當加工的準備完成時，使加工△ 3 以及橫滑台22移動並心加卫位置，若_5位於加工口位 置上：則使鞍座23下降β當鞍座23下降時，開始將壓力 腳7以及心軸6兩者下降，首弁 Τ百无透過壓力腳7將印刷線 路板2按壓在加工台3上。 則深 繼之’若鞍座23進一步由此狀能下限 , 7田此狀慼下降，貝1J空氣氣缸 10 201233271 2 6收縮，從壓六咖7 $ ^ 11卩刷線路板2抵接的狀態下僅使心 軸下降，鑽頭5的，,、— 的大端到達印刷線路板2的表面上◦告 頭5的尖·印刷線路板2的表面接料 位變為0,用檢知穿f㈧山— 的電 裒置29也無法檢知軸電壓y〇。 知軸電壓V0時，檢知梦罢…&松 、 向NC裝置3〇輸出檢知信號， 虽接收到該檢知信號時，Nc裝置⑽判 已到達印刷線路板2的# & μ 、， 的大鳊 置作為加工的基準：繼亚將該時刻的心軸6的位 繼之，使心軸6下降從該基準位 疋的所欲距離’以在印刷線路板2上穿設孔。 靠近二？據本實施形態，將與周遭絕緣的電極構材17e 16配置以形成電容器c，藉此 他的構材（例如印 个远過其 丨…. 檢測得知誘發於轉動的轉 /壓V〇。尤其是’由空氣軸承17形成轉子軸16， 使該工氣軸承17的一A八 一 軸承17b的p * 。刀（在本貫施形態中構成推力空氣 的⑽17d/部)為電極構材176 ’藉此’和轉子軸16 二1則越能提升空氣轴承的性能以及軸電壓 V 0的檢知性能。 =外’因為無須變更加工裝置的基本構造，而能達到 二、加工裝置之間零件的共通化，而且構 =:出鑽頭的特別的電㈣、。此外，因為無須使:： 定在加能用金屬製的銷將印刷線路板" 口 3上，並且，因為印刷線路板2的沒有完 ，’，所以也沒有加工精度下降之虞。 此外，在本實施形態中，檢知裝置⑵係由本來已檢知 11 201233271 到的軸電壓V〇變得拾4 侍知知不到時’開始將檢知信號輸出至 NC裝置30，但是★vr丨、，曰In addition, the reference pins 9a and 9b for fixing the printed wiring board 2 are made of metal such as iron, and the processing table 3 is made of metal such as steel, and the copper foil 2a on the surface of the printed wiring board 2 is transmitted through the reference. The pins 9a and 9b are grounded (grounded) by the frame. Therefore, when the tip end of the drill bit 5 contacts the surface of the printed wiring board 2, the potential of the rotor shaft 16 is 〇, and it is not induced in the electrode member. The above-described detecting device 29 is connected to a cymbal device (control portion) 30 for controlling the puncher of the printed wiring board, which detects the shaft voltage v 〇 and, when the drill bit 5 reaches the surface of the printed wiring board 2, is already detected. When the axis ^ v〇 becomes undetectable, the detection signal is output to the i NC device 3〇. Further, the NC device 30 determines that the tip end of the drill 5 has reached the top surface Φ of the printed wiring board 2 based on the known signal from the detecting device 29, and the mandrel position is used as the punching process. Reference position (defect point position). The contact sensor 31 is composed of the rotor 褥 褥 褥 in the glaze 16, the electrode member 17e, the detecting device 29, and the NC device 30, and the μ λ is produced by the wind in the rotor shaft 16 and the electrode member 1 A capacitor c is formed between 7e, and the voltage of the rotor shaft 16 induced to the % rotation of the Han can be detected by the 兀*J 乂 without passing through other members (for example, a printed wiring board), and according to the axis The contact of the tip end of the drill bit 5 and the surface of the printed wiring board 2 is detected by the change of the voltage v〇, so that the position of the tip end of the drill bit 5 can be detected frontally. Bu. The movement range of the shaft 6' in the up-and-down direction (Z-axis direction) is limited to a certain time (such as the time required for the mandrel 6 to move from the upper end position to the surface of the printed wiring board 2) after the mandrel 6 starts to descend. Also, when the detection device 29 receives the detection signal, the Nc device 3 determines that the drill 5 has been broken. The operation of the printed wiring board perforating apparatus i according to the embodiment of the present invention will be described. When the operator performs the punching of the printed wiring board 2, first, the printed wiring board 2 is placed on the mounting table 3±, and the reference pins 9a and 9b made of a conductive material such as iron are used for printing. The circuit board 2 is fixed to the processing table 3. When the printed wiring board 2 is placed on the processing table 3 眸 σ d , the inverter power supply 20 is activated to supply an alternating voltage to the line of the stator 19b to rotate the rotor shaft 16. When the AC voltage is supplied to the coil W of the stator (10), the shaft voltage v is induced at the rotor shaft 16, and the detecting means 29 detects the shaft voltage V0. ° Next, the NC device 30, when the preparation for processing is completed, moves the processing Δ 3 and the horizontal slide 22 to the position of the center, and if _5 is at the position of the machining port: the saddle 23 is lowered by β as a saddle When the 23 is lowered, the pressure leg 7 and the mandrel 6 are started to be lowered, and the first printed circuit board 2 is pressed against the processing table 3 by the first pressureless transmission leg 7. Then it is followed by 'If the saddle 23 is further reduced by this shape, the 7 field will fall, and the 1J air cylinder 10 201233271 2 6 shrinks, and the state of the circuit board 2 is abutted from the pressure of 6 $ ^ 11 Only the mandrel is lowered, and the big end of the drill bit 5 reaches the surface of the printed wiring board 2, and the tip of the printed circuit board 2 is turned to the surface of the printed circuit board 2, and the receiving position becomes 0. The mountain's electric device 29 cannot detect the shaft voltage y〇. When the axis voltage V0 is known, the sleep is detected and the detection signal is outputted to the NC device 3, and when the detection signal is received, the Nc device (10) judges that it has reached the # & μ of the printed wiring board 2 The large device is used as a reference for processing: following the position of the mandrel 6 at that time, the mandrel 6 is lowered by a desired distance from the reference position 以 to pierce the printed circuit board 2. Close to two? According to the present embodiment, the electrode member 17e 16 insulated from the surroundings is disposed to form the capacitor c, whereby the member member (e.g., the printed member is farther than the 丨....) detects the change/pressure V〇 induced by the rotation. In particular, the rotor shaft 16 is formed by the air bearing 17, and the p* of the AA bearing 17b of the process bearing 17 is formed. The blade (the (10) 17d/section which constitutes the thrust air in the present embodiment) is the electrode member 176. 'Through this' and the rotor shaft 16 two 1 can improve the performance of the air bearing and the detection performance of the shaft voltage V 0. = External 'Because there is no need to change the basic structure of the processing device, it can reach two parts between the processing devices The commonality, and the structure =: the special electric power of the drill bit (4). In addition, because it is not necessary to: :: set the metal pin on the printed circuit board to the port 3, and because the printed circuit board 2 In addition, in the present embodiment, the detecting device (2) is detected by the original detection of 11 201233271, and the shaft voltage V〇 is picked up. At the beginning of 'outputting the detection signal to the NC device 30 However,, said Shu ★ vr
也了以疋：當檢知出軸電壓V0，就向NC 裝置3 0輸出檢知作祙 ^ 。就’虽不再輸出該檢知信號時，NC裝 置3 0判斷為鑽頭5垃_雜&丨！： α^ 接觸到印刷線路板2。亦即，只要能夠 得知檢知裝置不再拾：目丨π 丹仏測传到軸電壓V0的事實，檢知信號的 輸出模式可以是任伯· t 0 , 了方式。另外，檢知裝置29透過濾過器 檢知軸電壓V0的特定的電壓亦可。 再者電極構材1 7e只要靠近轉子轴配置即可，設置 在那裡都可以’並不一定要和空氣軸承”為一體。另外， 電極構材17e也可以〜 不要像本貫施形態一樣地透過陶瓷等 等的絕緣構材安庐太，、、、 妒在轴上，而是用絕緣構材塗布其全體 使…邑緣$外，轉子轴16也可以是藉由陶£製的軸承絕 緣的狀態下’以可自由轉動的方式被支樓。 再者’印刷線路板2也可以不用金屬製的銷，而用金 屬製的夾具而固定於加 a ^ . m 口 3。另外，在本實施形態中， 料針對印刷線路板2的穿孔加工機進行說明，但是只要 疋v表面疋導電性的工作件的加工裝置即可，可以適用 於任何裝i ’加卫工作件的卫具不限於鑽頭，也可以是端 銳刀等其他的工具。 β卜在本實把形態、中，係例示將3相互換流器輪出 提供、°叹置在&子用以產生旋轉磁場的線目3而驅動的誘 導馬達中以零相電壓在轉子軸誘發的軸電i，但在轉子使 用永久磁石和電磁鐵(激磁)的磁石同時期馬達也是一樣， 另外在設於轉子的電機子線圈使用刷子等提供交流電壓 201233271 (就流過線圈的電流的方向逆轉的咅羞 义释7心義而&是交流電壓）驅 動的直流馬達等中，透過電機子線圈和轉子轴之間的浮游 容量而在轉子㈣發軸電壓，所以也能適用本案發明。 【圖式簡單說明】 第1圖為本發明的實施形態的加工裝置的正面圖。 第2圖為本發明的實施形態的加工台的工作件固定方 法的模式圖。 第3圖為本發明的實施形態的加工裝置的接觸感測器 構造的模式圖。 【主要元件符號說明】 )； 3〜加工台； 16〜轉子軸； 17e〜電極構材； 19a〜轉子； 1 9 c〜線圈； 2 7〜絕緣構材； 30〜控制部（NC裝置）; 1〜加工裝置（印刷線路板穿孔機 2〜工作件（印刷線路板）； 5〜工具； 17〜空氣轴承； 19〜馬達； 19b〜定子； 2〇〜電源（換流器電源）； 2 9 ~檢知襄置； C〜電容器；V0〜電壓（軸電壓）。 13Also, when the axis voltage V0 is detected, the detection is output to the NC device 30 as 祙 ^ . When the detection signal is no longer output, the NC device 30 judges that the drill bit 5 is _ _ & & 丨 丨! : α^ is in contact with the printed circuit board 2. That is, as long as it can be known that the detecting means is no longer picked up: the fact that the target 丨 仏 仏 传 轴 轴 轴 轴 轴 轴 , , , , , , , , , , , , , , , , , , , , , Further, the detecting means 29 may pass through the filter to detect a specific voltage of the shaft voltage V0. Further, the electrode member 17e may be disposed close to the rotor shaft, and it may be provided in a 'not necessarily an air bearing'. The electrode member 17e may also be permeable to the same as the present embodiment. The insulating material of ceramics and the like is mounted on the shaft, but is coated with an insulating member, so that the rotor shaft 16 can also be insulated by a bearing made of ceramics. In the state, it is rotatably supported by the branch. In addition, the printed circuit board 2 can be fixed to the a ^ m port 3 by using a metal jig. In addition, in this embodiment In the form, the material is described with respect to the punching machine of the printed wiring board 2. However, as long as the surface of the 疋v surface is a processing device for the conductive working piece, it can be applied to any type of sanitary ware that is not limited to the drill. It can also be other tools such as the end sharp knife. In the form of the actual shape, the equation is shown by the 3 mutual converters, and the sigh is placed in the & And the induced induction motor has zero phase electricity The shaft is induced by the rotor shaft, but the magnet is also used in the rotor with the permanent magnet and the electromagnet (excitation). In addition, the motor is supplied to the rotor of the rotor using a brush or the like to provide an AC voltage of 201233271. The direction of the current of the coil is reversed by the 咅 义 7 心 心 心 & 是 是 是 是 是 是 是 是 交流 交流 交流 交流 交流 交流 交流 交流 交流 交流 交流 交流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流 直流BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view of a processing apparatus according to an embodiment of the present invention. Fig. 2 is a schematic view showing a method of fixing a workpiece of a processing table according to an embodiment of the present invention. Fig. 1 is a schematic view showing the structure of a contact sensor of a processing apparatus according to an embodiment of the present invention. [Description of main component symbols]; 3~ processing table; 16 to rotor shaft; 17e to electrode member; 19a to rotor; c ~ coil; 2 7 ~ insulating material; 30 ~ control part (NC device); 1 ~ processing device (printed circuit board punching machine 2 ~ working piece (printed circuit board); 5 ~ tool; 17 ~ air Bearing; 19~ motor; 19b~ stator; 2〇~ power supply (inverter power supply); 2 9 ~ detection device; C~ capacitor; V0~ voltage (axis voltage).