201216027 預壓室 131 節流室 132 節流孔 134 下薄膜 140 底座 150 垂直連通孔 151 入口孑L 152 節流台 153 出口孔 154 節流螺絲 160 螺栓 170 五、 本案若有化學式時，請揭示最能顯示發明特徵的 化學式： 六、 發明說明： 【發明所屬之技術領域】 液靜壓軸承、薄膜節流器、毛細管 【先前技術】 201216027 傳統薄膜節流器因為薄膜工作側受到外部供壓，造成薄 膜單側又屋變形’薄膜變形量所造成的卫作性能受限於外部 供壓之變化’先前技術並且以下列的專利加以說明： 中華民國專利公告第1279661號，專利名稱：可變毛細溝槽 薄膜節流器，公告曰期·· 2007/04/2卜申請曰期：薦/臓。 • 參考第一⑷圖說明，一種可變毛細溝槽薄膜節流器，係 由基座、本體、外殼及可撓曲薄膜所構成，其中本體具有金 屬薄膜、毛細溝槽與穩壓腔室，可撓曲薄膜緊固於本體之 頂侧’並於本體之一侧凹槽區域形成穩壓腔室，薄膜裝配於 本體並組合外殼，與外殼之内部一侧凹槽形成一調節腔室， 基座並具有連通調節腔室與穩壓腔室的注入流道，與連通穩 • 壓腔室的出口流道，當外部的負載端之流動壓力大於調節室 時，可撓曲_將受力撓曲而使_與本體毛細溝槽區域產 生作動間隙，致使本體上薄膜覆蓋的毛細溝槽開口變大，因 此，通過毛細溝槽的流體阻力變小，使得節流器可依負載端 的壓力變化，而使流阻範®大，達到反饋負載端出口流道壓 力之功能，適應單一機台負載變化大的情況，也因具有廣泛 的壓力及流量調節作用，而單一設計適用在廣泛的機台。 201216027 中華民國專利公告第M26腿號，專利名稱：壓力反饋調節 裝置，公告曰期：2005/04/11，申請曰期：2004/05/04。 參考第一(b)圖說明，一種壓力反饋調節裝置，係連接於 一負載系統，此調整裝置中設有一調整螺栓，藉由改變此調 整螺拴旋緊之程度，改變控制流體輸出流量之初始壓力的大 小，即可針對所製作出的各個壓力反饋調節裝置輸出至負载 系統之流體進行微小流量之調校，以精確地調整至所需之壓 力及流量。 【發明内容】 液靜壓軸承由外部加壓供油，將潤滑油經由節流器，調 節成工作壓力後，輸送至軸承油腔内部，在油腔内產生作為 承載用的靜壓潤滑油膜，靜壓油膜的滑動軸承具有精度高、 油膜剛度大、抑制振盪等優點。 使用外供壓力的潤滑油通過油腔產生抵抗工作負荷的 液靜壓軸承，液靜壓導軌以及液靜壓導螺桿、堝桿、齒條齒 輪、連軸器等；其工作性能的優劣，取決於節流器的設計搭 配是否正確，外部供壓流體通過節流器的間隙時因為黏滯摩 201216027 擦阻力所致生流阻’用來調節工作 流台的柱頂面與薄膜之間的間隙變化來改變 :彈性材料製成，具細力卿的能力，當^= 力上升時，薄臈會因腔側 流阻，反之，工作· ，，而增加間隙減小 減小間隙增加流阻。 小’⑽201216027 Pre-compression chamber 131 Throttle chamber 132 Throttle hole 134 Lower film 140 Base 150 Vertical communication hole 151 Entrance 孑L 152 Throttle 153 Exit hole 154 Throttle screw 160 Bolt 170 V. If there is a chemical formula in this case, please reveal the most Chemical formula showing the characteristics of the invention: 6. Description of the invention: [Technical field of the invention] Hydrostatic bearing, membrane restrictor, capillary [Prior Art] 201216027 Conventional membrane restrictor is caused by external pressure supply on the working side of the membrane Film unilateral and house deformation 'The performance of the film caused by the deformation of the film is limited by the change of external pressure. 'Previous technology and described in the following patents: Republic of China Patent Notice No. 1269661, patent name: variable capillary Slot film restrictor, announcement period ·· 2007/04/2 application period: recommended / 臓. • Referring to the first (4) diagram, a variable capillary channel film restrictor consists of a base, a body, a casing and a flexible film, wherein the body has a metal film, a capillary groove and a voltage stabilizing chamber. The flexible film is fastened to the top side of the body and forms a voltage stabilizing chamber in the recessed area on one side of the body. The film is assembled on the body and combined with the outer casing, and forms an adjustment chamber with the inner side groove of the outer casing. The seat has an injection flow path connecting the adjustment chamber and the pressure regulation chamber, and an outlet flow path connecting the steady pressure chamber, and when the flow pressure of the external load end is greater than the adjustment chamber, the deflection _ will be stressed The creator creates an actuating gap with the body capillary groove region, so that the capillary groove opening covered by the film on the body becomes larger, and therefore, the fluid resistance through the capillary groove becomes smaller, so that the throttle device can change according to the pressure at the load end. The function of the flow resistance is large, and the function of the pressure at the outlet end of the feedback load is achieved, which adapts to the large load variation of a single machine, and also has a wide range of pressure and flow regulation effects, and the single design is applicable to a wide range of applications. Machine. 201216027 Republic of China Patent Announcement No. M26 Leg No., Patent Name: Pressure Feedback Adjustment Device, Announcement Period: 2005/04/11, Application Period: 2004/05/04. Referring to FIG. 1(b), a pressure feedback adjusting device is connected to a load system, and an adjusting bolt is disposed in the adjusting device, and the initial state of controlling the fluid output flow is changed by changing the degree of tightening the adjusting screw. The pressure can be adjusted for the flow of the fluid output to the load system by the various pressure feedback regulators to accurately adjust to the required pressure and flow. SUMMARY OF THE INVENTION The hydrostatic bearing is externally pressurized to supply oil, and the lubricating oil is adjusted to a working pressure via a throttle, and then sent to the inside of the bearing oil chamber to generate a static pressure lubricating oil film for carrying in the oil chamber. The sliding bearing of the hydrostatic oil film has the advantages of high precision, large oil film stiffness, and suppression of oscillation. The use of externally supplied lubricating oil to generate hydraulic hydrostatic bearings against the working load through the oil chamber, hydrostatic pressure guides and hydrostatic pressure guiding screws, masts, rack gears, couplings, etc.; Whether the design of the restrictor is correct, the external pressurized fluid passes through the gap of the restrictor, and the flow resistance is caused by the friction resistance of 201216027. It is used to adjust the gap between the top surface of the working table and the film. Change to change: made of elastic material, with the ability of fine force, when the ^= force rises, the thin sputum will flow due to the cavity side, and vice versa, increase the gap to reduce the gap and increase the flow resistance. Small '(10)
薄膜本赖騎財幻轉歧了 _ _，而薄物___物除了取決於_ 认里之外也與及薄臈初始間隙的倒數成 正比’因此本發明為了使薄膜節流器能配合工作條件改變薄 膜預壓，發明的一種「毛細管調節之雙膜型靜壓節流器」， 包含頂蓋、上_、環體、節流螺絲、下薄膜、底座、螺栓 的結構形式’頂蓋與環體夾緊上_以及環體與底座夾緊下 薄膜，並以複較.貫穿頂蓋、環體及底座鎖緊組合在一 起’供油進入下薄膜之兩側，其下側為節流室設製於底座 内’節流室設製有節流台於底座上，流體流經下薄膜與節流 口之間的間隙產生液阻，其下側供油經過節流台與下薄膜之 間隙而節流’卿供油的勤及流量至工作條件；其上側進 油用來預壓下_，使τ__在工側力初始狀態下的 201216027 初始間隙為預設值，而滿足液靜壓元件的工作條件。 外部供油由入口通道進入到節流器下薄膜之上、下兩 側，預壓側油路經由垂直連通孔至預壓室給予下薄膜預壓， 其中節流螺絲-端製有固定用的外螺紋，另—端製有螺旋形 狀的毛細管’供油經過毛細管進人_之讎侧，利用毛線 管通道的間隙產生節流阻力，節流孔外端製有内螺紋，節流 • 螺紋安裝於節流孔，毛細管的出口壓力由毛細管螺旋的有效 工作長度決定’油路麵毛細管的微路程越長液阻越大 使預壓越小’在初始卫作狀態時，調整薄膜兩側壓力成平衡 狀態，薄膜具有初始預設定的變形量，當下薄膜工作側的工 側力改㈣，下_受職變的賴力侧，就會產生進 一步變形；工作壓力增加時，下薄膜向上變形，使工傾力 • 側的開口加大，反之，當工作壓力下降時，下薄膜向下變形， 使工作壓力側的開口減小，因此具有調節壓力及流量的效 果。 在頂蓋與環體之間裝置有上薄膜，上薄膜與下薄膜之間 之賴設置有賴室’上_猶歷力之大小產生變形， 使下薄膜預壓室内的壓力賴在毛細管出口_力，而上薄 膜與頂蓋之間設壓[縣㈣魏孔，使上薄膜發生 201216027 隻七時值難保持在大氣壓力，若沒有設置上薄膜，工作壓 力增加時，造成下薄膜向上變形，擠壓麵室内的流體汽 /包，使預壓室缝壓力進—步的上升而無法健原來調校的 麵力’下薄膜工侧油路由節流台與下薄膜之fa1的間隙節 流後，經出口孔及連接管流至工作油腔。 若節流器安裝感測器實施監控節流器内部溫度及壓力 • _可以研究其工作特性’作為設計參數校準的用途；環體 製有㈣的上麻’底座製有徑向的巾聽及下侧孔，上測 孔從環體表面徑向連駐麵室，+麻從敍絲徑向連 通至下薄膜與節流台之_空間，下織從底絲面徑向連 通於出口孔；測孔之外端均製成安裝感測器測頭用的螺纹 座’用來安裝壓力計及溫度計接頭，上測制來監控預壓室 • N之壓力及溫度，中觀时監控節流室内部的壓力及溫 度’下測孔用來監控節流器出口壓力及溫度。 【實施方式】 外部供壓流體通過節流器時因為流體黏滯阻力所致生 流阻而自動調節工作壓力及流量，本發明是一種可利用毛細 管節流調整薄膜預壓側壓力之薄膜節流器，參考第二圖，說 201216027 明實現其工作原理之實施方式。 薄膜節流器使關流台153的柱頂面與下薄膜14〇之間 的間隙變化來改變流阻，由於上下_ m、⑽由彈性材 料製成’具有受壓力變形的能力，當油腔I作壓力上升時， 下薄膜140會因為受壓力作用的變形，而增加間隙，減小流 阻，反之，工作壓力下降時，下薄膜14()變形也相對減小， • 以致減小間隙，增加流阻，而上下薄臈120、14〇受單位愿 力的變形量取決於薄膜120、140本身的材質及厚度，本發 明為了使薄膜節流器配合工作條件改變下薄膜丨之變形 里下薄膜1使用印流螺絲160的毛細管調整下薄膜上側 的預壓，其雙侧受壓因為兩側之淨壓力作用產生變形，調整 預壓量，可以使薄膜變形量所造成的工作性能的改變，不再 •受限於外部供壓之影響。 本發明是一種「毛細管調節之雙膜型靜壓節流器」，如 第二圖之說明，包含頂蓋110、上薄膜120、環體130、節流 螺絲160、下薄膜140、底座150、螺栓170，其中頂蓋11〇、 環體130及底座150以複數支螺栓170鎖緊組合在一起。 外部供油由入口孔152進入到節流器下薄膜140之上下 兩側，供油進入下薄膜14〇之兩側，其下側為節流室132設 201216027 製於底座150内，節流室132設製有節流台153於底座上， 抓體流經下薄膜H0與節流台脱之間的間隙產生液阻，其 下側供油經過節流台153與下薄膜14〇之間隙而節流，調節 供油的壓力及流量至工作條件。 預壓側油路經由垂直連通孔151至預壓室131給予下薄 膜140預壓’其中節流_ 16〇為螺旋形毛細管節流器，利 • 肖毛細管通道之間隙產生節流阻力，節流孔134外端製有内 螺紋，節流螺紋安裝於環體節流孔134，在毛細管的另一端 製有外螺紋，與節流孔134咖職鎖緊m定；毛細管出口 壓力由毛細f職JL作長度蚁，經過毛細管的工作路程越 長，液阻越大使預壓越小，上薄臈12〇及下薄膜14〇均具有 彈性，當工作壓力增加時，受到淨壓力改變的作用，下薄膜 • MG就會進-步產生變形，具有調祕力及流量的效果；當 工作壓力愈大，下薄膜140兩側壓力差上升時，下薄膜14〇 變形量增加，則下薄膜M0與節流台⑸之間的間隙開口愈 大；反之當工作壓力下降時，下薄膜14〇就會進一步產生向 下的變形，工作壓力愈小，則下薄膜14〇與節流台153之間 的間隙開口愈小，工作側油路由下薄膜14〇與節流台1幻之 間的間隙節流後，經出口孔154流至工作油腔。 201216027 上薄膜120與下薄膜140之間為預壓室134,預壓室134 的壓力使上薄膜12〇會隨預壓之大小，|生變形，而上薄膜 120與頂蓋11〇之間設有恆壓室2〇〇及通氣孔m，恆壓室 200因通氣孔ill而保持大氣壓力。 節流器安襄感測器實施監控節流器内部溫度及壓力的 實施案例說明圖如圖三所示，_ 13〇製有徑向的上測孔 • 321 ’底座15〇製有徑向的中測孔345及下側孔355，上測孔 321從環體130的表祕向連通至賴冑13卜巾測孔從底 座150的表面徑向連通至節流室132，下側孔舰從底座15〇 的表面徑向連通於出口孔154，三種測孔32卜345、娜之 外端均製成安裝感測器測頭433、446、456用的螺紋座6〇3， 用來絲壓力汁及溫度計接頭，上測孔321用來監控賴室 • 131内之壓力及溫度’中測孔345肖來監控節流室132内部 的壓力及，皿度，下測孔355用來監控節流器出口孔154的壓 力及溫度。 110 【主要元件符號說明】 頂蓋 通氣孔 111 201216027The film relies on the illusion of _ _, while the thin object ___ is also proportional to the reciprocal of the initial gap of the thin 除了 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Conditional change film preloading, a "capillary-adjusted double-membrane static pressure restrictor" of the invention, comprising a top cover, an upper _, a ring body, a throttle screw, a lower film, a base, a bolt structure, a top cover and The ring body is clamped on the _ and the ring body and the base clamp the lower film, and is combined with the top cover, the ring body and the base lock together to supply oil to both sides of the lower film, and the lower side is throttled. The chamber is arranged in the base. The throttling chamber is provided with a throttle table on the base. The fluid flows through the gap between the lower film and the throttle port to generate a liquid resistance, and the lower side of the oil supply passes through the throttle plate and the lower film. The gap and the throttling 'Qing oil supply and flow to the working conditions; the upper side of the oil is used to pre-press _, so that τ__ in the initial state of the work side force of the initial gap of 201216027 is the default value, and meet the static Operating conditions of the pressure element. The external oil supply enters the upper and lower sides of the lower film of the restrictor through the inlet passage, and the pre-pressure side oil passage is pre-pressed by the vertical connecting hole to the pre-pressing chamber, wherein the throttle screw-end system is fixed. External thread, another end made of a spiral-shaped capillary 'oil supply through the capillary into the side of the _, the use of the gap of the capillary tube to create throttling resistance, the outer end of the orifice has internal thread, throttling • threaded installation In the orifice, the outlet pressure of the capillary is determined by the effective working length of the capillary spiral. 'The longer the micro-path of the capillary of the oil pavement, the larger the liquid resistance is, the smaller the pre-pressure is.' In the initial state of the maintenance, the pressure on both sides of the membrane is adjusted to be in equilibrium. The film has an initial pre-set deformation amount. When the working side force of the working side of the film is changed (4), the lower side of the lower part of the film is subjected to further deformation; when the working pressure is increased, the lower film is deformed upwards, so that the work is tilted. The opening on the side of the force • is increased. Conversely, when the working pressure is lowered, the lower film is deformed downward to reduce the opening on the working pressure side, so that the pressure and the flow rate are adjusted. An upper film is disposed between the top cover and the ring body, and the upper film and the lower film are disposed to be deformed by the size of the chamber, and the pressure of the lower film pre-compression chamber is applied to the capillary outlet. And the pressure between the upper film and the top cover [County (four) Wei hole, so that the upper film occurs 201216027 only seven times the value is difficult to maintain at atmospheric pressure, if the film is not set, the working pressure increases, causing the lower film to deform upward, squeeze The fluid vapor/package in the pressure chamber causes the pre-pressure chamber pressure to rise in a step-by-step manner, and the surface force of the original adjustment oil is not throttled after the gap between the film side throttle and the lower film fa1. It flows through the outlet hole and the connecting pipe to the working oil chamber. If the throttle installation sensor is used to monitor the internal temperature and pressure of the throttle • _ can study its working characteristics 'as the design parameter calibration; the ring system has (4) the upper hemp 'base made of radial towel to listen to and under The side hole and the upper measuring hole are radially connected to the chamber from the surface of the ring body, and the + hemp is connected from the radial direction of the wire to the space of the lower film and the throttle table, and the lower weave is radially connected to the outlet hole from the bottom wire surface; The outer end of the hole is made into a threaded seat for mounting the sensor probe. It is used to install the pressure gauge and the thermometer connector. The upper measurement system is used to monitor the pressure and temperature of the pre-pressure chamber. N, and the throttle chamber is monitored during the middle view. The pressure and temperature 'under the hole is used to monitor the throttle outlet pressure and temperature. [Embodiment] The working pressure and the flow rate are automatically adjusted when the external pressurized fluid passes through the throttle device due to the flow resistance of the fluid viscous resistance. The present invention is a film throttling that can adjust the pressure of the preloading side of the film by capillary throttling. Referring to the second figure, it is said that 201216027 realizes the implementation of its working principle. The film restrictor changes the gap between the top surface of the column of the shutoff table 153 and the lower film 14〇 to change the flow resistance, since the upper and lower _m, (10) are made of an elastic material, which has the ability to be deformed by pressure, when the oil chamber When the pressure rises, the lower film 140 will increase the gap due to the deformation of the pressure, thereby reducing the flow resistance. Conversely, when the working pressure is lowered, the deformation of the lower film 14() is also relatively reduced, so that the gap is reduced. The flow resistance is increased, and the deformation amount of the upper and lower thin ridges 120 and 14 〇 depends on the material and thickness of the film 120 and 140. The present invention is used to change the film damper under the deformation of the film damper. The film 1 uses the capillary of the printing screw 160 to adjust the pre-pressure on the upper side of the lower film, and the pressure on both sides is deformed by the net pressure on both sides, and the pre-pressure is adjusted to change the working performance caused by the deformation of the film. No longer • Limited by the effects of external pressure supply. The present invention is a "capillary-adjusted double-membrane type static pressure restrictor", as illustrated in the second figure, comprising a top cover 110, an upper film 120, a ring body 130, a throttle screw 160, a lower film 140, a base 150, The bolt 170, wherein the top cover 11 〇, the ring body 130 and the base 150 are locked and combined by a plurality of bolts 170. The external oil supply enters the upper and lower sides of the lower film 140 of the throttle device through the inlet hole 152, and the oil enters the two sides of the lower film 14〇, and the lower side of the throttle chamber 132 is provided with the 201216027 in the base 150, and the throttle chamber 132 is provided with a throttle table 153 on the base, and a liquid resistance is generated between the gripper body flowing through the gap between the lower film H0 and the throttle table, and the lower side oil supply passes through the gap between the throttle table 153 and the lower film 14 Throttle, adjust the pressure and flow of oil supply to working conditions. The pre-pressing side oil passage is pre-pressed to the lower film 140 via the vertical communication hole 151 to the pre-compression chamber 131. The throttle _ 16 〇 is a spiral capillary restrictor, and the gap between the Li Xiao Xiao capillary channels generates throttling resistance and throttling. The outer end of the hole 134 is internally threaded, the throttle thread is mounted on the annular body orifice 134, and the other end of the capillary is provided with an external thread, and the throttle hole 134 is locked with a lock; the capillary outlet pressure is capillary JL is used as the length ant. The longer the working distance through the capillary, the larger the liquid resistance is, the smaller the pre-pressure is. The upper and lower 臈12〇 and the lower film 14〇 are elastic. When the working pressure increases, the net pressure changes. Film • MG will be deformed in a step-by-step manner, with the effect of tightness and flow; when the working pressure is higher, the pressure difference between the lower film 140 increases, and the deformation of the lower film 14 increases, then the lower film M0 and the section The gap opening between the flow tables (5) is larger; on the contrary, when the working pressure is lowered, the lower film 14〇 is further deformed downward, and the smaller the working pressure, the gap between the lower film 14〇 and the throttle table 153. The smaller the opening, the working side oil After throttling the gap between the lower film 1 and Magic 14〇 expansion stage, through the outlet orifice 154 to flow to the working oil chamber. 201216027 The pre-pressure chamber 134 is between the upper film 120 and the lower film 140. The pressure of the pre-compression chamber 134 causes the upper film 12〇 to be deformed according to the magnitude of the pre-compression, and the upper film 120 and the top cover 11〇 are disposed. There are a constant pressure chamber 2〇〇 and a vent hole m, and the constant pressure chamber 200 maintains atmospheric pressure due to the vent hole ill. The implementation of the throttle ampere sensor to monitor the internal temperature and pressure of the throttle is shown in Figure 3. The _ 13 有 has a radial upper hole. • The 321 'base 15 is made of radial. The middle measuring hole 345 and the lower side hole 355, the upper measuring hole 321 is connected from the surface of the ring body 130 to the Laiyan 13 cloth measuring hole, and is radially communicated from the surface of the base 150 to the throttle chamber 132, and the lower side hole ship The surface of the base 15〇 is radially connected to the outlet hole 154, and the three types of the measuring holes 32 and 345 are formed into screw seats 6〇3 for mounting the sensor probes 433, 446 and 456 for the wire pressure. The juice and thermometer connector, the upper measuring hole 321 is used to monitor the pressure and temperature in the chamber 131, and the measuring hole 345 is used to monitor the pressure inside the throttling chamber 132 and the degree of the dish. The lower measuring hole 355 is used to monitor the throttling. The pressure and temperature of the outlet port 154. 110 [Key component symbol description] Top cover Vent hole 111 201216027
上薄膜 120 環體 130 預壓室 131 節流室 132 節流孔 134 下薄膜 140 底座 150 垂直連通孔 151 入口孑L 152 節流台 153 出口孔 154 節流螺絲 160 螺栓 170 恆壓室 200 上測孔、中測孔、下側孔 321 ' 345 ' 355 感測器接頭 433'446'456 螺紋座 603Upper film 120 Ring body 130 Pre-compression chamber 131 Throttle chamber 132 Throttle hole 134 Lower film 140 Base 150 Vertical communication hole 151 Entrance L 152 Throttle 153 Exit hole 154 Throttle screw 160 Bolt 170 Constant pressure chamber 200 Hole, middle hole, lower hole 321 ' 345 ' 355 sensor connector 433 '446'456 threaded seat 603