CN113775650A - Array type multi-outlet film throttler structure - Google Patents
Array type multi-outlet film throttler structure Download PDFInfo
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- CN113775650A CN113775650A CN202111009794.4A CN202111009794A CN113775650A CN 113775650 A CN113775650 A CN 113775650A CN 202111009794 A CN202111009794 A CN 202111009794A CN 113775650 A CN113775650 A CN 113775650A
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- throttling
- gland
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- film
- cavity
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- 210000004907 gland Anatomy 0.000 claims abstract description 51
- 230000003068 static effect Effects 0.000 claims abstract description 48
- 239000010408 film Substances 0.000 claims description 62
- 238000007789 sealing Methods 0.000 claims description 29
- 239000010409 thin film Substances 0.000 claims description 16
- 239000012528 membrane Substances 0.000 claims description 8
- 238000003491 array Methods 0.000 abstract description 4
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/164—Sealings between relatively-moving surfaces the sealing action depending on movements; pressure difference, temperature or presence of leaking fluid
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The utility model provides an array many exports film flow controller structure, including lower gland, the rubber pad, elastic diaphragm, go up the gland, the lid admits air, admit air lid and last gland fastening connection, it admits air the chamber to admit air to be equipped with the throttle gas between lid and the last gland, lower gland and last gland fastening connection, it is equipped with down the rubber pad to pile up in proper order between lower gland and the last gland, elastic diaphragm and last rubber pad, be equipped with the pressure balance chamber of a plurality of circumference arrays between elastic diaphragm and the lower gland, be equipped with the throttle air cavity of a plurality of circumference arrays between elastic diaphragm and the last gland, each other not intercommunication between each throttle air cavity, be equipped with the throttle nozzle in the throttle air cavity, every throttle air cavity all is equipped with independent gas outlet. According to the invention, by adopting a single throttling gas inlet and a plurality of independent and sealed and isolated throttling gas outlet modes, different throttling requirements of a plurality of downstream executing elements can be met simultaneously; when it is used to control a static pressure dry gas seal or a gas thrust bearing, it theoretically has infinite axial and angular air film stiffness.
Description
Technical Field
The invention relates to a clearance adjusting restrictor structure, in particular to a film variable restrictor structure which can be used for various gas lubrication or liquid lubrication seals and bearings.
Background
The method is an effective way for improving the bearing capacity and rigidity of the static pressure gas bearing and the static pressure dry gas sealing air film by filling pressurized throttling gas into the micro gap, wherein the throttling device which plays a throttling and pressure reducing role in the throttling gas is the key point for ensuring that the bearing and the sealing air film have positive air film rigidity. The throttleer can be divided into a fixed throttleer and a variable throttleer, the fixed throttleer comprising a small hole throttleer, a slit throttleer and a porous throttleer has the advantage of simple structure, but the fixed throttleer has weak adaptability to the disturbance such as working condition change, shafting vibration and the like. The variable restrictor mainly comprises a film restrictor and a slide valve restrictor, and self-adaptive control of the throttling process is realized through deformation of an elastic diaphragm or movement of a valve element in the restrictor, so that the capability of adapting to external disturbance of a static pressure seal and a bearing is obviously improved.
For static pressure dry gas seal and static pressure thrust bearing, in order to adapt to axial float of shafting and axial force change, a single film variable restrictor is generally adopted to supply gas for fixed orifices on a seal or bearing static part, namely all the fixed orifices are connected and communicated, but the adaptability of the variable restrictor to angular oscillation is weak. In order to adapt to the change of the angular deflection and the angular deflection moment of a shafting, a film variable restrictor can be independently arranged on each fixed orifice on a sealing or bearing static part, so that the outlet of each fixed orifice can be independently regulated and controlled, but the variable restrictor is complex in system structure, large in restrictor quantity and inconvenient for engineering application.
Disclosure of Invention
In order to improve the adaptability of the existing static pressure gas seal or static pressure gas bearing with the film restrictor to axial angular deflection and deflection moment, the invention provides the array type multi-outlet film restrictor structure with simple and compact structure.
The technical scheme of the invention is as follows:
the utility model provides an array many exports film flow controller structure, includes gland 1, rubber pad 2, elastic diaphragm 3, goes up gland 4, air inlet cover 5, its characterized in that down: the air inlet cover 5 is fixedly connected with the upper gland 4, a throttling air inlet cavity 53 is arranged between the air inlet cover 5 and the upper gland 4, the lower gland 1 is fixedly connected with the upper gland 4, and a lower rubber pad 21, an elastic diaphragm 3 and an upper rubber pad 22 are sequentially stacked between the lower gland 1 and the upper gland 4; a plurality of circumferentially arrayed pressure balance cavities 123 are arranged between the elastic diaphragm 3 and the lower gland 1, a plurality of circumferentially arrayed throttle air cavities 424 are arranged between the elastic diaphragm 3 and the upper gland 4, and the throttle air cavities 424 and the pressure balance cavities 123 are symmetrically arranged on two sides of the elastic diaphragm 3 to form a thin film throttle; a throttling nozzle 426 and an air outlet 425 are arranged in the throttling air cavity 424 of each film throttling device, and the air outlet 425 of each film throttling device is respectively communicated with one throttling hole of the static pressure dry air sealing static ring; the throttle air chambers 424 of the respective membrane throttlers are not communicated with each other, and the pressure balance chambers 123 of the respective membrane throttlers are communicated with each other.
Further, a balance gas inlet hole 411 is arranged on the upper gland 4, and the pressure balance cavity 123 of each film restrictor is communicated with a balance gas inlet channel 412.
Further, the throttle air inlet cavity 53 is communicated with a throttle nozzle hole 422 through an inlet channel 421, a throttle gap 423 is arranged between the elastic membrane 3 and the end surface of the throttle nozzle 426, and the throttle nozzle hole 422 is communicated with a throttle air outlet cavity 424 through the throttle gap 423.
Further, a balance gas circulation channel 12 is arranged on the upper end face of the lower gland 1, the balance gas circulation channel 12 comprises a central hole 121, a pressure balance cavity 123 and a communication channel 122, the pressure balance cavity 123 is cylindrical, and the pressure balance cavity 123 is communicated with the central hole 121 through the communication channel 122.
Further, the structural shape of the film throttler is cylindrical.
Or the structural shape of the film restrictor is a prism shape with a hexagonal section.
Further, a balance gas flow channel 12 is arranged on the upper end surface of the lower gland 1, the balance gas flow channel 12 comprises a central hole 121 and a pressure balance cavity 123, the pressure balance cavity 123 is prism-shaped with a triangular section, and the central hole 121 is communicated with the pressure balance cavity 123.
The working principle of the invention is as follows:
the film restrictor can be used for a static pressure bearing or a static pressure dry gas seal. The array type multi-outlet film throttleer also belongs to one type of film throttleers, and the working principle of the film throttleer is firstly illustrated by taking static pressure dry gas seal of a conventional film throttleer as an example. The static pressure dry gas seal of the film restrictor changes the flow resistance of the throttled gas through the self-adaptive deformation of the elastic diaphragm, so that the dry gas seal recovers the original film thickness value when the film thickness changes under the action of external force, and theoretically, the dry gas seal can present infinite gas film rigidity. Specifically, throttling air with given pressure is firstly sprayed out through a nozzle hole of the film throttling device, enters a tiny gap between the end surface of the nozzle and the elastic diaphragm to generate certain flow resistance and pressure drop, and then enters a throttling air outlet cavity, which is the first throttling of a throttling system; the throttling air flowing out from the outlet of the throttling air outlet cavity of the film throttling device enters a static pressure dry air sealed dynamic and static ring gap and generates flow resistance and pressure drop, which are secondary throttling. When the static pressure dry gas seal is subjected to external force to reduce the film thickness, the flow resistance of secondary throttling is increased, so that the pressure of a throttling gas outlet cavity of the film throttling device is increased, the elastic diaphragm is further deformed under the action of the increased throttling gas pressure to increase the throttling gap between the end surface of the nozzle and the elastic diaphragm, the flow resistance of throttling gas for the first time is reduced to increase the pressure of the throttling gas outlet cavity, and finally the film thickness between static pressure dry gas seal dynamic and static rings is increased; on the contrary, when the static pressure dry gas seal is subjected to external force to increase the film thickness, the film restrictor can also reduce the pressure of the throttling gas outlet cavity through the self-adaptive deformation of the elastic diaphragm, and finally the film thickness between the dynamic ring and the static ring of the dry gas seal is reduced. When the parameters of the thin film throttler are properly selected, the static pressure dry gas sealing film thickness under the action of external force can be basically unchanged through self-adaptive throttling resistance, so that theoretically infinite positive rigidity is realized. However, the conventional film restrictor only has great axial gas film rigidity, and can only adapt to the increase or decrease of the whole sealing gap, and the effective self-adaptive control cannot be realized for the inclination condition that one side of the sealing gap is increased and the other side of the sealing gap is decreased.
The array type multi-outlet thin film throttler structure comprises a plurality of single thin film throttlers distributed in a circumferential array mode, a throttling nozzle and a throttling air outlet cavity are arranged above an elastic diaphragm in each single thin film throttler, a pressure balance cavity is arranged below the elastic diaphragm, and deformation of the elastic diaphragm can be controlled within a reasonable range through pressure adjustment in the pressure balance cavity. The throttling gas outlet cavities are not communicated with each other so as to realize independent control on the outlet pressure of the throttling gas; the pressure balance cavities are communicated with each other. In order to realize the isolation and sealing between the throttling air outlet cavities, an upper rubber pad is arranged between the elastic diaphragm and the upper gland, and a lower rubber pad is arranged between the elastic diaphragm and the lower gland. When the array type multi-outlet film throttler is used for static pressure dry gas sealing, the outlets of throttling gas outlet cavities in the single film throttlers are respectively communicated with the throttling holes of the static ring of the static pressure dry gas sealing, and the number of the single film throttlers is the same as that of the throttling holes in the static ring of the static pressure dry gas sealing. The film restrictor is mainly used for the condition that static pressure dry gas seal is easy to be subjected to angular disturbance and seal gaps are not uniformly distributed along the circumferential direction. When the static pressure dry gas seal is inclined due to external angular disturbance, one side of the seal gap is increased and the other side of the seal gap is reduced, for the side with the increased seal gap, the secondary flow resistance of the dry gas seal throttling system is reduced, the pressure of a throttling gas outlet cavity in the corresponding single-film throttling device is reduced, the throttling gap between the elastic diaphragm and the end surface of the nozzle is reduced, the primary flow resistance of the throttling system is increased, and the feedback result is that the side seal gap is reduced and is recovered to the original film thickness; on the other hand, the side where the seal gap is decreased is fed back as a result of increasing the seal gap on that side to return to the original film thickness. Therefore, the array type multi-outlet film throttleer can obviously improve the capability of static pressure dry gas sealing in resisting external angular deflection disturbance, and theoretically has infinite angular gas film rigidity.
Advantages and advantageous effects of the invention
(1) The plurality of single-film throttlers are arranged in the upper cover and the lower cover which are fixedly connected in a circumferential array mode, the pressure balance cavities of the elastic membranes are communicated, and the whole structure is compact and simple.
(2) Through independent intercommunication of a plurality of single film throttleers and executive component, and realize reliable sealed isolated through the rubber pad between the throttle gas outlet cavity of each elastic diaphragm, can realize the simultaneous control of film throttleer to a plurality of executive component.
(3) The array type multi-outlet film throttler structure theoretically has infinite axial and angular air film rigidity, not only can be used for bearing static pressure dry air seal or air thrust bearing with clearance change caused by axial movement, but also is suitable for bearing static pressure dry air seal and air bearing with inclined clearance caused by angular deflection disturbance.
Drawings
FIG. 1 is a schematic three-dimensional structure of a cylindrical thin-film restrictor according to a first embodiment of the present invention;
FIG. 2 is a cross-sectional view of a cylindrical membrane restrictor of a first embodiment of the present invention;
FIG. 3 is a sectional view of the structure of the elastic diaphragm and the rubber pad according to the first embodiment of the present invention;
FIG. 4 is a top view of a lower cover structure according to a first embodiment of the present invention;
FIG. 5 is a schematic three-dimensional structure of a top cover according to a first embodiment of the present invention;
FIG. 6 is a schematic view of a static pressure dry gas seal system for a membrane restrictor in accordance with a first embodiment of the present invention;
FIG. 7 is a schematic three-dimensional structure of a hexagonal prism-shaped thin film restrictor according to a second embodiment of the present invention;
fig. 8 is a top view of a lower cover structure according to a second embodiment of the present invention.
Detailed Description
The invention is further described in detail with reference to the attached drawings.
Referring to fig. 1, 2, 3, 4 and 5, the array type multi-outlet thin film throttleer structure comprises a lower gland 1, a rubber pad 2, an elastic diaphragm 3, an upper gland 4 and an air inlet cover 5, wherein the thin film throttleer structure is cylindrical in shape. The air inlet cover 5 is fastened and connected with the upper gland 4 through a screw 51, an air inlet hole 52 is arranged in the center of the air inlet cover 5, and a throttling air inlet cavity 53 is arranged between the air inlet cover 5 and the upper gland 4. The lower gland 1 is fixedly connected with the upper gland 4 through a screw 11, and a lower rubber pad 21, an elastic diaphragm 3 and an upper rubber pad 22 are sequentially stacked between the lower gland 1 and the upper gland 4.
6 throttle air cavities 424 in circumferential arrays are arranged between the elastic diaphragm 3 and the upper gland 4, each throttle air cavity 424 is not communicated with each other, and sealing isolation is realized by the upper rubber pad 22 between the elastic gasket 3 and the upper gland 4. A throttling nozzle 426 is arranged in the throttling air chamber 424, a throttling gap 423 is formed between the end surface of the throttling nozzle 426 and the upper surface of the elastic diaphragm 3, and an air outlet 425 is arranged in the throttling air chamber 424. Referring to fig. 2, the gas under pressure passes through the gas inlet 52, the throttle gas inlet chamber 53, the gas inlet channel 421, the throttle nozzle hole 422 and the throttle gap 423 in sequence, enters the throttle gas outlet chamber 424, and then enters the subsequent gas pipeline through the gas outlet 425. The flow resistance of the throttle air through the throttle gap 423 is closely related to the amount of deformation of the elastic diaphragm 3, and the farther the elastic diaphragm 3 is deformed from the throttle nozzle 426, the larger the throttle gap is, the smaller the throttle air resistance is. Otherwise, the larger the size.
6 circumferential arrays of pressure balance chambers 123 are provided between the elastic diaphragm 3 and the lower pressure cap 1. The upper end surface of the lower gland 1 is provided with a balance gas circulation channel 12, the balance gas circulation channel 12 comprises a central hole 121, a pressure balance cavity 123 and a communication channel 122, and the pressure balance cavity 123 is cylindrical. The upper gland 4 is centrally provided with a balance air inlet hole 411 and a balance air inlet passage 412. Referring to fig. 2 and 4, the balance gas flows in from the balance gas inlet hole 411, sequentially flows through the balance gas inlet passage 412, the central hole 121 and the communication passage 122, and then enters the pressure balance chamber 123.
Referring to fig. 6 and 2, the static pressure dry gas sealing system of the array type multi-outlet film restrictor comprises an array type multi-outlet film restrictor structure, a static pressure dry gas sealing structure and a gas pipeline between the array type multi-outlet film restrictor structure and the static pressure dry gas sealing structure. The static pressure dry gas sealing structure is composed of a movable ring 61, a static ring 62 and the like, and a sealing gap 63 with certain thickness is formed between the end faces of the movable ring and the static ring. The outlet 425 of one of the single film restrictors is connected to the static dry gas seal configuration inlet 438 by gas line 427 in communication with the seal gap 63. When the static pressure dry gas seal is in an initial state, the end faces of the movable ring 61 and the static ring 62 are kept in a parallel state. When the sealing end surface is disturbed by external angular deflection, the end surface between the movable ring 61 and the static ring 62 is not parallel any more but forms an inclined gap, and the inclined gap 63 is inevitably larger on one side than the original parallel gap and smaller on the other side than the original parallel gap. The flow resistance and pressure drop of the restrictor on the side with the reduced sealing gap 63 are increased, so that the pressure of the throttle gas in the restrictor gas outlet cavity 424 communicated with the sealing gap 63 is increased, the corresponding elastic diaphragm 3 deforms towards the direction far away from the nozzle of the restrictor, the throttling gap 423 is increased, the flow resistance and pressure drop of the throttle gas flowing through the throttling gap 423 are reduced, the pressure of the throttle gas in the restrictor gas outlet cavity 424 is increased, the throttle gas with increased pressure sequentially flows through the gas pipeline 427 and the static pressure dry gas sealing structure gas inlet 438 to enter the sealing gap 63 to resist the sealing gap on the reduced side, and as a result, the sealing gap 63 is restored to the original parallel gap. Similarly, the feedback result of the membrane restrictor on the other side due to the increase of the sealing gap is that the throttling gas with reduced pressure enters the sealing gap through the gas pipeline 437 on the other side to restore the original parallel gap.
Example II
Referring to fig. 2, 3, 5, 7 and 8, the present embodiment is different from the first embodiment in that the shape of the array-type multi-outlet thin film restrictor is a prism with a hexagonal section, and the balance air flow channel 12 on the lower gland 1 includes a central hole 121 and a pressure balance cavity 123, the pressure balance cavity 123 is a prism with a triangular section, the center 121 is directly communicated with the pressure balance cavity 123, and the rest of the structure and the embodiment are the same as the first embodiment.
The embodiments described in this specification are merely illustrative of implementations of the inventive concept and the scope of the present invention should not be considered limited to the specific forms set forth in the embodiments but rather by the equivalents thereof as would occur to those skilled in the art upon consideration of the present inventive concept.
Claims (7)
1. The utility model provides an array many exports film flow controller structure, includes gland (1), rubber pad (2), elastic diaphragm (3), goes up gland (4), air inlet cover (5), its characterized in that down: the air inlet cover (5) is fixedly connected with the upper gland (4), a throttling air inlet cavity (53) is arranged between the air inlet cover (5) and the upper gland (4), the lower gland (1) is fixedly connected with the upper gland (4), and a lower rubber pad (21), an elastic diaphragm (3) and an upper rubber pad (22) are sequentially stacked between the lower gland (1) and the upper gland (4); a plurality of circumferentially arrayed pressure balance cavities (123) are arranged between the elastic diaphragm (3) and the lower gland (1), a plurality of circumferentially arrayed throttle air cavities (424) are arranged between the elastic diaphragm (3) and the upper gland (4), and the throttle air cavities (424) and the pressure balance cavities (123) are symmetrically arranged on two sides of the elastic diaphragm (3) to form a thin film throttle; a throttling nozzle (426) and an air outlet (425) are arranged in a throttling air cavity (424) of each film throttling device, and the air outlet (425) of each film throttling device is respectively communicated with a throttling hole of the static pressure dry air sealing static ring; the throttling air chambers (424) of the film throttlers are not communicated with each other, and the pressure balancing chambers (123) of the film throttlers are communicated with each other.
2. The array multi-outlet thin film restrictor structure of claim 1, wherein: and a balance gas inlet hole (411) is formed in the upper gland (4), and a pressure balance cavity (123) of each film restrictor is communicated with a balance gas inlet channel (412).
3. An array multi-outlet membrane restrictor structure as claimed in claim 1 or 2, wherein: the throttling air inlet cavity (53) is communicated with a throttling nozzle hole (422) through an air inlet channel (421), a throttling gap (423) is arranged between the elastic diaphragm (3) and the end face of the throttling nozzle (426), and the throttling nozzle hole (422) is communicated with the throttling air outlet cavity (424) through the throttling gap (423).
4. The array multi-outlet thin film restrictor structure of claim 3, wherein: the upper end face of the lower gland (1) is provided with a balance gas circulation channel (12), the balance gas circulation channel (12) comprises a central hole (121), a pressure balance cavity (123) and a communication channel (122), the pressure balance cavity (123) is cylindrical, and the pressure balance cavity (123) is communicated with the central hole (121) through the communication channel (122).
5. The array multi-outlet thin film restrictor structure of claim 4, wherein: the structural shape of the film throttler is cylindrical.
6. The array multi-outlet thin film restrictor structure of claim 4, wherein: the structural shape of the film restrictor is a prism shape with a hexagonal section.
7. The array multi-outlet thin film restrictor structure of claim 6, wherein: the upper end face of the lower gland (1) is provided with a balance gas circulation channel (12), the balance gas circulation channel (12) comprises a central hole (121) and a pressure balance cavity (123), the pressure balance cavity (123) is prism-shaped with a triangular section, and the central hole (121) is communicated with the pressure balance cavity (123).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111009794.4A CN113775650B (en) | 2021-08-31 | 2021-08-31 | Array type multi-outlet film throttle structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111009794.4A CN113775650B (en) | 2021-08-31 | 2021-08-31 | Array type multi-outlet film throttle structure |
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| Publication Number | Publication Date |
|---|---|
| CN113775650A true CN113775650A (en) | 2021-12-10 |
| CN113775650B CN113775650B (en) | 2023-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111009794.4A Active CN113775650B (en) | 2021-08-31 | 2021-08-31 | Array type multi-outlet film throttle structure |
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| CN (1) | CN113775650B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114857174A (en) * | 2022-06-16 | 2022-08-05 | 中国工程物理研究院机械制造工艺研究所 | Anti-disturbance restrictor for hydrostatic bearing and hydrostatic guide rail |
| CN115325026A (en) * | 2022-08-23 | 2022-11-11 | 通用技术集团机床工程研究院有限公司 | Hydrostatic bearing unit with built-in throttler and ultra-precise hydrostatic rotary table |
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| CN106763882A (en) * | 2017-03-08 | 2017-05-31 | 齐鲁工业大学 | A kind of adjustable single-sided film flow controller of precompressed |
| CN109595373A (en) * | 2019-01-07 | 2019-04-09 | 山东大学 | A kind of flexible hinge thick film flow controller and adjusting method |
| CN208719475U (en) * | 2018-06-15 | 2019-04-09 | 王刚 | A kind of pressure balance control valve and mixed gas proportioner |
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| RU54129U1 (en) * | 2005-07-11 | 2006-06-10 | Открытое акционерное общество "Производственно-конструкторское предприятие "РЕСПИРАТОР" | PNEUMATIC DEVICE |
| US20090260699A1 (en) * | 2008-04-21 | 2009-10-22 | Smc Kabushiki Kaisha | Throttling structure for use in a fluid pressure device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114857174A (en) * | 2022-06-16 | 2022-08-05 | 中国工程物理研究院机械制造工艺研究所 | Anti-disturbance restrictor for hydrostatic bearing and hydrostatic guide rail |
| CN114857174B (en) * | 2022-06-16 | 2023-07-04 | 中国工程物理研究院机械制造工艺研究所 | Anti-disturbance restrictor for hydrostatic bearing and hydrostatic guideway |
| CN115325026A (en) * | 2022-08-23 | 2022-11-11 | 通用技术集团机床工程研究院有限公司 | Hydrostatic bearing unit with built-in throttler and ultra-precise hydrostatic rotary table |
| CN115325026B (en) * | 2022-08-23 | 2023-09-05 | 通用技术集团机床工程研究院有限公司 | Hydrostatic bearing unit with built-in restrictor and ultra-precise hydrostatic turntable |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113775650B (en) | 2023-12-05 |
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