201215772 \ 六、發明說明： .【發明所屬之技術領域】 本發明係關於一種渦輪分子泵浦之靜子結構改良及其 製造方法’尤指一種靜子葉片與覆環為一體成型之靜子結 構及其製造方法。 【先前技術】 近年來由於半導體產業蓬勃發展’因而造成半導體前 • 段製程之相關設備需求量大增，其中高真空系統中的心臟 元件一渦輪分子泵浦更成為需求量極大之高真空系統元 件。 過輪分子栗浦（Turbo Molecular Pump)源於1912年， 由德國人Gaede所發明的分子拖曳泵浦（M〇iecular以牦 bmp)改良而來。首先請參照如第一圖所示，係一習知之渦 輪分子系浦A之剖面圖#，該渦輪分子果浦A係包含一轉 1子A1及一靜子A2,該料A1由—轉子軸AH)及複數個 轉子葉片紹所組成，而該靜子A2由複數個靜子葉片A21 所組成，並且轉子葉片A11及靜子葉片A2H層層的交 錯設置。 接著請參閱如第二圖所示，係一渦輪分子果浦之作用 原理示意圖，氣體進入渴輪分子泵浦則後，如虛線之路徑 所示，氣體分子B5經由轉子葉片B2之帶動而進入下一層 之靜子葉片B3,而氣體分子B5經由撞擊靜子葉片B3而轉 201215772 向之後，便可進入下一層之轉子葉月B4。因此，渦輪分子 -泵浦B1之作用原理係利用高速旋轉之傾斜葉片使系統中 原本混亂運動之氣體分子朝出口運動，並利用多級轉子葉 片與靜子葉片之交錯排列來提高其壓縮比。由於渦輪分子 泵浦具有高真空度、高排氣效率以及無油氣污染等特性， 因此得以被廣泛使用於各種研究及應用上。 在習知之靜子葉片組中，每一靜子葉片通常係於原始 籲材料令藉由打孔及彎折方式而形成，並且在靜子葉片組之 外侧係結合有一外環，該外環係用以與其他靜子葉片組之 外環互相結合。然而，由於此種彎折成形之靜子葉片的剛 性較差，在靜子葉片不斷的與高速運動的氣體接觸之下， 靜子葉片容易變形，進而降低渦輪分子泵浦之工作效率， 甚至可能造成渦輪分子泵浦的損壞。 _ 有鑑於此，必須提供一種渦輪分子泵浦之靜子結構改 良及其製造方法，藉由增加靜子葉片組之整體剛性，來提 升渦輪分子泵浦之工作效率及壽命。 【發明内容】 故，有鑑於前述之問題與缺失，發明人以多年之經驗 、積並發揮想像力與創造力，在不斷試作與修改之後， 。有本發明之一種渦輪分子泵浦之靜子結構改良及其製造 方法。 本發明之主要目的係提供一種渦輪分子泵浦之靜子詰 201215772 .構良藉由每—級靜子葉片組之一内覆環、一外覆環及 •複數個靜子葉片為_體成型之結構，以增加整體之剛性， 使靜子葉片不易變形，並可減少組裝上的複雜度，進而減 少組裝工時》 為達上述目的，本發明係揭露一種渦輪分子泵浦之靜 子結構改良，該靜子係包含複數級靜子葉片組，每一級靜 子葉片組係包含：一内覆環’係位於該靜子葉片組之内側; ☆外覆被’係、位於該靜子葉片組之外侧，可藉以將每一級 靜子葉片組互相結合；及複數個靜子葉片，係徑向設置於 該内覆環及該外覆環之間，並且每一靜子葉片之間距相 等；其中’内覆環、外覆環及該複數個靜子葉片係一體成 型，藉此增加整體剛性而不易變形。 本發明之另一目的係提供一種渦輪分子泵浦之靜子結 構改良之製造方法，藉由一電腦數值控制車床及一五轴加 工機之-銑削加工方式製造出一體成型之靜子葉片組，以 增加整體之剛性，使靜+整η丈& # 冑时^不易變形，並可減少組裝上 的複雜度’進而減少組裝工時。 為達上述目的，本發明係揭露一種渦輪分子果浦 子結構改良之製造方法，至少包含以下步驟：⑴將每一級 靜子葉片組之一原始材料放置於-電腦數值控制201215772 \ VI. Description of the invention: [Technical field of the invention] The present invention relates to a turbo molecular pumped stator structure improvement and a manufacturing method thereof, particularly a stator structure in which a stator blade and a shroud are integrally formed and manufactured thereof method. [Prior Art] In recent years, due to the booming development of the semiconductor industry, the demand for related equipment in the pre-semiconductor process has increased greatly. Among them, the core component-turbomolecular pump in the high vacuum system has become a highly demanding high vacuum system component. . The Turbo Molecular Pump originated in 1912 and was modified by the molecular drag pump (M〇iecular 牦 bmp) invented by the German Gaede. First, please refer to the cross-sectional view # of the turbo molecular system Pu A, as shown in the first figure. The turbo molecule A is a one-turn A1 and a static A2. The material A1 consists of a rotor axis AH. And a plurality of rotor blades are formed, and the stator A2 is composed of a plurality of stator blades A21, and the layers of the rotor blade A11 and the stator blade A2H are alternately arranged. Then, as shown in the second figure, a schematic diagram of the action principle of a turbol molecule, after the gas enters the thirsty wheel molecular pump, as shown by the dotted line, the gas molecule B5 is driven by the rotor blade B2. The stator vane B3 of one layer, and the gas molecule B5 turns to 201215772 after striking the stator vane B3, and then enters the rotor leaf month B4 of the next layer. Therefore, the principle of the turbomolecular-pump B1 is to use the high-speed rotating inclined blades to move the gas molecules of the originally chaotic motion in the system toward the exit, and to increase the compression ratio by using the staggered arrangement of the multi-stage rotor blades and the stator blades. Due to its high vacuum, high exhaust efficiency, and no oil and gas pollution, turbomolecular pumping is widely used in various research and applications. In the conventional stator blade group, each stator blade is usually formed by punching and bending in the original material, and an outer ring is coupled to the outer side of the stator blade group, and the outer ring is used to The outer rings of the other stator blades are combined with each other. However, due to the poor rigidity of the bent stator vanes, the stator vanes are easily deformed under the constant contact with the high-speed moving gas, thereby reducing the working efficiency of the turbo molecular pumping, and may even cause the turbomolecular pump. Pu's damage. _ In view of this, it is necessary to provide a turbomolecular pumped stator structure improvement and a manufacturing method thereof, which can improve the working efficiency and life of the turbo molecular pump by increasing the overall rigidity of the stator blade group. SUMMARY OF THE INVENTION Therefore, in view of the aforementioned problems and deficiencies, the inventors have accumulated their imagination and creativity with years of experience, and after continuous trial and modification. There is a turbo molecular pumping stator structure improvement of the present invention and a method of manufacturing the same. The main object of the present invention is to provide a turbomolecular pumped stator 诘201215772. The structure is formed by one inner ring of each-stage stator blade set, one outer cover ring and a plurality of stator blades. In order to increase the rigidity of the whole body, the stator blade is not easily deformed, and the complexity of assembly can be reduced, thereby reducing the assembly man-hours. To achieve the above object, the present invention discloses a turbo molecular pumping stator structure improvement, the stator system includes a plurality of stator vane groups, each stage of the stator vane group comprising: an inner shroud' is located inside the stator vane group; ☆ an outer cover is 'system', located outside the stator vane group, whereby each stage of the stator vane The plurality of stator blades are radially disposed between the inner shroud and the outer shroud, and each stator blade is equidistant; wherein the inner shroud, the outer shroud and the plurality of stators The blade system is integrally formed, thereby increasing the overall rigidity without being easily deformed. Another object of the present invention is to provide a method for manufacturing a turbo molecular pumped stator structure, which is manufactured by a computer numerical control lathe and a five-axis machining machine-milling method to manufacture an integrated stator blade group to increase The overall rigidity makes the static + whole η zhang &# 胄 ^ ^ not easy to deform, and can reduce the complexity of assembly 'and thus reduce assembly time. In order to achieve the above object, the present invention discloses a method for fabricating a modified structure of a turbo-molecule, comprising at least the following steps: (1) placing one of the raw materials of each stage of the stator blade group - computer numerical control
(Computer Numerical Control, CNC) # it L )車床上，並將該原始材 料進行定位；（2)㈣⑽車床之車削方式對於每-級靜子 201215772 •.葉片組之外形進行一輪靡面加及（3)藉由一五轴加工機 •之銳削加工方式，將每一級靜子葉片組之複數個靜子葉 片加工成形。 【實施方式】 為達前述之目的與功效，發明人利用一系列之製造流 程來進行一體成型之靜子葉片組的製造，在不斷的修正與 調整之下，始得到本發明之一種渦輪分子泵浦之靜子結構 • 改良及其製造方法。 首先晴參照如第三圖所示，係本發明渦輪分子泵浦之 該靜子之立體外觀示意圖。該靜子100係包含複數級靜子 葉片組110、120、130、140、150,每一級靜子葉片組（以 110為例）係包含：一内覆環丨丨丨，係位於該靜子葉片組i 1〇 之内側；一外覆環112,係位於該靜子葉片組11〇之外側， 可藉以將每一級靜子葉片組110、12〇、13〇、14〇、15〇互 •相結合；及複數個靜子葉片113,係徑向設置於該内覆環 111及該外覆環112之間，並且每一靜子葉片丨13之間距相 等’其中’内覆％_ 111、外覆環112及該複數個靜子葉片 113係一體成型’藉此增加整體剛性而不易變形。靜子 之最佳材質可使用A1 7075鋁材，另外，亦可使用銘合金 材料、銅、金、鋼、鐵、鑄鐵金屬及不銹鋼材作為靜子ι〇〇 之材料。 接著請參閱如第四圖所示，係本發明渴輪分子果浦之 201215772 靜子結構改良之盥诰方法丰跡面_ ^ 眾以方法步驟圖不，其包含以下步驟：將 -每一級靜子葉片組之—原始材料放置於—電腦數值控制 (Conner NUmericaIC〇ntr〇l，CNc)車床上，並將該原始材 料進行定位（步驟20 1 )，其中，呤语仏从』丨β ’丹甲該原始材料係一圓柱形材 料；利用CNC車床之車制方—、# 平不I早則方式對於每一級靜子葉片組之外 形進行-輪廓面加工（步驟2〇2);及藉由一五轴加工機之一 銑削加工方式，將每一級靜子葉片組之複數個靜子葉片加 工成形（步驟203)。 在上述之步驟203中，更可細分為數個步驟。接著請 參照如第五圖所示，係該五軸加工機之銳削加工方式的詳 細步驟圖示，其包含以下步驟：利用一等高粗精加工程序 將每一級靜子葉片組之該複數個靜子葉片的外形加工成形 (步驟3〇1);利用—葉片曲面加卫程序將每—級靜子葉片組 之複數個靜子葉片的曲面加工成形（步驟3〇2)，該葉片曲面 加工程序係引用等扇形高度法則來規晝刀具路徑，在加工 區域上，分成上下兩個加工區域，上半部為吸入面，下半 部為壓力面，先加工上半部吸入面的葉片曲面再加工下半 部壓力面的葉片曲面，最後再加工葉片後緣曲面，路徑串 接是採用往復式的路徑方式；利用一輪敎面加工程序將每 一級靜子葉片組之一輪轂面加工成形（步驟3〇3)，該輪轂面 加工程序係採用側銑加工與端銑加工混合運用的規 J方式 來做加工’因此加工區域分成一側銑加工 取Μ及一端銑 201215772 加工區域兩部份，該錢加工區域又分成上下兩個子區 域，其採用圓錐曲面的刀具位置演算法則做路徑及刀具轴 向演算’而該端銑加工區域在路徑的串接上亦採用往復式 的路徑方式；及制—接合曲面加卫程序將每-級靜子葉 片組之該輪轂面與葉片曲面的接合曲面加工成形(步驟(Computer Numerical Control, CNC) # it L ) on the lathe, and positioning the original material; (2) (4) (10) Turning method of the lathe for each-stage static 201215772 • One-round addition of the blade group shape (3 A plurality of stator blades of each stage of the stator blade group are formed by a sharp cutting process of a five-axis machining machine. [Embodiment] In order to achieve the above-mentioned purpose and effect, the inventors use a series of manufacturing processes to manufacture a one-piece stator blade set, and under continuous correction and adjustment, a turbo molecular pump of the present invention is obtained. Static structure • Improvement and manufacturing methods. First, the clear reference is shown in the third figure, which is a schematic perspective view of the stator of the turbo molecular pump of the present invention. The stator 100 includes a plurality of stator vane groups 110, 120, 130, 140, and 150. Each of the stator vane groups (for example, 110) includes: an inner shroud, located in the stator vane group i 1 The inner side of the crucible; an outer shroud 112 is located on the outer side of the stator blade group 11〇, thereby combining each stage of the stator vane group 110, 12〇, 13〇, 14〇, 15〇 with each other; and a plurality of The stator blade 113 is radially disposed between the inner shroud 111 and the outer shroud 112, and the distance between each of the stator blades 13 is equal to 'the inner half % 111, the outer shroud 112 and the plurality The stator blades 113 are integrally formed 'by thereby increasing the overall rigidity without being easily deformed. The best material for the stator can be A1 7075 aluminum. In addition, it can also be made of alloy material, copper, gold, steel, iron, cast iron metal and stainless steel. Then, as shown in the fourth figure, it is the method of the 201215772 static structure improvement of the thirsty wheel molecule of the present invention. The method of the method is not described, and the method includes the following steps: - each stage of the stator blade The group-original material is placed on a computer numerical control (Conner NUmericaIC〇ntr〇l, CNc) lathe, and the original material is positioned (step 20 1 ), wherein the 呤 仏 丨 丨 ' ' ' ' The original material is a cylindrical material; the car made by the CNC lathe--, the #平不I early method is used for the outer shape of each stage of the stator blade group - contour surface processing (step 2〇2); and by a five-axis One of the processing machines is milling, and a plurality of stator blades of each stage of the stator blade group are formed (step 203). In the above step 203, it can be further divided into several steps. Next, please refer to the detailed step diagram of the sharpening processing mode of the five-axis processing machine, as shown in the fifth figure, which comprises the following steps: using the first-level roughing finishing program to make the plurality of static vane groups of each level Forming and forming the shape of the stator blade (step 3〇1); forming a curved surface of the plurality of stator blades of each-stage stator blade group by using the blade curved surface lifting program (step 3〇2), the blade surface machining program is referred to The fan height rule rules the tool path. In the machining area, it is divided into upper and lower machining zones. The upper half is the suction surface and the lower half is the pressure surface. The blade surface of the upper half suction surface is processed first and the lower half is processed. The blade surface of the pressure surface is finally processed, and the trailing edge surface of the blade is finally processed. The path is connected in a reciprocating path manner; one wheel surface of each stage of the stator blade group is formed by a one-round kneading process (step 3〇3) The wheel hub machining program is processed by the combination of side milling and end milling. The machining area is divided into one side milling and one end milling 2 01215772 Two parts of the machining area, the money processing area is divided into two upper and lower sub-areas, which uses the tool position algorithm of the conical surface to do the path and tool axial calculation 'and the end milling processing area is also used in the series connection of the path a reciprocating path method; and a system-joining surface-defending program to form a joint surface of the hub surface of each-stage stator blade group and the blade surface (steps)
304) ’此加工程序可讓輪轂與葉片能平順連接，以增加葉 片強度及效能，此加工程序亦分為上下兩個加工區域，以 便決定刀具之轴向’在路徑規晝上採用等參數法，接著再 以往復式的方式做路徑串接。 另外，在進行靜子葉片組之實際加工之前，亦即在進 行前述步驟2〇1之前’必須對於靜子葉片組之整體外觀以 及加工路徑進行設計。接著請參照如第六圖所示，係整體 外觀及加工路彳坐之設計步驟圖示，其包含以下步驟：對於 每-級靜子葉片組之外形、一輪轂面、一葉片曲面以及該 輪轂面與該葉片曲面之接合曲面進行三維圖形之設計（步 驟401)，此步驟利用一電腦辅助設計（c〇mputer aided design，CAD)軟體來達成；藉由前一步驟所設計得到之該 三維圖形以進行—整體加工路徑之設計（步驟402)，此步驟 利用一電腦輔助製造（comPuter-aided manufacturing，CAM) 系統來達成；將該整體加工路徑轉換為該五轴加工機可讀 取之一程式（步驟403);及將該程式輸入五軸加工機中（步 驟404) ’並進行步驟201。 201215772 . 再者’在完成前述步驟203之後，更可進行一加工誤 • 差分析’該加工誤差分析的目的是要得知經由前述加工程 序所加工出來的工件是否與原始設計的模型相同。一般係 利用一二次元量床（Coordinate Measuring Machine，CMM) 來對於一工件做檢測，再將量測得到之工件的曲面與原始 模型的曲面作比較，藉此得到兩個曲面在輪廓上位置點的 差異。至於工件之曲面上因加工所殘留的扇形高度或是弦 • 高誤差’則需要利用可量測曲面粗度的粗度儀器來進行量 測。 請參照如第七圖所示，係加工誤差分析之步驟圖示， 其包含以下步驟：建立一原始之幾何實體模型（步驟5〇1” 取得該複數個靜子葉片加工後之實體資料（步驟5〇2);及利 用一模擬軟體對於複數個靜子葉片加工後之實體資料與該 原始之幾何實體模型進行誤差比對（步驟5〇3)。 • 經由上述内容對於本發明進行詳細說明後，可得知本 發明具有以下之優點： (1) 本發明所提供之一體成型之靜子，其整體剛性可大幅 增加’在經過渴輪分子泵浦不斷的運轉之下，靜子葉 片仍可保持原來的形狀而不易變形，以增加靜子之使 用壽命及效率。 (2) 本發明所提供之一體成型之靜子’藉由其簡單之元件 、口構可減夕組裝上的複雜度，進而減少組裝工時。 201215772 • (3)本發明藉由一系列的電腦控制式之製造方法，可精確 ， 並省時的的製造出一體成型之靜子，以免除傳統費時 費工的製造流程。 以上所述之實施例僅係說明本發明之技術思想與特 點，其目的在使熟習此項技藝之人士能夠瞭解本發明之内 容並據以實施，當不能以之限定本發明之專利範圍，若依 本發明所揭露之精神作均等變化或修飾，仍應涵蓋在本發 φ 明之專利範園内。 發明人經過不斷的構想與修改，最終得到本發明之設 計，並且擁有上述之諸多優點，實為優良之發明，應符合 申請發明專利之要件，特提出申請1 t審查委員能早 曰賜與發明專利，以保障發明人之權益。 【圖式 簡單說明】 第一圖 係一習知之渦輪分子泵浦之剖面圖示； 第二圓 係一渦輪分子泵浦之作用原理示意圖； 第三圖 係本發明渦輪分子泵浦之一靜子之立體外觀承 意圖； 第四圖 係本發明渦輪分子泵浦之靜子結構改良之製造 方法步驟圖示； 第五圖 係一五軸加工機之銑削加工方式的詳細步驟圜 示； 第六圖 糸整體外觀及加工路徑之設計步驟圖示；及 201215772 第七圖 係一加工誤差分析之步驟圖示。 【主要元件符號說明】 A、B1 A1 A10 A11、B2、B4 A2、100 A21、B3、113 B5 110 ' 120 、 130 、 140 、 150 111 112 201〜203 301〜304 401〜404 501〜503 渦輪分子泵浦 轉子 轉子軸 轉子葉片 靜子 靜子葉片 氣體分子 靜子葉片組 内覆環 外覆環 滿輪分子泵浦之靜子結構 改良之製造方法步驟編號 五轴加工機之銑削加工步 驟編號 整體外觀及加工路徑之設 S十步驟編號 加工誤差分析之步驟編號 [s] 12304) 'This machining program allows the hub and the blade to be smoothly connected to increase the strength and performance of the blade. This machining program is also divided into two upper and lower machining areas to determine the axial direction of the tool'. Then, the path is connected in a reciprocating manner. In addition, the actual appearance of the stator blade set and the machining path must be designed prior to the actual machining of the stator blade set, i.e., prior to performing the aforementioned step 2〇1. Next, please refer to the design steps of the overall appearance and the processing path sitting as shown in the sixth figure, which includes the following steps: for each-stage stator blade group shape, a wheel hub surface, a blade surface and the hub surface Designing a three-dimensional graphic with the curved surface of the blade surface (step 401), this step is achieved by using a computer aided design (CAD) software; the three-dimensional graphic designed by the previous step is Performing a design of the overall processing path (step 402), which is accomplished using a comPuter-aided manufacturing (CAM) system; converting the overall processing path to a program readable by the five-axis processing machine ( Step 403); and input the program into the five-axis processing machine (step 404)' and proceed to step 201. 201215772. Further, after the completion of the foregoing step 203, a machining error analysis can be performed. The purpose of the machining error analysis is to know whether the workpiece processed by the above-mentioned addition engineering is the same as the original designed model. Generally, a Coordinate Measuring Machine (CMM) is used to detect a workpiece, and the measured surface of the workpiece is compared with the surface of the original model, thereby obtaining the position of the two surfaces on the contour. The difference. As for the fan-shaped height or the chord of the workpiece on the curved surface of the workpiece or the chord height error, it is necessary to measure the thickness of the surface by using a coarseness measuring instrument. Please refer to the step of processing error analysis as shown in the seventh figure, which includes the following steps: establishing an original geometrical solid model (step 5〇1) to obtain the entity data after processing the plurality of stator blades (step 5 〇 2); and using a simulation software for error comparison of the physical data processed by the plurality of stator blades with the original geometrical solid model (step 5〇3) • After detailed description of the present invention, It is known that the present invention has the following advantages: (1) The stator formed by the body of the present invention can greatly increase the overall rigidity. 'The stator blades can still maintain the original shape under the continuous operation of the molecular pump through the thirsty wheel. It is not easy to be deformed to increase the service life and efficiency of the stator. (2) The body-formed stator of the present invention can reduce the assembly time by the simple component and the mouth structure can reduce the assembly complexity. 201215772 • (3) The invention is manufactured by a series of computer-controlled manufacturing methods, which can accurately and time-savingly manufacture an integrated stator to avoid The above-mentioned embodiments are merely illustrative of the technical idea and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement them according to the present invention. The scope of the invention is defined by the scope of the invention, and the invention is intended to be included in the scope of the present invention. The inventors have continually conceived and modified to obtain the design of the present invention. With the above advantages, it is an excellent invention, which should meet the requirements of the invention patent. The application for 1 t review committee can give the invention patent as early as possible to protect the rights and interests of the inventor. [Simplified illustration] The schematic diagram of a conventional turbomolecular pumping diagram; the schematic diagram of the second circular system-turbomolecular pumping; the third diagram is the stereoscopic appearance of one of the stators of the turbomolecular pump of the present invention; A schematic diagram of a manufacturing method for improving the static structure of a turbo molecular pump according to the present invention; the fifth drawing is a milling of a five-axis machining machine Detailed steps of the working method are shown; Figure 6 is a diagram showing the design steps of the overall appearance and processing path; and 201215772. Figure 7 is a diagram showing the steps of processing error analysis. [Key component symbol description] A, B1 A1 A10 A11 , B2, B4 A2, 100 A21, B3, 113 B5 110 '120, 130, 140, 150 111 112 201~203 301~304 401~404 501~503 Turbomolecular pumped rotor rotor shaft rotor blade stator stator gas molecules The manufacturing method of the stator structure improvement of the full-circle molecular pumping in the stator blade group is completed. Step number Five-axis machining machine Milling processing step No. Overall appearance and processing path setting S Step number No. Processing error analysis step number [ s] 12