201203450 六、發明說明： 【發明所屬之技術領域】 本發明，是有關於移載裝置或裝載埠等中 匣載置台。 【先前技術】 液晶顯示器基板、等離子面板顯示器基板 〇 基板等的基板用卡匣是作成具備多數樑的骨架 在內部收容複數枚基板。這種卡匣是爲了將大 運及保管而使用。將基板收容的卡匣因爲是重 載置在載置台的話，載置台會變形而發生振動 對於基板造成不良影響。對於此，專利文獻 244 61A)，是揭示了爲了抑制載置台的振動， 控制。因此需要：將載置台傾斜的傾斜機構、 制。對於此發明人，是檢討更簡便地減少卡匣 〇 完成本發明。又專利文獻2(JP2008-298065A) 在無人搬運車的平面關節型機械手臂（S CARA 振膠狀物。但是專利文獻2，未檢討由載置台 卡匣。 [先行技術文獻] [專利文獻]201203450 VI. Description of the Invention: [Technical Field to Which the Invention Is Alonged] The present invention relates to a transfer device or a stacker for loading a crucible or the like. [Prior Art] Liquid crystal display substrate, plasma panel display substrate 〇 A substrate card for a substrate or the like is formed into a skeleton having a plurality of beams, and a plurality of substrates are accommodated therein. This type of cassette is used for transportation and storage. When the cassette accommodating the substrate is placed on the mounting table, the mounting table is deformed and vibrated, which adversely affects the substrate. In this regard, Patent Document 244 61 A) discloses control for suppressing vibration of the mounting table. Therefore, it is necessary to: a tilting mechanism that tilts the mounting table. For this inventor, it is a simpler review to reduce the number of cassettes to complete the present invention. Further, Patent Document 2 (JP 2008-298065 A) is a planar articulated robot arm of an automated guided vehicle (S CARA vibrating rubber. However, Patent Document 2 does not review the mounting table jam. [Prior Art Document] [Patent Literature]
[專利文獻 1]JP2008-2446 1 A [專利文獻 2]JP2008-298065A 的基板用卡 、太陽電池 狀的構造， 形的基板搬 量物，所以 。此振動會 1 (JP2008- 而施加傾斜 及正確地控 的振動，而 ，是揭示了 arm)設置防 支撐基板用 201203450 【發明內容】 (本發明所欲解決的課題） 本發明的基本的課題，是當由載置台支撐基板用的大 形的卡匣時，可簡單地減少振動。 (用以解決課題的手段） 本發明，是將在底面具備複數根樑的基板用卡匣載置 用的載置台，具備黏彈性體的樑的受台是複數個被安裝於 載置台本體，由受台將卡匣的底面支撐的方式構成。黏彈 性體是例如建築物等的構造體的防振用者。 將卡匣載置在載置台的話，由卡匣的重量會使載置台 變形，此時，因爲會超越來自卡匣的重力及載置台的彈力 平衡的位置地變形，所以開始振動。在本發明中，因爲由 具備黏彈性體的受台支撐卡匣，所以可將載置台及卡匣的 振動的能量由黏彈性體變換成熱，減小卡匣及載置台的振 動。如此可以由小的黏彈性體減少大的卡匣的振動。 較佳是，黏彈性體是從上下雙方由至少一對的金屬板 被挾持，下方的金屬板是被固定於載置台本體’安裝有將 樑的底面支撐在上方的金屬板的上面側用的導電性樹脂的 墊片，進一步設有將墊片與載置台本體接地的接地線。藉 由將黏彈性體從上下雙方由金屬板挾入，就可以簡單地安 裝在載置台本體。一般黏彈性體雖是絕緣體’但是在上方 的金屬板的上面側設置導電性樹脂的墊片接地的話，就可 以將卡匣確實地接地’可防止由靜電所產生的朝基板的粒 -6- 201203450 子（灰塵碎片）的附著及基板的損傷。進一步將卡匣載置在 台時，因爲導電性樹脂的墊片是將樑的底面支撐，所以可 以由低衝撃將卡匣載置在載置台。 更佳是，上方的金屬板及墊片的寬度是比樑更寬廣， 由樑的左右的兩外側，使左右一對的安裝板抵接於墊片的 上面，且使左右一對的安裝板結合於上方的金屬板。在此 說明書中，樑的左右，是在水平面內與樑的長度方向直角 0 的方向的左右。墊片是因從樑的底面施加的力而磨耗，但 是將安裝板解開的話，可以簡單地只交換墊片。且安裝板 是位於樑的左右兩外側，不與樑接觸。 較佳是，由將樑從兩側導引的一對的導引件所構成的 導引部，是設在載置台本體。如此的話，樑是由導引部被 導引，並被載置在具備黏彈性體的受台，來自卡匣的負荷 是由預定的模式施加在黏彈性體。 Ο 【實施方式】 在以下顯示實施本發明用的最適實施例。本發明的範 圍，應依據申請專利範圍的記載，參酌說明書的記載及此 領域中的周知技術，依據本行業者的理解而決定，在不脫 離發明的實質範圍內可進行各種變更。特別是，在本說明 書中所揭示的複數實施例及變形例之間可依據需要任意組 合。 [實施例] 201203450 在第1圖〜第4圖中，顯示實施例的載置台2。載置 台2是將液晶卡匣16等載置，作爲平面關節型機械手臂 、滑動式叉等的移載裝置的一部分使用，但是作爲自動倉 庫中的液晶卡匣16等的棚使用也可以。且可取代液晶卡 匣16，即使等離子面板顯示器等的基板的卡匣也可以。進 一步對於由具備黏彈性體的受台20所進行的制振，倂用 專利文獻1所揭示的載置台2的傾斜控制也可以。 在各圖中，載置台2是具備例如一對的金屬製框架4 、4,框架4、4之間是由樑5、6連接。8是雙臂的平面關 節型機械手臂，載置台2是平面關節型機械手臂8的先端 的手臂，但是將載置台2安裝在單臂的平面關節型機械手 臂或滑動式叉等也可以。10、10各是臂，12是軸，14是 載置台2的安裝部，平面關節型機械手臂8是被安裝在例 如塔式起重機的昇降台或無人搬運車、裝載埠等。 液晶卡匣16(以下只稱卡匣16)，是形成將複數柱（無 圖示）及架18、19等結合的直方體狀的形狀，架18、19 及無圖示的柱等的部分以外是開放，形成骨架狀的形狀。 載置台2,是藉由複數個受台20、21將卡匣16的架18或 19支撐，藉由導引部22將架18、19導引，將架18定位 於受台20、21的左右方向。 將受台20的構造顯示在第2圖、第3圖，受台21也 同樣。2 6是板狀或層狀的黏彈性體，例如丙烯樹脂等的構 造物的防振用的黏彈性體。黏彈性體26是上下雙面被金 屬板24、25挾持，並與其接合，下方的金屬板24是由小 -8 - 201203450 螺釘34或螺栓等被結合於框架4。導電性的樹脂墊片28 ，是藉由例如金屬的安裝板33、及小螺釘35、螺栓、螺 栓等的結合具，被結合於上方的金屬板25。樹脂墊片28 是聚亞胺酯，由聚乙烯等的彈性材料所構成，將碳等的導 電性材料混合而被導電化。接地線3 2，是例如由小螺釘 36等被安裝在金屬板25,透過設在保護用的蓋30的小孔 被安裝於金屬製的框架4而接地。又不設置蓋30也可以 f) 。接地線3 2是由導電性接合劑等接合在導電性樹脂墊片 2 8也可以。 黏彈性體26的左右的寬度是作成架18的左右的寬度 以上，比例如架18的寬度稍大。金屬板25及樹脂墊片28 的左右的寬度是比架18的左右的寬度更大，在從架18朝 左右的兩外側脫落的位置配置安裝板33、33，藉由小螺釘 35等的結合具，將已挾入樹脂墊片28的安裝板33與金屬 板25結合。金屬板24、25因爲需要剛性所以爲金屬，但 〇 是安裝板33若不需要較高的剛性的話，塑膠板等也可以 ，且將接地線32與框架4連接用的構成爲任意。 受台21，是與受台20相同構造，但未設置例如接地 線32的點是不同。不需要在這些的受台20、21的全部設 置黏彈性體26，在一部分的受台20、21中，可取代黏彈 性體20、21 ’設置尿烷橡膠、乙烯丙烯橡膠等的彈性體， 較佳是由導電性材料導電化的彈性體也可以。但是黏彈性 體26是設在複數個受台20、21，由複數處吸收振動能量 。且接地線32雖不需要設在全部的受台20、21，但是需 -9 - 201203450 要設在複數個受台20、21。 在第4圖中，顯示導引部22的安裝。在導引部22中 ，一對的金屬導引件，是隔有比架18、19稍大的間隔， 將架18等導引的方式被配置。在導引件的上面設有錐面 40，將架18等導引。23，是將導引部22安裝在框架4、 樑5、6等的安裝板。 顯示實施例的作用效果。將卡匣16載置在載置台2 時，導引部22是將架18、19等導引，對於受台20、21 載置在預定的位置的方式導引。受台20、21的上面因爲 是由導電性的樹脂墊片28所構成，所以卡匣1 6與載置台 2接觸時的衝擊會變小。來自且卡匣16的負荷會使載置台 2變形，使卡匣16及載置台2振動，但是將此振動能量由 黏彈性體26吸收，就可減少振動。因此不需要例如制振 用的傾斜機構及傾斜控制。樹脂墊片28因爲與架1 8、1 9 等接觸所以會損耗，但是將小螺釘3 5及安裝板3 3解開的 話，就可以容易地交換。且可以藉由接地線32將卡匣1 6 確實地接地。 【圖式簡單說明】 [第1圖]實施例的基板用卡匣載置台的平面圖 [第2圖]顯示載置台上的受台的要部擴大平面圖 [第3圖]顯示載置台上的受台的要部擴大側面圖 [第4圖]顯示載置台上的導引的要部擴大側面圖 -10- 201203450 【主要元件符號說明】 1 :卡匣 2 ’·載置台 4 :框架 5，6 :樑 8:雙臂的平面關節型機械手臂 10 :臂 0 12 :軸 1 4 :安裝部 1 6 :液晶卡匣 18， 19:架 20，21 :受台 22 :導引部 23 :安裝板 24，25 :金屬板 〇 26 :黏彈性體 2 8 :樹脂墊片 30 :蓋 3 2 :接地線 33 :安裝板 3 4 :小螺釘 3 5 :小螺釘 3 6 :小螺釘 40 :錐面 -11 -[Patent Document 1] JP 2008-2446 1 A [Patent Document 2] JP 2008-298065 A The substrate card, the solar cell structure, and the substrate substrate are transferred. This vibration is 1 (JP2008- and the inclination is applied and the vibration is correctly controlled, and the arm is disclosed). 201203450 is provided for the support substrate. [Problems to be Solved by the Invention] The basic problem of the present invention is When the large-sized cassette for supporting the substrate is supported by the mounting table, the vibration can be easily reduced. (Means for Solving the Problem) The present invention is a mounting table for mounting a substrate with a plurality of beams on a bottom surface, and a plurality of receiving plates of a beam including a viscoelastic body are mounted on the mounting table main body. It is constructed by the support of the bottom of the cassette. The viscoelastic body is a vibration-proof user of a structure such as a building. When the cassette is placed on the mounting table, the mounting table is deformed by the weight of the cassette. At this time, the vibration is started because the gravity from the cassette and the elastic force of the mounting table are deformed. In the present invention, since the receiving plate having the viscoelastic body supports the latch, the energy of the vibration of the mounting table and the cassette can be converted into heat by the viscoelastic body, and the vibration of the cassette and the mounting table can be reduced. This makes it possible to reduce the vibration of large clicks by a small viscoelastic body. Preferably, the viscoelastic body is held by at least one pair of metal plates from the upper and lower sides, and the lower metal plate is fixed to the mounting table main body 'with the upper surface side of the metal plate supporting the bottom surface of the beam. The gasket of the conductive resin is further provided with a grounding wire that grounds the gasket and the mounting table body. By inserting the viscoelastic body from the upper and lower sides from the metal plate, it can be easily mounted on the mounting table body. In general, the viscoelastic body is an insulator. However, if the gasket of the conductive resin is grounded on the upper side of the upper metal plate, the card can be surely grounded to prevent the particles 6-6 from being generated by the static electricity. 201203450 Sub-dust (dust debris) adhesion and substrate damage. Further, when the cartridge is placed on the table, since the gasket of the conductive resin supports the bottom surface of the beam, the cartridge can be placed on the mounting table with a low pressure. More preferably, the width of the upper metal plate and the gasket is wider than the beam, and the left and right outer sides of the beam abut the pair of left and right mounting plates against the upper surface of the gasket, and the pair of left and right mounting plates Combined with the metal plate above. In this specification, the left and right of the beam are left and right in the direction of the right angle of the beam in the horizontal plane. The gasket is worn by the force applied from the bottom surface of the beam, but if the mounting plate is unwound, it is possible to simply exchange the gasket. And the mounting plate is located on the left and right sides of the beam and is not in contact with the beam. Preferably, the guide portion formed by the pair of guide members for guiding the beam from both sides is provided on the mounting table main body. In this case, the beam is guided by the guide portion and placed on the receiving table provided with the viscoelastic body, and the load from the cassette is applied to the viscoelastic body by a predetermined pattern.实施 Embodiments The most preferred embodiments for carrying out the invention are shown below. The scope of the present invention is to be determined in accordance with the description of the scope of the invention, and the description of the specification and the well-known techniques in the field are determined by those skilled in the art, and various modifications can be made without departing from the spirit and scope of the invention. In particular, the plural embodiments and modifications disclosed in the present specification may be arbitrarily combined as needed. [Embodiment] 201203450 In the first to fourth figures, the mounting table 2 of the embodiment is shown. The mounting table 2 is placed on the liquid crystal cassette 16 or the like, and is used as a part of a transfer device such as a flat joint type robot or a sliding fork. However, it may be used as a shed for the liquid crystal cassette 16 or the like in the automatic storage. Further, in place of the liquid crystal cassette 16, it is possible to carry out the jam of the substrate such as the plasma panel display. Further, the vibration control by the receiving table 20 having the viscoelastic body may be performed by the tilt control of the mounting table 2 disclosed in Patent Document 1. In each of the figures, the mounting table 2 is provided with, for example, a pair of metal frames 4 and 4, and the frames 4 and 4 are connected by beams 5 and 6. 8 is a plane joint type mechanical arm of both arms, and the mounting table 2 is an arm of the tip end of the plane joint type robot arm 8, but the mounting table 2 may be attached to a one-arm plane joint type robot arm or a sliding fork. 10 and 10 are arms, 12 is a shaft, 14 is a mounting portion of the mounting table 2, and the planar articulated robot arm 8 is attached to, for example, a lifting platform of a tower crane, an unmanned transport vehicle, a loading raft, and the like. The liquid crystal cassette 16 (hereinafter simply referred to as the cassette 16) is formed into a rectangular parallelepiped shape in which a plurality of columns (not shown) and the shelves 18, 19 and the like are joined, and the shelves 18 and 19 and a column (not shown) are used. It is open outside and forms a skeleton shape. The mounting table 2 supports the frame 18 or 19 of the cassette 16 by a plurality of receiving stages 20, 21, and guides the frames 18, 19 by the guiding portion 22 to position the frame 18 on the receiving table 20, 21. Left and right direction. The structure of the receiving table 20 is shown in Fig. 2 and Fig. 3, and the receiving table 21 is also the same. 2 6 is a plate-like or layered viscoelastic body, for example, a viscoelastic body for vibration-proofing of a structure such as an acrylic resin. The viscoelastic body 26 is held by the metal plates 24, 25 on the upper and lower sides and joined thereto, and the lower metal plate 24 is bonded to the frame 4 by a small -8 - 201203450 screw 34 or a bolt or the like. The conductive resin spacer 28 is bonded to the upper metal plate 25 by, for example, a metal mounting plate 33, and a bonding tool such as a screw 35, a bolt, or a bolt. The resin spacer 28 is a polyurethane, and is made of an elastic material such as polyethylene, and is electrically conductive by mixing a conductive material such as carbon. The grounding wire 32 is attached to the metal plate 25 by, for example, a screw 36, and is grounded by being attached to the metal frame 4 through a small hole provided in the protective cover 30. It is also possible to set the cover 30 without further f). The grounding wire 3 2 may be bonded to the conductive resin spacer 28 by a conductive bonding agent or the like. The width of the left and right of the viscoelastic body 26 is greater than or equal to the width of the frame 18, and is slightly larger than the width of the frame 18, for example. The left and right widths of the metal plate 25 and the resin spacer 28 are larger than the left and right widths of the frame 18, and the attachment plates 33 and 33 are disposed at positions separated from the outer sides of the frame 18, and the combination of the screws 35 and the like is provided. The mounting plate 33 that has been inserted into the resin spacer 28 is joined to the metal plate 25. The metal plates 24 and 25 are made of metal because they require rigidity. However, if the mounting plate 33 does not require high rigidity, a plastic plate or the like may be used, and the ground wire 32 may be connected to the frame 4 in any configuration. The stage 21 has the same configuration as the stage 20, but the point at which the ground line 32 is not provided is different. It is not necessary to provide the viscoelastic body 26 in all of the receiving stages 20 and 21, and in some of the receiving stages 20 and 21, an elastic body such as urethane rubber or ethylene propylene rubber may be provided instead of the viscoelastic bodies 20 and 21'. An elastomer which is electrically conductive by a conductive material is also preferable. However, the viscoelastic body 26 is provided on a plurality of stages 20 and 21, and the vibration energy is absorbed by the plurality. Further, although the grounding wire 32 does not need to be provided in all of the receiving stages 20 and 21, it is required to be provided in a plurality of receiving stages 20 and 21 -9 - 201203450. In Fig. 4, the mounting of the guide portion 22 is shown. In the guide portion 22, a pair of metal guide members are disposed so as to be spaced apart from each other by the frame 18, 19, and guide the frame 18 or the like. A tapered surface 40 is provided on the upper surface of the guide member to guide the frame 18 and the like. 23 is a mounting plate for attaching the guide portion 22 to the frame 4, the beams 5, 6, and the like. The effects of the embodiment are shown. When the cassette 16 is placed on the mounting table 2, the guide portion 22 guides the frames 18, 19 and the like, and guides the receiving tables 20, 21 to a predetermined position. Since the upper surfaces of the receiving stages 20 and 21 are made of a conductive resin spacer 28, the impact when the cassette 16 comes into contact with the mounting table 2 becomes small. The load from the cassette 16 deforms the stage 2 to vibrate the cassette 16 and the stage 2, but the vibration energy is absorbed by the viscoelastic body 26 to reduce vibration. Therefore, for example, a tilt mechanism for damping and tilt control are not required. The resin spacer 28 is worn out due to contact with the holders 18, 19, etc., but the screws 35 and the mounting plate 3 3 can be easily exchanged. The cassette 16 can be reliably grounded by the grounding wire 32. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A plan view of a substrate mounting table for a substrate according to an embodiment [Fig. 2] shows an enlarged plan view of a main part of a receiving table on a mounting table. [Fig. 3] shows the receiving on the mounting table. Side view of the main part of the table [Fig. 4] shows the enlarged side view of the main part of the guide on the mounting table. -10- 201203450 [Description of main components] 1 : cassette 2 '·mount 4: frame 5, 6 : Beam 8: Planar articulated robot arm with arms 10 : Arm 0 12 : Shaft 1 4 : Mounting portion 1 6 : LCD cassette 18, 19: Shelf 20, 21 : Receiving table 22 : Guide 23 : Mounting plate 24,25 : Sheet metal 〇 26 : Viscoelastic body 2 8 : Resin gasket 30 : Cover 3 2 : Grounding wire 33 : Mounting plate 3 4 : Screw 3 5 : Screw 3 6 : Screw 40 : Conical surface - 11 -