201125816 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種奈米碳管膜及其製備方法，尤其涉及一 種透光性較好的奈米碳管膜及其製備方法。 【先前技術·】 [0002] 奈米碳管（Carbon Nanotube，CNT)係一種由石墨稀片 卷成的中空管狀物，其具有優異的力學、熱學及電學性 質，因此具有廣闊的應用領域。由於單根奈米碳管的直 徑只有幾個奈米至幾十奈米，難於進行加工，爲便於實 際應用，人們嘗試將大量奈米碳管作爲原材料，製成具 有較大尺寸的宏觀結構。奈米碳管膜（CarbonNan-otube Film, CNT Film)即爲此種宏觀結構的具體形 式之一。 [0003] 馮辰等人在200 8年8月16曰公開的中華民國專利申請第 200833862號中揭露了一種從奈米碳管陣列中直接拉取 獲得的奈米碳管膜，這種奈米碳管膜具有宏觀尺度且能 够自支撑，其包括多個在凡德瓦爾力作用下首尾相連的 奈米碳管。由於在這種直接拉取獲得的奈米碳管膜中奈 米碳管基本平行於奈米碳管膜表面，且相互並排的奈米 碳管間存在一定間隙，因此該奈米碳管膜較爲透明。另 外，由於該奈米碳管膜中奈米碳管基本沿同一方向排列 ，因此該奈米碳管膜能够較好的發揮奈米碳管軸向具有 的導電及導熱等各種優異性質，具有極爲廣泛的應用前 景。 [0004] 然而，該直接拉取獲得的奈米碳管膜中，相鄰且並排的 099101720 表單編號A0101 第4頁/共36頁 0992003322-0 201125816 [0005] [0006] Ο [0007] ο [0008] 奈米碳管之間由於凡德瓦爾力的作用會聚集接觸從而形 成較大直徑的奈米碳管束，該奈米碳管束具有較大密度 ，使奈米碳管膜的透光性受到影響。 【發明内容】 有鑒於此，提供一種具有較好透光性的奈米碳管膜及其 製備方法實為必要。 一種奈米碳管膜的製備方法，其包括以下步驟：提供一 奈米碳管初級膜，該奈米碳管初級膜由若干奈米碳管組 成，所述若干奈米碳管爲沿同一方向擇優取向排列；採 用一雷射束沿平行於該若干奈米碳管擇優取向的方向逐 行掃描該奈米碳管初級膜，從而在該奈米碳管初級膜中 的局部位置形成多個减薄區域，該多個减薄區域沿該若 干奈米碳管擇優取向的方向排列成至少一行。 一種奈米碳管膜，該奈米碳管膜由若干奈米碳管組成， 所述若干奈米碳管爲沿同一方向擇優取向排列，該奈米 碳管膜中定義有多個减薄區域，該多個减薄區域沿該若 干奈米碳管擇優取向的方向排列成至少一行。 相較於先前技術，由於奈米碳管初級膜經雷射掃描後部 分奈米碳管被氧化形成减薄區域，其中减薄區域的奈米 碳管分佈密度降低，使該奈米碳管膜透光性增強。該雷 射掃描沿奈米碳管初級膜中奈米碳管擇優取向的方向， 使兩個相鄰的掃描行間的部分奈米碳管初級膜不致被破 壞，從而使該奈米碳管膜在奈米碳管軸向的方向上具有 較好的導電性，提高該奈米碳管膜的各向異性。 099101720 表單編號Α0101 第5頁/共36頁 0992003322-0 201125816 【實施方式】 [0009] 以下將結合附圖詳細說明本發明實施例奈米碳管膜及其 製備方法。 [0010] 本發明實施例提供一種具有較好透光性的奈米碳管膜丨〇 〇 的製備方法，其包括以下步驟： [0011] 步驟一：提供一奈米碳管初級膜120。 [0012] 請參閱圖1，該奈米碳管初級膜12〇可以從一奈米碳管陣 列150中直接拉取獲得，其具體包括以下步驟： [0013] (一）提供一奈米碳管陣列150。 [0014] 該奈米碳管陣列150通過化學氣相沈積法形成於一生長基 底表面’優選爲超順排的奈米碳管陣列15〇。該奈米礙管 陣列150包括多個奈米碳管，該多個奈米碳管基本彼此平 行且垂直於生長基底表面。通過控制生長條件，該奈米 故g'陣列1 5 0中基本不含有，雜質，如無定型碳或殘留的催 化劑金屬顆粒等。所述奈米碳管陣列150的製備方法可參 閱馮辰等人在2008年8月1 6日公開的中華民國專利申請第 200833862 號。 [0015] 該奈米碳管陣列150中的奈米碳管可以至少包括單壁奈米 碳管、雙壁奈米碳管及多壁奈米碳管中的一種。所述奈 米碳管的直徑爲1奈米〜50奈米，長度爲50奈米〜5毫米。 本實施例中，奈米碳管的長度優選爲1〇〇微米〜900微米。 [0016] 可以理解，本發明實施例提供的奈米碳管陣列150不限於 通過上述方法製備，也可爲石墨電極恒流電弧放電沈積 法、雷射蒸發沈積法等。 099101720 表單編號 Λ0101 ® s 0992003322-0 201125816 [0017] (二）採用一拉伸工具110從該奈米碳管陣列150中拉取 獲得該奈米碳管初級膜120。其具體包括以下步驟：（a )從所述奈米碳管陣列150中選定一奈米碳管片段，本實 施例優選爲採用具有一定寬度的膠帶或黏性基條接觸該 奈米碳管陣列1 50以選定具有一定寬度的一奈米碳管片段 ;(b)通過移動該拉伸工具110,以一定速度拉取該選 定的奈米碳管片段，從而首尾相連的拉出多個奈米碳管 片段，進而形成一連續的奈米碳管初級膜120。該拉伸工 具110基本沿平行於生長基底表面的方向移動。 Ο [0018] ο [0019] 在上述步驟（二）中，該通過拉伸工具110選定的奈米碳 管片段可僅爲一奈米碳管，也可由多個基本相互平行的 奈米碳管組成。該多個奈米碳管相互並排使該奈米碳管 片段具有一定寬度。當該被選定的一個或多個奈米碳管 在拉力作用下沿拉取方向逐漸脫離基底的同時，由於凡 德瓦爾力作用，與該選定的奈米碳管相鄰的其它奈米碳 管首尾相連地相繼地被拉出，從而形成一連續、均勻且 具有一定寬度的奈米碳管初級膜120。 請參閱圖2，所述奈米碳管初級膜120係由若干奈米碳管 組成的自支撑結構。所述若干奈米碳管爲沿同一方向擇 優取向排列。所述擇優取向係指在奈米碳管初級膜120中 大多數奈米碳管的整體延伸方向基本朝同一方向。而且 ，所述大多數奈米碳管的整體延伸方向基本平行於奈米 碳管初級膜120的表面。進一步地，所述奈米碳管初級膜 120中多數奈米碳管係通過凡德瓦爾力首尾相連。具體地 ，所述奈米碳管初級膜120中基本朝同一方向延伸的大多 099101720 表單編號A0101 第7頁/共36頁 0992003322-0 201125816 數奈米碳管中每一奈米碳管與在延伸方向上相鄰的奈米 碳管通過凡德瓦爾力首尾相連。當然，所述奈米碳管膜 中存在少數偏離該延伸方向的奈米碳管，這些奈米碳管 不會對奈米碳管初級膜120中大多數奈米碳管的整體取向 排列構成明顯影響。所述自支撑爲奈米碳管初級膜120不 需要大面積的载體支撑，而只要相對兩邊提供支撑力即 能整體上懸空而保持自身膜狀狀態，即將該奈米碳管初 級膜120置於（或固定於）間隔一定距離設置的兩個支撑 體上時，位於兩個支撑體之間的奈米碳管初級膜120能够 懸空保持自身膜狀狀態。所述自支撑主要通過奈米碳管 初級膜120中存在連續的通過凡德瓦爾力首尾相連延伸排 列的奈米碳管而實現。 ^ [0020] 具體地，所述奈米碳管初級膜120中基本朝同一方向延伸 的多數奈米碳管，並非絕對的直線狀，可以適當的彎曲 ;或者並非完全按照延伸方向上排列，可以適當的偏離 延伸方向。因此，不能排除奈米碳管初級膜120的基本朝 同一方向延伸的多數奈米碳管中並列的奈米碳管之間可 能存在部分接觸。 [0021] 具體地，請參閱圖3，每一奈米碳管初級膜120包括多個 連續且定向排列的奈米碳管片段143。該多個奈米碳管片 段143通過凡德瓦爾力首尾相連。每一奈米碳管片段143 由多個相互平行的奈米碳管145組成，該多個相互平行的 奈米碳管145通過凡德瓦爾力緊密結合。該奈米碳管片段 143具有任意的長度、厚度、均勻性及形狀。 [0022] 所述奈米碳管初級膜120的厚度爲0. 5奈米〜100微米，長 099101720 表單編號A0101 第8頁/共36頁 0992003322-0 201125816 [0023] Ο [0024] ❹ [0025] 099101720 度及寬度與奈米碳管陣列的面積有關。當該奈米碳管陣 列150的直徑爲4英寸時，該奈米碳管初級膜12〇的寬度約 爲〇. 5奈米〜10厘米。該奈米碳管初級膜12〇的比表面積 大於100平方米每克。 在上述選定奈米碳管並拉取的步驟中，由於難以通過拉 伸工具110控制選定的奈米碳管片段的厚度，且並排的奈 米碳管之間易通過凡德瓦爾力的吸引而相互聚集接觸， 形成直徑較大的奈米碳管束，使拉取獲得的奈米碳管初 級膜120厚度均勻性不佳。該奈米碳管束包含的奈米碳管 數量較多’使奈米碳管束密度較大，因此透光性差，從 而使得該奈米碳管初級膜120具有較差的透光性。經測試 ，該奈米碳管初級膜120的可見光透過率最大爲75%。 請參閱圖4，該從奈米碳管陣列150中拉取獲得的奈米碳 管初級膜120可通過其自身的自支撢性懸空設置，也可進 一步設置於一基底140表面，其具體包括以下可選擇步驟 :提供一基底140 ;將該奈米碳管初級膜120鋪設於該基 底140 —表面。由於本實施例中奈米碳管陣列150非常純 淨’且由於奈米碳管本身的比表面積非常大，所以該奈 米碳管初級膜120本身具有較強的黏性◊因此，該奈米碳 管初級膜120可直接通過自身的黏性固定在所述基底14〇 表面。 該基底140可以爲一透明或不透明的硬性或柔性基底，該 基底140的材料不限’能够爲保護該奈米碳管初級膜12〇 並爲該奈米谈管初級膜120提供一定支撑即可。該基底 140的材料可以爲玻璃、石英、塑膠或樹脂。本實施例中 表單編號Α0101 第9頁/共36頁 0992003322-0 201125816 ，該基底14G爲-聚對苯二f酸乙二醇酿（ρΕτ)透明平 板基底。 [0026] [0027] [0028] 進一步地，將該奈米碳管初級膜12〇鋪設於該基底14〇表 面前可進一步包括在該基底140表面塗覆一黏結劑層130 的步驟。該黏結劑層130均勻的塗覆在該基底14〇表面。 該黏結劑層130的材料不限，可以將該奈米碳管初級膜 120與該基底140更爲牢固地結合即可，如一壓敏膠、熱 敏谬或光轉等。本實施例巾，該黏結劑層13()的材料可 以爲丙烯酸丁酯' 丙烯酸_2_乙基已酯、醋酸乙烯、甲基 丙烯酸縮水甘油酯、丙稀酸、過氧化苯甲醯及甲苯及醋 酸乙酯的混合物。 - 步驟二：採用一雷射束170沿該若干奈米碳管擇優取向的 方向逐行掃描該奈米碳管初級膜12〇從而在該奈米碳管初 級膜120中的局部位置形成多個减薄區域126，該多個减 薄區域126沿該若干奈米碳管择優取向方向排列成至少一 Λ:、'::; 行。 定義所述大多數奈米碳管的整體延伸方向爲χ。該多個减 薄區域126可以沿方向χ排列形成—個掃描行124或多個掃 描行124。該多個减薄區域126係以一定順序在該奈米碳 管初級膜120中依次形成。請參閱圖5,當該多個减薄區 域沿方向χ排列成多行時，可先採用雷射束沿方向χ在該 奈米碳管初級膜120中形成一掃描行124，該掃描行124 包括多個沿平行於該擇優取向的方向χ排列的减薄區域 099101720 126 ’再在與該掃描行124相間隔的位置以同樣的方式形 成另一掃描行124，最後以上述方式基本均勻的在整個奈 表單編號Α0101 第10頁/共36頁 0992003322-0 201125816 米碳管初級膜120中形成多個間隔的掃描行124。該多個 掃描行124可等間隔排列或不等間隔排列，但應防止某一 區域的掃描行124分佈過於密集。優選地，該多個掃描行 124等間隔且基本平行的分佈於該奈米碳管初級膜120中 。相鄰的兩個掃描行124的間距d爲1微米〜5毫米，優選爲 10微米〜100微米，本實施例爲20微米。在一個實施例中 ，（1遠大於位於同一掃描行124中减薄區域126的間距。 [0029] ❹ ❹ [0030] 該每一掃描行124的形成方法具體可以係沿方向X依次形 成多個减薄區域126。請參閱圖5及圖6，該多個减薄區域 126可相互間隔設置或連續設置形成一長條形區域128。 當該多個减薄區域126間隔設置時，該多個减薄區域126 可相互等間隔。當該多個减薄區域126連續設置時，該一 個掃描行124中的多個减薄區域126可相互連續地沿方向X 從奈米碳管初級膜120—端延伸至另一端。該掃描行124 的寬度D，即該减薄區域126的直徑，亦即由該多個减薄 區域126組成的長條形區域128的寬度爲1微米〜5毫米， 優選爲10微米〜100微米，本實施例爲20微米。優選地， 每個减薄區域126的面積基本相同，多個掃描行124中， 每掃描行124的减薄區域126的數量基本相同。 通過上述依次的在整個奈米碳管初級膜120表面間隔的局 部减薄的方法，可降低該减薄區域126中奈米碳管的分佈 密度或基本去除該减薄區域126中的奈米碳管，從而减小 該奈米碳管初級膜120的奈米碳管的分佈密度，得到的奈 米碳管膜100具有較好的透光性。可定義單位面積的奈米 碳管膜中奈米碳管的質量爲分佈密度。優選地，該减薄 099101720 表單編號A0101 第11頁/共36頁 0992003322-0 201125816 區域126内奈米碳管的分佈密度比未减薄前下降5〇%至 100/α，從而使該减薄區域126内的透光度從原來的75%提 同到85%以上，比减薄區域126外的透光度提高1〇%至2〇% 。該形成的奈米碳管膜丨00宏觀仍爲一膜狀結構 。由於該 减薄區域126係沿方向X逐行形成’且相鄰的掃描行124之 間具有一定間距，因此可以保證該奈米碳管膜1〇〇在相鄰 的兩個掃描行124之間具有完整的首尾相連的奈米碳管， 不致因减薄降低該奈米礙管膜i 〇 〇沿方向X的導電性，相 反地，因减薄使該奈米碳管膜100在垂直於乂方向且位於 奈米碳管膜100内的y方向上的導電性顯著降低，從而提 南δ亥奈米《反管膜1〇〇在乂方向上和y方向上導電性的差異。 [0031] 可以理解，上述將奈米碳管初級膜120“設於基底14〇的 步驟可以在步驟二之前或之後進行。該奈米碳管初級膜 120可預先鎖設於所述基底14〇表面後被雷射束掃描 减薄，也可懸空設置的被雷射束170掃描减薄，减薄後具 有多個减薄區域126的奈米碳管膜1〇〇可進一步被鋪設於 所述基底140表面。 [0032] 請一並參閱圖5至圖8，步驟二具體包括以下步驟。 [0033] (一）提供一雷射裝置160 ’從該雷射裝置16〇發射雷射 束170至該奈米碳管初級膜12〇表面形成一光斑18〇。 [0034] 該雷射裝置160可發射一脉衝雷射束170，該雷射束17〇 的功率不限’可爲1瓦至1〇〇瓦。該雷射束17〇具有較好的 定向性’因此在奈米碳管初級膜120表面可形成一光斑 180。該雷射束170在奈米碳管初級膜120表面具有的功 099101720 表單編號A0101 第12頁/共36頁 0992003322-0 201125816 [0035] Ο [0036] [0037] Ο [0038] 率密度可大於0. 053x1 Ο12瓦特/平方米。本實施例中，該 雷射裝置160爲一個二氧化碳雷射器，該雷射器的功率爲 12瓦特。可以理解，該雷射裝置160也可以選擇爲能够發 射連續雷射的雷射器。 該光斑180基本爲圓形，直徑爲1微米〜5毫米，優選爲20 微米。可以理解，該光斑180可爲將雷射束170聚焦後形 成或由雷射束170直接照射在奈米碳管初級膜120表面形 成。聚焦形成的光斑180可具有較小的直徑，如20微米。 將雷射束170不經過聚焦直接照射形成的光斑180具有較 大的直徑，如3毫米。 所述雷射裝置160也可包括多個雷射器。當該雷射裝置 160包括多個雷射器時，該光斑可以爲條狀或其他形狀， 該條狀光斑的寬度爲1微米〜5毫米，優選爲20微米。 (二）使該奈米碳管初級膜120與該雷射束170相對運動 ，從而使該光斑180沿該奈米碳管初級膜120的方向X移動 ，形成至少一掃描行124，該掃描行包括多個沿方向X排 列的减薄區域126。 該光斑18 0沿該奈米碳管初級膜12 0中方向X移動，以沿方 向X减薄該奈米碳管初級膜120。爲使該光斑180與奈米碳 管初級膜120相對運動，可保持該雷射束170固定不動， 通過移動該奈米碳管初級膜120實現；或者固定該奈米碳 管初級膜120不動，通過移動該雷射束170實現。該雷射 裝置160可整體相對於該奈米碳管初級膜120平移，或者 僅通過改變雷射裝置160出光部的出光角度，實現發射的 099101720 表單編號Α0101 第13頁/共36頁 0992003322-0 201125816 田射束170形成的光斑18〇在該奈米碳 管初級膜1 2 0的位 置變化。 [0039] ^同-掃描行丨2 4中的多個减薄區域丨2 6可以間隔或連續 。又置。由於該脉衝雷射束170由多個不連續的雷射脉衝組 成’ S雷射束170與奈米碳管初級膜12〇相對運動的速度 争又大邊多個不連續的雷射脉衝能够照射在該奈米碳管 初級膜120表面的不同位置，從而實現對奈米碳管初級膜 120不連續的局部减薄，形成多個不連續的圓形减薄區域 126 δ该雷射束170與奈米碳管初級膜120相對運動速 度！於光斑180的直徑與雷射脉衝頻率的乘積（相對運動 速度〈光斑直控χ雷射脉衝頻率）時，該多個不連續的雷 射脉衝照射在奈米破管初級膜12&表面的位置相互連接或 重合’使該多個减薄區域126呈速續分佈。由於該光 斑沿該奈米碳管初級膜12〇中方向χ移動，該連續分佈的 减薄區域126的長度方向與方向χ平行。本實施例中，同 料订中相鄰的兩個减薄區域12 6簡的距離小於i 〇 〇微 米0 _可以理解’當採用-連績雷射作爲雷射束1?〇時，可通過 程序D又疋雷射器的開關，與奈来碳管初級膜12〇的運動相 配合，從而形成間隔或連續的减薄區域⑶。 _可以贿，由於奈米碳後溫度升高並與氧氣 反應，只討保使足够^㈣射在較短的相内昭射 至奈米碳管表面，即可達到减薄該奈米碳管初級膜120的 目的。因此，可通過採用不同功率、波長或脉衝頻率的 雷射裝置_，並相應調整雷射束17〇與奈米 0 表單編號A0101 第14頁/共36頁 仏双膜 0992003322-0 201125816 [0042] 120的相對運動速度以及光斑180的大小達到局部减薄奈 米碳管初級膜120的目的。可以理解，該雷射裝置160也 不限於脉衝雷射器，只要能够發射雷射使奈米碳管局部 减薄即可。如圖9所示，該减薄區域1 2 6的奈米碳管的分 佈密度滅小或該减薄區域126的奈米碳管全部被刻蝕。 進一步地，可以在所述奈米碳管初級膜120中間隔的形成 多個掃描行124。 [0043] Ο 爲形成多個掃描行124，可將奈米碳管初級膜120沿垂直 於大多數奈米碳管整體延伸的方向y相對於雷射束丨7〇平 移一定距離’再將奈米碳管初級膜12〇沿平行方向χ相對 於雷射束170運動；也可將雷射束170沿垂直於方向丫相對 於奈米碳管初級膜12〇移動一定距離，再使雷射束17〇沿 方向X相對於奈米碳管初級膜12〇運動。本實施例中，該 光斑180在該奈米碳管初級膜120表面移動的路線如圖8所 示。 [0044] Ο 可以理解’爲通過雷射減薄該紊米碳管初級膜120，所述 步驟（二）中，該奈米破管初級膜120放置於一具氡氣的 環境中:如-空氣中，從而使被雷射束17〇照射的奈米碳 管中的碳與氧氣反應生成二氧化碳。 [0045] 爲盡可能除去該奈米碳管初級膜12〇中存在的較大直徑的 奈米破管束，該雷射束170應盡可能均句的掃描該奈米碳 管初級膜120的整個表面’從而在該奈米碳管初級膜120 表面形成多個均勻且間隔分佈的掃描行124。 [0046] 由於奈米碳管對料具錢好吸㈣性，财米碳管初 099101720 表單編號A0HU 第15頁/共36頁 0992003322-0 201125816 級膜120中具有較大直徑的奈米碳管束將會吸收較多的熱 量，從而被燒蝕去除，使形成的奈米碳管膜100的透光性 大幅度上升。本實施例中的奈米碳管膜100整體的光透過 率可以大於75%。優選地，該奈米碳管膜1〇〇光透過率爲 95% 〇 剛請參閱圖10 ’由於在步驟（二）巾，該光斑18〇沿該奈米 碳官初級膜120中方向X移動，使該雷射束17〇沿奈米破管 减膜120中大多數奈米碳管整體延伸方向减薄奈米碳管 束，因此，當奈米碳管初級膜12〇的一個掃描行124减薄 完畢，需要减薄下-個掃描行124時，無須使兩個掃描行 124中的减薄區域126在y方向上對準。 陶]如圖ίο所示，當光斑180沿該奈米碳管初級媒12〇中方向 X移動時，即使兩掃描行124中的减薄區域126交錯排列， 也不會影響該兩掃描行124間的奈米碳管145。因此，形 成的奈米碳管膜100在兩個相鄰的掃描行124之間的夺米 碳管145可以保持完整地首尾相連狀態而不受破壞，㈣ 奈米碳管膜100在方向x上的導電性不受影響。 [0049]彳以理解’當該减薄區域126連續時，沿方向χ進行减薄 的優點尤爲明顯。請參閱圖u，當沿方向χ形成連續的减 薄區域126時，相鄰的兩個掃插行124之間的奈米碳管 145不會被减薄，從而使奈米碳管膜m在方向㈣電導率 及強度基本不受影響’·相鄰兩掃描行之間沿方&首尾相 連的奈米碳管145不會被切斷，避免使奈米碳管膜100在 方向X的電導率及強度大幅下降。 099101720 表單編號A0101 第16頁/共36頁 0992003322-0 201125816 [_]冑盡可能除去該奈米碳管初級膜12()中的奈米碳管束，該 相_兩個掃描行124之間的間距不宜太大，爲不影響奈 求碳管臈100的導電性，該相鄰的兩個掃描行⑼之間的 間距不宜太小。優選地，該兩個相鄰的掃描行124之間的 間距爲1微米〜5毫米，優選爲20微米。 [0051]彳以理解，該通過雷射减薄後得到的奈米碳管膜剛宏觀 仍爲一自支撑的膜狀結構，透光性在减薄後得到提升， 而由於沿方向X進行减薄，奈米碳管膜1〇〇在方向χ上的導 Ο 冑性得到""定程度的保持，在方向y_L的導電性降低，從 而使该奈米碳管臈100具有較好的各向異性。 [_睛參閱表1 ’表！爲通過雷射减薄的方承形成具有多個减 薄區域126的奈米碳管膜1〇〇的具體參數，使用的雷射功 率爲3.6瓦，脉衝頻率爲1〇〇kHz，該奈米碳管膜1〇〇的長 度及寬度均爲約30毫米。 [0053] 表1 ! Ρ ϊι· ¥: :¾ : ； ：i's| ^ λ [UU54] 編號 加工速 間距d X方向方 Y方向方 可見光 ——- 度 塊電阻 塊電阻 透過率 1 2000mm 0.04mm 3千歐 270千歐 85% 〜--—_ / S 2 --- 500mm/ s 0.08mm 1. 9千歐 560千歐 95% 如果在步驟二中’該奈米碳管初級膜120爲自支撑的懸空 °又置並减薄’則可進一步進行一步驟三，將减薄後得到 的奈来碳管膜鋪設於一基底140表面。該奈米碳管膜 099101720 表單編软A0101 第17頁/共36頁 0992003322-0 201125816 100可通過自身的黏性與該基底140結合，或通過一預先 塗附在基底表面的黏結劑層13〇與該基底丨4〇結合。 [0055] [0056] [0057] [0058] 另外，可在該基底14〇表面先塗附一層絕緣的高分子材料 溶液，將該奈米碳管膜100覆蓋該高分子溶液，使該奈米 碳管膜100嵌入該高分子溶液後，使該高分子溶液固化， 從而形成一複合膜。固化後的高分子材料能起到黏結劑 層I30的作用。另外，由於高分子材料阻隔γ方向奈米碳 管之間的接觸，該複合膜比單一的奈米碳管膜100的各向 異性進一步提高。 凊參閱，6 ’ 1G及11，所述具有較好透紐的奈来碳 官膜100由若干奈米碳管組成，所述若干奈米碳管爲沿同 一方向擇優取向排列，該奈米碳管膜1〇〇中定義有多個减 薄區域1 26及减薄區域丨26外的非减薄區域。該多個减薄 區域126沿該若干奈米碳管擇優取向的方向χ排列成至少 一仃，形成至少一掃描行^4，該掃描行124中的减薄區 域126沿方向χ排列。該奈米碳管膜1〇〇可包括多個相互間 隔的掃描行124，該多個掃描行124爲依次分別形成。 所述奈米碳管膜⑽由所述奈米碳管初賴⑽形成，具 有與奈米碳管初級膜12G基本相同的結構，然而該奈米碳 管膜1〇〇進一步定義多個减薄區域126。 該多個减薄ϋ域126可以陣列方式分佈於轉减薄區域中 ’或以交錯排列的方式分佈於該非减薄區域中。具體地 ’該掃描行124均與方向χ平行，該同—掃描行124令的多 個减薄區域126在方向4本對準，多個掃描行124的减薄 099101720 表單編號Α0101 第18頁/共36頁 0992003322-0 201125816 Ο [0059] ❹ 區域m在方向a可對準或不對準的交錯設置。該兩個 相鄰的掃描行m間具有沿方向讓奈米碳管膜⑽的—端 延伸至另-端的完整的部分奈米碳管初級膜⑵。該相鄰 的兩個掃描行124之間的距離爲1微米〜^ υ宅木，優選爲2〇 微米。所述排列成多行的多個减薄區域126相互平行且等 間距設置。該同-掃描行124的多個减薄區域126可間隔 設置或連續設置。所述同-掃描行124的多個减薄區域 126可進-步相互等間隔設置，間隔優選小於刚微米。 該連續設置的减薄區域126的長度方向與該方向χ平行 所述多個减薄區域126優選具有基本相同的面積。所^每 一掃描行124優選具有基本相同數量的减薄區域。 該减薄區域126通過雷射闕的方錢奈米碳管發熱並氧 化形成。該减薄區域126具有較爲稀少的奈米碳管了該减 薄區域126中奈米碳管的分佈密度可以爲非减薄 碳管的分佈密度的50%以下，從而使該减薄區域126料、 見光透過率從原先的約75%提高到85%以上，比非咸薄抑 域的可見紐過率高1G%以上。該雷射掃插沿奈米碳管^ 體延#方向’使兩個相鄰的掃描行124間的部分Ζ米1管 初級膜120不致被破壞，從而使該奈米碳管膜1〇〇在奈米S 碳管整體延伸方向上的具有較好的導電性，提高該奈米 碳管膜100的各向異性。該奈米碳管膜刚可應用於透明 電極、薄膜電晶體、觸摸屏等領域。 [0060] 綜上所述，本發明確已符合發明專利之要件，遂依法提 出專利申請。惟，以上所述者僅為本發明之較佳實施例 ，自不能以此限制本案之申請專利範圍。舉凡習知本案 099101720 表單編號A0101 第19頁/共36頁 0992003322-0 201125816 技藝之人士援依本發明之精神所作之等效修飾或變化， 皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 [0061] 圖1係本發明實施例奈米碳管初級膜製備過程示意圖。 [0062] 圖2係本發明實施例奈米碳管初級膜掃描電鏡照片。 [0063] 圖3係圖2的奈米碳管初級膜中奈米碳管片段的結構示意 圖。 [0064] 圖4係將圖2的奈米碳管初級膜鋪設於一基底的過程示意 圖。 [0065] 圖5係本發明實施例一種具有間隔的减薄區域的奈米碳管 膜的俯視示意圖。 [0066] 圖6係本發明實施例一種具有連續的减薄區域的奈米碳管 膜的俯視示意圖。 [0067] 圖7係雷射减薄法製備本發明實施例奈米碳管膜的正視示 意圖。 [0068] 圖8係雷射光斑在奈米碳管初級膜表面的一種移動路線示 意圖。 [0069] 圖9係本發明實施例雷射减薄後形成的减薄區域的掃描電 鏡照片。 [0070] 圖1 0係本發明實施例另一種具有間隔的减薄區域的奈米 碳管膜的俯視示意圖。 [0071] 圖11係本發明實施例另一種具有連續的减薄區域的奈米 099101720 表單編號A0101 第20頁/共36頁 0992003322-0 201125816 碳管膜的俯視示意圖。 【主要元件符號說明】201125816 VI. Description of the Invention: [Technical Field] The present invention relates to a carbon nanotube film and a preparation method thereof, and more particularly to a carbon nanotube film having better light transmittance and a preparation method thereof. [Prior Art] [0002] Carbon Nanotube (CNT) is a hollow tube made of graphite flakes. It has excellent mechanical, thermal and electrical properties and therefore has a wide range of applications. Since the diameter of a single carbon nanotube is only a few nanometers to several tens of nanometers, it is difficult to process. For practical application, a large number of carbon nanotubes are used as raw materials to form a macrostructure having a large size. Carbon Nano-otube Film (CNT Film) is one of the specific forms of this macrostructure. [0003] A carbon nanotube film obtained by directly pulling from a carbon nanotube array is disclosed in the Chinese Patent Application No. 200833862, published on August 16, 2008, which is incorporated herein by reference. The carbon tube membrane has a macroscopic scale and is self-supporting, and includes a plurality of carbon nanotubes connected end to end under the action of van der Waals force. Since the carbon nanotube film obtained in the direct drawing is substantially parallel to the surface of the carbon nanotube film and there is a gap between the mutually adjacent carbon nanotubes, the carbon nanotube film is more It is transparent. In addition, since the carbon nanotubes in the carbon nanotube film are arranged substantially in the same direction, the carbon nanotube film can exhibit various excellent properties such as conductivity and heat conduction in the axial direction of the carbon nanotube. Wide application prospects. [0004] However, in the direct drawing of the obtained carbon nanotube film, adjacent and side by side 099101720 Form No. A0101 Page 4 / Total 36 Page 0992003322-0 201125816 [0005] [0006] Ο [0007] ο [ 0008] The carbon nanotubes are aggregated by the action of van der Waals force to form a large diameter carbon nanotube bundle, which has a large density, so that the light transmittance of the carbon nanotube film is affected. influences. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide a carbon nanotube film having good light transmittance and a preparation method thereof. A method for preparing a carbon nanotube film, comprising the steps of: providing a carbon nanotube primary membrane, the primary carbon nanotube membrane consisting of a plurality of carbon nanotubes, wherein the plurality of carbon nanotubes are in the same direction Aligning the preferred orientation; scanning the primary film of the carbon nanotubes line by line with a laser beam in a direction parallel to the preferred orientation of the plurality of carbon nanotubes, thereby forming a plurality of reductions in local locations in the primary film of the carbon nanotubes In the thin region, the plurality of thinned regions are arranged in at least one row along a direction in which the plurality of carbon nanotubes are preferentially oriented. A carbon nanotube film consisting of a plurality of carbon nanotubes arranged in a preferred orientation in the same direction, wherein a plurality of thinned regions are defined in the carbon nanotube film And the plurality of thinned regions are arranged in at least one row along a direction in which the plurality of carbon nanotubes are preferentially oriented. Compared with the prior art, since the carbon nanotubes are partially scanned by the laser, a portion of the carbon nanotubes are oxidized to form a thinned region, wherein the carbon nanotube distribution density in the thinned region is lowered to make the carbon nanotube film The light transmission is enhanced. The laser scanning is oriented along the preferred orientation of the carbon nanotubes in the primary membrane of the carbon nanotubes, so that the partial carbon nanotubes between the two adjacent scanning lines are not destroyed, so that the carbon nanotube membrane is The carbon nanotubes have good electrical conductivity in the axial direction, which improves the anisotropy of the carbon nanotube film. 099101720 Form No. Α 0101 Page 5 of 36 0992003322-0 201125816 [Embodiment] [0009] Hereinafter, a carbon nanotube film of the embodiment of the present invention and a method for preparing the same will be described in detail with reference to the accompanying drawings. [0010] Embodiments of the present invention provide a method for preparing a carbon nanotube film 〇 具有 having good light transmittance, which comprises the following steps: [0011] Step 1: providing a carbon nanotube primary film 120. [0012] Referring to FIG. 1, the carbon nanotube primary film 12A can be directly drawn from a carbon nanotube array 150, which specifically includes the following steps: [0013] (1) Providing a carbon nanotube Array 150. [0014] The carbon nanotube array 150 is formed by chemical vapor deposition on a growth substrate surface, preferably a super-sequential carbon nanotube array 15A. The nano-barrier array 150 includes a plurality of carbon nanotubes that are substantially parallel to each other and perpendicular to the surface of the growth substrate. By controlling the growth conditions, the nano-g' array 150 contains substantially no impurities such as amorphous carbon or residual catalyst metal particles. The preparation method of the carbon nanotube array 150 can be referred to the Republic of China Patent Application No. 200833862, which was published on August 16, 2008 by Feng Chen et al. [0015] The carbon nanotubes in the carbon nanotube array 150 may include at least one of a single-walled carbon nanotube, a double-walled carbon nanotube, and a multi-walled carbon nanotube. The carbon nanotubes have a diameter of from 1 nm to 50 nm and a length of from 50 nm to 5 mm. In this embodiment, the length of the carbon nanotubes is preferably from 1 μm to 900 μm. [0016] It can be understood that the carbon nanotube array 150 provided by the embodiment of the present invention is not limited to being prepared by the above method, and may be a graphite electrode constant current arc discharge deposition method, a laser evaporation deposition method, or the like. 099101720 Form No. Λ0101 ® s 0992003322-0 201125816 [0017] (B) The carbon nanotube primary film 120 is obtained by pulling from the carbon nanotube array 150 using a stretching tool 110. Specifically, the method comprises the following steps: (a) selecting a carbon nanotube segment from the carbon nanotube array 150, and in this embodiment, preferably contacting the carbon nanotube array with a tape or a viscous strip having a certain width. 1 50 to select a carbon nanotube segment having a certain width; (b) pulling the selected carbon nanotube segment at a certain speed by moving the stretching tool 110, thereby pulling out a plurality of nanometers end to end The carbon tube segments, in turn, form a continuous carbon nanotube primary membrane 120. The stretching tool 110 moves substantially in a direction parallel to the surface of the growth substrate. [0019] In the above step (2), the carbon nanotube segments selected by the stretching tool 110 may be only one carbon nanotube or a plurality of substantially parallel carbon nanotubes. composition. The plurality of carbon nanotubes are arranged side by side such that the carbon nanotube segments have a certain width. When the selected one or more carbon nanotubes are gradually separated from the substrate in the pulling direction under the pulling force, other carbon nanotubes adjacent to the selected carbon nanotubes due to the van der Waals force They are successively pulled out end to end to form a continuous, uniform, and wide width of the carbon nanotube primary membrane 120. Referring to Figure 2, the carbon nanotube primary membrane 120 is a self-supporting structure composed of a plurality of carbon nanotubes. The plurality of carbon nanotubes are arranged in a preferred orientation along the same direction. The preferred orientation means that the majority of the carbon nanotubes in the primary membrane 120 of the carbon nanotubes extend substantially in the same direction. Moreover, the overall extension direction of the majority of the carbon nanotubes is substantially parallel to the surface of the carbon nanotube primary membrane 120. Further, most of the carbon nanotubes in the carbon nanotube primary membrane 120 are connected end to end by van der Waals force. Specifically, the majority of the carbon nanotube primary film 120 extends substantially in the same direction. 099101720 Form No. A0101 Page 7 / Total 36 Page 0992003322-0 201125816 Number of carbon nanotubes in each of the carbon nanotubes is extended The adjacent carbon nanotubes in the direction are connected end to end by Van der Waals force. Of course, there are a few carbon nanotubes in the carbon nanotube film that deviate from the extending direction. These carbon nanotubes do not constitute an obvious alignment of the majority of the carbon nanotubes in the primary membrane 120 of the carbon nanotubes. influences. The self-supporting carbon nanotube primary film 120 does not require a large-area carrier support, but can maintain its own film state as long as it provides supporting force on both sides, that is, the carbon nanotube primary film 120 is placed. When (or fixed to) two supports disposed at a distance apart, the carbon nanotube primary film 120 between the two supports can be suspended to maintain its own film state. The self-supporting is mainly achieved by the presence of a continuous arrangement of carbon nanotubes extending through the end of the van der Waals force in the primary carbon nanotube membrane 120. [0020] Specifically, most of the carbon nanotubes in the primary film 120 of the carbon nanotubes extend substantially in the same direction, and are not absolutely linear, and may be appropriately bent; or may not be arranged completely in the extending direction. Appropriate deviation from the direction of extension. Therefore, it is not possible to exclude partial contact between the carbon nanotubes juxtaposed in the majority of the carbon nanotubes of the carbon nanotube primary membrane 120 extending substantially in the same direction. [0021] Specifically, referring to FIG. 3, each of the carbon nanotube primary membranes 120 includes a plurality of continuous and aligned carbon nanotube segments 143. The plurality of carbon nanotube segments 143 are connected end to end by Van der Waals force. Each of the carbon nanotube segments 143 is composed of a plurality of mutually parallel carbon nanotubes 145 which are tightly bonded by van der Waals forces. The carbon nanotube segment 143 has any length, thickness, uniformity, and shape. [0020] The thickness of the carbon nanotube primary film 120 is 0.5 to 100 micrometers, length 099101720, form number A0101, page 8 / total 36 pages 0992003322-0 201125816 [0023] Ο [0024] ❹ [0025] ] 099101720 degrees and width are related to the area of the carbon nanotube array. When the diameter of the carbon nanotube array 150 is 4 inches, the width of the primary film 12 〇 of the carbon nanotube is about 0.5 nm to 10 cm. The carbon nanotube primary membrane 12 〇 has a specific surface area greater than 100 square meters per gram. In the step of selecting and drawing the carbon nanotubes described above, it is difficult to control the thickness of the selected carbon nanotube segments by the stretching tool 110, and the side-by-side carbon nanotubes are easily attracted by the van der Waals force. The aggregates are in contact with each other to form a bundle of carbon nanotubes having a large diameter, so that the thickness of the carbon nanotube primary film 120 obtained by the drawing is not uniform. The carbon nanotube bundle contains a large number of carbon nanotubes. The density of the carbon nanotube bundle is large, so that the light transmittance is poor, so that the carbon nanotube primary membrane 120 has poor light transmittance. The carbon nanotube primary film 120 has been tested to have a visible light transmission of at most 75%. Referring to FIG. 4, the carbon nanotube primary film 120 taken from the carbon nanotube array 150 can be disposed by its own self-supporting suspension, or can be further disposed on the surface of a substrate 140, which specifically includes The following optional steps are: providing a substrate 140; and laying the carbon nanotube primary film 120 on the surface of the substrate 140. Since the carbon nanotube array 150 is very pure in the embodiment, and since the specific surface area of the carbon nanotube itself is very large, the carbon nanotube primary film 120 itself has a strong viscosity. Therefore, the nanocarbon The tube primary film 120 can be directly attached to the surface of the substrate 14 by its own adhesiveness. The substrate 140 can be a transparent or opaque rigid or flexible substrate, and the material of the substrate 140 is not limited to protect the carbon nanotube primary film 12〇 and provide a certain support for the nano tube 120. . The material of the substrate 140 may be glass, quartz, plastic or resin. In the present embodiment, the form number Α0101, page 9 / page 36, 0992003322-0 201125816, the substrate 14G is a poly(p-phenylene terephthalate) acid (ρΕτ) transparent plate substrate. [0028] Further, laying the carbon nanotube primary film 12〇 on the surface of the substrate 14 may further include the step of coating a surface of the substrate 140 with a layer of adhesive 130. The adhesive layer 130 is uniformly applied to the surface of the substrate 14. The material of the adhesive layer 130 is not limited, and the carbon nanotube primary film 120 may be more firmly bonded to the substrate 140, such as a pressure sensitive adhesive, a heat sensitive adhesive or a light transfer. In the towel of the embodiment, the material of the adhesive layer 13() may be butyl acrylate '2-ethylhexyl acrylate, vinyl acetate, glycidyl methacrylate, acrylic acid, benzamidine peroxide and toluene. And a mixture of ethyl acetate. - Step 2: scanning the carbon nanotube primary film 12 逐 in a direction along the preferred orientation of the plurality of carbon nanotubes by using a laser beam 170 to form a plurality of local locations in the carbon nanotube primary film 120 Thinning region 126, the plurality of thinned regions 126 are arranged in at least one Λ:, '::; row along the preferred orientation direction of the plurality of carbon nanotubes. It is defined that the overall extension direction of most of the carbon nanotubes is χ. The plurality of thinned regions 126 may be arranged in a direction χ to form a scan line 124 or a plurality of scan lines 124. The plurality of thinned regions 126 are sequentially formed in the carbon nanotube primary film 120 in a certain order. Referring to FIG. 5, when the plurality of thinned regions are arranged in a plurality of rows along the direction, a scanning line 124 may be formed in the carbon nanotube primary film 120 by using a laser beam in a direction, the scanning line 124. A plurality of thinned regions 099101720 126' arranged in a direction parallel to the preferred orientation are further formed in the same manner as the scan line 124, and another scan line 124 is formed in the same manner, and finally substantially uniform in the above manner. The entire nai form number Α 0101 page 10 / total 36 page 0992003322-0 201125816 A plurality of spaced scan lines 124 are formed in the m carbon tube primary film 120. The plurality of scan lines 124 may be arranged at equal intervals or at unequal intervals, but the scan lines 124 of a certain area should be prevented from being too densely distributed. Preferably, the plurality of scan lines 124 are equally spaced and substantially parallel distributed in the carbon nanotube primary film 120. The pitch d of the adjacent two scanning lines 124 is from 1 μm to 5 mm, preferably from 10 μm to 100 μm, and is 20 μm in this embodiment. In one embodiment, (1 is much larger than the pitch of the thinned regions 126 located in the same scan line 124. [0029] The method of forming each scan line 124 may specifically be formed in sequence along the direction X. Thinning region 126. Referring to Figures 5 and 6, the plurality of thinned regions 126 may be spaced apart from each other or continuously disposed to form an elongated strip region 128. When the plurality of thinned regions 126 are spaced apart, the plurality of thinned regions 126 are spaced apart The thinned regions 126 may be equally spaced from each other. When the plurality of thinned regions 126 are continuously disposed, the plurality of thinned regions 126 of the one scan line 124 may continuously follow each other from the carbon nanotube primary film 120 in the direction X. The end extends to the other end. The width D of the scanning line 124, that is, the diameter of the thinned region 126, that is, the length of the elongated region 128 composed of the plurality of thinned regions 126 is 1 micrometer to 5 millimeters, preferably The embodiment is 20 micrometers, preferably 10 micrometers. Preferably, the area of each of the thinned regions 126 is substantially the same, and the number of thinned regions 126 per scan row 124 is substantially the same among the plurality of scan rows 124. The above is in turn throughout the primary carbon nanotubes A method of local thinning of the surface spacing of 120 reduces the distribution density of the carbon nanotubes in the thinned region 126 or substantially removes the carbon nanotubes in the thinned region 126, thereby reducing the primary film of the carbon nanotubes The distribution density of the carbon nanotubes of 120, the obtained carbon nanotube film 100 has good light transmittance. The mass of the carbon nanotubes in the carbon nanotube film per unit area can be defined as the distribution density. Preferably, The thinning 099101720 Form No. A0101 Page 11 / Total 36 Page 0992003322-0 201125816 The distribution density of the carbon nanotubes in the region 126 is decreased by 5〇% to 100/α before the thinning, so that the thinned region 126 The transmittance is increased from 75% to more than 85%, and the transmittance outside the thinned region 126 is increased by 1% to 2%. The formed carbon nanotube film 丨00 is still a film. Since the thinned region 126 is formed row by row in the direction X and has a certain interval between the adjacent scanning lines 124, it is ensured that the carbon nanotube film 1 is adjacent to two scanning lines. There is a complete end-to-end carbon nanotube between 124, which will not reduce the damage caused by thinning. The conductivity of the film i 〇〇 along the direction X, conversely, the conductivity of the carbon nanotube film 100 in the y direction perpendicular to the 乂 direction and located in the carbon nanotube film 100 is significantly reduced by thinning, thereby The difference between the conductivity of the counter-film 1 〇〇 in the 乂 direction and the y direction. [0031] It can be understood that the step of "providing the carbon nanotube primary film 120 on the substrate 14 可以 can be performed. The carbon nanotube primary film 120 can be pre-locked on the surface of the substrate 14 and then scanned and thinned by the laser beam, or can be scanned and thinned by the laser beam 170. The carbon nanotube film 1 having a plurality of thinned regions 126 after thinning may be further laid on the surface of the substrate 140. [0032] Please refer to FIG. 5 to FIG. 8 together. Step 2 specifically includes the following steps. [0033] (a) providing a laser device 160' from which the laser beam 170 is emitted to the surface of the carbon nanotube primary film 12 to form a spot 18". [0034] The laser device 160 can emit a pulsed laser beam 170 having a power limit of from 1 watt to 1 watt. The laser beam 17 is preferably oriented so that a spot 180 can be formed on the surface of the carbon nanotube primary film 120. The work of the laser beam 170 on the surface of the carbon nanotube primary film 120 is 099101720. Form No. A0101 Page 12/36 pages 0992003322-0 201125816 [0035] 00 [0038] 率 [0038] The rate density can be greater than 0. 053x1 Ο12 watts / square meter. In this embodiment, the laser device 160 is a carbon dioxide laser having a power of 12 watts. It will be appreciated that the laser device 160 can also be selected to be a laser capable of emitting a continuous laser. The spot 180 is substantially circular and has a diameter of from 1 micron to 5 mm, preferably 20 microns. It will be appreciated that the spot 180 may be formed by focusing the laser beam 170 or by direct illumination of the laser beam 170 on the surface of the carbon nanotube primary film 120. The spot 180 formed by focusing may have a smaller diameter, such as 20 microns. The spot 180 formed by direct irradiation of the laser beam 170 without focusing is of a relatively large diameter, such as 3 mm. The laser device 160 can also include a plurality of lasers. When the laser device 160 includes a plurality of lasers, the spot may be in the form of a strip or other shape having a width of from 1 micrometer to 5 millimeters, preferably 20 micrometers. (2) moving the carbon nanotube primary film 120 relative to the laser beam 170, thereby moving the spot 180 along the direction X of the carbon nanotube primary film 120 to form at least one scanning line 124. A plurality of thinned regions 126 arranged in the direction X are included. The spot 18 is moved in the direction X of the carbon nanotube primary film 120 to thin the carbon nanotube primary film 120 in the direction X. In order to move the spot 180 relative to the carbon nanotube primary film 120, the laser beam 170 may be kept stationary by moving the carbon nanotube primary film 120; or the carbon nanotube primary film 120 may be fixed. This is achieved by moving the laser beam 170. The laser device 160 can be translated integrally with respect to the carbon nanotube primary film 120, or only by changing the light exit angle of the light exit portion of the laser device 160, to achieve the emission of 099101720 Form No. 1010101 Page 13 / Total 36 Page 0992003322-0 201125816 The spot 18 formed by the field beam 170 changes at the position of the carbon nanotube primary film 120. [0039] The plurality of thinned regions 丨26 in the same-scanning row 丨2 4 may be spaced or continuous. Set again. Since the pulsed laser beam 170 is composed of a plurality of discontinuous laser pulses, the speed of the relative movement of the S laser beam 170 and the carbon nanotube primary film 12〇 is large and a plurality of discontinuous laser veins The blast can be irradiated at different positions on the surface of the carbon nanotube primary film 120, thereby achieving discontinuous local thinning of the carbon nanotube primary film 120, forming a plurality of discontinuous circularly thinned regions 126 δ the laser The relative movement speed of the bundle 170 and the carbon nanotube primary membrane 120! When the diameter of the spot 180 is multiplied by the laser pulse frequency (relative motion speed < spot direct control χ laser pulse frequency), the plurality of discontinuous laser pulses are irradiated on the nano-tube primary film 12 & The locations of the surfaces are interconnected or coincident 'to cause the plurality of thinned regions 126 to be rapidly distributed. Since the spot moves in the direction of the middle of the carbon nanotube primary film 12, the lengthwise direction of the continuously distributed thinned region 126 is parallel to the direction χ. In this embodiment, the distance between two adjacent thinned regions 12 6 in the same order is less than i 〇〇 micron 0 _ can be understood as 'when adopting - continuous laser as the laser beam 1? Program D, in turn, switches the laser to match the motion of the primary membrane 12 奈 to form a spaced or continuous thinned region (3). _ can bribe, because the temperature of the carbon after the carbon rises and reacts with oxygen, only to ensure that enough (4) shot in a shorter phase to the surface of the carbon nanotubes, the thinning of the carbon nanotubes can be achieved. The purpose of the primary film 120. Therefore, laser devices with different power, wavelength or pulse frequency can be used, and the laser beam 17〇 and nano 0 are adjusted accordingly. Form No. A0101 Page 14 of 36 Double Film 0992003322-0 201125816 [0042 The relative motion speed of 120 and the size of the spot 180 achieve the purpose of locally thinning the carbon nanotube primary film 120. It will be appreciated that the laser device 160 is also not limited to a pulsed laser as long as it is capable of emitting a laser to locally thin the carbon nanotubes. As shown in Fig. 9, the distribution density of the carbon nanotubes of the thinned region 1 26 is small or the carbon nanotubes of the thinned region 126 are all etched. Further, a plurality of scan lines 124 may be formed spaced apart in the carbon nanotube primary film 120. [0043] Ο To form a plurality of scan lines 124, the carbon nanotube primary film 120 can be translated a certain distance relative to the laser beam 丨7〇 in a direction y extending perpendicular to the entirety of most of the carbon nanotubes. The carbon nanotube primary membrane 12〇 moves in a parallel direction relative to the laser beam 170; the laser beam 170 can also be moved a certain distance relative to the carbon nanotube primary membrane 12〇 in a direction perpendicular to the direction, and then the laser beam is applied. 17〇 moves in the direction X relative to the primary film of the carbon nanotubes 12〇. In this embodiment, the route of the spot 180 moving on the surface of the carbon nanotube primary film 120 is as shown in FIG. [0044] Ο It can be understood that 'the thin film of the carbon nanotube primary film 120 is thinned by laser. In the step (2), the nano-tube primary film 120 is placed in a helium environment: In the air, carbon in the carbon nanotubes irradiated by the laser beam 17 is reacted with oxygen to form carbon dioxide. [0045] In order to remove as much as possible the larger diameter nanotube bundle present in the primary membrane 12 〇 of the carbon nanotube, the laser beam 170 should scan the entire carbon nanotube primary membrane 120 as uniformly as possible. The surface 'and thus forms a plurality of uniform and spaced scan lines 124 on the surface of the carbon nanotube primary film 120. [0046] Since the carbon nanotubes have a good suction (four) property, the carbon nanotubes at the beginning of the 099101720 Form No. A0HU Page 15 / 36 pages 0992003322-0 201125816 Membrane 120 has a larger diameter of carbon nanotube bundles A large amount of heat is absorbed, which is ablated and removed, and the light transmittance of the formed carbon nanotube film 100 is greatly increased. The light transmittance of the entire carbon nanotube film 100 in this embodiment may be more than 75%. Preferably, the carbon nanotube film 1 has a light transmittance of 95%. Please refer to FIG. 10 'Because in the step (2), the spot 18 is moved along the direction X of the nano carbon official primary film 120. So that the laser beam 17 减 decreases the carbon nanotube bundle along the entire extension direction of most of the carbon nanotubes in the nano-tube reduction film 120, and therefore, when the scan line 124 of the primary film of the carbon nanotube 12 is reduced After the thinning is completed, the lower scan line 124 needs to be thinned, and the thinned regions 126 in the two scan lines 124 need not be aligned in the y direction. As shown in Fig. 1, when the spot 180 moves in the direction X of the carbon nanotube primary medium 12, even if the thinned regions 126 in the two scanning lines 124 are staggered, the two scanning lines 124 are not affected. Intermittent carbon nanotubes 145. Therefore, the formed carbon nanotube film 100 between the two adjacent scanning lines 124 can maintain a complete end-to-end connection without damage, (iv) the carbon nanotube film 100 in the direction x The conductivity is not affected. [0049] 彳 to understand that the advantage of thinning in the direction 当 when the thinned region 126 is continuous is particularly evident. Referring to FIG. u, when a continuous thinned region 126 is formed along the direction, the carbon nanotubes 145 between the adjacent two sweeping rows 124 are not thinned, so that the carbon nanotube film m is Direction (4) Conductivity and strength are basically unaffected'·The carbon nanotubes 145 connected between the adjacent two scanning lines are not cut off, avoiding the conductance of the carbon nanotube film 100 in the direction X. The rate and intensity have dropped significantly. 099101720 Form No. A0101 Page 16 of 36 0992003322-0 201125816 [_]胄 Remove the carbon nanotube bundle in the primary membrane 12() of the carbon nanotube as much as possible, between the two scanning lines 124 The spacing should not be too large, so as not to affect the conductivity of the carbon tube 臈100, the spacing between the adjacent two scanning lines (9) should not be too small. Preferably, the spacing between the two adjacent scanning lines 124 is from 1 micron to 5 mm, preferably 20 microns. [0051] It is understood that the carbon nanotube film obtained by laser thinning is still a self-supporting film-like structure, and the light transmittance is improved after thinning, and is reduced by the direction X. Thin, carbon nanotube film 1〇〇 in the direction of the Ο 胄 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 得到 定 定 定 定 定 定 , , , , , , 导电 导电 导电 导电 导电 导电 导电 导电 导电Anisotropy. [_ Eyes see Table 1 ’ table! In order to form a specific parameter of the carbon nanotube film 1 具有 having a plurality of thinned regions 126 by laser thinning, the laser power used is 3.6 watts, and the pulse frequency is 1 〇〇 kHz. The length and width of the carbon nanotube film are about 30 mm. Table 1 ! Ρ ϊι· ¥: :3⁄4 : ; :i's| ^ λ [UU54] No. Processing speed pitch d X direction Y direction visible light --- Block resistance block resistance transmittance 1 2000mm 0.04mm 3 Thousand euros 270 kohms 85% ~---_ / S 2 --- 500mm / s 0.08mm 1. 9 kohms 560 kohms 95% If in step two 'the carbon nanotube primary film 120 is self-supporting The floating space is further set and thinned, and then a further step 3 is performed to lay the carbon nanotube film obtained after thinning on the surface of a substrate 140. The carbon nanotube film 099101720 Form knitting soft A0101 Page 17 / 36 pages 0992003322-0 201125816 100 can be bonded to the substrate 140 by its own adhesiveness, or through a layer of adhesive 13 pre-applied to the surface of the substrate. Combined with the substrate 〇4〇. [0058] In addition, an insulating polymer material solution may be first coated on the surface of the substrate 14 to cover the polymer solution to make the nanometer. After the carbon nanotube film 100 is embedded in the polymer solution, the polymer solution is solidified to form a composite film. The cured polymer material can function as a binder layer I30. Further, since the polymer material blocks the contact between the γ-direction carbon nanotubes, the anisotropy of the composite film is further improved than that of the single carbon nanotube film 100.凊, 6 '1G and 11, the Nailai carbon film 100 having a better permeability is composed of a plurality of carbon nanotubes arranged in a preferred orientation in the same direction, the nanocarbon A plurality of thinned regions 1 26 and non-thinned regions outside the thinned regions 丨26 are defined in the tubular film. The plurality of thinned regions 126 are arranged in at least one turn along the direction of the preferential orientation of the plurality of carbon nanotubes to form at least one scan line 4, and the thinned regions 126 in the scan line 124 are arranged in the direction χ. The carbon nanotube film 1 〇〇 may include a plurality of scanning lines 124 spaced apart from each other, the plurality of scanning lines 124 being formed in order. The carbon nanotube film (10) is formed by the carbon nanotubes (10) and has substantially the same structure as the carbon nanotube primary film 12G. However, the carbon nanotube film further defines a plurality of thinning. Area 126. The plurality of thinned regions 126 may be distributed in an array of thinned regions or distributed in a staggered manner in the non-thinned regions. Specifically, the scan lines 124 are all parallel to the direction χ, and the plurality of thinned regions 126 of the same-scan line 124 are aligned in the direction 4, and the thinning of the plurality of scan lines 124 is 099101720. Form number Α 0101 page 18 / A total of 36 pages 0992003322-0 201125816 Ο [0059] 交错 The interlaced setting of the region m in the direction a can be aligned or misaligned. The two adjacent scanning lines m have a complete partial carbon nanotube primary film (2) extending in the direction of the end of the carbon nanotube film (10) to the other end. The distance between the adjacent two scanning lines 124 is 1 micrometer to ^ υ 木 wood, preferably 2 微米 micrometers. The plurality of thinned regions 126 arranged in a plurality of rows are arranged parallel to each other and at equal intervals. The plurality of thinned regions 126 of the same-scanning line 124 may be spaced or continuously disposed. The plurality of thinned regions 126 of the same-scanning row 124 may be disposed at equal intervals to each other, preferably less than just a micron. The lengthwise direction of the continuously disposed thinned region 126 is parallel to the direction 所述. The plurality of thinned regions 126 preferably have substantially the same area. Each scan line 124 preferably has substantially the same number of thinned regions. The thinned region 126 is formed by the heating and oxidation of a square carbon nanotube of a laser. The thinned region 126 has a relatively rare carbon nanotube. The distribution density of the carbon nanotube in the thinned region 126 may be less than 50% of the distribution density of the non-thinned carbon tube, so that the thinned region 126 It can be seen that the light transmittance has increased from about 75% to more than 85%, which is more than 1G% higher than the non-salt and thin field. The laser sweeping is carried out along the direction of the carbon nanotubes in the direction of the carbon nanotubes to prevent the partial film 120 between the two adjacent scanning lines 124 from being destroyed, thereby making the carbon nanotube film 1〇〇 It has good conductivity in the overall extension direction of the carbon nanotubes of the carbon nanotubes, and improves the anisotropy of the carbon nanotube film 100. The carbon nanotube film can be applied to fields such as transparent electrodes, thin film transistors, and touch screens. [0060] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Anything in this case 099101720 Form No. A0101 Page 19 of 36 0992003322-0 201125816 Equivalent modifications or variations made by those skilled in the art in light of the spirit of the present invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS [0061] FIG. 1 is a schematic view showing a preparation process of a primary film of a carbon nanotube according to an embodiment of the present invention. 2 is a scanning electron micrograph of a primary film of a carbon nanotube according to an embodiment of the present invention. 3 is a schematic view showing the structure of a carbon nanotube segment in the primary film of the carbon nanotube of FIG. 2. 4 is a schematic view showing a process of laying the primary film of the carbon nanotube of FIG. 2 on a substrate. 5 is a top plan view of a carbon nanotube film having spaced apart thinned regions in accordance with an embodiment of the present invention. 6 is a top plan view of a carbon nanotube film having a continuous thinned region in accordance with an embodiment of the present invention. Figure 7 is a front elevational view showing the preparation of a carbon nanotube film of an embodiment of the present invention by a laser thinning method. 8 is a schematic illustration of a movement path of a laser spot on the surface of a primary film of a carbon nanotube. 9 is a scanning electron micrograph of a thinned region formed after laser thinning in accordance with an embodiment of the present invention. 10 is a top plan view of another carbon nanotube film having spaced apart thinned regions in accordance with an embodiment of the present invention. 11 is another embodiment of the present invention having a continuous thinned area of nano 099101720 Form No. A0101 Page 20 of 36 0992003322-0 201125816 A schematic view of the carbon tube film. [Main component symbol description]
[0072] 奈米碳管膜：100 [0073] 奈米碳管初級膜：120 [0074] 奈米碳管陣列：150 [0075] 拉伸工具：110 [0076] 奈米碳管片段：143 [0077] 奈米碳管：145 [0078] 基底：140 [0079] 黏結劑層：130 [0080] 雷射束：170 [0081] 减薄區域：12 6 [0082] 掃描行：124 [0083] 長條形區域：128 [0084] 光斑：180 [0085] 雷射裝置：160 099101720 表單編號A0101 第21頁/共36頁 0992003322-0Carbon nanotube film: 100 [0073] Nano carbon tube primary membrane: 120 [0074] Nano carbon tube array: 150 [0075] Tensile tool: 110 [0076] Nano carbon tube fragment: 143 [ 0077] Carbon nanotube: 145 [0078] Substrate: 140 [0079] Adhesive layer: 130 [0080] Laser beam: 170 [0081] Thinned area: 12 6 [0082] Scanning line: 124 [0083] Long Strip area: 128 [0084] Spot: 180 [0085] Laser device: 160 099101720 Form number A0101 Page 21 / Total 36 page 0992003322-0