201111030 六、發明說明： 【發明所屬之技術領域】 本發明係例如關於爲了分解氟化合物所使用之反應裝 置等。 【先前技術】 在目前的半導體裝置之製造處理中，爲了形成細微圖 案而有進行蝕刻或洗淨者。此時，使用氟化合物之情況爲 多。又’氟化合物係一般爲安定，對於人體而言無害之構 成爲多之故，對於其他而言，例如亦使用於冷氣的冷媒等 〇 但對於此等之氟化合物之中，當釋放至大氣中時，對 於地球環境而言，將帶來許多大的影響。即，破壞平流層 之臭氧層’成爲造成臭氧層空洞的原因。另外，作爲暖化 氣體，亦成爲地球暖化的原因。並且，如上述，氟化合物 係一般爲安定，其影響乃持續長期間之情況爲多。 因此’爲了不對地球環境帶來影響，需要分解所使用 之氟化合物，對於地球環境而言做成無害狀態而釋放至大 氣中。 在此，例如對於專利文獻1，係揭示有具備塡充含有 A1而成之觸媒的反應器，和於含有在反應器加以處理的 氟與碳、硫磺、氮之一的化合物之氣流，添加水蒸氣之水 添加器，和爲了將塡充於反應器之觸媒及導入於反應器之 201111030 含氟化合物氣流之至少一方，加熱至氟化合物可加水分解 之溫度的加熱手段之含氟化合物之分解處理裝置。 另外’對於專利文獻2，係揭示有具有外管，和內管 ’和設置於內管內部之觸媒層，和安裝於外管之加熱器之 含氟化合物氣體的處理裝置》 [專利文獻1]日本特開200 1 -224926號公報 [專利文獻2]日本特開2008-126092號公報 【發明內容】 [發明欲解決之課題] 但具備塡充含有A1而成之觸媒的反應器，和於含有 在反應器加以處理的氟與碳、硫磺、氮之一的化合物之氣 流，添加水蒸氣之水添加器，和爲了將塡充於反應器之觸 媒及導入於反應器之含氟化合物氣流之至少一方，加熱至 氟化合物可加水分解之溫度的加熱手段之含氟化合物之分 解處理裝置，係必須要有加熱含氟化合物氣體的預熱器。 因此，能量效率變差，裝置的容量變大。並且，在預熱器 的外部附近，含氟化合物氣體的溫度高1但隨著離開於外 壁而溫度下降之故，有著產生反應不勻之問題。 更且，對於具有外管，和內管’和設置於內管內部之 觸媒層，和安裝於外管之加熱器之含氟化合物氣體的處理 裝置，係因未充分進行含氟化合物氣體的預熱之故’同樣 地處理裝置內部的溫度分布乃不易成爲相同。因此’有著 產生反應不勻之問題。 -6- 201111030 有鑑於上述課題，本發明之目的係提供容易作爲小型 化，另外更均一化內部之溫度分布而不易使反應不勻產生 之反應裝置者。 又，其他目的係提供可以高效率處理被處理氣體之反 應方法者。 [爲解決課題之手段] 本發明之反應裝置係具備在內部進行反應之外筒，和 配置於外筒的一方之端部側，在被處理氣體與處理完成氣 體之間進行熱交換之主熱交換部，和供給被處理氣體於主 熱交換部的管，和從主熱交換部取出處理完成氣體的管， 和連接於主熱交換部，配置於外筒的內部，從配置有主熱 交換部之端部側朝向間隔之外筒的另一方之端部側，流通 被處理氣體之內筒者爲特徵。 在此，被處理氣體係其特徵乃含有氟化合物者爲佳， 而反應乃將氟化合物，經由選自銅（Cu )、錫（Sn )、 鉻（Cr )、鉬（Mo )、鎢（W ) '釩（V )所成的群之金 屬之化合物的至少一種，含有氧化鋁及鹼土類金屬化合物 之反應劑進行分解者爲佳。更且，反應係在外筒與內筒之 間進行者爲佳》 更且，本發明之反應裝置係具備在內部的反應範圍進 行反應之外筒，和流通被處理氣體及處理完成氣體，在被 處理氣體與處理完成氣體之間進行第1之熱交換的二重管 ，和連接於二重管，在被處理氣體與處理完成氣體之間進 201111030 行第2之熱交換的熱交換器，和連接於熱交換器，配置於 外筒的內部，在被處理氣體與反應範圍之間進行第3之熱 交換的內筒者爲特徵。 在此，更具備配置於內筒的內部及外筒的外部之加熱 器者爲佳，而更具備安裝於內筒的外側之散熱片者更佳， 散熱片乃安裝於反應範圍之下側一半的位置者更佳。 又，本發明之反應方法係流通被處理氣體及處理完成 氣體於二重管，在被處理氣體與處理完成氣體之間進行第 1之熱交換，流通被處理氣體及處理完成氣體於連接於二 重管之熱交換器，在被處理氣體與處理完成氣體之間進行 第2之熱交換，流通被處理氣體於連接於熱交換器之內筒 ，在被處理氣體與反應範圍之間進行第3之熱交換，在反 應範圍，進行將被處理氣體做成處理完成氣體之反應者爲 特徵。 在此，被處理氣體乃含有氟化合物之氣體，反應係分 解氟化合物者爲佳。 [發明之效果] 如根據本發明，可提供容易作爲小型化，另外反應不 勻不易產生之反應裝置等。 【實施方式】 以下，參照附加圖面，對於本發明之實施形態加以詳 細說明》 -8 - 201111030 圖1乃說明適用本實施形態之反應裝置之一例的圖。 圖1所示之反應裝置10係具備在內部進行反應之外 筒12，和流通被處理氣體及處理完成氣體之二重管14’ 和連接於二重管14而配置於外筒12之一方之端部側，作 爲在被處理氣體與處理完成氣體之間進行熱交換之主熱交 換部之熱交換器16，和連接於作爲主熱交換部之熱交換 器16而配置於外筒12內部，從配置有熱交換器16之端 部側朝向間隔之外筒1 2的另一方之端部側，流通被處理 氣體之內筒18。 另外，更具備：作爲配置於內筒18的內部而更加熱 被處理氣體之同時，爲了供給對於反應所必要的熱於外筒 內部之反應範圍之加熱器的內部加熱器20，和作爲配置 於外筒1 2的外部，.同樣地爲了供給對於反應所必要的熱 於外筒內部之反應範圍之加熱器的外部加熱器22，和安 裝於內筒1 8的外側，爲了均一地將來自內部加熱器2 0的 熱傳熱至反應範圍之散熱片24，和爲了測定溫度，經由 未圖示之控制裝置，進行反應裝置1 0內部之溫度控制的 熱電偶等所成之溫度感應器26a、26b、26c，爲了塡充反 應劑之反應劑投入口 2 8。 外筒12乃反應容器，可在內部進行特定的反應者。 在本實施形態中，作爲被處理氣體，流通含氟化合物之氣 體於外筒1 2的內部。並且，塡充反應劑於外筒〗2與內筒 1 8之間’經由其反應劑，進行分解其氟化合物之反應。 作爲氟化合物，例如符合有氟氯碳化物類（以下，略 -9 - 201111030 稱爲「C F C」 氮氯氟烴類（以下，略稱爲「HCFC」 涯 f ίγ —一 工胡、Μ卜，嵴稱爲「HCFC」 ’全氣碳化物類（以下，略趟Q「DUr 、 喂稱爲「PFC」），氫氟碳_ 爲HFC」）’全氟***類（以下，略稱爲 (以下，略稱爲 工；觸 卜，略稱；1 ’氣氟醚類（以下，略稱爲「_」），氣^ 「PFE」 硫磺等 當更詳述時，作爲CFC係例如可舉出CC1F3、cci2F2 、cci3f、c2ci3f3、c2ci2f4、c2C1F5 等之化合物、作爲 HCFC係例如可舉出CHC1F2、C2HC12F3等之化合物。作 爲PFC係例如可舉出CF4、C2f6' C3F8、c4F8(八氟環丁 院）等之化合物、作爲HFC係例如可舉出CH3F、CH2F2、 CHF3 ' (^HzF4等之化合物。另外，作爲pFE係例如可舉 出CF3OCF3、CF3OCF2CF3等之化合物、作爲HFE係例如 可舉出 CHF2OCHF2' CHF2OCH2CF3、CH3OCF2CF3 等之化 合物。另外，氟化硫磺例如可舉出sf6、S2F】〇等之化合 物。 此等氟化合物係亦可爲單獨或2種以上之混合物。另 外，氟化合物係將氦、氬、氮等之非活性氣體，或空氣作 爲載氣加以稀釋者爲佳。在本實施形態中，被處理氣體中 的氟化合物的濃度乃O.Olvol%〜lOvol%者爲佳。 作爲反應劑乃使用選自銅（Cu )、錫（Sn )、鉻（ Cr )、鉬（Mo )、鎢（W )、釩（V )所成的群之金屬之 化合物的至少一種，具有氧化鋁及鹼土類金屬化合物者爲 佳。 其中，氧化鋁係代表性之酸性物質（固體酸）’即使 -10- 201111030 其單獨亦可分解氟化合物。但’經由分解而 氟化氧化鋁表面，作爲A1F3加以毒化，觸 時間失去活性。 因此，在本實施形態中，含有驗土類金 此，以較以往爲低的反應溫度可分解氟化合 氟素亦可作爲鹼土類金屬氟化物而固定化。 詳細加以說明。 首先，在本實施形態之氟化合物的分解 可由以下式而表示。 [化1][Technical Field] The present invention relates to, for example, a reaction apparatus or the like used for decomposing a fluorine compound. [Prior Art] In the current manufacturing process of a semiconductor device, etching or cleaning is performed in order to form a fine pattern. At this time, there are many cases where a fluorine compound is used. Further, the 'fluorine compound is generally stable, and is not harmful to the human body. For others, it is also used, for example, as a refrigerant for cold air, but is released to the atmosphere among such fluorine compounds. At the time, there will be many big impacts on the global environment. That is, destroying the ozone layer of the stratosphere is the cause of the ozone layer void. In addition, as a warming gas, it also causes global warming. Further, as described above, the fluorine compound is generally stable, and the effect thereof is long during a long period of time. Therefore, in order not to affect the global environment, it is necessary to decompose the fluorine compound used, and it is released to the atmosphere in a harmless state in the global environment. Here, for example, Patent Document 1 discloses a reactor including a catalyst containing A1, and a gas stream containing a compound of fluorine, carbon, sulfur, and nitrogen which are treated in a reactor, and added. a water vapor water adder, and a fluorine-containing compound heated to at least one of the catalyst for charging the reactor and the fluorochemical gas stream of the 201111030 introduced into the reactor to a temperature at which the fluorine compound can be hydrolyzed. Decomposition processing device. Further, in Patent Document 2, there is disclosed a treatment apparatus having an outer tube, an inner tube and a catalyst layer provided inside the inner tube, and a fluorine-containing compound gas attached to the heater of the outer tube. [Patent Document 1 [Patent Document 2] Japanese Laid-Open Patent Publication No. 2008-126092 [Patent Document] [Problems to be Solved by the Invention] However, a reactor containing a catalyst containing A1 is provided, and a gas stream containing a compound of fluorine and carbon, sulfur, and nitrogen, which is treated in a reactor, a water adder for adding water vapor, and a fluorochemical compound for introducing the catalyst to the reactor and introducing the catalyst into the reactor. At least one of the gas streams is heated to a temperature at which the fluorine compound can be hydrolyzed, and the fluorochemical decomposition treatment device is required to have a preheater for heating the fluorine-containing compound gas. Therefore, the energy efficiency is deteriorated, and the capacity of the device becomes large. Further, in the vicinity of the outside of the preheater, the temperature of the fluorine-containing compound gas is high by one, but the temperature is lowered as it leaves the outer wall, which causes a problem of uneven reaction. Furthermore, the treatment apparatus for the fluorine-containing compound gas having the outer tube, the inner tube 'and the catalyst layer disposed inside the inner tube, and the heater attached to the outer tube is insufficiently subjected to the fluorine-containing compound gas. The reason for the preheating is that the temperature distribution inside the processing device is not easily the same. Therefore, there is a problem of uneven reaction. -6- 201111030 In view of the above problems, an object of the present invention is to provide a reaction apparatus which is easy to be miniaturized and which has a more uniform internal temperature distribution and which is less likely to cause uneven reaction. Further, other objects are to provide a reaction method capable of efficiently processing a gas to be treated. [Means for Solving the Problem] The reaction apparatus of the present invention includes a cylinder that performs reaction inside, and a main heat that is disposed on one end side of the outer cylinder and exchanges heat between the gas to be treated and the process-completed gas. The exchange unit and the tube for supplying the gas to be treated to the main heat exchange unit, and the tube for taking out the process gas from the main heat exchange unit, and the main heat exchange unit, and disposed inside the outer tube, and having a main heat exchange The end portion side of the portion is directed toward the other end portion side of the outer cylinder, and the inner cylinder through which the gas to be processed flows is characterized. Here, the gas to be treated is preferably characterized by containing a fluorine compound, and the reaction is carried out by selecting a fluorine compound from copper (Cu), tin (Sn), chromium (Cr), molybdenum (Mo), tungsten (W). It is preferred that at least one of the metals of the group of vanadium (V) is decomposed by a reactant containing alumina and an alkaline earth metal compound. Furthermore, it is preferable that the reaction is carried out between the outer cylinder and the inner cylinder. Further, the reaction apparatus of the present invention is provided with a reaction cylinder outside the reaction range, and a gas to be treated and a process gas to be processed. a double pipe for performing the first heat exchange between the process gas and the process completion gas, and a heat exchanger connected to the double pipe and entering the second heat exchange between the process gas and the process completion gas into 201111030, and It is characterized in that it is connected to the heat exchanger and disposed inside the outer cylinder, and is an inner cylinder that performs the third heat exchange between the gas to be treated and the reaction range. Here, it is preferable to provide a heater disposed outside the inner cylinder and the outer cylinder of the inner cylinder, and it is more preferable to have a heat sink attached to the outer side of the inner cylinder, and the heat sink is mounted on the lower side of the reaction range. The location is better. Further, in the reaction method of the present invention, the gas to be treated and the gas to be treated are distributed in the double pipe, and the first heat exchange is performed between the gas to be treated and the gas to be treated, and the gas to be treated and the gas to be processed are connected to the second. The heat exchanger of the heavy pipe performs the second heat exchange between the gas to be treated and the gas to be treated, and distributes the gas to be treated to the inner cylinder connected to the heat exchanger, and performs the third between the gas to be treated and the reaction range. The heat exchange is characterized by performing a reaction of the gas to be treated to complete the gas in the reaction range. Here, the gas to be treated is a gas containing a fluorine compound, and the reaction system is preferably a fluorine compound. [Effects of the Invention] According to the present invention, it is possible to provide a reaction apparatus which is easy to be miniaturized and which is less likely to cause a reaction unevenness. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. -8 - 201111030 FIG. 1 is a view showing an example of a reaction apparatus to which the present embodiment is applied. The reaction apparatus 10 shown in Fig. 1 includes a reaction tube 12 that is internally reacted, a double tube 14' that distributes a gas to be treated and a process gas, and a double tube 14 that is connected to the double tube 14 and disposed in one of the outer tubes 12. The end portion side is disposed in the heat exchanger 16 of the main heat exchange unit that exchanges heat between the gas to be treated and the process-completed gas, and is connected to the heat exchanger 16 as the main heat exchange unit, and is disposed inside the outer tube 12. The inner cylinder 18 of the gas to be treated flows from the end side where the heat exchanger 16 is disposed toward the other end side of the outer cylinder 1 . In addition, the internal heater 20 is provided as a heater that is disposed inside the inner cylinder 18 and that heats the gas to be treated, and supplies a heater that is heated to the reaction range inside the outer cylinder necessary for the reaction. The outside of the outer cylinder 12 is similarly provided for supplying the external heater 22 of the heater which is heated to the reaction range inside the outer cylinder necessary for the reaction, and to the outer side of the inner cylinder 18, in order to uniformly apply from the inside. The heat sink 24 that heats the heat of the heater 20 to the reaction range, and the temperature sensor 26a formed by a thermocouple or the like that performs temperature control inside the reaction device 10 via a control device (not shown) for measuring the temperature, 26b, 26c, in order to fill the reactant input port of the reagent. The outer cylinder 12 is a reaction vessel and can perform a specific reaction inside. In the present embodiment, a gas containing a fluorine-containing compound is supplied to the inside of the outer cylinder 1 as a gas to be treated. Further, the hydrazine reactant is reacted between the outer cylinder _2 and the inner cylinder 18 via its reactant to decompose the fluorine compound. As a fluorine compound, for example, it is compatible with a chlorofluorocarbon (hereinafter, -9 - 201111030 is called "CFC" chlorofluorocarbon (hereinafter, abbreviated as "HCFC" 涯f ίγ - Yigonghu, Μ卜, Nicknamed "HCFC" 'All gas carbides (hereinafter, abbreviated as Q "DUr, fed as "PFC"), hydrofluorocarbon _ is HFC") perfluoroethyl ether (hereinafter, abbreviated (below) , abbreviated as work; touch, abbreviated; 1 'frofluoroethers (hereinafter, abbreviated as "_"), gas ^ "PFE" sulfur, etc., when more detailed, as a CFC system, for example, CC1F3 Examples of the compounds such as cci2F2, cci3f, c2ci3f3, c2ci2f4, and c2C1F5, and examples of the HCFC system include compounds such as CHC1F2 and C2HC12F3. Examples of the PFC system include CF4, C2f6' C3F8, and c4F8 (octafluorocyclobutyl). Examples of the HFC-based compound include CH3F, CH2F2, and CHF3' (a compound such as HzF4). Examples of the pFE-based compound include CF3OCF3 and CF3OCF2CF3, and examples of the HFE-based compound include CHF2OCHF2'CHF2OCH2CF3. a compound such as CH3OCF2CF3. In addition, sulfur fluoride can be mentioned, for example. Sf6, S2F, etc. Compounds such as ruthenium or the like may be used alone or in combination of two or more. The fluorine compound is diluted with an inert gas such as helium, argon or nitrogen, or air as a carrier gas. In the present embodiment, the concentration of the fluorine compound in the gas to be treated is preferably from 0.01% to 10% by volume. The reactant is selected from the group consisting of copper (Cu), tin (Sn), and chromium (Cr). At least one of the metals of the group of molybdenum (Mo), tungsten (W), and vanadium (V) is preferably one having alumina and an alkaline earth metal compound. Among them, alumina is a representative acidic substance. (Solid acid) 'Even at -10 201111030, it can decompose a fluorine compound alone. However, 'the surface of the alumina is fluorinated by decomposition, and it is poisoned as A1F3, and it loses its activity in time. Therefore, in the present embodiment, the soil is contained. In the case of the gold-like reaction, the fluorinated fluorinated fluorine can be decomposed or reduced as an alkaline earth metal fluoride. The decomposition of the fluorine compound in the present embodiment can be as follows. And FIG. [Chemical Formula 1]
CF4 + 2CaCO3/Al203-»2CaF2 + 3CO C2F6 + 3CaC03/Al203 — 3 CaF2 + 4C02 + C0 在此的反應溫度係經由含於被處理氣體 之種類而有所不同。例如，P F C係在氟化合 難分解性的化合物，其中，CF4、C2F6等乃 對於單以熱分解進行分解係需要1 200 °C〜 ，但如根據本實施形態的方法，如爲5 5 0 °C 。另外，HCFC之CHC1F2係如根據本實施 如爲200 °C以上的溫度即可分解。如此，經 種類，其分解溫度係有相當幅度的差異，經 種類，設定反應器爲最佳溫度者爲重要》 作爲鹼土類金屬化合物，可使用鹼土類 生成的氟素， 媒活性乃在短 屬化合物。由 物，所生成之 以下，對此更 反應係例如， …⑴ 中的氟化合物 物之中分類成 最難分解性， 1 4 0 0 °C的高溫 以上即可分解 形態的方法， 由氟化合物的 由其化合物的 金屬之碳酸鹽 -11 - 201111030 ，氫氧化物或氧化物。其中，鎂（M g )、鈣（C a )、緦 (Sr)、鋇（Ba)之碳酸鹽尤佳，而鈣的碳酸鹽之碳酸鈣 (CaC03 )又更佳。對於反應劑使用碳酸鈣之情況，經由 與氧化鋁共存之時，可將氟化合物產生分解而生成之氟素 ，作爲氟化鈣（CaF2)而固定者。因此，達成防止氧化鋁 之氟化的作用，可維持氧化鋁之氟化合物之分解機能（活 化）者。 另外，對於反應劑之成分之一的選自銅（Cu)、錫（ Sn)、鉻（Cr) '鉬（Mo)、鎢（W)、釩（V)所成的 群之金屬之化合物，係有作爲分解氟化合物之促進劑的作 用。另外，經由氟化合物的種類，可將以如在上述（2 ) 式所例式之反應分解而生成之一氧化碳，即使在低氧分壓 下，氧化至二氧化碳者》 在上述化合物中，使用氧化銅（CuO )、氧化錫（ Sn02 )、氧化釩（V205 )等之氧化物者爲佳，而使用氧 化銅、氧化錫者尤佳。 在本實施形態中，氧化鋁與鹼土類金屬化合物之含有 量係在質量比，爲1:9〜1:1者爲佳。另外，金屬之化 合物的含有量係在氧化鋁與鹼土類金屬化合物合計質量的 比，爲1 : 99〜5 : 95者爲佳》 在本實施形態中’將其反應劑，作爲粒徑爲0.5mm〜 1 0mm的粒狀品，塡充於產生在外筒12的內側與內筒is 的外側之間的空間。作爲塡充量，係對於其空間全體而言 ’做成呈8 0 %〜9 0 %之商度者爲佳。並且，塡充其反應劑 -12- 201111030 之部分乃成爲進行反應之反應範圍。 作爲使用於外筒1 2之材料，係如爲對於反應時之反 應溫度或反應生成物有耐性之構成，並無特別加以限定， 但經由不鏽鋼等而製作者爲佳。另外，作爲外筒1 2的形 狀，並無特別加以限定，但爲圓柱形狀，內徑爲100mm 〜2m者乃從內部的溫度均一性之觀點和強度的觀點爲佳 〇 二重管14係由內側的管之內管14a與外側的管之外 管14b所成。並且，在流通被處理氣體於內管14a或外管 14b任一的管，由另一方的管，流通處理完成氣體之同時 ，通過內側的管，在被處理氣體與處理完成氣體之間進行 第1之熱交換。此情況，被處理氣體與處理完成氣體係對 向流通之故，二重管14係亦可作爲對向流式之二重管式 熱交換器而作用者。被處理氣體係亦可通過內管14a及外 管14b之任一方，但從此熱交換的效率性觀點，通過內管 1 4a者爲佳。即，當通過外管1 4b時，外管1 4b係接觸於 大氣之故，於大氣中引起放熱。因此，被處理氣體係通過 不易產生放熱之內管14a者爲佳。另外，處理完成氣體係 盡可能作爲接近於室溫而釋放者爲佳。因而，從此觀點， 將被處理氣體通過內管14a，而將處理完成氣體通過外管 14b者爲佳。也就是，處理完成氣體的熱可通過外管14b 而進行放熱之故，可降低處理完成氣體之溫度。 作爲主熱交換部的熱交換器係配置於外筒12之一 方的端部側。並且，連接於二重管1 4，例如經由內管1 4a -13- 201111030 而供給被處理氣體於熱交換器16，經由外管14b而從熱 交換器16取出處理完成氣體。另外，在熱交換器16中， 在被處理氣體與處理完成氣體之間進行第2熱交換。 在本實施形態中，對於外筒1 2與內筒1 8使用圓柱形 狀之構成情況，熱交換器16係重疊環狀不鏽鋼所成的板 而進行焊接，做成被處理氣體與處理完成氣體通過個別的 路徑而進行流通。並且，被處理氣體與處理完成氣體係可 在曲折對向之形式流通在熱交換器16內部，通過環狀的 板進行熱交換者。如此，由將流路做成曲折狀者，可以小 容量交換多量的熱。在本實施形態中，被處理氣體及處理 完成氣體係在進行熱交換的部分，呈各往返2.5其曲折的 路徑地構成。其曲折的路徑乃各往返1.5以上者爲佳。較 此少時，熱交換產生不足而有本裝置出口的排氣溫度變高 之傾向。 然而，處理完成氣體係通過複數開孔於反應範圍之熱 交換器1 6側的小口徑的孔3 0，可侵入至熱交換器1 6內 部者。另外，穿過熱交換器16之被處理氣體係通過開孔 於內筒18側面之複數的孔32，可侵入至內筒18內者。 然而，熱交換器16係不限於如此之構造，可使用螺 旋式熱交換器，板式熱交換器，多重圓管式熱交換器等之 種種熱交換器。 內筒18係配置於外筒12之內部。並且，連接於熱交 換器1 6 ’從配置有熱交換器1 6之端部側朝向於間隔之外 筒12的另一方之端部，流通被處理氣體。被處理氣體係 •14- 201111030 於通過其內筒18時，通過內筒18，在和反應範圍之間進 行第3之熱交換》由此，可更加熱被處理氣體。內筒18 係在本實施形態中，由1支加以構成，但亦可爲2支以上 。另外，對於內筒1 8的位置，如本實施形態，由1支加 以構成之情況，設置於外筒1 2之中心部者爲佳。 另外，在本實施形態中，內筒18係於內部具有內部 加熱器20»其內部加熱器20係在更加熱被處理氣體之同 時，供給對於反應所必要的熱於外筒內部之反應範圍。另 外，對於內筒1 8之外側，安裝有散熱片24。在內部加熱 器20所產生的熱係通過內筒18及其散熱片24而傳熱至 反應範圍。另外，經由具備其散熱片24之時，可均一地 將在內部加熱器20所產生的熱傳熱至反應範圍。在此， 將配置有熱交換器1 6的側作爲下側而使用本實施形態之 反應裝置1〇之情況，散熱片24係安裝於反應範圍之下側 一半的位置，對於上側一半係不安裝爲佳。即，反應範圍 之上部係經由對流，溫度容易上升，而於其部分當安裝散 熱片24時，較下側，上側的溫度則容易變高。因此，由 於安裝於下側一半的位置者，可更均一化反應範圍之上部 與下部的溫度分布。 另外，散熱片24係安裝複數片爲佳。 圖2乃圖1所示之反應裝置10之II-II剖面圖。 在圖2所示之反應裝置10中，散熱片24係安裝有 1 8片於內筒1 8之外側。如此，經由安裝複數片之時，可 更均一化反應範圍之溫度分布。在此，散熱片24的片數 -15- 201111030 或長度係可經由反應裝置1 〇之反應條件而做適宜選擇。 作爲使用於內筒18及散熱片24之材料，係如爲對於 反應時產生之反應熱或反應生成物有耐性之構成，並無特 別加以限定，但經由不鏽鋼等而製作者爲佳》另外，作爲 內筒1 8的形狀，並無特別加以限定，但圓柱形狀乃從內 部的溫度均一性之觀點爲佳。 另外，對於內部加熱器20，係例如可使用英高鎳（ 登錄商標）之加熱器。並且，例如使用3支其英高鎳（登 錄商標）加熱器，可進行三角連結而收容於內筒18的內 部。 另外，在本實施形態中，於外筒1 2之外側具有外部 加熱器22。經由具備其外部加熱器之時，亦可從外部供 給對於反應範圍之反應所必要的熱。在外部加熱器22所 產生的熱係通過外筒12而傳熱至反應範圍。並且，經由 具備外部加熱器22與內部加熱器20雙方之時，成爲可從 反應範圍之外側與內側的雙方進行加熱者。因此，更可均 一化反應範圍之溫度分布》 另外，對於外部加熱器22，係例如可使用英高鎳（ 登錄商標）之加熱器。並且，從均一地供給熱之觀點，將 其英高鎳（登錄商標）加熱器設置於外筒12之周圍者爲佳 〇 另外，爲了在維護等時，容易分離本實施形態之反應 裝置與控制裝置，例如以金屬插座連接加熱器及/或溫度 感應器與控制裝置爲佳。 -16- 201111030 另外，又，防止對於大氣中之放熱， 行對於反應範圍之加熱，以保溫材（未 1 2者爲佳。作爲保溫劑，例如可使用由 矽織布等材料加以構成者。 在如以上之構成的反應裝置10中， 之氟化合物之氣體係首先，流通在二重管 。此時，在被處理氣體與處理完成氣體之 交換。接著，進入至連接於二重管14之| 流通在熱交換器16之內部，再次在與處 進行第2之熱交換。並且，進入至連接於 內筒18內。被處理氣體係於流通在內筒 應範圍之間進行第3之熱交換的同時， 2 〇加以加熱。穿過內筒1 8之後係進入至 處理劑而分解含於被處理氣體之氟化合物 被處理氣體係成爲處理完成氣體。處理完 通在熱交換器16、二重管14之外管14b 理氣體之間進行上述之第2之熱交換、第 且，穿過二重管1 4之後係加以釋放至大穿 如此之反應係亦可作爲流通被處理氣 體於二重管14，在被處理氣體與處理完 第1之熱交換，流通被處理氣體及處理完 二重管14之熱交換器16，在被處理氣體 之間進行第2之熱交換，流通被處理氣體 器16之內筒18，在被處理氣體與反應範 爲了更有效率進 圖示）被覆外筒 玻璃纖維織布， 含有被處理氣體 14之內管14a 間進行第1之熱 热交換器1 6內， 理完成氣體之間 ^熱交換器16之 18內時，在與反 經由內部加熱器 反應範圍，經由 。經由此反應， 成氣體係這次流 同時，在與被處 1之熱交換。並 I中。 體及處理完成氣 成氣體之間進行 成氣體於連接於 與處理完成氣體 於連接於熱交換 圍之間進行第3 -17- 201111030 之熱交換，在反應範圍，進行將被處理氣體做成處理完成 氣體之反應者爲特徵之反應方法而理解。 本實施形態之反應裝置1 〇係可一體化外筒1 2與熱交 換器16者。另外，將爲了導入被處理氣體及處理完成氣 體於熱交換器16的配管，作爲二重管14。經由此等之構 造，成爲容易進行反應裝置1 0之小型化。 更且，經由進行藉由二重管14之第1之熱交換，藉 由熱交換器16之第2之熱交換，藉由內筒18之第3之熱 交換的3階段熱交換之時，充分預熱被處理氣體，至到達 至反應範圍爲止成爲充分之高溫。因此，在反應範圍之溫 度分布乃容易均一化。因此，不易產生反應不勻。另外， 在反應範圍之溫度分布乃非均一之情況，有在溫度高的部 份之反應劑的消耗變爲急遽之情況。因此，在其部分反應 劑之壽命到達時，必須更換所有的反應劑，並不經濟。在 本實施形態之反應裝置10中，因在反應範圍之溫度分布 容易均一化之故，不只不易產生反應不勻，而反應劑之消 耗係容易成爲相同，可延長反應劑的壽命。 另外，又，由進行藉由內筒18之第3之熱交換及藉 由內部加熱器20之加熱者，可縮小熱交換器16之容積》 因此，可得到大的外筒12與內筒18之空間，可塡充更多 反應劑。因此，可以更高的效率引起反應，並且，可處理 更多的被處理氣體。 外筒12與內筒18之間的空間容積，也就是外筒內部 之反應範圍係從內部溫度之均一性的觀點與強度的觀點， • 18 - 201111030 爲2公升〜3000公升者爲佳。另外，特別是爲2公升〜 200公升者爲佳。此情況，安裝腳輪等者變爲容易，在反 應裝置1〇之交換作業時而爲有利。並且，從內部溫度之 均一性及反應效率之觀點，40公升〜200公升者爲尤佳。 另外，由具有上述之構造者，可使用反應溫度作爲 200 °C〜1000 °C之反應裝置，且可將反應裝置出口的氣體 溫度作爲2 0 0 °C以下者。 然而，在本實施形態中，作爲被處理氣體，可舉出含 氟化合物之氣體，對於分解此氟化合物之反應已進行過說 明’但並不限於此。作爲被處理氣體，如使用氟化合物以 外之氣體，將反應劑變更成適合於其氣體反應者，可適用 本實施之反應裝置10。 例如，因分解去除含於從半導體製造裝置之淨化氣體 線路，或從手術室所排出之剩餘麻醉氣體中之一氧化二氮 之故，可使用於作爲反應劑而使用固體觸媒之反應等。 [實施例] 作爲反應裝置，使用圖I及圖2所示之反應裝置10 。作爲反應劑，使用將氧化鋁與碳酸鈣，以質量比作爲3 :7’將氧化錫’對於氧化鋁與碳酸鈣之合計重量而言作 爲3質量％者。另外，作爲被處理氣體，將氟化物氣體之 CF4’以6000volppm的濃度，250L/min的流量，流通於 反應裝置1 0內。然而，作爲載氣係使用氮氣。 其結果’處理完成氣體之CF4的濃度係成爲Oppm， -19- 201111030 確認到可分解CF4»另外’在此時，進行反應裝置10之 外部與內部之溫度分布的測定。 圖3乃說明反應裝置10之溫度分布的圖。 圖3中，橫軸爲顯示溫度，縱軸顯示反應範圍之高度 方向位置》並且，顯示在各場所之外部溫度與內部溫度。 在此，外部溫度係由依序變更溫度感應器26c (參照圖1 )之高度方向位置而加以測定之溫度。另外，內部溫度係 由依序變更溫度感應器26b (參照圖1)之高度方向位置 而加以測定之溫度》 從圖3 了解到，內部溫度及外部溫度係對於反應範圍 之高度方向位置而言’收在550 °C〜580 °C之範圍內大約 30 °C以內之溫度差，並了解到可實現在反應範圍之均一的 溫度分布。 【圖式簡單說明】 圖1乃說明適用本實施形態之反應裝置之一例的圖》 圖2乃圖1所示之反應裝置之II-II剖面圖^ 圖3乃說明反應裝置之溫度分布的圖。 【主要元件符號說明】 1 〇 :反應裝置 12 :外筒 14 :二重管 1 6 :熱交換器 -20- 201111030 1 8 :內筒 2 0 :內部加熱器 2 2 :外部加熱器 24 :散熱器CF4 + 2CaCO3/Al203-»2CaF2 + 3CO C2F6 + 3CaC03/Al203 - 3 CaF2 + 4C02 + C0 The reaction temperature here differs depending on the kind of gas to be treated. For example, PFC is a compound which is difficult to decompose by fluorination, and CF4, C2F6, etc. require 1 200 ° C to decompose the system by thermal decomposition alone, but as in the method according to the present embodiment, for example, 5 50 ° C. Further, CHC1F2 of HCFC can be decomposed by a temperature of 200 ° C or higher according to the present embodiment. Thus, the type of decomposition has a considerable difference in the decomposition temperature, and it is important to set the reactor to the optimum temperature by type. As an alkaline earth metal compound, fluorin which is formed by alkaline earth can be used, and the activity is short. Compound. In the case of the following, the reaction is further classified into, for example, a method in which the fluorine compound in (1) is classified into the most difficult to be decomposed, and a method in which the high temperature is higher than 1 to 40 ° C to decompose the form, and the fluorine compound is used. From its compound of metal carbonate-11 - 201111030, hydroxide or oxide. Among them, magnesium (M g ), calcium (C a ), strontium (Sr), and barium (Ba) carbonates are particularly preferred, and calcium carbonate calcium carbonate (CaC03) is more preferred. When calcium carbonate is used as the reactant, when it is coexisted with alumina, the fluorine compound which is decomposed by the fluorine compound can be produced and fixed as calcium fluoride (CaF2). Therefore, the effect of preventing the fluorination of alumina can be maintained, and the decomposition function (activation) of the fluorine compound of alumina can be maintained. Further, a compound selected from the group consisting of copper (Cu), tin (Sn), chromium (Cr) 'molybdenum (Mo), tungsten (W), and vanadium (V) as one of the components of the reactant, It has a function as a promoter for decomposing a fluorine compound. Further, the type of the fluorine compound can be decomposed by the reaction of the formula (2) to form a carbon monoxide, which is oxidized to carbon dioxide even under a low oxygen partial pressure. In the above compound, copper oxide is used. It is preferable to use an oxide such as (CuO), tin oxide (Sn02) or vanadium oxide (V205), and it is particularly preferable to use copper oxide or tin oxide. In the present embodiment, the content of the alumina and the alkaline earth metal compound is preferably in a mass ratio of from 1:9 to 1:1. Further, the content of the metal compound is a ratio of the total mass of the alumina to the alkaline earth metal compound, and is preferably 1:99 to 5:95. In the present embodiment, the reactant is referred to as a particle diameter of 0.5. A granular product of mm to 10 mm is filled in a space between the inner side of the outer cylinder 12 and the outer side of the inner cylinder is. As the charge amount, it is preferable to make a trade amount of 80% to 90% for the entire space. Moreover, the part of the reagent -12-201111030 is the reaction range for carrying out the reaction. The material used for the outer cylinder 12 is not particularly limited as long as it is a reaction temperature or a reaction product during the reaction, but it is preferably produced by stainless steel or the like. Further, the shape of the outer cylinder 12 is not particularly limited, but is a cylindrical shape, and the inner diameter is 100 mm to 2 m. From the viewpoint of internal temperature uniformity and strength, the good double pipe 14 is The inner tube 14a of the inner tube and the outer tube 14b of the outer tube are formed. Further, the tube through which the gas to be treated flows in either the inner tube 14a or the outer tube 14b is flown through the other tube, and the gas is passed through the inner tube to pass between the gas to be treated and the gas to be treated. 1 heat exchange. In this case, the double pipe 14 can also function as a counterflow double pipe heat exchanger in the case where the gas to be treated and the process completion gas system are opposed to each other. The gas to be treated may pass through either the inner tube 14a or the outer tube 14b. However, from the viewpoint of efficiency of heat exchange, it is preferable to pass the inner tube 14a. That is, when passing through the outer tube 14b, the outer tube 14b is in contact with the atmosphere, causing an exotherm in the atmosphere. Therefore, it is preferable that the gas system to be treated passes through the inner tube 14a which is less likely to generate heat. In addition, it is preferred that the treated gas system be released as close to room temperature as possible. Therefore, from this point of view, it is preferable that the gas to be treated passes through the inner tube 14a, and the gas through which the treatment is completed passes through the outer tube 14b. That is, the heat of the process completion gas can be exothermic through the outer tube 14b, and the temperature of the process completion gas can be lowered. The heat exchanger as the main heat exchange unit is disposed on one end side of the outer cylinder 12. Further, the double pipe 14 is connected to the heat exchanger 16 via the inner pipe 14a - 13 - 201111030, and the process completion gas is taken out from the heat exchanger 16 via the outer pipe 14b. Further, in the heat exchanger 16, the second heat exchange is performed between the gas to be treated and the process-completed gas. In the present embodiment, a cylindrical shape is used for the outer cylinder 1 2 and the inner cylinder 18, and the heat exchanger 16 is welded by laminating a plate made of a ring-shaped stainless steel to form a gas to be treated and a process-finished gas. Circulate through individual routes. Further, the gas to be treated and the process-completed gas system can flow in the form of a meandering direction in the heat exchanger 16 and exchange heat through the annular plate. Thus, by making the flow path into a meandering shape, a large amount of heat can be exchanged in a small capacity. In the present embodiment, the portion to be subjected to heat exchange between the gas to be treated and the gas to be treated is formed in a path of 2.5 turns. The tortuous path is preferably 1.5 or more round trips. When the amount is less, the heat exchange is insufficient and the temperature of the exhaust gas at the outlet of the device tends to increase. However, the treatment completion gas system can invade to the inside of the heat exchanger 16 by a plurality of small-diameter holes 30 which are opened to the heat exchanger 16 side of the reaction range. Further, the gas system to be treated passing through the heat exchanger 16 can be intruded into the inner cylinder 18 by a plurality of holes 32 which are opened to the side of the inner cylinder 18. However, the heat exchanger 16 is not limited to such a configuration, and various heat exchangers such as a spiral heat exchanger, a plate heat exchanger, and a multiple round tube heat exchanger can be used. The inner cylinder 18 is disposed inside the outer cylinder 12. Further, the heat exchanger 16 is connected to the other end of the outer cylinder 12 from the end side where the heat exchanger 16 is disposed, and the gas to be treated is circulated. The gas to be treated system 14-201111030, when passing through the inner cylinder 18, through the inner cylinder 18, performs the third heat exchange between the reaction zone and the reaction range, whereby the gas to be treated can be heated more. In the present embodiment, the inner cylinder 18 is composed of one, but may be two or more. Further, as for the position of the inner cylinder 18, as in the case of the present embodiment, it is preferable that the position of the inner cylinder 18 is provided at the center of the outer cylinder 12. Further, in the present embodiment, the inner cylinder 18 has an internal heater 20» therein, and the internal heater 20 is supplied with a heat to be treated, and supplies a reaction range necessary for the reaction to the inside of the outer cylinder. Further, a heat sink 24 is attached to the outer side of the inner cylinder 18. The heat generated by the internal heater 20 is transferred to the reaction range through the inner cylinder 18 and its fins 24. Further, when the fins 24 are provided, the heat generated in the internal heater 20 can be uniformly transferred to the reaction range. Here, when the side of the heat exchanger 16 is disposed as the lower side and the reaction apparatus 1 of the present embodiment is used, the fins 24 are attached to the lower half of the reaction range, and are not mounted to the upper half. It is better. That is, the upper portion of the reaction range is convective, and the temperature is likely to rise. When the heat radiating sheet 24 is attached to the upper portion of the reaction range, the temperature on the upper side is likely to be higher than that on the lower side. Therefore, the temperature distribution of the upper portion and the lower portion of the reaction range can be more uniformed by the position mounted on the lower half. Further, it is preferable that the heat sink 24 is provided with a plurality of sheets. Figure 2 is a cross-sectional view taken along line II-II of the reaction apparatus 10 shown in Figure 1. In the reaction apparatus 10 shown in Fig. 2, the fins 24 are mounted with 18 pieces on the outer side of the inner tube 18. Thus, by installing a plurality of sheets, the temperature distribution of the reaction range can be more uniformized. Here, the number of fins -15 - 201111030 or the length of the fins 24 can be suitably selected via the reaction conditions of the reaction apparatus 1 . The material used for the inner tube 18 and the fins 24 is not particularly limited as long as it is resistant to heat of reaction or reaction product generated during the reaction, but it is preferably produced by stainless steel or the like. The shape of the inner cylinder 18 is not particularly limited, but the cylindrical shape is preferably from the viewpoint of internal temperature uniformity. Further, as the internal heater 20, for example, a heater of Inco High Nickel (registered trademark) can be used. Further, for example, three Inch high-nickel (registered trademark) heaters are used, and they can be connected to the inside of the inner cylinder 18 by a triangular connection. Further, in the present embodiment, the external heater 22 is provided on the outer side of the outer cylinder 1 2 . When it is provided with an external heater, it is also possible to supply heat necessary for the reaction in the reaction range from the outside. The heat generated in the external heater 22 is transferred to the reaction range through the outer cylinder 12. Further, when both the external heater 22 and the internal heater 20 are provided, it is possible to heat both the outer side and the inner side of the reaction range. Therefore, the temperature distribution of the reaction range can be more uniform. Further, for the external heater 22, for example, a heater of Inco Nickel (registered trademark) can be used. Further, from the viewpoint of uniformly supplying heat, it is preferable to provide the Inco high-nickel (registered trademark) heater around the outer cylinder 12, and it is easy to separate the reaction device and the control of the present embodiment in the case of maintenance or the like. Preferably, the device is connected to the heater and/or the temperature sensor and the control device, for example, with a metal socket. In addition, it is preferable to prevent the heat generation in the atmosphere from heating in the reaction range, and it is preferable to use a heat insulating material (for example, as a heat insulating agent, for example, a material such as a woven fabric can be used. In the reaction device 10 having the above configuration, the gas system of the fluorine compound first flows through the double pipe. At this time, the gas to be treated is exchanged with the process completion gas. Then, the gas is connected to the double pipe 14 The inside of the heat exchanger 16 is circulated, and the second heat exchange is performed again at the same place. The process is connected to the inner cylinder 18. The gas to be treated is circulated between the inner cylinder and the third cylinder. At the same time of exchange, 2 〇 is heated. After passing through the inner cylinder 18, it enters into the treatment agent to decompose the fluorine compound-containing gas system contained in the gas to be treated into a process-completed gas. The treatment is completed in the heat exchanger 16, two. The second tube is exchanged between the tubes 14b and the second tube 14b, and the second tube 14 is passed through the double tube to release the reaction system. Heavy pipe 14. The heat exchange between the gas to be treated and the first heat treatment, the flow of the gas to be treated, and the heat exchanger 16 in which the double pipe 14 is processed, and the second heat exchange between the gases to be processed, and the gas to be processed is distributed. The inner tube 16 of 16 is coated with the outer tube glass fiber woven fabric in order to process the gas and the reaction unit more efficiently, and the first heat exchanger 16 is placed between the inner tubes 14a containing the gas to be treated 14 When the gas is completed within the heat exchanger 16 of 18, the reaction range is passed through the internal heater. By this reaction, the gas-forming system is simultaneously flowed and exchanged with the heat of the site. And I. The gas is exchanged between the gas and the gas to be treated, and the gas is connected to the heat exchange chamber to be connected to the heat exchange chamber for heat exchange between 3-17 and 201111030, and the gas to be treated is treated in the reaction range. The completion of the gas reaction is understood by the characteristic reaction method. In the reaction apparatus 1 of the present embodiment, the outer cylinder 12 and the heat exchanger 16 can be integrated. Further, as a double pipe 14, a pipe for introducing the gas to be treated and the process gas to the heat exchanger 16 is introduced. By such a configuration, it is easy to reduce the size of the reaction apparatus 10 . Further, by performing the first heat exchange by the double pipe 14, the third heat exchange by the heat exchanger 16, and the third heat exchange by the third heat exchange of the inner cylinder 18, The gas to be treated is sufficiently preheated to a sufficient high temperature until it reaches the reaction range. Therefore, the temperature distribution in the reaction range is easily uniformized. Therefore, it is difficult to cause uneven reaction. Further, in the case where the temperature distribution in the reaction range is not uniform, there is a case where the consumption of the reactant in the portion having a high temperature becomes impatient. Therefore, it is not economical to replace all of the reactants when the life of some of the reactants arrives. In the reaction apparatus 10 of the present embodiment, since the temperature distribution in the reaction range is easily uniformized, not only the reaction unevenness is unlikely to occur, but also the consumption of the reactants is likely to be the same, and the life of the reactant can be prolonged. Further, by performing the third heat exchange by the inner cylinder 18 and the heating by the inner heater 20, the volume of the heat exchanger 16 can be reduced. Therefore, the large outer cylinder 12 and the inner cylinder 18 can be obtained. The space can be filled with more reactants. Therefore, the reaction can be caused with higher efficiency, and more processed gas can be processed. The volume of space between the outer cylinder 12 and the inner cylinder 18, that is, the reaction range inside the outer cylinder is from the viewpoint of the uniformity of the internal temperature and the strength, and it is preferable that 18 - 201111030 is 2 liters to 3,000 liters. In addition, it is especially good for 2 liters to 200 liters. In this case, it is easy to install the casters, etc., and it is advantageous when the reaction apparatus 1 is exchanged. Further, from the viewpoint of the uniformity of the internal temperature and the reaction efficiency, it is particularly preferable that the temperature is 40 liters to 200 liters. Further, the reactor having the above configuration can be used as a reaction apparatus having a reaction temperature of 200 ° C to 1000 ° C, and the gas temperature at the outlet of the reaction apparatus can be made 200 ° C or lower. In the present embodiment, the gas to be treated includes a gas containing a fluorine compound, and the reaction for decomposing the fluorine compound has been described, but is not limited thereto. As the gas to be treated, if the reactant is changed to a gas suitable for the gas reaction using a gas other than the fluorine compound, the reaction device 10 of the present embodiment can be applied. For example, by dissociating and removing nitrous oxide contained in the purge gas line from the semiconductor manufacturing apparatus or the remaining anesthetic gas discharged from the operating room, a reaction using a solid catalyst as a reactant can be used. [Examples] As the reaction apparatus, the reaction apparatus 10 shown in Figs. 1 and 2 was used. As the reactant, alumina and calcium carbonate were used in a mass ratio of 3:7' as the total weight of the alumina and the calcium carbonate as 3% by mass. Further, as the gas to be treated, CF4' of the fluoride gas was passed through the reaction apparatus 10 at a concentration of 6000 volppm and a flow rate of 250 L/min. However, nitrogen gas is used as the carrier gas system. As a result, the concentration of the CF4 of the treatment-completed gas was 0 ppm, and -19-201111030 confirmed that the CF4» could be decomposed. At this time, the temperature distribution of the outside and inside of the reaction apparatus 10 was measured. FIG. 3 is a view showing the temperature distribution of the reaction device 10. In Fig. 3, the horizontal axis represents the display temperature, and the vertical axis shows the height direction position of the reaction range, and the external temperature and the internal temperature of each place are displayed. Here, the external temperature is a temperature measured by sequentially changing the position in the height direction of the temperature sensor 26c (see FIG. 1). Further, the internal temperature is a temperature which is measured by sequentially changing the position in the height direction of the temperature sensor 26b (refer to Fig. 1). It is understood from Fig. 3 that the internal temperature and the external temperature are in the height direction of the reaction range. The temperature difference is within about 30 ° C in the range of 550 ° C to 580 ° C, and it is known that a uniform temperature distribution in the reaction range can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an example of a reaction apparatus to which the present embodiment is applied. Fig. 2 is a cross-sectional view taken along line II-II of the reaction apparatus shown in Fig. 1. Fig. 3 is a view showing a temperature distribution of the reaction apparatus. . [Main component symbol description] 1 〇: Reaction device 12: Outer tube 14: Double tube 1 6 : Heat exchanger -20- 201111030 1 8 : Inner tube 2 0: Internal heater 2 2 : External heater 24: Heat dissipation Device