TW201107697A - Heat transfer device for heat source - Google Patents

Heat transfer device for heat source Download PDF

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Publication number
TW201107697A
TW201107697A TW98127638A TW98127638A TW201107697A TW 201107697 A TW201107697 A TW 201107697A TW 98127638 A TW98127638 A TW 98127638A TW 98127638 A TW98127638 A TW 98127638A TW 201107697 A TW201107697 A TW 201107697A
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Taiwan
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heat source
graphite sheet
heat
graphite
transfer device
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TW98127638A
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Chinese (zh)
Inventor
Yi-Long Jiang
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Cetech Co Ltd
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Priority to TW98127638A priority Critical patent/TW201107697A/en
Publication of TW201107697A publication Critical patent/TW201107697A/en

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Abstract

A heat transfer device for heat source includes a soft graphite sheet covering one side of a heat source, in which the area covered by the graphite sheet is larger than the heat generating region of heat source. Moreover, the graphite sheet is uniformly distributed with a number of perforations, so that the actual area of graphite sheet is smaller than the heat generating region of heat source. Also, the perforations are not connected with each other.

Description

201107697 六、發明說明: 【發明所屬之技術領域】 本發明係有關-種熱傳器,尤指一種貼於熱源俾供散 熱之熱傳器。 【先前技術】 所謂石墨,係碳元素結㈣物之…其碳原子排列方 •式以蜂巢式的多個六邊形呈現。這些以蜂巢式的多個六邊 形之碳原子依序概略以互相平行且等距方式排列成薄板 •(層)’整團連結或接合在一起而排列成微晶。 石墨經排列整齊後具有良好的微晶方向,且具有非等 向性結構,這些微晶相互對齊且具有排列整齊的碳原子 層,因而具有良好的導熱性及導電性。 ” 石墨之結構具有非常高度的方向性,故適於製造柔性 石墨薄板,係因石墨具有垂直碳原子層的方向^轴)了以 及平行碳原子層的方向(a#),或垂直「e」方向的方向。 天然石墨之碳原子所重疊形成的空間,可以經由處理而使 »·垂直層的方向明顯擴張,構成膨膜的石墨結構以維持碳原 子層的薄片特徵。 石墨具有多種型態,例如網、紙、條、帶、箔、墊等, 因此又稱為彈性石墨,其結構可膨脹至「c」方向尺寸之 一夕倍原C」方向尺寸的石墨薄片,由於石墨粒子膨脹 幅度達到粒子間連結,因此不需使用黏合劑即可形成有結 合力的膨脹石墨薄板。 除上述石墨薄板材料具有極佳的彈性、良好強度以及 201107697 高度方向性外,由於已膨脹石墨粒子的方向性以及實質上 平行於高壓縮形成之薄板反面的石墨層,使得石墨薄板材 料之高度非等向性使其具有良好的熱傳導,特別有用於熱 分布之應用。 石墨薄板係於一預定荷載及不需黏合劑的情形下,壓 縮或壓緊膨脹的石墨粒子,以製成平坦、彈性、整合的石 墨薄板。外觀呈現蟲狀的膨脹石墨粒子,一旦被壓縮將維 持壓縮組並對齊薄板主要表面的反面。薄板材料的密度及 厚度可藉由控制壓縮度來改變,密度界於約0.04 g/cc至 約2. 0 g/cc的範圍内。 由於石墨粒子對齊平行薄板的主要反面平行表面,壓縮 薄板材料增加其方向性,則非等向性亦隨之增加,使彈性 石墨薄板材料具有可觀的非等向性。 「c」及「a」方向薄板的熱學及電學性質非常不同, 係因壓縮的非等向性薄板材料中,厚度沿著長及寬範圍的 方向。 石墨普遍用於熱傳導,如下列美國相關專利案,案號 為:7276273 、 7303820 、 7306847 、 7150914 、 7160619 、 5831374、6982874、7292441,以及中華民國專利第 200701875、200704356、1304375號等案件,惟上述習用之 石墨應用技術仍具有以下問題: 如第7〜8圖所示,為習用之熱傳器,係於一石墨顆 粒壓成完整之石墨片9 0附著膠層91貼合於熱源9 2 上,石墨片9 0之表面積大於熱源9 2之散熱面積,藉以 201107697 提供熱源散熱;此外,於石墨片9 0上結合覆蓋一為金屬 材質之補強層9 3,以補強石墨片9 0整體之結構性,使 石墨片9 0撕起時避免殘留於熱源9 2上。 前述之習用熱傳器具有以下之問題: 1、 呈上所述,石墨係碳元素結晶礦物之一,而天然 資源有限,因此如何使石墨片達到散熱效果,且能節省石 墨材料之使用量,即為石墨片曰後改善之重點。 2、 請參閱第9〜1 0圖,習用之熱傳器雖於石墨片 9 0上設有補強層9 3,惟該膠層9 1與熱源9 2間之附 著力仍比膠層9 1與石墨片9 0間之附著力強,故當石墨 片9 0撕起時,實務經驗上在熱源將殘留石墨殘渣9 0 1 在熱源9 2上,故仍必須先清除熱源9 2上之石墨殘渣9 0 1,再重新貼合另一熱傳器於熱源9 2上,因此造成更 換熱傳器之不便。 因此,如何使熱傳器之石墨片應用於散熱時之材料節 省,以及熱傳器重工時石墨殘留問題之改善,即為本發明 之重點所在。 【發明内容】 本發明目的之一,在於解決上述的問題而提供一種 用於熱源之熱傳器,使石墨片於熱源之散熱應用時,在不 影響散熱效率情況下,可節省其石墨材之用量。 本發明目的之二,在於提供熱傳器撕起時不殘留於熱 源上之結構,使熱傳器在重新更換時更為便利。 為達前述之目的,本發明係: 201107697 广括:有柔性之石墨片,該石墨片係涵蓋於該熱源 -則’且b石墨;i涵蓋住該熱源之面積係大於該熱源之發 熱區域,而該石墨片上均勻分佈多數個使該石墨片實際面 積小於該熱源區域之穿孔,且各該穿孔間互不相連。 本發明之上述及其他目的與優點,不難從下述所選用 實施例之詳細說明與附圖中,獲得深入了解。 當然,本發明在某些另件上,或另件之安排上容許有 所不同’但所選用之實施例,則於本朗書巾以 說明,並於附圖中展示其構造。 ” 【實施方式】 請參閱第1圖至第4圖,圖中所示者為本發明所選用 之實施例結構’此僅供說明之用,在專财請上並不受此 種結構之限制。 本實施例提供一種用於熱源之熱傳器,其係包括: 一石墨片1,其總表面積大於熱源2區域之表面積, 以供涵蓋住該熱源2 ’此石墨片丄於表面上均勻分佈多數 個穿孔1 1 ’此多數個穿孔i !使石墨片工之實際表面積 小於熱源2區域之表面積,此各穿孔丄丄間互不相連。 於本實施例中,該石墨片i於上表面丄2與下表面工 3分別接合一為有紙基材質之補強層3,其中至少一補強 層3可黏著石墨片1於熱源2上,且透過穿孔1 1黏著另 一補強層3,此二補強層3之材質皆為雙面膠、壓克力矽 膠片、或為熱熔性薄膜其中之一者,或為其中不同材質之 二者’於本實施例中係皆為壓克力矽膠片。 201107697 由於本發明之石墨片i開設有多數的穿孔丄丄,使得 該石墨片1可涵蓋熱源2的總表面積不變,但該石墨片1 在扣除多數穿孔11的面積後,實際面積相對減少,在不 影響散熱效率情況下,可節省其石墨材之用量。 再者,本發明之石墨片1於上下表面分別設有一補強 層3,補強層3分別黏合於石墨片i上而附著,且二補強 層3分別於穿孔1 1中相互黏著,因此二補強層3具有相201107697 VI. Description of the Invention: [Technical Field] The present invention relates to a heat transfer device, and more particularly to a heat transfer device which is attached to a heat source for heat dissipation. [Prior Art] The so-called graphite, which is a carbon-based junction (four), has a carbon atom arrangement formula which is represented by a honeycomb-shaped hexagon. These honeycomb atoms of a plurality of hexagonal shapes are arranged in a parallel and equidistant manner in a thin plate in a manner similar to each other. The (layers) are integrally joined or joined together to form crystallites. The graphite is aligned and has a good crystallite orientation and has an anisotropic structure. The crystallites are aligned with each other and have a well-arranged carbon atom layer, thereby having good thermal conductivity and electrical conductivity. The structure of graphite has a very high directionality, so it is suitable for the manufacture of flexible graphite sheets, because graphite has the direction of the vertical carbon atom layer and the direction of the parallel carbon atom layer (a#), or the vertical "e" direction. The direction. The space formed by the overlapping of the carbon atoms of natural graphite can be significantly expanded by the treatment to form the graphite structure of the expanded film to maintain the thin film characteristics of the carbon atom layer. Graphite has a variety of types, such as mesh, paper, strips, tapes, foils, mats, etc., and is therefore also referred to as elastic graphite, and its structure can be expanded to a size of one dimension in the "c" direction. Since the expansion range of the graphite particles reaches the interparticle connection, the bonded expanded graphite sheet can be formed without using a binder. In addition to the above-mentioned graphite sheet material having excellent elasticity, good strength and high degree of directivity of 201107697, the height of the graphite sheet material is not due to the directivity of the expanded graphite particles and the graphite layer substantially parallel to the reverse side of the sheet formed by high compression. Isotropy gives it good heat transfer, especially for applications with heat distribution. The graphite sheet compresses or compresses the expanded graphite particles under a predetermined load and without the need for a binder to form a flat, elastic, integrated graphite sheet. The appearance of worm-like expanded graphite particles, once compressed, maintains the compressed set and aligns with the reverse side of the major surface of the sheet. The density and thickness of the sheet material can be varied by controlling the degree of compression, and the density is in the range of from about 0.04 g/cc to about 2.0 g/cc. Since the graphite particles are aligned with the main reverse parallel surfaces of the parallel sheets, and the compressive sheet material increases its directivity, the anisotropy also increases, making the elastic graphite sheet material have considerable anisotropy. The thermal and electrical properties of the "c" and "a" direction sheets are very different, due to the thickness along the length and width of the compressed anisotropic sheet material. Graphite is commonly used for heat conduction, such as the following US related patent cases, case numbers: 7272273, 7303820, 7306847, 7150914, 7160619, 5831374, 6982874, 7292441, and Republic of China patents 200701875, 200704356, 1304375, etc. The graphite application technology still has the following problems: As shown in Figures 7-8, the conventional heat transfer device is attached to a heat source 9 2 by pressing a graphite particle into a complete graphite sheet 90 adhesive layer 91. The surface area of the graphite sheet 90 is larger than the heat dissipation area of the heat source 92, and the heat source is provided by the heat supply of the heat source. In addition, a reinforcing layer 9 3 made of a metal material is bonded to the graphite sheet 90 to reinforce the structural structure of the graphite sheet 90. When the graphite sheet 90 is torn up, it is prevented from remaining on the heat source 92. The aforementioned conventional heat transmitter has the following problems: 1. As described above, one of the graphite-based carbon crystal minerals, and the natural resources are limited, so how to make the graphite sheet achieve the heat dissipation effect, and can save the use of the graphite material, This is the focus of improvement after the graphite sheet. 2. Please refer to the figure 9~1 0. Although the conventional heat transfer device is provided with a reinforcing layer 9 3 on the graphite sheet 90, the adhesion between the rubber layer 9 1 and the heat source 9 2 is still better than that of the rubber layer 9 1 . The adhesion between the graphite sheet and the graphite sheet is strong. Therefore, when the graphite sheet 90 is torn up, it is practically necessary to remove the residual graphite residue 9 0 1 on the heat source 9 2 in the heat source, so the graphite on the heat source 9 2 must be removed first. The residue 910 is re-attached to the heat source 9 2, thus causing inconvenience in replacing the heat transmitter. Therefore, how to make the graphite sheet of the heat transmitter applied to the material saving during heat dissipation and the improvement of the graphite residual problem during the heat transfer of the heat transmitter is the focus of the present invention. SUMMARY OF THE INVENTION One object of the present invention is to solve the above problems and provide a heat transfer device for a heat source, so that when the graphite sheet is used for heat dissipation of a heat source, the graphite material can be saved without affecting heat dissipation efficiency. Dosage. The second object of the present invention is to provide a structure in which the heat transfer device does not remain on the heat source when it is torn, so that the heat transfer device is more convenient when it is replaced. For the purpose of the foregoing, the present invention is: 201107697 Widely: a flexible graphite sheet, the graphite sheet is covered by the heat source - then 'b graphite; i covers the heat source area is larger than the heat source of the heat source, The plurality of graphite sheets are uniformly distributed so that the actual area of the graphite sheet is smaller than that of the heat source region, and the through holes are not connected to each other. The above and other objects and advantages of the present invention will be readily understood from Of course, the invention may be varied on certain components or arrangements of parts, but the embodiments selected are described in the book, and the construction is shown in the drawings. [Embodiment] Please refer to Fig. 1 to Fig. 4, which shows the structure of the embodiment selected for the present invention. 'This is for illustrative purposes only, and is not limited by this structure. The embodiment provides a heat transfer device for a heat source, comprising: a graphite sheet 1 having a total surface area larger than a surface area of the heat source 2 region for covering the heat source 2 'the graphite sheet is uniformly distributed on the surface A plurality of perforations 1 1 'the majority of the perforations i make the actual surface area of the graphite sheet smaller than the surface area of the heat source 2 region, and the perforations are not connected to each other. In this embodiment, the graphite sheet i is on the upper surface. 2 and the lower surface worker 3 are respectively joined by a reinforcing layer 3 having a paper-based material, wherein at least one reinforcing layer 3 can adhere the graphite sheet 1 to the heat source 2, and adheres to the other reinforcing layer 3 through the perforation 1 1 . The material of layer 3 is one of double-sided tape, acrylic film, or one of hot-melt film, or both of them are in the embodiment, which are all acrylic film. 201107697 Since the graphite sheet of the present invention has a majority The perforated crucible makes the graphite sheet 1 cover the total surface area of the heat source 2, but the graphite sheet 1 after the area of the majority of the perforations 11 is deducted, the actual area is relatively reduced, and the graphite can be saved without affecting the heat dissipation efficiency. Further, the graphite sheet 1 of the present invention is provided with a reinforcing layer 3 on the upper and lower surfaces, respectively, and the reinforcing layer 3 is adhered to the graphite sheet i and adhered thereto, and the two reinforcing layers 3 are adhered to each other in the perforation 1 1 respectively. Therefore, the second reinforcing layer 3 has a phase

互黏著而包覆石墨片1之補強結構。如第5圖所示,當熱 傳器由熱源2上撕起時,石墨片丄將隨二補強層3而完整 脫離熱源2上。 為證明本發明之石墨片1所開設的穿孔11並在不影 響散熱效率,請參閱第g — 1圖〜6一4圖,其係本發明 一 S用之熱傳器實際應用於熱源上吸收熱量之熱量分佈圖 ,其中所測試之熱源2係1w之高亮度發光二極體,其熱 量係透過紹質之散熱鰭片傳出,發光二極體透過電源供應 器提供電源,加電壓至3. 6伏特,以及電流為〇· 4 8安 培(1. 7W)的操作方式來增加溫度。本發明與習用之熱 傳器係於散熱鰭片表面分別黏貼石墨片1 (厚度為〇 · 1 3 賊〇’且石墨片1於上下表面附著為壓克力矽膠片之補強層 3 ;另外本發明之石墨片1上所設穿孔1 1直徑為2mm。 於此一測試中,係通電而使發光二極體發光產生熱量 ,於發光2 0分鐘穩定後,以熱影像儀 (NEC Thermo shot F30) 量測本發明及習用石墨片1之正面以及背面溫度。其中, 於本發明之石墨片1正面(如圖6 — 1所示)量測之溫度 201107697 為7 3.6 °C,而背面(如圖6 — 2所示)之溫度則為3 4 • 7 C,於習用之石墨片正面(如圖6 — 3所示)量測之溫 度為7 1.9,背面(如圖6 — 4所示)之溫度則為3 5. 9。由此一試驗可見’設有穿孔1 1之石墨片1,其正面 溫度僅略升高1 · 7度,背面僅降低1 · 2度,此一結果顯示 石墨片1上具有穿孔11對於熱傳導的影響相當微小。 由上述之說明不難發現本發明之優點,在於熱傳器之 石墨片1上所設之多數穿孔11可節省石墨材料的使用, 但仍此維持本身的散熱效果;再者,透過本發明之補強層 3而使石墨片1被完整包覆,且二補強層3之間亦相互黏 著,故本發明之石墨片i重工時不殘留於熱源2上,故重 新更換熱傳器時更為便利。 以上所述實施例之揭示係用以說明本發明,並非用以 限制本發明,故舉凡數值之變更或等效元件之置換仍應隸 屬本發明之範嗜。 由以上詳細說明,可使熟知本項技藝者明瞭本發明的 確可達成前述目的,實已符合專利法之規定,錢出專利 申請。 【圖式簡單說明】 第1圖係本發明之立體分解示意圖 第2圖係本發明之平面結構示意圖 f 3圖係本發明之熱傳11黏貼脑之側視結構示意圖 第4圖係本發明之熱傳器黏貼熱源之示意圖 第5圖係本發明之熱傳器由熱源撕起之示意圖 201107697 第6 -1圖係本發明之熱傳器正面溫度分佈圖 第6 - 2圖係本發明之熱傳器背面溫度分伟圖 第6 - 3圖係習用之熱傳器正面溫度分佈圖 第6 — 4圖係習用之熱傳器背面溫度分佈圖 第7圖係習用熱傳器之立體分解示意圖 第8圖係習用熱傳器之黏貼熱源示意圖 第9圖係習用熱傳器於熱源撕起殘留示意圖 第1 0圖係習用熱傳器於熱源撕起殘留剖視圖 【主要元件符號說明】 (習用部分) 石墨片9 0 石墨殘渣9 0 1 膠層9 1 熱源9 2 補強層9 3 (本發明部分) 石墨片1 穿孔1 1 上表面1 2 下表面1 3 熱源2 補強層3The reinforcing structure of the graphite sheet 1 is adhered to each other. As shown in Fig. 5, when the heat transfer device is torn from the heat source 2, the graphite sheet will be completely separated from the heat source 2 with the two reinforcing layers 3. In order to prove the perforation 11 of the graphite sheet 1 of the present invention and without affecting the heat dissipation efficiency, please refer to the figures g-1 to 1-6, which are used in the heat source of the present invention. The heat distribution map of heat, wherein the tested heat source 2 is a 1W high-brightness light-emitting diode, the heat is transmitted through the heat-dissipating fins, and the light-emitting diode is supplied with power through the power supply, and the voltage is applied to 3 6 volts, and the current is 〇 · 4 8 amps (1.7 W) to increase the temperature. The heat transfer device of the present invention and the conventional heat transfer device are respectively adhered to the graphite sheet 1 on the surface of the heat dissipation fin (the thickness is 〇·1 3 thief 且' and the graphite sheet 1 is attached to the upper and lower surfaces as the reinforcing layer 3 of the acrylic 矽 film; The perforation 1 1 provided on the graphite sheet 1 of the invention has a diameter of 2 mm. In this test, the light-emitting diode is energized to generate heat, and after the light is stabilized for 20 minutes, the thermal imager (NEC Thermo shot F30) is used. The front and back temperatures of the graphite sheet 1 of the present invention and the conventional graphite sheet 1 are measured, wherein the temperature measured on the front side of the graphite sheet 1 of the present invention (as shown in Fig. 6-1) is 7 3.6 ° C, and the back surface (such as The temperature shown in Figure 6-2 is 3 4 • 7 C. The temperature measured on the front side of the conventional graphite sheet (as shown in Figure 6.3) is 7 1.9, and the back side (as shown in Figure 6.4) The temperature is 3 5. 9. From this test, it can be seen that 'the graphite sheet 1 with perforated 1 1 has a front surface temperature of only slightly increased by 1.7 degrees, and the back surface is only reduced by 1.2 degrees. This result shows that graphite The effect of the perforation 11 on the sheet 1 on heat conduction is rather small. It is not difficult to find the present invention from the above description. The advantage is that the majority of the perforations 11 provided on the graphite sheet 1 of the heat transfer device can save the use of the graphite material, but still maintain its own heat dissipation effect; further, the graphite sheet 1 is completed through the reinforcing layer 3 of the present invention. The coating and the two reinforcing layers 3 are also adhered to each other. Therefore, the graphite sheet i of the present invention does not remain on the heat source 2 during rework, so it is more convenient to replace the heat transmitter. The disclosure of the above embodiment is used. The invention is not intended to limit the invention, and variations of the numerical values or substitutions of equivalent elements are still subject to the scope of the invention. From the above detailed description, it will be apparent to those skilled in the art that the invention can be The foregoing objects have been in accordance with the provisions of the Patent Law, and the patent application is made out. [Simplified illustration of the drawings] Fig. 1 is a perspective exploded view of the present invention. Fig. 2 is a schematic view of the planar structure of the present invention. FIG. 4 is a schematic view showing the heat source of the heat transfer device of the present invention. FIG. 5 is a schematic view showing the heat transfer device of the present invention which is torn by a heat source. 201107697 The sixth embodiment is the present invention. The heat transfer device front temperature distribution diagram is shown in Fig. 6-2. The heat transfer device on the back side of the present invention is shown in Fig. 6 - 3. The heat transfer device on the front side is shown in Fig. 6 - 4. Figure 7 is a three-dimensional exploded view of a conventional heat transfer device. Figure 8 is a schematic diagram of a heat transfer device for a conventional heat transfer device. Figure 9 is a schematic diagram of a conventional heat transfer device for tearing up a heat source. Removable section of the transmitter in the heat source [Key component symbol description] (conventional part) Graphite sheet 9 0 Graphite residue 9 0 1 Rubber layer 9 1 Heat source 9 2 Reinforcement layer 9 3 (Part of the invention) Graphite sheet 1 Perforation 1 1 Surface 1 2 lower surface 1 3 heat source 2 reinforcing layer 3

Claims (1)

201107697 七、申請專利範圍: 1 · 一種用於熱源之熱傳器,其係包括一具有柔性之石墨 片’該石墨片係涵蓋於該熱源一側,且該石墨片涵蓋 住該熱源之面積係大於該熱源之發熱區域,而該石墨 片上均勻分佈多數個使該石墨月實際面積小於該熱源 區域之穿孔,且各該穿孔間互不相連。 2 ·依申請專利範圍第1項所述之用於熱源之熱傳器,其 中多數個穿孔之面積總和等於該石墨片的實際面積。 3 ·依申請專利範圍第i項所述之用於熱源之熱傳器,其 中多數個穿孔之面積總和大於該石墨片的實際面積。 4 ·依申請專利範圍第2項所述之用於熱源之熱傳器,其 中該多數個穿孔係以等距陣列分設於該石墨片上。 5 _依申請專利範圍第工項所述之用於熱源之熱傳器,其 中該石墨片於上下表面分別接合一補強層,其中至少 一補強層可黏著石墨片於熱源上,且透過穿孔黏著另 一補強層。 6 ·依申請專利範圍第5項所述之用於熱源之熱傳器,其 中該二補強層之材質皆為雙面膠、壓克力矽膠片、或 為熱熔性薄膜其中之一者,或為其中不同材質之二者。201107697 VII. Patent application scope: 1 · A heat transmitter for a heat source, comprising a flexible graphite sheet, the graphite sheet is covered on one side of the heat source, and the graphite sheet covers the area of the heat source The heat generating region is larger than the heat source, and the plurality of graphite sheets are evenly distributed so that the actual area of the graphite is smaller than the perforations of the heat source region, and the through holes are not connected to each other. 2. The heat transfer device for a heat source according to item 1 of the patent application, wherein the sum of the areas of the plurality of perforations is equal to the actual area of the graphite sheet. 3. The heat transfer device for heat sources according to item i of the patent application scope, wherein the total area of the plurality of perforations is greater than the actual area of the graphite sheet. 4. The heat transfer device for a heat source according to claim 2, wherein the plurality of perforations are disposed on the graphite sheet in an equidistant array. 5 _ according to the application of the scope of the patent application, the heat transfer device for heat source, wherein the graphite sheet is respectively joined to a reinforcing layer on the upper and lower surfaces, wherein at least one reinforcing layer can adhere the graphite sheet to the heat source and adhere through the perforation Another reinforcing layer. 6) The heat transfer device for heat source according to claim 5, wherein the materials of the two reinforcing layers are double-sided tape, acrylic film, or one of hot melt films. Or both of them are different materials.
TW98127638A 2009-08-17 2009-08-17 Heat transfer device for heat source TW201107697A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107481965A (en) * 2017-09-06 2017-12-15 武汉市三选科技有限公司 Wafer cutting protection membrane structure and its manufacture method are with using its cutting crystal wafer
TWI663064B (en) * 2017-09-06 2019-06-21 武漢市三選科技有限公司 A wafer dicing protective film structure and method for manufacturing thereof and dicing wafer by using thereof
TWI694743B (en) * 2017-03-27 2020-05-21 美商慧盛材料美國責任有限公司 Heating jacket and method of making heating jacket

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI694743B (en) * 2017-03-27 2020-05-21 美商慧盛材料美國責任有限公司 Heating jacket and method of making heating jacket
CN107481965A (en) * 2017-09-06 2017-12-15 武汉市三选科技有限公司 Wafer cutting protection membrane structure and its manufacture method are with using its cutting crystal wafer
TWI663064B (en) * 2017-09-06 2019-06-21 武漢市三選科技有限公司 A wafer dicing protective film structure and method for manufacturing thereof and dicing wafer by using thereof
CN107481965B (en) * 2017-09-06 2023-12-29 武汉市三选科技有限公司 Wafer dicing protective film structure, method of manufacturing the same, and dicing wafer using the same

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