TW200946469A - Separation device and separation method of mother board for plane display panel - Google Patents

Separation device and separation method of mother board for plane display panel Download PDF

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Publication number
TW200946469A
TW200946469A TW098106310A TW98106310A TW200946469A TW 200946469 A TW200946469 A TW 200946469A TW 098106310 A TW098106310 A TW 098106310A TW 98106310 A TW98106310 A TW 98106310A TW 200946469 A TW200946469 A TW 200946469A
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Taiwan
Prior art keywords
panel
platforms
platform
substrate
axis
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TW098106310A
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Chinese (zh)
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TWI419852B (en
Inventor
Hideaki Funada
Hiroaki Yoshimura
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Mitsuboshi Diamond Ind Co Ltd
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Publication of TW200946469A publication Critical patent/TW200946469A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133351Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

A separation device of a mother board for a plane display panel consists of a plurality of tables for sucking and fixing one plane display panel, and a moving device for moving a part of the plurality of tables relatively to other tables in at least one axial direction on the major surface of the plane display panel. Scribe lines for dividing the plane display panel into panel pieces of product size are formed in the plane display panel. Unnecessary members between adjacent panel pieces can be cut off by moving the moving device in at least one axial direction under such a state as one plane display panel is fixed onto the plurality of tables. Consequently, unnecessary members between panel pieces can be cut off surely without producing a flaw in the panel piece.

Description

200946469 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種用以從已劃線(及折斷)之平面顯 示體面板分離出製品大小之面板片的分離裝置及分離方 法0 【先前技術】 參 Ο 圖1係表示從含有液晶顯示用面板、PDP面板(Plasma Display Panel ’ 電漿顯示面板)、LCOS ( Liquid Crystal On Silicon,矽上液晶)面板等之平面顯示體面板(母基板)至 製品大小之面板片之分割的過程。如圖1之(A )與(B ) 之俯視圖與侧視圖所示,於平面顯示體面板w,利用設置 於上下玻璃板之間的密封圈Z,將上下玻璃板相互接合,同 時從注入口 PI向由該密封圈Z所包圍之間隙内注入液晶。 如此,於平面顯示體面板w上形成6個面板片w。為了將 此ό個面板片w從該平面顯示體面板w分離,而於上下玻 璃板之表面,藉由劃線裝置對面板片w之周圍施有劃線。 圖1中之(C )係表示已藉由折斷裝置對已劃線之部位 進行折斷之情況。其後,如(D)所示,向分離裝置移送, 並於其平台上將無需之構件Q1〜Q3除去,藉此最終獲得6 個面板片w。位於下側之玻璃板(τρτ ( Thin_mm200946469 VI. Description of the Invention: [Technical Field] The present invention relates to a separating device and a separating method for separating a panel of a product size from a plane display panel that has been scribed (and broken). Fig. 1 shows a flat display panel (mother substrate) including a liquid crystal display panel, a PDP panel (Plasma Display Panel 'plasma display panel), an LCOS (Liquid Crystal On Silicon) panel, etc. The process of segmentation of the panel of the product size. As shown in the top view and the side view of FIGS. 1(A) and (B), the upper and lower glass plates are joined to each other by the seal ring Z disposed between the upper and lower glass plates on the flat display body panel w, and simultaneously from the injection port. The PI injects liquid crystal into the gap surrounded by the seal ring Z. In this manner, six panel sheets w are formed on the flat display body panel w. In order to separate the panel pieces w from the flat display panel w, the periphery of the panel w is scribed by the scribing means on the surface of the upper and lower glass sheets. (C) in Fig. 1 shows a case where the broken portion has been broken by the breaking device. Thereafter, as shown in (D), the separation device is transferred, and the unnecessary members Q1 to Q3 are removed on the platform, thereby finally obtaining six panel sheets w. Glass plate on the lower side (τρτ ( Thin_mm

Transist°r,薄膜電晶體)基板)上的突出部U係成為用以 形成電極之端子之部位’該電極用於含有TFT之電路。上 侧之玻璃板係含有CF(c〇1〇rFilter,彩色濾光片)之CF 200946469 基板。 從圖1之 由機械手笤6 緣部之無需構件Q1及Q3,可藉 由機械手專自上方施加衝 中取出之無需構件q2之情 早除去。然而,於從 板)之端子u突ά故二, 下侧玻璃板(TFT基 較費事。 ‘,,、法利用相同之方法除去,其除去 另外,若使平面顯示體面板 適當地簡單地除去。然而,由於:示= ΓΗ::故會產生在™上留有劃痕之= 了牛° #驟移送之時,必須使面板反轉,從而增加 了步驟數。 代叫增加 置1 =特開平"·11626°號公報中揭示了-種分離裝 、將藉“渗透用之刀輪或雷射光之照射等而在板玻 :厚度方向上形成有深裂痕(劃線)之液晶面板之母玻 璃基板,載置於可真空吸附之一片材料除去平台(例如圖 15之材料除去部Z2)’並藉由搬送機械手(反轉機械手45 ) 沿裂痕使製品大小之面板片從液晶面板之母基板上分離。 於該分離裝置中,藉由搬送機械手將複數個面板片依次從 劃線後被載置於材料除去平台22之母基板搬送至下一步 驟’此時面板片彼此依次被分離。然而’於所有面板片被 搬送之後,在材料除去平台上殘留有多個無需之端材,每 當進行新的母基板加工之時,需要進行將該些端材與細小 之玻璃屑一併從材料除去平台上完全除去的作業,嚴重妨 礙了生產效率之提高。 200946469 而且,折斷平台係對應於特定大小之母玻璃基板而形 成,因此若母玻璃基板之大小發生改變,則可能被要求折 斷平台之重新設計或改造,從而妨礙了生產效率之提高。 進而,於每一片母玻璃基板之製品面板獲取數量改變 的情形下,必須改變搬送機械手等之設置位置或動作程 式,妨礙了生產效率之提高。 【發明内容】 本發明之目的在於提供一種能夠容易地除去無需構件 而不會於面板片上留有劃痕的分離裝置。 進而,本發明之目的在於,於平面顯示體面板之每一 片之製品面板獲取數量改變、或平面顯示體面板w之大小 發生改變的情形下,容易地應對此情況而使分離步驟效率 化。 一-少微刀-雕衣11尔從形成有用 ❹u分離成製品大小之面板片之劃線之平面顯示體面板分離 出前述各面板片之分離裝置。該分離裝置由複數個平台及 移動裝置所構成,上述複數個平台係吸引並固定一片上述 I面顯示體面板’上述移㈣置使上述複數個平台之一部 为相對於其他上述平台, 於上述平面顯示體面板之主面上 的至〉、一軸方向進行相對移動 ,,^ 上固〜μ 野移動。此處’於上述複數個平台 上固疋一片上述平面顯示體 動裝置向上述至少-轴方L ;之狀態下’可藉由上述移 向之移動,將相鄰接之複數個上 1由板片之間的無需構件切除。 5 200946469 一上述分離裝置較佳為,其更具備:導軸,於上述平面 顯示體面板之主面上之丨軸方向延伸;支樓體,與上述導 軸卡合,且將該複數個平台之至少—部分支撑為可分別沿 該導轴之軸線移動;以及搬送裝置,沿上述導軸之轴㈣ 送上述支撐體。 在上述分離裝置中,較佳為’上述複數個平台之至少 一部分係分別由平台基座及吸㈣定平台所構成,該吸引 固定平台載置於上述平台基座上,吸引並固定上述平面顯 〇 不體面板’上述移動裝置係由第i裝置及帛2裝置中之至 少一個裝置所構成,其中上述第1裝置將上述複數個平台 基座之-部分對其他上述平台基座相對移動,上述帛2裝 置將上述複數個吸引固定平台之一部分對其他上述吸引固 疋平:相對移動。此處’於上述複數個吸引固定平台上吸 引固定有一片上述平面顯示體面板之狀態下之藉由上述第 =置或第2裝置之上述移動,可將相鄰接之複數個上= 板片之間的無需構件切除。 〇 在上述分離裝置中,較佳為,其更具 述平面顯示體面板之主面上…方向延 、: 上述導抽卡合,且將該複數個平台之至少 ^ : ::沿該導軸之軸線移動;以及搬送裝置,沿:= 軸線搬送上述支撐體。 在上述分離裝置中,較佳為,上述複數個平台之至少 -部分具備將相鄰接之平台相互結合之結合機構。 在上述分離裝置中,較佳為,上述複數個平台二㈣ 6 200946469 配置。 本發明之分離方法係將形成有用以分離成製品大小之 面板片之劃線之平面顯示體面板分離為前述各面板片之八 離方法。在該分離方法中 77 、 將瓜成於上述平面顯示體面 之上述複數個面板片吸引 门叹ή並固疋於複數個平台上, 將上述複數個平台之—邱八 便’ 卞口之J分相對於其他上述平台,於上 平面顯示體面板之主面上的 上迷 上的至少一軸方向移動。藉此,藉 ❹ φ 由於该方向相鄰接之複數個卜城而纪口 数個上述面板片之間隔擴大,而將 上述複數個面板片之間的無需構件切除。 在上述分離方法中,齡·#兔,描4* 敕隹為根據上述平面顯示艚而 板之大小及/或每-片之面㈣不體面 “ 方之面板獲取數量,將上述複數個平台 移動至可吸引固定上述平面顯 囬顯不體面板之面板片之位置。 在上述分離裝置中,較佳為,上述平面顯示體面板之 各面板片係由TFT基板及堆積於其上之cf基板所構成,使 上述TFT基板位於下側、上述cp·其红a 業。 迷CF基板位於上側進行分離作 [發明之效果] 本發明中,於平台上固 、 疋有千面顯示體面板之狀態 使可動式之平台相對於固定式之伞&、隹^ 疋八之十台進行移動,以使 ::台相互間分離面板片之間之無需構件等會自 ::被切除,且因自身重量而落下,因此於各平台上只獲 什製品大小之面板片。只要係兮The projection U on the substrate (transistor) is a portion for forming a terminal of the electrode. This electrode is used for a circuit including a TFT. The upper glass plate is a CF 200946469 substrate containing CF (c〇1〇rFilter, color filter). The unnecessary members Q1 and Q3 from the edge of the manipulator 6 of Fig. 1 can be removed early by the robot without the member q2. However, in the terminal u of the board), the lower side glass plate (the TFT substrate is more troublesome. ',, the method is removed by the same method, and the removal is additionally provided. If the flat display body panel is appropriately and simply Removed. However, because: = = ΓΗ:: will result in scratches on the TM = 牛 ° ° When the shovel is sent, the panel must be reversed, thus increasing the number of steps. Japanese Laid-Open Patent Publication No. 11626° discloses a liquid crystal panel in which a separation device and a deep crack (dash) are formed in the thickness direction of the plate glass or the laser beam for penetration. The mother glass substrate is placed on a vacuum-adsorbable sheet material removal platform (for example, the material removal portion Z2 of FIG. 15) and the product sheet of the product size is separated from the liquid crystal by the transport robot (reverse robot 45) along the crack. Separating the mother substrate of the panel. In the separating apparatus, a plurality of panel sheets are sequentially transferred from the mother substrate placed on the material removing platform 22 by the transport robot to the next step 'At this time, the panel sheets are mutually Separated in turn. However After the panel piece is transported, a plurality of unnecessary end materials remain on the material removing platform, and each time the new mother substrate is processed, the end materials and the fine glass chips are removed from the material removal platform. The completely removed operation seriously hinders the improvement of production efficiency. 200946469 Moreover, the broken platform is formed corresponding to a certain size of the mother glass substrate, so if the size of the mother glass substrate is changed, it may be required to break the redesign of the platform or In the case of a change in the production efficiency of the product panel of each of the mother glass substrates, it is necessary to change the installation position or the operation program of the transport robot or the like, which hinders the improvement of the production efficiency. SUMMARY OF THE INVENTION An object of the present invention is to provide a separating apparatus which can easily remove a member without a scratch on the panel sheet. Further, the object of the present invention is to obtain the number of product panels for each sheet of the flat display panel. Change, or the case where the size of the flat panel w is changed It is easy to make the separation step efficient in this case. One-to-small micro-knife-carving 11 is separated from the flat-panel display panel which forms the stencil of the panel piece separated into the size of the product, and the separation of the aforementioned panel pieces is separated. The device is composed of a plurality of platforms and a mobile device, wherein the plurality of platforms attract and fix one of the I-side display panels, and the one of the plurality of platforms is opposite to the other platforms. Relatively moving in the direction of the axis on the main surface of the flat display body panel, and moving in the direction of the axis, where the above-mentioned plurality of platforms are fixed on the plurality of platforms to the above-mentioned planar display body moving device In the state of the axis L; in the state of the movement of the above-mentioned movement, the plurality of adjacent upper ones are cut off by the unnecessary members between the sheets. 5 200946469 Preferably, the separating device further includes: a guide shaft extending in a direction of a yaw axis of the main surface of the flat display body panel; a branch body engaging with the guide shaft, and the plurality of platforms At least a portion of the support is movable along an axis of the guide shaft, and a conveying device that feeds the support along the axis (four) of the guide shaft. In the above separating apparatus, preferably, at least a part of the plurality of platforms is respectively composed of a platform base and a suction (four) fixed platform, and the attraction fixing platform is placed on the platform base to attract and fix the flat display. The above-mentioned mobile device is composed of at least one of the i-th device and the second device, wherein the first device relatively moves the portion of the plurality of platform bases to the other platform bases, The 帛2 device fixes one of the plurality of suction-fixing platforms described above to the other of the above-mentioned attractions: relative movement. Here, by the above-mentioned movement of the above-mentioned first or second device in a state in which one of the above-mentioned flat display body panels is attracted and fixed on the plurality of attraction fixing platforms, a plurality of adjacent upper plates can be connected There is no need to remove the components between. Preferably, in the above separating device, it is further described that the main surface of the flat display body panel is oriented, the guide is engaged, and at least ^: :: of the plurality of platforms is along the guide axis The axis moves; and the conveying device transports the support along the := axis. In the above separating apparatus, preferably, at least a part of the plurality of stages has a coupling mechanism that couples adjacent platforms to each other. In the above separating apparatus, preferably, the plurality of platforms 2 (four) 6 200946469 are arranged. The separation method of the present invention is a method of separating a flat display panel having a scribe line which is separated into a panel piece of a product size into the above-mentioned respective panel sheets. In the separating method, 77, the plurality of panel sheets which are formed on the flat surface display surface are attracted to the door and are fixed on a plurality of platforms, and the plurality of platforms are - Qiu Bazhe' Relative to the other platforms, at least one of the axial directions on the main surface of the upper flat display body panel moves. Thereby, by φ φ, the plurality of panel pieces adjacent to each other in the direction are enlarged, and the interval between the plurality of panel sheets is removed. In the above separation method, the age of #兔, the description of the 4* 敕隹 is based on the above-mentioned plane display 艚 and the size of the plate and/or the face of each piece (4) is not decent. Preferably, in the separating device, each of the panel sheets of the flat display panel is composed of a TFT substrate and a cf substrate stacked thereon. In the present invention, the TFT substrate is placed on the lower side and the cp is a red one. The CF substrate is placed on the upper side and separated. [Effect of the Invention] In the present invention, the state of the surface of the display panel is fixed on the platform. The movable platform moves relative to the fixed umbrella & 隹^ 疋8, so that:: the separation of the panels from each other without the need for components, etc. will be:: removed, and due to its own weight And it falls, so only the panel of the size of the product is obtained on each platform.

^ , 茺係孩方式,可於使顯示側之CF 土板位於上側之狀態下(亦即,其也l CF基板上不會留有劃痕) 進仃分離作業。 7 200946469 本發明中’於作為分離對象之平面顯示體面板之母美 板之大小(包含世代顯示之規格大小)或每一片之面板獲 取數量在分離步驟中被改變的情形下,能夠使其計劃變更 自動化並高速化。 【實施方式】 以下參照圖式對發明之實施形態進行說明。於圖式 中’對相同之構件給予共同之符號。 首先,對本發明之分離裝置之加工對象進行說明。於 包含液晶顯示用面板、PDP面板、LC〇s面板等的平面顯示 體面板(母基板),形成有製品大小之複數個面板片。如 圖1之(A)與(B)之俯視圖與側視圖所示,於平面顯示 體面板w,利用設置於上下玻璃板之間之密封圈將上下 玻璃板相互接合’且從注入口 PI向由該密封圈z所包圍之 間隙注入液晶。於圖示之平面顯示體面板w之丨例中形^ , 茺 方式 方式 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , 7 200946469 In the present invention, in the case where the size of the mother panel of the flat display panel as the object to be separated (including the size of the generation display) or the number of panel acquisitions per sheet is changed in the separation step, it is possible to plan Change automation and speed up. [Embodiment] Hereinafter, embodiments of the invention will be described with reference to the drawings. In the drawings, the same components are given the same symbol. First, the object of processing of the separation apparatus of the present invention will be described. A flat display panel (mother substrate) including a liquid crystal display panel, a PDP panel, an LC〇s panel, and the like is formed with a plurality of panel sheets having a product size. As shown in the top view and the side view of FIGS. 1(A) and (B), the upper and lower glass plates are joined to each other by a seal ring disposed between the upper and lower glass plates on the flat display body panel w and from the injection port PI The liquid crystal is injected into the gap surrounded by the seal ring z. The shape of the body panel w is shown in the plane of the figure.

成有6個面;片 w。品U 面板片W於該例中具有突出部。為了 :平面顯示體面板W分離6個面板片w,於上下玻璃板之 表面於面板片w之周圍藉由劃線裝置施有劃線。此處,在 於平面顯示體面板用之 母基板之分割步驟中’使用了能夠 使垂直裂痕形成達到基板 扳之厚度之80%以上之深度的高滲 透性之劃線用輪式刀前緣Γ M m 4,1 m ^ ( 乂下僅記作刃前緣)的情形下, 木用利用經簡化之折斷梦番+上 之厚度為先前之主流即:。7折斷步驟,而I於母基板 形,即便不採用折斷步驟,二毫!以下之厚度之情 亦可於藉由尚滲透性之刃前緣 200946469 之劃線步驟中’形成到達基板之背面側的垂直裂痕。於此 情幵> 下’柄·作「整體切割(full body cut )」,不需要使母 基板反轉後沿劃線使其折斷之大規模之折斷步驟。而且, 照射雷射可形成與上述相同之「整體切割」之垂直裂痕。 於以下之實施形態中’以上述經過整體切割之平面顯示體 面板用之母基板作為分離之對象來進行說明。 [第1實施形態] 圖2係本發明之第丨實施形態之分離裝置之前視圖。 ^ 各平台如(Τ1_ΤΓ) ( T2a-T2a,)( T2b-T2b,) ( T3-T3,), 為由下側之平台基座ΤΙ,、T2a,、T2b,、T3,與上側之吸附固 定平台Tl、T2a、T2b、T3所構成之2層構造。上側之吸附 固疋平台T1、T2a、T2b、T3設置成分別相對於下側之平台 基座1'1,、丁2&,、丁2151、丁3,在圖中左右方向(設為又軸方向) 上移動自如。而且,於該等之上側之吸附固定平台,具備 用以對平面顯示體面板W進行吸引固定之吸附固定裝置。 吸附固定平台T1〜T3,能夠對需要吸附之位置之平台使吸 附動作進行。 在於圖2所示之3個平台配置於一列之狀態下,各個 平台(ΤΚΤ1,)、(Τ3_Τ3,)受配置於垂直方向之2座支撐 板Ua、lib支撐。於支撐兩側之平台基座T1,及Τ3,之支撐 板lla之特定部固定有氣缸21,氣缸21之氣缸軸22呈 Ώ 予形狀,其另一端結合於吸附固定平台τι及Τ3之 側緣。藉由該機構,吸附固定平台Τ1及Τ3藉由氣缸2i之 驅動而分別向左側(箭頭a方向)與右側(箭頭b方向) 9 200946469 滑動移動。吸附固定平台T2a與T2b藉由相互結合或解除 結合之結合機構30結合。 〇 水平方向之2根導軸13配置於2塊側板14之間,支 樓平台基座T1,、T2a,、T2b,及T3,之支撐板U & iu藉由 水平之2根導轴13被支撑為可沿導軸i3移動。支樓板n 及⑴藉由襯套U而安裝於導轴13上,藉由配設於觀套 12之鎖銷p而被固定。於安裝基部可進而分別配設搬送鎖 定機構該搬送鎖定機構19可使各平台沿導轴13移動 至任意之位置並加以鎖定。在此情形下,由於搬送鎖定機 構19具有鎖定機構’故可省略上述之配設於襯套η之鎖 銷p。而且’於側板14之下端固定有台123,該些台座23 可沿導軌24於與該紙面垂直方向移動。 之3個1 3所不之分離裝置中’於由由以上之構成所構成 之口個平台構成之單元m之背後為與其相同之單元⑴。 於單兀U2之一個側板14之特定部 ^ . A , 裝有軋缸25,該氣缸 25之氣缸軸26之另一端部結合於單 〇 - TT1 早70 U1側之側板14。(於 僅使用卓兀m之情形’不需要氣紅…)例如若對單元 U2進仃半固定,使氣缸25作動, 頭c方向軸方向)移動。早…導軌24向箭 圖3係表示平台為6個之情形,圖4係表示將平台役 為4個(紙面内側之2個平台囷示 ° 此情形下,在圖”,構成i個平台:7之前視圖, 丁2&及T2b被分離,藉由結合機構 ^吸附固定平台 定平二T1月M m ^ 再30而分別結合於吸附固 -千』及T3。因此,於吸附固定平台τι移動時,與吸 10 200946469 附固定平心成為一體而移動,而 T3移動時,與吸附固定平台-成為一體而㈣。 使用圖5對平台為6個時 ^ 町心刀離動作進行說明。此處, 根據平面顯示體面板之大小 处 叹/4母一片之面板獲取數量, 將複數個平台移動至可吸弓丨固 _ 疋十面顯不體面板之面板片 之位置。在此例中,將平面顯 卞囬顯不體面板W之每一片之製品 面板獲取數量從4片變為6片,甘冷> 一 。^ 並進仃以下說明。另外, ❹There are 6 faces; the piece w. The product U panel sheet W has a projection in this example. In order to separate the six panel sheets w from the flat display panel W, the scribing means is applied to the surface of the upper and lower glass sheets by the scribing means around the panel w. Here, in the dividing step of the mother substrate for the flat display body panel, a high-permeability wheel-blade front edge Γ M which can form a vertical crack to a depth of 80% or more of the thickness of the substrate is used. In the case of m 4,1 m ^ (the underarm is only recorded as the leading edge of the blade), the use of the simplified simplification of the dream of the wood is the previous mainstream: 7 break the step, and I is in the shape of the mother substrate, even if the breaking step is not used, two milli! The thickness of the following may also be used to form a vertical crack that reaches the back side of the substrate by the scribe step 200946469 of the permeable edge. In this case, the lower handle is a "full body cut", and there is no need for a large-scale breaking step in which the mother substrate is reversed and then broken along the scribe line. Moreover, the irradiation of the laser can form a vertical crack of the same "integral cut" as described above. In the following embodiments, the mother substrate for the flat display panel which has been integrally cut as described above will be described as a separate object. [First Embodiment] Fig. 2 is a front view of a separating apparatus according to a third embodiment of the present invention. ^ Each platform such as (Τ1_ΤΓ) (T2a-T2a,) (T2b-T2b,) (T3-T3,), is the bottom of the platform base ΤΙ, T2a, T2b,, T3, and the upper side of the adsorption fixed A two-layer structure composed of platforms T1, T2a, T2b, and T3. The upper adsorption solidification platforms T1, T2a, T2b, and T3 are disposed respectively with respect to the lower platform base 1'1, Ding 2 &, Ding 2151, Ding 3, in the left and right directions in the figure (set to the axis Direction) Move freely. Further, the adsorption fixing platform on the upper side is provided with an adsorption fixing device for sucking and fixing the flat display panel W. The adsorption fixed platforms T1 to T3 can perform an adsorption operation on a platform at a position to be adsorbed. In the state in which the three platforms shown in Fig. 2 are arranged in a row, each of the platforms (ΤΚΤ1,) and (Τ3_Τ3) is supported by the two support plates Ua and lib arranged in the vertical direction. The cylinder base 21 is fixed to the platform base T1 on both sides of the support, and the specific portion of the support plate 11a. The cylinder shaft 22 of the cylinder 21 has a shape of a cylinder, and the other end is coupled to the side edges of the adsorption fixing platforms τι and Τ3. . With this mechanism, the adsorption fixed stages Τ1 and Τ3 are slidably moved to the left side (arrow a direction) and the right side (arrow b direction) 9 200946469 by the driving of the cylinder 2i. The adsorption fixing platforms T2a and T2b are joined by a bonding mechanism 30 that is coupled or uncoupled to each other. The two guide shafts 13 in the horizontal direction are disposed between the two side plates 14, the support platform bases T1, T2a, T2b, and T3, and the support plates U & iu are guided by the horizontal guide shafts 13 It is supported to be movable along the guide axis i3. The slabs n and (1) are attached to the guide shaft 13 by the bushing U, and are fixed by the lock pin p disposed on the cover 12. Further, a transport lock mechanism may be further disposed at the mounting base. The transport lock mechanism 19 allows each platform to be moved to an arbitrary position along the guide shaft 13 and locked. In this case, since the transport lock mechanism 19 has the lock mechanism, the lock pin p disposed above the bushing n can be omitted. Further, a table 123 is fixed to the lower end of the side plate 14, and the pedestals 23 are movable along the guide rail 24 in a direction perpendicular to the paper surface. The three units of the three separate units are the same unit (1) behind the unit m composed of the above-mentioned platform. A specific portion of a side plate 14 of the unit U2 is provided with a rolling cylinder 25, and the other end portion of the cylinder shaft 26 of the cylinder 25 is joined to the side plate 14 of the side of the single 〇-TT1 70 U1. (In the case where only Zhuo M is used, no air red is required...) For example, if the unit U2 is half-fixed, the cylinder 25 is actuated, and the head c is moved in the direction of the axis). As early as the guide rail 24 arrow diagram 3 shows the situation of the platform, Figure 4 shows that the platform is 4 (the two platforms on the inside of the paper show ° in this case, in the figure), constitute i platforms: 7 Before the view, D2 & and T2b are separated, and are combined with the adsorption solid-thousand and T3 by the bonding mechanism ^ adsorption fixed platform to fix the two T1 month M m ^ 30. Therefore, when the adsorption fixed platform τι moves , and the suction 10 200946469 is attached to the fixed flat center and moves, and when the T3 moves, it is integrated with the adsorption fixed platform - (4). When the platform is 6 when using Fig. 5, the heart knife is separated from the action. Here, According to the size of the panel of the flat display body panel, the number of panels of the slap/4 mother piece is moved, and the plurality of platforms are moved to the position of the panel piece of the panel which can be sucked and smashed. In this example, the plane is flat. The number of the product panels of each piece of the display panel W is changed from 4 pieces to 6 pieces, and the coldness is followed by the following description. In addition, ❹

Q 平面顯示體面板W之大小不改變。 對將平台從圖4所示$ 4伯1 + ^ __ 之4個之排列變為圖2及圖3所 示之6個之排列的動作進行讀 一 切卄返仃說明。首先,驅動支撐圖4所 示之下部之平台基座T2a,及T2b,之各切板η之搬送鎖定 機構,使吸附固定平台T2a與T2b沿水平軸13移動並 如圖2所示’藉由結合機構3〇結合吸附固定平台T2狂與 T2b。其次,對圖3所示之氣红25進行驅動,透過氣缸軸 7對單Am肖單元U2<間隔進行調整。藉此,決定各平 台之位置,以使各面板片wl〜w6位於各平台上。其次,如 圖5之(a ),將經劃線之平面顯示體面板w (參照圖J ) 載置於6個平台上。並且,將平面顯示體面板襌吸引固定 於各平台。於此狀態下,平面顯示體面板w由下側之TFT 基板與堆積於其上之CF基板所構成,且為如圖丨所示之施 有劃線之狀態。劃線係形成於上側表面與下側表面。 並且’藉由氣缸21 (圖2)之驅動,使單元υι及U2 之兩側之吸附固定平台T1及T3分別向箭頭a、箭頭b方向 (平面顯示體面板之主面上之—軸方向)移動數毫米程 11 200946469 度藉此,外側之面板片w 1、w2、w5、w6向離開中央之2 個面板片w3、w4之方向移動,因此,面板片之間之無需的 中央去除材Q2從面板片上被切除,並因自身重量而落下。 其次,如圖5之(b)所示,藉由氣缸25 (圖3)之驅 動,使單元U1向箭頭c方向(平面顯示體面板之主面上之 另一轴方向)移動數毫米程度。藉此,面板片w2、w4、w6 向離開面板片wl、W3、w5之方向移動,因&,此次面板 片之間之無需的中央去除材q2,從面板片上被切除,並因自 身重量而落下。只要係此分離方式,則即便面板片具有突 ❹ 出部,亦可在使顯示側之CF*板處於上侧之狀態下,進行 分離作業而不會於CF基板上留有劃痕。 周緣部之切除材Q1之切除雖可以與先前相同之方式進 仃,但會由於上述之動作而被自然地切除並落下。平台為4 個之It形下之動作亦與上述之動作相同,於各平台僅保留 面板片W。各平台之吸引固定動作被解除後,該等面板片w 藉由其他搬送機等被搬送至貯藏庫(st〇ck)等。 如此,於平面顯示體面板w之每一片之製品面板獲取 ❹ 數量改變之情形下,X軸及Y軸方向上之吸附固定平台之 刀離、結合及移動能夠自動化進行而無需依靠手動操作, 因此,能夠高速且精確地進行各平台之位置改變。 而且使平σ移動以使得面板片之間之相對距離變 大’藉此’不僅面板片之分離,甚至位於面板片之間之端 材亦能被除去。 於本實施形態中,在圖3巾,將單元U2it行固定,使 12 200946469 單元U1向箭頭c方向移動,但亦 J馮使單元υι及單元m 可相互向相反方向移動之構成。 平台之數量為6個(藉由結:為本實施形態中, 有更多之平台或更多之單元數之系^ ’但亦可適用於具 於本實施形態中’對未改變平面顯 而將平面顯示體面板W之每一 κ ★勒 锻νν弋大小 u m ^ , u 之製品面板獲取數量從4 片變為6片之例進行了說明, 示體…之作為母面板之大二即便在平面顯 …之全長或C方向心=的情形:只要對單元 ^ 6)之可動範圍進行設定 並決定裝置之大小,以同樣地使 a Λ , m 合十α移動而可排列於適 备之位置,便能夠容易地應對上述情況。 通 例士 :本實施Φ嘘中’將全部之平台基座設為可動式,伸 :如亦可僅使單元U1W2之平台基座T1,為固定式: 而使其他之平台基座為可動式。 鲁 =施形態中,單元⑴及單元仍之平台基座如 白上2 上結合及分離,但'料為可在γ軸方 向上結合及分離。 石 導軸機構具備2根水平軸13,該2根水平軸i =從軸線方向來看,全部之軸線位於沿1個傾斜面1, 二=構件Q2不會停留在水平軸13上而引導向斜 之::進而,於水平軸13之上位置設置用以吹出 吹出口’藉此’可更精確地引導向斜槽15。 [第2實施形態] 使用圖6〜圖9對本發明之第2實施形態進行說明。 13 200946469 省略施形態中,與第1實施形態之不同之處在於: +台沿水平軸u移動之搬送鎖定機構19,以及 =使:及附固定平台T1〜T3在平台基座τι,〜τ3,上移動 ,且吸附固定平台T1〜Τ3與平台基座T1,〜Τ3, 、了 一體。於第1實施形態中,其構成為,^母基板之尺 寸被改變或面板片之尺改 ,τ 6 - ,. M 町各千台之配置位置 動地改變’而於第2實施形態中,作 動來改變各平台之位置,M W U人^須以手 位置,但裝置可大幅簡化。 〇 如圖6之立體圖所示,第2 “個平台所構成’各平台對應於載置 面顯示體面板w之各面板片 :千 係2台寬度較窄之平么T2a、T?l_ 另外’中央之平台 卞口 T2a、T2b合為一體所 係使載置於平台位置上 斤侍者。各平台 附固定平台T1〜T3與上述之平台基座τ :。上之吸 形成為一體。吸附固定平Α 3(省略圖示) 口疋十台Τ1〜Τ3,能夠 置之平台使吸附動作進行。 f㊉要吸附之位 ❹ 圖7係表示從圖6中之箭頭方向所觀窣到 圖7中表示了近處之丨罝 察至丨之侧視圖。 <丨平兀’但背後之 造。於設於自平台Τ1ΓΑ从τ 干兀亦為相同之構 ν丹他平台亦同) 11的2個襯套12,貫诵古向下方之支撐板 員通有2根水平之 由鎖銷P鎖定於沿水平站 子平台T可藉 定於兩側之側板】4。於平么任意位置。導輪13自身固 15用以接受上述切除片等端材下方"又置有斜槽】5,該斜槽 圖“系表示從平面顯示 奴W獲得4個面板片脊之 14 200946469 情形。在此情形下,如側視圖之圖9所示,寬度較窄之平 台T2a、T2b被分割,且分別與相鄰之平台丁〗、丁3合為— 體。另外,從左端所示之側板14之側視 轴U之位置不僅在上下方向,且在左右方向相互偏= 於各平台上載置在劃線步驟中被整體切割之母基板,則母 基板之周邊谷易脫落之端材由於自身重量而從各小平台之 間落至斜槽15内。 雖藉由實施形態對本發明進行了說明,但本發明並不 限定於此。業者應知,亦可有其他實施形態或變形。 圖 係表示從平面顯示體面板至製品大小之面板片 分割之過程的圖。 圖2係本發明之第1實施形態之分離裝置之前視圖。 圖3係本發明之帛1實施形態之分離裝置之俯視圖。 ❹ 圖4係本發明之第1實施形態之分離裝置之前視圖。 圖5係表示本發明之第1實施形態之分割動作的圖。 圖6係本發明之第2實施形態之分離裝置 上之夏於具 +面顯不體面板的圖。The size of the Q flat display body panel W does not change. The operation of changing the arrangement of the platform from the arrangement of four of $4, 1 + ^ __ shown in Fig. 4 to the arrangement of six of the two shown in Fig. 2 and Fig. 3 is described. First, driving the platform base T2a supporting the lower portion shown in FIG. 4, and T2b, the transport locking mechanism of each of the cutting plates η, moving the adsorption fixed platforms T2a and T2b along the horizontal axis 13 and as shown in FIG. The bonding mechanism 3〇 combines the adsorption fixed platform T2 mad with T2b. Next, the gas red 25 shown in Fig. 3 is driven, and the single Amshaw unit U2 < interval is adjusted through the cylinder shaft 7. Thereby, the position of each platform is determined such that the panel sheets w1 to w6 are located on the respective platforms. Next, as shown in Fig. 5(a), the lined flat display body panel w (refer to Fig. J) is placed on six platforms. Further, the flat display panel 襌 is attracted and fixed to each platform. In this state, the flat display panel w is composed of the lower TFT substrate and the CF substrate stacked thereon, and is in a state of being marked as shown in FIG. A scribing line is formed on the upper side surface and the lower side surface. And by the driving of the cylinder 21 (Fig. 2), the adsorption fixed platforms T1 and T3 on both sides of the unit υι and U2 are respectively directed in the direction of the arrow a and the arrow b (the axis direction of the main surface of the flat display panel) The movement of a few millimeters is 11, and the outer panel sheets w 1 , w2 , w5 , and w6 are moved in the direction away from the two panel sheets w3 and w4 in the center, so that the central removal material Q2 between the panel sheets is unnecessary. It is cut off from the panel piece and falls due to its own weight. Next, as shown in Fig. 5(b), by the driving of the cylinder 25 (Fig. 3), the unit U1 is moved by a few millimeters in the direction of the arrow c (the other axial direction on the main surface of the flat display panel). Thereby, the panel sheets w2, w4, and w6 move in the direction away from the panel sheets w1, W3, and w5, and the unnecessary central removal material q2 between the panel sheets is removed from the panel sheet due to & Falling down by weight. According to this separation method, even if the panel piece has the protruding portion, the separation operation can be performed while the CF* board on the display side is on the upper side without scratching the CF substrate. Although the excision of the excised material Q1 at the peripheral portion can be performed in the same manner as before, it is naturally removed and dropped due to the above-described action. The action of the four-shaped It-shaped platform is also the same as the above-mentioned action, and only the panel W is retained on each platform. After the attraction fixing operation of each platform is released, the panel sheets w are transported to a storage (st〇ck) or the like by another conveyor or the like. In this way, in the case where the number of the product panels of each of the flat display body panels w is changed, the knife separation, bonding and movement of the adsorption fixed platform in the X-axis and Y-axis directions can be automated without manual operation. The position change of each platform can be performed at high speed and accurately. Moreover, the flat σ is moved so that the relative distance between the panel sheets becomes larger, whereby not only the separation of the panel sheets but also the ends between the panel sheets can be removed. In the present embodiment, in the case of Fig. 3, the unit U2it is fixed, and the unit 20091 is moved in the direction of the arrow c. However, the unit υ1 and the unit m can be moved in opposite directions. The number of platforms is six (by the junction: in this embodiment, there are more platforms or more units of the number ^ 'but can also be applied to the present embodiment, 'the unchanging plane is displayed The case where the number of the product panels of the flat display body panel W is changed from 4 pieces to 6 pieces is shown in the example of the product panel. In the case of the full length of the plane or the C direction of the C direction: as long as the movable range of the unit ^ 6) is set and the size of the device is determined, a Λ , m 十 α α can be similarly moved and arranged in a suitable position. This can easily cope with the above situation. General: In this embodiment, the entire platform base is made movable, and the platform base T1 of the unit U1W2 can be fixed only: the other platform bases are movable. Lu = in the form of the structure, the unit (1) and the still platform base of the unit are combined and separated on the white 2, but the material is combined and separated in the γ axis direction. The stone guide shaft mechanism has two horizontal shafts 13 which are viewed from the axial direction, all of which are located along one inclined surface 1, and the two members Q2 do not stay on the horizontal shaft 13 and are guided to Oblique: Further, a position above the horizontal shaft 13 is provided to blow out the air outlet 'by this' to guide the chute 15 more accurately. [Second Embodiment] A second embodiment of the present invention will be described with reference to Figs. 6 to 9 . 13 200946469 In the omitted embodiment, the difference from the first embodiment is that: + the transport lock mechanism 19 that moves along the horizontal axis u, and the fixed platform T1 to T3 on the platform base τι, τ3 , moving up, and the adsorption fixed platform T1 ~ Τ 3 and the platform base T1, ~ Τ 3, and integrated. In the first embodiment, the size of the mother substrate is changed or the size of the panel is changed, and the arrangement positions of the thousands of τ 6 - , M Mcho are dynamically changed. In the second embodiment, In order to change the position of each platform, the MWU person must use the hand position, but the device can be greatly simplified. As shown in the perspective view of Fig. 6, the second "constitution of each platform" corresponds to each panel of the display surface display panel w: the two series of two series are narrower T2a, T?l_ The platform of the central platform, T2a and T2b, is integrated into the platform to place the load on the platform. The fixed platform T1~T3 of each platform is integrated with the above-mentioned platform base τ: The upper suction is integrated. Α 3 (omitted from illustration) Ten Τ1ΤΤ3 can be placed on the platform to allow the adsorption operation to proceed. fThe position to be adsorbed ❹ Figure 7 shows the direction from the arrow in Figure 6 to Figure 7 A close look at the side view of the 。. <丨平兀' but behind the creation. The two linings are set on the platform Τ1ΓΑ from τ 兀 兀Set 12, the support plate member below the pass to the bottom of the pass has two levels of the lock pin P locked to the side plate along the horizontal station sub-platform T can be borrowed on both sides of the side plate] 4. At any position in the flat. Guide wheel 13 The self-solid 15 is used to accept the above-mentioned cut-off piece and the like under the end material " and has a chute] 5, the chute diagram W slave display plane obtained 4 14200946469 sheet panel ridge of the case. In this case, as shown in Fig. 9 of the side view, the terraces T2a and T2b having a narrow width are divided, and are respectively combined with the adjacent platforms D and D3. Further, the position of the side viewing axis U from the side plate 14 shown at the left end is not only in the up-and-down direction, but also in the left-right direction. The mother substrate is integrally cut in the scribing step on each of the stages, and the periphery of the mother substrate is The end material that the valley easily falls off falls from the small platforms to the chute 15 due to its own weight. Although the invention has been described by way of embodiments, the invention is not limited thereto. It should be understood by those skilled in the art that other embodiments or variations are possible. The figure shows the process of dividing the panel from the flat display panel to the size of the article. Fig. 2 is a front view of the separating apparatus according to the first embodiment of the present invention. Fig. 3 is a plan view showing a separating apparatus according to a first embodiment of the present invention. Fig. 4 is a front view of the separating apparatus according to the first embodiment of the present invention. Fig. 5 is a view showing a division operation in the first embodiment of the present invention. Fig. 6 is a view showing a summer panel and a face panel on the separating apparatus according to the second embodiment of the present invention.

圖7係本發明之第2實施形態之分離裝置 之前視圖。 ·^十口皁7L 上丄8係本發明之第2實施形態之分離裝置及載置於其 +面顯示體面板之囷。 圖9係本發明之第2實施形態之分離裝置之前視圖。 15 200946469 【主要元件符號說明】 W 平面顯示體面板 Z 密封圈 w、w 1 〜 w6 面板片 Q1 〜Q3、 Q2' 無需構件 U 突出部 PI 注入口 ΤΓ、T2a ,、T2b'、T3' 平台基座 Tl 、 T2a 、T2b 、 T3 吸附固定平台 11、 11a 、lib 支撐板 12 襯套 13 導軸 14 側板 15 斜槽 19 搬送鎖定機構 21、25 氣缸 22 汽缸軸 23 台座 24 導軌 26 氣缸軸 30 結合機構 P 鎖銷 U1、U2 早兀Fig. 7 is a front view of a separating apparatus according to a second embodiment of the present invention. - ^ 十口皂7L The upper part 8 is a separation device of the second embodiment of the present invention and a crucible placed on the + surface display panel. Fig. 9 is a front view of the separating apparatus according to the second embodiment of the present invention. 15 200946469 [Description of main component symbols] W-plane display body panel Z seal w, w 1 ~ w6 Panel piece Q1 ~ Q3, Q2' No component U protrusion PI injection port ΤΓ, T2a, T2b', T3' platform base Seat Tl, T2a, T2b, T3 Adhesive fixing platform 11, 11a, lib Support plate 12 Bushing 13 Guide shaft 14 Side plate 15 Chute 19 Transport locking mechanism 21, 25 Cylinder 22 Cylinder shaft 23 Seat 24 Guide rail 26 Cylinder shaft 30 Bonding mechanism P lock pin U1, U2 early

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Claims (1)

200946469 七、申請專利範圍: 1. 一種平面顯示體母基板之分離襞置,係從形成有用以 分離成製品大小之面板片之劃線之平面顯示體面板,分離 出前述各面板片,其特徵在於: 由複數個平台及移動裝置所構成,該複數個平台係吸 引並固定一片上述平面顯示體面板,該移動裝置使上述複 數個平台之一部分相對於其他上述平台,於該平面顯示體 面板之主面上的至少一轴方向進行相對移動; 於該複數個平台上固定一片該平面顯示體面板之狀態 下,可藉由該移動裝置向該至少一轴方向之移動,_ w 接之複數個該面板片之間的無需構件切除。 2. 如申請專利範圍第i項之平面顯示體母基板之分離 裝置,其更具備:導軸,於該平面顯示體面板之主面上之i 轴方向延伸;支撑體,與該導軸卡合,且將該複數個平台 之至少一部分支撐為可分別沿該導軸之軸線移動;以及^ 送裝置,沿該導軸之軸線搬送該支撐體。 3. 如申請專利範圍帛!項之平面顯示體母基板之分_ 裝置,丨巾,該複數個平台之至少一部分係分別由平么基 座及吸引固定平台所構成’該吸引固定平台載置於該:: 基座上,吸引並固定該平面顯示體面板, 該移動裝置係由第1裝置與第2裝置中之至少一個裝 置所構成,其中該第i裝置用以將該複數個平台基座之— 部分相對其他該平台基座移動,該第2裝置用以將該複數 個吸引固定平台之-部分相對其他該吸引固定平台移動; 18 200946469 藉由於該複數個吸引固定平台上吸引固定有一片該平 面顯不體面板之狀態下之該第1裝置或第2裝置進行之該 移動’可將相鄰接之複數個該面板片之間的無需構件切除。 4.如申請專利範圍帛3項之平面顯示體母基板之分離 裝置,其更具備:導軸’於該平面顯示體面板之主面上之i 轴方二延伸;支標體,與該導軸卡合,且將該複數個平台 ❹ Ο =至)-部分支揮為可分別沿該導軸之轴線移動;以及搬 送裝置,沿該導軸之軸線搬送該支撐體。 :如申請專利範圍第i項至第4項中任一項之平面顯示 體母基板之分離裝置,其中,該複數個平台之至少一部分 具備將相鄰接之平台相互結合之結合機構。 體母6其Γ請專㈣圍第1項至第4射任-項之平面顯示 土板之刀離裝置,其中’該複數個平台係二維配置。 八雜=鮮面顯示體母基板之分㈣法,係將形成有用以 刀離成製〇口大小之面板片之意丨丨嬙夕正工s 板片之劃線之千面顯示體面板,分離 為别述各面板片,其特徵在於: 將形成於該平面顯千# i 4 顯不體面板之該複數個面板片吸引並 固定於複數個平台上; a及51亚 之後,將該複數個早么# —τ 鮮口之—部分相對於其他該平台, :该平面顯示體面板之主面上的至少一轴方向移 該方向相鄰接之複數個該面板片之間隔擴大,據以將該複 數個面板月之間的無需構件切除。 6Λ 8.如申請專利範圍筮1 ε 方法,其更具備如下步驟 顯示體母基板之分離 ,驟.根據該平面顯示體面板之大小 19 200946469 及/或每一片之面板獲取數量,將該複數個平a ’ CJ砂勒至可吸 W固定該平面顯示體面板之面板片之位置。 9+申請專利範圍第7項或第8項之平面顯示體母基板 之分離方法,其中,言亥平面顯示體面板之各面板月係由TFT 基板及堆積於其上之CF基板所構成,使該TFT基板位於下 側、該CF基板位於上側進行分離作業。200946469 VII. Patent application scope: 1. A flat display body substrate separation device is formed by forming a body panel with a scribe line for separating a panel piece which is separated into a product size, and separating the aforementioned panel pieces, the characteristics thereof The utility model is composed of a plurality of platforms and a mobile device, wherein the plurality of platforms attract and fix one of the flat display panels, and the mobile device displays one of the plurality of platforms relative to the other platforms, and displays the panel on the plane. Relative movement of at least one axial direction on the main surface; in a state in which one of the flat display body panels is fixed on the plurality of platforms, the moving device can move to the at least one axis direction, and the plurality of _w are connected There is no need for component removal between the panels. 2. The separation device for a flat display mother-matrix substrate according to the invention of claim i, further comprising: a guide shaft extending in an i-axis direction on a main surface of the flat display body panel; and a support body and the guide shaft card And supporting at least a portion of the plurality of platforms to be movable along an axis of the guide shaft; and a feeding device for transporting the support along an axis of the guide shaft. 3. If you apply for a patent range! The plane of the item shows the sub-baseboard _ device, the towel, at least part of the plurality of platforms are respectively composed of a flat base and a suction fixed platform. The attraction fixing platform is placed on the base: Attracting and fixing the flat display panel, the mobile device is composed of at least one of the first device and the second device, wherein the i-th device is configured to partially share the plurality of platform pedestals with respect to the other platform Moving the base, the second device is configured to move the portion of the plurality of attraction fixing platforms relative to the other of the attraction fixing platforms; 18 200946469 by means of the plurality of suction-fixing platforms attracting and fixing one of the planar display panels The movement by the first device or the second device in the state can cut off unnecessary components between the plurality of adjacent panels. 4. The separation device for a planar display body-mother substrate according to claim 3, further comprising: an axis of the guiding axis on the main surface of the planar display panel; the branch body, and the guide The shaft is engaged, and the plurality of stages ❹ Ο = to - part of the branch is movable along the axis of the guide shaft; and the conveying device carries the support along the axis of the guide shaft. The separation device for a flat display mother-matrix substrate according to any one of the items of the present invention, wherein at least a part of the plurality of platforms has a coupling mechanism for joining adjacent platforms to each other. The body mother 6 is specially designed to use the plane of the first to fourth shots to display the earthboard knife off device, where the multiple platforms are two-dimensionally configured. Eight miscellaneous = fresh surface display body and mother substrate sub-division (four) method, will form a panel with a slab of the size of the slab of the slab of the slab Separating into different panel sheets, the plurality of panel sheets formed on the plane display panel are attracted and fixed on a plurality of platforms; after a and 51, the plurality早早么#—τ Fresh mouth—partially relative to the other platform: the plane displays at least one axis of the main surface of the body panel, and the interval between the plurality of panels adjacent to the direction is enlarged, according to No need to remove the components between the plurality of panels. 6Λ 8. As claimed in the patent scope 筮1 ε method, the method further comprises the steps of: displaying the separation of the body mother substrate, and displaying the size of the body panel according to the plane 19 200946469 and/or the number of panels per sheet, the plurality of Flat a ' CJ sander to absorbable W fixes the position of the panel piece of the flat display body panel. 9+ The method for separating the mother-substrate substrate in the plane of the seventh or the eighth aspect of the patent application, wherein each panel of the panel is formed of a TFT substrate and a CF substrate stacked thereon, so that The TFT substrate is located on the lower side, and the CF substrate is located on the upper side to perform separation. 八、圖式: (如次頁)Eight, schema: (such as the next page) 2020
TW098106310A 2008-02-29 2009-02-27 Separating device and separation method for plane display body substrate TWI419852B (en)

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