200921081 九、發明說明： 【發明所屬之技術領域】 【先=關於-種振動試驗設備。 覆承受ί荷^械^機械零件會在輪送時或使用時反 …ϋ者或特性改變的情形。因而’最好是在 m:機械1品或機械零件時，反覆對(試驗片）施 加射重來觀測舉動。 ’σ ΡΐίΖί達到這個目的’使用振動試驗設備。如同例 二_ —33_號專利公報中所述之設備’ …又備，在卫作台上面固件（試驗片），藉由外部 的致動器使該工作台在1軸、3轴或6軸方勿上振動。 上述公報中揭示：將工作台重疊成三段，在上段的 工=台上固定工件之構成（[構成）。第/構成中， 下段的工作台為在上下方向上振動，中段的{作台為相 對於下段的工作台在左右方向上振動 ’上段的工作台為 相對=中段的J1作台在前後方向上振動。本構成則是當 使下段的·χ作台振㈣，用來使中段及上段的工作台振 動之致動器可移位，#使中段的玉作台振動時，用來使 上段的工作台振動之致動器也可移位。因而，致動器彼 此間不會相互干涉，可以使上段的工作台及_定在該 工作台上面的試驗片在3個軸方向上振動。 另外上述公報中揭示：在1個工作台上安裝複數 個致動器而可在6個軸方向上振動之振動試驗設備，作 為振動試驗設備的另外一種構成（第二構成）。第二構 成中，藉由將致動器各個成為可一定程度的自由進行移 200921081 位（致動器可繞著其中一個軸轉動），使致動器一定程 度追隨工作台的移位。藉由此方式，致動器彼二間不^ 互相干涉，可以使工作台和被安裝在該工作台上面的^ 驗片在6個軸方向上振動。 【發明内容】 。。上述的第一構成中，用來使下段的工作台振動之致 動器，必須要有可以使3個工作台及其他2個致動器振 動的動力，故會導致振動設備變大型的問題。另外，用 來使上段和中段的工作台振動之致動器係以分別固定 在中&和下段的工作台而與工作台一起振動的方式構 成因而，‘致致動器本身相對於工作台的不平衡荷 重，會有因該不平衡荷重所造成的誤差成分含在施加給 工件的振動中的可能性。 另外，第二構成中，各致動器的擺動角度範圍大到 超過相當程度，會導致致動器彼此間相互干涉。因而， 為了要增大工作台振動的振幅，必須充分增大致動器之 驅動軸的長度，會有設備變大型的問題。另外，為了要 轉動致動ϋ本身’將使隸大重量的贿馬達之滾珠螺 桿機構當作致動ϋ來使職不容易，可制的致動器事 實上受限在油壓致動器和壓電致動器。再者，驅動兑中 -個致肺來紅作台移位，其他致動器之驅動轴的方 向則會改變（即是座標系統發生變化）。因此，為了要 獲得所期望的振動狀態，必須衡量座標系統來施加給各 致動器的參數Μ運算，如同第二構成的振動設 備中’使用用來Τ%速運#施加給各致動器的參數之處理 器等，導致設備的控制系統變複雜。 本發明係為了要解決上述㈣題而提案。即是本發 200921081 =目:是提供設備不會大型化或複雜化，可以使工作 口有^大振幅的振動之振動設備。 右.本發明的實施例所提供的振動試驗設備具 ΐ動ri卫作台在分別相互成垂直的[和第二方向上 ίϊϊίΓ和第二致動器、及可使工作台相對於第一致 相i於笛:方向上滑動之第—連結手段、及可使工作台 、；弟一致動器在第一方向上滑動之第二連結手段。 如此’本發明的實施例之振動試驗設備中，各致動 器可相對於工作台在與該致動器的振動方向成垂直之 方向上滑動。因而，即使用其中一個致動器來使工作台 振動’工作台仍會相對於其他的致動器滑動，所以不會 有其他的致動器移位的事態，也不會有其他致動器的振 動方向移位的事態。因此，本發明中，各致動器若有可 以使工作台或工件振動的動力即可。另外，依據本發 明’不轉動致動器仍可使工作台振動’故即使致動器的 驅動轴復短’仍可以使工作台有很大衝程的振動。加 上’其中一個致動器不會影響到其他致動器的舉動，故 致動裔的控制系統不會複雜化，可依照所期望的振幅、 頻率使工作台振動。因此，依據本發明，設備不會大型 化/複雜化’可使工作台有很大振幅的振動。 另外，形成為還具有可使工作台在與第一和第二方 向的雙方成垂直的第三方向上振動之第三致動器、及可 使工作台相對於第三致動器在第一和第二方向上滑動 地予以相連結之第三連結手段，第一和第二連結手段分 別可使前述工作台相對於第一和第二致動器在第三方 向上滑動地予以相連結之構成，藉由此構成來實現可在 三個軸方向上振動之振動試驗設備。 200921081 【實施方式】 以下，參考圖式來說明本發明的實施例。第一圖為 本發明的實施例的振動試驗設備之上視圖。本實施例的 振動試驗設備1係形成為將振動試驗的對象之工件固定 在工作台100的上面’用第―、第二、第三致動器2〇〇、 300、400，使工作台100和該工作台上面的工件在垂直 父叉3個軸方向上振動。此外，以下的說明中，將第一 致動器200使工作台1〇〇振動的方向（第一圖中的上下 方向）定義為X軸方向，將第二致動器3〇〇使工作台1〇〇 振動的方向（第一圖中的左右方向）定義為γ軸方向， 將第二致動器400使工作台振動的方向，即是錯直方向 (第一圖中與紙面成垂直的方向）定義為2轴方向。 第六圖為本發明的實施例之振動試驗設備的控制 系統之方塊圖。第一、第二、第三致動器2〇〇、3〇〇、400 刀別。又有振動感測益220、320、420。控制手段1〇根據 這些振動感測器的輸出來回授控制第一、第二、第三致 動器200、300、400(具體上是伺服馬達212、312、412)， 以這方式就可以依照所期望的振幅和頻率（這些參數通 常是以時間的函數作為設定），使工作台丨〇〇和安裝在 δ亥工作台上面的工件振動。 第一、第二、第三致動器200、3〇〇、400分別成為 在基座板202、302、402上安裝有馬達或動力傳導構件 等之構成。該基座板202、302、402則是藉由螺栓（未 顯示於圖）來固定在設備基座2上。 另外’設備基座2上，在接近基座板202、302、402 的複數個位置配置有調節器Α。調節器Α具有用螺栓 AB來固定在設備基座2之内螺紋部A1、及被鎖入到内 8 200921081 螺紋部A1之外螺紋部A2。外螺紋部八2為在圓筒面形 成有螺、、’文牙形頂部之圓柱狀的構件’藉由外螺紋部a〗 卡合到内螺紋部A1所形成之螺紋孔並轉動，即可使外 螺、”文。卩A2相對於對應的基座板進行前進後退。外螺紋 4 A2的知（對應於基座板為近處位置之側），形成為 大致球面狀，藉由該突出部與對應之基座板的側面相抵 接，可以進行基座板的位置微調整。另外，在外螺紋部 Α2的另一端（對應於基座板為遠處之側），形成有圖未 顯示之，、角板手用的六角孔。另外，一旦基座板、 302、402固定之後，以外螺紋部Α2不會因振動試驗從 基座板傳導到調整器Α之振動而產生鬆脫的情形下，將 螺帽A3安裝在外螺紋部A2。螺帽A3以該一端面抵接 到内螺紋部A1的方式安裝，由此狀態來鎖入螺帽A3 後裝入内螺紋部A1 ’讓軸力對外螺紋部a]及内螺紋部 A1產生作用，利用該軸力在外螺紋部A2及内螺紋部 A1的螺紋牙形頂部所產生的摩擦力，使内螺紋部A1不 會從外螺紋部A2鬆脫。 、其次，針對第一致動器200的構成進行說明。第二 圖為從Y轴方向（從第一圖的右側朝向左側）觀看本發明 的貫施例的第一致動器2〇〇之側視圖。該側視圖則為了 要呈現内部構造而除去其中一部分構造。另外，第三圖 顯示第一致動器200之上視圖，其係除去一部分之内部 構造。此外’以下的說明中，將沿著從第一致動器2〇〇 朝向工作台100之X軸的方向定義為「χ軸正的方向」， 將沿著從工作台100朝向第一致動器之X軸的方向定義 為「X軸負的方向」。 如弟一圖所示’相互焊接在一起的複數個橫樑 200921081 222a、及由頂部板222b所組成之框體222 ’藉由焊接來 固定在基座板202的上面。另外，用來使工作台100(第 一圖）振動之驅動機構210或將用來使驅動機構210的 振動運動傳導到工作台的連結機構230予以支撐所應用 之支撐機構240的底板242，經由未顯示於圖之螺栓來 固定在框體222的頂部板222b上面。 驅動機構210具有伺服馬達212、聯結器260、軸 承部216、滾珠螺桿218以及滾珠螺帽219。聯結器260 是用來將伺服馬達212的驅動軸212a與滾珠螺桿218 予以相連結。另外，軸承部216係藉由相對於支撐機構 240的底板242成垂直且經由焊接所固定之軸承支撐板 244來予以支撐，並可旋轉地支撐滾珠螺桿218。滾珠 螺帽219係以不會繞著該軸移動的方式，藉由軸承支樓 板244來支撐，並與滾珠螺桿218卡合。因而，驅動伺 服馬達212，滾珠螺桿旋轉，滾珠螺帽219則會在該軸 方向上（即是X軸方向）進行前進後退。該滾珠螺帽219 的運動，經由連結機構230，傳導到工作台10〇 ,以此 方式’工作台100則會在X軸方向上予以驅動。接著， 以依照復短的週期來切換伺服馬達212的旋轉方向的方 式控制伺服馬達212,以此方式就可以依照所期望的振 幅和周期使工作台100在X軸方向上振動。 、 94η 支撐板246與底板242垂直地焊接在支撐機構 之底板242的上面。伺服馬達212以驅動軸2] =支撑板246成垂直的方式單邊切在 、立面（X軸負方向侧的面）。在馬達支撐板246設 有開口部246a，伺服馬達212的驅動軸2l2a則3 ♦ 該開口部246a，在馬達支撐板246的另—面側與 200921081 桿218相連結。 此外，由於伺服馬達212單邊支撐在馬達支撐板 =46，故會在馬達支撐板246，尤其在與底板242的烊接 部’加諸很大的彎曲應力。為了要缓和該彎曲應力，在 底板242與馬達支撐板246之間，設置肋條248。 轴承部216具有經正面組合所組合之一對角接觸球 轴承216a、216b ( 216a為位於X軸負方向側的軸承， 216b為位於X軸正方向侧的軸承）。角接觸球軸承 216a、216b收納在軸承支撐板244的中空部中。在角接 觸球轴承216b的一面（X軸正方向側的面）設有軸承押 壓板216c ’用螺栓216d來將該軸承押壓板216c固定在 軸承支撐板244，以此方式，在χ軸負的方向上裝入角 接觸球軸承216b。另外，滚珠螺桿218中，對於轴承部 216在X軸負的方向側所相鄰之圓筒面形成有螺紋部 218a。形成為在該螺紋部218安裝内周形成有内螺紋之 軸環（collar) 217。藉由軸環217相對於滾珠螺桿218 轉動而在X軸正的方向上移動，在χ軸正的方向上裝入 角接觸球轴承216a。如此，因形成為在相互接近的方向 上裝入角接觸球軸承216a和216b，所以兩者相互密接， 使適切的預負載施加給轴承216a、216b。 其次’針對連結部230的構成進行說明。連結部23〇 具有：螺帽導引232、一對γ軸執道234、一對z轴軌 道235、中間載置台231、一對χ軸執道237、一對χ 軸滑塊233、以及滑塊安裴構件238。 螺帽導引232係固定在滾珠螺帽219。另外，一對 Y軸執道234均為在Y軸方向上延伸之執道，在上下方 向上並排固定在螺帽導弓1 232之χ軸正的方向側之端 200921081 部。另外，一對Z轴軌道235均為在Z轴方向上延伸之 軌道，在Y軸方向上並排固定在工作台100之X軸負的 方向侧之端部。中間載置台231係由與該Y轴的軌道234 分別卡合且設置在X轴負方向之Y轴滑塊231a，及與 該Z軸的軌道235分別卡合且設置在X軸正方向之Z 轴滑塊231b所構成，其係可相對於Y轴軌道234和Z 軸軌道23 5的雙向滑動所構成。 亦即，中間載置台231可相對於工作台100在Z軸 方向上滑動，且可相對於螺帽導引232在Y軸方向上滑 動。因此，形成為螺帽導引232可相對於工作台100在 Y軸方向和Z軸方向上滑動。因而，即使其他的致動器 300及/或400來使工作台100在Y軸方向及/或Z轴方 向上振動，螺帽導引232仍不會因而移位。即是因工作 台100之Y轴方向及/或Z轴方向的移位而造成的_曲 應力，不會加諸到滾珠螺桿218或軸承216、聯結器260 等。 一對X軸執道237均為在X軸方向上延伸之軌道， 在Y軸方向上並排固定在支撐機構240的底板242上 面。X軸滑塊233係與該X軸軌道237分別卡合，可沿 著X軸軌道237滑動。滑塊安裝構件238是一種以朝向 Y軸方向兩側擴張的方式固定在螺帽導引232的底面之 構件，X轴滑塊233則是固定在滑塊安裝構件238的底 部。如此，螺帽導引232經由滑塊安裝構件238和X軸 滑塊233導引到X軸執道237，以此方式，成為只可在 X轴方向上移動。 如此，由於螺帽導引232的移動方向只限制在X軸 方向，故驅動伺服馬達212來使滾珠螺桿218轉動，螺 12 200921081 ，^丨232 *與該螺帽導引232卡合的工作台則會 在A軸方向上進行前進後退。200921081 IX. Description of the invention: [Technical field to which the invention belongs] [First = related - vibration test equipment. Covering the situation where the mechanical parts of the machine will be reversed during the rotation or use. Therefore, it is preferable to apply a weight to (test piece) to observe the behavior when m: mechanical product or mechanical part. ‘σ ΡΐίΖί achieves this purpose' using vibration testing equipment. The device as described in the second patent document _33_ is also prepared, and the firmware (test piece) on the top of the table is made by an external actuator on the 1st, 3rd or 6th axis. Do not vibrate the shaft. In the above publication, it is disclosed that the table is superposed in three stages, and the structure of the workpiece is fixed on the upper stage = (configuration). In the first configuration, the table in the lower stage vibrates in the up and down direction, and the stage in the middle stage vibrates in the left and right direction with respect to the table in the lower stage. The table in the upper stage is the opposite side = the middle part J1 is in the front and rear direction. vibration. In the present configuration, when the lower stage is used as the table vibration (four), the actuator for vibrating the table in the middle and upper stages can be displaced, and # is used to make the stage of the upper stage vibrate when the middle stage is vibrated. The actuator of the vibration can also be displaced. Therefore, the actuators do not interfere with each other, and the upper stage table and the test piece set on the table can be vibrated in three axial directions. Further, the above publication discloses a vibration test apparatus which can mount a plurality of actuators on one table and can vibrate in six axial directions as another configuration (second configuration) of the vibration test apparatus. In the second configuration, the actuators are moved to a certain extent by a certain degree of free movement (the actuator can be rotated about one of the axes), so that the actuator follows the displacement of the table to a certain extent. In this way, the actuators do not interfere with each other, and the table and the test piece mounted on the table can be vibrated in six axial directions. SUMMARY OF THE INVENTION . In the above-described first configuration, the actuator for vibrating the lower stage must have the power to vibrate the three stages and the other two actuators, which causes a problem that the vibration device becomes large. In addition, the actuator for vibrating the upper and middle stages of the table is configured to be fixed to the table of the middle & and the lower stage to vibrate together with the table, thereby causing the actuator itself to be opposed to the table The unbalanced load has the possibility that the error component due to the unbalanced load is contained in the vibration applied to the workpiece. Further, in the second configuration, the range of the swing angle of each actuator is so large as to exceed a considerable extent, causing the actuators to interfere with each other. Therefore, in order to increase the amplitude of the vibration of the table, it is necessary to sufficiently increase the length of the drive shaft of the actuator, which may cause a problem that the device becomes large. In addition, in order to rotate the actuating jaw itself, it would be difficult to make the ball screw mechanism of the bribe motor with a large weight as the actuating jaw, and the actuator can be made limited in fact to the hydraulic actuator and Piezoelectric actuators. Furthermore, the drive shifts to a lung-to-red shift, and the direction of the drive shaft of the other actuators changes (ie, the coordinate system changes). Therefore, in order to obtain the desired vibration state, it is necessary to measure the parameter Μ operation applied to each actuator by the coordinate system, as in the vibration device of the second configuration, 'used to 各%速运# applied to each actuator The processor of the parameters, etc., causes the control system of the device to become complicated. The present invention has been proposed in order to solve the above (4) questions. That is, this issue 200921081 = Mesh: It is a vibration device that provides a device that does not become large or complicated, and can have a large amplitude vibration of the working port. The vibration test apparatus provided by the embodiment of the present invention has a tilting ri table which is perpendicular to each other [and a second direction and a second actuator, and can make the table relative to the first The first connecting means in the direction of the flute: sliding in the direction, and the second connecting means for sliding the table and the brother in the first direction. In the vibration test apparatus of the embodiment of the invention, each of the actuators is slidable in a direction perpendicular to the vibration direction of the actuator with respect to the table. Thus, even if one of the actuators is used to vibrate the table, the table will still slide relative to the other actuators, so there will be no other actuator displacements and no other actuators. The state of vibration shifting. Therefore, in the present invention, each of the actuators may have a power that can vibrate the table or the workpiece. Further, according to the present invention, the table can be vibrated without rotating the actuator, so that even if the drive shaft of the actuator is short, the table can be vibrated with a large stroke. Adding one of the actuators does not affect the behavior of the other actuators, so the control system of the activator is not complicated, and the table can be vibrated according to the desired amplitude and frequency. Therefore, according to the present invention, the apparatus does not become large/complexed, and the table can be vibrated with a large amplitude. Further, it is formed to further have a third actuator that can vibrate the table in a third direction perpendicular to both the first and second directions, and can cause the table to be in the first sum with respect to the third actuator a third connecting means slidably coupled in the second direction, wherein the first and second connecting means respectively connect the table to the first and second actuators in a sliding manner in a third direction, By this configuration, a vibration test apparatus that can vibrate in three axial directions is realized. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The first figure is a top view of a vibration test apparatus of an embodiment of the present invention. The vibration test apparatus 1 of the present embodiment is formed to fix the workpiece of the object of the vibration test on the upper surface of the table 100. The first, second, and third actuators 2, 300, and 400 are used to make the table 100. And the workpiece on the table vibrates in the direction of the three axes of the vertical parent fork. Further, in the following description, the direction in which the first actuator 200 vibrates the table 1 (the vertical direction in the first drawing) is defined as the X-axis direction, and the second actuator 3 is used to make the table The direction of vibration (the left-right direction in the first figure) is defined as the γ-axis direction, and the direction in which the second actuator 400 vibrates the table, that is, the direction of the straight line (the first figure is perpendicular to the plane of the paper) Direction) is defined as the 2-axis direction. Fig. 6 is a block diagram showing a control system of the vibration test apparatus of the embodiment of the present invention. The first, second, and third actuators 2, 3, and 400 are different. There are also vibration sensing benefits 220, 320, 420. The control means 1 来回 controls the first, second, and third actuators 200, 300, 400 (specifically, the servo motors 212, 312, 412) according to the outputs of the vibration sensors, in such a manner that The desired amplitude and frequency (these parameters are usually set as a function of time) oscillate the table 丨〇〇 and the workpiece mounted on the δHai table. The first, second, and third actuators 200, 3, and 400 are configured such that a motor, a power transmission member, and the like are attached to the base plates 202, 302, and 402, respectively. The base plates 202, 302, 402 are secured to the device base 2 by bolts (not shown). Further, on the apparatus base 2, a regulator 配置 is disposed at a plurality of positions close to the base plates 202, 302, and 402. The adjuster Α has a screw portion AB fixed to the inner thread portion A1 of the device base 2 and is locked into the inner portion 8 200921081 thread portion A1 outer thread portion A2. The male screw portion 八 2 is a screw-shaped member having a screw-shaped cylindrical surface, and the cylindrical member of the 'fault-shaped top portion' is engaged with the screw hole formed by the female screw portion A1 by the male screw portion a and is rotated. The outer screw, "text." A2 is advanced and retracted relative to the corresponding base plate. The outer thread 4 A2 is known (corresponding to the side of the base plate at the near position), and is formed into a substantially spherical shape by the protrusion The portion abuts against the side surface of the corresponding base plate, and the position of the base plate can be finely adjusted. Further, the other end of the externally threaded portion Α2 (corresponding to the far side of the base plate) is formed with a figure not shown. , the hexagonal hole for the gusset hand. In addition, once the base plate, 302, 402 is fixed, the externally threaded portion 不会2 is not released from the base plate to the vibration of the adjuster due to the vibration test. The nut A3 is attached to the externally threaded portion A2. The nut A3 is attached in such a manner that the one end surface abuts against the internal thread portion A1, and the nut A3 is locked in the state, and the internal thread portion A1 is inserted. The threaded portion a] and the internally threaded portion A1 act to utilize the axial force on the external thread The frictional force generated by the threaded top portion of the portion A2 and the female screw portion A1 causes the female screw portion A1 not to be released from the male screw portion A2. Next, the configuration of the first actuator 200 will be described. The figure is a side view of the first actuator 2A of the embodiment of the present invention viewed from the Y-axis direction (from the right side toward the left side of the first figure). The side view removes a part of the structure in order to present the internal structure. In addition, the third figure shows an upper view of the first actuator 200, which removes a portion of the internal configuration. Further, in the following description, along the X from the first actuator 2 toward the table 100 The direction of the axis is defined as "the positive direction of the x-axis", and the direction from the table 100 toward the X-axis of the first actuator is defined as "the direction in which the X-axis is negative". As shown in the figure of Fig. 1, a plurality of beams 200921081 222a welded together and a frame 222' composed of a top plate 222b are fixed to the upper surface of the base plate 202 by welding. In addition, the driving mechanism 210 for vibrating the table 100 (first drawing) or the bottom plate 242 of the supporting mechanism 240 for supporting the coupling mechanism 230 for transmitting the vibrational motion of the driving mechanism 210 to the table is supported via A bolt not shown in the figure is fixed to the top plate 222b of the frame 222. The drive mechanism 210 has a servo motor 212, a coupler 260, a bearing portion 216, a ball screw 218, and a ball nut 219. The coupler 260 is used to couple the drive shaft 212a of the servo motor 212 with the ball screw 218. Further, the bearing portion 216 is supported by the bearing support plate 244 which is perpendicular to the bottom plate 242 of the support mechanism 240 and fixed by welding, and rotatably supports the ball screw 218. The ball nut 219 is supported by the bearing support plate 244 so as not to move around the shaft, and is engaged with the ball screw 218. Therefore, the servo motor 212 is driven and the ball screw is rotated, and the ball nut 219 is moved forward and backward in the axial direction (i.e., in the X-axis direction). The movement of the ball nut 219 is transmitted to the table 10 through the coupling mechanism 230, whereby the table 100 is driven in the X-axis direction. Next, the servo motor 212 is controlled in such a manner that the rotational direction of the servo motor 212 is switched in accordance with the cycle of the complex short circuit, whereby the table 100 can be vibrated in the X-axis direction in accordance with the desired amplitude and period. The 94n support plate 246 is welded perpendicularly to the bottom plate 242 on the bottom plate 242 of the support mechanism. The servo motor 212 is cut in one side and the façade (surface on the negative side of the X-axis) so that the drive shaft 2] = the support plate 246 is perpendicular. The motor support plate 246 is provided with an opening portion 246a, and the drive shaft 2112a of the servo motor 212 3 ♦ the opening portion 246a is coupled to the 200921081 rod 218 on the other surface side of the motor support plate 246. In addition, since the servo motor 212 is unilaterally supported on the motor support plate = 46, a large bending stress is applied to the motor support plate 246, particularly at the nip portion of the bottom plate 242. In order to alleviate the bending stress, a rib 248 is provided between the bottom plate 242 and the motor support plate 246. The bearing portion 216 has one of the diagonal contact ball bearings 216a and 216b combined by the front surface combination (the 216a is a bearing on the negative side in the X-axis direction, and the 216b is a bearing on the positive side in the X-axis direction). The angular contact ball bearings 216a, 216b are housed in the hollow portion of the bearing support plate 244. A bearing pressing plate 216c is attached to one surface (the surface on the positive X-axis side) of the angular contact ball bearing 216b. The bearing pressing plate 216c is fixed to the bearing supporting plate 244 by a bolt 216d, and in this manner, the negative axis is negative. The angular contact ball bearing 216b is loaded in the direction. Further, in the ball screw 218, a threaded portion 218a is formed in a cylindrical surface adjacent to the bearing portion 216 on the negative X-axis side. A collar 217 having an internal thread formed on the inner circumference of the screw portion 218 is formed. The angular contact ball bearing 216a is inserted in the positive direction of the x-axis by the rotation of the collar 217 with respect to the ball screw 218 in the positive direction of the X-axis. Thus, since the angular contact ball bearings 216a and 216b are formed in the mutually approaching directions, the two are in close contact with each other, and the appropriate preload is applied to the bearings 216a, 216b. Next, the configuration of the connecting unit 230 will be described. The connecting portion 23A has a nut guide 232, a pair of γ-axis traversing 234, a pair of z-axis rails 235, an intermediate mounting table 231, a pair of yoke shafts 237, a pair of yaw shaft sliders 233, and a slide. Block ampere member 238. The nut guide 232 is fixed to the ball nut 219. Further, the pair of Y-axis trajectories 234 are all in the Y-axis direction, and are fixed side by side in the upper and lower directions toward the end of the positive side of the nut guide shaft 1 232, 200921081. Further, each of the pair of Z-axis rails 235 is a rail extending in the Z-axis direction, and is fixed side by side in the Y-axis direction to the end portion of the table 100 on the negative X-axis side. The intermediate stage 231 is a Y-axis slider 231a that is engaged with the Y-axis rail 234 and is disposed in the negative X-axis direction, and is engaged with the Z-axis rail 235 and is disposed in the positive direction of the X-axis. The shaft slider 231b is configured to be slidable relative to the Y-axis rail 234 and the Z-axis rail 23 5 . That is, the intermediate stage 231 is slidable in the Z-axis direction with respect to the table 100, and is slidable in the Y-axis direction with respect to the nut guide 232. Therefore, the nut guide 232 is formed to be slidable in the Y-axis direction and the Z-axis direction with respect to the table 100. Thus, even if the other actuators 300 and/or 400 vibrate the table 100 in the Y-axis direction and/or the Z-axis direction, the nut guide 232 is not displaced thereby. That is, the _ bending stress caused by the displacement of the table 100 in the Y-axis direction and/or the Z-axis direction is not added to the ball screw 218, the bearing 216, the coupler 260, and the like. Each of the pair of X-axis lanes 237 is a rail extending in the X-axis direction, and is fixed side by side on the bottom plate 242 of the support mechanism 240 in the Y-axis direction. The X-axis slider 233 is engaged with the X-axis rail 237, respectively, and is slidable along the X-axis rail 237. The slider mounting member 238 is a member that is fixed to the bottom surface of the nut guide 232 so as to expand toward both sides in the Y-axis direction, and the X-axis slider 233 is fixed to the bottom of the slider mounting member 238. Thus, the nut guide 232 is guided to the X-axis trajectory 237 via the slider mounting member 238 and the X-axis slider 233, in such a manner that it can only move in the X-axis direction. Thus, since the moving direction of the nut guide 232 is limited only in the X-axis direction, the servo motor 212 is driven to rotate the ball screw 218, and the screw 12 200921081, ^ 232 * is engaged with the nut guide 232 It will advance and retreat in the A-axis direction.
於滑塊安裝構件238之Y軸方向側其中―方的側面 ^圖中為靠自己這-方側’第三圖中為右側）施 紅位置檢測手段250。位置檢測手段250具有在X π菩二上隔著一疋間隔並排之3個接近感測器251、被 滑塊安裝構件238的側面238a之檢測用板252、 、0丨„。ο撐接近感測器251之感測器支撐板253。接近感 測為251是一種可將在各個接近感測器之前是否有任何 物體接近（例如，丨_以内）檢測出來之元件。由於 滑塊安裝構件238的側面238a與接近感測器251充分隔 開，故，近感測器251可以檢測是否在各個接近感測器 251之别有檢測用板252。振動試驗設備1的控制手段 1〇可以依據例如接近感測器251的檢測結果來回授控制 伺服馬達212 (第六圖）。 另外在支樓機構240的底板242上面，設有以從 X軸方向兩側爽著χ軸滑塊233的方式配置之規制塊體 =6。該規g制塊體236是用來限制螺帽導引232的移動 範圍。即是驅動伺服馬達212來使螺帽導引232朝向χ 軸正的方向持續移動，最終被配置在χ軸正的方向侧之 規制塊體236與滑塊安裝構件238則會相接觸，以上螺 帽導引232則不能再在χ軸正方向上進行更多的移動。 使螺帽導引232朝向χ軸負的方向持續移動也是同樣， 被配置在X軸負的方向側之規制塊體23 6與滑塊安裝構 件238相接觸，以上螺帽導引232則不能再在χ軸負方 向上進行更多的移動。 以上說明過之第一致動器200及第二致動器300， 13 200921081 除了设置的方向（X軸與γ軸對換）這點不同之外，構 造完全相同。因此，有關第二致動器300的詳細說明省 略。 其次，針對本發明的實施例的第三致動器4〇〇之構 成進行說明。第四圖為從X軸方向（從第一圖的下方朝 向上方）觀看工作台100和第三致動器400之侧視圖。 5亥側視圖也是為了要呈現内部構造而除去一部分。另 外，第五圖為從γ軸方向（從第一圖的左側朝向右侧） 觀看本發明的實施例的工作台1 〇〇和第三致動器4〇〇之 側視圖。第五圖也是為了要呈現内部構造而除去一部 分。此外’以下的說明中，將沿著從第二致動器3〇〇朝 =工作台100之Y軸的方向定義為γ軸正的方向，將沿 著從工作台1〇〇朝向第二致動器300之γ軸的方向定義 為Y軸負的方向。 如第四圖和第五圖所示’在基座板4〇2上設有：在 錯直方向上延伸之複數個橫樑422a、及由以從上面來覆 盖該複數個橫樑422a的方式配置之頂部板422b所組成 之框體422。各橫樑422a係下端分別焊接在基座板402 的上面’上端焊接在頂部板422b的下面。另外，支撐 機構440的軸承支撐板442，藉由未顯示於圖之螺栓， 固定在框體422的頂部板422b上。該軸承支撐板442 是一種支撐用來使工作台100 (第一圖）在上下方向上 振動之驅動機構41〇、或用來使藉由驅動機構410的振 動運動傳導到工作台之連結機構430所應用之構件。 驅動機構410具有伺服馬達412、聯結器460、軸 承部416、滚珠螺桿418、以及滾珠螺帽419。聯結器 460是用來將伺服馬達412的驅動軸412a與滾珠螺桿 14 200921081 418予以相連結。另外，軸承部416係固定在前述的軸 承支撐板442，形成為可旋轉地支撐滚珠螺桿418。滾 珠螺帽419係以不會繞著該軸移動的方式，藉由軸承支 樓板442來支撐，並與滾珠螺桿418卡合。因而，驅動 飼服馬達412，滾珠螺桿旋轉，滾珠螺帽419則會在該 軸方向上（即是Z軸方向）進行前進後退。該滾珠螺帽 419的運動經由連結機構430傳到工作台1〇〇，以此方 式’則會在Z軸方向上驅動工作台100。然後，以依照 很短的週期來切換伺服馬達412的旋轉方向的方式控制 伺服馬達412，以此方式就可以依照所期望的振幅和周 期使工作台100在Z軸方向（上下方向）上振動。 從支撐機構440之軸承支撐板442的下面，經由2 片連結板443固定在水平方向（XY平面）上擴張之馬 達支撐板446。馬達支撐板446的下面垂吊並固定著伺 服馬達412。在馬達支撐板446設有開口部446a，伺服 馬達412的驅動軸412a則是貫穿該開口部446a，在馬 達支撐板446的上面侧與滾珠螺桿418相連結。 此外，本實施例中，伺服馬達412之轴方向（上下 方向、Z軸方向）的尺寸大於框體422的高度，故伺服 馬達412的大部分被配置在比基座板402還要更低的位 置。因而’在設備基座2設置用來收納伺服馬達412之 空洞部2a。另外，在基座板4〇2設有用來穿過伺服馬達 412之開口部402a。 軸承部416係以貫穿軸承支撐板442的方式設置。 此外，軸承部416的構造因與第一致動器2〇〇的轴 216 (第—圖、第三圖）同樣，其詳細說明則省略。 其次’針對連結部430的構成進行說明。連結部43〇 15 200921081 具有：可動框體432、一對χ軸執道434、一對γ軸軌 道435、複數個中間載置台431、二對ζ軸軌道437及 二對Ζ軸滑塊433。 矸動框體432具有：被固定在滾珠螺帽419之框部 432a、及被固定在框部432a的上端之頂部板432b、及 以從頂部板432b的χ軸方向兩緣向下方延伸的方式固In the side of the Y-axis direction of the slider mounting member 238, the side of the square side is the right side of the third side in the figure. The position detecting means 250 has three proximity sensors 251 which are arranged side by side at intervals of X π 菩 , and a detection plate 252 , 0 丨 被 of the side surface 238 a of the slider mounting member 238 . The sensor support plate 253 of the 251. The proximity sense 251 is an element that can detect whether any object is approached (eg, within 丨_) before each proximity sensor. Due to the slider mounting member 238 The side surface 238a is sufficiently spaced apart from the proximity sensor 251, so that the proximity sensor 251 can detect whether or not the detection plate 252 is present in each of the proximity sensors 251. The control means 1 of the vibration test apparatus 1 can be based, for example, on proximity. The servo motor 212 (sixth drawing) is controlled by the detection result of the sensor 251. Further, the bottom plate 242 of the branching mechanism 240 is provided with a sleek slider 233 which is cooled from both sides in the X-axis direction. The control block = 6. The gauge block 236 is used to limit the range of movement of the nut guide 232. That is, the servo motor 212 is driven to continuously move the nut guide 232 in the positive direction of the yaw axis, and finally Configured on the side of the positive side of the x-axis The block body 236 is in contact with the slider mounting member 238, and the above nut guide 232 can no longer perform more movement in the positive direction of the x-axis. The continuous movement of the nut guide 232 in the negative direction of the x-axis is also Similarly, the gauge block 23 disposed on the negative side of the X-axis is in contact with the slider mounting member 238, and the above nut guide 232 can no longer move more in the negative direction of the x-axis. The first actuator 200 and the second actuator 300, 13 200921081 are identical in configuration except that the set direction (the X-axis is swapped with the γ-axis) is different. Therefore, regarding the second actuator 300 The detailed description is omitted. Next, the configuration of the third actuator 4A according to the embodiment of the present invention will be described. The fourth diagram shows the table 100 and the first view from the X-axis direction (from the lower side toward the upper side of the first figure). Side view of the three actuators 400. The 5th side view is also removed in order to present the internal structure. In addition, the fifth figure is an embodiment of the present invention viewed from the γ-axis direction (from the left side to the right side of the first figure). Workbench 1 and third actuation Side view of the device 4. The fifth figure also removes a part in order to present the internal structure. In addition, in the following description, the direction from the second actuator 3 to the Y axis of the table 100 will be along. The direction defined as the positive γ axis is defined as the direction in which the Y axis is negative along the direction from the table 1 〇〇 toward the γ axis of the second actuator 300. As shown in the fourth and fifth figures The seat plate 4〇2 is provided with a plurality of beams 422a extending in the wrong direction and a frame 422 composed of a top plate 422b disposed to cover the plurality of beams 422a from above. Each beam 422a is The lower end is welded to the upper surface of the base plate 402, respectively, and the upper end is welded under the top plate 422b. Further, the bearing support plate 442 of the support mechanism 440 is fixed to the top plate 422b of the frame 422 by bolts not shown in the drawings. The bearing support plate 442 is a drive mechanism 41 that supports the table 100 (first figure) to vibrate in the up and down direction, or a link mechanism 430 for transmitting the vibration motion of the drive mechanism 410 to the table. The components used. The drive mechanism 410 has a servo motor 412, a coupler 460, a bearing portion 416, a ball screw 418, and a ball nut 419. The coupler 460 is used to couple the drive shaft 412a of the servo motor 412 with the ball screw 14 200921081 418. Further, the bearing portion 416 is fixed to the aforementioned bearing support plate 442, and is formed to rotatably support the ball screw 418. The ball nut 419 is supported by the bearing support plate 442 so as not to move around the shaft, and is engaged with the ball screw 418. Therefore, when the feeding motor 412 is driven, the ball screw rotates, and the ball nut 419 advances and retreats in the axial direction (i.e., in the Z-axis direction). The movement of the ball nut 419 is transmitted to the table 1 via the coupling mechanism 430, whereby the table 100 is driven in the Z-axis direction. Then, the servo motor 412 is controlled in such a manner that the rotational direction of the servo motor 412 is switched in accordance with a short period, and in this manner, the table 100 can be vibrated in the Z-axis direction (up-and-down direction) in accordance with the desired amplitude and period. From the lower surface of the bearing support plate 442 of the support mechanism 440, the motor support plate 446 which is expanded in the horizontal direction (XY plane) is fixed via the two piece coupling plates 443. A servo motor 412 is suspended and fixed under the motor support plate 446. The motor support plate 446 is provided with an opening 446a, and the drive shaft 412a of the servo motor 412 penetrates the opening 446a and is coupled to the ball screw 418 on the upper surface side of the motor support plate 446. Further, in the present embodiment, the dimension of the servo motor 412 in the axial direction (up-and-down direction, Z-axis direction) is larger than the height of the frame 422, so that most of the servo motor 412 is disposed lower than the base plate 402. position. Therefore, the cavity portion 2a for accommodating the servo motor 412 is provided in the device base 2. Further, an opening portion 402a for passing through the servo motor 412 is provided in the base plate 4''. The bearing portion 416 is provided to penetrate the bearing support plate 442. Further, the structure of the bearing portion 416 is the same as that of the shaft 216 of the first actuator 2 (first to third figures), and detailed description thereof will be omitted. Next, the configuration of the connecting portion 430 will be described. The connecting portion 43 〇 15 200921081 includes a movable frame body 432, a pair of yoke shafts 434, a pair of y-axis rails 435, a plurality of intermediate stages 431, two pairs of yoke tracks 437, and two pairs of yaw axis sliders 433. The tilting frame 432 has a frame portion 432a fixed to the ball nut 419, a top plate 432b fixed to the upper end of the frame portion 432a, and a lower extending direction from both sides of the top plate 432b in the z-axis direction. solid
定之側壁432c。一對γ軸軌道435均為在γ軸方向上 延伸之執道，在X軸方向上並排固定在可動框體432的 頂部板機上面。另外…對χ軸軌道43j為在的χ 軸方甸上延伸之軌道，並在γ軸方向上並排固定工作台 1〇〇的下面。中間栽置台431係由與該又軸執道434卡 合且設置在上部之χ轴滑塊431a，及與γ軸執道 分別卡合且設置在下部之塊體之γ轴滑塊㈣所構 成，其係可相對於χ軸轨道434和γ軸轨道435的雙向 滑動所構成。此外，中間載置台431係於每—個χ軸轨 道434與Υ軸軌道435相交叉的位置各設置丨個。因χ 軸軌道434及Υ軸軌道435分別各設置2個，所以χ軸 軌道434與γ軸執道435有4個處所相交又。因此，本 實施例中’使用4個中間載置台431。 如此，中間載置台431則分別可相對於工作台1〇〇 在X軸方向上滑動，且玎相對於可動框體432在Υ軸方 向上滑動。即是可動框體432可相對於工作台1〇〇在χ 軸方向和Υ軸方向上滑動。因而’即使藉由其他的致動 器200及/或300可使工作台100在X軸方向及/或γ轴 方向上振動，可動框體432仍不會因而移位。即是因工 作台100之X軸方向及/或Υ軸方向的移位而造成的彎 曲應力不會加諸到滚珠嫘桿418或軸承416、聯結器 16 200921081 460。 另外，本實施例中，由於可動框體432用來支撐較 大重量的工作台1〇〇和工件，因而將χ軸執道434和γ 軸執道435的間隔設定為比第一致動器2〇〇的γ軸軌道 234和Ζ軸軌道235還要更寬。然而，若使其形成為與 第一致動器200同樣只藉由1個中間載置台來使工作台 100與可動框體432相連結之構成，則會導致中間載置 台變大型’且加諸在可動框體432的荷重增大。因而， 本實施例則是在每個X軸執道434與Υ轴執道435相交 叉的部分配置小型的中間載置台431之構成，將加諸在 可動框體432之何重的大小壓抑到最低限度。 二對Ζ軸執道437為在ζ軸方向上延伸之執道，在 Υ軸方向並排各一對固定在各個可動框體432的侧壁 432c。Ζ軸滑塊433與該各個Ζ轴軌道437卡合’形成 為可沿著Ζ軸軌道437滑動。Ζ軸滑塊433係經由滑塊 安裝構件438 ’固定在框體422之頂部板422b的上面。 滑塊安裝構件438具有與可動框體432的側壁432c大致 成平行配置之側板438a、及被固定在該側板438a的下 端之底板438b，全體則形成為l形剖面形狀。另外，本 實施例，尤其是將重心很高且重量大的工件固定在工作 台100上面’會導致繞χ軸及/或繞Y軸之很大的力矩 容易加諸到可動框體432。因而，滑塊安裝構件438藉 由肋條來補強，以抵抗該旋轉力矩。具體上是在滑塊安 裝構件438的γ軸方向兩端之侧板438a及底板438b所 形成之角落，設置一對第一肋條438c，還設置橫跨該一 對第一肋條438c之間之第二肋條438d。 如此’ Z轴滑塊433固定在框體422，且形成為可 17 200921081 相對於Z軸軌道437滑動。因此，可動框體432可在上 下方向滑動’並且可動框體432之上下方向以外的移動 受到規制。如此，可動框體432的移動方向只受限在上 下方向，故驅動伺服馬達412來使滾珠螺桿418轉動， 可動框體432及與該可動框體432卡合的工作台1〇〇則 會在上下方向上進行前進後退。 另外，與第一致動器200的位置檢測手段250 (第 二圖、第三圖）同樣的位置檢測手段（未顯示於圖）也 設置在第三致動器400。振動試驗設備1的控制手段 10 ’根據該位置檢測手段的檢測結果，可以使可動框體 432的高度控制在特定的範圍内（第六圖）。 如同以上所說明過’本實施例中，在驅動軸相互垂 直交叉之各致動器與工作台100之間，設有二對軌道及 可相對於該執道滑動所構成之中間载置台。藉由此方 式，工作台100可相對於各致動器在與該致動器的驅動 方向成垂直的面上之任意方向上滑動。因而，即使工作 台100藉由其中一個致動器來移位，因該移位而造成的 荷重或力矩仍不會加諸到其他的致動器，且維持其他致 動器及工作台100經由中間載置台予以卡合的狀態。即 是工作台移位到任意的位置，仍會維持各致動器可使工 作台移位的狀態。因而，本實施例中，令3個致動器200、 300、400同時驅動，可使工作台1〇〇及被固定在該工作 台上的工件在3個轴方向上振動。 其次’針對聯結器260、360、460的構造進行說明。 聯結器260、360與聯結器460相同的構造，故以下的 δ兒明中，只針對聯結器460進行說明，有關聯結器26〇、 360的說明則省略。第七圖為表示聯結器46〇、和經由 18 200921081 該聯結器460相互連結之AC伺服馬達412的驅動軸 412a及滾珠螺桿418的軸部之擴大剖面圖。 如第七圖所示’聯結器460為由尼龍製的内環46卜 及一對杜拉鋁（Duralumin)製的外環462和463、以及 將這些結合在一起之複數個（本實施例為6個）螺栓4 6 4 所構成之半剛性聯結器。在内環461的中央，内部相互 連通之圓孔461a、461b設置在相同軸上。圓孔461a的 内徑為可以無間隙地***AC伺服馬達412的驅動軸 412a之大小，圓孔461b的内徑為可以無間隙地***滾 珠螺桿418的轴部之大小。此外，本實施例中，滾珠螺 桿418的軸部口徑小於AC伺服馬達412的驅動軸412& 口控’故圓孔461b的外徑小於圓孔461a的外徑。 在内環461之軸方向中央部的外周形成有凸緣部 461c。從凸緣部461c的兩面内側，分別形成有在軸方向 上延伸之錐部。各錐部的外側面461d、461e則是愈接近 軸方向前端，外徑愈變小之圓錐狀的錐面。另外，在夾 著内環461之一對外環462、463的内侧’分別形成有 具有錐形狀的内側面462a、463a之貫穿孔。外環462 和463係分別被配置成内侧面462a、463a的錐面所择戸气 的方向朝向内環側。外環462、463之錐 462a、463a分別具有與内環461的外侧面461d、4仏 相同的錐角。接者，以外環462的内侧面462a與内環 461的外側面461d、外環463的内侧面463&與内環々μ 的外側面461e相重疊的情形，被形成在内環461的兩端 之錐部***外環462、463的貫穿孔。 另外，外環463之貫穿孔的周圍，與被形成在螺桿 464的前端部之外螺紋相卡合之内螺紋46%，隔著等間 19 200921081 ^形成在以貫穿孔的軸為中心之圓周上。另外，外環462 及内環461的凸緣部461c，在與外環463的内螺紋463b 相對應的位置’分別形成有螺桿孔（圓孔）462b、461f。 6個螺栓464 (第七圖中只圖示2個）穿過外環462的 螺栓孔462b和内環461的螺栓孔461f，與外環463的 内螺紋463b卡合。 從下，來將AC伺服馬達412之驅動軸412a的前端 a***内％ 461的圓孔461a，並從上方來將滾珠螺桿418 之軸部的前端***圓孔461b之後，將螺栓464***螺 栓孔462b、461f ’再鎖緊在内螺紋463b，則内環461 從兩側藉由外環462及外環463來強固夾持，内環461 的2個錐部分別深深地嵌入外環462、463的貫穿孔。 因而，藉由楔子的原理，從内環461的圓孔461a、461b, 對AC伺服馬達4丨2的驅動軸412a及滾珠螺桿々Μ的軸 部，分別加諸很強的側壓。因此，在圓孔46U、46比 與驅動轴4l2a、滾珠螺桿418之間，分別產生強大的摩 擦力，驅動軸412a與滾珠螺桿418經由内 相連接。 X蔽 ㈣^ ^所示，外環術與463之間，只用由黏彈 陡體的尼龍樹脂所形成之内環461支揮。另外，如第七 i 460中，AC伺服馬達412之驅動轴412a 的刖&與滾珠螺桿418之軸部的前端，隔著些微（例如， Ϊ = = )的_相連接。因此’從馬達來加諸將袖 ==方向之力時’内環會彈性變形而使該驅動軸 螺桿418的間隔縮窄，在聯結器偏内將轴 紅二〜吸收’可以大幅衰減傳導到滚珠螺桿側的 軸方向之力。本實施例中，内環461的振動衰減率，在 20 200921081 振動試驗之測量頻率範圍内進行比較時，於驅動軸412a 為固定振動數的情形下，成為大致最大。藉此，可以有 效衰減驅動轴412a的轴方向或軸的半徑方向之振動。此 外，驅動軸412a為固定振動數時之内環461的振動衰減 率，並不一定要測量頻率範圍大致最大，不過期望是至 少大於測量頻率範圍的頻率平均值。 另一方面，如同上述，AC伺服馬達412之驅動軸 412a的前端與滚珠螺桿418之軸部的前端之間隔短到1 mm程度，又各軸的前端則是全周與内環一體。因而， 在扭轉方向上為充分的剛體 相連結，沒有齒隙， 可以將AC伺服馬達412之驅動軸412a的旋轉驅動，正 確地傳導到滾珠螺桿418。 本實施例中，如同前述，在致動器200、300、400 與工作台100之間，設有裝備了軌道與滑塊組合起來的 導引機構之連結部。另外，同樣的導引機構設置在致動 器200、300、400，使用該導引機構是為了要導引各致 動器的滾珠螺桿機構之螺帽。有關這些導引機構的構 成，用圖面來詳細說明。此外，以下是針對由第三致動. 器400的Z軸滑塊433和Z軸執道437所構成之導引機 構（第五圖）進行說明，不過其他的導引機構也是相同 的構成。 第八圖為將滑塊433和軌道437以與軌道437的長 軸方向成垂直的一面予以剖斷之剖面圖。第九圖為第八 圖中的I 一 I線剖面圖。如第八圖和第九圖所示，在滑塊 433以圍著軌道437的方式形成有凹部，該凹部中形成 有在軌道435的軸方向上延伸之4條溝槽433a、433a’。 該溝槽433a、433a’收納多數個不銹鋼製的滾珠433b。 21 200921081 轨道437，在與滑塊433的溝槽433a、433a，相對向的位 置，分別設有溝槽437a、437a，，形成為滾珠433b夾在 溝槽433a與溝槽437a或溝槽433a，與437a，之間。溝槽 433a、433a’、437a、437a’的剖面形狀為圓弧狀，該曲 率半徑則與滾珠433b的半徑大致相等。因而，滾珠433b 係在遊隙幾乎沒有的狀態下密著於溝槽4Ba、433a，、 437a、437a，。 、，在滑塊433的内部設有4個與各個溝槽433a大致成 平行的滾珠退避路433c。如第八圖所示，溝槽433a與 退避路433c係在各個的兩端經由u形路433d予以相^ 接。溝槽433a、溝槽437a、退避路433c、ϋ形路433d， 形成用來讓滾珠433b循環之循環路。退避路433c與溝 槽433a’和437a，也形成同樣的循環路。 ” 因而，滑塊433相對於執道437進行移動，則多數 個滾珠433b於溝槽433a、433a，、437a、437a，中滾動的 同時’也在循環路中循環。因而，即使在執道軸方向以 卜=向上加諸很大的荷重，仍能夠以多數個滾珠來支 ，並且滾珠433b滚動，以使在執道轴方向上保 剎ir狡^阻力，所以可以使滑塊433相對於執道437順 2外’退避路他和U形路_的内徑為 b的直徑，在退避路433e和U形路 m伽之㈣魅的雜力錄小，故不會 妨域/袞珠433b的循環。 4现7列HI # #咖之二列滾珠 :角滾珠軸承（contact ball bearing )。^μ 的 接觸角為溝槽43一與滾珠仙接 22 200921081 結的線與直線導㈣徑向方向（ 爽角。這種方式所形成的斜角滾珠 ί丄了: 向方向（從執道朝向滑塊的方向） 直以；：向滑塊的前進後退方向的雙方成垂 1又又的方向，圖中的左右方向）的荷重。 列係ΐί溝槽43,3a’與437a，之二列滾珠概的 觸點彼此Hi ’查槽和437a,與滾珠433b接觸之接 的線與直線導引的反徑向方向所形 承。ΐ钭自ΐ 45度，且形成正面組合型的斜角滾珠軸 3角滾珠軸承可以支撐徑向方向和橫向的荷重。 另外’为別被夾在溝槽433a與437a的A中一 之::、i:ir33a，與437a，的其中一方(圖中左側） ϋ 的列，也是形成正面組合型的斜角滾 之二列的滾珠437a，的另-方(圖中左側） 滾珠轴承。 彳’也疋形成正面組合型的斜角 的斜角滾珠in:::::中反形3正面組合型 荷重予以支二且形成二2支= 道軸方向以外的方向上所加諸的很大荷重。軌 有：斤，明過’本實施例的振動試驗設備具 在分別相互垂直交叉的第-和第二方向 工作台相對：2 振動之第一和第二致動器；可使 結手段、及你； 動态在第二方向上滑動之第一連 之第二連結手：作台相對於第二致動器在第-方向滑動 23 200921081 上述的振動試驗設備中，各致動器形成為可相對於 工作台在與該致動器的振動方向成垂直交叉的方向上 滑動。因而，即使用其中一個致動器來使工作台振動， 工作台仍會相對於其他的致動器滑動，所以即使其他的 致動益移位’其他致動器的振動方向仍不會改變。因 此’本發明中，各致動器有可以使工作台和工件振動的 動力即可。另外，依據本發明，由於不讓致動器轉動仍 能夠使工作台振動，故即使致動器的驅動轴很短，仍可 以使工作台有报大衝程的的振動。加上，由於其中一個 致動器不會影響到其他致動器的舉動，故致動器的控制 系統不會變複雜，可依照所期望的振幅、頻率來使工作 台振動。因此，依據本發明，設備不會大型化/複雜化， 能夠使工作台有大振幅的振動。 另外，本實施例的構成中，如同前述，致動器沒有 移位也沒有轉動，故报容易將由伺服馬達所驅動的滚珠 螺桿機構應用在致動器。油壓致動器會造成的漏油，滾 珠螺桿機構則完全沒有這種問題，又可以使工作台有衝 程遙遙大於壓電致動器的振動。 更好的構成是伺服馬達的旋轉軸與前述滾珠螺桿 機構的滾珠螺桿相連結之聯結器為以沒有齒隙且在彎 曲方向上具有可撓性並阻礙傳導馬達的驅動軸之延長 方向的振動的方式構成之半剛性聯結器。利用這種構 ，，具有报高的響應性來逐漸驅動進送螺桿，即使軸有 3干偏離仍不會產生極端大的内部應變，能夠順利的驅 動，而且還可以阻斷馬達驅動轴方向的振動。 f剛性聯結器最好是裴備有由樹脂或橡膠所製作 的黏彈性元件。另外，半剛性聯結器係於驅動軸為固有 24 200921081 =:減率為最大的 的;约有效衰減從經由驅動 =導：:;:方向之振動’又可以使這種振動= 产ft最好是半剛性聯結器具有剛體元件之一針外 ;性該之間，r有彈性元件： 形成有用來穿過相連、:的軸二:ΐ穿 兩端，形成有可輿-^ 到内淨^ i 使—對外環之錐孔的内周抵接 藉由此方弋，红用螺栓來相互固定該—對外環彼此間， ;極簡單‘構成級::環ί相連;:形成為這種構成， 導軸輸出’並吸又方:：二;逐漸傳 方白2二累桿機構的嫘帽只可在滾珠螺桿的軸 螺具有固定在振 有 成合而可沿著該軌道移動之滑塊，滑塊的構 成取好疋具有·圍著軌道之凹鄯、及凹部中，沿 方向形成之溝槽、及以與形成在滑塊的内部之溝 成閉路的方式與溝槽的務動方向兩端相連繫著之 :避f、及將閉路予以循環，炎且形成為位於溝槽時盥 之魏個滾珠。進而，期望的構成是在滑G 成有4個上述的閉路，分別配*在該4個閉路當中之2 25 200921081 個閉路的溝槽之滾珠，具有對於直線導引的徑向方向大 致±45度的接觸角，分別配置在其他2個閉路的溝槽之 滾珠，具有對於導引機構的反徑向方向大致±45度的接 觸角。 這種構成的導引機構’即使在該徑向方向、反徑向 方向以及橫向上加諸很大的荷重，仍可以使滑塊沿著執 道順利移動。然後，因螺帽藉由這種導引機構來進行導 引，即使是在振動設備的工作台上安裝很大重量的工件 致使振動的情況，進送螺桿機構的螺帽不會晃動，仍可 以順利沿著軌道移動。 另外，最好是第一和第二連結手段分別具有被配置 在與工作台相對應之致動器之間之中間載置台，第一連 結手段的中間載置台，只在與第一方向成垂直的一個方 向上，可相對於工作台滑動，並且只在與該一個方向及 第一方向的雙方成垂直的方向上，可相對於第一致動器 滑動，第二連結手段的中間載置台，只在與第二方向成 垂直的一個方向上，可相對於工作台滑動，並且只在與 該一個方向及第二方向的雙方成垂直的方向上，可相對 於前述第二致動器滑動。 此處，例如第一連結手段的中間載置台可相對於前 述工作台和第一致動器滑動之二個方向的其中一方為 第二方向，第二連結手段的中間載置台可相對於工作台 和第二致動器滑動之二個方向的另一方為第一方向。 另外，最好是將中間載置台形成為可相對於工作台 滑動，因而例如在工作台和中間載置台的其中一方設 置：在中間載置台可相對於工作台滑動的方向上延伸的 至少1條執道，且在工作台和中間載置台的另一方設 26 200921081 動另二:=中_、 應的致動器的i中—π，例如在中間載置台和對 應的致動器滑動的方向:延伸可相:於對 =置台和對應的致動器的另—方;;=道以 道及滑塊來相連結之構;。形成===的複數條軌 旋轉容_二=向的 及-中沿著滑壤的軌、 ======== 時與軌道抵接之複數個滾珠。另外，更好: 1.- =路=在滑塊形成有4個該閉路，分別配置在該 了 = 2個閉路的溝槽之滾珠，具有對於裝備 ^滑塊之導弓1機構的徑向方向大致±45度的接觸 角"刀別配置在其他2侧路的溝槽之滾珠，具有對於 導引，構的反徑向方向大致±45度的接觸角。 、 這種才f成的導引機構，即使在該徑向方向、反徑向 及&向上加諸报大的荷重，仍可以使滑塊沿著軌 =、道，動。然後’因中_置台藉由這種導引機構來 <丁 即使疋在振動設備的工作台上安裝很大重量 的工件來致使振動的情況，巾間載置台不會晃動，仍可 27 200921081 以順利沿著軌道移動。 另外，本實施例的振動試驗設備具有：可在與第一 和第二方向的雙方成垂直的第三方向（z軸方向）上使 工作台振動之第三致動器、及可使工作台相對於第三致 動器在第一和第二方向上滑動地予以相連結之第三連 結手段；第一和第二連結手段的構成分別為可使前述工 作台相對於第一和第二致動器在第三方向滑動地予以 相連結。依據該構成，實現可在三個軸方向上振動之振 動試驗設備。 【圖式簡單說明】 第一圖為本發明的實施例的振動試驗設備之上視 圖。 第二圖為從Y轴方向觀看本發明的實施例的第一致 動器之側視圖。 第三圖為本發明的實施例的第一致動器之上視圖。 第四圖為從X軸方向觀看本發明的實施例的工作台 和第三致動器之側視圖。 第五圖為從Y軸方向觀看本發明的實施例的工作台 和第三致動器之側視圖。 第六圖為本發明的實施例之振動試驗設備的控制 系統之方塊圖。 第七圖為本發明的實施例的半剛性聯結器之剖面 圖。 第八圖為以與執道的長軸方向成垂直的一面，將本 發明的實施例的滑塊和軌道予以剖斷之剖面圖。 第九圖為第八圖中的I — I線剖面圖。 28 200921081 【主要元件符號說明】 1振動試驗設備 231a Y軸滑塊 2設備基座 231b Ζ軸滑塊 2a 空洞部 232 螺帽導引 10 控制手段 233 X轴滑塊 100 工作台 234 Υ軸軌道 200 第一致動器 235 Ζ軸軌道 202 基座板 236 規制塊體 210 驅動機構 237 X軸軌道 212 伺服馬達 238 滑塊安裝構件 212a 驅動轴 238a 側面 216 轴承部 240 支撐機構 216a 角接觸球軸承 242 底板 216b 角接觸球軸承 244 軸承支樓板 216c 轴承押壓板 246 馬達支樓板 216d 螺栓 246a 開口部 217 軸環 248 肋條 218 滾珠螺桿 250 位置檢測手段 218a 螺紋部 251 接近感測器 219 滚珠螺帽 252 檢測用板 220 振動感測器 253 感測器支撐板 222 框體 260 聯結器 222a 橫樑 300 第二致動器 222b 頂部板 302 基座板 230 連結機構 312 伺服馬達 231 中間載置台 320 振動感測器 29 200921081 351 接近感測器 433d U形路 400 第三致動器 437 執道 402 基座板 437a 溝槽 402a 開口部 437a， 溝槽 410 驅動機構 434 X軸執道 412 伺服馬達 435 Y軸軌道 412a 驅動轴 437 Z軸執道 416 軸承部 438 滑塊安裝構件 418 螺帽導引 438a 側板 419 滾珠螺帽 438b 底板 420 振動感測器 438c 第一肋條 422 框體 438d 第二肋條 422a 橫樑 442 軸承支撑板 422b 頂部板 443 連結板 430 連結機構 446 馬達支撐板 431 中間載置台 446a 開口部 431a X軸滑塊 451 接近感測器 431b Y軸滑塊 460 聯結器 432 可動框體 461 内環 432a 框部 461a 圓孔 432b 頂部板 461b 圓孔 432c 侧壁 461c 凸緣部 433 Z軸滑塊 461d 外侧面 433a 溝槽 461e 外侧面 433a’ 溝槽 461f 螺桿孔（圓孔) 433b 滚珠 462 外環 433c 滾珠退避路 462a 内側面 30 200921081 462b螺桿孔（圓孔) 463 外環 463a内側面 463b内螺紋 464 螺桿 A 調節器 A1内螺紋部 A2 外螺紋部 A3螺帽 AB螺栓 31The side wall 432c is defined. Each of the pair of γ-axis rails 435 is in the γ-axis direction, and is fixed side by side on the top plate of the movable frame 432 in the X-axis direction. Further, the y-axis track 43j is a track extending on the χ-axis of the 轴 axis, and the lower surface of the table 1 并 is fixed side by side in the γ-axis direction. The intermediate planting table 431 is composed of a y-axis slider 431a that is engaged with the parallel shaft 434 and is disposed at the upper portion, and a γ-axis slider (four) that is respectively engaged with the γ-axis and is disposed at the lower block. It can be formed by two-way sliding with respect to the y-axis track 434 and the y-axis track 435. Further, the intermediate stage 431 is provided one at a position where each of the x-axis rails 434 and the x-axis rail 435 intersect each other. Since the y-axis track 434 and the y-axis track 435 are respectively provided in two, the y-axis track 434 and the γ-axis trajectory 435 have four places intersecting each other. Therefore, in the present embodiment, four intermediate stages 431 are used. In this manner, the intermediate stage 431 is slidable in the X-axis direction with respect to the table 1 ,, respectively, and the 玎 is slid in the Υ-axis direction with respect to the movable frame 432. That is, the movable frame 432 is slidable in the z-axis direction and the z-axis direction with respect to the table 1''. Therefore, even if the table 100 is vibrated in the X-axis direction and/or the γ-axis direction by the other actuators 200 and/or 300, the movable frame body 432 is not displaced. That is, the bending stress caused by the displacement of the X-axis direction and/or the Υ-axis direction of the table 100 is not added to the ball mast 418 or the bearing 416, and the coupling 16 200921081 460. In addition, in the present embodiment, since the movable frame body 432 is used to support the table 1 and the workpiece of a large weight, the interval between the x-axis 434 and the γ-axis 435 is set to be larger than that of the first actuator. The 2 γ γ-axis track 234 and the Ζ axis track 235 are even wider. However, if the configuration is such that the table 100 and the movable frame 432 are connected by only one intermediate stage as in the first actuator 200, the intermediate stage becomes large. The load on the movable frame 432 is increased. Therefore, in the present embodiment, a configuration is adopted in which a small intermediate stage 431 is disposed in a portion where each of the X-axis trajectories 434 and the cymbal trajectory 435 intersect, and the weight applied to the movable housing 432 is suppressed to at the lowest limit. The two pairs of the yoke shafts 437 are traverses extending in the direction of the yaw axis, and a pair of side walls 432c fixed to the respective movable frames 432 are arranged side by side in the direction of the yaw axis. The cymbal slider 433 is engaged with the respective yoke rails 437' so as to be slidable along the yoke rail 437. The x-axis slider 433 is fixed to the upper surface of the top plate 422b of the frame 422 via the slider mounting member 438'. The slider attachment member 438 has a side plate 438a disposed substantially in parallel with the side wall 432c of the movable frame 432, and a bottom plate 438b fixed to the lower end of the side plate 438a, and the entire portion is formed in an l-shaped cross-sectional shape. Further, in the present embodiment, in particular, fixing a workpiece having a high center of gravity and a large weight to the upper surface of the table 100 causes a large moment around the yoke axis and/or around the Y axis to be easily applied to the movable frame body 432. Thus, the slider mounting member 438 is reinforced by the ribs to resist the rotational moment. Specifically, at a corner formed by the side plate 438a and the bottom plate 438b at both ends of the slider mounting member 438 in the γ-axis direction, a pair of first ribs 438c are provided, and a cross between the pair of first ribs 438c is further provided. Two ribs 438d. Thus, the 'Z-axis slider 433 is fixed to the frame 422, and is formed to be slidable relative to the Z-axis track 437 by 2009 200981. Therefore, the movable housing 432 can slide in the up and down direction and the movement of the movable housing 432 beyond the upper and lower directions is regulated. As described above, since the moving direction of the movable housing 432 is restricted only in the vertical direction, the servo motor 412 is driven to rotate the ball screw 418, and the movable housing 432 and the table 1 卡 engaged with the movable housing 432 are Move forward and backward in the up and down direction. Further, a position detecting means (not shown) similar to the position detecting means 250 (second drawing and third drawing) of the first actuator 200 is also provided in the third actuator 400. The control means 10 of the vibration test apparatus 1 can control the height of the movable housing 432 within a specific range based on the detection result of the position detecting means (sixth figure). As described above, in the present embodiment, between the actuators in which the drive shafts vertically intersect each other and the table 100, two pairs of rails and an intermediate stage which is slidable relative to the lane are provided. In this manner, the table 100 is slidable in any direction on the face perpendicular to the driving direction of the actuator with respect to each actuator. Thus, even if the table 100 is displaced by one of the actuators, the load or torque due to the displacement is not applied to the other actuators, and the other actuators and the table 100 are maintained via The intermediate stage is engaged. That is, the table is shifted to an arbitrary position, and the state in which the actuators can shift the table is maintained. Therefore, in the present embodiment, the three actuators 200, 300, and 400 are simultaneously driven, and the table 1 and the workpiece fixed to the table can be vibrated in three axial directions. Next, the configuration of the couplers 260, 360, and 460 will be described. Since the couplers 260 and 360 have the same structure as the coupler 460, only the coupler 460 will be described in the following, and the description of the associated couplers 26A and 360 will be omitted. The seventh diagram is an enlarged cross-sectional view showing the coupling portion 46A and the shaft portion of the drive shaft 412a and the ball screw 418 of the AC servo motor 412 which are coupled to each other via the coupling mechanism 460 of 18 200921081. As shown in the seventh figure, the coupling 460 is an inner ring 46 made of nylon and a pair of outer rings 462 and 463 made of Duralumin, and a plurality of these are combined (this embodiment is Six) semi-rigid couplings made up of bolts 4 6 4 . In the center of the inner ring 461, the circular holes 461a, 461b which communicate with each other are disposed on the same axis. The inner diameter of the circular hole 461a is a size that can be inserted into the drive shaft 412a of the AC servo motor 412 without a gap, and the inner diameter of the circular hole 461b is a size that can be inserted into the shaft portion of the ball screw 418 without a gap. Further, in the present embodiment, the diameter of the shaft portion of the ball screw 418 is smaller than the drive shaft 412 of the AC servo motor 412. The outer diameter of the circular hole 461b is smaller than the outer diameter of the circular hole 461a. A flange portion 461c is formed on the outer circumference of the central portion of the inner ring 461 in the axial direction. A tapered portion extending in the axial direction is formed from both inner sides of the flange portion 461c. The outer side surfaces 461d and 461e of the respective tapered portions are conical tapered surfaces whose outer diameter becomes smaller toward the front end in the axial direction. Further, a through hole having tapered inner side surfaces 462a and 463a is formed in each of the inner sides ′ of the outer rings 462 and 463 sandwiching the inner ring 461. The outer rings 462 and 463 are arranged such that the direction of the xenon selected by the tapered faces of the inner side faces 462a, 463a faces the inner ring side. The tapers 462a, 463a of the outer rings 462, 463 have the same taper angle as the outer side faces 461d, 4' of the inner ring 461, respectively. The inner side surface 462a of the outer ring 462 is overlapped with the outer side surface 461d of the inner ring 461, the inner side surface 463& of the outer ring 463, and the outer side surface 461e of the inner ring 々μ, and is formed at both ends of the inner ring 461. The tapered portion is inserted into the through hole of the outer rings 462, 463. Further, the circumference of the through hole of the outer ring 463 is 46% of the internal thread which is engaged with the thread formed outside the front end portion of the screw 464, and is formed at the circumference centering on the axis of the through hole 19 by the interval 19 200921081. on. Further, the outer ring 462 and the flange portion 461c of the inner ring 461 are formed with screw holes (round holes) 462b and 461f at positions ' corresponding to the internal threads 463b of the outer ring 463, respectively. Six bolts 464 (only two of which are shown in the seventh figure) pass through the bolt holes 462b of the outer ring 462 and the bolt holes 461f of the inner ring 461, and engage with the internal threads 463b of the outer ring 463. Next, the front end a of the drive shaft 412a of the AC servo motor 412 is inserted into the circular hole 461a of the inner portion 461, and the front end of the shaft portion of the ball screw 418 is inserted into the circular hole 461b from above, and the bolt 464 is inserted into the bolt hole. 462b, 461f 'relock the internal thread 463b, the inner ring 461 is strongly clamped from both sides by the outer ring 462 and the outer ring 463, and the two tapered portions of the inner ring 461 are deeply embedded in the outer ring 462, Through hole of 463. Therefore, by the principle of the wedge, a strong side pressure is applied to the drive shaft 412a of the AC servo motor 4A2 and the shaft portion of the ball screw 从 from the circular holes 461a and 461b of the inner ring 461, respectively. Therefore, a strong frictional force is generated between the circular holes 46U, 46 and the drive shaft 141a and the ball screw 418, and the drive shaft 412a and the ball screw 418 are connected via the inner phase. X (4) ^ ^, between the outer ring and 463, only the inner ring 461 formed by the nylon resin of the viscoelastic steep body. Further, as in the seventh i 460, the 刖& of the drive shaft 412a of the AC servo motor 412 is connected to the front end of the shaft portion of the ball screw 418 via a slight (for example, Ϊ = = ). Therefore, when the force is applied from the motor to the sleeve == direction, the inner ring will be elastically deformed to narrow the interval of the drive shaft screw 418, and the shaft red ii absorption in the coupling bias can be greatly attenuated to The force in the axial direction of the ball screw side. In the present embodiment, when the vibration damping rate of the inner ring 461 is compared within the measurement frequency range of the vibration test of 200921081, when the drive shaft 412a is a fixed number of vibrations, it is substantially the largest. Thereby, the vibration of the axial direction of the drive shaft 412a or the radial direction of the shaft can be effectively attenuated. Further, the drive shaft 412a is the vibration attenuation rate of the inner ring 461 when the number of vibrations is fixed, and it is not necessary to measure the frequency range to be substantially the largest, but it is desirable to be at least a frequency average value larger than the measurement frequency range. On the other hand, as described above, the distance between the front end of the drive shaft 412a of the AC servo motor 412 and the front end of the shaft portion of the ball screw 418 is as short as 1 mm, and the front end of each shaft is integrated with the inner ring at the entire circumference. Therefore, a sufficient rigid body is coupled in the torsional direction, and there is no backlash, and the rotation of the drive shaft 412a of the AC servo motor 412 can be driven to the ball screw 418 correctly. In the present embodiment, as described above, between the actuators 200, 300, 400 and the table 100, a joint portion equipped with a guide mechanism in which a rail and a slider are combined is provided. Further, the same guiding mechanism is provided at the actuators 200, 300, 400, which are used to guide the nuts of the ball screw mechanisms of the respective actuators. The construction of these guiding mechanisms will be described in detail with reference to the drawings. Further, the following is a description of the guiding mechanism (fifth diagram) constituted by the Z-axis slider 433 and the Z-axis 433 of the third actuator 400, but the other guiding mechanisms have the same configuration. The eighth drawing is a cross-sectional view in which the slider 433 and the rail 437 are cut perpendicular to the longitudinal direction of the rail 437. The ninth drawing is a sectional view of the I-I line in the eighth drawing. As shown in the eighth and ninth drawings, a concave portion is formed in the slider 433 so as to surround the rail 437, and four grooves 433a, 433a' extending in the axial direction of the rail 435 are formed in the concave portion. The grooves 433a and 433a' accommodate a plurality of balls 433b made of stainless steel. 21 200921081 The track 437 is provided with grooves 437a, 437a at positions opposite to the grooves 433a, 433a of the slider 433, and is formed such that the balls 433b are sandwiched between the grooves 433a and the grooves 437a or 433a. Between 437a, and. The cross-sectional shape of the grooves 433a, 433a', 437a, and 437a' is an arc shape, and the radius of curvature is substantially equal to the radius of the balls 433b. Therefore, the balls 433b are adhered to the grooves 4Ba, 433a, 437a, 437a in a state where the play is almost absent. Further, four ball retracting paths 433c which are substantially parallel to the respective grooves 433a are provided inside the slider 433. As shown in the eighth figure, the groove 433a and the evacuation path 433c are connected to each other via the u-shaped path 433d. The groove 433a, the groove 437a, the escape path 433c, and the meandering path 433d form a circulation path for circulating the balls 433b. The evacuation path 433c and the grooves 433a' and 437a also form the same circulation path. Thus, the slider 433 is moved relative to the road 437, and the plurality of balls 433b are also circulated in the circulation path while being rolled in the grooves 433a, 433a, 437a, 437a. Thus, even on the road axis The direction is increased by a large load, and can still be supported by a plurality of balls, and the balls 433b are rolled so as to maintain the resistance in the direction of the axis of the road, so that the slider 433 can be made relative to Execution 437 shun 2 outside 'retracted road he and U-shaped road _ the diameter of the diameter of b, in the retreat road 433e and U-shaped road m gamma (four) charm of the small recording, so it will not lie to the field / 衮 beads 433b cycle. 4 now 7 columns HI # #咖之二列球球: contact ball bearing. The contact angle of ^μ is the groove 43 and the ball joint 22 200921081 knot line and straight line guide (4) diameter Direction of direction (slow angle. The angled ball formed by this method is smashed: the direction (from the direction of the obstruction to the slider) is straight;; the two sides of the slider in the forward and backward directions are sag and 1 again Direction, the left and right direction of the figure. The column system ΐί grooves 43, 3a' and 437a, the two columns of the ball Point each other Hi' check groove and 437a, the line connecting with the ball 433b is in the opposite radial direction of the linear guide. The self-twisting angle is 45 degrees, and the front combined type bevel ball shaft 3 angle ball is formed. The bearing can support the load in the radial direction and the lateral direction. In addition, it is a column of one of the A: ir33a, and 437a, which is sandwiched between the grooves 433a and 437a (the left side in the figure), It is also a ball bearing 437a which forms the two rows of the beveled rolls of the front combined type, and the other side (the left side in the figure) of the ball bearing. 彳' also forms the beveled ball of the front combined type of beveled angle in::::: The anti-shaped 3 front combined load is supported by two and forms two large loads; the large load applied in the direction other than the direction of the track axis. The track has: jin, clear over the vibration test equipment of the present embodiment is respectively The first and second direction of the vertically intersecting table are opposite: 2 the first and second actuators of the vibration; the means for the knot, and the second link of the first link that dynamically slides in the second direction : the table slides in the first direction with respect to the second actuator 23 200921081 The vibration test device described above Each actuator is formed to be slidable in a direction perpendicular to the vibration direction of the actuator with respect to the table. Thus, even if one of the actuators is used to vibrate the table, the table is still relative to The other actuators slide, so even if the other actuators are shifted, the vibration directions of the other actuators do not change. Therefore, in the present invention, each actuator has a power that can vibrate the table and the workpiece. Further, according to the present invention, since the table can be vibrated without rotating the actuator, even if the drive shaft of the actuator is short, the table can be subjected to vibration of a large stroke. In addition, since one of the actuators does not affect the behavior of the other actuators, the actuator control system does not become complicated, and the table can be vibrated according to the desired amplitude and frequency. Therefore, according to the present invention, the apparatus is not enlarged/complexed, and the table can be vibrated with a large amplitude. Further, in the configuration of the present embodiment, as described above, the actuator is not displaced or rotated, so that it is easy to apply the ball screw mechanism driven by the servo motor to the actuator. Oil leakage caused by the oil pressure actuator, the ball screw mechanism does not have such a problem at all, and the table can be moved farther than the vibration of the piezoelectric actuator. More preferably, the coupling shaft of the servo motor and the ball screw of the ball screw mechanism are coupled to each other in a direction of vibration without a backlash and having flexibility in the bending direction and obstructing the drive shaft of the conduction motor. The semi-rigid coupling formed by the way. With this configuration, the responsiveness of the report is gradually driven to gradually drive the feed screw, and even if the shaft has 3 dry deviations, it does not generate extremely large internal strain, can be smoothly driven, and can also block the direction of the motor drive shaft. vibration. The f rigid coupling is preferably provided with a viscoelastic member made of resin or rubber. In addition, the semi-rigid coupling is inherent in the drive shaft 24 200921081 =: the reduction rate is the largest; about the effective attenuation from the vibration through the drive = guide::;: direction can make this vibration = the best ft The semi-rigid coupling has one of the rigid body elements; between the sex, r has elastic elements: formed with a shaft for passing through: the second: the ends of the piercing, forming a 舆-^ to the inner net ^ i makes the inner circumference of the taper hole of the outer ring abutting by the square, the red is fixed by bolts to each other - the outer ring is mutually connected; the extremely simple 'composition level:: ring ί connection;: formed into such a composition , the guide shaft output 'sucking and square:: two; gradually pass the square white 2 two bar mechanism of the cap only can be fixed in the ball screw of the ball screw has a fixed and movable slider along the track, The slider is configured to have a concave groove surrounding the track, and a groove formed in the concave portion, and a groove formed in a direction close to the groove formed inside the slider and a moving direction of the groove. Connected to the end: avoiding f, and circulating the closed circuit, and forming a Wei ball in the grooveFurther, the desired configuration is that the sliding G is formed into four of the above-described closed circuits, and the balls of the two of the four closed circuits are respectively included in the two closed circuits, and the balls in the closed direction are approximately ±45 in the radial direction of the linear guide. The contact angles of the degrees are respectively arranged in the balls of the other two closed channels, and have a contact angle of approximately ±45 degrees with respect to the reverse radial direction of the guiding mechanism. The guide mechanism ' constructed in this manner can smoothly move the slider along the execution even if a large load is applied in the radial direction, the reverse radial direction, and the lateral direction. Then, since the nut is guided by the guiding mechanism, even if a large weight of the workpiece is mounted on the table of the vibration device to cause vibration, the nut of the feeding screw mechanism does not shake, and the nut can still be shaken. Smoothly move along the track. Further, preferably, the first and second joining means respectively have an intermediate placing table disposed between the actuators corresponding to the table, and the intermediate mounting table of the first joining means is perpendicular to the first direction only In one direction, it is slidable relative to the table, and is slidable relative to the first actuator only in a direction perpendicular to both the one direction and the first direction, and the intermediate stage of the second connecting means, It is slidable relative to the table only in one direction perpendicular to the second direction, and is slidable relative to the second actuator only in a direction perpendicular to both of the one direction and the second direction. Here, for example, the intermediate mounting table of the first connecting means may be in a second direction with respect to one of the two directions in which the table and the first actuator slide, and the intermediate mounting table of the second connecting means may be opposite to the table The other of the two directions of sliding with the second actuator is the first direction. Further, it is preferable that the intermediate stage is formed to be slidable with respect to the table, and thus, for example, at one of the table and the intermediate stage, at least one piece extending in a direction in which the intermediate stage is slidable relative to the stage Execution, and on the other side of the workbench and the intermediate stage, the other side of the workbench is: _, _, the actuator of the i - π, for example, in the direction of the intermediate stage and the corresponding actuator sliding : extension phase: in the pair = the other side of the table and the corresponding actuator;; = the road is connected by the track and the slider; A plurality of balls forming a === rotation capacity _ two = direction and - in the track along the loam, ======== when the ball abuts the track. In addition, it is better: 1.- = road = four closed circuits are formed in the slider, respectively arranged in the ball of the = 2 closed-circuit grooves, having a radial direction for the guide bow 1 mechanism equipped with the slider A contact angle of approximately ±45 degrees in the direction of the ball of the groove of the other two side paths has a contact angle of approximately ±45 degrees with respect to the reverse radial direction of the guide. In this way, even if the large load is applied in the radial direction, the reverse radial direction, and the upward direction, the slider can be moved along the rails, tracks, and movements. Then, because of the guidance mechanism, the gantry mounts a large weight of the workpiece on the table of the vibrating device to cause vibration, and the inter-stand mounting table does not sway, still 27 200921081 To move smoothly along the track. Further, the vibration test apparatus of the present embodiment has a third actuator that can vibrate the table in a third direction (z-axis direction) perpendicular to both the first and second directions, and the table can be made a third connecting means slidably coupled to the third actuator in the first and second directions; the first and second joining means are configured to enable the table to be opposite to the first and second The actuators are slidably coupled in the third direction. According to this configuration, a vibration test apparatus which can vibrate in three axial directions is realized. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a top view of a vibration test apparatus according to an embodiment of the present invention. The second drawing is a side view of the first actuator of the embodiment of the present invention viewed from the Y-axis direction. The third figure is a top view of the first actuator of the embodiment of the present invention. The fourth view is a side view of the table and the third actuator of the embodiment of the present invention viewed from the X-axis direction. The fifth drawing is a side view of the table and the third actuator of the embodiment of the present invention viewed from the Y-axis direction. Fig. 6 is a block diagram showing a control system of the vibration test apparatus of the embodiment of the present invention. Figure 7 is a cross-sectional view of a semi-rigid coupling of an embodiment of the present invention. Fig. 8 is a cross-sectional view showing the slider and the rail of the embodiment of the present invention taken along a side perpendicular to the longitudinal direction of the obstruction. The ninth diagram is a cross-sectional view taken along the line I-I in the eighth figure. 28 200921081 [Description of main component symbols] 1 Vibration test equipment 231a Y-axis slide 2 Equipment base 231b Ζ Axis slide 2a Cavity 232 Nut guide 10 Control means 233 X-axis slide 100 Table 234 Υ Axis track 200 First actuator 235 Ζ axle 202 base plate 236 regulation block 210 drive mechanism 237 X-axis track 212 servo motor 238 slider mounting member 212a drive shaft 238a side 216 bearing portion 240 support mechanism 216a angular contact ball bearing 242 bottom plate 216b angular contact ball bearing 244 bearing support plate 216c bearing pressing plate 246 motor support floor 216d bolt 246a opening 217 collar 248 rib 218 ball screw 250 position detecting means 218a threaded portion 251 proximity sensor 219 ball nut 252 detection plate 220 Vibration sensor 253 Sensor support plate 222 Frame 260 Coupling 222a Cross member 300 Second actuator 222b Top plate 302 Base plate 230 Connection mechanism 312 Servo motor 231 Intermediate stage 320 Vibration sensor 29 200921081 351 Proximity sensor 433d U-shaped road 400 third actuator 437 way 402 base plate 4 37a groove 402a opening portion 437a, groove 410 drive mechanism 434 X-axis way 412 servo motor 435 Y-axis track 412a drive shaft 437 Z-axis way 416 bearing portion 438 slider mounting member 418 nut guide 438a side plate 419 ball Nut 438b bottom plate 420 vibration sensor 438c first rib 422 frame 438d second rib 422a beam 442 bearing support plate 422b top plate 443 joint plate 430 joint mechanism 446 motor support plate 431 intermediate stage 446a opening portion 431a X-axis slide Block 451 Proximity Sensor 431b Y-axis Slider 460 Coupling 432 Movable Frame 461 Inner Ring 432a Frame Portion 461a Round Hole 432b Top Plate 461b Round Hole 432c Side Wall 461c Flange Portion 433 Z-Axis Slider 461d Outer Side 433a Groove Slot 461e Outer side 433a' Groove 461f Screw hole (round hole) 433b Ball 462 Outer ring 433c Ball retracting path 462a Inner side 30 200921081 462b Screw hole (round hole) 463 Outer ring 463a Inner side 463b Internal thread 464 Screw A Regulator A1 internal thread part A2 external thread part A3 nut AB bolt 31