JP4901219B2 - Vibration testing machine - Google Patents

Vibration testing machine Download PDF

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JP4901219B2
JP4901219B2 JP2006003648A JP2006003648A JP4901219B2 JP 4901219 B2 JP4901219 B2 JP 4901219B2 JP 2006003648 A JP2006003648 A JP 2006003648A JP 2006003648 A JP2006003648 A JP 2006003648A JP 4901219 B2 JP4901219 B2 JP 4901219B2
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bearing
shaft
horizontal
vertical
fluid actuator
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JP2007187465A (en
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哲太郎 遠藤
昭 坂本
哲夫 川澄
義則 森本
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カヤバ システム マシナリー株式会社
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Description

この発明は、直線的に伸縮する流体アクチュエータの駆動により、被試験物を高周波で加振可能な振動試験機に関する。   The present invention relates to a vibration testing machine capable of exciting a device under test at a high frequency by driving a fluid actuator that linearly expands and contracts.

この種の振動試験機においては、高周波の加振特性を得るため、電動型の振動発生機が使用される（特許文献１）。
特開昭５８−５５８３６号 In this type of vibration testing machine, an electric vibration generator is used to obtain high-frequency excitation characteristics (Patent Document 1).
JP 58-55836 A

このような従来の振動試験機にあっては、振動発生機が電動型のため、被試験物が大重量の場合、十分な加振力が得られず、高周波の振動試験が困難になりやすい。なお、従来の振動試験機において、振動発生機に油圧シリンダを用いる例も見られるが、高周波の加振特性を要求される振動試験機としては不十分なものであった。   In such a conventional vibration testing machine, since the vibration generator is an electric type, when the DUT is heavy, sufficient excitation force cannot be obtained, and high-frequency vibration testing tends to be difficult. . In the conventional vibration testing machine, there is an example in which a hydraulic cylinder is used as the vibration generator, but it is insufficient as a vibration testing machine that requires high-frequency excitation characteristics.

この発明は、このような従来技術を踏まえつつ、油圧シリンダ等の流体アクチュエータにより被試験体を高周波で加振可能な振動試験機の提供を目的とする。   An object of this invention is to provide the vibration testing machine which can vibrate a to-be-tested object at high frequency with fluid actuators, such as a hydraulic cylinder, in view of such a prior art.

本発明は、被試験物を載置するテーブルと、垂直方向への振動を発生する第１の流体アクチュエータと、水平方向への振動を発生する第２の流体アクチュエータと、前記テーブルと前記第１の流体アクチュエータとの間に水平軸およびこれに嵌合する軸受から構成される第１の連結部と、前記テーブルと前記第２の流体アクチュエータとの間に垂直軸およびこれに嵌合する軸受から構成される第２の連結部と、前記第１の連結部の前記水平軸とこれに嵌合する前記軸受との間を非接触状態に保持する第１の静圧軸受と、前記第２の連結部の前記垂直軸とこれに嵌合する前記軸受との間を非接触状態に保持する第２の静圧軸受と、を備え、前記第１の連結部は、前記水平軸の中央部に前記第１の流体アクチュエータが連結され、前記水平軸に嵌合する前記軸受として軸穴が同軸上に対向する１対の軸受が前記テーブルに配置され、これら軸受が前記水平軸の両端部にそれぞれ嵌合してなり、これら軸受および前記水平軸によって前記第２の流体アクチュエータが発生する振動に伴う前記テーブルの水平方向への動きを案内する一方、前記第２の連結部は、前記垂直軸が前記テーブルに固定され、前記垂直軸に嵌合する前記軸受に前記第２の流体アクチュエータが連結され、前記垂直軸およびこれに嵌合する前記軸受によって前記第１の流体アクチュエータが発生する振動に伴うテーブルの垂直方向への動きを案内することを特徴とする振動試験機である。 The present invention includes a table for placing the DUT, and a first fluid actuator that generates a vibration in the vertical direction, and the second fluid actuator for generating a vibration in the horizontal direction, the first and the table a first connecting portion composed of a bearing for the horizontal axis and fitted thereto between the fluid actuator, the bearing of the vertical shaft and fitted thereto between the said table second fluid actuator a second connecting portion formed, and the first hydrostatic bearing that holds between the first said bearing to said horizontal axis and fitted to the connecting portion of the non-contact state, the second and a second hydrostatic bearing holding the non-contact state between said vertical axis of the coupling part and the bearing to be fitted thereto, said first connecting portion, the central portion of the horizontal axis The first fluid actuator is connected and fitted to the horizontal shaft. A pair of bearings whose shaft holes are coaxially opposed as the bearings are arranged on the table, and these bearings are respectively fitted to both end portions of the horizontal shaft, and the second shaft is supported by the bearings and the horizontal shaft. The second connecting portion guides the horizontal movement of the table accompanying the vibration generated by the fluid actuator, while the vertical shaft is fixed to the table and fitted to the vertical shaft. The second fluid actuator is connected, and the vertical shaft and the bearing fitted thereto guide the vertical movement of the table accompanying the vibration generated by the first fluid actuator. It is a testing machine .

本発明においては、第１の静圧軸受および第２の静圧軸受により、フリクションが低減され、第１の流体アクチュエータおよび第２の流体アクチュエータにより、テーブルを高周波の加振特性で振動させることが可能となる。また、第１の連結部および第２の連結部が軸とこれに嵌合する軸受とから構成され、これらの２面間を非接触状態に保持する静圧軸受により、テーブルを水平方向および垂直方向へ円滑かつ適確に案内しえるのである。 In the present invention , friction is reduced by the first hydrostatic bearing and the second hydrostatic bearing, and the table can be vibrated with high-frequency excitation characteristics by the first fluid actuator and the second fluid actuator. It becomes possible. In addition, the first and second connecting portions are composed of a shaft and a bearing fitted to the shaft, and the table is horizontally and vertically fixed by a hydrostatic bearing that keeps the two surfaces in a non-contact state. It can guide the direction smoothly and accurately.

図１〜図４において、１は設置面に固定される機台（フレーム）であり、２は被試験物を載置するテーブルであり、フレーム１に垂直方向への振動を発生する第１の油圧シリンダ３（流体アクチュエータ）と、水平方向への振動を発生する第２の油圧シリンダ４（流体アクチュエータ）と、が配設される。   1 to 4, reference numeral 1 denotes a machine base (frame) fixed to the installation surface, 2 denotes a table on which a test object is placed, and a first vibration that generates vibration in the vertical direction on the frame 1 is shown. A hydraulic cylinder 3 (fluid actuator) and a second hydraulic cylinder 4 (fluid actuator) that generates vibration in the horizontal direction are disposed.

テーブル２の下面に４個の軸受５ａ，５ｂが所定の配置状態に固定される。各軸受５ａ，５ｂは、同一方向に配置され、軸穴が同軸上に対向する１対の軸受５ａ，５ａ、５ｂ，５ｂ間に２本の水平軸６ａ，６ｂが１本ずつ支持される。第１の油圧シリンダ３のピストンロッドに連結するＵ字アーム７が設けられ、その両端７ａ，７ｂに水平軸６ａ，６ｂがボルト８ａ，８ｂにより結合される。これらにより、テーブル２と第１の油圧シリンダ３との間に第１の連結部が構成される。   Four bearings 5a and 5b are fixed to the lower surface of the table 2 in a predetermined arrangement state. The bearings 5a and 5b are arranged in the same direction, and two horizontal shafts 6a and 6b are supported one by one between a pair of bearings 5a, 5a, 5b and 5b whose shaft holes are coaxially opposed. A U-shaped arm 7 connected to the piston rod of the first hydraulic cylinder 3 is provided, and horizontal shafts 6a and 6b are coupled to both ends 7a and 7b by bolts 8a and 8b. As a result, a first connecting portion is formed between the table 2 and the first hydraulic cylinder 3.

テーブル２の中央にその下方へ突き出る垂直軸１０が固定される。垂直軸１０に嵌合する軸受１１が設けられ、軸受１１に第２の油圧シリンダ４のピストンロッドが連結される。これらにより、テーブル２と第２の油圧シリンダ４との間に第２の連結部が構成される。   A vertical shaft 10 protruding downward is fixed at the center of the table 2. A bearing 11 fitted to the vertical shaft 10 is provided, and the piston rod of the second hydraulic cylinder 4 is connected to the bearing 11. As a result, a second connecting portion is formed between the table 2 and the second hydraulic cylinder 4.

各水平軸６ａ，６ｂとこれらの端部に嵌合する各軸受５ａ，５ｂとの２面間を非接触状態に保持する第１の静圧軸受と、垂直軸１０とこれに嵌合する軸受１１との２面間を非接触状態に保持する第２の静圧軸受と、が設けられる。   A first hydrostatic bearing that keeps the two surfaces of the horizontal shafts 6a and 6b and the bearings 5a and 5b fitted to these end portions in a non-contact state, and the vertical shaft 10 and a bearing fitted to the first shaft And a second hydrostatic bearing that holds the two surfaces in contact with each other in a non-contact state.

静圧軸受は、外部の油圧源から軸受隙間へ高圧流体を供給する油圧設備を備えるものであり、図７のように高圧流体の供給を受ける複数のポケットａ〜ｄが軸受面に形成される。軸Ａの偏心に対しては、ポケットａ〜ｄの内圧を駆動源に自動調心が働くようになっている。図７において、Ｂは制御オリフィスである。   The hydrostatic bearing is provided with a hydraulic equipment that supplies high-pressure fluid from an external hydraulic source to the bearing gap, and a plurality of pockets a to d that receive supply of high-pressure fluid are formed on the bearing surface as shown in FIG. . For the eccentricity of the axis A, self-alignment works by using the internal pressure of the pockets a to d as a driving source. In FIG. 7, B is a control orifice.

ポケットａ〜ｂについては、第１の静圧軸受の場合、水平軸６ａ，６ｂと直交する断面において、垂直軸１０と平行な上下方向に対称なポケットａ-ｂおよび垂直軸１０と直交する左右方向に対称なポケットｃ-ｄが設定される。第２の静圧軸受の場合、垂直軸１０と直交する断面において、水平軸６ａ，６ｂと直交する左右方向に対称なポケットａ-ｂおよび水平軸６ａ，６ｂと平行な前後方向に対称なポケットｃ-ｄが設定される。   Regarding the pockets a to b, in the case of the first hydrostatic bearing, in the cross section orthogonal to the horizontal axes 6a and 6b, the pocket ab symmetrical to the vertical direction parallel to the vertical axis 10 and the right and left orthogonal to the vertical axis 10 A symmetric pocket cd is set. In the case of the second hydrostatic bearing, in the cross section orthogonal to the vertical axis 10, the pocket ab symmetrical to the left and right directions orthogonal to the horizontal axes 6a and 6b and the pocket symmetrical to the front and rear directions parallel to the horizontal axes 6a and 6b. cd is set.

油圧シリンダ３，４は、油圧源からシリンダ内部の２つの室（ピストンにより仕切られる）へ供給される油圧を調整するサーボ弁と、所定の加振特性に基づいてサーボ弁を制御するコントローラと、が備えられる。コントローラからの制御信号に基づいて、サーボ弁が２つの室への油圧を調整することにより、所定の加振特性に応じたピストンロッドの伸縮動作（振動）が発生するのである。   The hydraulic cylinders 3 and 4 include a servo valve that adjusts the hydraulic pressure supplied from a hydraulic source to two chambers inside the cylinder (partitioned by a piston), a controller that controls the servo valve based on a predetermined excitation characteristic, Is provided. The servovalve adjusts the hydraulic pressure to the two chambers based on the control signal from the controller, so that the expansion / contraction operation (vibration) of the piston rod according to a predetermined excitation characteristic occurs.

第１の油圧シリンダ３が発生する振動は、Ｕ字アーム７の水平軸６ａ，６ｂから第１の静圧軸受による自動調心の作用（動的保持力）を介して軸受５ａ，５ｂに伝達され、テーブル２を垂直方向へ加振する。第２の静圧軸受が垂直軸１０と軸受１１との２面間を非接触状態に保持するので、テーブル２の垂直方向への加振が円滑に案内される。第２の油圧シリンダ４が発生する振動は、軸受１１から第２の静圧軸受による自動調心の作用（動的保持力）を介して垂直軸１０に伝達され、テーブル２を水平方向へ加振する。第１の静圧軸受が水平軸６ａ，６ｂと軸受５ａ，５ｂとの２面間を非接触状態に保持するので、テーブル２の水平方向への加振が円滑に案内される。   The vibration generated by the first hydraulic cylinder 3 is transmitted from the horizontal shafts 6a and 6b of the U-shaped arm 7 to the bearings 5a and 5b via the self-aligning action (dynamic holding force) by the first hydrostatic bearing. Then, the table 2 is vibrated in the vertical direction. Since the second hydrostatic bearing holds the two surfaces of the vertical shaft 10 and the bearing 11 in a non-contact state, the vibration of the table 2 in the vertical direction is smoothly guided. The vibration generated by the second hydraulic cylinder 4 is transmitted from the bearing 11 to the vertical shaft 10 through the self-aligning action (dynamic holding force) by the second hydrostatic bearing, and applies the table 2 in the horizontal direction. Shake. Since the first hydrostatic bearing holds the two surfaces of the horizontal shafts 6a and 6b and the bearings 5a and 5b in a non-contact state, the horizontal excitation of the table 2 is smoothly guided.

第１の油圧シリンダ３および第２の油圧シリンダ４においては、ピストンロッドのフリクションを低減するため、シリンダ端部の軸受とこれを貫通するピストンロッドとの２面間に所定の隙間を設定するべく、シリンダ端部の軸受がシールレスに構成される。   In the first hydraulic cylinder 3 and the second hydraulic cylinder 4, in order to reduce the friction of the piston rod, a predetermined gap should be set between the two surfaces of the bearing at the cylinder end and the piston rod passing through the cylinder end. The cylinder end bearing is configured to be sealless.

第１の油圧シリンダ３および第２の油圧シリンダ４においては、シリンダ内部の油圧がピストンロッドとシールレスの軸受との２面間から流出する一方、第１の静圧軸受および第２の静圧軸受においては、ポケットに導入される油圧が軸受隙間から流出するようになる。これら油圧の流出部を囲う槽１５が備えられ、槽１５に溜まる油圧の漏れ量を油圧源に回収するようになっている。   In the first hydraulic cylinder 3 and the second hydraulic cylinder 4, the hydraulic pressure inside the cylinder flows out from between the two surfaces of the piston rod and the sealless bearing, while the first hydrostatic bearing and the second hydrostatic pressure. In the bearing, the hydraulic pressure introduced into the pocket flows out from the bearing gap. A tank 15 is provided to enclose these hydraulic pressure outflow portions, and the amount of hydraulic leakage accumulated in the tank 15 is collected in a hydraulic pressure source.

このように構成すると、第１の静圧軸受および第２の静圧軸受により、軸６ａ，６ｂ、１０と軸受５ａ，５ｂ、１１との２面間のフリクションが低減され、第１の油圧シリンダ３および第２の油圧シリンダ４が発生する振動（ピストンロッドの伸縮動作）により、被試験物を載置するテーブルを高周波の加振特性で試験することが可能となる。また、第１の連結部および第２の連結部が軸とこれに嵌合する軸受とから構成され、これらの２面間を非接触状態に保持する静圧軸受により、テーブル２を水平方向および垂直方向へ円滑かつ適確に案内しえるのである。   With this configuration, the first hydrostatic bearing and the second hydrostatic bearing reduce the friction between the two surfaces of the shafts 6a, 6b, 10 and the bearings 5a, 5b, 11, and the first hydraulic cylinder. The table on which the object to be tested is placed can be tested with a high-frequency excitation characteristic by the vibration (the expansion and contraction operation of the piston rod) generated by the third and second hydraulic cylinders 4. Further, the first connecting portion and the second connecting portion are composed of a shaft and a bearing fitted to the shaft, and the table 2 is placed in the horizontal direction by a hydrostatic bearing that holds these two surfaces in a non-contact state. It can guide smoothly and accurately in the vertical direction.

第１の油圧シリンダ３および第２の油圧シリンダ４においても、シリンダ内部の油圧がピストンロッドとシールレスの軸受との２面間に入り、ピストンロッドとシールレスの軸受との２面間が非接触状態に保持されるため、フリクションが低減され、高周波の加振特性が得やすくなる。   In the first hydraulic cylinder 3 and the second hydraulic cylinder 4 as well, the hydraulic pressure inside the cylinder enters between the two surfaces of the piston rod and the sealless bearing, and the distance between the two surfaces of the piston rod and the sealless bearing is not. Since the contact state is maintained, friction is reduced and high-frequency excitation characteristics are easily obtained.

第１の連結部において、テーブル２側に水平軸を固定する一方、第１の油圧シリンダ３側に水平軸に嵌合する軸受を設けるようにしても良い。また、第２の連結部において、第２の油圧シリンダ４側に垂直軸を固定する一方、テーブル２側に垂直軸を嵌合する軸受を設けるようにしても良い。図２〜図４において、１６はテーブル２のロワデッキであり、４つの軸受５ａ，５ｂは、テーブル２とロワデッキ１６との間において、ｘ形のロワデッキ１６の各先端部に配置される。   In the first connecting portion, a horizontal shaft may be fixed on the table 2 side, while a bearing that fits the horizontal shaft may be provided on the first hydraulic cylinder 3 side. Further, in the second connecting portion, a bearing that fixes the vertical shaft to the second hydraulic cylinder 4 side and fits the vertical shaft to the table 2 side may be provided. 2 to 4, reference numeral 16 denotes a lower deck of the table 2, and the four bearings 5 a and 5 b are arranged at the respective front ends of the x-shaped lower deck 16 between the table 2 and the lower deck 16.

図５，図６は、別の実施形態を説明するものであり、２本の垂直軸１０ａ，１０ｂが備えられる。テーブル２ａの両側およびロワデッキ１６ａの両側にステイ２０が形成され、２本の垂直軸１０ａ，１０ｂは、上下のステイ２０間にこれら軸穴を介して固定される。２１はＵ字アームであり、両端１１ａ，１１ｂが垂直軸１０ａ，１０ｂに嵌合する軸受に形成され、中央部が第２の油圧シリンダ４のピストンロッドに連結される。 5 and 6 illustrate another embodiment, and two vertical shafts 10a and 10b are provided. Stays 20 are formed on both sides of the table 2a and both sides of the lower deck 16a, and the two vertical shafts 10a and 10b are fixed between the upper and lower stays 20 through these shaft holes. Reference numeral 21 denotes a U-shaped arm, whose both ends 11a and 11b are formed as bearings fitted to the vertical shafts 10a and 10b, and whose central portion is connected to the piston rod of the second hydraulic cylinder 4.

テーブル２ａとロワデッキ１６ａとの間に４個の軸受５ａ，５ｂが所定の配置状態に固定される。各軸受５ａ，５ｂは、同一方向に配置され、軸穴が同軸上に対向する１対の軸受５ａ，５ａ、５ｂ，５ｂ間に２本の水平軸６ａ，６ｂが１本ずつ支持される。各水平軸６ａ，６ｂの中央が角軸部２２に形成され、角軸部２２に対応する角穴２３を形成するブロック２４が第１の油圧シリンダ３のピストンロッドに連結される。   Four bearings 5a and 5b are fixed in a predetermined arrangement state between the table 2a and the lower deck 16a. The bearings 5a and 5b are arranged in the same direction, and two horizontal shafts 6a and 6b are supported one by one between a pair of bearings 5a, 5a, 5b and 5b whose shaft holes are coaxially opposed. The center of each horizontal shaft 6 a, 6 b is formed in the square shaft portion 22, and a block 24 that forms a square hole 23 corresponding to the square shaft portion 22 is connected to the piston rod of the first hydraulic cylinder 3.

ブロック２４は、角穴部２３ａが上下に分割可能な２部品から構成され、ロワデッキ１６ａの中央部にブロック２４が通過可能な開口部２５が設けられる。図５において、３０はテーブル２ａの中央部を形成する嵌め付け板であり、１対の軸受５ａ，５ａ、５ｂ，５ｂ間に水平軸６ａ，６ｂを取り付け、ブロック２４の２部品を上下から組み合わせることにより、ブロック２４の角穴２３に水平軸６ａ，６ｂの角軸部２２が嵌合状態に固定されるのである。嵌め付け板３０は、水平軸６ａ，６ｂおよびブロック２４の組付作業の完了後にテーブル２ａの中央部の開口部３１を塞ぐように取り付けられる。   The block 24 is composed of two parts in which the square hole portion 23a can be divided vertically, and an opening 25 through which the block 24 can pass is provided at the center of the lower deck 16a. In FIG. 5, reference numeral 30 denotes a fitting plate that forms the central portion of the table 2a. The horizontal shafts 6a and 6b are attached between a pair of bearings 5a, 5a, 5b, and 5b, and the two parts of the block 24 are combined from above and below. As a result, the square shaft portions 22 of the horizontal shafts 6a and 6b are fixed in the fitted state in the square holes 23 of the block 24. The fitting plate 30 is attached so as to close the opening 31 at the center of the table 2a after the assembly work of the horizontal shafts 6a and 6b and the block 24 is completed.

各水平軸６ａ，６ｂとこれらの端部に嵌合する各軸受５ａ，５ｂとの２面間を非接触状態に保持する第１の静圧軸受と、垂直軸１０，１０ｂとこれに嵌合する軸受１１ａ，１１ｂとの２面間を非接触状態に保持する第２の静圧軸受と、が備えられる。   A first hydrostatic bearing that keeps the two surfaces of the horizontal shafts 6a and 6b and the bearings 5a and 5b fitted to these end portions in a non-contact state, and the vertical shafts 10 and 10b and the fittings And a second hydrostatic bearing that holds the two surfaces of the bearings 11a and 11b in a non-contact state.

このような構成により、図１〜図４の実施形態と同様の効果が得られるほか、油圧シリンダの本数を増やすことなく、２本の水平軸６ａ，６ｂおよび２本の垂直軸１０ａ，１０ｂにより、良好な加振性能が得られる。   With such a configuration, the same effect as the embodiment of FIGS. 1 to 4 can be obtained, and the two horizontal shafts 6a and 6b and the two vertical shafts 10a and 10b can be used without increasing the number of hydraulic cylinders. Good excitation performance can be obtained.

この発明の実施形態に係る振動試験機の構成を説明する斜視図である。It is a perspective view explaining the composition of the vibration testing machine concerning the embodiment of this invention. 同じくテーブル構造を説明する斜視図である。It is a perspective view explaining a table structure similarly. 同じくテーブル構造を説明する上方から斜視する分解図である。It is an exploded view from the upper side explaining a table structure similarly. 同じくテーブル構造を説明する下方から斜視する分解図である。It is an exploded view from the bottom explaining a table structure similarly. 別の実施形態を係るテーブル構造を説明する上方から斜視する分解図である。It is an exploded view perspectived from the top explaining the table structure concerning another embodiment. 同じくテーブル構造を説明する下方から斜視する分解図である。It is an exploded view from the bottom explaining a table structure similarly. この発明の実施形態に係る静圧軸受の説明図である。It is explanatory drawing of the hydrostatic bearing which concerns on embodiment of this invention.

符号の説明Explanation of symbols

１ フレーム（機台）
２、２ａ テーブル
３ 第１の油圧シリンダ
４ 第２の油圧シリンダ
５ａ，５ｂ 水平軸の軸受
６ａ，６ｂ 水平軸
７、２１ Ｕ字アーム
８ａ，８ｂ ボルト
１０、１０ａ，１０ｂ 垂直軸
１１、１１ａ，１１ｂ 垂直軸の軸受
１５ 槽
１６、１６ｂ テーブルのロワデッキ
２０ ステイ
２２ 水平軸の角軸部
２３ａ ブロックの角穴部
２４ ブロック 1 frame (machine stand)
2, 2a Table 3 First hydraulic cylinder 4 Second hydraulic cylinder 5a, 5b Horizontal shaft bearing 6a, 6b Horizontal shaft 7, 21 U-arm 8a, 8b Bolt 10, 10a, 10b Vertical shaft 11, 11a, 11b Bearing of vertical axis 15 Tank 16, 16b Lower deck of table 20 Stay 22 Angular part of horizontal axis 23a Square hole part of block 24 block

Claims (7)

被試験物を載置するテーブルと、垂直方向への振動を発生する第１の流体アクチュエータと、水平方向への振動を発生する第２の流体アクチュエータと、前記テーブルと前記第１の流体アクチュエータとの間に水平軸およびこれに嵌合する軸受から構成される第１の連結部と、前記テーブルと前記第２の流体アクチュエータとの間に垂直軸およびこれに嵌合する軸受から構成される第２の連結部と、前記第１の連結部の前記水平軸とこれに嵌合する前記軸受との間を非接触状態に保持する第１の静圧軸受と、前記第２の連結部の前記垂直軸とこれに嵌合する前記軸受との間を非接触状態に保持する第２の静圧軸受と、を備え、
前記第１の連結部は、前記水平軸の中央部に前記第１の流体アクチュエータが連結され、前記水平軸に嵌合する前記軸受として軸穴が同軸上に対向する１対の軸受が前記テーブルに配置され、これら軸受が前記水平軸の両端部にそれぞれ嵌合してなり、これら軸受および前記水平軸によって前記第２の流体アクチュエータが発生する振動に伴う前記テーブルの水平方向への動きを案内する一方、前記第２の連結部は、前記垂直軸が前記テーブルに固定され、前記垂直軸に嵌合する前記軸受に前記第２の流体アクチュエータが連結され、前記垂直軸およびこれに嵌合する前記軸受によって前記第１の流体アクチュエータが発生する振動に伴うテーブルの垂直方向への動きを案内することを特徴とする振動試験機。 A table on which the DUT is placed, a first fluid actuator that generates vibration in the vertical direction, a second fluid actuator that generates vibration in the horizontal direction, the table, and the first fluid actuator, A first connecting portion composed of a horizontal shaft and a bearing fitted to the horizontal shaft, and a vertical shaft and a bearing fitted to the vertical shaft between the table and the second fluid actuator. Two connecting portions, a first hydrostatic bearing that holds the horizontal shaft of the first connecting portion and the bearing fitted thereto in a non-contact state, and the second connecting portion. A second hydrostatic bearing for maintaining a non-contact state between the vertical shaft and the bearing fitted therein,
The first connecting portion is connected to the central portion of the horizontal shaft with the first fluid actuator, and a pair of bearings whose shaft holes are coaxially opposed as the bearings to be fitted to the horizontal shaft are the table. These bearings are respectively fitted to both ends of the horizontal shaft, and the horizontal movement of the table accompanying the vibration generated by the second fluid actuator is guided by these bearings and the horizontal shaft. On the other hand, the second connecting portion is configured such that the vertical shaft is fixed to the table, the second fluid actuator is connected to the bearing that is fitted to the vertical shaft, and the second shaft is fitted to the vertical shaft. A vibration tester for guiding a vertical movement of a table accompanying vibration generated by the first fluid actuator by the bearing. 前記第１の静圧軸受は、前記水平軸とこれに嵌合する前記軸受との間に外部から高圧流体の供給を受けるポケットを備え、第２の静圧軸受は、前記垂直軸とこれに嵌合する前記軸受との間に外部から高圧流体の供給を受けるポケットを備えることを特徴とする請求項１に記載の振動試験機。   The first hydrostatic bearing includes a pocket for receiving a supply of high-pressure fluid from outside between the horizontal shaft and the bearing fitted to the horizontal shaft, and the second hydrostatic bearing includes the vertical shaft and the vertical shaft. The vibration tester according to claim 1, further comprising a pocket for receiving a supply of high-pressure fluid from the outside between the bearing to be fitted. 前記第１の静圧軸受のポケットとして、前記水平軸と直交する断面において、前記垂直軸と平行な上下方向に対称なポケットおよび前記垂直軸と直交する左右方向に対称なポケットが設定される一方、前記第２の静圧軸受のポケットとして、垂直軸と直交する断面において、前記水平軸と直交する左右方向に対称なポケットおよび前記水平軸と平行な前後方向に対称なポケットが設定されることを特徴とする請求項２に記載の振動試験機。   As a pocket of the first hydrostatic bearing, in a cross section orthogonal to the horizontal axis, a pocket symmetrical in the vertical direction parallel to the vertical axis and a pocket symmetrical in the horizontal direction orthogonal to the vertical axis are set. As a pocket of the second hydrostatic bearing, in a cross section perpendicular to the vertical axis, a pocket symmetrical in the left-right direction perpendicular to the horizontal axis and a pocket symmetrical in the front-rear direction parallel to the horizontal axis are set. The vibration testing machine according to claim 2. 前記第１の流体アクチュエータおよび前記第２の流体アクチュエータは、シリンダ内部を２つの室に仕切るピストンを収装する油圧シリンダと、油圧源から前記油圧シリンダの２つの室へ供給される油圧を調整するサーボ弁と、所定の加振特性に基づいて前記サーボ弁を制御するコントローラと、を備えることを特徴とする請求項１〜３の何れか１つに記載の振動試験機。   The first fluid actuator and the second fluid actuator adjust a hydraulic cylinder that houses a piston that partitions the inside of the cylinder into two chambers, and a hydraulic pressure that is supplied from a hydraulic source to the two chambers of the hydraulic cylinder. The vibration tester according to any one of claims 1 to 3, further comprising: a servo valve; and a controller that controls the servo valve based on predetermined vibration characteristics. 前記油圧シリンダは、前記シリンダ端部の軸受とこれを貫通する前記ピストンロッドとの間に所定の隙間を設定するべく前記シリンダ端部の軸受をシールレスに構成されることを特徴とする請求項４に記載の振動試験機。   2. The hydraulic cylinder according to claim 1, wherein the cylinder end bearing is configured to be sealless so as to set a predetermined clearance between the cylinder end bearing and the piston rod passing therethrough. 4. The vibration testing machine according to 4. 前記第１の連結部は、前記水平軸が２本配置され、前記１対の軸受が各水平軸毎に配置され、前記第１の流体アクチュエータがＵ字アームを介して前記各水平軸の中央部に連結されることを特徴とする請求項１〜５の何れか１つに記載の振動試験機。 In the first connecting portion, two horizontal shafts are arranged, the pair of bearings are arranged for each horizontal shaft, and the first fluid actuator is arranged at the center of each horizontal shaft via a U-arm. The vibration testing machine according to claim 1, wherein the vibration testing machine is connected to a portion. 前記第２の連結部は、前記垂直軸が２本配置され、前記軸受が各垂直軸毎に配置され、前記第２の流体アクチュエータがＵ字アームを介して各軸受に連結されることを特徴とする請求項１〜５の何れか１つに記載の振動試験機。 In the second connecting portion, the two vertical shafts are arranged, the bearings are arranged for each vertical shaft, and the second fluid actuator is connected to each bearing through a U-shaped arm. The vibration testing machine according to any one of claims 1 to 5 .
JP2006003648A 2006-01-11 2006-01-11 Vibration testing machine Expired - Fee Related JP4901219B2 (en)

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