TW200920790A

TW200920790A - Heat transfer elastic sheet and method for manufacturing the same

Info

Publication number: TW200920790A
Application number: TW096145341A
Authority: TW
Inventors: Masayuki Kato; Hironori Nonami; Ryuji Uchiyama
Original assignee: Kureha Elastomer Co Ltd
Priority date: 2007-11-15
Filing date: 2007-11-29
Publication date: 2009-05-16
Also published as: TWI447173B; WO2009063534A1

Abstract

This invention provides a novel heat transfer elastic sheet which, by virtue of the adoption of a novel heat transfer electrical insulating agent, can significantly improve heat transfer properties through the incorporation of the heat transfer electrical insulating agent in a smaller amount than the addition amount of the conventional metal oxide while ensuring the operationality high enough to realize molding into a contemplated sheet shape. The heat transfer elastic sheet is manufactured by molding a mixed composition comprising a polymeric elastic material such as silicone rubber into a sheet and crosslinking the material. In this case, ametallic silicon powder is adopted as a heat transfer electrical insulating agent.

Description

200920790 九、發明說明：【發明所屬之技術領域】本發明係關於一種可確保電氣絕緣性及橡膠狀彈性特性並且可實現優異之熱傳導性之新額傳熱性彈性片及其製【先前技術】對於功率電晶體、問流體、整流器、及變慶器等㈣性電氣零件而言，重要的是將由於通電產生之熱量有效: 散逸至外部。因此，先前以來，當將散熱零件安裝至發熱性電氣零件時，係採用於該等發熱性電氣零件與散熱料之間安裝傳熱性彈性片之構造。 #亦即，可藉由夾設傳熱性彈性片，填充由發熱令件與散熱零件之疊合面之凹凸所引起之、…y 觸熱阻。藉此，可有效地、以減少接零件，從而可更有效地發揮散熱零件之散熱效果傳導至放熱又，近年來，當於液晶顯示器中，對多為直線狀之液晶面板側之自排列立而子列切硬焊時，亦採用同樣之傳熱性彈性片己線於該等兩個端子列與電烙鐵之； =，亦要求其追隨於兩端子列與電烙鐵之:形=緩衝貫現傳熱。办狀而有效地再者’此種傳熱性彈性片，一般成物並使其成形為片狀老種匕合組狀者，該混合組成物以耐熱性高之石夕 200920790200920790 IX. OBJECTS OF THE INVENTION: The present invention relates to a novel heat transfer elastic sheet capable of ensuring electrical insulation and rubbery elastic properties and capable of achieving excellent thermal conductivity and a system therefor. For power transistors, fluids, rectifiers, and rectifiers, etc., it is important to make the heat generated by the energization effective: dissipate to the outside. Therefore, in the prior art, when the heat dissipating component is mounted to the heat generating electrical component, a structure in which the heat conductive elastic sheet is mounted between the heat generating electrical component and the heat radiating material is employed. In other words, the heat transfer elastic sheet is interposed to fill the thermal resistance caused by the unevenness of the overlapping surface of the heat generating member and the heat dissipating member. Thereby, the component can be effectively reduced, so that the heat dissipation effect of the heat dissipating component can be more effectively transmitted to the heat release. In recent years, in the liquid crystal display, the self-alignment of the liquid crystal panel side which is mostly linear In the case of sub-cutting brazing, the same heat-transfer elastic sheet is used in the two terminal columns and the soldering iron; =, it is also required to follow the two-terminal column and the soldering iron: shape = buffering Now heat transfer. In addition, the heat-transfer elastic sheet is generally formed into a sheet-like old-fashioned composition, and the mixed composition is high in heat resistance. 2009-20790

橡踢為主體，且為了蔣古甘μ I 傳_能，配合有氧化紹或氧化镇專至屬氧化物之粉末（參照專利文獻〜然而’就先前之傳熱性彈性丄 H ^ ^ ^ ^ ^ m 片而5,右為了提高傳熱性此而增加金屬氧化物之处々a . ^ 口里則於達成充分之傳熱性 :之：，存在有彈性片之物性顯著下降之問題。具體而言， g產生下述等問題：隨著金屬氧化曰實現充分之傳埶性能之1合 -δ罝之ia大，於〜丨牙热f王月匕之刖，會影塑 II砑先輥加工等之成形， 1入’·"隔彈性片疊合之兩構件之形狀追隨性下降，於 Γ面上產生間隙，由此難以穩定地獲得充分之傳熱性月t> 0 因此’先前之傳熱性彈,降κ搞片極難於確保所要求之彈性特性之同％霄現高度之傳熱性能。專利文獻1:曰本專利特開昭47— 324〇〇號公報【發明内容】並解:二本：明係以如上所述之事項為背景研發而成者，降/、 &供—種新穎傳熱性彈性片，該新賴傳轨 :巧用新賴傳熱性電氣絕緣劑，藉此可確保能夠成 t為目標片形狀之操蘇㈣纟且月匕夠以少於先前之金屬氧匕物之配，量來避免物性之顯著下熱性能。 J町j太巾田k同傳又’與傳熱性彈性片之製造方法有關之本發明之目的性種新穎傳熱性彈性片之製造方法，該新穎傳熱坪性片採用新穎傳熱性電氣絕緣劑，藉此可確保良好之 200920790 操作性，並且能夠以較少之傳熱性電氣絕緣劑之添加量來避免物性之顯著下降，同時發揮充分之傳熱性能，並且成品之使用亦變得容易。和為解決上述課題，本發明人反覆進行了多次實驗及研究後發現，藉由於高分子彈性材料中配合特定之粉末，盥先前配合金屬氧化物之情形相比，能夠以較少之配合量提尚傳熱性能，因此，實現了可於充分確保柔軟性、電氣絕緣性及操作性等之同時發揮優異之傳熱性能之新穎橡膠狀彈性材料，本發明人根據該發現完成了本發明。夕亦即，與傳熱性彈性片有關之本發明，係將於高分舞性材料中配合有傳熱性電氣絕緣劑之混合組成物成形為片狀，亚進行交聯而獲得之傳熱性彈性片，其特徵在於採用金屬矽粉末作為上述傳熱性電氣絕緣劑。、’ 根據本發明，可獲得如下傳熱性彈性片，該傳熱 !生片根據下述貫施形態及實施例之記載明確得知，藉金屬夕作為傳熱性電氣絕緣劑，與先前採用金屬氧叙料傳熱性電氣絕緣劑之情形㈣，能夠以較少之配合旦提尚傳熱性能。〇里尤其，與先前採用金屬氧化物作為傳熱性電氣絕緣月形減，由於可抑制配合量，故可將成形為片形狀之成形性及柔軟性充分地維持於實用之水準。之再者藉由知用金屬矽作為傳熱性電氣絕緣劑而可路揮如上所述之特辣畤里备子殊放果，其理由尚未充分闡釋，且性闡釋並非本發明之目&社 /、科學芝目的。然而，其理由之一可推測例如， 7 200920790 不僅與金屬石夕所具有之高熱導率有關，而且與金屬石夕之敲緊密度（tap density)等物性有關。亦即，金屬矽之敲緊密度約為600 ,小於氧化鋁及氧化鎮等金屬氧化物之_〜⑴。。因此，可推測當與石夕橡膠材料等高分子彈性材料混合時，與金屬氧化物相比，金屬石夕粉末於混入至高分子彈性材料之混合狀態下之分散性更好，可穩定地表現出良好之混合狀態。而且金屬；^本身之熱導率亦達到左右，該熱導率遠大於氧化銘及氧化鎂等金屬氧化物之 W/mK。如上所述’可認為金屬矽所固有之物性與高分子彈性材料較佳地匹配，苴社要果，精由以較少之配合量使金屬矽正體大致均勻地分勒、'日入” a、也刀散此合至鬲分子彈性材料中，可有確保柔軟性及強度等彈性料敕㈣垃弹…寸性及成形性，並且可使彈性材 -η且穩定地表現出目標傳熱性能。又用石夕橡膠作為高分子彈性材料時，由於亦可充八橡膠本身之作A椟暖充刀地、.隹持石夕作為橡膠特性之黏著性，故 —般益雪胜姑展石夕橡膝時’ ..... 日黏財，從而可發揮優異之操作性。又’與傳熱性彈性片錢之本發明中矽粉末之平均粒徑為2。_以下。 “為使金屬稭由使金屬矽粉末之平均粒徑為2 更為良好之片強卢、w μ1η从下，可獲得々洩戾、耐久性、及彈性等。於，若金屬矽之平玲4 ρ，其原因在句粒I大於20 μηι，則雖7 h 能之提高，作根墙 _ 可貫現傳熱性根據目標高分子彈性片特性 <不同，難以使 200920790 強度或撕裂強度、耐久性、橡膠彈性（伸長率）等滿足要长值，又，彈性片表面之凹凸亦可能成問題。進而，與傳熱性彈性片有關之本發明中，較佳為對於每⑽重量份之高分子彈性材料，金屬秒：末：配：量為5重量份以上且未滿300重量份。亦即，根據所使用之高分子彈性材料組成之不同，若每100重量份之高分子彈性材料中，金屬矽粉末之配合：未滿5重量份’财_以充分發揮提高目標傳熱性能之效果。另-方面1每_ t量份之高分子彈性材料中，金屬石夕粉末之配合量為300重量份以上，則有時會產生如下不良狀況：於將金屬秒粉末逐步混練至高分子彈性材料之過程中，材料產生破損等而導致難以混練入金屬石夕粉 m練後之強度不^ ’從而無法均勾地對彈性片進行 :延成形。使# 100重量份之高分子彈性材料中之金屬矽知末之配合罝為5重量份以上曰去、、龙a。去曰上且未滿300重量份，藉此可獲付傳熱性、伸長率、# gsu + 更度#及成形時之加I性均優異之傳熱性彈性片。繼而，對於與傳熱性彈性片有關之本發明之高分子彈性材料，較佳為可採用夕橡膠，更佳為可採用甲基乙烯基夕貌系石夕橡膠。藉由採石夕橡膠，即便㈣金^ 烯基梦烧系、f至屬矽之配合量設定得較多之情形時，亦可更有利地碟伴彳查為ω 物性。 ’、…、性弹性片之柔軟性及成形性等基本 -傳’’、、f生彈性片有關之本發明中，亦可較佳地採 200920790 用形成有用以覆蓋表面之表面芦 — 層，可六层地針值勒 B 、”D籌。精由形成表面 •^易地對傳熱性彈性片賦予脫模性及密此，例如，當將傳熱性彈性片藉州作罨極4熱壓接作業由+ 、、羨衝材料時，雖然存在於熱壓接部分漏出而使傳孰性彈性^性物質會自被壓傳熱性彈性片破裂之問題 *導致 .,u ± 精由形成用以覆蓋傳埶性彈可1 層（脫模層）’提高傳熱性彈性片之脫模性，免或減少傳熱性彈性片與被壓接構㈣接而可大幅提高傳熱性彈性片之作為緩衝材料之耐久性。又，與傳熱性彈性片之製造方法㈣之本發明之特徵 =於’將由高分子彈性材料及作為傳熱性電氣絕緣劑之金屬石夕粉末所構成之混合組成物溶解於溶劑，而獲得固體成分㈣為〜寫、黏度為测〜2_Gcp = Π將該混合溶液於由聚對苯…乙二醇醋構成之 …良好之支持膜上塗佈成特定厚度，於溫度為 50〜l2〇C、更佳為溫度為6〇〜9代之供箱内進行乾燥繼而藉由電子射線照射來使上述支持膜上之高分子彈性片交秘’之後將支持膜剝離。根據此種製造方法，藉由採用矽橡膠或其他任意橡膠材料、或者彈性體材料等作為高分子彈性材料，並於其中/ ':、、力孟屬矽叙末作為傳熱性電氣絕緣劑，可獲得與先前採用金屬氧化物作為傳熱性電氣絕緣劑之情形相比:、能以較 ^之配合量來提高傳熱性能之傳熱性彈性片。而且，所獲传之傳熱性彈性片無氣泡及凹凸，厚度可較薄，為 200920790 了：二'度較大’為1m左右。再者’上述傳熱性彈性片 :於父肅：地自支持膜剝離，該剝離後之傳熱性彈性與黏者性膠帶之黏接性良好，並且傳熱黏接性低，易於使用。職片彼此之根據與傳熱性彈性片有關之本發明，可獲得如 =性片，該傳熱性彈性片根據下述實施形王鸾軋化物作為傳熱性電氣絕緣劑之相比’能夠以較少之配合量來提高傳熱性能。又，根據與傳熱性彈性片之製造方法有關之本發明，可谷易地獲得如下傳熱性彈性片，該傳熱性彈性片藉由配合金屬砍作為傳熱性電氣絕緣劑，能夠以少於先前之金屬氧化物之配合量來提高傳熱性能，並且較薄且並，而且使用性優異。 ‘' 【實施方式】以下，為了使本發明更為具體、明確，就本發明之實施形態進行說明。、首先’作為本發明中使用古 1又用之冋分子弹性材料，可列舉橡膠材料及彈性體材料。若呈骹认a — ^ _ 丨丁右畀體地進打例不，則除矽橡膠、乙烯丙烯橡膠、天然橡膠、里a _ y 一戊一烯橡恥、苯乙烯丁二烯橡膠、或綱等橡膠材料之外，可於本發明中採用以乙烯乙酸乙烯酯或甲基丙烯酸乙扣 μ规匕肺i日共聚物、乳化聚乙烯等彈性體材料等為代表之各種公 △夭之橡膠材枓或彈性體材料 200920790 作為高分子彈性材料尤其可較佳地採用矽橡膠作為高分子彈性材料，該石夕橡膠可藉由使公知之聚有機矽氧烷交聯而獲得，已知其本身於交聯之後具有電氣絕緣性及耐熱性等優異之物性，且硬度低，柔軟性、形狀追隨性、及加工性亦優異。亦即，本么明中，可尤其較佳地採用先前已知之各種矽橡膠作為目標傳熱性彈性片之基質材料。 -ί 具體而言，上述矽橡膠之交聯形態並無限定，除有梢過氧化物之自由基反應型之外，可列舉含有乙烯基之聚有機石夕氧烧與具有鍵結於⑦原子之氫原子之有機氫㈣_ —ge咖系觸媒之加成反應型、或縮合反應型等。又，上述矽橡膠之組成亦無限定，除曱基乙烯基矽烷系之外，可列舉甲基笨基石夕烧系、-田盆 … 尻糸一甲基矽烷糸、曱基氟烷基矽燒系等。其原因在於’該等矽橡膠均同樣具備如上所述之物性0The rubber kick is the main body, and for the Jiang Gugan μ I pass, can be combined with the oxide or oxidized town to the oxide powder (refer to the patent literature ~ However 'the previous heat transfer elastic 丄H ^ ^ ^ ^ ^ m piece and 5, right to increase the heat transfer, which increases the metal oxide 々a. ^ The mouth is full of heat transfer: there is a problem that the physical properties of the elastic sheet are significantly reduced. In other words, g has the following problems: as the metal ruthenium oxide achieves sufficient transfer performance, the 1 - δ 罝 ia is large, and after the 丨热 heat f Wang Yue 匕会会会会刖影影影影影影影Forming, 1 into '·" The shape followability of the two members laminated with the elastic sheets is lowered, and a gap is generated on the surface of the crucible, thereby making it difficult to stably obtain sufficient heat transfer rate t> 0. It is extremely difficult to ensure the heat transfer performance of the same elastic properties of the required elastic properties. Patent Document 1: Japanese Patent Laid-Open Publication No. SHO 47-324A [Invention] : Two books: Ming Department developed on the background of the above mentioned matters, down /, & For a new type of heat transfer elastic sheet, the new Lai track: the use of new heat-transfer electrical insulating agent, which can ensure that t can be the shape of the target piece of the machine (four), and the moon is less than the previous one The metal oxo is blended in an amount to avoid significant thermal properties of the physical properties. J. J. J. T., K., and the same kind of novel heat transfer elasticity of the present invention related to the method for producing a heat-transmissive elastic sheet. In the manufacturing method of the sheet, the novel heat-transfer flat sheet adopts a novel heat-transfer electrical insulating agent, thereby ensuring good operation of 200920790, and avoiding physical properties with a small amount of heat-insulating electrical insulating agent added. Significantly decreased, while exerting sufficient heat transfer performance, and the use of the finished product is also easy. And in order to solve the above problems, the inventors have repeatedly conducted many experiments and studies and found that by the specificity of the polymer elastic material Compared with the case where the metal oxide is previously blended with the metal oxide, the heat transfer performance can be improved with a small amount of the powder, so that flexibility, electrical insulation, workability, and the like can be sufficiently ensured. The present inventors have completed the present invention based on the findings of the novel rubber-like elastic material which exhibits excellent heat transfer performance. That is, the present invention relating to a heat-transmissive elastic sheet is to be blended in a high-scoring material. A heat-transfer elastic sheet obtained by forming a mixed composition of a heat-conductive electrical insulating material into a sheet shape and sub-crosslinked, characterized in that a metal tantalum powder is used as the heat-conductive electrical insulating agent. The following heat-transfer elastic sheet can be obtained, and the heat-transferable green sheet is clearly known from the following embodiments and examples, and the metal oxide is used as a heat-conductive electrical insulating material, and the metal oxide is used as a conductive material. In the case of a thermal electrical insulating agent (4), the heat transfer performance can be improved with a small amount of blending. In particular, the use of metal oxide as a heat-conductive electrical insulation has been reduced, and since the amount of blending can be suppressed, The moldability and flexibility formed into a sheet shape are sufficiently maintained at a practical level. Furthermore, the use of metal ruthenium as a heat-transfering electrical insulating agent can be used as a heat-suppressing electrical insulating agent, and the reason is not fully explained, and the explanation is not the purpose of the present invention. Society /, science and purpose. However, one of the reasons can be presumed, for example, that 7 200920790 is related not only to the high thermal conductivity of the metal shi, but also to the physical properties such as the tap density of the metal. That is, the knocking degree of the metal ruthenium is about 600, which is smaller than that of the metal oxide such as alumina and oxidized town (1). . Therefore, when it is mixed with a polymer elastic material such as a Shixia rubber material, it is presumed that the metal talc powder has a better dispersibility in a mixed state of being mixed with the polymer elastic material than the metal oxide, and can be stably exhibited. Good mixed state. Moreover, the thermal conductivity of the metal itself is also about to be around, and the thermal conductivity is much larger than the W/mK of the oxide and metal oxides such as magnesium oxide. As described above, it can be considered that the physical properties inherent to the metal crucible are better matched with the polymer elastic material, and the essence of the metal crucible is substantially uniformly divided by the amount of the compound. Also, the knives are dispersed into the 鬲 molecular elastic material, and the elastic material (4), which is flexible and strong, can be ensured, and the elastic material can be stably exhibited. When using Shixi rubber as the polymer elastic material, it can also be used as a rubber filling tool for the A rubber, and as a rubber property, it is a kind of rubber.夕橡橡 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The metal straw is obtained by making the metal cerium powder have an average particle diameter of 2, and the film is stronger, and w μ1η is obtained from the bottom, and the enthalpy, durability, and elasticity are obtained. If the metal 矽平玲 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 It is difficult to make the strength or tear strength, durability, rubber elasticity (elongation), etc. of 200920790 satisfy a long value, and the unevenness of the surface of the elastic sheet may also be a problem. Further, in the present invention relating to the heat-transfer elastic sheet, it is preferable that the amount of the metal second: the final amount of the polymer elastic material is 5 parts by weight or more and less than 300 parts by weight per (10) parts by weight of the polymer elastic material. That is, depending on the composition of the polymer elastic material used, if the metal cerium powder is blended per 100 parts by weight of the polymer elastic material: less than 5 parts by weight, in order to fully exert the target heat transfer performance effect. In addition, in the polymer elastic material of the amount of the metal elastic material, the amount of the metal cerium powder is 300 parts by weight or more, and the following may be caused in that the metal sinter powder is gradually kneaded to the polymer elastic material. In the process, the material is damaged or the like, and it is difficult to mix it into the metal stone powder. The strength of the metal powder is not sufficient to make the elastic sheet uniformly: The blending amount of the metal 矽 in the 100 parts by weight of the polymer elastic material is 5 parts by weight or more, and the dragon a. When it is less than 300 parts by weight, it is possible to obtain a heat-transfer elastic sheet excellent in heat transferability, elongation, #gsu + more degree #, and I-formability at the time of molding. Further, as for the polymer elastic material of the present invention relating to the heat transfer elastic sheet, it is preferable to use an eve rubber, and more preferably a methyl vinyl enamel stone rubber. With the use of the stone rubber, even if the amount of the (4) gold-based alkenyl burning system and f to the genus is set to be large, it is more advantageous to check the ω physical property. In the present invention relating to the softness and formability of the elastic sheet, etc., it is also preferable to use the surface of the surface of the invention to cover the surface of the reed layer. It can be used for the six-layer needle value of B, "D. The fine surface is formed by the surface of the heat transfer elastic sheet and the mold release property is tight. For example, when the heat transfer elastic sheet is used as the bungee When the thermocompression bonding operation is performed by the + and the squeezing material, the leakage of the thermocompression-bonding portion causes the squeezing elastic material to rupture from the pressed heat-transfer elastic sheet*, u ± fine Forming a layer (transmissive layer) for covering the transferable elastic material to improve the mold release property of the heat transfer elastic sheet, and to reduce or reduce the heat transfer elastic sheet and the pressed structure (4) to greatly improve heat transferability The durability of the elastic sheet as a cushioning material. Further, the method of the present invention of the method for producing a heat-transmissive elastic sheet (4) is characterized in that it is composed of a polymer elastic material and a metal powder as a heat-conductive electrical insulating agent. The mixed composition is dissolved in a solvent, and the solid component (four) is obtained as ~ write, Viscosity is measured ~2_Gcp = Π The mixed solution is coated on a good support film made of polyparaphenylene glycol vinegar to a specific thickness at a temperature of 50 to 12 〇C, more preferably at a temperature of 6 The 〇~9th generation is dried in the box, and then the polymer elastic sheet on the support film is transferred by electron beam irradiation, and then the support film is peeled off. According to this manufacturing method, by using ruthenium rubber or any other A rubber material or an elastomer material is used as a polymer elastic material, and in the case of / ':, and Li Meng, as a heat-conductive electrical insulating material, it can be obtained as a heat-conductive electrical insulation with a metal oxide previously used. Compared with the case of the agent: a heat-transfer elastic sheet capable of improving the heat transfer performance by a combination of the amount of the agent. Moreover, the heat-transfer elastic sheet obtained has no bubbles and irregularities, and the thickness can be thin, which is 200920790. : The second 'degree is larger' is about 1 m. In addition, the above-mentioned heat-transfer elastic sheet: peeled off from the support film by the father, the heat transfer elasticity after the peeling is good, and the adhesiveness of the adhesive tape is good. And low heat transfer adhesion, easy to use According to the present invention relating to a heat transfer elastic sheet, the heat transfer elastic sheet can be obtained as a heat conductive electrical insulating material according to the following embodiment. Further, according to the present invention relating to the method for producing a heat-transmissive elastic sheet, the following heat-transfer elastic sheet can be obtained by cooperating with the heat-transfer elastic sheet. As a heat-conductive electrical insulating agent, metal cutting can improve heat transfer performance with a smaller amount than the amount of the prior metal oxide, and is thin and excellent in usability. ''Embodiment> Hereinafter, in order to The invention will be described in more detail and clarification. First, as the molecular elastic material used in the present invention, a rubber material and an elastomer material can be cited. If the a a — — — — 畀畀畀畀畀畀畀畀畀畀畀畀畀则则则则则则则则则则则则则则则则则则则则则则则则矽矽矽矽矽矽矽矽矽In addition to the rubber materials, various rubbers such as ethylene vinyl acetate or methacrylic acid ketone μ 匕 i i i i, emulsified polyethylene and other elastomer materials can be used in the present invention. Material or elastomer material 200920790 As the polymer elastic material, in particular, ruthenium rubber can be preferably used as the polymer elastic material, which can be obtained by crosslinking a known polyorganosiloxane, and is known per se. After cross-linking, it has excellent physical properties such as electrical insulating properties and heat resistance, and has low hardness, and is excellent in flexibility, shape followability, and workability. That is, in the present invention, it is particularly preferable to use various kinds of the ruthenium rubber previously known as the matrix material of the target heat-conductive elastic sheet. Specifically, the cross-linking form of the above-mentioned ruthenium rubber is not limited, and in addition to the radical reaction type of the superoxide, a polyorgano-containing oxyfluoride containing a vinyl group and having a bond at 7 atoms may be mentioned. The organic hydrogen of the hydrogen atom (IV) is a addition reaction type or a condensation reaction type of a catalyst. Further, the composition of the above-mentioned ruthenium rubber is not limited, and examples of the ruthenium-based vinyl decane series include methyl ketone sulphate, sho... 尻糸矽矽糸糸, 曱氟氟矽矽矽Department and so on. The reason is that the rubbers of the same kind have the same physical properties as described above.

此處，本發明中，尤佳橡膠。藉此，即便於將金屬可更有利地確保橡膠片之柔之利用範圍變得更廣泛。為使用甲基乙烯基矽烷系之矽石夕之配合量設定得較多時，亦軟性及成形性，從而可使該片之操作性良好， ’可較佳地採用又，本發明中，尤装盔土人研凡再為了使金屬石夕配合進而為了使金屬石夕更的々u 鸯y更均勻地分散至基質中液狀之矽橡膠材料。 12 200920790 中，除交聯劑之外，亦可視需要適當地配合先前所公知之塑化背#著劑、油、延遲交聯劑等成形助劑、著色劑、对熱性提昇劑等。X，亦可視需要而添加先前用作傳熱性電氣絕緣劑之氧化㈣氧化料。進而，亦可配合碳化石夕、石墨、補強用二氧化矽、抗靜電碳等。另一方面，配合於上述高分子彈性材料中之金屬矽係熱傳導性及電氣絕緣性優異之公知者，將其作成為粉末分散於作為基質之高分子彈性材料中。因金屬矽一般係以矽石為原料㈣電料進行還原所得者，且剌作氮化石夕、新/、陶竟、耐火磚等之材料’故可於市場上容易地獲得。尤其於本發明中，採用一般可獲得之金屬石夕粉末即可，亦 ^采用高純度化處理前之金屬㈣末、即純度& 95〜99% 左右之金屬矽粉末。該金屬妙之粉末之平均粒徑較佳為2〇 _以下。於市可容易地獲得平均粒徑經指定之粉末狀態之金屬秒能之：：屬：之平均粒徑大⑨20 μιη，則雖可實現傳熱性強戶咬：裂巨根據目標高分子彈性片特性之不同，難以使 ==度、耐久性、橡膠彈性(伸長率)等滿二=標高分子彈性片之厚度尺寸、或所以之不同，彈性片表面之凹凸亦可能尤其，為了獲得更良好之 *、、、性等，播 _ 月強度、耐久性、或彈木用平均粒徑較佳為20 μιη以下、更下之金屬矽粉末。更佳為10 μηι以 13 200920790 工方:二二Γ屬猶之粒徑過小，則亦有粉末加高。因此彳用方面之問題，從而產量下降而成本變末m 為採用平均粒徑為2㈣以上之金屬石夕粉土為採用平均粒徑為5μηι以上之金屬矽粉末。此種金屬秒粉末相對於高量係根據彈性+门刀子弹座材科之配合限定。秋而求特性而適當設定，並無特別㈣㈣電氣零件與散間之用逆’則較佳為，於每刚午之中，金屬石夕之重里伤〜子舞性材料 m㈣上且未滿300重量份。量份里伤之焉分子彈性材料十配合10重 = 金屬猶’進而較佳為配合5〇重量份以！之金屬矽粉末，更佳為配合w 上繼而，更佳Α、董里伤以上之金屬矽粉末。為於母100重量份之高分子彈性材料合2。。重量份以下之金屬發粉末，進而二T ’配量份以下之金屬石夕粉末。 ^較佳為配合m重以上述配合量來配合金屬矽粉末之配人旦,、日, 々禾之原因在於：若金屬地獲得提心；=所獲得之高分子彈性片難以充分杈间目裇熱導率之效果過多，則所獲得之古八子^ 金屬石夕之配合量難以獲得不同用途等所要求之柔軟性有^ 性變差而有可能難以充分獲得安裝日^盘=’形狀追隨零件等之密合性。 '"守〃電氣零件或散熱再者’作為上述配合量之計算並非彈性材料原料單體，於該彈性材= 14 200920790 占適¥之添加劑或i隹—Xr /. _τ ^ 體之成形#料。若呈體地：广^材料而成之面分子彈性 glI^b /、體地進行例示，則例如，若為矽橡膠 …非聚有機矽氧烷之原料單體，而是於該聚有機劑而Γ原料單體中配合適當之添加劑或進—步配合交聯於石夕橡料。此種高分子彈性材料係於各種材料或一,'、；預先配合有適當之添加劑者，在市場上，夕豕企業提供此種高分子彈性材料，因此可容易地獲得。 f. :二：所=，將金屬石夕之配合量之計算基準設為於聚有劑等Γ Γ %分子彈性材料之原料單體中配合適當之添加《弹性材料’而非設為該高分子彈性材料之原料 3 ’其原因在於’不僅易於獲得或易於實施，而且藉由 B me*合$而表現出之如上所述之提高熱導率之效果 ::特性之變化係依據金屬石夕之分散狀態，膠原料單體等高分子彈性體之原料單體作為基準相比，將石夕橡膠材料等高分子彈性材料作為基準時可更好掌握。一又，本發明中所採用之金屬石夕之粒子形狀並無特別限 =°例如’可為市場上提供之球狀、扁平狀、顆粒狀、塊 2纖維狀、針狀、鱗片狀、丸粒狀、晶鬚狀等，或亦可 :非晶形之金屬破。其中，-般市場上提供之破碎狀之金屬矽較廉價且可容易地獲得，故較為有效。繼而’就製造目標彈性片之步驟加以說明’該目標彈性片係將以如上所述之⑦橡膠等高分子彈性材料為基質，且於此中以分散狀態配合金屬石夕粉末作為傳熱性電氣絕緣劑而成之混合組成物作為成形材料。 15 200920790 ”二’ ▲當於秒橡璆材料等高分子彈性材料中配合金屬，較佳為儘可能使金屬矽粉均勻地分散。此目的，椏田/, , j l刀散為達到轉式混合哭p A d練步驟。可採用旋器。星式混合11等公知之混合器作為上述混合中：分：:進Γ提高金屬㈣末於高分子彈性材料處理。：=，亦可例如對金屬術實施適當之表面一二處理可採用例如錢偶合劑、-偶合劑、或 [::使目：:上述方式獲得之成形材料來獲得目標彈性後，或片尺寸甚至成形材料之特性等之私用適s之成形方法。該成如，除壓延成形之外，還可操用拖^立’，、、特別限疋’例縮忐W 6 ^ 用擠出成形、吹塑成形、壓 ^成形、射出成形、壓軋 M. ^ T Ub ’ 再者，當採用液狀矽橡骖材枓#液狀之高分子彈性修法、㈣I * μ 1 材枓時，亦可較佳地採用塗佈把门主、或浸潰法等成形方法。又，對於成形同時或成形後之交躺，Α π π T ^ 外，IT Τ剎用f 牙'了可利用加熱及加壓來進行以外亦可利用電磁波或放射線來進行。再者形法或交聯方法時，只要冑用4 -成 /、聲目弹性片之特性則可無限定地於任意步驟等之添加或追加配合#。b 4又疋原科或各種添加劑形mm A Μ ’於彈性體材料等之情个 & 乂而進仃交聯處理。因而’以上述方4從/曰 ^ 万式獲付之本發明之傳埶性彈性κ且古作為傳熱性電氣絕緣南丨μ s u生弹ί·生月具有色緣叙金屬矽粉末均勻地分散於高分子 16 200920790 :中而―成之構造，因已實現此種特定物質之特定構二二肩採用金屬氧化物作為傳熱性電氣絕緣劑之情 …，可以較少之配合量來有效地提高傳熱性能。之,與先前採用金屬氧化物作為傳熱性電氣絕緣劑末之配人量，因可抑制作為傳熱性電氣絕緣劑之金屬石夕粉蚀 $且可獲侍優異之傳熱性能，故可實現古产之傳熱性能，並且可良好地獲得傳熱性彈性片之:見^ (形狀追隨性，因此可發揮良好之實用性。伸長率及 ❹，即便金屬矽粉末相對於100重量份之高分子彈料為200重量份以下、1〇〇下1重量份以下、或5重量份以下VI 0重量份以可實現高度之傳熱特性。如此：:，配合量’亦氣絕緣劑之配合量來實現優昱之禮拍較〉、之傳熱性電得確保高度之;;故可有效地獲及硬度之彈性片。〃有充刀之伸長率特性、抗拉強度 b =明就與傳熱性彈性片相關之本發明之其他實施形料J 即，本實施形態中’於以上述方式獲得之 Μ用Γ上形成用以覆蓋表面之表面層。藉此，例如，大幅提Γ设盘傳熱性彈性片之表面之脫模層，由此可獲得田&问了脫模性之傳熱性彈性片。增滑=材二”’例如’使添加有作為主材料之梦觸媒等之夺：lp c°ating material)、密合性提昇劑及硬化溶劑塗佈=理材料溶解於甲笨等稀釋溶劑，將該稀釋於藉由上述實施形態而獲得之傳熱性彈性片上， 17 200920790 藉此可於㈣4表㈣成脫模層。用利用輥塗機等之塗佈法之 ’、方法除可採卜還可採用噴塗法、.、；，主；^ 佈、刷塗、流塗法等各種公知之塗佈方法。、 …貝塗藉由實施此種表面塗佈虚主师處理而於傳熱性彈性脫模層，提高傳熱性彈性片之 v成Here, in the present invention, rubber is particularly preferred. Thereby, even if the metal can be more advantageously ensured, the flexibility of the rubber sheet becomes wider. When the amount of the methyl vinyl decane-based ruthenium is set to be large, the softness and the formability are also obtained, so that the workability of the sheet can be improved, and the invention can be preferably used. In order to make the metal stone eve, the terracotta terrarium is more evenly dispersed in the liquid enamel rubber material in the matrix. 12 200920790 In addition to the cross-linking agent, a forming aid such as a plasticized backing agent, an oil, a delayed crosslinking agent, a coloring agent, a heat-increasing agent, etc., which are known in the prior art, may be appropriately blended as needed. X, an oxidized (iv) oxidant previously used as a heat-conductive electrical insulating agent may also be added as needed. Further, carbon carbide, graphite, cerium oxide for reinforcing, antistatic carbon, or the like may be blended. On the other hand, those known to be excellent in the thermal conductivity and electrical insulating properties of the metal lanthanum in the above-mentioned polymer elastic material are dispersed as a powder in a polymer elastic material as a matrix. Since metal ruthenium is generally obtained by using vermiculite as a raw material (4) for reduction of electric material, and as a material such as nitriding stone, new/, ceramic, refractory brick, etc., it can be easily obtained on the market. In particular, in the present invention, a generally available metal cerium powder may be used, and a metal cerium powder having a purity of > 95 to 99% at the end of the metal (4) before the high-purification treatment is used. The average particle diameter of the metal powder is preferably 2 Å or less. In the city, it is easy to obtain the metal of the average particle size in the specified powder state. Second: The genus: the average particle size is 920 μιη, which can realize the heat transfer of the strong bite: the crack giant according to the target polymer elastic sheet The difference in characteristics makes it difficult to make the thickness of the full-size polymer elastic sheet such as == degree, durability, rubber elasticity (elongation), or the like, and the unevenness of the surface of the elastic sheet may be particularly good, in order to obtain better. *,,,, etc., the average strength of the broadcast, the durability, or the average particle size of the wood is preferably 20 μm or less, and the metal tantalum powder is further. More preferably 10 μηι to 13 200920790 Workers: If the size of the genus is too small, there is also a powder increase. Therefore, the problem of use is reduced, and the yield is lowered, and the cost is changed to m. The metal powder having an average particle diameter of 2 (four) or more is a metal tantalum powder having an average particle diameter of 5 μη or more. This metal second powder is defined in relation to the high amount according to the combination of the elastic + door knife bullet seat. In the autumn, the characteristics are properly set, and there is no special (4) (4) The use of electrical parts and space is better. In every noon, the metal stone is seriously injured~ the sub-dance material m (four) and less than 300 Parts by weight. The amount of the 焉焉焉焉焉焉焉焉焉配合配合 = = = = = = = = = = = = = = = The metal bismuth powder is more preferably used in combination with w, and is better than the metal bismuth powder of Dongli and Dongli. It is a polymer elastic material of 100 parts by weight of the mother. . The metal hair powder of the following parts by weight or less, and further, the metal stone powder of two or less parts by weight. ^ It is preferable to match the weight of m with the above compounding amount to match the metal tantalum powder, and the reason for the day is that if the metal is obtained, the obtained polymer elastic sheet is difficult to fully cover the eye. If the effect of the thermal conductivity is too high, it is difficult to obtain the softness required for different uses, etc., and it is difficult to obtain the installation day. The adhesion of parts and the like. '" 〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃〃 material. If the surface molecular elasticity glI^b / is formed by the body material, for example, if it is a raw material monomer of a non-polyorganosiloxane, but a polyorganic agent The raw material monomer is blended with the appropriate additive or cross-linked to the Shixi rubber. Such a polymer elastic material is used in various materials or in combination with appropriate additives. In the market, the company provides such a polymer elastic material, and thus can be easily obtained. f. :2:========================================================================================= The raw material of the molecular elastic material 3' is because 'not only easy to obtain or easy to implement, but also exhibits the effect of improving the thermal conductivity as described above by B me*$: the change of the characteristics is based on the metal stone eve In the dispersion state, a raw material monomer of a polymer elastomer such as a rubber raw material monomer can be better grasped when a polymer elastic material such as a stone rubber material is used as a reference. Further, the shape of the metal particles used in the present invention is not particularly limited. For example, 'the ball, the flat shape, the granular shape, the block 2 fiber shape, the needle shape, the scale shape, and the pellets are available on the market. Granular, whisker-like, etc., or also: amorphous metal broken. Among them, the broken metal provided in the general market is relatively inexpensive and can be easily obtained, so it is effective. Then, the procedure for producing the target elastic sheet will be described. The target elastic sheet is based on a polymer elastic material such as rubber as described above, and the metal stone powder is mixed as a heat-transfer electric product in a dispersed state. A mixed composition of an insulating agent is used as a molding material. 15 200920790 『2' ▲When metal is blended in a polymer elastic material such as a second rubber material, it is preferable to uniformly disperse the metal powder as much as possible. For this purpose, Putian/, jl knife is used to achieve rotary mixing. Cry p A d practice steps. A spinner can be used. A well-known mixer such as Star Mix 11 is used as the above-mentioned mixing: sub-:: to increase the metal (4) at the end of the polymer elastic material treatment::=, for example, for metal The appropriate surface treatment can be carried out, for example, by using a money coupling agent, a coupling agent, or [:: a meshing material obtained by the above method to obtain a target elastic property, or a sheet size or even a characteristic of a forming material. It is suitable for the forming method of s. In addition to calendering, it can also be used to drag and drop, and is particularly limited to 例例例 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 用用用 6 用, injection molding, rolling M. ^ T Ub ' Furthermore, when using liquid enamel rubber 枓 # liquid polymer elastic modification method, (4) I * μ 1 material ,, it is also preferable to use a coating door Forming methods such as main or dipping methods. After the forming, the 躺 π π T ^, the IT brake can be performed by heating or pressurizing, and can be performed by electromagnetic waves or radiation.胄Used 4 - into /, the characteristics of the acoustic elastic sheet can be added or added in any step or the like without limitation. #4b 疋Original or various additive forms mm A Μ 'In the case of elastomer materials And the 仃仃仃。。。因而因而因而因而因而因而因而因而因而因而因而因而因而因而因而因而因而以以以以以以以以以以以以以以以以以以以以以以以以以以以The lunar month has a color-rimmed metal niobium powder uniformly dispersed in the polymer 16 200920790: the structure of the medium-to-be-formed structure, because the specific structure of the specific material has been realized, the metal oxide is used as the heat-conductive electrical insulating agent. In fact, the heat transfer performance can be effectively improved with a small amount of blending. The metal amount is used as the heat-insulating electrical insulating agent, and the metal as the heat-conductive electrical insulating agent can be suppressed. Shi Xi etched $ and can get excellent heat transfer performance Therefore, the heat transfer performance of the ancient product can be achieved, and the heat transfer elastic sheet can be obtained well: see ^ (shape followability, so it can exert good practicality. Elongation and flaw, even if the metal tantalum powder is relative to 100 weight The polymer binder is 200 parts by weight or less, 1 part by weight or less, or 5 parts by weight or less by weight of VI to achieve a high heat transfer property. Thus::, the amount of the gas is also an insulating agent The amount of the combination is better than that of the 传热、 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Another embodiment J of the present invention relating to a heat-transmissive elastic sheet, that is, in the present embodiment, a surface layer for covering a surface is formed on the crucible obtained in the above manner. Thereby, for example, the release layer on the surface of the heat-transmissive elastic sheet is provided, and the heat-dissipating elastic sheet having the release property can be obtained. Increasing slip = material 2" 'for example, 'adding a dream catalyst as a main material, etc.: lp c°ating material), adhesion improving agent, and hardening solvent coating = the material is dissolved in a diluent solvent such as a stupid This is diluted on the heat-transfer elastic sheet obtained by the above embodiment, and can be used as a release layer in (4) 4 (4). The coating method by a roll coater or the like can be used. Bu can also be sprayed, .,;, main; ^ cloth, brush coating, flow coating method and other known coating methods. ... bead coating by the implementation of such surface coating virtual master treatment and heat transfer Elastic elastic release layer, improve the heat transfer elastic sheet

肌模丨生’由此，例如，A 傳熱性彈性片用作電極等之埶壓虽將可容易地避免於執壓接0字中之緩衝材料時，光，黏接性㈣自㈣而使傳熱性彈性片與被壓接椹刀漏出構件相黏接，致使傳熱性彈性久性。矛“、、tt弹性片作為緩衝材料之耐一，:次’就與傳熱性彈性片之製造方法相關之本發明之說明。可任意㈣上述與傳熱性彈性關之本發明實施形態中可利用之高分子彈性材料， p形態中之高分子彈性材料。亦即，本實施形態之高分 =性材料可㈣㈣橡膠材料、乙稀丙稀橡膠材料為代表之各種橡膠材料或彈性體材料等高分子彈性材料，該古 ί子彈性材料中’較聯劑之外，可視需要而適當配合: Γ,所Α知之塑化劑、點著劑、油、或延遲交聯劑等成形助 :、著色劑、耐熱性提昇劑等。χ，亦可視需要而添加先別用作傳熱性電氣絕緣劑之氧㈣或氧化鎮等。入關於將由此種高分子彈性材料及作為傳熱性絕緣劑之生蜀矽所構成之混合組成物成形為傳熱性彈性片之具體製造方法，係適當地採用與日本專利第3485396號所揭示之橡膠膜之製法大致相同之製造方法。因此，省略其詳細說 18 200920790 明，但以下記述其概要作參考。首先將由上述南分子彈性材料及金屬石夕所構成之混 ::成：’奋解於曱苯等適當之溶劑而製成混合溶液後，對 Λ “冷液進仃消泡，並加以調整以使固體成分比率為 25〜50/ί) ' 勸度為 5QQQ〜9〇〇nn 0000 cp。其中，上述溶解及消泡操作中’較為便利的是使用附帶真空式消泡裳置之攪拌機。又，消泡時亦可視需要添加消泡材料。、其-人，使用報塗機等，於由聚對苯二甲酸乙二醋所構成性良好之支持膜上，將由上述溶解及授拌而獲得之此合各液塗佈成特定之厚度及寬度。繼而，將塗佈有混合溶液之支持膜放入至供箱内，於持膜/ 2佳為於60〜9(rc之溫度，藉由加熱而使該支乾無。其中，乾燥時間較佳為3〜7分鐘。進一步對經 ^之支持膜上之傳熱性彈性片照射電子射線，使彈性材料交聯。所緙彡日播于父如所獲仵之傳熱性彈性片可容易地自支持上剝離以供使用。守膜根據此種傳熱性彈性片之製造方法，可傳熱性優異、無皺槽或 ^ ^ 片。飞凹凸且使用性亦優異之傳熱性彈性又，根據本實施形態之傳熱性彈性如，即便於製造目標厚产Λ η9 I這方法，例仏… 、子度為〇·2 _之極薄之傳熱性彈性 Τ ,、σ以0.2〇±0.0〇6 mm之優異的厚度精傳熱性彈性片。確又來襄k 實施例 19 200920790 以下，藉由列舉本發明之實施例及比較例來使本發明更為具體、明確。再者，並不由下述實施例之具體記述或上述實施形態之例示性記述而對本發明進行限定性解釋。又，以下實施例及比較例中，熱導率之測定係採用基於暫態熱線法原理之探針法來直接求出與熱線法相同之熱導率值。具體而·r m都電子卫業股份有限公司製造之「Kemthenn QTM—D3迅速熱導率計」（商品名）來測定試料之熱導率。曱基乙烯基矽烷系之矽橡膠材料係使用T〇ray d〇w Corning股份有限公司製造之「sewwu」（商品名），對ι〇〇 g該矽橡膠材料（比重：i 18)配合34〇 cm3之金屬矽粉末（敲緊密度：659 kg/m3)作為傳熱性電氣絕緣劑。於其中添加 T〇ray Dow Corning股份有限公司製之以2,5_二曱基_2,5_二 (第三丁基過氧）己烷為有效成分之「RC_4」（商品名）作為交聯劑，並加以混練，藉此獲得作為混合組成物之成形材料。其中，於上述市售之矽橡膠材料（SE1647U)中，預先配合有既定量之二氧切、抗靜電碳。亦即，本實施例中，由該等市售之矽橡膠材料（SE1 647U)及交聯劑（RC_4)來構成高分子彈性材料。利用壓延（calender)成形使所獲得之成形材料成形為 0.3 mm厚之片狀後，於164。〇之溫度下交聯1〇分鐘。對以上述方式獲得之作為傳熱性彈性片之矽橡膠片測定熱導率，將測定結果作為實施例1而表示於下述[表n 中。 20 200920790 "又，取代上述金屬石夕之粉末，分別採用5種氧化紹、氧：鎂、碳化矽、及石墨來作為傳熱性電氣絕緣劑，且以別以與實施们相同Hrm3之量，於該情形時，分計8種石夕橡膠片分铸獲得石夕橡膠片。對所獲得之共 —併表示於二熱導率’將測定結果作為比較例其中’採用石墨作盔一可獲得高執導帛 ‘、、、傳 <、'、性電氣絕緣劑之比較例8雖表現出橡膠特性：=得之橡膠片幾乎無彈性’幾乎不也無法供實用。 $各易產生龜裂或破損，故無論如何 [表1] 傳熱性， -^ I；氣絕緣劑測定結果實施例1 ———-_ 比較例1 --— 比較例2 -~-- 比較例3 ~~--- 比較例4 ------- 比較例5 —~~—~~| 比較例6 ~~~ 比較例7 ―'—-- 比較例8 ~_ 類別 -—S S— 敲緊密度 (kg/m3) 粒徑 _ 熱導率 (W/mK) 659 5〜10 1.555 1317 2.4 1.163 1223 2.6 1.439 1007 4.0 1.417 988 4.1 1.257 化在呂 803 5.0 1.201 903 1.27 - 一 1.359 988 2.0 1.423 166 5.0 2.004 21 200920790 根據該[表υ所示之結果亦可知，#由於料穋中配合 =石夕粉末，與先前所使用之傳熱性電氣絕緣劑相比，可更良好地提高熱導率。基乙烯基矽烷系矽配合於其中之作為量互不相同，獲得以與上述實施例相〇·3 mm之片狀成 ’由此獲得實施例其次，採用與上述實施例相同之甲橡膠材料（SE1647U)及交聯劑（rc_4)，使傳熱性電氣絕緣劑之金屬矽粉末之配合複數種成形材料。使用該等成形材料，同之方式，利用壓延成形來獲得厚度為形體，於164。(3之溫度下進行1〇鐘交聯 2〜9之本發明之矽橡膠片。针對該等實施例強产且測定抗拉 [HSK625 1)。將敎結果表示於下述[表2]中。其中，古之金屬矽粉末之配合量係以相對⑨100重量份之回分子彈性材料之配合重量來表示。 77之又，當於與上述實施例2〜9相间夕玫从矽粉末日# 相冋之條件下不配合金屬 f刀末時，以相同條件獲得矽橡膠片。 ^ 施例24 4 々進而，又當於與實扪2〜9相同之條件下配合先前用氧化叙兀^用作傳熱性電氣絕緣劑之孔化銘或虱化鎂來取代金屬石夕橡膠片1m猫 X相同條件獲得測定熱導率辇^ ^ ® 〗乂同樣之方式早專，將測疋結果作為比較例於[表2]中 j y U而一併表示 22 200920790Muscle mold twins' Thus, for example, the pressure of the A heat-transfer elastic sheet used as an electrode or the like can be easily avoided when the cushioning material in the 0-character is pressed, light, adhesion (4) from (4) The heat-transmissive elastic sheet is bonded to the pressure-carrying squeegee leakage member to cause heat transfer elasticity. The spear ", tt elastic sheet is used as a cushioning material, and the following is a description of the present invention relating to the method for producing a heat-transmissive elastic sheet. Any of the above-mentioned embodiments of the present invention and the heat-transfer elasticity are in the embodiment of the present invention. The polymer elastic material which can be used, the polymer elastic material in the p form, that is, the high-grade=material of the embodiment can be (iv) (four) rubber material, ethylene rubber material represented by various rubber materials or elastomer materials In the case of a polymer elastic material, in addition to the joint agent, it can be appropriately blended as needed: Γ, a known plasticizer, a dot, an oil, or a delayed crosslinking agent, etc. , coloring agent, heat-resistant enhancer, etc. χ, may also be added as a heat-transferable electrical insulating agent, oxygen (4) or oxidized town, etc., depending on the need. The method for producing a heat-transfer elastic sheet in which the mixed composition of the granules of the granules is formed is suitably the same as the method for producing the rubber film disclosed in Japanese Patent No. 3485396. The detailed description of this article 18 200920790 is omitted, but the following is a summary of the description. First, the mixture of the above-mentioned southern molecular elastic material and metal sap is made into: a mixture of appropriate solvents such as benzene and benzene. After the solution, the "cold liquid is defoamed and adjusted to make the solid content ratio 25~50/ί". The degree of persuasion is 5QQQ~9〇〇nn 0000 cp. Among them, in the above dissolution and defoaming operation, it is more convenient to use a mixer equipped with a vacuum defoaming skirt. In addition, defoaming materials may be added as needed during defoaming. And the person-applying, using a coating machine or the like, coating the liquid obtained by the above-mentioned dissolution and mixing into a specific thickness on a support film having a good composition of polyethylene terephthalate width. Then, the support film coated with the mixed solution is placed in the supply box, and the film is preferably at a temperature of 60 to 9 (rc), and the support is dried by heating. Among them, the drying time is preferably It is 3 to 7 minutes. Further, the heat-transmissive elastic sheet on the support film is irradiated with an electron beam to crosslink the elastic material, and the heat-transfer elastic sheet which is sown by the father can be easily The film is peeled off from the support for use. According to the method for producing such a heat-transmissive elastic sheet, the film can be excellent in heat transferability, wrinkle-free grooves, or a heat-dissipating elasticity which is excellent in flying unevenness and usability. According to the heat transfer elasticity of the present embodiment, even if the method of producing the target thick Λ 99 I is produced, the heat transfer elastic Τ of the 薄·2 _ is extremely thin, and σ is 0.2 〇 ± An excellent thickness of the fine heat transfer elastic sheet of 0.0 〇 6 mm. Indeed, the present invention is made more specific and clear by exemplifying the examples and comparative examples of the present invention. It is not described in the specific description of the following embodiments or the exemplary description of the above embodiments. The invention is limitedly explained. In the following examples and comparative examples, the thermal conductivity is measured by the probe method based on the principle of the transient hot wire method to directly obtain the same thermal conductivity value as the hot wire method. The thermal conductivity of the sample is determined by the "Kemthenn QTM-D3 Rapid Thermal Conductivity Meter" (trade name) manufactured by rm Electronic Guard Co., Ltd. The 曱-based vinyl decane-based rubber material is T〇ray d〇 w "Sewwu" (trade name) manufactured by Corning Co., Ltd., for 〇〇〇〇矽 rubber material (specific gravity: i 18) with 34〇cm3 of metal enamel powder (knock tightness: 659 kg/m3) as a biography Thermal electrical insulating agent. Add "RC_4" with 2,5-dimercapto-2,5-di(t-butylperoxy)hexane as an active ingredient manufactured by T〇ray Dow Corning Co., Ltd. (trade name) as a crosslinking agent, and kneading, thereby obtaining a molding material as a mixed composition. Among them, in the above-mentioned commercially available ruthenium rubber material (SE1647U), a predetermined amount of dioxotomy, anti-wear is prepared in advance. Electrostatic carbon. That is, in this embodiment, by these A commercially available ruthenium rubber material (SE1 647U) and a crosslinking agent (RC_4) constitute a polymer elastic material. The obtained molding material is formed into a sheet having a thickness of 0.3 mm by calender molding, and then 164. The temperature was measured for 1 minute at the temperature. The thermal conductivity of the ruthenium rubber sheet as the heat-transfer elastic sheet obtained in the above manner was measured, and the measurement results are shown in the following Table 1 as the following [Table n. 20 200920790 &quot Further, in place of the above-mentioned metal powder, five kinds of oxides, oxygen: magnesium, tantalum carbide, and graphite are used as heat-conductive electrical insulating agents, respectively, and the same amount of Hrm3 as the embodiment is used. In the case, eight kinds of Shixia rubber sheets were divided and cast to obtain Shixi rubber sheets. For the obtained total—and expressed in the second thermal conductivity', the measurement result is taken as a comparative example, in which "the graphite is used as a helmet to obtain a high-conductivity 帛',", "pass", and a comparative electrical insulating agent 8 Although it shows the rubber characteristics: = the rubber sheet is almost inelastic', and it is hardly practical. Each of them is prone to cracking or breakage, so anyway [Table 1] heat transfer, -^ I; gas insulating agent measurement results Example 1 ———-_ Comparative Example 1 --- Comparative Example 2 —~-- Comparative Example 3 ~~--- Comparative Example 4 ------- Comparative Example 5 -~~-~~| Comparative Example 6 ~~~ Comparative Example 7 ―'--- Comparative Example 8 ~_ Category-- SS—knock tightness (kg/m3) particle size _ thermal conductivity (W/mK) 659 5~10 1.555 1317 2.4 1.163 1223 2.6 1.439 1007 4.0 1.417 988 4.1 1.257 in Lu 803 5.0 1.201 903 1.27 - a 1.359 988 2.0 1.423 166 5.0 2.004 21 200920790 According to the results shown in the table [#], it is also known that the material can be better improved than the previously used heat-conductive electrical insulating agent due to the compounding in the material = = Shixi powder. Conductivity. The vinylidene fluorene-based oxime was blended therein in an amount different from each other, and was obtained in the form of a sheet having a thickness of 3 mm from the above-described examples. Thus, the same example was employed, and the same rubber rubber material as in the above-described examples was used. SE1647U) and a crosslinking agent (rc_4) are used to mix a plurality of metal forming materials of a heat conductive electrical insulating agent with a plurality of molding materials. Using these forming materials, in the same manner, calendering is used to obtain a thickness of the shape, at 164. The ruthenium rubber sheet of the present invention which was crosslinked at a temperature of 3 for 1 sec. 2 to 9 was produced. For these examples, the tensile strength was measured and the tensile strength [HSK625 1) was measured. The enthalpy results are shown in the following [Table 2]. Here, the blending amount of the ancient metal tantalum powder is expressed by the weight of the back molecular elastic material of 9100 parts by weight. Further, when the metal f was not blended under the conditions of the above-mentioned Examples 2 to 9, the ruthenium rubber sheet was obtained under the same conditions. ^ Example 24 4 々 Further, in the same conditions as the actual 扪 2 ～ 9 , with the previous use of oxidized 兀兀 ^ used as a heat-conductive electrical insulating agent Kong Huaming or magnesium telluride to replace the metal stone rubber sheet 1m Cat X was measured under the same conditions as the thermal conductivity 辇^ ^ ® 乂乂 the same way as the early morning, the test results as a comparative example in [Table 2] jy U together with 22 200920790

200920790 根據邊I；表2]所示之結果亦$ $胃1 配合金屬矽粉末，Y 4 4 a 、夕橡膠材料性電氣絕緣劑之作用士“秘’政地發揮作為傳熱 Μ之作用。尤其根據採用甲基矽橡膠材料之哕笙香# ν , 士席基石夕貌糸之材科之。亥等貫施例亦可確認到：之石夕橡膠材料配合5。重量份以 ::〇重-份具備0.9 W/mK以上之俨昱執、屬矽私末，可獲得 a上之優異熱導率之橡重量份之本每铪由π ± 夕片。然而，對100 只驗中所使用之矽橡膠材料金屬矽之實施例9中，於利重里伤之 “ ^ 開放式輥(open rol⑽金屬石夕此練至石夕橡膠材料之過程中，橡膠材料會產生破損等: 難以混練入金屬矽’從而無法成形出橡膠片化鎂來取代金屬矽之比較例u中，，】、、加虱法混練而導致無法獲得最 D ’、配β過裎中無值道卜“^ 取、、之橡膝片，因此，無法測定敎傳導性及抗拉強度。 j夂…、根據該等實驗結果亦可 + j j知，根據本發明，藉由添加金屬矽粉末作為傳熱性電氣絕、 ,.v, ^ ^ J與添加先耵所採用之氧化鋁或軋化鎂之情形相比，可小 ^ . 車乂夕之添加量獲得優異之 ,、、、傳導性。亦即，可認定藉田知用金屬矽，理所當然可有效地k向所獲得之橡膠片之埶 .,._ ^ …導率，且因無需大量添加傳熱性電軋絕緣劑，故亦可大巾3 > f p A 心向橡膠片之抗拉強度或成形刼作性（處理性）等橡膠特性。繼而，甲基苯基矽烷系 y橡膠材料係使用Toray Dow200920790 According to the results shown in Side I; Table 2] also $ $ stomach 1 with metal bismuth powder, Y 4 4 a, eve rubber material electrical insulating agent role "secret" political role as a heat transfer Μ role. In particular, according to the use of methyl ruthenium rubber material, 哕笙香# ν , Shi Xiji Shi Xia 糸糸。。。。。亥亥等等等等等等等等等等等等等等等等等等等等等等等等等等The heavy-part has a 0.9 、、、、、、 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 In the ninth embodiment of the ruthenium rubber material, the ^ 里里 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ In the comparative example u in which the metal bismuth can not be formed into a rubber sheet to replace the metal ruthenium, the method of kneading can not obtain the most D', and the value of the 裎裎无无 “ “ “ , rubber and knee, therefore, can not measure the conductivity and tensile strength of the 。. j夂..., According to the results of the experiments, it is also known that, according to the present invention, the addition of the metal ruthenium powder as the heat transfer electrical, , .v, ^ ^ J and the addition of the alumina or the magnesium oxide used in the sputum. In comparison, it can be small. The addition amount of Che Yu Xi is excellent, and it is conductive. That is to say, it can be said that Yutian knows that it is effective to knead the obtained rubber sheet. ._ ^ ...conductivity, and because there is no need to add a large amount of heat-transferable electric-rolling insulating agent, it is also possible to have rubber properties such as tensile strength or forming workability (handling property) of the large towel 3 > fp A core rubber sheet. Then, methyl phenyl decane y rubber material is used by Toray Dow.

Cormng股份有限公司製造 ..SE955U」（商品名），並且採用^yDowWg股份有限公司製造之「RC-4」（商品名）作為交聯劑，製成石夕橡膠片。亦即，本實施例中之作 24 200920790 為高分子彈性材料之矽橡膠係由該等市售之甲其# 一系石夕橡朦材料（㈣训）及交聯劑（RC_4M # Z == 用作為傳熱性電氣絕緣劑之金屬㈣末，分_ _ 份之高分子彈性材料配合150重量份及194重量产石夕粉末而獲得成形材料。使用該成形材料，與上述實施例 2〜9相同之方式’利用麗延成形來獲得厚度為μ咖之㈣形體之溫度τ進行1G分鐘交聯，由此獲得貫施例10及實施例n之本發明之矽橡膠片。對該實施例1〇及U測定熱導率，並且測定伸長率⑽Cormng Co., Ltd. manufactures .. SE955U" (trade name), and uses "RC-4" (commodity name) manufactured by ^yDowWg Co., Ltd. as a crosslinking agent to prepare a Shixi rubber sheet. That is, in the present embodiment, 24 200920790 is a polymer elastic material of the 矽 rubber system from the commercially available 甲其#一系石夕橡朦 materials ((4) training) and cross-linking agent (RC_4M # Z == A molding material was obtained by using 150 parts by weight of a polymer elastic material as a heat-conductive electrical insulating agent and 150 parts by weight and 194 parts by weight of a stone-forming powder. The molding material was used, and the above-mentioned Examples 2 to 9 were used. In the same manner, the temperature τ of the thickness of the (iv) body was obtained by Liyan forming to carry out 1 G minute cross-linking, whereby the ruthenium rubber sheet of the present invention of Example 10 and Example n was obtained. 〇 and U determine the thermal conductivity and determine the elongation (10)

咖57)、硬度⑽_A)之各值。將測定結果表示於下述[表中e J 又，於配合先前用作傳熱性電氣絕緣劑之氧化銘或氧化錢來取代上述實施例10| u中之金屬砂粉末之情形，，亦於相同條件下成形出石夕橡膠片，並對所獲得之橡膠片進行特性測定。將測定結果作為比較例12〜14而一併表不於[表中。其中，[表3]中混練評價表示使用開放式轉之混練加工性，混練不存在問題時記作◦，混練較費時作 :持續進行時記作△’輯困難且產生破㈣時記心。另方面’壓延評價表示使用砑光觀之壓延加工性，將可按預定尺寸壓延時記作〇’將產生破裂等而無法進行預定尺寸之壓延時記作△，將無法混練而無法進行下一步驟之延時記作X。 25 200920790 [表3] 實施例10 實施例11 比較例12 比較例13 比較例14 配合高分子彈性材料料 (SE955U) 97 97 97 97 97 交聯劑 (RC-4) 3 3 3 3 3 傳熱性電氣絕緣劑金屬矽 150 194 — 一 — 氧化鋁 — — 150 291 — 氧化鎂 — — — — 291 操作性評價結果加工性評價 (混練·加工之綜合評價）〇〇 Δ Δ X 混練評價〇 Δ 〇 △ X 壓延評價〇〇 Δ △ X 物)生測定結果熱導率(W/m-K) 1.3 1.4 1.2 1.3 無法測定伸長率(％) 40 30 30 30 無法測定硬度(nS-A) 77 78 66 64 無法測定如上述[表3]所示，首先，於實施例10中，即便對100 重量份之高分子彈性材料配合150重量份之金屬矽，亦可發揮良好之混練加工性及壓延加工性，可容易地製成矽橡膠片。進而，於配合了 194重量份之金屬矽之實施例 1 1 中，熱導率大幅提高至1.4 W/mK，且可發揮充分良好之混練加工性及壓延加工性，可毫無問題地製成矽橡膠片。相 26 200920790 對於此，於添加有丨5〇重量份 u Μ ,± 氧化銘作為傳熱性電絕緣材料之比較例12中，熱導率 ^ > 伸長率、硬度均劣於配合有⑼重量份之金切之實施例1Q，而且，尤其於壓延時， ^不Ϊ而無法充分地對橡膠片進行壓延成形，從而無法形成預疋尺寸之橡膠片。又，於為了發揮與實施例則目同私度之熱傳導性而將氧化鋁之量增加至291重量份為止之=較例13巾，極難進行氧化紹之混練，又，混練後之 ί 橡膠材枓之強度亦大幅下降，無法充分地對橡膠片進行壓延t形。進而，於對100重量份之高分子彈性材料配合291 ^份之氧域之比㈣14中，於將氧化鎂逐步徐徐混 ί至橡膠材料之步驟中$，橡膠材料產生破損，橡膠材料取終堵基於混練所使用之輥之間，從而無法進行進一步之混練。因此，無法獲得最终之成形品’且無法對熱物性進行比較。 τ 根據上述[表3]所示之結果亦料得知，可將本發明有效地應用於採用甲基苯基钱系切橡膠材料作為高分子 =材料之情形。#即’根據本發明可確認到：藉由添加主屬石夕粉末料傳熱性電氣絕_，料前添加氧化紹或氧化鎮之情形相比，可以較少之添加量使所獲得之橡膠片實現同等或更高之熱導率，而且，可表現出非常優異之成形性及橡膠特性。其夂’甲基乙稀基石夕院系之石夕橡膠材料係使用丁叫 D〇w Cor—股份有限公司製造之「Sim7U」（商品名），並且採用Toray Dow Corning股份有限公司製造之「rc_4」 27 200920790 (商品名）作為交聯劑。亦即，於本實施例i2〜i7中，藉由 a等市售之甲基乙烯基；^⑨系之❸橡膠材料（sh747u)及交聯劑（RC-4)來構成高分子彈性材料。於其中採用作為傳熱性電氣絕緣劑之金屬矽粉末，對1〇〇重量份之高分子彈性材料分別配合5〜200重量份之金屬矽粉末，獲得各成形材料。使用該等成形材料，以與上述實施例"目同之方式’利用壓延成形來獲得厚度為〇.3随之片狀成形體，於1 64 C之概度下進行丨〇分鐘交聯，藉此獲得實施例^ 之本發明之石夕橡膠片。對該等實施例12〜17敎熱導率，並且職抗拉強度 (JISK625D。將測定結果表示於以下[表4]中。又於與上述實施例12M 7相同之條件下，使用未配〇孟屬矽粉末之材料來成形矽橡膠片，獲得比較例1 5。進而於與3W 12〜1 7相同之條件下，配合先前用作傳熱迅氣、邑、.彖诏之氧化鋁或氧化鎂來取代金屬梦粉末，於該等h开ν時均以相同之條件形成矽橡膠片，獲得比較例Μ 及17。對所獲得之共計3種矽橡膠片分別以相同之方式測疋…、‘率等，將測定結果一併表示於以下[表4]中。 28 200920790Coffee 57), hardness (10)_A). The measurement results are shown in the following table [in the table, in addition to the oxidation of the heat-insulating electrical insulating agent previously used or the oxidation money to replace the metal sand powder in the above example 10 | u, A stone rubber sheet was formed under the same conditions, and the properties of the obtained rubber sheet were measured. The measurement results were collectively shown in Comparative Tables 12 to 14 in the table. Among them, the kneading evaluation in [Table 3] indicates that the kneading processability using the open type is used, and when there is no problem in kneading, it is recorded as ◦, and the kneading is time-consuming: when it is continuously performed, it is marked as Δ', and it is difficult to be broken (four). On the other hand, the evaluation of the calendering indicates that the calendering processability of the twilight view is used, and the calendering can be performed as a predetermined size, and the pressurization of the predetermined size is caused by rupture, etc., and the pressurization delay of the predetermined size cannot be performed as Δ, and the next step cannot be mixed and cannot be performed next. The delay of the step is recorded as X. 25 200920790 [Table 3] Example 10 Example 11 Comparative Example 12 Comparative Example 13 Comparative Example 14 Copolymerized polymeric material (SE955U) 97 97 97 97 97 Crosslinking agent (RC-4) 3 3 3 3 3 Heat transfer Electrical Insulation Agent Metal 矽 150 194 — I— Alumina — 150 291 — Magnesium Oxide — — — — 291 Operational Evaluation Results Processability Evaluation (Comprehensive Evaluation of Mixing and Processing) 〇〇Δ Δ X Kneading Evaluation 〇Δ 〇 △ X Calender evaluation 〇〇 Δ △ X) Bioassay results Thermal conductivity (W/mK) 1.3 1.4 1.2 1.3 Unable to measure elongation (%) 40 30 30 30 Unable to measure hardness (nS-A) 77 78 66 64 As shown in the above [Table 3], in Example 10, even when 150 parts by weight of the metal elastic material is blended with 100 parts by weight of the polymer elastic material, good kneading workability and rolling workability can be exhibited. It is easy to make a rubber sheet. Further, in Example 1 1 in which 194 parts by weight of metal ruthenium was blended, the thermal conductivity was greatly improved to 1.4 W/mK, and sufficient kneading workability and calendering workability were exhibited, and it was possible to produce it without any problem.矽 rubber sheet. Phase 26 200920790 For this reason, in Comparative Example 12 in which 丨 5 〇 by weight of Μ was added and ± oxidized as a heat-conductive electrical insulating material, the thermal conductivity ^ > elongation and hardness were inferior to the weight of (9) In the case of Example 1Q, the rubber sheet was not sufficiently rolled and formed, and the rubber sheet of the pre-size was not formed. Moreover, in order to exhibit the thermal conductivity of the embodiment and increase the amount of alumina to 291 parts by weight, it is extremely difficult to carry out the kneading of the oxidation, and the rubber after the kneading. The strength of the material is also greatly reduced, and the rubber sheet cannot be sufficiently rolled in a t-shape. Further, in the ratio of the oxygen content of 291 parts by weight of the polymer elastic material of 100 parts by weight (4) 14, in the step of gradually mixing the magnesium oxide into the rubber material, the rubber material is broken, and the rubber material is finally blocked. Based on the mixing between the rollers used, no further mixing can be performed. Therefore, the final molded article cannot be obtained and the thermal properties cannot be compared. τ According to the results shown in the above [Table 3], it is also known that the present invention can be effectively applied to a case where a methylphenyl money-cut rubber material is used as a polymer = material. #即' According to the present invention, it can be confirmed that the rubber obtained can be obtained in a smaller amount by adding the heat transfer property of the main genus Shixi powder. The sheet achieves an equivalent or higher thermal conductivity and, in addition, exhibits excellent formability and rubber properties. The 石甲基甲基甲基甲基甲基甲基夕夕夕橡胶橡胶橡胶橡胶橡胶橡胶橡胶 rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc 27 200920790 (trade name) as a crosslinking agent. That is, in the present examples i2 to i7, a polymer elastic material was constituted by a commercially available methylvinyl group, a ruthenium rubber material (sh747u) and a crosslinking agent (RC-4). In the metal tantalum powder as a heat-conductive electrical insulating agent, 5 to 200 parts by weight of the metal tantalum powder is blended with 1 part by weight of the polymer elastic material to obtain each molded material. Using these molding materials, by calendering in the same manner as in the above-described embodiment, a thickness of 〇.3 was followed by a sheet-like formed body, and a minute cross-linking was carried out under the premise of 1 64 C. Thus, the Shixi rubber sheet of the present invention of Example 2 was obtained. The thermal conductivity of these Examples 12 to 17 and the tensile strength (JISK625D. The measurement results are shown in the following [Table 4]. Further, under the same conditions as in the above Example 12M 7, the unmatched use was carried out. The material of the genus eucalyptus powder was used to form a ruthenium rubber sheet, and Comparative Example 15 was obtained. Further, under the same conditions as 3W 12 to 17 7, the alumina or oxidized previously used for heat transfer, krypton, and krypton was used. Magnesium was used to replace the metal dream powder, and the ruthenium rubber sheets were formed under the same conditions at the same time, and the comparative examples Μ and 17 were obtained. The total of the three types of ruthenium rubber sheets obtained were measured in the same manner... 'The rate and the like are shown together in the following [Table 4]. 28 200920790

比較例17 I 1 1 — ^難以混練） — (難以混練）比較例16 _1 m 1 & 1 1 ；5.26 比較例15 〇\ m 1 1 1 卜〇 8.99 實施例17 _i ΓΛ 200 1 1 (難以混練） - (難以混練） 1 實施例16 S； m 1 1 8.66 實施例15 _1 ΓΛ ON 1 1 (N ,8.43 實施例14 m 1 1 ,49 實施例13 cn o 1 1 〇> d ； ,7*86 ! 實施例12 〇> cn 1 1 00 〇 [ 8.38 1 碎橡勝材料 (SH747U) 交聯劑 (RC-4) 金屬矽氧化鋁氧化鎂 1 _ . 1 f 高分子彈性材料傳熱性電氣絕緣劑想配合測定結果 200920790 人=该[表4]所示之結果亦可確認，藉由對石夕橡膠材料配占金屬石夕粉末，該金屬石夕粉末可有效地作為傳熱絕緣劑而發揮作用。尤其，根據採用了f基乙席 ^ 之石夕橡膠材料之該等實施例可禮認到：藉由對刚重量二 ::::彈性材料配合10重量份以上之金屬梦粉末，；獲付具有0,9 W/mK以上之良好熱導率之橡膠片。再者，於對1〇0重量份之本實驗所使用之石夕橡谬材料配合了 2〇〇重量份之金屬石夕之實施…，於藉由開放式親將金；至;夕橡膠材料之過程中，橡膠材料產生破損等而難以耽1，，東，從而無法成形橡、代金屬…較例17 t丄二添加有氧化鎂來取、日.t 亦同樣地於配合中途無法進行 '犯練，導致無法獲得最丁及抗拉強度。巧、、之橡膝片，故無法測定熱傳導性 ==等實驗結果亦可確認到：與先前添加氧化銘或率，並且二之配合量獲得優異之熱導作性等橡膠特性。于之橡膠片之抗拉強度及成形操、.-k而作為細煙系橡勝材料之^p &蝴〆股份有限公司製迭之「Fp:乙席丙㈣膠係採用观分之高分子彈性㈣i。。重量份)/心、為主要成配合金屬矽粉末作為傳埶 ]斤不施例18〜25之橡膠片。亦即，於本實施二子㈣材料係使心^重量份之乙烯丙《膠材^ 30 200920790 (EP33)中添加有3.7重量份之三丼石油化學股份有限公司製造之「Dicup40C」（商品名）作為交聯劑、22.1重量份之出光興產股份有限公司製造之「Diana pw_5〇」作為添加油、〇·7重里份之花王股份有限公司製造之「硬脂酸ι 」作為界面活性劑者，於該等材料中添加既定量之金屬矽粉末並進行混練’藉此獲得成形材料。 2_3 mm之厚度，藉 mm之橡膠片。其令，將所獲得之成形材料乾製成大致由實施交聯處理而獲得厚度大致為2 交聯條件為溫度17〇°C X 15分鐘。肘對以上述方式獲得之各橡等竿之結果作為貫施例1 8〜2 5而表示於以下[表5]中- 又’於採用氧化鋁來取代上述金電氣絕緣劑之情料，料以㈣條件為傳熱性片。對所獲得t 4種橡膠片分別測率稀丙烯橡膠 31 200920790 比較例2] 73.5 1> 〇 Η CN 卜 cn 1 1 1 368 P 比較例20 73.5 | 卜〇 22.1 卜 ro 1 1 | 294 〇比較例19 1 73.5 | 卜〇 <N (N 卜 m 1 280 ON 〇比較例18 73.5 〇 22.1 , 卜 CO 1 1 | 221 00 〇 \〇實施例25 73.5 〇 (N (N 卜 1 1 300 1 (難以混練） (難以混練）實施例24 73.5 i 〇 (N CN O ro § (Ν 1 <5 <N ro 3 73.5 〇 22.1 卜 rn CS 1 寸 «τί 73.5 卜〇 1 22.1 | 卜 1—Η [ 1—^ OS CO 實施例21 73.5 〇； 22.1 _1 卜 rn 1 m <N 實施例20 73.5 卜〇 i 22.1 | 卜 cn Ρ； 1 寸〇實施例19 73.5 〇 1 22.1 | 卜 ΓΛ ν〇 CN 1 寸〇 'O 實施例18 73.5 〇 22.1 j <r{ 1 Γ*^ί 〇 ts EPDM橡膠材料 (SH747U)' 1 硬脂酸 1 Diana PW-50 Γ RC-4 1 金屬矽氧化鋁熱導率(W/m-K) 抗拉強度(Mpa) j 1 高分子彈性材料 1 1 傳熱性電氣絕緣劑 J 1 1 配合測定結果 200920790 根據該[表5]所示之結果可知，藉由於乙稀丙稀橡膠中配合金屬㈣末，與先前所使用之傳熱性電氣絕緣劑相比’可更好地提高教導率。尤盆，4日p 风Π»…令手尤具，根據採用乙烯丙烯橡膠材料之上述實施例可確認到··藉由對100重量份之高分^ 彈性材料配合74重量份以上之金屬矽粉末，可獲得具有〇 6 以上之良好熱導率之橡膠片，進而，藉由配合147 重量份以上之金屬矽粉末，可獲得具有M w/mK以上之更優異之熱導率之橡膠片。其中，於對1〇〇重量份之本實驗中所使用之石夕橡膠材料配合3〇〇重量份之金屬石夕之實施例25中，於將金屬矽逐步混練至矽橡膠材料之過程中，，膠材料產生破損等而難以混練入金屬石夕，從而無法成形最、、之橡膠片’故無法對熱傳導性及抗拉強度進行測定。根據上述實驗結果可確認，與先前添加氧化I呂或氧化叙作為傳熱性電氣絕緣劑之情形相比，根據本發明，藉由鱼力二屬石m ’可以較少之添加量有效地獲得大的熱導並且可大幅提昇所獲得之橡膠片之抗拉強度等性。此外，將上述實施例22〜24及比較例i 8〜21之敎導率 ^定結果表示於圖表中’將其示作[圖q。根據該[圖工] 可f明確地認識到與先前用作傳熱性電氣絕緣劑之氧化銘不目比’根據本發明葬 M而^ 金屬⑦，可極有效地提高乙婦内烯橡膠之傳熱性能。屬矽：：，於與上述實施例18〜25等相同之條件下，使金屬續粉末之粒經…。—3 一〜之各範圍 33 200920790 内變化，分別成形矽橡膠片。對所獲得之矽橡膠片測定熱導率，將測定結果作為實施例26〜46而表示於[表6]中。 34 200920790 【9 <】實施例32 1〇 § 實施例31 § 1 1.42 實施例30 〇 00 rn 實施例29 1.31 實施例28 in 〇 »—Η 00 CNj »" Η 實施例27 l〇 vrj % 1.21 實施例26 in % 1—^ 矽橡膠材料(SE1647U) 矽橡膠材料(SRX539UTK) 金屬矽熱導率(W/nvK) Ί 高分子彈性材料傳熱性電氣絕緣劑配合 1測定結果 ^^<^^-ul=Ln~8_^#-c?iTK(N) 實施例39 I 1〇 in § r—^ '1.42 實施例38 S 1.37 實施例37 νη 〇 ^Ti ΓΟ r «4 實施例36 yn 〇 (N CN rn 實施例35 m 〇 cs 實施例34 00 實施例33 in IT) JT1 tn > 1 r-^ Γ矽橡膠材料(SE1647U) :矽橡膠材料(SRX539UTK) 金屬矽熱導率(W/m-K) 高分子彈性材料傳熱性電氣絕緣劑配合 1測定結果 si s 實施例46 S 1 1.40 實施例45 1〇 S 1—1 1.38 實施例44 in 〇 1.34 實施例43 r—^ Γ 1 1.25 實施例42 νη in 〇 1.21 實施例41 j νη »ri § 1.19 實施例40 νη ι〇 S , 1.14 矽橡膠材料(SE1647U) 矽橡膠材料(SRX53 9UTK) | 金屬矽 ^ 熱導率(W/m-K) 高分子彈性材料傳熱性電氣絕緣劑 -1 配合測定結果 sro 200920790 根據實施例26〜46之實驗結果亦可知，藉由使用粒徑為2 0 μηι以下之金屬石夕粉末作為傳熱性電氣絕緣劑，均可獲得良好之熱傳導性。其次，就與傳熱性彈性片之製造方法有關之本發明之實施例加以說明。首先，本實施例中，曱基乙烯基矽烷系之石夕橡膠材料係採用Toray Dow Corning股份有限公司製造之「SH747U」（商品名）、以及同樣由T〇rayD〇w(：〇rningComparative Example 17 I 1 1 - ^ difficult to knead) - (difficult to mix) Comparative Example 16 _1 m 1 & 1 1 ; 5.26 Comparative Example 15 〇\ m 1 1 1 Divination 8.99 Example 17 _i ΓΛ 200 1 1 (Difficult Kneading) - (difficult to mix) 1 Example 16 S; m 1 1 8.66 Example 15 _1 ΓΛ ON 1 1 (N , 8.43 Example 14 m 1 1 , 49 Example 13 cn o 1 1 〇>d; 7*86 ! Example 12 〇> cn 1 1 00 〇[ 8.38 1 Broken Rubber Material (SH747U) Crosslinking Agent (RC-4) Metal 矽 Alumina Magnesium Oxide 1 _ . 1 f Heat Transfer of Polymer Elastomer The electrical insulating agent is intended to match the measurement results 200920790. = The results shown in [Table 4] can also be confirmed. By compounding the Shishi rubber material with the metal powder, the metal powder can be effectively used as heat transfer insulation. In particular, according to the embodiments in which the stone material of the base material of the base material is used, it is practicable to match the metal dream of 10 parts by weight or more with the weight of the second:::: elastic material. Powder,; a rubber sheet with a good thermal conductivity of 0,9 W/mK or more. In addition, it is heavy for 1〇0 The amount of the Shishi rubber material used in this experiment is combined with the 2 〇〇 part of the metal stone 夕之 ..., in the open-ended pro-gold; to; 夕 rubber material in the process, the rubber material is damaged It is difficult to smash 1, and East, so that it is impossible to form rubber, substitute metal... Compared with Example 17 t丄2, magnesium oxide is added to take it, and day.t is also unable to carry out the practice in the middle of the cooperation, resulting in the inability to obtain the most And tensile strength. Qiao, and the rubber knee, it is impossible to determine the thermal conductivity == and other experimental results can also be confirmed: with the previous addition of oxidation or rate, and the combination of the two to obtain excellent thermal conductivity and other rubber Characteristics: The tensile strength and forming operation of the rubber sheet, and the -k and the fine-smoke rubber material are used in the "Pp: B-C (4)) The polymer elasticity (4) i.. parts by weight) / heart, which is mainly used in combination with metal cerium powder as a rubber sheet for the application of 18 埶斤施 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 The ethylene-propylene "glue material ^ 30 200920790 (EP33) added 3.7 weight "Dicup40C" (trade name) manufactured by Sanken Petrochemical Co., Ltd. as a crosslinking agent, and 22.1 parts by weight of "Diana pw_5" manufactured by Idemitsu Kosan Co., Ltd. as an additive oil, 〇·7··· As the surfactant, "stearic acid ι" manufactured by Kao Co., Ltd. is added with a predetermined amount of metal cerium powder and kneaded in the materials to obtain a molding material. Thickness of 2_3 mm, borrowed from the rubber sheet of mm. This allows the obtained molding material to be dried to substantially crosslink to obtain a thickness of approximately 2, and the crosslinking condition is a temperature of 17 ° C for 15 minutes. The results of the elbows for each of the rubbers obtained in the above manner are shown in the following [Example 5] in the above-mentioned [Table 5] - and the use of alumina to replace the above-mentioned gold electrical insulating agent. The (four) condition is a heat transfer sheet. The obtained four kinds of rubber sheets were measured at a rate of dilute propylene rubber 31 200920790 Comparative Example 2] 73.5 1> 〇Η CN 卜 cn 1 1 1 368 P Comparative Example 20 73.5 | 〇 22.1 卜 ro 1 1 | 294 〇 Comparative Example 19 1 73.5 | Divination <N (N Bu m 1 280 ON 〇Comparative Example 18 73.5 〇22.1 , Bu CO 1 1 | 221 00 〇〇〇 Example 25 73.5 〇 (N (N Bu 1 1 300 1 (Difficult KLC) (difficult to mix) Example 24 73.5 i 〇 (N CN O ro § (Ν 1 < 5 < N ro 3 73.5 〇 22.1 卜 CS 1 inch «τί 73.5 〇 1 22.1 | 卜 1 Η [ 1—^ OS CO Example 21 73.5 〇; 22.1 _1 卜 rn 1 m <N Example 20 73.5 〇i i 22.1 | 卜 Ρ 1; 1 inch 〇 Example 19 73.5 〇1 22.1 | ΓΛ ΓΛ 〇 1寸〇'O Example 18 73.5 〇22.1 j <r{ 1 Γ*^ί 〇ts EPDM Rubber Material (SH747U)' 1 Stearic Acid 1 Diana PW-50 Γ RC-4 1 Metal 矽 Alumina Thermal Conductivity (W/mK) Tensile strength (Mpa) j 1 Polymer elastic material 1 1 Heat-transfer electrical insulating agent J 1 1 Coupling measurement result 200920790 According to the results shown in [Table 5], Because of the end of the metal (4) in the ethylene-propylene rubber, it can improve the teaching rate better than the heat-transfering electrical insulating agent used previously. The basin, the 4th p wind Π»... In the above examples using the ethylene propylene rubber material, it was confirmed that a rubber sheet having a good thermal conductivity of 〇6 or more can be obtained by blending 74 parts by weight or more of the metal cerium powder with 100 parts by weight of the high-strength elastic material. Further, by blending 147 parts by weight or more of the metal cerium powder, a rubber sheet having a more excellent thermal conductivity of M w/mK or more can be obtained, which is used in the experiment for 1 part by weight. In the embodiment 25 of the Shishi rubber material in combination with the metal enamel of 3 parts by weight, in the process of gradually kneading the metal enamel to the enamel rubber material, the rubber material is damaged, and it is difficult to mix into the metal stone eve, thereby failing to The most suitable rubber sheet was formed, so the thermal conductivity and tensile strength could not be measured. According to the above experimental results, it can be confirmed that, according to the present invention, it is possible to obtain an effective amount by adding less than the amount of the addition of the oxidized iron genus m'. The large thermal conductivity can greatly increase the tensile strength and the like of the obtained rubber sheet. Further, the results of the above-described examples 22 to 24 and the comparative examples i 8 to 21 are shown in the graph, which is shown as [Fig. q. According to the [drawing], it can be clearly recognized that the oxidation of the electrical insulating agent previously used as a heat-insulating electrical insulating agent is not as good as that of the present invention, and the metal 7 can be extremely effectively improved. Heat transfer performance.矽::, under the same conditions as in the above Examples 18 to 25, etc., the particles of the metal powder are passed through. —3 ～ Each of the ranges 33 200920790 changes, forming a rubber sheet. The thermal conductivity of the obtained ruthenium rubber sheet was measured, and the measurement results are shown in [Table 6] as Examples 26 to 46. 34 200920790 [9 <] Example 32 1〇§ Example 31 § 1 1.42 Example 30 〇00 rn Example 29 1.31 Example 28 in 〇»—Η 00 CNj »" 实施 Example 27 l〇vrj % 1.21 Example 26 in % 1—^ 矽Rubber Material (SE1647U) 矽Rubber Material (SRX539UTK) Metal 矽 Thermal Conductivity (W/nvK) 高分子 Polymer Elastomer Heat Transfer Electrical Insulation Agent 1 Measurement Results ^^<^^-ul=Ln~8_^#-c?iTK(N) Example 39 I 1〇in § r-^ '1.42 Example 38 S 1.37 Example 37 νη 〇^Ti ΓΟ r «4 Example 36 yn 〇(N CN rn Example 35 m 〇cs Example 34 00 Example 33 in IT) JT1 tn > 1 r-^ Γ矽Rubber material (SE1647U): 矽Rubber material (SRX539UTK) Metal 矽 Thermal conductivity (W /mK) Polymer Elastomer Heat Transfer Electrical Insulation Agent Match 1 Measurement Results si s Example 46 S 1 1.40 Example 45 1〇S 1 - 1. 1.38 Example 44 in 〇 1.34 Example 43 r - ^ Γ 1 1.25 Example 42 νη in 〇1.21 Example 41 j νη »ri § 1.19 Example 40 νη ι〇S , 1.14 矽Rubber material Material (SE1647U) 矽Rubber material (SRX53 9UTK) | Metal 矽^ Thermal conductivity (W/mK) Polymer elastic material Heat transfer electrical insulating agent-1 Matching measurement result sro 200920790 According to the experimental results of Examples 26 to 46 It is understood that good thermal conductivity can be obtained by using a metal cerium powder having a particle diameter of 20 μm or less as a heat conductive electrical insulating agent. Next, an embodiment of the present invention relating to a method for producing a heat-conductive elastic sheet will be described. First, in the present embodiment, the ruthenium vinyl decane-based Shih-Hui rubber material is "SH747U" (trade name) manufactured by Toray Dow Corning Co., Ltd., and also by T〇ray D〇w (: 〇rning).

股份有限公司製造之「SRX539UTK」（商品名），。亦即，本實施例中，藉由該等市售之甲基乙烯基矽烷系之矽橡膠材料（SH747U及SRX539UTK)來構成高分子彈性材料。於其中採用作為傳熱性電氣絕緣劑之金屬矽粉末，對由6〇重量份之SH747U及40重量份之SRK539UTK所構成之ι〇〇重量份之高分子彈性材料，分別配合5〜6〇重量份之金屬矽粉末，獲得各成形材料。又，作為比較備未配合金屬懈之成形材料。 Π樣地準對該等成形材料進行混練後，依照日本專利第Saw% 號所述之製造方法（塗佈法）形成橡膠片。亦即，本實施例中’使_橡膠材料及金屬销構成之混合組成物溶解於料溶劑之甲苯後，進行消1，並且加以調整以使固體成率為41.7Λ、黏度為8〇〇〜13〇〇〇 cp。於聚對苯二甲酸乙二酿製之支持膜上將所獲得之混合溶液塗佈成特定之厚 ^並於50〜12〇°C之烘箱内進行乾燥。進而’使用電子射、射機’對支持膜上之經乾燥之矽橡膠片照射3〇〇 kV、 160 W之電子射線，使矽橡膠交聯。自以上述方式獲得之 36 200920790 矽橡膠片將支持膜剝離，並測定抗拉強度及熱導率，將測定結果作為實施例47〜50而表示於以下[表7]中。又，不於高分子彈性材料中配合金屬矽而利用與實施例47〜50相同之方法製成傳熱性橡膠片，將結果作為比較例22而一併表示。 [表7] 實施例47 實施例48 實施例49 實施例50 交例22 配合高分子彈性材料梦橡膠材料 (SH747U) 60 60 60 60 60 碎橡膠材料 (SRX539UIK) 40 40 40 40 40 傳熱性電氣絕緣劑金屬石夕 5 10 30 60 — 測定結果熱導率(W/m.K) 0.9 1.0 1.1 1.2 0.7 抗拉強度(Mpa) 9.3 9.4 8.4 7.7 10.1 以上述方式獲得之實施例47〜50之橡膠片，顯示出較未配合有金屬矽之比較例22更為優異之熱導率，均具有良好之無凹凸之表面，且使用性亦良好。又，藉由上述塗佈法所獲得之矽橡膠片與先前藉由壓延法製成之矽橡膠片相比，目標厚度之厚度精確度更為優異。將其比較結果表示於以下[表8]中。再者，各統計值之資料總數各為600。 37 200920790 [表8]"SRX539UTK" (trade name) manufactured by the company. That is, in the present embodiment, the commercially available methyl vinyl decane-based ruthenium rubber materials (SH747U and SRX539UTK) constitute a polymer elastic material. A metal ruthenium powder as a heat-conductive electrical insulating agent is used, and a weight of the polymer elastic material composed of 6 parts by weight of SH747U and 40 parts by weight of SRK539UTK is blended with 5 to 6 weights, respectively. A portion of the metal tantalum powder was obtained to obtain each of the formed materials. In addition, as a molding material that is not matched with metal. After the kneading of the molding materials, the rubber sheets were formed in accordance with the production method (coating method) described in Japanese Patent No. Saw%. That is, in the present embodiment, after the mixed composition of the rubber material and the metal pin is dissolved in toluene of the solvent, the elimination is performed, and the solid content is adjusted to 41.7 Å and the viscosity is 8 〇〇. 13〇〇〇cp. The obtained mixed solution was applied to a specific thickness of a polyethylene terephthalate-branched support film and dried in an oven at 50 to 12 ° C. Further, the dried ruthenium rubber sheet on the support film was irradiated with electron beams of 3 〇〇 kV and 160 W using an electron gun and a jet machine to crosslink the ruthenium rubber. The 36 200920790 矽 rubber sheet obtained in the above manner was used to support the film peeling, and the tensile strength and thermal conductivity were measured, and the results of the measurement were shown in the following [Table 7] as Examples 47 to 50. Further, a heat-transferable rubber sheet was produced in the same manner as in Examples 47 to 50 except that the metal ruthenium was blended in the polymer elastic material, and the results were shown together as Comparative Example 22. [Table 7] Example 47 Example 48 Example 49 Example 50 Example 22 Mixed polymer elastic material Dream rubber material (SH747U) 60 60 60 60 60 Crushed rubber material (SRX539UIK) 40 40 40 40 40 Heat transfer electrical Insulating agent metal lithium 5 10 30 60 — measurement result thermal conductivity (W/mK) 0.9 1.0 1.1 1.2 0.7 tensile strength (Mpa) 9.3 9.4 8.4 7.7 10.1 The rubber sheets of Examples 47 to 50 obtained in the above manner, Comparative Example 22, which was not provided with a metal ruthenium, exhibited a superior thermal conductivity, and both had a good surface having no unevenness, and the usability was also good. Further, the ruthenium rubber sheet obtained by the above coating method is more excellent in thickness accuracy of the target thickness than the ruthenium rubber sheet previously produced by the calendering method. The results of the comparison are shown in the following [Table 8]. Furthermore, the total amount of information for each statistical value is 600. 37 200920790 [Table 8]

根據上述比較結果亦明確成之石夕橡膠片相對* 〇.2mm ^通…延法製確度為。.2㈣.049 mm左右，而度，實際之厚度精造方法有關之本發明之塗佈法製：：:熱性彈性片之製伸忐1造之矽橡膠片相對於〇 9 咖之目標厚度，可製造出G.2__mm之高、0.2 石夕橡膠片。亦gp，依據與傳熱性彈性片之製-之本發明來製造梦橡膠片，藉此可大幅提高厚度精確度關之其次，就形成有用以覆蓋傳熱性彈性片表面：表面層，實施例加以說明，該傳熱性彈性片係依據與上述傳難彈性片及其製造方法有關之本發明而獲得。首先，本實施例中，與上述實施例47〜50相同，高八子彈性材料之甲基乙烯基石夕烷系之石夕橡膠材料係 Toray Dow Coming股份有限公司製造之「SH747u」（商。名）、以及同樣地由Toray Dow Corning股份有限公司製造之「SRX5 39UTK」（商品名）。亦即，本實施例中，藉由該等市售之甲基乙烯基矽烷系矽橡膠材料（SH747u及 SRX5 39UTK)來構成高分子彈性材料。繼而，對由重量份之SH747U及40重量份之SRX539UTK所構成之1〇〇重 38 200920790 量份之高分子彈性材料，配合60重量份之作為傳熱性電氣絕緣劑之金屬矽粉末並進行混練，獲得成形材料。According to the above comparison results, it is also clear that the Shishi rubber sheet is relatively * 〇.2mm ^ pass... .2 (4). 049 mm or so, and the actual thickness of the method of the invention is related to the coating method of the present invention::: The heat-elastic sheet of the 忐造造矽矽矽矽矽矽矽矽矽矽矽矽矽矽矽矽Produced a G.2__mm high, 0.2 stone eve rubber sheet. Also, according to the invention of the heat-transmissive elastic sheet, the dream rubber sheet is manufactured, whereby the thickness precision can be greatly improved, and the surface of the heat-transmissive elastic sheet can be covered to cover the surface of the heat-transmissive elastic sheet: For example, the heat transfer elastic sheet is obtained in accordance with the present invention relating to the above-mentioned transfer elastic sheet and its production method. First, in the present embodiment, the same as the above-mentioned Examples 47 to 50, the methyl vinyl austenite-based Shixia rubber material of the Takayoshi elastic material is "SH747u" (trade name) manufactured by Toray Dow Coming Co., Ltd. And "SRX5 39UTK" (trade name) manufactured by Toray Dow Corning Co., Ltd. in the same manner. That is, in the present embodiment, the polymer elastic material is constituted by the commercially available methyl vinyl decane ruthenium rubber materials (SH747u and SRX5 39UTK). Then, 60 parts by weight of the polymer elastic material composed of the SH747U and 40 parts by weight of the SRX539UTK, which is composed of the weight of the SH747U and the 40 parts by weight of the SRX539UTK, 60 parts by weight of the metal cerium powder as the heat conductive electrical insulating agent, and kneaded , obtaining a forming material.

使用與上述實施例47〜50相同之製造方法及製造條件，將上述成形材料製成傳熱性彈性片。其次，於所獲得之傳熱性彈性片之表面塗佈表面處理冑，藉此形成表面層 (脫杈層）。作為該表面處理中所使用之處理材料之配合例，可以如下方式進行配合。亦即，1〇〇重量份之作為主材料（矽增滑塗佈材料）之Momentive Perf〇rmance Matedais製造之 HS-4」（商品名）、5〇重量份之作為密合性提昇劑之 Momentive Perf0rmance Materials 製造之「xc_3」（商品名）、及1 °重量份之作為硬化觸媒之Momentive Perfc)rmance Mater—製造之「YC683 1」（商品名卜使表面處理材料溶解於16()重量份之作為稀釋溶 "之曱本’製成合溶液後’將該混合溶液塗饰於傳孰性淨性片之表面，藉此於傳熱性彈性片上形成作為、The above-mentioned molding material was made into a heat-transfer elastic sheet using the same manufacturing method and manufacturing conditions as those of the above Examples 47 to 50. Next, a surface treatment crucible is applied to the surface of the obtained heat-conductive elastic sheet, thereby forming a surface layer (disintegration layer). As a compounding example of the processing material used for the surface treatment, the compounding can be carried out as follows. That is, one part by weight of the HS-4" (trade name) manufactured by Momentive Perf〇rmance Matedais as a main material (矽矽滑 coating material), and 5 parts by weight of Momentive as an adhesion enhancer "xc_3" (trade name) manufactured by Perf0rmance Materials, and "YC683 1" manufactured by Momentive Perfc) rmance Mater (1 ° part by weight as a curing catalyst) (product name: surface treatment material is dissolved in 16 parts by weight) After the diluted solution is prepared as a solution, the mixed solution is applied to the surface of the transferable pure sheet to form a heat transfer elastic sheet.

Oe7 4-0* 防- tjOe7 4-0* anti-tj

稭由上述步驟獲得作為傳熱性彈性片之梦橡膠片， =彈：片呈由傳熱性彈性片本體及脫模層所構成4 =，將此用作液晶面板之電極之屢接作業之緩種以下將㈣結果作為實施w 51而表方由傳中。又，使用未形成有上述表面層(脫模層)而 …弹性片本體構成之單層製品進行同樣實驗結果作為實㈣52而—彳„干_ 2之只驗’ 圖…，本實驗之壓接：::二:再者，发搔作業係夾設ACF(Anisotr〇 39 200920790 =rtiveFiim，異向性導電膜）5,對連接於液晶面板！之电極 2 與 FPC(flexible printeH 〆、^ ,P llUed Circuit ’軟性印刷電路板）3 =極4進行熱Μ接之作業，當藉由加熱壓接 4電極2、4時，使用石夕橡膠Μ”乍為緩衝材料。再者，本實驗之加熱壓接頭6之^ λ ，、、土按頌6之酿度為250〜35(TC，壓力為3 〇壓接時間為15〜2G秒。又，該作業中用作緩衝材料 W橡膠片7方面’已知緩衝片破裂之主要原因在於，熱屋接後露出之ACF5黏接於韓膠片7而導致液晶面板1 側之構件與矽橡膠片7相互黏接。 [表9] 實施例51 實施例52 積層(有脫模層）單層（無脫模層）使用次數 34 ---- 12 ，橡膠片厚度(mm) 0,20 0.19 笋導率(W/m.K) 1.2 1.2 如上述[表9]所示，當將作為無脫模層之單層矽橡膠片之實施例52用作壓接作業之緩衝材料（圖2中之矽橡膠片 7)時，於經12次壓接作業之時點發生破裂，變得無法使用。相對於此，作為於片表面i形成脫模層而呈積層構造之矽橡膠片即實施例51 ’壓接30次以上該片仍可使备破裂。曰 200920790 根據上述[表9]所示之結果亦明確得知，形成作為用以覆蓋矽橡膠片表面之表面層之脫模層，賦予脫模性，藉此可獲得不會黏接於ACF之矽橡膠片，與未實施表面處理之單層橡膠片相比，對於反覆壓接之耐久性得到大幅提昇，可使用次數大幅增加。繼而，就採用氟橡膠材料作為高分子彈性材料之實施例加以說明。亦即，本實施例中，氟橡膠材料係採用叮 “lexis股份有限公司製造之「TEcn〇fl〇n p457」（商品 j)。繼而，對100重量份之以該氟橡膠材料為主要成分之高分子彈性材料’配合50 "份之金屬矽粉末作為傳埶性電氣絕㈣。再者’本實施例之高分子彈性材料⑽’重置份之詳細内容如下述[表1〇]所示，於481 膠材料（了⑽帆⑽⑽）中添加有似重量份之a」 kneel製造之「Thermax N99〇」（商品名）作為導電材料、 =重量份之協和化學股份有限公司製造之」（商品名）作為吸酸材料、24重量份之日本化成股份有限公司製造之「TAIC σ 旦 AIC」（商°σ名）作為共交聯劑、1·4重里份之花王股份有限公司势作為脫模材料。硬脂酸叫商品名）」利用與上述與傳熱性彈性片之實施例心〇才目同之塗佈法方法有關之本發明為傳熱性彈性m r彳丨；、所料之成形材料成形果表示於以下[表 23 又，亦一併表示比較例桃、、。果，該比較例23中不添加作為傳熱性電氣絕 41 200920790 緣劑之金屬矽，並以與實施例53相同之條件製成傳熱性彈性片。 [表 10] (From the above steps, the dream rubber sheet as the heat-transfer elastic sheet is obtained, and the elastic sheet is composed of the heat-transfer elastic sheet body and the release layer 4 =, and this is used as the electrode of the liquid crystal panel. Under the mitigation, the results of (4) will be passed as the implementation of w 51 and the results will be passed. Further, the same experimental result was carried out using a single-layered product in which the above-mentioned surface layer (release layer) was not formed, and the elastic sheet body was used as the actual (four) 52, and the dry test was carried out. :::2: In addition, the hairpin operation is equipped with ACF (Anisotr〇39 200920790 = rtiveFiim, anisotropic conductive film) 5, connected to the liquid crystal panel! Electrode 2 and FPC (flexible printeH 〆, ^, P llUed Circuit 'Soft printed circuit board' 3 = The thermal pole is connected to the pole 4, and when the electrodes 4 and 4 are crimped by heating, the stone Μ rubber Μ 乍 is used as a cushioning material. Furthermore, the heating pressure joint 6 of the experiment has a degree of brewing of λ, , and soil of 〜6 of 250 to 35 (TC, a pressure of 3 〇, a crimping time of 15 to 2 G seconds. The main reason for the cracking of the cushioning material W is that the ACF 5 exposed after the hot housing is adhered to the Korean film 7 and the member on the liquid crystal panel 1 side and the silicone rubber sheet 7 are bonded to each other. 9] Example 51 Example 52 Lamination (with release layer) Single layer (without release layer) Number of uses 34 ---- 12, thickness of rubber sheet (mm) 0,20 0.19 Bamboo shoot conductivity (W/mK) 1.2 1.2 As shown in the above [Table 9], when Example 52, which is a single-layer ruthenium rubber sheet having no release layer, was used as a cushioning material for the crimping operation (矽 rubber sheet 7 in Fig. 2), In the case of the 12-times crimping operation, the film was broken and became unusable. On the other hand, as a ruthenium rubber sheet having a laminated structure in which a release layer was formed on the sheet surface i, the film 51 was crimped 30 times or more.使200920790 According to the results shown in [Table 9] above, it is also clearly known that it is formed as a surface for covering the surface of the rubber sheet. The release layer imparts mold release property, whereby a rubber sheet which does not adhere to the ACF can be obtained, and the durability against the reverse crimping is greatly improved as compared with the single-layer rubber sheet which is not subjected to the surface treatment. The number of uses is greatly increased. Next, an example in which a fluororubber material is used as the polymer elastic material will be described. That is, in the present embodiment, the fluororubber material is "TEcn〇fl〇n manufactured by lexis Co., Ltd." P457" (product j). Then, 100 parts by weight of the polymer elastic material containing the fluororubber material as a main component is blended with 50 parts of the metal bismuth powder as a passivation electric (4). For example, the details of the polymer elastic material (10) 'replacement part are as shown in the following [Table 1〇], and the “Thermax N99〇 manufactured by the weight of a” kneel is added to the 481 rubber material ((10) sail (10) (10)). "(trade name)" (trade name) manufactured by Kyowa Chemical Co., Ltd. as a conductive material, "trade name" as an acid-absorbing material, and 24 parts by weight of "TAIC σ Dan" manufactured by Nippon Kasei Co., Ltd. "AIC" (commercial σ name) is used as a co-crosslinking agent, and Kao Co., Ltd., which is a weight of 1.4%, is used as a mold release material. Stearic acid is called a trade name." The embodiment using the heat transfer elastic sheet described above is used. The present invention relating to the coating method is a heat-transfer elastic mr彳丨; and the formed material forming fruit is shown in the following [Table 23, and also shows a comparative example peach,. In the comparative example 23, a metal crucible as a heat-transfering electrical insulator was not added, and a heat-transmissive elastic sheet was produced under the same conditions as in the example 53. [Table 10] (

實施例53 比較例23 配合高分子彈性材料氟橡膠材料 (TECNOFLON 卜57) 48.1 48.1 Thermax N990 48.3 48.3 Magsarat ST30 4.8 4.8 TAIC 2.4 2.4 硬脂酸150 1.4 1.4 傳熱性電氣絕緣劑金屬矽 50 — 測定結果熱導率(W/m-K) 1.0 0.5 抗拉強度(Mpa) 6.4 9.3 以上述方式獲得之實施例53之氟橡膠片，與未配合有金屬石夕之比較例23相比，顯示出良好之熱傳導性，而且具有無凹凸之表面，厚度精確度優異，且使用性亦良好。【圖式簡單說明】圖1係一併表示本發明之實施例22〜24之熱導率之測定結果與比較例1 8〜2 1之熱導率之測定結果的圖表。 42 200920790 圖2係使用本發明之實施例5 1及52之壓接作業之概略說明圖。【主要元件符號說明】 1 液晶面板 2、4 電極 3 FPC 5 ACF 6 加熱壓接頭 7 ί夕橡膠片 43Example 53 Comparative Example 23 Blending a polymeric elastic material fluororubber material (TECNOFLON 卜 57) 48.1 48.1 Thermax N990 48.3 48.3 Magsarat ST30 4.8 4.8 TAIC 2.4 2.4 Stearic acid 150 1.4 1.4 Heat-transfer electrical insulating agent Metal 矽 50 - Measurement result Thermal conductivity (W/mK) 1.0 0.5 Tensile strength (Mpa) 6.4 9.3 The fluororubber sheet of Example 53 obtained in the above manner showed good heat conduction as compared with Comparative Example 23 which was not compounded with the metal slab. It has a non-concave surface, excellent thickness accuracy, and good usability. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a graph showing the results of measurement of the thermal conductivity of Examples 22 to 24 of the present invention and the measurement results of the thermal conductivity of Comparative Examples 18 to 21. 42 200920790 Fig. 2 is a schematic explanatory view showing a crimping operation using the embodiments 51 and 52 of the present invention. [Description of main component symbols] 1 LCD panel 2, 4 electrodes 3 FPC 5 ACF 6 heated crimping connector 7 ί夕橡胶片 43

Claims

200920790 十、申請專利範園： -有:專熱性彈性片，其係將於高分子彈性材料中配 …、ί·生電氣絕緣劑之混合組成物成形為片交聯而獲得者，其特徵在於：並進仃採用五屬矽粉末作為該傳熱性電氣絕緣劑。金二1項之傳熱性彈性片，其中，該刀禾之千均粒徑為20 μπι以下。配合量為5二之該高分子彈性材料中，該金里為5重置份以上且未滿3〇〇重量份。 …4'如中請專利範圍第1或2項之傳熱性彈性片，盆 „亥阿分子彈性材料為矽橡膠。 5·如申μ專利範圍帛4項之傳熱性彈性片夕橡膠為甲基乙烯基⑦烧系♦橡膠。、§ ^如中請專利範圍第i或2項之傳熱性彈性片，其中，中/專利圍第1《2項之傳熱性彈性片，其中 >成有後蓋表面之表面層。古八8二種傳熱性彈性片之製造方法，其特徵在於：將由之=材料及作為傳熱性電氣絕緣劑之金屬矽粉末所 :::為，，、黏度為5_〜—之混合溶液: =广液於由聚對苯二甲酸乙二酿所構成之脫之支持膜上塗佈成特定之厚度，於溫度為— 44 200920790 中進行乾燥，其次藉由電子射線照射使該支持膜上之高分子彈性片交聯，然後將該支持膜剝離。 Η一、圖式：如次頁。 45200920790 X. Application for Patent Park: - There are: special-purpose elastic sheets, which are obtained by forming a mixed composition of a polymer elastic material, a composite material of ί·sheng electrical insulating agent into a piece of cross-linking, which is characterized by : The five-powder powder is used as the heat-conductive electrical insulating agent. The heat transfer elastic sheet of the gold item 1 wherein the knife has a thousand-average particle diameter of 20 μπι or less. In the polymer elastic material having a blending amount of 5, the gold is 5 parts by weight or more and less than 3 parts by weight. ... 4 'For example, the heat transfer elastic sheet of the first or second patent range of the patent, the bowl of hai Hai molecular elastic material is ruthenium rubber. 5 · The heat transfer elastic film of the patent range 申 4 Methyl vinyl 7 burning system ♦ rubber. § ^ such as the heat transfer elastic sheet of the patent range i or 2, wherein, the middle / patent circumference of the first "2 heat transfer elastic sheet, which > a surface layer having a back cover surface. The method for producing a heat transfer elastic sheet of the eighth and eighth embodiments is characterized in that: a material and a metal tantalum powder as a heat conductive electrical insulating agent are: , a mixed solution of viscosity 5_~-: = wide liquid is coated on a support film composed of polyethylene terephthalate, coated to a specific thickness, dried at a temperature of - 44 200920790, followed by drying The polymer elastic sheet on the support film is crosslinked by electron beam irradiation, and then the support film is peeled off. First, the pattern: as the next page.