200846509 九、發明說明·· 【發明所屬之技術領域】 本發明係有關溶解非鐵質製品之纟甘鍋與裝填方法。 . 【先前技術】 於習知技術中已知有一種有底部類型之熔解非鐵質製 品之整體坩鍋。此底部一般範限於一明顯地平面之內表 . 面，被一彎曲內表面所圍繞，該彎曲內表面形成凹形，經 由坩鍋之多數側壁延伸。 • 此一坩鍋特別用於矽之熔解以鑄成一錠塊，於其中切 割矽薄片（英文爲wafer (晶圓））。此等薄片例如用於積體電 路或光電池元件的製造。 已知由固態矽塊製造錠塊，該固態矽塊例如由錠塊廢 料構成。於此情況下，將此等矽塊配置於坩鍋之假想充塡 區內。然後使之熔解，直到矽變成液體爲止。 另一方面，已知坩鍋之內表面一般被覆一特別脆弱的 例如氮化矽襯層，用來使錠塊易於脫模出坩鍋外，一次冷 ⑩卻。 問題在於，矽塊在變成液體之前係固態，會經受熱膨 脹。結果造成體積增大而有塊體抵觸摩擦坩鍋之壁面，從 而氮化矽之脆弱襯層損壞之虞。 若襯層損壞，即存在有脫模的問題。 於矽塊膨脹而與圍繞坩鍋底部之彎曲內表面接觸情況 下，襯層損壞虞慮更大。實際上，於此情況下重大摩擦因 斜坡作用而發生於彎曲表面上。 200846509 【發明內容】 本發明旨在盡可能避免於砂塊膨脹過程中襯層損壞。 • 爲此’本發明之一目的在於提供上述類型之祖鍋，其 ， 特徵在於，底部包括標記機構，具體標出坩鍋內製品充塡 假想區的基底，且其中標記機構將於一中央第丨部與周邊 第2部的表面平面分開。 ， 多齡本發明，充塡坩鍋之作業員知道若將製品配置於 基底以標g己機構具體標示之充塡區內，製品於膨脹期間內， ® 即無損壞到其襯層之虞。結果，坩鍋之襯層節省，以致於 最後產品容易脫模。 如此，中央第1部構成坩鍋內固態製品之充塡假想區 的基底’且該基底透過周邊第2部，與i甘鍋底部之彎曲內 表面隔開。結果’於固態製品膨脹情況下，固態製品充份 遠離彎曲內表面而不會與該彎曲內表面接觸，避免彎曲內 表面之襯層與固態製品間的摩擦。 根據本發明，坩鍋可包含以下一或複數特徵： -表面平面之第2部形成一圍繞第1部的帶。該帶具有一寬 度’定成在其配置於中央第1部內情況下，大於固態非 鐵製品的可能膨脹。 -較佳地，於可界定坩鍋之底部之中心情況下，帶之寬度顯 然等於坩鍋之底部之中心和中央第i部之分隔距離與熔 解溫度與非鐵製品的熱膨脹係數的積。因此，製品即使 膨脹，仍不會與坩鍋之彎曲內表面接觸。 -帶具有平均寬度在3與10mm(毫米）間的平均寬度。 200846509 -標記機構不連續。這可便於製造，特別是可避免使標記機 構形成具有一般較直線更難實施之角度或圚形頂部。 -坩鍋包括一襯層，且標記機構包括一經過加工處理之部 分。因此，利用襯層來實施標記機構。 -標記機構隱藏於坩鍋底部內。 -標記機構於坩鍋底部內凸出。該實施例於作業員將非鐵製 品配置於坩鍋內略微超出標記機構所具體標出充塡假想 區之基底外情況下特別有利。事實上’凸出之標記機構 可略微托起製品，因此，其可更少與坩鍋底部之彎曲內 表面接觸。因此，坩鍋之襯層受到更多保護。 本發明之目的亦在於提供一種熔解非鐵質製品之整體 坩鍋之充塡方法，於其過程中將固態製品配置於坩鍋之一 充塡假想區內，其特徵在於，使用標記機構，具體標出坩 鍋內固態製品之充塡假想區的基底，並根據標記機構配置 製品，俾當非鐵質製品熔解時，製品可膨脹而不會與坩鍋 之彎曲內表面接觸。 根據本發明一實施例，使用如以下所界定之一坩鍋於 方法之過程中。 【實施方式】 於第1圖中顯示根據本發明第1實施例，一用於例如 矽之非鐵質製品之熔解之整體坩鍋1 0。 坩鍋1 0以例如玻璃狀二氧化矽、氮化矽、石英、石墨、 氧化物或與碳或氮結合之非氧化物之傳統材料實施。 坩鍋1 〇包括一底部1 2，經由側壁14延伸。如由第2 1 6，被 R之半 施，再 層可藉 固態矽 括四條 ，標記 2部26 1部24 有一寬 I Μ値 央第1 膨脹係 度之80 200846509 圖可知，底部1 2範限於一明顯地係平面之內表面 一彎曲內表面18所圍繞，該彎曲內表面18以曲線 徑形成凹形。 坩鍋1 〇之內表面1 8以例如大部分由氮化矽實 添加矽氧化物及金屬矽之襯層（未圖示）被覆。該襯 刷子或噴射塗布。 底部12還包括標記機構20，具體標出坩鍋內 之充塡假想區2 2的基底。標記機構2 0不連續，包 配置來界定一中心矩形2 3之直線。如由第2圖可知 機構2 0於坩鍋1 0之底部1 2內凸出。 標記機構2 〇將於一中央第1部24與一周邊第 的表面平面1 6分開。該第2部2 6形成一圍繞該第 的帶。 定成在其配置於中央第1部內情況下，該帶具 度Ll，其大於固態非鐵製品的可能之膨脹。 於本實施例中，根據關係式L = + L2 + R決另 。帶之寬度h顯然等於坩鍋之底部之中心23與中 部24之分隔距離L2與熔解溫度（Tl)與非鐵製品的熱 數k的積。 因此，寬度h藉以下關係界定：200846509 IX. INSTRUCTIONS OF THE INVENTION · Technical Field of the Invention The present invention relates to a simmering pot and a filling method for dissolving non-ferrous products. [Prior Art] An integral crucible having a bottom type of molten non-ferrous material is known in the prior art. The bottom portion is generally limited to an apparently planar surface. The face is surrounded by a curved inner surface that is concavely shaped and extends through a majority of the side walls of the crucible. • This crucible is specially used for the melting of crucibles to cast an ingot, in which the crucible is cut (wafer in English). Such sheets are used, for example, in the manufacture of integrated circuits or photovoltaic elements. It is known to manufacture ingots from solid blocks, which consist, for example, of ingot waste. In this case, the blocks are placed in the imaginary filling area of the crucible. Then melt it until it turns into a liquid. On the other hand, it is known that the inner surface of the crucible is generally covered with a particularly fragile liner such as a tantalum nitride, which is used to facilitate the release of the ingot from the crucible and to cool once. The problem is that the block is solid before it becomes liquid and will undergo thermal expansion. As a result, the volume is increased and the block is in contact with the wall of the friction crucible, so that the fragile lining of the tantalum nitride is damaged. If the lining is damaged, there is a problem of demolding. In the case where the crucible expands to contact the curved inner surface surrounding the bottom of the crucible, the liner damage is more of a concern. In fact, in this case significant friction occurs on the curved surface due to the slope action. 200846509 SUMMARY OF THE INVENTION The present invention is directed to avoiding damage to the liner during the expansion of the sand as much as possible. • To this end, one of the objects of the present invention is to provide a terrarium of the above type, characterized in that the bottom portion comprises a marking mechanism, specifically marking the base of the crucible filled with the imaginary zone, and wherein the marking mechanism will be in a central The crotch is separated from the surface plane of the second part of the periphery. According to the invention of the present invention, the operator of the filling pan knows that if the product is placed on the substrate in the charging area specifically marked by the body, the product is not damaged to the lining of the product during the expansion period. As a result, the lining of the crucible is saved, so that the final product is easily released. Thus, the central first portion constitutes the base of the imaginary region of the solid product in the crucible, and the substrate passes through the peripheral second portion and is spaced apart from the curved inner surface of the bottom of the i-cavity. As a result, in the case of expansion of the solid product, the solid product is sufficiently away from the curved inner surface without coming into contact with the curved inner surface, thereby avoiding friction between the inner surface of the curved inner surface and the solid product. According to the invention, the crucible may comprise one or more of the following features: - The second portion of the surface plane forms a strip around the first portion. The belt has a width which is set to be greater than the possible expansion of the solid non-ferrous product in the case where it is disposed in the central first portion. Preferably, in the case where the center of the bottom of the crucible can be defined, the width of the belt is substantially equal to the separation distance between the center of the bottom of the crucible and the central i-th portion and the melting temperature and the coefficient of thermal expansion of the non-ferrous product. Therefore, even if the product expands, it does not come into contact with the curved inner surface of the crucible. - The belt has an average width between 3 and 10 mm (millimeters). 200846509 - The marking mechanism is not continuous. This facilitates manufacturing, and in particular avoids the marking mechanism from forming an angle or a dome-shaped top that is generally more difficult to implement than a straight line. - The crucible includes a liner and the marking mechanism includes a processed portion. Therefore, the marking mechanism is implemented using a lining. - The marking mechanism is hidden in the bottom of the crucible. - The marking mechanism protrudes in the bottom of the crucible. This embodiment is particularly advantageous when the operator places the non-ferrous product in the crucible slightly beyond the base of the marking mechanism to specifically mark the imaginary area. In fact, the <embossed marking mechanism can slightly hold the article so that it can be less in contact with the curved inner surface of the bottom of the crucible. Therefore, the lining of the crucible is more protected. The object of the present invention is also to provide a method for filling a whole crucible of a non-ferrous product, in which a solid product is disposed in a filling imaginary zone of a crucible, characterized in that a marking mechanism is used. The base of the imaginary area of the solid product in the crucible is marked, and the product is arranged according to the marking mechanism. When the non-ferrous product is melted, the product is swellable without coming into contact with the curved inner surface of the crucible. According to an embodiment of the invention, one of the methods defined below is used in the process of the method. [Embodiment] A whole crucible 10 for melting a non-ferrous product such as crucible is shown in Fig. 1 according to a first embodiment of the present invention. The crucible 10 is implemented by a conventional material such as glassy ceria, tantalum nitride, quartz, graphite, oxide or non-oxide combined with carbon or nitrogen. The crucible 1 〇 includes a bottom portion 1 2 extending through the side wall 14. For example, by the 2nd, 6th, the half of the R, the second layer can be surrounded by the solid state, including 4, marking 2 parts, 26, 1 part, 24, and a width I, the first expansion coefficient of the first expansion system. 200846509 The figure shows that the bottom 1 2 Fan It is limited to a substantially planar inner surface surrounded by a curved inner surface 18 that is concavely curved with a curved diameter. The inner surface 18 of the crucible 1 is covered with, for example, a lining (not shown) in which a majority of niobium oxide and niobium are added. The lining brush or spray coating. The bottom portion 12 also includes a marking mechanism 20 that specifically identifies the base of the imaginary zone 22 in the crucible. The marking mechanism 20 is discontinuous and is configured to define a line of a central rectangle 2 3 . As can be seen from Fig. 2, the mechanism 20 projects in the bottom 12 of the crucible 10. The marking mechanism 2 〇 separates a central first portion 24 from a peripheral first surface plane 16 . The second portion 26 forms a band around the first portion. In the case where it is disposed in the central first portion, the belt has a degree L1 which is greater than the possible expansion of the solid non-ferrous product. In the present embodiment, the relationship L = + L2 + R is determined according to the relationship. The width h of the belt is obviously equal to the product of the separation distance L2 between the center 23 and the middle portion 24 of the crucible and the melting temperature (Tl) and the heat number k of the non-ferrous product. Therefore, the width h is defined by the following relationship:
Li = kxTi><L2 寬度L!可不精確地等於此値，惟在此算出之寬 %至1 2 0 %之間。 如可由以下察知，帶之平均寬度在3與1 間。 ‘200846509 作爲例子，可列舉以下以毫米爲單位的數値·· 坩鍋之二相對側壁（1 4)間的距 離（2xL) 680 840 990 1300 表面18之曲線（R) 12 15 15 18 中央第1部24之寬度（2xL2) 652.8 806.1 955.4 1258 由底部之周邊第2部分形成之 帶之雙倍寬度（2XLD 3.2 3.9 4.6 6 一次成型之矽錠塊之寬度 624 780 936 1248 現在將說明坩鍋1 0之製造方法之主要態樣。 坩鍋可根據第1情形，藉由以型芯製造之方法實施， 或根據第2情形，藉由不用型芯製造之方法實施。 於以型芯製造之方法之第1情形下，可藉由陶土鑄 造、射出成型、乾壓、電沉積、熔液噴射、振動鑄造、凝 膠鑄造或壓鑄實施。 於第1情形下，凸出之標記機構2 0可藉由使用石膏、 樹脂實施，或以其他滲透性或不滲透材料實施。型芯具有 一與標記機構20之凸出形狀互補之凹形。 於變化例中，標記機構2 0可在坩鍋製造後裝配。於該 變化例中，標記機構可塗刷或塗布於坩鍋之襯層上，以形 成一作業員在坩鍋之充塡時可看到的厚度餘量。 於不用型芯製造之方法之第2情形下，可藉由掏空鑄 造、噴射、壓鑄或再度焊接實施坩鍋。 於第2情形下，凸出之標記機構2 0藉由在坩鍋焙燒之 前或之後，噴射、鑄造、塗刷線或點於坩鍋之內表面上實 200846509 施。 現在將說明本發明熔解非鐵質製品之坩鍋之充塡方法 的主要態樣。 首先，可將一或複數矽片或“晶圓”（未圖示）配置於坩 鍋底部之一部分上，較精確地於內表面平面1 6上以保護其 襯層。使用標記機構20來具體標出該充塡假想區22的基 底。 其次，將固態矽塊配置於充塡假想區22內。根據標記 機構，將矽塊配置於充塡假想區2 2的基底內，較佳地自該 基底的邊界開始至該基底的中心爲止。因此，矽塊可膨脹 而不會與坩鍋之彎曲內表面接觸。亦可繼矽塊之後，將顆 粒形式之矽配置於充塡假想區中分隔此等塊體的空隙內。 須知’由於標記機構2 0凸出，若將一矽片或塊3 〇配 置於標記機構2 0外，該矽片或塊3 〇即略微被機構2 〇托 起，因此，不會與底部12之彎曲內表面18接觸。 於第3圖中顯示根據本發明第2實施例之一整體坩 鍋。該坩鍋類似於第1圖者，且與第丨圖及2者相似之元 件以相同參考號碼標示。 異於弟1實施例，標記機構20，不凸出而隱藏於坩鍋之 底部1 2內。 坩鍋之製造方法很明顯地類似於第丨圖及2者。 於以型芯製造之方法之第1情形下，標記機構2〇,藉由 在坩鍋焙燒之前或之後機械加工或孔穴形成予以實施。於 變化例巾，㈣藉由㈣入材料前將蠟帶沉積方令型芯上， 200846509 形成孔穴。 於不用型芯製造之方法之第2情形下，隱藏標記機構 20’藉由在坩鍋焙燒之前或之後機械加工、打孔、以雷射標 記、穿製多孔予以實施。 第3圖之坩鍋之充塡方法與第1圖及2者類似。 須知，其實，本發明不限於上述實施例。 特別是，標記機構可能無法直接實施於坩鍋之底部1 2 內。因此’可使用發光標記機構，例如配置於坩鍋1 〇上方 之雷射束’藉由雷射束投射於坩鍋之底部1 2上，具體標出 充塡區之基底。 於此情況下，於坩鍋之充塡方法之過程中，將固態非 鐵製品配置於坩鍋之充塡區之基底內，使用標記機構，將 雷射束投射底部1 2上，具體標出充塡區之基底，並根據標 記機構配置非鐵製品。 【圖式簡單說明】 本發明由以下僅提供作爲例子並參考附圖之說明將可 更爲瞭然，其中： 第1圖係根據本發明第1實施例，一整體坩鍋之立體 圖； 第2圖係第1圖之剖視圖；以及 第3圖係根據本發明第2實施例，一整體坩鍋之類似 於第2圖者之剖視圖。 【主要元件符號說明】 10 整體坩鍋 -11- 200846509Li = kxTi><L2 Width L! may not be exactly equal to this 値, but the width is calculated to be between 1% and 2%. As can be seen below, the average width of the belt is between 3 and 1. '200846509 As an example, the following is the number in millimeters. · The distance between the opposite side walls (1 4) of the crucible (2xL) 680 840 990 1300 Curve of surface 18 (R) 12 15 15 18 Central 1 width of 24 (2xL2) 652.8 806.1 955.4 1258 Double width of the belt formed by the second part of the bottom of the bottom (2XLD 3.2 3.9 4.6 6 The width of the ingot block once formed 624 780 936 1248 Now the crucible 1 will be explained The main aspect of the manufacturing method of 0. The crucible can be carried out by the method of manufacturing the core according to the first case, or by the method of manufacturing the core according to the second case. In the first case, it can be carried out by clay casting, injection molding, dry pressing, electrodeposition, melt spraying, vibration casting, gel casting or die casting. In the first case, the protruding marking mechanism 20 can be borrowed. It is implemented by using gypsum, resin, or other permeable or impermeable material. The core has a concave shape complementary to the convex shape of the marking mechanism 20. In a variant, the marking mechanism 20 can be manufactured after the crucible is manufactured Assembly In a chemical example, the marking mechanism can be painted or applied to the lining of the crucible to form a thickness margin that can be seen by the operator when filling the crucible. The second case of the method of manufacturing the core is not used. The crucible can be implemented by hollow casting, spraying, die casting or re-welding. In the second case, the protruding marking mechanism 20 is sprayed, cast, painted or before or after roasting in the crucible. The surface of the crucible is placed on the surface of the crucible. The main aspect of the crucible filling method of the non-ferrous product of the present invention will now be described. First, one or a plurality of wafers or "wafers" can be used (not The figure is disposed on a portion of the bottom of the crucible, more precisely on the inner surface plane 16 to protect the lining. The marking mechanism 20 is used to specifically mark the base of the imaginary zone 22. Next, the solid 矽The block is disposed in the imaginary area 22. According to the marking mechanism, the block is disposed in the base of the imaginary area 22, preferably from the boundary of the base to the center of the base. Expanded without being connected to the curved inner surface of the crucible After the lumps, the granules in the form of granules are placed in the imaginary zone to separate the gaps of the blocks. Note that 'because the marking mechanism 20 is convex, if a slab or block 3 〇 is placed on Except for the marking mechanism 20, the cymbal or block 3 is slightly supported by the mechanism 2, and therefore does not come into contact with the curved inner surface 18 of the bottom 12. In Fig. 3, a second embodiment according to the present invention is shown. An overall crucible. The crucible is similar to the first one, and elements similar to those of the second and second are denoted by the same reference numerals. Different from the first embodiment, the marking mechanism 20 is not convex and hidden in the crucible. The bottom of the pot is inside 1 2 . The manufacturing method of the crucible is obviously similar to the first and second figures. In the first case of the method of core manufacturing, the marking mechanism 2 is implemented by machining or hole formation before or after crucible firing. In the case of a change of the towel, (4) the hole is deposited on the core by (4) before entering the material, and holes are formed in 200846509. In the second case without the method of core manufacturing, the hidden marking mechanism 20' is implemented by machining, punching, laser marking, and piercing before or after the crucible firing. The filling method of the crucible in Fig. 3 is similar to that of Figs. 1 and 2. It should be noted that, in fact, the present invention is not limited to the above embodiment. In particular, the marking mechanism may not be directly implemented in the bottom 1 2 of the crucible. Thus, a luminescent marking mechanism, such as a laser beam disposed above the crucible 1 投射, can be projected by a laser beam onto the bottom 12 of the crucible, specifically marking the base of the filling zone. In this case, in the process of filling the crucible, the solid non-ferrous product is placed in the base of the filling area of the crucible, and the marking beam is used to project the laser beam onto the bottom 1 2, specifically marking Fill the base of the area and configure non-ferrous products according to the marking mechanism. BRIEF DESCRIPTION OF THE DRAWINGS The present invention will be more fully described by the following description of the accompanying drawings, wherein: FIG. 1 is a perspective view of an overall crucible according to a first embodiment of the present invention; 1 is a cross-sectional view of FIG. 1; and FIG. 3 is a cross-sectional view of a whole crucible similar to FIG. 2 according to a second embodiment of the present invention. [Main component symbol description] 10 Whole crucible -11- 200846509
12 底 部 14 側 壁 16 內 表 面 18 彎 曲 內 表 面 2 0 ? 2 0 5 標 記 機 構 22 充 塡 假 想 23 中 心 矩 形 24 中 央 第 1 部 26 周 邊 第 2 部 30 矽 片 或 塊12 Bottom 14 Side wall 16 Inner surface 18 Curved inner surface 2 0 ? 2 0 5 Marking mechanism 22 Filling 假 False 23 Center moment 24 Center 1st 26 Week side 2nd part 30 矽 piece or block
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