TW200836849A - Nozzle, dry cleaner and dry cleaner system - Google Patents
Nozzle, dry cleaner and dry cleaner system Download PDFInfo
- Publication number
- TW200836849A TW200836849A TW097107837A TW97107837A TW200836849A TW 200836849 A TW200836849 A TW 200836849A TW 097107837 A TW097107837 A TW 097107837A TW 97107837 A TW97107837 A TW 97107837A TW 200836849 A TW200836849 A TW 200836849A
- Authority
- TW
- Taiwan
- Prior art keywords
- nozzle
- discharge port
- compressed air
- discharged
- convex shape
- Prior art date
Links
- 238000003860 storage Methods 0.000 claims abstract description 25
- 230000006835 compression Effects 0.000 claims abstract description 8
- 238000007906 compression Methods 0.000 claims abstract description 8
- 238000005108 dry cleaning Methods 0.000 claims description 49
- 238000007599 discharging Methods 0.000 claims description 4
- 238000009751 slip forming Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 83
- 239000000126 substance Substances 0.000 abstract description 3
- 206010047700 Vomiting Diseases 0.000 abstract 5
- 230000001464 adherent effect Effects 0.000 abstract 2
- 230000002250 progressing effect Effects 0.000 abstract 2
- 210000004916 vomit Anatomy 0.000 abstract 1
- 230000008673 vomiting Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 239000002689 soil Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000008267 milk Substances 0.000 description 2
- 210000004080 milk Anatomy 0.000 description 2
- 235000013336 milk Nutrition 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 241000282320 Panthera leo Species 0.000 description 1
- 244000018633 Prunus armeniaca Species 0.000 description 1
- 235000009827 Prunus armeniaca Nutrition 0.000 description 1
- 244000269722 Thea sinensis Species 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 210000000115 thoracic cavity Anatomy 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Nozzles (AREA)
- Liquid Crystal (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
200836849 Z/ZJ /pn 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種用於除去被吐出物體上的附著物之 乾洗器中所使用的喷嘴、具有該喷嘴的乾洗器以及具有該 乾洗器的乾洗系統。 【先前技術】 在液晶面板的組裝製造過程中，采用一種在液晶顯示200836849 Z/ZJ /pn Nine, the invention relates to: a nozzle used in a dry cleaning device for removing deposits on an object to be ejected, a dry cleaning device having the same, and having The dry cleaning system of the dry cleaner. [Prior Art] In the assembly and manufacturing process of a liquid crystal panel, a liquid crystal display is employed.
裝置用面板所使用的2片玻璃基板之間’均勻地散布球形 狀的粉末（襯墊(spacer))，而使2片玻璃基板的間隙保持 均勻的方法。如在襯墊凝集於玻璃基板上的狀態下進行散 布，則2片玻璃基板的間隙變得不均勻，所以需要除去所 散布的襯墊，而重新進行散布。因此，作爲除去在玻璃基 板上所散布的襯墊的裝置，提出有一種除塵裝置（例如， 參照日本登錄實用新案第3009694號、日本專利早期公開 ^特開平7—60211號公報），其包括具有超音波發生器的 第1、第2噴出喷嘴和在它們之間所配置的丨個吸引噴嘴， 並從第1、第2喷出噴嘴向_基_表面噴出超音波氣 體(air)，且利用中央的吸引噴嘴來吸引襯墊。 在适種除塵裝置中，無法利用吸引噴嘴高效率地吸引 從第卜f 2喷出噴嘴所嘴出的超音波氣體，結果，有時 不此完全去除賴基板著的概塾。 【發明内容】 本發明的目的是提供—接 辦从主 + 、種把夠良好地除去被吐出物 體的表面上所附著的附著物 互奶之乾洗器中所使用的喷嘴、具 6 200836849 Z/ZJ /pn 有該喷嘴的乾洗及具有該乾洗器 該附著物可爲例如襯墊或小粒徑的垃圾類洗糸4 ”中， 本發明的噴嘴爲—種與被吐& 而配置著，並用於 ^^規疋的mw Γ： 吐出魔縮空氣之嘴嘴體大致直交的方向 塵縮空氣的貯留部，並^有盘_ =内部具有貯留前述 出口，且作爲與前述吐出、口的;;大的吐 狀方向直交的斷面形狀，具有規^：=，出而口且延 ==被設置在前述凸形狀的與前述被吐出物體最接 吐出月的?嘴，則作爲與吐出口形成位置上的 狀，所以夢由使的斷面形狀，具有規定曲率的凸形 直交的方^吐出對被吐出物體大致 的附著物再次附著在能夠防止暫時剝離了 間隔:酉t置ί發:種與被吐出物體保持規定的 方向吐出壓:空;=者;;述被吐出物體大致直交的 前述麼縮空氣的貯留ί 在於’在内部具有貯留 的吐出口，且與前述留ί連通的狹縫狀 =交的斷面形狀，爲平:面二 具有規定曲率的凸形狀，而且，前述吐出、= 7 200836849A method of uniformly spreading a spherical powder (spacer) between two glass substrates used for a panel for a device to maintain a uniform gap between the two glass substrates. When the spacer is spread in a state of being aggregated on the glass substrate, the gap between the two glass substrates becomes uneven, so that it is necessary to remove the spread spacer and re-disperse. Therefore, as a device for removing a spacer which is spread on a glass substrate, there is proposed a dust removing device (for example, refer to Japanese Laid-Open Utility Model No. 3009694, Japanese Patent Laid-Open No. Hei 7-60211), which includes The first and second discharge nozzles of the ultrasonic generator and the suction nozzles disposed between the first and second discharge nozzles, and the ultrasonic gas is ejected from the first and second discharge nozzles to the surface of the _ base. The central suction nozzle attracts the liner. In the suitable dust removing device, the ultrasonic gas which is discharged from the nozzle of the first nozzle cannot be efficiently sucked by the suction nozzle, and as a result, the outline of the substrate may not be completely removed. SUMMARY OF THE INVENTION It is an object of the present invention to provide a nozzle for use in a dry cleaning machine that removes adhering substances attached to a surface of a discharged object from the main body, and has a function of 6 200836849 Z/ ZJ / pn has the dry cleaning of the nozzle and the waste washing machine having the deposit of, for example, a liner or a small particle size, the nozzle of the present invention is arranged in a type of spit and squirting, And the mw 用于 used for the ^^ regulation: the discharge portion of the dust-shrinking air in the direction of the mouth of the mouth of the deflated air, and the disk _ = the inside of the outlet is stored, and as the discharge and the mouth; The shape of the cross section which is orthogonal to the direction of the spit, has the rule: =, and the mouth and the delay == the nozzle which is disposed in the convex shape and which is the most discharged from the spouted object, is used as the spout Since the shape of the position is formed, the shape of the cross section of the dream is made, and the convexity of the convex shape having the predetermined curvature is discharged, and the attached matter of the discharged object is attached again to prevent the temporary separation from being separated. Kind of direction with the object being spit out The pressure is: empty; =;; the storage of the above-mentioned air that is substantially orthogonal to the object to be ejected is in the shape of a slit having a discharge port that is stored in the inside and a slit shape that communicates with the above, Flat: face 2 has a convex shape with a defined curvature, and, the aforementioned spit, = 7 200836849
厶 / 厶 J /piJL 平面形狀的大致中央部。 吐出口』口:嘴’則作爲與吐出口形成位置上的 連續形成曲父的斷面形狀’具有平面形狀和與其 出口π著對祐的凸形狀，所以藉由使壓缩空氣從吐 Γ ο 氣沿著平面形狀及利_效==== 的二的除去被吐咖上 被吐出物體保持規定的間隔而配匕前述 壓縮空氣的貯留部，且且有 f亚在内4具有貯留 ^ ’而且’作爲與前述吐出:二=狹，狀的吐 ==交的斷面形狀，具有規定==出： 則述吐出口被設置在前 狀而 最接近的位置上·J々一岫述被吐出物體 開口部，用S從部收納前述噴嘴，並具有 出物體大致直交白f著對前述被吐 被吐出物體表面的前述壓縮 ϋ 口掃過前述 的具有規定曲率的凸形狀之;i二二沿j前述噴嘴 以及排氣部，其用於排出前麵縮^^^的通路’· 考河述具有規定曲率的凸形狀而行〜麵空氣是沿 如利用本發物邮，概她㈣口對被吐 8 200836849 Z / ZJ /pn 出物體沿著大致直交的方向吹噴壓縮空氣，所以能夠確實 地剝離被吐出物體上所附著的附著物。而且，作爲與噴嘴 的吐出口形成位置上的吐出口延伸之方向直交的斷面形 狀，具有規定曲率的凸形狀，所以壓縮空氣是利用附壁效 •，而，，具有規定曲率的凸形狀在罩殼内行進，其中，壓 ‘ 縮空氣是從吐出口而沿著對被吐出物體大致直交的方向吐 出，亚掃過被吐出物體表面，且含有從被吐出物體所剝離 〇 ，附著物。因此，能夠防止剝離了的附著物向罩殼外的飛 政並可防止暫枯剝離了的附著物再次附著在被吐出物體 上。 =且，本發明的乾洗器爲一種用於除去被吐出物體上 ‘ 的附著物的乾洗器，其特徵在於，包括：喷嘴，其與前、成 ，吐出物體保持規定的間隔而配置著，並在内部具有貯= 壓縮空氣的貯留部，且具有與該貯留部連通的狹縫狀 出口，而且，作爲與前述吐出口形成位置上的前述吐出口口 I 延狀方向直交__狀，具有平面雜和與其連續形 成的規定曲率的凸形狀，而且，前述吐出口被設置在 平面形狀的大財央部；罩殼，其在内部收納前述嘴嘴3^ • 並具有開口部，用於使從前述噴嘴的前述吐出口沿著; 、 述j吐出物體大致直交的方向吐出的前述壓縮空氣，和浐 過f述被吐出物體表面的前述壓縮空氣通過，罩殼形I 著前述噴嘴的具有規定曲率的凸形狀之前述壓縮空氣t 進的通路；以及排氣部，其用於排出前述壓縮空氣，該= 細空氣是沿著前述具有規定曲率的凸形狀行進。 "土 9 200836849 么/ U /如/1丄厶 / 厶 J / piJL The approximate center of the plane shape. The mouth of the spouting port: the mouth's shape as a cross-sectional shape of the continuous curved shape formed at the position of the discharge port has a planar shape and a convex shape that is opposite to the outlet π, so that the compressed air is spit. In addition, the storage of the compressed air is disposed at a predetermined interval along the plane shape and the effect of the positive effect ====, and the storage portion of the compressed air is provided. 'As the cross-sectional shape of the above-mentioned spit: two = narrow, spit == intersect, there is a rule == out: The spout is placed in the front and the closest position. In the object opening portion, the nozzle is housed in the S portion, and the object is substantially straightforward, and the compression port having the predetermined curvature is swept across the surface of the spouted object; j The nozzle and the exhaust portion are used to discharge the passage of the front side of the shrinkage. · The river has a convex shape with a predetermined curvature, and the air is used as the mail, such as the use of the hair mail, Being spit 8 200836849 Z / ZJ / pn out the object along the roughly straight The direction of blown air, it is possible to surely peel the deposit on the object to be discharged is attached. Further, since the cross-sectional shape orthogonal to the direction in which the discharge port extends at the discharge port forming position of the nozzle has a convex shape having a predetermined curvature, the compressed air is a convex shape having a predetermined curvature. The inside of the casing travels, and the compressed air is discharged from the discharge port in a direction substantially orthogonal to the object to be discharged, and is swept over the surface of the discharged object, and contains the detachment from the object to be discharged. Therefore, it is possible to prevent the deposited object from being detached from the outside of the casing and to prevent the deposit which has been temporarily peeled off from adhering to the object to be discharged again. Further, the dry cleaning device of the present invention is a dry cleaning device for removing deposits on the discharged object, and includes a nozzle which is disposed at a predetermined interval from the front, the front, and the discharged object, and a storage portion for storing compressed air, and having a slit-shaped outlet that communicates with the storage portion, and having a flat shape as a direction of the direction of the discharge port I in the discharge port forming position. And a convex shape having a predetermined curvature continuously formed thereon, and the discharge port is provided in a large-sized central portion of the planar shape; and the casing houses the mouthpiece 3^ therein and has an opening for making The discharge port of the nozzle is along the compressed air that is discharged in a direction in which the j discharge object is substantially orthogonal, and the compressed air that has passed through the surface of the discharge object is passed through, and the cover has a predetermined curvature of the nozzle. a convex shape of the aforementioned passage of the compressed air t; and an exhaust portion for discharging the compressed air, the fine air being along the aforementioned convex shape having a predetermined curvature Into. "土 9 200836849 What / U / 如/1丄
〇 如利用本發明的乾洗器，則是從喷嘴的吐出口對被吐 出物體沿著大致直交的方向吹喷壓縮空氣，所以能夠確實 地剝離被吐出物體上所附著的附著物。而且，作爲與噴嘴 的吐出口形成位置上的吐出口延伸之方向直交的斷面形 狀，具有規定曲率的凸形狀，所以壓縮空氣是沿著平面形 狀，並利用附壁效應而沿著具有規定曲率的凸形狀在罩殼 内行進’其中’壓縮空氣是從吐出口而沿著對被吐出物體 大致直交的方向吐出，並掃過被吐出物體表面，且含有從 被吐出物體所剝離的附著物。因此，能夠防止剝離了的附 著物向罩殼外的飛散，並可防止暫時剝離了的附著物再次 附著在被吐出物體上。 而且，本發明的乾洗器的特徵在於，前述排氣部在前 述喷f的士方沿著前述噴嘴的前述吐出口所延伸的方向而 配置著，並具有在上部形成狹缝狀開口的 前述壓縮空氣所行進的前述通路，是以大致 路而將前述罩殼的開口部和前述圓管狀構件的開 如_本發_乾洗器，職罩殼的開 含有從被吐出物體__著 ^入的 流速在通路内行進，並從圓管^ 3大致-定的 引。丄因二=:寬度方向可進行均勻二 是以大致-定剝:的附著物之空氣 剝離的附著物再次附著在通路=上所：狗防止暫時 10 Γ o 200836849 Z /Z.O /pn 著物再次附著在通路的内壁上， 而且，本發明的乾洗系絲二f能夠不輕易地落下。 被吐出物體的载置部，其特徵=、本f明的乾洗器和載置 前述被吐出物體相互保持一定於，别述乾洗器的喷嘴和 的前述吐出口的長邊方向直=之間隔，並沿著與前述噴嘴 而且，本發明的y、、杏会 方向而相對地移動。 洗器沿著與前述喷嘴^前述，包括將前述乾 進行搬運的搬運裝置，或者 +方向直交之方向 噴嘴的前述吐出口的長邊方向直==體，著與前述 裝置。 乂之方向進行搬運的搬運 與噴嘴的^ 噂嘴是在 動，所以即使是大型的㈣^ 進行移 物的除去。 也j迅連地進行附著 如利用本發明的嘴嘴，則作爲與吐出 吐出口延伸之方向直交的斷面形狀，具有形成 凸形狀’所以空氣附壁效應m具 率的凸形狀行進，其中，壓縮空氣是從吐出口而 吐出物體大致直交的方向被吐出，並掃過被吐出物體L 面，且含有從被吐出物體所剝離的附著物。因此，能夠^ 止剝離了的附著物向罩殼外的飛散，並可防止臨時剝離的 附著物再次附著在被吐出物體上。 、 而且，如利用本發明的乾洗器，則從噴嘴的吐出口對 被吐出物體沿著大致直交的方向吹噴該壓縮空氣，所以能 11 200836849 夠確實地剝離被吐出物體上所附著的附著物。而且，作爲 與噴嘴的吐出口形成位置上的吐出口延伸之方向直交的斷 面形狀，具有規定曲率的凸形狀，所以壓縮空氣是利用附 壁效應，而沿著具有規定曲率的凸形狀在罩殼内行進，其 中，麼縮空氣是從吐出口而沿著對被吐出物體大致直交的 方向吐出，並掃過被吐出物體表面，且含有從被吐出According to the dry cleaning device of the present invention, the compressed air is blown from the discharge port of the nozzle to the discharged object in a substantially orthogonal direction, so that the adhering matter adhering to the discharged object can be surely peeled off. Further, since the cross-sectional shape orthogonal to the direction in which the discharge port extends at the discharge port forming position of the nozzle has a convex shape having a predetermined curvature, the compressed air has a planar shape and has a predetermined curvature along the wall effect. The convex shape travels inside the casing. The "compressed air" is discharged from the discharge port in a direction substantially perpendicular to the object to be discharged, and sweeps over the surface of the object to be discharged, and contains the deposit separated from the object to be discharged. Therefore, it is possible to prevent the peeled adhering material from scattering to the outside of the casing, and it is possible to prevent the temporarily peeled deposit from adhering again to the discharged object. Further, in the dry cleaning device according to the present invention, the exhaust portion is disposed in a direction in which the nozzle of the spray f extends along the discharge port of the nozzle, and has the compression in which a slit-shaped opening is formed in an upper portion. The passage through which the air travels is an opening of the cover and the opening of the circular tubular member, and the opening of the cover is carried out from the object to be discharged. The flow rate travels within the passage and is generally oriented from the tube ^3.丄因二=: The width direction can be uniform. The second is the stripping of the air. The attachment of the air is attached to the passage again. The dog is prevented from temporarily temporarily Γ o 200836849 Z /ZO /pn It adheres to the inner wall of the passage, and the dry cleaning yarn 2 of the present invention can be easily dropped. In the mounting portion of the object to be discharged, the dry cleaning device of the present invention and the object to be discharged are kept constant, and the longitudinal direction of the nozzle of the dry cleaning device and the discharge port are straight. Further, along with the nozzles described above, the y and apricots of the present invention move relative to each other. The rinsing device and the above-described nozzles include the transporting device for transporting the dry matter, or the longitudinal direction of the discharge port of the nozzle in the direction orthogonal to the direction of the nozzle. The handling of the conveyance in the direction of the 与 is moving, and the nozzle of the nozzle is moving, so even the large (four) ^ removes the object. In addition, when the nozzle of the present invention is attached, the cross-sectional shape orthogonal to the direction in which the discharge port is extended has a convex shape, so that the air-attached effect m has a convex shape. The compressed air is discharged in a direction in which the discharged object is substantially orthogonal from the discharge port, and sweeps over the surface of the discharged object L, and contains an adhering substance peeled off from the discharged object. Therefore, it is possible to prevent the peeled deposit from scattering to the outside of the casing, and it is possible to prevent the deposit which is temporarily peeled off from adhering to the object to be discharged again. Further, according to the dry cleaning device of the present invention, the compressed air is blown from the discharge port of the nozzle to the discharged object in a substantially orthogonal direction, so that the adhering matter attached to the discharged object can be reliably peeled off at 11200836849. . Further, since the cross-sectional shape orthogonal to the direction in which the discharge port extends at the discharge port forming position of the nozzle has a convex shape with a predetermined curvature, the compressed air is a convex shape along the convex shape having a predetermined curvature. Traveling inside the casing, wherein the air is discharged from the discharge port in a direction substantially orthogonal to the object to be discharged, and sweeps over the surface of the discharged object, and contains the spit out
C υ \附著在被吐出物體上。 嘴用本發明的乾洗系統’則被吐出物體和噴 备疋在與贺嘴的吐出口的長邊方向直交之 ;^ 行移動’所以即歧大型的被 =進 附著物的除去。 版也了迅速地進行 【實施方式】 乂下茶和、圖示’對關於本發明的第】垂 t 洗器進行說明。圖！所干。H士曰的弟1貝_悲之乾 器之乾洗系統的構成。另第1實施形態的乾洗 中所示的直交座標#，、…卜’在以下的說明中，設定圖1 構件的位置關係i行說取直交座標系而對各 軸對基板载置部的表 =座m使X軸及γ 載置部的表面成直交的方^而f定’使2軸沿著對基板 標糸貫際上是將父 ^的XYZ直父座 軸設定爲垂直方向。ϋ又疋爲/、水平面平行的面，使z 乾洗器言^置^中統2包括：乾洗器4,其設置在 ’土板載置部8，翻於魅作爲被吐 12 200836849 出物體的液晶顯示裝置用面板的基板10。在 1 具有大麵獅㈣劇純，且絲餘部 矩形形狀的基板載置面，續可麵大型的基 從遷縮機5而通過供給管6以供給愿縮空氣至 4。所供給的壓縮空氣是從嗔嘴16彳炎 i ' Ο Ο 吐出口 16吐出，並吹嗔在^圖2)的狹縫狀的 干罗署t f 載置部8上所载置之液晶顯 二0的表面上，而將基板10上所散布 =亦即襯墊（及小粒徑的垃圾類，以 ，，至基板丨。丄'=2 塾板10剥離’且使含有剝離了的ί 土'艰工乳，通過排氣管12而由星 ^ 14排出，從而除去基板1G上的襯塾。有此^^氣震置 沿著圖i柯㈣稱財向（/柄，’基_置部8 吐出d 16b的長邊方向直交的方:’亦P，沿著與 運，使吐出、向而利用傳送機等來搬 進行移動，1在=反1G相互簡—定的間隔而相對地 圖!:=基板10的全面範圍内除去襯墊。 方向的中央部之狹縫狀的洗器 心都具有同樣的形狀。而且，= 向的 基板的移動方向。 圖中的前頭符號表示 乾洗器4如圖2所示，具有嘴嘴16和罩殼”，其中， 13 200836849 喷嘴16用於對基板10的表面10a吐出該壓縮空氣，罩殼 18用於收納喷嘴16。喷嘴16具有沿著基板10的寬度方向 (X方向）而延伸的形狀並具有較基板10的寬度方向猶大 的寬度。喷嘴16在其内部具有貯留部16a，用於貯留從壓 縮機5通過供給管6而供給的壓縮空氣。在這裏，貯留部 16a是在喷嘴16内的大致全寬度内形成。而且，噴嘴16 ΟC υ \ is attached to the object being spit. In the mouth of the dry cleaning system of the present invention, the discharged object and the jet are directly crossed in the longitudinal direction of the discharge port of the mouthpiece, so that the large-sized adhering object is removed. The version has also been rapidly carried out. [Embodiment] An underarm tea and a diagram of the present invention will be described. Figure! Do it. The composition of the dry cleaning system of the sorcerer's brother. In the following description, the orthogonal coordinates #, , ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, = Block m makes the X-axis and the surface of the γ-mounting portion orthogonal to each other and sets the two-axis along the counter substrate. The XYZ straight parent axis of the parent is set to the vertical direction. ϋ 疋 / , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The substrate 10 of the panel for a liquid crystal display device. In the case of a substrate having a large-faced lion (4) which is pure in appearance and has a rectangular shape in the outer portion of the wire, the large-sized base is continuously fed from the retractor 5 through the supply pipe 6 to supply the contracted air to 4. The supplied compressed air is discharged from the spout 16 彳 i ' Ο 吐 吐 吐 , , , , , , , , , , , , ^ 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝On the surface of 0, the substrate 10 is dispersed = that is, the liner (and the small-sized waste material, to, to the substrate 丨. 丄 ' = 2 塾 10 peeled off) and the peeled ί soil 'The hard work milk is discharged from the star 14 through the exhaust pipe 12, thereby removing the lining on the substrate 1G. There is a ^^ gas shock along the figure i (four) called the fiscal direction (/handle, 'base_set Part 8: The side where the long side of d 16b is orthogonally crossed: 'I also P, and it is moved along with the transport, so that it can be moved by the conveyor or the like, and 1 is at the interval of the reverse 1G and the relative map. !:=The liner is removed in the entire range of the substrate 10. The slit-shaped washer core in the central portion of the direction has the same shape. Moreover, the direction of movement of the substrate is changed. The front symbol in the figure indicates the dry cleaning device 4 As shown in FIG. 2, there is a nozzle 16 and a cover", wherein 13 200836849 nozzle 16 is used to discharge the compressed air to the surface 10a of the substrate 10, and the cover 18 is used for receiving Nozzle 16. The nozzle 16 has a shape extending in the width direction (X direction) of the substrate 10 and has a width which is larger than the width direction of the substrate 10. The nozzle 16 has a storage portion 16a therein for storing from the compressor 5. The compressed air supplied through the supply pipe 6. Here, the storage portion 16a is formed in substantially the entire width of the nozzle 16. Further, the nozzle 16
具有與貯留部16a連通之狹縫狀的吐出口 16b。而且，喷 嘴16如圖2所示，作爲與吐出口 16b形成位置上的吐出口 16b所延伸之方向直交的斷面形狀，具有規定曲率的凸形 狀16c，在將凸形狀16c的大致中央部，亦即，將喷嘴16 與基板10的表面10a保持規定間隔配置的情况下，在與基 板10的表面10a最接近的位置，設置吐出口丨仙。另外， 噴嘴16所具有的規定曲率的凸形狀16c，在使吐出口 16b 的一Y侧的曲率半徑爲R1，吐出口 16b的γ侧的曲率半 從爲R2的情况下’既可爲ri = R2，也可爲ri # R2，且A slit-shaped discharge port 16b that communicates with the reservoir portion 16a. Further, as shown in FIG. 2, the nozzle 16 has a convex shape 16c having a predetermined curvature as a cross-sectional shape orthogonal to a direction in which the discharge port 16b at the position where the discharge port 16b is formed, and a substantially central portion of the convex shape 16c. In other words, when the nozzles 16 are placed at a predetermined interval from the surface 10a of the substrate 10, the discharge port is provided at a position closest to the surface 10a of the substrate 10. Further, the convex shape 16c having a predetermined curvature of the nozzle 16 has a radius of curvature of one side of the discharge port 16b as R1, and a half of the radius of the γ side of the discharge port 16b is R2, which may be ri = R2, also ri # R2, and
Rl、R2的大小可分別酌情選擇最適當的大小。 罩殼18在其内部收納著喷嘴16，並在盥吐出口 16b 對向的位置上設置沿著乂方向延伸的開口部收，以使從 只為16的吐出口 16b朝著基板1〇的表面1〇a所吐出的壓 縮空氣，和掃過基板10的表面10a的壓縮空氣通過。罩殼 18形成通路18b並具有排氣部18e，其中，通路i8b掃過 ς板10的表面10a且是通過開口部此之壓縮空氣沿著喷 =的具有歧曲率的凸形狀l6e所行進的通路，排氣部The size of Rl and R2 can be selected as appropriate for the most appropriate size. The casing 18 accommodates the nozzle 16 therein, and is provided with an opening portion extending in the x-direction at a position opposite to the discharge port 16b so as to face the discharge port 16b of only 16 toward the surface of the substrate 1 The compressed air discharged by 1〇a passes through the compressed air swept across the surface 10a of the substrate 10. The casing 18 forms a passage 18b and has an exhaust portion 18e, wherein the passage i8b sweeps over the surface 10a of the seesaw 10 and is a passage through which the compressed air passes through the convex shape l6e having a discriminating curvature Exhaust department
Me疋將該壓縮空氣排出到排氣管12中。 14 200836849Me疋 discharges the compressed air into the exhaust pipe 12. 14 200836849
Z/ZJ /pLL 從堡縮機5所供給的壓縮空氣通過貯留部遍，而由 土出口 l6b朝著基板1〇吐出，並到達基板1〇的 ο : 〇這裏，吐出口 _和基板表錢的距離爲 .:’車父佳爲0.5〜5mm，且作爲從狹缝狀的吐出 。：上:的壓縮空氣，使例如吹噴壓力爲〇.〇1〜 土出口 Μ〜〇'5略。如圖3所示，從狹縫狀的Z/ZJ /pLL The compressed air supplied from the fortification machine 5 passes through the storage portion, and is discharged from the soil outlet 16b toward the substrate 1 and reaches the substrate 1 ο : 〇 Here, the discharge port _ and the substrate table money The distance is:: 'The car is preferably 0.5 to 5 mm, and is discharged from the slit shape. : On: Compressed air, for example, the pressure of the blown spray is 〇.〇1~ soil outlet Μ~〇'5 slightly. As shown in Figure 3, from slit-like
m/斤吐出的壓㈣氣是在通過罩殼18的開口部 a 達基板10白勺表面⑽之後，將基板的表面他 士：附者的襯墊進行剝離。然後，含有剝離了的襯墊的壓 ^工乳通過開π部18a’如圖中的箭頭符號所示，沿著喷 噶16的具有規定曲率的凸形狀⑹而在通路⑽内行進， 並通過排氣部18e及排氣f 12 *由排氣U 14所吸引， 如卫薇的外部。此時’藉由使載置有基板的基 沿著Υ方向而移動’可在基板1〇的表面池 的全體乾圍内除去襯墊。 關於該第1實施形態的乾洗器，則使壓縮空氣 攸贺嗝的吐出口對基板沿著大致直交的方向進行吹喷，所 以I使基板上所附著的附著物確實地剝離。而且，作爲與 噴嘴的吐出Π形雜置上的吐出口所延伸之方向直交的斷 2狀’具有規定曲率的凸形狀，所以使壓齡氣利用附 土效應，而沿著具有規定曲率的凸形狀在罩殼内行進，其 中，該，縮空氣是從吐出口沿著對基板大致直交的方向吐 出並掃過基板表面且含有從基板所剝離的附著物。因此， 能夠防止剝離了的附著物飛散到罩殼以外，並能夠防止暫 15 200836849 時剝離了的附著物再次 剝離了的附著物之壓縮*^ 7吐出物體上。而且，含有 凸=進:所，^氣的 下面，欠昭同一 署及^丨動力減低。 洗器進行說明 Ο 於乾洗系統。圖4所示爲用疋於;弟1只施形態同樣地被應用 圖（與乾洗器的寬戶方θ的;°兄明乾洗器30的構成的剖面 直交的方向上的=々大致中央部之狹縫狀的吐出口 洗器的寬产方_杯圖）。另外’乾洗器的斷面形狀在乾 圖中的立置上都具有同樣的… α7則f付唬方向表示基板的移動方向。 32 30如圖4所示，具有喷嘴32和用於收納喷嘴 吐出:其中/該嘴嘴32用於對基板10的表面伽 ^ i空乳。喷嘴3 2具有沿著基板丨〇的寬度方向（X =向)+延匕伸的形狀，並具有較基板1〇的寬度方向猶大的寬 -喷鳴32在内部具有貯留部32a，其用於貯留從壓縮機 曰、、二由i、給管6所供給的壓縮空氣。在這裏，貯留部32a ^在噴嘴32内的大致全寬度内形成。而且，喷嘴32具有 /、貝τ邊4 32a連通之狹縫狀的吐出口 32b。而且，喷嘴32 如圖4所示，作爲與吐出口 32b形成位置上的吐出口 3办 所延伸之方向直交的斷面形狀，噴嘴32具有平面形狀32^ 和與其連續形成的具有規定曲率的凸形狀32d，且在平面 形狀32c的大致中央部設置有吐出口 32b。另外，喷嘴32 所具有的規定的曲率的凸形狀32d，在吐出口 32b的一γ 侧的曲率半徑爲尺}，吐出口 3213的γ側的曲率半徑爲尺2 16 200836849 的情况下，既可爲R = R2，也可爲R1关R2，且R1、R2 的大小可分別酌情選擇最適當的尺寸。 罩殼34在其内部收納著喷嘴32，並在與吐出口 32b 對向的位置上設置沿著X方向延伸的開口部34a，以使從 噴嘴32的吐出口 32b朝著基板丨〇的表面i〇a所吐出的壓 縮空氣，和掃過基板10的表面l〇a的壓縮空氣都可通過。 • 罩殼34形成通路34b並具有排氣部34c，其中，通路34b ◎ 掃過基板1〇的表面l〇a且是通過開口部34a之壓縮空氣沿 著喷嘴32的具有規定的曲率的凸形狀3以所行進的通路， 排氣部34c是將該壓縮空氣排出到排氣管12中。 從壓縮機5所供給的壓縮空氣是通過貯留部32a，而 由狹縫狀的吐出口 32b朝著基板10吐出，並到達基板1〇 . 的表面10a。在這裏，吐出口 32b和基板1〇表面10a的距 - 離及從吐出口 32b所吐出的壓縮空氣的壓力、吹喷的速 度，與第1實施形態相同較佳。如圖5所示，從狹縫狀的 吐出口 32b所吐出的壓縮空氣是在通過罩殼34的開口部 34a到達基板10的表面10a之後，將基板1〇的表面1〇& 上所附著的襯墊進行剝離。然後，含有剝離了的觀塾的慶 縮空氣通過開口部3如，沿著噴嘴32的平面形狀32c及具 有規定曲率的凸形狀32d而在通路34b内行進，並通過排 '氣部地及排氣管12而由排氣裝置14吸引，且排出到外 部。此時，藉由使載置有基㈣基板魅部S沿著 亦即沿著與吐出口 32b的長邊方向直交的方向移動， 基板10的表面10a的全體範圍内除去襯墊。 17 200836849 如利用關於該第2實施形態的乾洗器，則使 ^ 從贺嘴的吐出口對基板沿著大致直交的方向進行=喷= 以可使基板上所附著的附著物確實地剝離。而且，作 喷嘴的吐出口形成位置上的吐出口所延伸之方向直交的斷 =雇具有規定的曲率的凸形狀，所以使她 Ο 古^/、中，該雜空氣是從吐出口沿著對基板大致直交的 =向吐出，並掃過基板表面，且含有從基板所剝離的附著 =因此’能夠防止剝離了的附著物飛散到罩殼以外，並 1匕夠防止暫時剝離了的附著物再次附著在被吐出物體上。 、、,=1有剝離了的附著物眺縮空氣，利用附壁效應而 力=样的凸形狀灯進，所以，即使在排氣裝置的吸引動 θ妒处二况下，也能夠確實地進行含有剝離了的附著物之 壓鈿空氣的排氣。 下面’茶照圖示，對關於本發明的第3實施形態的乾 兄明。該乾洗器是與第1實施形態同樣地被應用 糸統。乾洗為5〇如圖6所示，具有喷嘴56和用於 貝嘴56的罩殼％，其中，該喷嘴％用於對基板1〇 户^面10a吐出壓縮空氣。噴嘴％具有沿著基板1〇的寬 L向方向）延伸的形狀，並具有較基板10的寬度方 二…^的見度。噴嘴56在内部具有貯留部56a，其用於貯 = 機5通過供給;I； 6所供給的壓縮空氣。在這裏， =部56a是在噴嘴56内的大致全寬度内形成 。而且，噴 具有與貯留部56a連通之狹缝狀的吐出π 56b。而 18 200836849 且，喷嘴56如圖6所示，作爲與吐出口 56b所形成的位置 上的吐出口 56b所延伸之方向直父的斷面形狀，具有規定 的曲率的凸形狀56c，且在與基板1〇的表面1〇a保持規定 的間隔而配置該噴嘴56的情况下，在與基板1〇的表面1〇a 隶接近的位置設置著吐出口 56b。另外，喷嘴56所具有的 規疋的曲率的凸形狀56c，在吐出口 56b的一 γ側的曲率 • 半徑爲R1，吐出口 56b的Y侧的曲率半徑爲尺2的情况下， 既可爲R = ，也可爲R1 ^R2，且R1、R2的大 f 酌情選擇最適當的尺寸。 罩殼35在其内部收納喷嘴56，並在與吐出口 5邰對 向的位置上設置沿著X方向延伸的開口部58a，以使從喷 嘴56的吐出口 56b朝著基板10的表面1〇a所吐出的壓縮 二氣，和知過基板10的表面l〇a的遷縮空氣通過。罩殼 • 58形成具有一定高度的通路58b並具有圓管狀構件6〇，其 中，通路58b掃過基板10的表面l〇a且是通過開口部58a 之壓知空氣沿者嘴嘴56的具有規定曲率的凸形狀所行 (; 進的通路，圓管狀構件60用於將該壓縮空氣排出到排氣管 12中。圓官狀構件60是在罩殼58内的噴嘴56的上^， 者贺鳴56的吐出口 56b所延伸的方向而配置著，且在上 • 部具有狹缝狀的開口 60a。 . 從壓縮機5所供給的壓縮空氣是通過貯留部5如，而 由狹缝狀的吐出口 56b朝著基板1〇吐出，並到達基板 的表面10a。在這裏，吐出口 56b和基板表面1〇a^距離 爲0.01〜30mm，較佳爲〇.5〜5麵，且作爲從狹缝狀的吐 19 200836849 出口 56b所吐出的壓縮空氣，例如吹喷壓力爲〜 馬ϋ·1〜〇.5MPa。如圖7所示，從狹縫狀的 吐出口 56b所吐出的壓縮空氣是在通過罩殼％的開口部 到達+基板10的表面l〇a之後，將基板10的表面10a 上所附著的襯墊進行剝離。然後，含有剝離了的襯墊的壓 • f工氣通過開口部58a，如圖7中的箭頭符號所示，沿著 喷嘴56的具有規定曲率的凸形狀56c而在通路58b内行 〇 進’並ϋ開口部58a和圓管狀構件60的開口 60a連通之 大致一定高度的通路行進，而從開口 6〇a 構㈣内，且通過排氣管12而由排氣裝置14所== 排出到例如工廠的外部。此時，藉由使载置有基板的基板 載置部8沿著Y方向而移動，可在基板10的表面10a的 全體乾圍内除去概墊。 • 一如利用關於該第3實施形態的乾洗器、，則使壓縮空氣 從ί g的吐出口對基板沿著大致直交的方向進行吹噴，所 ( 以可使基板上所附著的附著物確實地剝離。而且，作爲盥 嘴嘴的吐出口所形成的位置上的吐出口所延伸之方向歧 的斷面形狀，具有規定的曲率的凸形狀，所以使壓縮空氣 f用附壁效應’而沿著具有規定的曲率的凸形狀在罩殼内 行進，其中，該壓縮空氣是從吐出口沿著對基板大致直交 j方向吐ϋ ’並掃過基板表面，且含有從基板所剝離的附 著物。因it匕，此夠防止剝離了的附著物飛散到罩殼以外， 並能夠防止暫時剝離了的附著物再次附著在被吐出物體 上。而且，含有剝離了的附著物的壓縮空氣，利用附壁效 20 Ο Ο 200836849 應而沿著喷嘴的凸形狀行進， 吸引動力減低。 斤^，可使排氣裝置的必要 而且，由罩殼的開口部 一 離的附著物的空氣，因爲通路1人有，被吐出物體剝 -定的流速在通路内行進 度’所以可以 的開口而被吸入到圓管狀g B 件上部的狹缝狀 行均勾的吸引。而内/所以能夠對寬度方向進 空氣是以-定的流速在通體剝離的附著物之 著物再次附著在通：下另一 (胸)對基板載置；8:、!f動，但也可使乾洗器4 j土极戰8而沿著γ方向 器二(Γ5。)利_機等峨置而沿 者Υ方向搬運，而使乾洗界4斜其。 向移動。 无。。4對基板载置部8而沿著丫方 而且，上述實施形態的被吐出物體10爲液晶顯示裝置 面板的基板，附著物爲散布在被吐出物體10上的概塾， ，被吐出物體10也可爲例如安裝著電子構件的安裝基 β反υ、場致發射（fleld emission)顯示面板、電聚 顯示面板等基板，付著物也可爲例如數n’m 〜數/zm的基板切割屑、綫頭等這樣的塵埃等。 而且，在上述的實施形態中，是利用工廠設施的壓縮 機而對乾洗機供給墨縮空氣，但也可在乾洗系統中設置壓 21 200836849 縮機，並對乾洗機供給壓縮空氣。The pressure (4) gas discharged by m/kg is peeled off after the surface of the substrate 10 (10) is passed through the opening portion a of the casing 18 to the surface (10) of the substrate. Then, the press milk containing the peeled liner travels through the passage (10) along the convex shape (6) having the predetermined curvature of the squeegee 16 as indicated by the arrow symbol in the figure, and passes through The exhaust portion 18e and the exhaust gas f 12 * are attracted by the exhaust gas U 14 , such as the outside of the Wei Wei. At this time, the spacer can be removed in the entire dry circumference of the surface pool of the substrate 1 by moving the substrate on which the substrate is placed in the x direction. In the dry cleaning device according to the first embodiment, the discharge port of the compressed air 攸 嗝 is blown to the substrate in a substantially orthogonal direction, so that the adhering matter adhering to the substrate is reliably peeled off. In addition, since the cut-off shape that has a predetermined curvature orthogonal to the direction in which the discharge port of the nozzle is mixed with the discharge port is formed, the pressurization gas is applied along the convex curvature having a predetermined curvature. The shape travels inside the casing, wherein the contracted air is discharged from the discharge port in a direction substantially orthogonal to the substrate and swept across the surface of the substrate and contains deposits peeled off from the substrate. Therefore, it is possible to prevent the peeled deposit from scattering to the outside of the casing, and it is possible to prevent the compression of the deposit which has been peeled off again at the time of the fall of 200836849. Moreover, the following is included in the convexity, the following, and the lowering of the power. The scrubber is described Ο in the dry cleaning system. Fig. 4 is a view showing the same application of the image in the same manner as in the case of the younger brother 1 (the width of the wide section of the dry cleaning device θ; The wide-spreading _ cup diagram of the slit-shaped spouting washer. Further, the cross-sectional shape of the dry cleaning device has the same in the vertical position in the dry image. The α7 is the direction in which the substrate is moved. 32, as shown in Fig. 4, has a nozzle 32 and a discharge nozzle for accommodating the nozzle: wherein the nozzle 32 is used to illuminate the surface of the substrate 10. The nozzle 3 2 has a shape along the width direction (X = direction) + extension of the substrate ,, and has a width which is larger than the width direction of the substrate 1 - - the squirt 32 has a storage portion 32a inside for the inside The compressed air supplied from the compressor 曰, the second, i, and the feed pipe 6 is stored. Here, the reservoir portion 32a is formed within substantially the entire width of the nozzle 32. Further, the nozzle 32 has a slit-shaped discharge port 32b whose /, the τ side 4 32a communicates. Further, as shown in Fig. 4, the nozzle 32 has a cross-sectional shape orthogonal to the direction in which the discharge port 3 at the position where the discharge port 32b is formed, and the nozzle 32 has a planar shape 32 and a convex portion having a predetermined curvature continuously formed therewith. The shape 32d is provided with a discharge port 32b at a substantially central portion of the planar shape 32c. Further, the convex shape 32d having a predetermined curvature of the nozzle 32 has a radius of curvature on the γ side of the discharge port 32b as the ruler}, and the radius of curvature on the γ side of the discharge port 3213 is the ruler 2 16 200836849. For R = R2, R1 can also be set to R2, and the sizes of R1 and R2 can be selected as appropriate for the most appropriate size. The casing 34 has a nozzle 32 housed therein, and an opening 34a extending in the X direction is provided at a position opposed to the discharge port 32b so as to face the surface of the substrate 丨〇 from the discharge port 32b of the nozzle 32. The compressed air discharged from 〇a and the compressed air swept across the surface 10a of the substrate 10 can pass. • The casing 34 forms a passage 34b and has a venting portion 34c, wherein the passage 34b ◎ sweeps over the surface 10a of the substrate 1〇 and is a convex shape having a predetermined curvature along the nozzle 32 by the compressed air passing through the opening 34a 3 The exhaust portion 34c discharges the compressed air into the exhaust pipe 12 in the path that it travels. The compressed air supplied from the compressor 5 passes through the storage portion 32a, and is discharged toward the substrate 10 by the slit-shaped discharge port 32b, and reaches the surface 10a of the substrate 1. Here, the distance between the discharge port 32b and the surface 10a of the substrate 1 and the pressure of the compressed air discharged from the discharge port 32b and the speed of the blowing are preferably the same as those of the first embodiment. As shown in Fig. 5, the compressed air discharged from the slit-shaped discharge port 32b is attached to the surface 10a of the substrate 10 after passing through the opening 34a of the casing 34, and is attached to the surface 1〇& The liner is peeled off. Then, the condensed air containing the peeled spectator passes through the opening 3, for example, along the planar shape 32c of the nozzle 32 and the convex shape 32d having a predetermined curvature, and travels in the passage 34b, and passes through the ventilating portion and the row The gas pipe 12 is sucked by the exhaust device 14 and discharged to the outside. At this time, by moving the base (4) substrate sac portion S in the direction orthogonal to the longitudinal direction of the discharge port 32b, the spacer is removed over the entire surface 10a of the substrate 10. 17 200836849 When the dry cleaning device according to the second embodiment is used, the nozzle is ejected from the discharge port of the nozzle to the substrate in a substantially orthogonal direction. Further, the direction in which the discharge port at the discharge port forming position of the nozzle is extended is orthogonal to the shape of the convex shape having a predetermined curvature. Therefore, the air is separated from the discharge port by the pair of holes. The substrate is discharged in a substantially straight direction, and is swept over the surface of the substrate, and contains adhesion from the substrate. Therefore, it is possible to prevent the peeled off matter from scattering to the outside of the casing, and to prevent the temporarily peeled deposit from being again removed. Attached to the object being spit. , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , An exhaust gas containing compressed air containing the peeled deposits is performed. The following is a description of the third embodiment of the present invention. This dry cleaning machine is applied in the same manner as in the first embodiment. The dry cleaning is 5, as shown in Fig. 6, having a nozzle 56 and a casing % for the bellmouth 56, wherein the nozzle % is used to discharge compressed air to the substrate 1 surface 10a. The nozzle % has a shape extending along the width L direction of the substrate 1A, and has a width closer to the width of the substrate 10. The nozzle 56 has a reservoir 56a therein for supplying the compressed air supplied by the machine 5 through I; Here, the = portion 56a is formed in substantially the entire width of the nozzle 56. Further, the discharge has a slit-like discharge π 56b that communicates with the storage portion 56a. In addition, as shown in FIG. 6, the nozzle 56 has a convex shape 56c having a predetermined curvature as a cross-sectional shape of the straight parent extending in the direction in which the discharge port 56b formed at the position formed by the discharge port 56b, and When the surface 1A of the substrate 1 is placed at a predetermined interval and the nozzle 56 is placed, the discharge port 56b is provided at a position close to the surface 1A of the substrate 1A. Further, in the convex shape 56c of the curvature of the nozzle 56, when the curvature radius of the γ side of the discharge port 56b is R1 and the radius of curvature of the Y side of the discharge port 56b is 2, it may be R = , can also be R1 ^R2, and the large f of R1, R2, as appropriate, select the most appropriate size. The casing 35 accommodates the nozzle 56 therein, and is provided with an opening portion 58a extending in the X direction at a position opposed to the discharge port 5'' so as to face the discharge port 56b of the nozzle 56 toward the surface 1 of the substrate 10. The compressed two gas discharged from a passes through the retracted air of the surface 10a of the substrate 10. The casing 58 forms a passage 58b having a certain height and has a circular tubular member 6〇, wherein the passage 58b sweeps over the surface 10a of the substrate 10 and is defined by the opening 58a to define the air along the nozzle 56. The convex shape of the curvature is performed (the access passage, the circular tubular member 60 is for discharging the compressed air into the exhaust pipe 12. The cylindrical member 60 is on the nozzle 56 in the casing 58, The discharge 56b of the ring 56 is disposed in a direction in which the discharge port 56b extends, and has a slit-shaped opening 60a in the upper portion. The compressed air supplied from the compressor 5 passes through the storage portion 5, for example, in a slit shape. The discharge port 56b is discharged toward the substrate 1 and reaches the surface 10a of the substrate. Here, the distance between the discharge port 56b and the substrate surface is 0.01 to 30 mm, preferably 〇.5 to 5, and is narrow. Sewing-like spit 19 200836849 The compressed air discharged from the outlet 56b, for example, the blowing pressure is ~ ϋ·1~〇.5 MPa. As shown in Fig. 7, the compressed air discharged from the slit-shaped discharge port 56b is After reaching the surface 10a of the + substrate 10 through the opening portion of the cover, the substrate 10 is The liner attached to the face 10a is peeled off. Then, the pressurization f-containing gas containing the peeled liner passes through the opening portion 58a, as indicated by the arrow symbol in Fig. 7, along the convex curvature of the nozzle 56 having a predetermined curvature. The shape 56c travels in the passage 58b and travels at a substantially constant height in which the opening 58a and the opening 60a of the circular tubular member 60 communicate with each other, and is formed from the opening 6〇a (4) and through the exhaust pipe 12 The exhaust device 14 is discharged to, for example, the outside of the factory. At this time, by moving the substrate mounting portion 8 on which the substrate is placed in the Y direction, the entire surface of the surface 10a of the substrate 10 can be removed. When the dry cleaning device according to the third embodiment is used, the compressed air is blown from the discharge port of the ί g to the substrate in a substantially orthogonal direction (to allow the substrate to adhere thereto). The deposit is reliably peeled off. Further, the cross-sectional shape of the direction in which the discharge port is formed at the position where the discharge port of the mouthpiece is formed has a convex shape having a predetermined curvature, so that the compressed air f has a Coanda effect. 'And along the prescribed The convex shape of the curvature travels inside the casing, wherein the compressed air is spouted from the discharge port along the substantially straight j direction of the substrate and sweeps over the surface of the substrate, and contains deposits peeled off from the substrate. This prevents the peeled deposit from scattering to the outside of the casing, and prevents the temporarily peeled deposit from adhering again to the discharged object. Further, the compressed air containing the peeled deposit is used for the wall effect 20 Ο 200836849 It should travel along the convex shape of the nozzle, and the suction power is reduced. It is necessary to make the exhaust device necessary and the air attached to the opening of the casing, because the passage is 1 person, the object is discharged. The stripping-set flow rate is drawn in the path of the passage so that the opening can be sucked into the slit-like row of the upper portion of the round tubular g-piece. In the inner/lower direction, the air in the width direction can be attached to the substrate at the flow rate of the whole body at a constant flow rate. The other (thoracic) is placed on the substrate; 8:, !f moves, but also The dry cleaning machine can be transported in the direction of the 沿着 沿着 二 沿着 沿着 沿着 沿着 沿着 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Move to. no. . In the fourth embodiment, the substrate 10 to be discharged is the substrate of the liquid crystal display device panel, and the deposit is distributed on the object 10 to be discharged, and the object 10 is discharged. For example, a substrate such as a mounting base β υ, a fleld emission display panel, or an electropolymer display panel on which an electronic component is mounted may be used as a substrate swarf of, for example, n′m to several/zm. Dust such as thread and so on. Further, in the above-described embodiment, the ink is supplied to the dry cleaning machine by the compressor of the factory facility. However, the pressurization system may be provided with a pressurization system, and a compressed air may be supplied to the dry cleaning machine.
130所形成之位置上的吐出口 130 130延伸的方向直交的斷面 形狀，並不具有規定的曲率的凸形狀。 如圖8的圖所示，是使喷嘴的吐出口和基板的間隔 (gap)在0.5〜2·〇 (mm)之間變化，並使來自喷嘴的壓 縮空氣的噴出壓力在0.2〜0.5 (MPa)之間變化，而測^ 各個情况下的排氣裝置的吸引動力（―）（將間隙設定爲 〇·5 (mm)，並設利用附壁效應之情况下的吸引負荷爲1〇 且使其它情况下的吸引負荷無因次化），但在任一條件下，’ 都是利用附壁效應之情况下的排氣裝置的吸引動力小。 另外’以上所說明的實施形態是爲了使本發明容易理 解而進行的說明，並不是爲了限定本發明而進行的說明。 因此’在上述實施形態中所揭示的各要素包括屬於本發明 的技術範圍之所有的設計變更或等同物。 本發明與2〇〇7年3月8日提出的日本專利申請第2007 — 58278號中所包含的主題有關，且其揭示的全部在這裏 疋作爲參照事物而清楚地加入。 22 200836849 Δ/ΔΟ /pil 產業上的可利用性 如以上所說明的本發明 合用於除塵裝置。 【圖式簡單說明】 的噴嘴、乾洗器及乾洗系統適 Ο 圖1所示爲關於第！實 圖2所示爲關於第1實 圖。 、 圖3爲用於說明關於第 壓縮空氣的流程的圖示。 施形態的乾洗系統的構成。 施形態的乾洗器之構成的剖面 1實施形態的從噴嘴所吐出之The cross-sectional shape in which the discharge port 130 130 at the position where the 130 is formed is orthogonal to each other does not have a convex shape having a predetermined curvature. As shown in the graph of Fig. 8, the gap between the discharge port of the nozzle and the substrate is changed between 0.5 and 2 mm, and the discharge pressure of the compressed air from the nozzle is 0.2 to 0.5 (MPa). Between the two, the suction power (-) of the exhaust device in each case is measured (the clearance is set to 〇·5 (mm), and the suction load in the case of using the Coanda effect is set to 1 〇 In other cases, the suction load is not dimensioned. However, under any of the conditions, the suction force of the exhaust device in the case of using the Coanda effect is small. The embodiments described above are described in order to facilitate the understanding of the present invention and are not intended to limit the present invention. Therefore, each of the elements disclosed in the above embodiments includes all design changes or equivalents belonging to the technical scope of the present invention. The present invention is related to the subject matter contained in Japanese Patent Application No. 2007-58278, filed on March 8, 2008, the entire disclosure of which is hereby incorporated by reference. 22 200836849 Δ / ΔΟ / pil Industrial Applicability The present invention as described above is used in combination with a dust removing device. [Simple illustration] The nozzle, dry cleaning machine and dry cleaning system are suitable for the first! Figure 2 shows the first real image. Fig. 3 is a view for explaining the flow of the first compressed air. The configuration of the dry cleaning system of the form. Cross section of the configuration of the dry cleaning device of the embodiment 1 Discharged from the nozzle of the embodiment
4所示爲關於第24 is shown on the 2nd
實施形態的乾洗器之構成的剖面 ϋ 圖5爲用於說明關於第 壓縮空氣的流程的圖示。 圖6所示爲關於第3實 圖。 、 窗圖7爲用於說明關於第 壓縮空氣的流程的圖示。 2實施形態的從噴嘴所吐出之 施形態的乾洗器之構成的剖面 3實施形態的從噴嘴所吐出之 關係二為壓縮空氣的吹噴壓力和排氣裝 置的吸引動力 的 。圖9所示爲不利用附壁效應之乾洗器的構成的剖面 【主要元件符號說明】 2 :乾洗系統 3:乾洗器設置部 23 200836849 Z/ZJ /ριι 4 :乾洗器 5 :壓縮機 6 :供給管 8:基板載置部 10 :基板 10a :表面 12 :排氣管 14 :排氣裝置 16 :喷嘴 16a :貯留部 16b :吐出口 16c :凸形狀 18 :罩殼 18a :開口部 18b :通路 18c :排氣部 30 :乾洗器 32 :喷嘴 32a :貯留部 32b :吐出口 32c :平面形狀 32d :凸形狀 34 :罩殼 34a :開口部 200836849Cross section of the configuration of the dry cleaning device of the embodiment ϋ Fig. 5 is a view for explaining the flow of the first compressed air. Figure 6 shows the third actual figure. Fig. 7 is a view for explaining the flow of the first compressed air. 2. Cross section of the configuration of the dry cleaning device of the embodiment which is discharged from the nozzle. The relationship between the discharge from the nozzle of the embodiment is the blowing pressure of the compressed air and the suction force of the exhaust device. Fig. 9 is a cross-sectional view showing the configuration of a dry cleaning device which does not utilize the Coanda effect. [Main component symbol description] 2: Dry cleaning system 3: Dry cleaning device setting portion 23 200836849 Z/ZJ / ριι 4 : Dry cleaning device 5: Compressor 6: Supply pipe 8: substrate mounting portion 10: substrate 10a: surface 12: exhaust pipe 14: exhaust device 16: nozzle 16a: storage portion 16b: discharge port 16c: convex shape 18: case 18a: opening portion 18b: path 18c: exhaust unit 30: dry cleaning device 32: nozzle 32a: storage portion 32b: discharge port 32c: planar shape 32d: convex shape 34: cover 34a: opening portion 200836849
Δ 丨厶 J> ! \JLL 34b :通路 34c :排氣部 50 :乾洗器 56 :噴嘴 56a :貯留部 56b :吐出口 56c :凸形狀 58 :罩殼 58a :開口部 58b :通路 60 :圓管狀構件 60a :開口 100 :乾洗器 110 :罩殼 120 :噴嘴 130 :吐出口 25Δ 丨厶J> ! \JLL 34b : passage 34c : exhaust unit 50 : dry cleaning device 56 : nozzle 56 a : storage portion 56 b : discharge port 56 c : convex shape 58 : cover 58 a : opening portion 58 b : passage 60 : circular tube Member 60a: opening 100: dry cleaning machine 110: casing 120: nozzle 130: discharge port 25
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007058278 | 2007-03-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200836849A true TW200836849A (en) | 2008-09-16 |
| TWI415695B TWI415695B (en) | 2013-11-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097107837A TWI415695B (en) | 2007-03-08 | 2008-03-06 | Dry cleaner and dry cleaner system |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4932897B2 (en) |
| KR (1) | KR101439575B1 (en) |
| CN (1) | CN101626842B (en) |
| TW (1) | TWI415695B (en) |
| WO (1) | WO2008108168A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104941956B (en) * | 2015-06-25 | 2017-02-01 | 无锡杰夫电声有限公司 | Device for clearing foreign matters in magnetic gaps of loudspeaker |
| JP6116629B2 (en) * | 2015-08-11 | 2017-04-19 | 株式会社ハーモテック | Suction device |
| IT202000012211A1 (en) * | 2020-05-25 | 2021-11-25 | F M Srl | CAPTATION SYSTEM AND PRODUCTION PROCESS OF THIS CAPTATION SYSTEM |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052969A (en) * | 1989-12-29 | 1991-07-10 | 邮电部成都电缆厂 | Compressed air drier |
| IT1249087B (en) * | 1991-03-29 | 1995-02-11 | Josef Prenn | AIR FILTER CLEANING DEVICE |
| US5466298A (en) * | 1993-10-01 | 1995-11-14 | James River Paper Company, Inc. | Web cleaning method |
| JP3919132B2 (en) * | 1997-04-22 | 2007-05-23 | シシド静電気株式会社 | Dust suction type dust remover |
| JP2002343761A (en) * | 2001-05-16 | 2002-11-29 | Kubota Corp | Laser cleaning apparatus and method therefor |
| AU2003246171A1 (en) * | 2002-07-08 | 2004-01-23 | Tokyo Electron Limited | Processing device and processing method |
| JP2004330162A (en) * | 2003-05-12 | 2004-11-25 | Hugle Electronics Inc | Clogging detecting device for dust-proof apparatus |
| US20050126605A1 (en) * | 2003-12-15 | 2005-06-16 | Coreflow Scientific Solutions Ltd. | Apparatus and method for cleaning surfaces |
| US7757340B2 (en) * | 2005-03-25 | 2010-07-20 | S.C. Johnson & Son, Inc. | Soft-surface remediation device and method of using same |
| JP4948787B2 (en) | 2005-06-13 | 2012-06-06 | 東洋熱工業株式会社 | Dust remover |
| JP4579071B2 (en) * | 2005-07-06 | 2010-11-10 | ヒューグルエレクトロニクス株式会社 | Substrate transport dust remover |
| JP4653169B2 (en) | 2005-07-07 | 2011-03-16 | ヒューグルエレクトロニクス株式会社 | Spot cleaner |
-
2008
- 2008-02-20 WO PCT/JP2008/052801 patent/WO2008108168A1/en active Application Filing
- 2008-02-20 KR KR1020097018684A patent/KR101439575B1/en active IP Right Grant
- 2008-02-20 JP JP2009502505A patent/JP4932897B2/en not_active Expired - Fee Related
- 2008-02-20 CN CN2008800073382A patent/CN101626842B/en active Active
- 2008-03-06 TW TW097107837A patent/TWI415695B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008108168A1 (en) | 2008-09-12 |
| CN101626842A (en) | 2010-01-13 |
| JPWO2008108168A1 (en) | 2010-06-10 |
| KR101439575B1 (en) | 2014-09-11 |
| JP4932897B2 (en) | 2012-05-16 |
| CN101626842B (en) | 2011-06-29 |
| KR20090129420A (en) | 2009-12-16 |
| TWI415695B (en) | 2013-11-21 |
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