200821584 九、發明說明： 【發明所屬之技術領域】 ^本發明係關於一種於進行液晶面板或半導體積體電路 專之電子元件的^通狀態檢查或動作特性檢查時，接觸於 忒包子兀件的電極或端子以進行電氣信號的接收傳送之導 電ϋ接觸③及使用該導電性接觸器所構成之導電性接觸器 單元。 σσ 【先前技術】 ί. 以往，於半導體積體電路等檢查對象的電氣特性檢查 ν技術㈢域中’為人所知者有具備下列功能之導電性接觸 器單元之相關技術，亦即具有對應於半導體積體電路的連 接用书極而配設複數個導電性接觸器，並將導電性接觸器 物理性接觸於連接用電極，藉此以確保電性導通之功能。 該導電性接觸器單元係具傷：複數個導電性接觸器；及用 、保持複數個導電性接觸器之導電性接觸器固持具。於如 1:::性接觸器單元中，業經提出了隨著作為檢查對象 極的配列間隔之窄化用的種種技術。 楼用電 接觸Hr下列專利文獻1巾，係揭示有—種，關於· 开^ a/ —對象之接觸部及彈推於該接觸部之彈性部，並 導電性接觸器之技術。於此習知往技術中’ 置，藉^對㈣複數個導電性接觸器而配 化。 L於&查對象之連接用電極的配列間隔之窄 319523 6 200821584 專利文獻l :曰本特開2001_343397號公報 •【發明内容】 (發明所欲解決之課題） 山/然而:於上述的先前技術中，由於導電性接觸器的前 端係於與彈性體的伸縮方向幾乎平行之方向行進 ㈣〇ke)，因此無法充分去除形成在檢查對 ^或附著於其表面之#污等，而有導致無 = 電性接觸之情況。在此情況下，亦有導 ='的 施加過度的荷重，使得導電性 、’方 骞态 按觸的耐久性產生問題。 、“’於進行檢查時，較理想雖為操作人 視方式觀察導電性接觸器的前 ⑺舾共知查對象之間的接觸， 二=:往的導電性接觸器單元於從上方觀看時下 审性接觸器的前端較導電性接觸器固持具的側面 „ 规丁、十电11接觸态的前端部附近之盥 對象之間的接觸狀況時，操作人員本身必需彎曲次勢 =硯看接觸處附近，而隨著觀察次數的增加，使摔：人 貝的負擔亦隨著增大。 便釭作人 本發明係鑑於上述情形而研創者 種可因應配列間隔的窄化並具有 而目：在，f - 容易以目視方式觀察與檢杳對 、’且旎夠 器及導電性接觸器單元。的接觸狀況之導電性接觸 (用以解決課題之手段） 為了解決上述課題並達成目的，本發 電性接觸器，係形成 ，且：… 灯用Μ輸出檢查用的信號 319523 7 200821584 第檢查對㈣以電性連接者，其特徵為具傷. ::1接觸部，位於該導電性接觸器之長度方向的”並 上述電路構造接觸；彈性部，具有於與上述長度;向正 二：Π導電性接觸器的寬度方向平行之方向上延伸之複 ^直㈣、及將_的上述直線部彼 ==數個f曲部’且位於上述長度方向=曲 i、”:‘述長度方向自由伸縮；及第2接觸部，位於 、f =: 上述第1接觸部為不同的端部，且I上 处仏查對象接觸之前端，係較上述彈性 緣端部更突出於從上述彈性部^方=的邊 方向；上述複數個彎曲部中，於上、:;接：：通離之 側彎曲之μ、f料 、以罘2接觸口P突出的一 的义㈣曲部的外徑’係愈接近於上述第2接觸部 勺别為則愈小，·上述複數個彎曲部中，於盥上 :突出的：側為相反側彎曲之上述彎曲部的外徑，係愈： k於上述第2接觸部的前端則愈大。 此外，、=上述發明中，可構成為於上述複數個彎曲部 _ 接觸部突出的一側彎曲之上述彎曲部的外 鱗^ 第1及第2接觸部的各前端之直線作為 土二$兵使用此基準直線而對各f曲部所決定的第 基準量對應進行線形變化；上述複數個彎曲部中，於盘 2第=部突出的一側為相反側彎曲之上述彎曲部的 θ 用上逑基準直線而對各彎曲部所決定的第2 基準量對應進行線形變化。 此外，於上述發明中，可構成為：上述直線部的線徑 319523 200821584 係愈遠離上述第1接觸部的前端則愈大。 此外’於上述發明中，可盖 係與從上述第！接觸部㈣端i^為：上述直線部的線徑 上述直後邱的φ Γ 述第2接觸部的前端至 的中心為止之距離對應進行線形變化。 連接ί:卜第發明中，可構成為復具備:第1連接部， w1接觸部與上述彈性部；及第2連 上述彈性部與上述第2接觸部 連接 f 觸器的板厚方向之開口部；上述第：二通該導電性接 為相等。…刀別具有之上述寬度方向的長度係互 此外，於上述發財，可構成為復具備 ==接觸部舆上述彈性部;及第2連接：連接 與上述第2接觸部，並形成有貫通該導電性： h的板厚方向之開口部；在上述彈性 ，第2接觸部突出側為相反側之邊緣端部，係 =1及弟2接觸部的寬度方向上且與上述第2 =側為相反側之邊緣端部，更往接近上述彈性部 = 向的中心軸之方向退避。 見又方 =外’於上述發明中’可構成為··在上述彈性部 且位於上述第2接觸部突出側之邊緣 較 在上述第1及第2接觸部的寬度方向上且 = 乂 觸部突出側之邊緣端部，更往接近上述彈性部接 的中心轴之方向㈣。 ^㈣之見度方向 本發明其他態樣之導電性接觸器單元，其特徵為具 319523 9 200821584 •備：呈板狀之複數個導電性接觸器，具有：位於長度方向 -的端部，並與用以輸出檢查用的信號之電路構造接觸之第 '1接觸部；具有於與上述長度方向正交且於與該導電性接 觸器的寬度方向平行之方向上延伸之複數個直線部、及將 f接的上述直線部彼料以連接並f曲為圓弧狀之複數個 ¥曲部，且位於上述長度方向的中間部，並可於上述長产200821584 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a contact with an eaves member when performing an inspection of an electronic component of a liquid crystal panel or a semiconductor integrated circuit or an inspection of an operational characteristic. The electrode or the terminal is a conductive contact contact 3 for receiving and transmitting an electrical signal, and a conductive contact unit formed using the conductive contact. Σσ [Prior Art] In the past, the electrical characteristics of the inspection object, such as the semiconductor integrated circuit, were examined. In the technical (3) field, there is a related art that has a conductive contactor unit having the following functions, that is, corresponding A plurality of conductive contactors are disposed on the connection book of the semiconductor integrated circuit, and the conductive contactor is physically contacted with the connection electrode, thereby ensuring electrical conduction. The conductive contact unit is provided with: a plurality of conductive contactors; and a conductive contact holder for holding a plurality of conductive contacts. In the 1:9: sex contactor unit, various techniques for narrowing the arrangement interval of the object to be inspected have been proposed. Building electrical contact Hr, the following patent document 1 towel, discloses a technique for electrically contacting a contact portion of a target and an elastic portion of the contact portion. In the prior art, it is formulated by a plurality of conductive contactors. L is narrow in the arrangement interval of the connection electrodes of the object to be inspected. 319523 6 200821584 Patent Document 1: JP-A-2001-343397 SUMMARY OF INVENTION [Problem to be Solved by the Invention] Mountain/However: Before the above In the technique, since the front end of the conductive contactor travels in a direction substantially parallel to the direction in which the elastic body expands and contracts (four) 〇ke), the contamination or the like formed on the surface of the inspection or attached to the surface cannot be sufficiently removed, and None = Electrical contact. In this case, there is also an excessive load applied by the conductance, which causes problems in the conductivity and the durability of the touch. "When performing inspections, it is preferable to observe the contact between the front of the conductive contactor (7) and the common object of the contactor, and the second contactor: the conductive contactor unit is viewed from above. When the front end of the susceptor contactor is in contact with the squatting object near the front end of the conductive contactor holder, the operator must bend the second potential = 砚 see the contact Nearby, and as the number of observations increases, the burden of falling: people is also increasing. The present invention is based on the above circumstances, and the researcher may be narrowed according to the arrangement interval and has the purpose: f - easy to visually observe and check the pair, 'and the squeezing device and the conductive contactor unit. Conductive contact in contact condition (means for solving the problem) In order to solve the above problems and achieve the objective, the power generating contactor is formed, and: ... Signal for the output inspection of the lamp 319523 7 200821584 Checking the pair (4) In the case of an electrical connector, it is characterized by a wound. ::1 contact portion, located in the longitudinal direction of the conductive contactor and in contact with the above-mentioned circuit structure; the elastic portion having the length and the positive polarity; The straight line extending in the direction in which the width direction of the contactor is parallel is parallel, and the straight portion of the _ is a plurality of f-curved portions, and is located in the longitudinal direction = curved i, ":" And the second contact portion is located at, f =: the first contact portion is a different end portion, and the upper end of the first contact portion is in contact with the elastic end portion and protrudes from the elastic portion. The side direction of the above-mentioned plurality of curved portions, on the upper side::; the following: the μ, the f material bent on the side of the pass, and the outer diameter of the four (the fourth) curved portion protruding from the contact port P of the 罘2 The smaller the spoon is close to the second contact, the smaller. A plurality of said bent portions, to the wash: projecting: an outer diameter side of the curved portion opposite the curved side, the more lines: K to the distal end of the second contact portion is larger. Further, in the above aspect of the invention, the straight line of the curved portion of the curved portion that is curved on the side where the plurality of curved portions _ the contact portion protrudes may be configured as a straight line of each of the front ends of the first and second contact portions. The reference line is linearly changed in accordance with the reference amount determined by each of the f-curves, and the θ of the curved portion bent on the opposite side of the side of the disk 2 is formed on the opposite side of the disk 2 The second reference amount determined for each curved portion is linearly changed in accordance with the reference line. Further, in the above invention, the wire diameter 319523 200821584 of the straight portion may be larger as it is farther from the front end of the first contact portion. Further, in the above invention, it is possible to cover and from the above! The contact portion (four) end i^ is the wire diameter of the straight portion. The distance from the front end of the second contact portion to the center of the second contact portion is linearly changed. In the first aspect of the invention, the first connecting portion, the w1 contact portion and the elastic portion, and the second connecting portion of the elastic portion and the second contact portion are connected to the opening of the f-contactor in the thickness direction. The first: the second pass is electrically connected to be equal. The length of the blade in the width direction is mutually increased, and the above-mentioned wealth can be configured to include the == contact portion 舆 the elastic portion; and the second connection: the connection and the second contact portion are formed to penetrate Conductivity: an opening portion in the thickness direction of h; in the above-described elasticity, the edge portion on the opposite side of the protruding portion of the second contact portion is the width direction of the contact portion of the system 1 and the second portion, and the second = side is The edge end of the opposite side is retracted closer to the direction of the central axis of the elastic portion = direction. In the above-described invention, the edge of the elastic portion and the protruding portion of the second contact portion may be in the width direction of the first and second contact portions and the contact portion may be formed. The edge end of the protruding side is closer to the direction of the central axis of the elastic portion (four). ^ (4) Sight Direction Another aspect of the present invention is a conductive contactor unit characterized by having a 319523 9 200821584 • a plurality of conductive contactors in the form of a plate having: a length-end end, and a '1 contact portion that is in contact with a circuit structure for outputting a signal for inspection; a plurality of straight portions extending in a direction orthogonal to the longitudinal direction and parallel to a width direction of the conductive contact, and a plurality of straight portions extending in a direction parallel to the longitudinal direction of the conductive contactor The linear portion of the f-connected portion is connected to a plurality of curved portions that are curved in an arc shape, and is located at an intermediate portion in the longitudinal direction, and is capable of producing the above-mentioned long-term
方向自由伸縮之彈性部；位於上述長度方向之盘上述第T 接觸部為不同的端部，且與上述檢查對象接觸之前端，係 ^上述彈性部之寬度方向的邊緣端部更突出於從上述彈性 =寬度方向的中心軸遠離之方向之第2接觸部；連接上An elastic portion that is freely stretchable in a direction; a T-contact portion of the disk located in the longitudinal direction is a different end portion, and an edge end portion in a width direction of the elastic portion protrudes from the end portion in contact with the inspection object Elasticity = the second contact portion of the central axis in the width direction away from the direction;
It制部與上㈣性部之第1連接部；以及連接上述 邙之第=述弟2接觸部’並形成有貫通厚度方向之開口 °弟2連接部，導電性接觸器固持具，呈有 ==度方向邊緣端部中的位於:述第2接二 〇出側之邊緣端部予以喪合而保持之 ΐ分別位於與上述複數個第1導引溝相對二=將 肷入於相對向的上述第丨導引溝之 4置並將 -邊的邊緣端部予以嵌合而佯拄、广¥電性接觸器的另 及棒狀構件，係將上述^數個導f 2導引溝，·以 成於上述第2連接部的上述開 =分別具有之形 述導電性接觸器固持具;上述導電:二:並固接於上 彎曲部中，於上述第2接觸部突出的接^:上述複數個 部的外徑，係愈接近於上述第 曲之上述彎曲 述複數個彎曲部中 4的前端則愈小；上 述弟2接觸部突出的-侧為相 319523 10 200821584 :反側彎曲之上述彎曲部的外徑，孫今妓卞认、、 -部的前端則愈大。 ’、〜、上述第2接觸 此外，於上述發明中， 直於長度方向的剖面積，係較:=上=棒狀構件之垂 上述開口部的面積還小。成在上述¥電性接觸器之 此外，於上述發明中，可構成為：上 前端，係較上述導電性接鈣„„ 2接觸4的 成有上述第lf=:=具的外侧面中之内側形 '的法線方向。 P刀的外侧面，更突出於該外側面 (發明之效果） 出檢3 構成為具備:第1接觸部，與用以輸 双-用的#號之電路構造接觸，·彈性部，具有於 方向正交且於與寬度方向平行 、/、、又 部、及脾柳拉从 丁之方向上延伸之複數個直線 之複數個上述直線部彼此予以連接並f曲為圓弧狀 邛盥广可於長度方向自由伸縮；及第2接觸 的邊緣對象接觸之前端’係較上述彈性部之寬度方向 部更突出於從上述彈性部之寬度方向的中心抽遠 的-側Ϊ曲上述複數個彎曲部中，於上述第2接觸部突出 觸部的彎曲部的外徑’係愈接近於上述第2接 接觸部=恩;匕上述複數個f曲部中’於與上述第2 命技 出的一側為相反側幫曲之上述管曲部的外徑，係 可對庵；上述第2接觸部的前端則愈大，藉此可提供一種 容易，於配列間隔的窄化並具有優異的耐久性，並且能夠 M目視方式觀察與檢查對象的接觸狀況之導電性接觸 319523 11 200821584 - 裔及導電性接觸器單元。 ’ 【實施方式】 .下稱用以實施本發明之最佳的形態(以 马男、靶形態」）。此外，圖式為千立 度與寬度之間的關係、以及各個部二;二：之厚 會有與實際有所不同，在此應予留;?::的亦 尺寸的_及㈣互為不同之部分。 Γ的構：丄=本發明一實施形態之導電性接觸器單元 成體圖。該圖所示之導電性接觸器單幻係用以逸 m — Μ夜板寺之1路構造的導通狀能产 查或動作特性檢查者，並且借.形士 *』 、狀心、才双 性接納π 9 .— 八備.形成為板狀之複數個導電 °°，用以收納並保持複數個導電性接觸Ρ 2 電性接觸器固持呈3 ·芨is]拉伙、曾& " 之¥ 斤適_性接觸11固持具3並 支撐硬數個¥電性接觸器2之棒狀構件4。 能Ilf導電性接觸器2。第2圖係顯示本實施形 /悲1之導電性接觸器2的構成之圖彳 ^ 將第？^夕千古+ :構成之圖式。於以下的說明中’ 將弟2圖之垂直方向稱為「導電性接觸器2的長度方向， 將第2圖之水平方向稱為「導電性接觸器2的寬^方向」， 將分別與長度方向及寬度方向 ^ 口」 正乂炙万向，亦即垂直於 面之方向稱為「導電性接觸器2的板厚方向」。 成為圖所：之導電性接觸器2係使用導電性材料而形 亚確立用以對生成檢查用的信號之電路構造與 仏查對象之間的電性連接。具體而言，導電性 具備：物理性接觸於包含檢查用電路之預定 觀之 319523 12 200821584 -第1接觸部21 ;物理性接 ' 2接觸部22;介設於第广日曰面板等的檢查對象之第 .並可於長产方； s °卩21及第2接觸部22之間， 與彈性部23之第自Λ㈣之彈性部23，·連接第1接觸部21 性部23,並形成有及連接第2接觸部22與彈 連接部26。 通板厚（厚度）方向之開口部25之第2 部丄係以從第1連接部 、第!二= 之:式而設置。然而，第1接觸部2! 於接觸對象的大之位置亚不限定於此’只需對應設置 第2接弼構造之電極的位置等條件而決定即可。 =制部22餘㈣㈣23之 接=9彈性部23之寬度方向的中心軸之方向二 ^。㈣狀須依據導電性接觸器2的材質或檢杳時 知加於導電性接觸 一守應 觸器2之導電性: 方^ / 、要較第2連接部別之寬戶 方向的邊緣端部更往該寬度方向 ’- 細部進行適當㈣更。 且食^部23係具有於與導電性接觸器2的長度方向正交 广性接觸器2的寬度方向平行之方向上 ^線部H、23a_2、...、23a_n、及將鄰接的直線^ <予以連接亚彎曲為圓弧狀之複數個彎曲部Mb” 丁為S子狀之形狀。彈性部23之寬度方向的長度係與第 319523 13 200821584 ^連接部24及第2連接部別之寬度 外，於第2圖所示之情況時，直線部長此 觸器2=適當I::體數目一 ^ 't'< '1 ^ 1 ^ V. 2 < t n。此線控七較理相為 : = =1接觸部21的前端P或第2接觸部22:前 即可。zm1的中^止之距離而進行線形變化 的内部荷重時該應力容易集中之部分㈤二：了1 近區域）的直線部23a-n之線彳& t形成Α θ Π、附 邻八惑踝仫七形成為取粗，而降低該 心與導電性接觸器單元丨之間之摩擦的影塑。The first connection portion between the It portion and the upper (four) portion; and the second contact portion of the = = 述 述 述 述 并 并 并 并 并 并 ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电==================================================================================================== The fourth guiding groove 4 is disposed and the edge end portion of the edge is fitted, and the other rod member of the electric contactor is guided by the plurality of guides f 2 The conductive contact holder is formed by the opening of the second connecting portion, and the conductive contact is fixed to the upper curved portion and protruded from the second contact portion. The outer diameter of the plurality of portions is closer to the curved portion of the curved portion, and the smaller the front end of the plurality of curved portions, the smaller the front end of the curved portion is the 319523 10 200821584: the opposite side is bent. The outer diameter of the above-mentioned curved portion, Sun Jinyi recognizes that the front end of the - part is larger. Further, in the above invention, the cross-sectional area straight to the longitudinal direction is smaller than: = upper = the diameter of the rod-shaped member is smaller. Further, in the above-described electric contactor, in the above invention, the upper end portion may be formed in the outer side surface of the first lf=:= member which is in contact with the conductive calcium contact member 2; The normal direction of the inner shape'. The outer side surface of the P-knife protrudes further from the outer side surface (the effect of the invention). The inspection 3 is configured to include a first contact portion and a circuit structure for the #-type used for the transmission of the double-use, and the elastic portion has a plurality of the straight portions of the plurality of straight lines extending in the direction orthogonal to the width direction, and/or the spleen and the spleen will extend from the direction of the spleen are connected to each other and are curved into an arc shape. Freely expanding and contracting in the longitudinal direction; and the front end of the second contact is in contact with the front end of the elastic portion, and the side portion of the elastic portion is protruded from the center of the width direction of the elastic portion to distort the plurality of curved portions. The outer diameter ' of the curved portion of the second contact portion protruding portion is closer to the second contact portion = 恩; 匕 the plurality of f curved portions of the plurality of f curved portions The outer diameter of the curved portion of the opposite side of the side panel is opposite to the outer diameter of the curved portion; the larger the front end of the second contact portion is, thereby providing an easy arrangement, narrowing of the arrangement interval, and excellent durability. And can visually observe and inspect the object Conductive contact in contact conditions 319523 11 200821584 - Conductive contactor unit. [Embodiment] The best mode for carrying out the invention (in the form of a male or female target) is hereinafter referred to. In addition, the schema is the relationship between the thousand degrees and the width, and the divisions of the two divisions; the second: the thickness will be different from the actual one, and should be left here; the size of the _ and (4) are Different parts. The structure of the crucible: 丄 = an electroconductive contactor unit according to an embodiment of the present invention. The conductive contactor shown in the figure is used for the conductance inspection or the behavioral characteristic checker of the 1-way structure of the Μ夜板寺, and the model is used. Sexual acceptance π 9 .— 八备. A plurality of conductive °° formed into a plate shape for accommodating and maintaining a plurality of conductive contacts Ρ 2 Electrical contactor holding 3 · 芨is] pull gang, Zeng & " The rod-shaped member 4 of the electric contactor 2 is supported by a plurality of contacts. Can Ilf conductive contactor 2. Fig. 2 is a view showing the configuration of the conductive contactor 2 of the present embodiment. ^ 夕千古+ : The pattern of the composition. In the following description, the vertical direction of the second drawing is referred to as the "longitudinal direction of the conductive contactor 2, and the horizontal direction of the second drawing is referred to as the "width of the conductive contactor 2". Direction and width direction ^ Port" The direction of the square, that is, the direction perpendicular to the surface is called "the thickness direction of the conductive contactor 2". In the conductive contactor 2, an electrically conductive material is used to establish an electrical connection between a circuit structure for generating a signal for inspection and an object to be inspected. Specifically, the conductivity includes: 319523 12 200821584 - the first contact portion 21 which is physically contacted with the inspection circuit, and the physical contact '2 contact portion 22; the inspection is performed on the panel of the second day The object can be formed on the long-term side; between the s °卩21 and the second contact portion 22, and the elastic portion 23 of the elastic portion 23 (four) is connected to the first contact portion 21, and is formed. The second contact portion 22 and the elastic connecting portion 26 are connected and connected. The second portion of the opening portion 25 in the thickness direction (thickness) direction is provided from the first connecting portion and the second pair. However, the first contact portion 2! is not limited to the large position of the contact target, and it is only required to be determined in accordance with conditions such as the position at which the electrode of the second contact structure is provided. = 22 parts of the system (4) (4) 23 = 9 The direction of the central axis in the width direction of the elastic portion 23 is 2 ^. (4) The shape shall be based on the material of the conductive contactor 2 or the conductivity of the conductive contact contactor 2 when it is inspected: square ^ / , the edge end of the wide connector direction of the second connection part Further to the width direction '- detail is appropriate (four) more. Further, the food portion 23 has a line portion H, 23a_2, ..., 23a_n and a line to be adjacent in a direction parallel to the width direction of the wide contactor 2 in the longitudinal direction of the conductive contact 2. < A plurality of curved portions Mb" which are bent into an arc shape are connected in a shape of a S-shaped shape. The length of the elastic portion 23 in the width direction is different from the connection portion 24 and the second connecting portion of the 319523 13 200821584 ^ Outside the width, in the case shown in Figure 2, the linear terminator 2 = appropriate I:: number of bodies ^ ^ 't' < '1 ^ 1 ^ V. 2 < tn. The rationale is: = =1 the front end P of the contact portion 21 or the second contact portion 22: the front end of the zm1 is the distance of the internal load of the linear change, and the stress is easily concentrated (5) 2: 1 The line 彳& t of the straight portion 23a-n of the near region) is formed to be Α θ Π, and the adjacent occlusion is formed to be thick, and the friction between the core and the conductive contact unit 丨 is reduced. .
V 彎曲部23H、23b_2、…、23b-⑷）中，於第2接 邛22突出之一侧彎曲之彎曲部23卜尺卜2、4、...1+1. ^為偶數），其外錢愈接近第2接觸部22的前端則愈‘ 山、即R2>R4>…>Rn+1。相對於此’於與第2接觸部Μ突 的一側為相反侧彎曲之彎曲部23b— j (j = 1、3、 · ·Among the V curved portions 23H, 23b_2, ..., 23b-(4)), the curved portion 23 which is bent on one side of the second joint 22 is formed by a ruler 2, 4, ... 1+1. ^ is an even number, The closer the foreign money is to the front end of the second contact portion 22, the more it is, that is, R2 > R4 > ... > Rn + 1. On the other hand, the curved portion 23b-j which is curved on the side opposite to the side where the second contact portion is condy is formed (j = 1, 3, · ·
為奇數）’其外徑1愈接近第2接觸部22的前端則愈n大，J ^即’ < R3<…< Rn。L及r2係滿足Ri < R2。此外，彎曲 部23b-k(k=l、2、…、n+1)的線徑^係對應於該端部二連 接之直線部23a-(k-l)的線徑七㈠與直線部23a~k的線徑 扒而決定，且至少滿足KTk^tk(惟於k=i時， k=n+l 時，tngTn+i)。 — 1 ’ 彎曲部23b-j(j = l、2、…、n+1)的外徑Rp更理想為 319523 14 200821584 設成以連結第1接觸部21的前端p及第2接觸部22的前 端Q之直線作為基準直線，並對應使用此基準直線 而所決定的基準量進行線形變化即可。以下係針對此點， 參照表示出使用基準直線Ll之外徑Rj的設定例之第 行說明。 f先說明於第2接觸部22突出之一側彎曲之彎曲部 j (j 2 4 、n+1，】為偶數）的外徑R j。此時之外 .'徑W系與直線1^位於同一平面上，且至少與直線匕於彈 f P 2 3的内邛不相父，並對應與平行於導電性接觸哭2 ，長度方向之直線L2之間的距離而決定。具體而言Γ彎曲 j (j 1 2、···、n+1，j為偶數）的外徑Rj係以滿足 ”為直線Li與直線L2之間的距離，且為通過該f曲部 23b j的中心並與直線匕正交之方向的距κ第1基準量 具有線形關係R…續…，/5為常數)之方式而決 定。 、 ;此’於與第2接觸部22突出的一侧為 IS: Μ3、…、U為奇數)的輯， '3 、a 1位於同一平面上’且至少與直線於彈性部 々内4不相交’並對應舆平行於導電性接觸器2的長产 ，之直U之間的距離而決定。具體而言，響曲部^ T J' ' 3........ j為奇數）的外徑L係以滿足盥為直線 之間的距離，且為通過該彎曲部23b”的中心 亚”直、仏正交之方向的距離χ、( 瞻…州，>〇’㈣。之方式二， 319523 15 200821584 在此所呪明之外徑L的決定方式僅為例子之一， 及第2基準量n ^ 變更。此外，丄古 7、'之值可進行適當的 & 直線（相當於上述直線^或直線u)的決 疋方式亦可任意進行。 l2=:關於第2直線，於使用如上述2條不同的直線 第2美進」之外：亦可使用當中任一條直線來定義第1及 土〆里而予以取代。此時，彎曲部23b-j( j = i、2、…、 應第2接觸部22是否f曲於突出之一側 用不同的線形關係式並決定各彎曲部23Μ的外獲r” 接著說明導電性接觸器固持具3。如第i圖所亍： =性接固持具3係形成為大致呈長方體狀的外觀形 亚/、有貝通上面部3a與底面部（於第丨圖中未 而保持複數個導電性接觸器2之保持部31;及分別 隔介保持部31而互為相對向之側面部％的預定位置，並 將棒狀構件4的端部予以固接之固接用孔部32。 、’ 、第4圖係顯示導電性接觸器固持具3的上面部 二=:圖。如第4圖所示，於保持部“上 =女叙導電性接觸器2時，將該導電性接觸器2 方 向上之位於第2接觸部22突出側的邊 人：： 持之直線狀的第1導引溝仏;及位於與此第=而呆 :相對向之位置’並將喪入於該第i導弓丨溝仏之導電J 接觸盗2的，度方向之另-邊的邊緣端部予以喪合而= 之直線狀的第2導引溝3 l b為複數對。点 ^ 、、’、、 仏及第2導引溝灿係具有將導電性接觸器2定位於與 319523 16 200821584 ，、長度方向垂直之面方向之功能，並具有將導電性接觸器 .2的伸縮動作予以導引之功能。此外，第1導引溝31a及 第2導引溝31b所形成的對中，互為鄰接的對之彼此之間， . 其間隔完全相等且互為平行。 各個第1導引溝31a及第2導引溝31b係具有相同的 溝f度（設定為w)，且具有相同的溝深度（設定為们。在此 ^明第1導引溝…的溝深度及第2導引溝仙的溝深 〔度為衫之情況，但是兩個^丨溝的溝深度亦可互為不同。 弟5圖係顯示導電性接觸器單元丨㈣部構成之圖 二=圖所示之導電性接觸器固持具3的剖面，係相當 及ΐ 2 _面° %第5圖所示’第1導引溝3ia == 係具有，沿著第5圖的2轴方向(垂直於 ^、又方向之方向）互相平行而延伸之構造。们導引溝 延伸於相同的度？較第2導溝_ 達導雷极妓網如 门之長度延鈕，弟2導引溝31b雖到 ’ 接觸盗固持具3的底面部3d為止，作第i導弓f查 叫堇到達較底面部如為垂直上方的位置為:弟1*引溝 ^ 1圖及第5圖所示之座標系( 成之導電性接鎇哭同杜θ 〇 具有以上構 該寬产方心: 將導電性接觸器2保持為， 軸方向平行，板厚方向與y轴方向平行’ 2二又厂〇 ” Z轴方向平行。就此點而言，導電性接納口。 2的板厚係較導引溝31 、’接觸盗 (W)猶小。 ¥引溝3lh的溝寬度 保持於導電性接觸器固持具3之導電性接觸器2，於 319523 17 200821584 Γ圖重:::::第1接觸部21及第2接觸部22之狀態(第 接U持具3的側面❹更彳h㈣正 (設定突出量為D。此外，第2接㈣22二預疋里 預定量⑽出量為h _的負方向突出The odd number is as follows: the closer the outer diameter 1 is to the front end of the second contact portion 22, the larger n is, and J is '<R3<...< Rn. L and r2 satisfy Ri < R2. Further, the wire diameter of the curved portion 23b-k (k=l, 2, ..., n+1) corresponds to the wire diameter seven (1) and the straight portion 23a of the straight portion 23a-(kl) where the end portions are connected. The line diameter of k is determined by 扒, and at least satisfies KTk^tk (only when k=i, k=n+l, tngTn+i). 1 ' The outer diameter Rp of the curved portion 23b-j (j = l, 2, ..., n+1) is more preferably 319523 14 200821584, so as to connect the front end p of the first contact portion 21 and the second contact portion 22 The straight line of the front end Q is used as a reference straight line, and linear change is performed in accordance with the reference amount determined by using the reference straight line. In the following, a description will be given of the first example of the setting example showing the outer diameter Rj of the reference straight line L1. f. First, the outer diameter R j of the curved portion j (j 2 4 , n+1, ) which is curved on one side of the second contact portion 22 is an even number. At this time, the 'W-line is located on the same plane as the straight line 1^, and at least with the straight line that is not the father of the bullet f P 2 3, and corresponds to the parallel contact with the conductive contact, crying 2, the length direction Determined by the distance between the straight lines L2. Specifically, the outer diameter Rj of the meandering j (j 1 2, . . . , n+1, j is an even number) satisfies "the distance between the straight line Li and the straight line L2, and passes through the f curved portion 23b. The center of j is determined by the manner in which the distance κ of the first reference amount in the direction orthogonal to the straight line 具有 has a linear relationship R...continuation..., /5 is a constant), and this is a one that protrudes from the second contact portion 22. The side is IS: Μ3,..., U is an odd number, '3, a 1 are on the same plane' and at least do not intersect the straight line in the elastic portion '4 and correspond to the length parallel to the conductive contactor 2 Production, the distance between the straight U is determined. Specifically, the outer diameter L of the ringing part ^ TJ' ' 3........ j is an odd number) to satisfy the distance between the straight lines And is the distance χ in the direction of the center of the curved portion 23b", which is perpendicular to the direction of the 仏, and (the state, > 〇 '(4). The second method, 319523 15 200821584 The outer diameter L illustrated here The method of determination is only one of the examples, and the second reference quantity n ^ is changed. In addition, the value of '7, ' can be used to determine the appropriate & straight line (equivalent to the above-mentioned line ^ or line u) It can also be carried out arbitrarily. l2=: For the second straight line, use the second straight line of the above two different lines: you can use any of the straight lines to define the first and the soil and replace it. In the case of the curved portion 23b-j (j = i, 2, ..., whether or not the second contact portion 22 is curved on one side of the protrusion, a different linear relationship is used to determine the externally obtained r of each curved portion 23". The contactor holder 3 is as shown in Fig. i: The sexual contact holder 3 is formed into a substantially rectangular parallelepiped shape, and has a top surface portion 3a and a bottom portion (not in the figure) a holding portion 31 for holding a plurality of conductive contactors 2; and a fixing hole for mutually opposing the side portions of the side portions by the holding portion 31 and fixing the end portions of the rod-shaped members 4 The parts 32, ', and 4 show the upper surface of the conductive contactor holder 2 =: Fig. 4, as shown in Fig. 4, when the holding portion "on = female conductive contactor 2, a side person located on the protruding side of the second contact portion 22 in the direction of the conductive contactor 2: a first guiding groove that is linearly held; This is the first = staying at the opposite position: and will be immersed in the illuminating J of the i-th guide bow, and the contact edge of the edge of the other side of the degree is succumbed to = linear The second guiding groove 3 lb is a plurality of pairs. The points ^, , ', , 仏 and the second guiding groove can have the conductive contact 2 positioned in a direction perpendicular to the longitudinal direction of 319523 16 200821584. The function has a function of guiding the telescopic operation of the conductive contactor 2. The centering of the first guiding groove 31a and the second guiding groove 31b is adjacent to each other. , . The intervals are exactly equal and parallel to each other. Each of the first guiding groove 31a and the second guiding groove 31b has the same groove degree f (set to w) and has the same groove depth (set it as a groove. Here, the groove of the first guiding groove... Depth and depth of the second guiding groove (the degree is the case of the shirt, but the depth of the groove of the two grooves can be different from each other. The figure 5 shows the structure of the conductive contactor unit (four)) = The cross section of the conductive contactor holder 3 shown in the figure is equivalent to ΐ 2 _ face ° % shown in Fig. 5 'The first guiding groove 3ia == has a line direction along the 2nd axis of Fig. 5 (Vertically perpendicular to the direction of the ^ and the direction of the direction) and extending parallel to each other. The guiding grooves extend at the same degree. Compared with the 2nd guiding groove _ reaching the length of the thundering pole, such as the length of the door, the younger 2 guide Although the groove 31b is in contact with the bottom surface portion 3d of the thief holder 3, the position of the ith guide bow f is erected to reach the upper portion of the bottom portion as the vertical upper position: the brother 1* directional groove ^ 1 and the fifth figure The coordinate system of the display (the conductive connection is the same as that of the Du θ 〇 has the above-mentioned wide production center: the conductive contactor 2 is kept, the axial direction is parallel, and the thickness direction is parallel to the y-axis direction '2 2 and factory 〇' Z-axis direction is parallel. At this point, the conductive receiving port. 2 The thickness of the plate is smaller than the guiding groove 31, 'contact thief (W). ¥ Ditch 3lh groove width retention The conductive contactor 2 of the conductive contact holder 3 is at 319523 17 200821584 Γ : ::::: the state of the first contact portion 21 and the second contact portion 22 (the side surface of the first U holder 3) More 彳h (four) positive (set the amount of protrusion to be D. In addition, the second (four) 22 two pre-predetermined amount (10) is the negative direction of h _
义早70纟斜向上方，亦能夠確認導電性接觸器2的 琢，與檢查對象之間的物理性接觸之有無（參照第^圖）。 於弟5圖中’係將從通過第i接觸部21的前端p且平行於 z軸方向之軸0到第2接觸部22的前端的偏移量設定為、 △”在此所說明之突出量為m以及偏移量△!，係 對應導電性接觸器2或導電性接觸器固持具3的大小、應 予施加於檢查對象之荷重等的條件而適當決定。 就防止與導電性接觸器2電性連接而產生短路之觀點 來看，導電性接觸器固持具3較理想為以絕緣性材料所形 (成。❹可制低熱雜的合成_形成導f性接觸器固 持具3，並藉由切割等而形成第i導引溝仏及第2導引 溝31b。其他，例如可藉由二氧化鋁（A12〇3)、二氧化鍅 (Μ)、二氧化石夕⑶⑹等的陶莞、石夕、環氧樹腊等之°熱 硬化性樹脂、聚碳酸酯尊的工程塑膠等而形成導電性接觸 器固持具3的母材，並藉由兹刻等的加工技術而形成第】 導引溝31a及第2導引溝31b。此外亦可構成為，使用1 他適當的材料（不論是否有絕緣性）形成母材，並對可能盥 導電性接觸器2接觸之部分（包含第i導引溝31a及第/、 319523 18 200821584 ‘導引溝m的部分）塗佈 :=材㈣成導電性接觸器使用 .佈絕緣:::Γ電性接觸器2的表面的-部分或全::此塗' 接觸器2安裝於保將複數個導電性 開口部2 5之後，其兩端部係插通於分::::f觸器2的 ρ器固持具3之互為相對向的側面=二性接觸 並固接於導電性接觸器固持具 ：=孔部32， 由保持部^斤保持之複數個導電性接角口時/通 25’而藉此實現防止從導電性接觸哭2的^口 4 功能，並實現將初期撓曲賦予至導電觸、口 =脫之 =構件4之垂直於長度方向的剖面二力二 除弟5圖所示之具士加& ,τ、〜攻馮截 β丁之長方形的角之倒角形It is also possible to confirm the presence or absence of physical contact between the conductive contactor 2 and the object to be inspected (see Fig. 2). In the drawing of Fig. 5, 'the amount of shift from the front end p passing through the front end p of the i-th contact portion 21 and parallel to the axis 0 of the z-axis direction to the front end of the second contact portion 22 is set to Δ" as highlighted herein. The amount of m and the amount of shift Δ! are appropriately determined depending on the size of the conductive contactor 2 or the conductive contactor holder 3, the load to be applied to the object to be inspected, and the like. 2, the electrical contactor holder 3 is preferably formed of an insulating material (the ❹ can be made into a low thermal synthesis _ forming a f-contactor holder 3, and The i-th guiding groove and the second guiding groove 31b are formed by cutting or the like. Other examples include ceramics such as alumina (A12〇3), cerium oxide (cerium oxide), and cerium dioxide (3) (6). The base material of the conductive contactor holder 3 is formed by the thermosetting resin such as the temperature, the thermosetting resin such as the resin, the epoxy resin, and the engineering plastic of the polycarbonate, and is formed by the processing technique such as the engraving. 】 guiding groove 31a and second guiding groove 31b. It is also possible to use 1 suitable material (regardless of Whether it is insulating or not), the base material is formed, and the portion where the conductive contactor 2 is in contact (including the portion of the i-th guiding groove 31a and the /, 319523 18 200821584 'guide groove m) is coated: = (4) Used as a conductive contactor. Cloth insulation::: Part of the surface of the electrical contactor 2 or all:: This coating' The contactor 2 is mounted after the plurality of conductive openings 2 5, both ends Inserted into the ::::f contactor 2 of the pistol holder 3 are opposite sides of each other = two-sex contact and fixed to the conductive contactor holder: = hole portion 32, by the holding portion ^ When the plurality of conductive corner ports are held by the jins, the function of preventing the blister 2 from the conductive contact is realized, and the initial deflection is imparted to the conductive contact, the mouth = the detachment = the member 4 The cross section perpendicular to the length direction is two-dimensionally divided by the angle of the corner of the rectangle of the shijia &
C =::具有之開口部25的_小= 議觸益2形成固接用孔部32時可容易進行加工。β 鑑於棒狀構# 倾 ，用以支輪全部的導電性接觸：2= 4較理想為，以剛性較高，且即使施加荷重亦不^^牛 大撓曲’亚且與導電性接觸器2之間的滑動阻力較= =邑緣性材料所形成。藉此，於施加荷重時，可使二 二：2? 2:動作變得順利。因此可縮小棒狀構件4盘 轉狀構件4將導電性接 319523 19 200821584 : 料，棒狀構件4之垂直於長度方向的❹形狀，並 :於形狀’例如可為多角形或是正方形等，亦可 為0形。此外，固接用孔部32 .4的剖面形狀而改變。⑽㈣狀當然可對應棒狀構件 =具有以上構成之導電性接觸器㈣具3的上方，將 用以確保與生成並輸出檢查用信號之信 、 電性連接之電路基板1〇〇予以 拉电之間的 聚西荒㈣Μ玲“々^ " 電路基板100係於由 ，相組成之W狀的基材之— 組成之複數條配線及連接用電極而成。於 路基板100時，以使電路基板 、又 2的第1接觸部21接觸之方式進=極=性接觸器 性接觸哭固拉且q炎 、’藉由以與導電 牧哪的囚符具3，將電路基板 、， 使用螺”的扣緊手段(未圖示)予以固定。：=持二 個導電性接觸器2施加有起因於作用 ^為，於各 力之荷重（初始荷重），而使 身之重力以外的 縮。 ）而使各個舞性部23於長度方向收 接下來說明導電性接觸哭單 的接觸形態。於進行檢查時，係藉由預Y —對象_之間 示）使液晶面板等的檢查對象讓第段（未圖 Q接觸，並上升至預定位置為止。由：=指的前端 端Q，如上述從第！接觸部21的前端、二2接：部22的前 △1，因此於與檢杳對象2 x方向僅偏移 力矩。亦即，於彈性部231 縮使.部=2係產生 A遂離棒狀構件 319523 20 200821584 4後‘包性接觸态2於第5圖中，於順時針方向僅旋轉 、 微小角度。 , 藉由上述方疋轉’第2接觸部22的前端。，於檢查對象 令表面上邊持績接觸狀態，一邊於檢查對象2〇〇上 到抓私動一如此’第2接觸部22的前端於檢查對象2⑽ 去除形成於檢查對象2〇0的表面的氧化膜以 尸浐：的之巧垢’因此可於與檢查對象200之間獲 付疋的電性接觸。此卑 ) 此守右適當的控制檢查對象200的 :心1上Λ速度)，則可防止第2接觸部22的前端大幅 過。、 〇〇的表面’且不須對導電性接觸器2施加 於使檢查對象200盥第2接鈣都99 23係因荷重所造成…接觸。”2接觸時，彈性部 中，，由將直綠生彈性變形。於本實施形態 甲猎由將直線部23a-i(i = 1、2...... ^ 部23b-j(j = i、2..... u、 — 線從七及彎曲 查對象200盥第？ 11料徑L設定如上述，於使檢 5的應力分布達Γ部22接觸並施加荷重時，使彈性部 情形。㈣緩和應力集中於特定處之 ^…果為’因降低施加於彈性 提升對於反覆應力之導電性接觸器外而I 而亦可抑制第2接觸部 就： 、 J徒升導電性接觸器2的耐久性。 入於、η:明之導電性接觸器單元1’係以將一邻八山 入於〉口者導電姓4：±總tm。 口丨刀敗 十电性接觸恣2的彈性部23的伸 1導引溝31a及第2導㈣Qlu 申鈿方向延伸之第 ¥引溝仙之狀態，將導電性接觸器2 319523 21 200821584 •=持。因此可防止形成為板狀之導電性接觸器 •.別具有之彈性部23收縮時的挫曲及扭曲之問題的產生，而 避免起因於這些挫曲及扭曲而導致彈性部23的彈菩特性 之惡化。因此，即使於適當的範圍内對導電性接觸器 ::定以上的荷重，亦不會產生挫曲及扭曲而能夠實“ JMT程’因此於與檢查縣之間可獲得期望 狀您。 此外，，導電性接觸器單幻中，係構成為以第！導 ;31a及弟2導引溝31b而保持導電性接觸 :降低導電性接卿2與導電性接觸㈣持具 t :::並減少滑動阻力，而平順進行導電一 =^導電性接觸器單幻之第丨導引溝及第2 ‘引溝31 b的溝赏戶=「w)，可*兔Λ、音 ^ ^ ^ ,. 、又（）為兵V電性接觸器2的板厚相 的各間隔，只要為可充分確保鄰接之導電性接 觸:；：間的絕緣性，則可為任意之較小的值。因此4 複數個V電性接觸器2的配列間隔予以窄 於電路基板100或檢查對I 2 充刀對應 端子之配列間隔的窄:。 斤，、有之連接用的電極或 4心電性接觸器單元1中，係藉由使棒狀構件 4貝通—电性接觸器2，將初始 並防止鬆脫。結果為，可植小第:二予至導電性接觸器2 即導電性接觸器2的下端從導電：前3端" 思注接觸态固持具3的底面 319523 22 200821584 -部3d往垂直下方突出之突出旦h。她上 .接觸部22,亦可防止該前端:近的扭第2 :=:=2於下端部附近二：：並 位置精準度，提升導電性接觸果器為;^之導了":生声接觸器2的 此外，於組裝導電性接二二1之可λ度及耐久性。 2收納於保持部31之製程 妾觸态 f入於保持部31 _㈣後1接觸部21側插 f第1導引溝3U及第2導;=方向的峨部嵌入於 因此，可择彳曰& 、 而藉此元成此製程。 裝，並降低製造成本之效果。 易k仃組 根據以上所說明之本發 具備:與用以輸出檢查用的信號 觸部;具有於舆長度方向正交之第1接 延伸之複數個直線部、及將鄰接的= e曲為函弧狀之複數個彎曲部，且可於 伸縮之彈性部；及盥檢杳 、長度方向自由 部之寬戶方〜 象之前端’係較上述彈性 心==端部更突出於從上述彈性部之寬度方 中，於上述^2龍向之♦ 2接觸部；上述複數個彎曲部 徑，係她…二 考曲之上述彎曲部的外 個彎曲部中，於盥 幻忍j、，上述複數 曲之述弟2接觸部突出的一側為相反側彎 ^弓曲邛的外徑，係愈接 端則愈大，藉此可裎徂一盘 上玫弟2接觸部的刖 ，、種，可對應於配列間隔的窄化並 319523 23 200821584 具有較U耐久性，並且能 對象的接觸狀況之導電性接觸視方式硯察與檢查 此外，詩^ 電性接觸器單元。 直線使構成彈性部之複數個 曲部的外徑產生如上述的傾斜變化之方 荷重护之彈L料電性接觸器接觸於檢查對象並施加 隼中：二=應力分布可達到均一，而能夠防止應力 ;==:施加於彈性部之最大應力值。因此， 減少力的導電性接觸器之耐久性，此外藉由 接觸部的前端部之變形，故在此觀 ”、、 ¥電{±接觸器的耐久性提升。 (罘2接觸邠）較導電性接觸器固 向往更外側突出，因此於檢查時，操作 ΓΓ單元的斜向上方，以目視或顯微鏡進行觀 邊確料電性接觸器的前端與檢查 ==有；，一邊進行檢查操作。藉此，操作人員不 :、、文勢^夠硯察導電性接觸器與檢查對象之間的接 兄口此可更進一步提升檢查的操作性及可靠度，並 且可降低操作人員的負擔。 。。弟6圖係顯示本實施形態的__項變形例之導電性接觸 裔的構成之圖式。笫β同ό _ 咏Λ 弟6圖所不之導電性接觸器5係具備： 二接觸部51 ;第2接觸部52;彈性部53’·第1連接部 二及具有開口部55之第2連接部56。第2接觸部52係 乂昂2連接部56之寬度方向的邊緣端部（及彈性部53之寬 319523 24 200821584 :=:=:部)更突出於從彈性部53之寬度方向的中 部，係：=:彈性部53之寬度方向的邊緣端 緣端，m 4的邊緣端部或第2接觸部56的邊 避。彈”η生部53之寬度方向的中心軸之方向退 有直二二 接觸器2的彈性部23相同，係具 n+1 :53a~1(1 = 1、2、…、η)及彎曲部 53b-J(J = 1、2、…、 2、、^成為蛇行為3字狀之形狀，直線部53a-i(1=1 外二、n)的線徑剛曲輸-㈣、2、…、n+1)的 j及線徑Tk，係設定為與上述實施形態相同。 的一斤=，況麵示出’從於第2接觸部52突出 。卩54之見度方向的邊緣端部之退避量為 :第另i:方接面：與第2接觸部52突出的一侧输 :丄連，54之寬度方向的邊緣端部之 ;二54:^ 彳見度或弟2連接部56的寬度小ri+n。退避量 ]二：須較導電性接觸器固持具3的溝深度之值d為 帝㈣觸^有如此構成之導電性接刻5，能夠使導 不相算。：：1 外，退避量n及r2可為相等或 、 卜’虽中之一的退避量可為0。 5主：二藉！使彈性部53的至少一部分往導電性接觸器 的方向退避，於以導電性接觸器固持具3 ' it真5 納而進行檢查時’可減少彈性部 的"緣端部接觸於第1導引溝31a或第2導引溝⑽的 319523 25 200821584 底部，而能夠降低彈性部53與各個 棒。钍杲A —引，冓底部之間的摩 “果為，可抑制於施加荷重時之彈性部 具備確實的原點回歸能力。此外， 卡^ ，亚 持具3之間的滑動 匕、泠電性接觸器固 之檢查荷重值的變動而達到穩定化。 妾觸°。 利前為止係詳細敛述用以實施本發明之最佳形離， „不應僅限定於上述一項實施形態。例 明之導電性接觸器單元，除了對液晶面板進行檢杳之外 2適用於對搭載有半導體晶片之封裝基板或晶圓等級檢 一中所使用之咼密度導電性接觸器單元。 如此，本發明係可包含在此所未記載的種種實施形態 二’且在不脫離以申請專利範圍所特定出之技術性思想的 乾圍内，可進行種種的設計變更等。 [產業利用可能性] 一如上所述，本發明之導電性接觸器及導電性接觸器單 几，於進行液晶面板或半導體積體電路等電子元件的導通 狀態檢查及動作特性檢查時，乃極為有用。 【圖式簡單說明】 第1圖係顯示本發明一實施形態之導電性接觸器單元 的構成立體圖。 第2圖係顯示本發明一實施形態之導電性接觸器 成圖。 苐3圖係顯示用以說明彎曲部之外徑的設定例圖。 第4圖係顯示導電性接觸器固持具的上面部之部分放 319523 26 200821584 大立體圖。 弟5圖係顯示本發明一實施形態之導電性接觸器單元 的内部構成圖。 第6圖係顯示本發明一實施形態的變形例之 觸器的構成圖。 【主要元件符號說明】 3b 3d 5 22 導電性接觸 器單元 2 導電彳生接觸 導電性接觸 器固持具3a Ji面咅p 侧面部 3c 側面部 底面部 4 棒狀構件 導電性接觸 器 21 弟1接觸部 第2接觸部 23 彈性部 、23a-2、··· 、23a〜（k—i)、 2 3 a - k、· · ·、2 <： 直線部 、53a-i 、23b-2 、 23b-3 、 23b-4 、， …、23b-k、23 、23b-(n+1) 、53b-j 彎曲部 第1連接部 25 開口部 第2連接部 31 保持部 第1導引溝 31b 第2導引溝 固接用孔部 51 弟1接觸部 第2接觸部 53 彈性部 第1連接部 55 開口部 第2連接部 100 電路基板 固定構件 200 檢查對象 24 26 31a 32 52 54 56 101 319523 27 200821584 :h、5i突出量 b 直線（基準直線） • L2、Ls直線（第2直線） P、Q 前端 • η、Γ2退避量 f Rl、R2、R3、R4、…、R j …、Rn、Rn + l 外控 ti、tk、Tj、Tk、Tn-l 線徑 Δΐ 補償量C =:: _ small = the contact opening 25 having the opening portion 25 can be easily processed when the fixing hole portion 32 is formed. β In view of the rod-shaped structure, the entire conductive contact of the support wheel is used: 2=4 is preferable, the rigidity is high, and even if the load is applied, the large deflection is not made and the conductive contactor 2 is The sliding resistance between the = = 邑 material formed. Thereby, when the load is applied, the two: 2: 2: action can be made smooth. Therefore, the rod-shaped member 4 can be reduced in a conductive shape 319523 19 200821584: the shape of the rod-shaped member 4 perpendicular to the longitudinal direction, and the shape ' can be, for example, a polygon or a square. It can also be 0-shaped. Further, the cross-sectional shape of the fixing hole portion 32. 4 is changed. (4) The shape of (4) can of course correspond to the rod-shaped member = the upper side of the conductive contactor (4) having the above configuration, and the circuit board 1 for ensuring the signal and the electrical connection to generate and output the inspection signal is electrically charged. In the case of the circuit board 100, the circuit board 100 is formed by a plurality of wirings and connecting electrodes composed of a W-shaped substrate composed of phases. The substrate and the first contact portion 21 of the two contacts are in contact with each other. The pole is in contact with the sexual contact, and the snail is used. The fastening means (not shown) are fixed. := The two conductive contactors 2 are applied with a load due to the action of each force (initial load), and the contraction of the body is not limited. The respective dance portions 23 are received in the longitudinal direction. Next, the contact form of the conductive contact crying list will be described. When the inspection is performed, the inspection object such as the liquid crystal panel is brought to the first stage by the pre-Y-object_show (the Q-contact is not shown and rises to the predetermined position. By: = the front end Q of the finger, such as Since the front end of the second contact portion 21 and the front portion Δ1 of the second portion 22 are offset from each other in the direction of the inspection target 2 x, that is, the elastic portion 231 is contracted. A 遂 棒 319 319 523 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 The inspection object 2 is placed on the surface of the inspection object 2 to remove the oxide film formed on the surface of the inspection object 2 to the inspection object 2 (10). It is possible to prevent the electrical contact between the object to be inspected by the corpse of the corpse. Therefore, it is possible to prevent the right side of the control object 200 from being controlled by the right side. The front end of the second contact portion 22 is greatly passed. The surface of the crucible is not required to be applied to the conductive contactor 2 so that the second object of the inspection object 200 and the second calcium is caused by the load. "In the case of contact, the elastic portion is elastically deformed by the straight green. In the present embodiment, the straight portion 23a-i (i = 1, 2, ..., part 23b-j (j) = i, 2..... u, — Line from seven and the curved object 200盥第11 The material diameter L is set as described above, so that when the stress distribution of the test 5 reaches the contact portion 22 and the load is applied, the elasticity is made. (4) The relaxation stress is concentrated at a specific place. The result is 'because the reduction is applied to the elastic lift to the outer surface of the conductive contactor for the reverse stress, and the second contact portion can also be suppressed: J, J lift conductive contact Durability of the device 2. Into, η: Ming conductive contactor unit 1' is to enter a neighboring eight mountain into the mouth of the person's conductivity name 4: ± total tm. The mouth knife loses ten electrical contact 恣 2 The state of the first guide groove 31a of the elastic portion 23 and the second guide (4) extending in the direction of the Qlu application direction, the conductive contactor 2 319523 21 200821584 •= is held, thereby preventing the formation of a plate-like conductive Sexual contactor • Do not have the problem of buckling and distortion when the elastic portion 23 contracts, and avoid the elasticity caused by these buckling and distortion The deterioration of the elastic properties of the 23rd. Therefore, even within the appropriate range, the conductive contactor: the above load does not cause buckling and distortion, and can be "JMT" so between the inspection county In addition, the conductive contactor is configured to maintain the conductive contact with the guide guide 31a and the guide groove 31b of the younger brother 2: reduce the conductive contact 2 and the conductive contact (4) Hold t ::: and reduce the sliding resistance, and smooth the conductive one = ^ conductive contactor single illusion of the third guiding groove and the second 'leading groove 31 b of the ditch household = "w), can * rabbit Λ, sound ^ ^ ^ , . , and () are the intervals of the plate thickness phase of the V electrical contactor 2, as long as the insulation between the adjacent conductive contacts can be sufficiently ensured: The smaller value is. Therefore, the arrangement interval of the plurality of V electrical contactors 2 is narrower than that of the circuit substrate 100 or the arrangement interval of the corresponding terminals of the I 2 filling tool: jin, the electrode for connection or In the electrocardiographic contactor unit 1, the initial prevention is achieved by making the rod member 4 the electrical contactor 2 The result is that the plantable small: two to the conductive contactor 2, that is, the lower end of the conductive contactor 2 is electrically conductive: the front three ends " the bottom surface of the contact state retainer 3 319523 22 200821584 - part 3d The protrusion is highlighted vertically downward. The upper part of the contact portion 22 can also prevent the front end: the near twist 2:=:=2 near the lower end of the second:: and the position accuracy, enhance the conductive contact fruit In addition, the "acoustic contactor 2" is provided with the λ degree and durability of the assembly of the conductive connection 22. The process of the storage unit 31 is in the holding portion 31. _(d) The rear contact portion 21 is inserted into the first guide groove 3U and the second guide, and the dam portion in the = direction is embedded. Therefore, the process can be selected by 彳曰 & Install and reduce the cost of manufacturing. According to the present invention described above, the present invention includes: a signal contact portion for outputting an inspection; a plurality of linear portions having a first extension extending orthogonal to the longitudinal direction of the crucible, and an adjacent e-curve a plurality of curved portions of the arc shape, and can be elasticized at the elastic portion; and the width of the free portion of the longitudinal direction of the 杳, the front end is more prominent than the elastic portion == end portion from the above elastic In the width of the portion, in the above-mentioned ^2 dragon direction ♦ 2 contact portion; the plurality of curved portion diameters are in the outer curved portion of the curved portion of the second test piece, in the above-mentioned bending portion, The side on which the contact portion of the plurality of songs is protruded is the outer diameter of the opposite side of the curved bow, and the larger the end of the joint, the larger the contact end, which can be used to pick up the ridge of the contact portion of the meidi 2 It can correspond to the narrowing of the arrangement interval and 319523 23 200821584. It has a U-durability and can be inspected and inspected by the conductive contact mode of the contact state of the object. The straight line causes the outer diameter of the plurality of curved portions constituting the elastic portion to generate the tilting change of the elastic load of the elastic material as described above, and contacts the object to be inspected and applies the crucible: the second = the stress distribution can be uniform, and Prevent stress; ==: Maximum stress applied to the elastic portion. Therefore, the durability of the conductive contactor with reduced force is further deformed by the tip end portion of the contact portion. Therefore, the durability of the contactor is improved. (罘2 contact 邠) is more conductive. The contactor is fixed to the outside to protrude further. Therefore, during the inspection, the ΓΓ unit is operated obliquely upward, and the front end of the electrical contactor is checked by visual or microscopic observation and the inspection is performed. Therefore, the operator does not:, the situation is sufficient to observe the connection between the conductive contactor and the inspection object, which can further improve the operability and reliability of the inspection, and can reduce the burden on the operator. Fig. 6 is a view showing a configuration of a conductive contact person according to a modification of the __ item of the present embodiment. The conductive contactor 5 of the 笫β ό 咏Λ 咏Λ 6 图 图 具备 具备 具备 具备 具备 具备 具备 具备 二 二 二 二 二 二 二 二 二 二 二The second contact portion 52, the elastic portion 53', the first connecting portion 2, and the second connecting portion 56 having the opening portion 55. The second contact portion 52 is an edge end portion of the connecting portion 56 in the width direction of the connecting portion 56 (and The width of the elastic portion 53 is 319523 24 200821584 :=:=: part) is more prominent in the The middle portion in the width direction of the elastic portion 53 is: = the edge end edge of the elastic portion 53 in the width direction, the edge end portion of the m 4 or the edge of the second contact portion 56. The width direction of the "negative portion 53" The direction of the central axis is the same as that of the elastic portion 23 of the straight two-contactor 2, and the tie n+1: 53a~1 (1 = 1, 2, ..., η) and the curved portion 53b-J (J = 1, 2,..., 2, and ^ become the shape of the snake's 3-character shape, and the line of the straight line 53a-i (1 = 1 outer 2, n) is the curve of the curve - (4), 2, ..., n+1) The wire diameter Tk is set to be the same as that of the above embodiment. One kilogram = the conditional surface shows 'from the second contact portion 52. The amount of retraction of the edge end portion of the 卩54 visibility direction is: the other i: the square joint surface: the side that protrudes from the second contact portion 52: the ridge, the edge end portion of the width direction of 54; :^ The visibility or the width of the brother 2 connecting portion 56 is small ri+n. The amount of retreat is as follows: The value d of the groove depth of the holder 3 of the conductive contactor is required to be the conductive connection 5 of the structure (4), which can make the conduction unconformable. Outside of ::1, the amount of retreat n and r2 may be equal or , and the amount of retreat may be zero. 5 Lord: Two borrowed! At least a part of the elastic portion 53 is retracted in the direction of the conductive contactor, and when the conductive contactor holding device 3' it is 5 nanometers is inspected, the edge portion of the elastic portion can be reduced to contact the first guide. The bottom portion of the groove 31a or the second guide groove (10) is 319523 25 200821584, and the elastic portion 53 and each rod can be lowered.钍杲A—Induction, the friction between the bottoms of the crucibles is such that it can suppress the elastic portion of the crucible when it is applied with a reliable origin returning ability. In addition, the sliding between the card and the sub-holding device 3 The contactor is fixed to check the fluctuation of the load value to achieve stabilization. The above is a detailed description of the optimum separation for carrying out the invention, and should not be limited to only one embodiment. The conductive contactor unit exemplified is applicable to a germanium-density conductive contactor unit used for a package substrate or wafer level test on which a semiconductor wafer is mounted, in addition to inspection of a liquid crystal panel. As described above, the present invention can include various embodiments that are not described herein, and various design changes and the like can be made without departing from the technical scope of the technical idea specified by the patent application. [Industrial Applicability] As described above, the conductive contactor and the conductive contactor of the present invention are extremely excellent in performing on-state inspection and operational characteristic inspection of electronic components such as a liquid crystal panel or a semiconductor integrated circuit. it works. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the configuration of a conductive contact unit according to an embodiment of the present invention. Fig. 2 is a view showing a conductive contactor according to an embodiment of the present invention. The 苐3 diagram shows a setting example for explaining the outer diameter of the curved portion. Figure 4 shows the portion of the upper face of the conductive contactor holder. 319523 26 200821584 Large perspective view. Fig. 5 is a view showing the internal configuration of a conductive contact unit according to an embodiment of the present invention. Fig. 6 is a view showing the configuration of a contactor according to a modification of the embodiment of the present invention. [Main component symbol description] 3b 3d 5 22 Conductive contactor unit 2 Conductive twin contact conductive contactor holder 3a Ji face 咅 p side portion 3c side portion bottom portion 4 rod member conductive contactor 21 brother 1 contact Second contact portion 23 elastic portion, 23a-2, . . . , 23a to (k-i), 2 3 a - k, · · ·, 2 <: straight portion, 53a-i, 23b-2, 23b-3, 23b-4, ..., 23b-k, 23, 23b-(n+1), 53b-j, bending portion, first connecting portion 25, opening portion, second connecting portion 31, holding portion, first guiding groove 31b Second guide groove fixing hole portion 51 Younger contact portion Second contact portion 53 Elastic portion First connection portion 55 Opening portion Second connection portion 100 Circuit board fixing member 200 Inspection object 24 26 31a 32 52 54 56 101 319523 27 200821584 :h, 5i protrusion amount b straight line (reference line) • L2, Ls line (second line) P, Q front end • η, Γ2 backoff amount f Rl, R2, R3, R4, ..., R j ..., Rn , Rn + l external control ti, tk, Tj, Tk, Tn-l wire diameter Δΐ compensation amount
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