TW200742946A - Auto purge bubble liquid transportation apparatus of semiconductor equipment - Google Patents
Auto purge bubble liquid transportation apparatus of semiconductor equipmentInfo
- Publication number
- TW200742946A TW200742946A TW095115544A TW95115544A TW200742946A TW 200742946 A TW200742946 A TW 200742946A TW 095115544 A TW095115544 A TW 095115544A TW 95115544 A TW95115544 A TW 95115544A TW 200742946 A TW200742946 A TW 200742946A
- Authority
- TW
- Taiwan
- Prior art keywords
- pipe
- inlet
- purge
- outlet
- semiconductor equipment
- Prior art date
Links
Landscapes
- Pipeline Systems (AREA)
Abstract
An auto purge bubble liquid transportation apparatus of semiconductor equipment including a transportation unit, an inlet pipe, an outlet pipe, a drain pipe, a purge pipe, a detector and a vale is provided. The inlet pipe, the outlet pipe and the purge pipe are communicated with the transportation unit respectively. Additionally, the purge pipe has an inlet and an outlet. The inlet is communicated with the transportation unit, and the inlet pipe is communicated with the purge pipe and located between the inlet and the outlet thereof. Moreover, the detector is disposed on the purge pipe, and located between the inlet and the joint of the inlet pipe and the purge pipe. The valve mentioned is located at the outlet of the purge pipe and electrically connected to the detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095115544A TW200742946A (en) | 2006-05-02 | 2006-05-02 | Auto purge bubble liquid transportation apparatus of semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095115544A TW200742946A (en) | 2006-05-02 | 2006-05-02 | Auto purge bubble liquid transportation apparatus of semiconductor equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200742946A true TW200742946A (en) | 2007-11-16 |
Family
ID=57914214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095115544A TW200742946A (en) | 2006-05-02 | 2006-05-02 | Auto purge bubble liquid transportation apparatus of semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200742946A (en) |
-
2006
- 2006-05-02 TW TW095115544A patent/TW200742946A/en unknown
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