TW200741209A - Electrical contact device and electrical test apparatus for the testing of an electrical test specimen - Google Patents

Electrical contact device and electrical test apparatus for the testing of an electrical test specimen

Info

Publication number
TW200741209A
TW200741209A TW095144841A TW95144841A TW200741209A TW 200741209 A TW200741209 A TW 200741209A TW 095144841 A TW095144841 A TW 095144841A TW 95144841 A TW95144841 A TW 95144841A TW 200741209 A TW200741209 A TW 200741209A
Authority
TW
Taiwan
Prior art keywords
electrical
contact device
electrical test
testing
test specimen
Prior art date
Application number
TW095144841A
Other languages
English (en)
Inventor
Gunther Boehm
Original Assignee
Feinmetall Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinmetall Gmbh filed Critical Feinmetall Gmbh
Publication of TW200741209A publication Critical patent/TW200741209A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
TW095144841A 2005-12-05 2006-12-01 Electrical contact device and electrical test apparatus for the testing of an electrical test specimen TW200741209A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005058762 2005-12-05
DE102006054735A DE102006054735A1 (de) 2005-12-05 2006-11-21 Elektrische Kontakteinrichtung und elektrische Prüfvorrichtung für die Prüfung eines elektrischen Prüflings

Publications (1)

Publication Number Publication Date
TW200741209A true TW200741209A (en) 2007-11-01

Family

ID=37908029

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095144841A TW200741209A (en) 2005-12-05 2006-12-01 Electrical contact device and electrical test apparatus for the testing of an electrical test specimen

Country Status (5)

Country Link
US (1) US20070128075A1 (zh)
EP (1) EP1793232A2 (zh)
JP (1) JP2007155735A (zh)
DE (1) DE102006054735A1 (zh)
TW (1) TW200741209A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109839544A (zh) * 2017-11-28 2019-06-04 台湾福雷电子股份有限公司 测试装置、测试***及测试方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008034918B4 (de) * 2008-07-26 2012-09-27 Feinmetall Gmbh Elektrische Prüfeinrichtung für die Prüfung eines elektrischen Prüflings sowie elektrisches Prüfverfahren
DE202009014987U1 (de) * 2009-10-28 2010-02-18 Feinmetall Gmbh Prüfvorrichtung zur elektrischen Prüfung von elektrischen Prüflingen
US9134357B1 (en) * 2011-03-25 2015-09-15 Maxim Integrated, Inc. Universal direct docking at probe test
DE202018100710U1 (de) * 2018-02-08 2018-02-15 Feinmetall Gmbh Elektrische Berührungskontaktiervorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806801A (en) * 1972-12-26 1974-04-23 Ibm Probe contactor having buckling beam probes
US3911361A (en) * 1974-06-28 1975-10-07 Ibm Coaxial array space transformer
US4038599A (en) * 1974-12-30 1977-07-26 International Business Machines Corporation High density wafer contacting and test system
JPS59138345A (ja) * 1983-01-27 1984-08-08 Rohm Co Ltd プロ−ブカ−ド
JPH0338833Y2 (zh) * 1985-12-04 1991-08-15
DE3903060A1 (de) * 1989-02-02 1990-08-09 Minnesota Mining & Mfg Vorrichtung zum pruefen von integrierten schaltungsanordnungen
JP2681619B2 (ja) * 1995-02-20 1997-11-26 東京エレクトロン株式会社 プローブ装置
US5656943A (en) * 1995-10-30 1997-08-12 Motorola, Inc. Apparatus for forming a test stack for semiconductor wafer probing and method for using the same
JP2004205487A (ja) * 2002-11-01 2004-07-22 Tokyo Electron Ltd プローブカードの固定機構
DE102004023987B4 (de) * 2004-05-14 2008-06-19 Feinmetall Gmbh Elektrische Prüfeinrichtung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109839544A (zh) * 2017-11-28 2019-06-04 台湾福雷电子股份有限公司 测试装置、测试***及测试方法

Also Published As

Publication number Publication date
JP2007155735A (ja) 2007-06-21
DE102006054735A1 (de) 2007-06-06
US20070128075A1 (en) 2007-06-07
EP1793232A2 (de) 2007-06-06

Similar Documents

Publication Publication Date Title
DE60315813D1 (de) Vorrichtung für eine schnittstelle zwischen elektronischen gehäusen und testgeräten
TW200606435A (en) Probe card
TW200801531A (en) Prober for electronic device testing on large area substrates
TW200642027A (en) Probe assembly, method of producing it and electrical connecting apparatus
TW201129814A (en) Electrical connecting apparatus and testing system using the same
DE202005000983U1 (de) Koordinatenmessgerät mit einer Pinole und einem Tastkopf
WO2007008790A3 (en) Probe card assembly with an interchangeable probe insert
EP1627235A4 (en) PROBE FOR TESTING A BLOCK TO BE TESTED
EP1965422A4 (en) PRINTED CIRCUIT BOARD APPARATUS FOR WAFER INSPECTION, PROBE CARD AND PLATE INSPECTION APPARATUS
TW200741209A (en) Electrical contact device and electrical test apparatus for the testing of an electrical test specimen
TW200736635A (en) Electrical test apparatus for the testing of an electrical test specimen and corresponding method
EP1717590A4 (en) CONTACT PIN, PROBE CARD USING SAME AND ELECTRONIC DEVICE TESTING APPARATUS
TW200730829A (en) Finger tester for the testing of non-componented printed circuit boards and method of testing non-componented printed circuit boards with a finger tester
EP1901356A4 (en) TEST CIRCUIT, WAFER, MEASURING DEVICE, COMPONENT MANUFACTURING METHOD AND DISPLAY EQUIPMENT
TW200619655A (en) Improved printed circuit board development cycle using probe location automation and bead probe technology
HK1175530A1 (zh) 用於對測試元件上的試樣進行分析的分析儀器
TW200741222A (en) Graphical presentation of semiconductor test results
WO2011032012A3 (en) Electrical terminal test point and methods of use
TW200605969A (en) Self-cleaning lower contact
TW200710411A (en) Method and apparatus for electrical testing of a unit under test, as well as a method for production of a contact-making apparatus which is used for testing
TW200721338A (en) Probe apparatus and system
ATE473451T1 (de) Prüfstand zum prüfen des kriechstroms durch das isoliergehäuse von leistungselektronischen bauteilen und entsprechendes verfahren
TW200717001A (en) Contact-making apparatus
TW200710404A (en) Testing device
GB2429301B (en) Testing loop impedence in an RCCB electrical test circuit