TW200741209A - Electrical contact device and electrical test apparatus for the testing of an electrical test specimen - Google Patents
Electrical contact device and electrical test apparatus for the testing of an electrical test specimenInfo
- Publication number
- TW200741209A TW200741209A TW095144841A TW95144841A TW200741209A TW 200741209 A TW200741209 A TW 200741209A TW 095144841 A TW095144841 A TW 095144841A TW 95144841 A TW95144841 A TW 95144841A TW 200741209 A TW200741209 A TW 200741209A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrical
- contact device
- electrical test
- testing
- test specimen
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005058762 | 2005-12-05 | ||
DE102006054735A DE102006054735A1 (de) | 2005-12-05 | 2006-11-21 | Elektrische Kontakteinrichtung und elektrische Prüfvorrichtung für die Prüfung eines elektrischen Prüflings |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200741209A true TW200741209A (en) | 2007-11-01 |
Family
ID=37908029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095144841A TW200741209A (en) | 2005-12-05 | 2006-12-01 | Electrical contact device and electrical test apparatus for the testing of an electrical test specimen |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070128075A1 (zh) |
EP (1) | EP1793232A2 (zh) |
JP (1) | JP2007155735A (zh) |
DE (1) | DE102006054735A1 (zh) |
TW (1) | TW200741209A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109839544A (zh) * | 2017-11-28 | 2019-06-04 | 台湾福雷电子股份有限公司 | 测试装置、测试***及测试方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008034918B4 (de) * | 2008-07-26 | 2012-09-27 | Feinmetall Gmbh | Elektrische Prüfeinrichtung für die Prüfung eines elektrischen Prüflings sowie elektrisches Prüfverfahren |
DE202009014987U1 (de) * | 2009-10-28 | 2010-02-18 | Feinmetall Gmbh | Prüfvorrichtung zur elektrischen Prüfung von elektrischen Prüflingen |
US9134357B1 (en) * | 2011-03-25 | 2015-09-15 | Maxim Integrated, Inc. | Universal direct docking at probe test |
DE202018100710U1 (de) * | 2018-02-08 | 2018-02-15 | Feinmetall Gmbh | Elektrische Berührungskontaktiervorrichtung |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3806801A (en) * | 1972-12-26 | 1974-04-23 | Ibm | Probe contactor having buckling beam probes |
US3911361A (en) * | 1974-06-28 | 1975-10-07 | Ibm | Coaxial array space transformer |
US4038599A (en) * | 1974-12-30 | 1977-07-26 | International Business Machines Corporation | High density wafer contacting and test system |
JPS59138345A (ja) * | 1983-01-27 | 1984-08-08 | Rohm Co Ltd | プロ−ブカ−ド |
JPH0338833Y2 (zh) * | 1985-12-04 | 1991-08-15 | ||
DE3903060A1 (de) * | 1989-02-02 | 1990-08-09 | Minnesota Mining & Mfg | Vorrichtung zum pruefen von integrierten schaltungsanordnungen |
JP2681619B2 (ja) * | 1995-02-20 | 1997-11-26 | 東京エレクトロン株式会社 | プローブ装置 |
US5656943A (en) * | 1995-10-30 | 1997-08-12 | Motorola, Inc. | Apparatus for forming a test stack for semiconductor wafer probing and method for using the same |
JP2004205487A (ja) * | 2002-11-01 | 2004-07-22 | Tokyo Electron Ltd | プローブカードの固定機構 |
DE102004023987B4 (de) * | 2004-05-14 | 2008-06-19 | Feinmetall Gmbh | Elektrische Prüfeinrichtung |
-
2006
- 2006-11-21 DE DE102006054735A patent/DE102006054735A1/de not_active Ceased
- 2006-12-01 EP EP06024900A patent/EP1793232A2/de not_active Withdrawn
- 2006-12-01 TW TW095144841A patent/TW200741209A/zh unknown
- 2006-12-05 US US11/566,908 patent/US20070128075A1/en not_active Abandoned
- 2006-12-05 JP JP2006328170A patent/JP2007155735A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109839544A (zh) * | 2017-11-28 | 2019-06-04 | 台湾福雷电子股份有限公司 | 测试装置、测试***及测试方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2007155735A (ja) | 2007-06-21 |
DE102006054735A1 (de) | 2007-06-06 |
US20070128075A1 (en) | 2007-06-07 |
EP1793232A2 (de) | 2007-06-06 |
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