TW200728008A - Surface processing method using electron beam and surface processing apparatus using electron beam - Google Patents

Surface processing method using electron beam and surface processing apparatus using electron beam

Info

Publication number
TW200728008A
TW200728008A TW095102774A TW95102774A TW200728008A TW 200728008 A TW200728008 A TW 200728008A TW 095102774 A TW095102774 A TW 095102774A TW 95102774 A TW95102774 A TW 95102774A TW 200728008 A TW200728008 A TW 200728008A
Authority
TW
Taiwan
Prior art keywords
electron beam
surface processing
processed
area
processing apparatus
Prior art date
Application number
TW095102774A
Other languages
Chinese (zh)
Other versions
TWI277475B (en
Inventor
Tetuya Fujimoto
Yosihiro Yamamoto
Masahiro Hanai
Yoshihito Imai
Takayuki Nakagawa
Syozui Takeno
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2006/300601 external-priority patent/WO2007083363A1/en
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of TWI277475B publication Critical patent/TWI277475B/en
Publication of TW200728008A publication Critical patent/TW200728008A/en

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  • Welding Or Cutting Using Electron Beams (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

Provided is a surface processing method using electron beam and surface processing apparatus using electron beam capable of finishing a surface of an object to be processed to attain a surface roughness of about 1 μm within relatively short time, as well as capable of uniformly finishing whole objective area to be processed required for surface processing. In a case that surface processing is performed by irradiating an electron beam on a surface of an object (W) to be processed so as to melt and solidify a surface layer of the object, area information, which regulates an objective area to be processed where surface processing of the object (W) is performed, is in advance registered in a processed object information memory. Then, the electron beam is two-dimensionally scanned based on this area information so that the electron beam is traced along a winding line within the objective area to be processed of the object (W).
TW095102774A 2004-07-27 2006-01-25 Surface processing method using electron beam and surface processing apparatus using electron beam TWI277475B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004218401A JP4177300B2 (en) 2004-07-27 2004-07-27 Electron beam surface treatment method and electron beam surface treatment apparatus
PCT/JP2006/300601 WO2007083363A1 (en) 2006-01-18 2006-01-18 Method for surface treatment with electron beam and apparatus for surface treatment with electron beam

Publications (2)

Publication Number Publication Date
TWI277475B TWI277475B (en) 2007-04-01
TW200728008A true TW200728008A (en) 2007-08-01

Family

ID=35900805

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095102774A TWI277475B (en) 2004-07-27 2006-01-25 Surface processing method using electron beam and surface processing apparatus using electron beam

Country Status (2)

Country Link
JP (1) JP4177300B2 (en)
TW (1) TWI277475B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69401959T2 (en) 1993-07-16 1997-07-31 Dolby Lab Licensing Corp COMPUTATIONALLY EFFICIENT ADAPTIVE BIT ALLOCATION FOR ENCODING METHODS AND SETUP WITH TOLERANCE FOR DECODER SPECTRAL DISTORTION
WO2007083363A1 (en) * 2006-01-18 2007-07-26 Mitsubishi Denki Kabushiki Kaisha Method for surface treatment with electron beam and apparatus for surface treatment with electron beam
WO2008062655A1 (en) * 2006-11-21 2008-05-29 Konica Minolta Opto, Inc. Mold fabrication method and projection optical system reflection mirror
JP5242936B2 (en) * 2007-04-09 2013-07-24 三菱電機株式会社 Surface treatment method and surface treatment apparatus
JP2013121623A (en) * 2013-01-22 2013-06-20 Mitsubishi Electric Corp Device and method for surface treatment with electron beam
KR101425410B1 (en) * 2013-01-29 2014-08-04 한국기계연구원 Laser Processing Device for Avoiding Oxidation Layer using Bellows
CN114103185A (en) * 2020-08-31 2022-03-01 陈惠美 Medical grade mouth and nose wearing device and skin-friendly surface modification method thereof

Also Published As

Publication number Publication date
JP4177300B2 (en) 2008-11-05
TWI277475B (en) 2007-04-01
JP2006035263A (en) 2006-02-09

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