TW200710269A - Electrostatic attraction electrode, substrate treatment device, and the manufacture method for the electrostatic attraction electrode - Google Patents
Electrostatic attraction electrode, substrate treatment device, and the manufacture method for the electrostatic attraction electrodeInfo
- Publication number
- TW200710269A TW200710269A TW095125704A TW95125704A TW200710269A TW 200710269 A TW200710269 A TW 200710269A TW 095125704 A TW095125704 A TW 095125704A TW 95125704 A TW95125704 A TW 95125704A TW 200710269 A TW200710269 A TW 200710269A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrostatic attraction
- attraction electrode
- conductive film
- melt
- film
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
This invention provides an electrostatic attraction electrode, which enables the electrode layer to be electrically connected securely, and enables a heat resistance synthetic resin film, such as a polyimide film or the like, to be employed as a part of its insulating layer at the same time. It is to apply an adhesive (101) on the substrate (41), and to adhere a laminated body that is formed of a synthetic resin film (42) and a conductive film (43) on the substrate (41). When the power supply pin (70) is fitted in place, a melt injection device (100) is used to pinpoint conductive material into the openings (42a) and (43a) so as to form a melted injection portion (45). Next, a primer (102) for the melt injection is applied onto the surface of the conductive film (43), and a melted injection device (100) is used to melt inject a ceramics made of Al2O3, or the like, to the surface of the conductive film (43) uniformly so as to insulate and cover it.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005205716A JP4542959B2 (en) | 2005-07-14 | 2005-07-14 | Electrostatic chucking electrode, substrate processing apparatus, and method of manufacturing electrostatic chucking electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200710269A true TW200710269A (en) | 2007-03-16 |
Family
ID=37609704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095125704A TW200710269A (en) | 2005-07-14 | 2006-07-13 | Electrostatic attraction electrode, substrate treatment device, and the manufacture method for the electrostatic attraction electrode |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4542959B2 (en) |
KR (1) | KR20070009448A (en) |
CN (1) | CN100407397C (en) |
TW (1) | TW200710269A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI774550B (en) * | 2020-09-08 | 2022-08-11 | 日商日本發條股份有限公司 | Stage and method of making the same |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008035395A1 (en) * | 2006-09-19 | 2008-03-27 | Creative Technology Corporation | Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck |
JP2008235735A (en) * | 2007-03-23 | 2008-10-02 | Sumitomo Precision Prod Co Ltd | Electrostatic chuck and plasma processing equipment having it |
KR101286724B1 (en) * | 2011-10-17 | 2013-07-18 | (주)제니스월드 | Electrostatic Chuck include split embossing structure |
CN104241181B (en) * | 2013-06-08 | 2018-05-29 | 中微半导体设备(上海)有限公司 | The manufacturing method of electrostatic chuck, electrostatic chuck and plasma processing apparatus |
JP6230477B2 (en) * | 2014-04-25 | 2017-11-15 | 株式会社ディスコ | Cutting equipment |
JP6560150B2 (en) * | 2016-03-28 | 2019-08-14 | 日本碍子株式会社 | Wafer mounting device |
JP7038497B2 (en) * | 2017-07-07 | 2022-03-18 | 東京エレクトロン株式会社 | Manufacturing method of electrostatic chuck |
JP7224096B2 (en) * | 2017-07-13 | 2023-02-17 | 東京エレクトロン株式会社 | Thermal spraying method for parts for plasma processing apparatus and parts for plasma processing apparatus |
JP7401266B2 (en) * | 2018-12-27 | 2023-12-19 | 東京エレクトロン株式会社 | Substrate mounting table and substrate processing equipment |
TWI813840B (en) * | 2018-12-27 | 2023-09-01 | 日商巴川製紙所股份有限公司 | Electrostatic chuck device |
WO2020172785A1 (en) | 2019-02-26 | 2020-09-03 | Yangtze Memory Technologies Co., Ltd. | Method and device for wafer taping |
JP7324677B2 (en) | 2019-10-02 | 2023-08-10 | 株式会社巴川製紙所 | ELECTROSTATIC CHUCK DEVICE AND MANUFACTURING METHOD THEREOF |
CN111455355A (en) * | 2020-04-13 | 2020-07-28 | 艾华(无锡)半导体科技有限公司 | Electrostatic assisted epitaxial growth method |
WO2024014528A1 (en) * | 2022-07-15 | 2024-01-18 | 大日本印刷株式会社 | Method for manufacturing electronic device, conductive film, first laminate, and second laminate |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5822171A (en) * | 1994-02-22 | 1998-10-13 | Applied Materials, Inc. | Electrostatic chuck with improved erosion resistance |
JPH07335732A (en) * | 1994-06-14 | 1995-12-22 | Tokyo Electron Ltd | Electrostatic chuck, plasma treatment equipment using electrostatic chuck and its manufacture |
JP2003163146A (en) * | 1999-06-09 | 2003-06-06 | Ibiden Co Ltd | Ceramic substrate for semiconductor manufacturing and inspection unit |
JP2001284328A (en) * | 2000-03-31 | 2001-10-12 | Taiheiyo Cement Corp | Ceramic part |
JP4272373B2 (en) * | 2001-12-11 | 2009-06-03 | 太平洋セメント株式会社 | Electrostatic chuck |
JP4104386B2 (en) * | 2002-06-24 | 2008-06-18 | 太平洋セメント株式会社 | Manufacturing method of electrostatic chuck |
JP4064835B2 (en) * | 2003-02-07 | 2008-03-19 | 太平洋セメント株式会社 | Electrostatic chuck and manufacturing method thereof |
US6944006B2 (en) * | 2003-04-03 | 2005-09-13 | Applied Materials, Inc. | Guard for electrostatic chuck |
JP4326874B2 (en) * | 2003-08-07 | 2009-09-09 | 太平洋セメント株式会社 | Electrostatic chuck and manufacturing method thereof |
JP4057977B2 (en) * | 2003-08-08 | 2008-03-05 | 株式会社巴川製紙所 | Electrode sheet for electrostatic chuck device, electrostatic chuck device and adsorption method |
JP4421874B2 (en) * | 2003-10-31 | 2010-02-24 | 東京エレクトロン株式会社 | Plasma processing apparatus and plasma processing method |
CN100481366C (en) * | 2003-11-14 | 2009-04-22 | 爱德牌工程有限公司 | Electrostatic chuck, substrate support, clamp and electrode structure and producing method thereof |
-
2005
- 2005-07-14 JP JP2005205716A patent/JP4542959B2/en not_active Expired - Fee Related
-
2006
- 2006-06-06 CN CN2006100879052A patent/CN100407397C/en not_active Expired - Fee Related
- 2006-07-13 KR KR1020060065963A patent/KR20070009448A/en not_active Application Discontinuation
- 2006-07-13 TW TW095125704A patent/TW200710269A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI774550B (en) * | 2020-09-08 | 2022-08-11 | 日商日本發條股份有限公司 | Stage and method of making the same |
Also Published As
Publication number | Publication date |
---|---|
KR20070009448A (en) | 2007-01-18 |
JP2007027315A (en) | 2007-02-01 |
JP4542959B2 (en) | 2010-09-15 |
CN1897243A (en) | 2007-01-17 |
CN100407397C (en) | 2008-07-30 |
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