TW200707622A - Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same - Google Patents

Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same

Info

Publication number
TW200707622A
TW200707622A TW095123411A TW95123411A TW200707622A TW 200707622 A TW200707622 A TW 200707622A TW 095123411 A TW095123411 A TW 095123411A TW 95123411 A TW95123411 A TW 95123411A TW 200707622 A TW200707622 A TW 200707622A
Authority
TW
Taiwan
Prior art keywords
translating
turning
degree
stage device
freedom
Prior art date
Application number
TW095123411A
Other languages
Chinese (zh)
Other versions
TWI302723B (en
Inventor
Takehiko Komiya
Toshiyuki Osuga
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200707622A publication Critical patent/TW200707622A/en
Application granted granted Critical
Publication of TWI302723B publication Critical patent/TWI302723B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Environmental & Geological Engineering (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

A translating/turning 2-degree-of-freedom stage device capable of finely positioning a table with respect to Y and θ And movable through a long stroke for transportation. The stage device comprises at least two sets (6a, 6b) of uniaxial driving and translating/turning mechanism formed of two translating freedom degree parts with translating freedom degrees, one turning freedom degree part with turning freedom degrees, and a motor and a uniaxial driving and translating/turning mechanism formed of a motor controller, and a second mechanism part (16) with one turning freedom degree and one translating freedom degree. Thus, the stage device can perform a translating movement in the Y-direction and a turning by an angle of θ.
TW095123411A 2005-06-30 2006-06-28 Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same TW200707622A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005192131 2005-06-30

Publications (2)

Publication Number Publication Date
TW200707622A true TW200707622A (en) 2007-02-16
TWI302723B TWI302723B (en) 2008-11-01

Family

ID=37604286

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095123411A TW200707622A (en) 2005-06-30 2006-06-28 Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same

Country Status (5)

Country Link
JP (1) JP4826584B2 (en)
KR (1) KR20080002864A (en)
CN (1) CN101203354A (en)
TW (1) TW200707622A (en)
WO (1) WO2007004413A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2465450A (en) * 2008-07-16 2010-05-26 Univ Beihang A translation and rotation feeding component of asymmetric and linear driving
CN101750885B (en) * 2010-01-06 2011-12-14 天津大学 Two-degree of freedom precise positioning work table
CN101770166B (en) * 2010-01-06 2011-12-28 天津大学 Two-translational-motion precision positioning working table for nano-imprint photoetching system
CN102998899B (en) * 2012-12-05 2014-09-17 天津大学 Two-degree-of-freedom nanometer positioning platform
KR102052135B1 (en) * 2018-04-09 2019-12-04 주식회사 에이치비테크놀러지 AOI inspection equipment that can adjust θ axis alignment of side dual gripper drive system
CN112193371A (en) * 2020-10-09 2021-01-08 九江精密测试技术研究所 Three-degree-of-freedom displacement platform for ship

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06294B2 (en) * 1986-09-03 1994-01-05 新明和工業株式会社 Positioning device
JP2675307B2 (en) * 1987-08-28 1997-11-12 株式会社日立製作所 Preliner equipment
JPH02202031A (en) * 1989-01-31 1990-08-10 Nippon Seiko Kk Turntable device
JP2523978B2 (en) * 1990-10-04 1996-08-14 松下電器産業株式会社 Positioning table
JP3607449B2 (en) * 1997-03-14 2005-01-05 株式会社東芝 Image processing alignment device
JPH11245128A (en) * 1998-02-26 1999-09-14 Thk Co Ltd Mechanism for guiding parallel movement of two shafts and turning of one shaft, and table device provided with two parallel shafts and one turning shaft using this mechanism
JPH11300558A (en) * 1998-04-15 1999-11-02 Thk Co Ltd Movable table device
JP3733808B2 (en) * 1999-10-26 2006-01-11 松下電器産業株式会社 XYθ 3-axis movement table
JP2002228411A (en) * 2001-02-05 2002-08-14 Hitachi Kokusai Electric Inc Two-dimensional measuring apparatus

Also Published As

Publication number Publication date
JPWO2007004413A1 (en) 2009-01-22
JP4826584B2 (en) 2011-11-30
KR20080002864A (en) 2008-01-04
TWI302723B (en) 2008-11-01
WO2007004413A1 (en) 2007-01-11
CN101203354A (en) 2008-06-18

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees