TW200638513A - Manufacture of non-volatile memory cell - Google Patents

Manufacture of non-volatile memory cell

Info

Publication number
TW200638513A
TW200638513A TW094112411A TW94112411A TW200638513A TW 200638513 A TW200638513 A TW 200638513A TW 094112411 A TW094112411 A TW 094112411A TW 94112411 A TW94112411 A TW 94112411A TW 200638513 A TW200638513 A TW 200638513A
Authority
TW
Taiwan
Prior art keywords
mask
stack structure
spacer
ono stack
memory cell
Prior art date
Application number
TW094112411A
Other languages
Chinese (zh)
Other versions
TWI270962B (en
Inventor
Chung-Chin Shih
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW94112411A priority Critical patent/TWI270962B/en
Publication of TW200638513A publication Critical patent/TW200638513A/en
Application granted granted Critical
Publication of TWI270962B publication Critical patent/TWI270962B/en

Links

Landscapes

  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)

Abstract

The present invention relates to a method of manufacturing a non-volatile memory cell. The method comprises forming an ONO stack structure and a mask formed on the ONO stack structure, providing a first etching process to form a first spacer surrounding the mask, removing the first spacer and the ONO stack structure without the first spacer and the ONO stack structure protection, forming an electrical connection layer between the masks, forming a second spacer surrounding the mask, removing the second spacer to form a gate and removing the mask and the ONO stack structure which is under the mask.
TW94112411A 2005-04-19 2005-04-19 Manufacture of non-volatile memory cell TWI270962B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94112411A TWI270962B (en) 2005-04-19 2005-04-19 Manufacture of non-volatile memory cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94112411A TWI270962B (en) 2005-04-19 2005-04-19 Manufacture of non-volatile memory cell

Publications (2)

Publication Number Publication Date
TW200638513A true TW200638513A (en) 2006-11-01
TWI270962B TWI270962B (en) 2007-01-11

Family

ID=38430321

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94112411A TWI270962B (en) 2005-04-19 2005-04-19 Manufacture of non-volatile memory cell

Country Status (1)

Country Link
TW (1) TWI270962B (en)

Also Published As

Publication number Publication date
TWI270962B (en) 2007-01-11

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