TW200632444A - Method for printing by printed pattern and production equipment for printing printed pattern - Google Patents
Method for printing by printed pattern and production equipment for printing printed patternInfo
- Publication number
- TW200632444A TW200632444A TW095101417A TW95101417A TW200632444A TW 200632444 A TW200632444 A TW 200632444A TW 095101417 A TW095101417 A TW 095101417A TW 95101417 A TW95101417 A TW 95101417A TW 200632444 A TW200632444 A TW 200632444A
- Authority
- TW
- Taiwan
- Prior art keywords
- printed pattern
- etching
- printing
- production equipment
- forming
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 6
- 238000005530 etching Methods 0.000 abstract 6
- 238000004380 ashing Methods 0.000 abstract 1
- 238000001312 dry etching Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000001039 wet etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1292—Multistep manufacturing methods using liquid deposition, e.g. printing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005012783A JP2006202961A (ja) | 2005-01-20 | 2005-01-20 | 印刷パターンを用いた処理方法及び印刷パターンの製造装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200632444A true TW200632444A (en) | 2006-09-16 |
Family
ID=36684291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095101417A TW200632444A (en) | 2005-01-20 | 2006-01-13 | Method for printing by printed pattern and production equipment for printing printed pattern |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060160033A1 (zh) |
JP (1) | JP2006202961A (zh) |
KR (2) | KR20060084797A (zh) |
CN (1) | CN1818744A (zh) |
TW (1) | TW200632444A (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101726641B1 (ko) * | 2011-08-03 | 2017-04-26 | 엘지디스플레이 주식회사 | 인쇄판의 제조 방법 |
CN104091886B (zh) * | 2014-07-04 | 2016-11-23 | 京东方科技集团股份有限公司 | 一种有机薄膜晶体管、阵列基板及制备方法、显示装置 |
CN105499069B (zh) * | 2014-10-10 | 2019-03-08 | 住友重机械工业株式会社 | 膜形成装置及膜形成方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6074893A (en) * | 1993-09-27 | 2000-06-13 | Sumitomo Metal Industries, Ltd. | Process for forming fine thick-film conductor patterns |
US6132940A (en) * | 1998-12-16 | 2000-10-17 | International Business Machines Corporation | Method for producing constant profile sidewalls |
KR20030057067A (ko) * | 2001-12-28 | 2003-07-04 | 엘지.필립스 엘시디 주식회사 | 인쇄방식을 이용한 패턴형성방법 |
US7309563B2 (en) * | 2003-12-19 | 2007-12-18 | Palo Alto Research Center Incorporated | Patterning using wax printing and lift off |
-
2005
- 2005-01-20 JP JP2005012783A patent/JP2006202961A/ja active Pending
-
2006
- 2006-01-13 TW TW095101417A patent/TW200632444A/zh unknown
- 2006-01-17 KR KR1020060004785A patent/KR20060084797A/ko active Search and Examination
- 2006-01-19 US US11/334,372 patent/US20060160033A1/en not_active Abandoned
- 2006-01-20 CN CNA2006100064583A patent/CN1818744A/zh active Pending
-
2008
- 2008-05-13 KR KR1020080043829A patent/KR20080045669A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
KR20060084797A (ko) | 2006-07-25 |
CN1818744A (zh) | 2006-08-16 |
KR20080045669A (ko) | 2008-05-23 |
US20060160033A1 (en) | 2006-07-20 |
JP2006202961A (ja) | 2006-08-03 |
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