TW200627519A - Substrate processing system - Google Patents
Substrate processing systemInfo
- Publication number
- TW200627519A TW200627519A TW094131361A TW94131361A TW200627519A TW 200627519 A TW200627519 A TW 200627519A TW 094131361 A TW094131361 A TW 094131361A TW 94131361 A TW94131361 A TW 94131361A TW 200627519 A TW200627519 A TW 200627519A
- Authority
- TW
- Taiwan
- Prior art keywords
- stage
- substrate
- processing system
- film formation
- application
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
In the substrate processing system 100 which carries out application formation of the film of processing liquid, is interlocked with exposure equipment, and forms a predetermined pattern in the surface of a processed substrate. The substrate processing system 100 has the first stage 50 and the second stage 59 in which the processed substrate is laid, respectively, an application film formation means to have the processing liquid application means which applies processing liquid to the surface of the processed substrate laid in the first stage 50 and the second stage 59, respectively, and carries out film formation, and a substrate conveyance means 42a and 42b to convey the processed substrate in which film formation was carried out by the application film formation means, to two or more exposure equipments 4a and 4b.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004287596A JP2006100722A (en) | 2004-09-30 | 2004-09-30 | Substrate processing system therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200627519A true TW200627519A (en) | 2006-08-01 |
TWI281704B TWI281704B (en) | 2007-05-21 |
Family
ID=36240209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094131361A TWI281704B (en) | 2004-09-30 | 2005-09-12 | Substrate processing system |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006100722A (en) |
KR (1) | KR20060051463A (en) |
CN (1) | CN1755526A (en) |
TW (1) | TWI281704B (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100803147B1 (en) * | 2007-04-04 | 2008-02-14 | 세메스 주식회사 | Slit coater and method of coating a process solution on a substrate using the same |
JP2009065000A (en) * | 2007-09-07 | 2009-03-26 | Tokyo Electron Ltd | Treating method for substrate, program, computer storage medium, and substrate treating system |
EP2261391B1 (en) * | 2008-03-25 | 2017-11-15 | Orbotech LT Solar, LLC | Processing apparatus and processing method |
JP4900397B2 (en) * | 2009-01-29 | 2012-03-21 | 東京エレクトロン株式会社 | Liquid processing equipment |
KR101371912B1 (en) * | 2009-12-28 | 2014-03-07 | 다즈모 가부시키가이샤 | Coating device for substrate and substrate-coating method |
JP5417186B2 (en) * | 2010-01-08 | 2014-02-12 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
JP2011156482A (en) * | 2010-02-01 | 2011-08-18 | Sharp Corp | Liquid coating device |
CN103199031B (en) * | 2012-01-04 | 2015-10-14 | 沈阳芯源微电子设备有限公司 | Full-automatic glue film coating, developing apparatus |
CN104597716A (en) * | 2013-10-31 | 2015-05-06 | 上海和辉光电有限公司 | Exposure and development apparatus, and exposure and development method |
CN117184835A (en) * | 2022-05-31 | 2023-12-08 | 上海德沪涂膜设备有限公司 | Coating apparatus |
-
2004
- 2004-09-30 JP JP2004287596A patent/JP2006100722A/en active Pending
-
2005
- 2005-09-12 TW TW094131361A patent/TWI281704B/en not_active IP Right Cessation
- 2005-09-21 KR KR1020050087591A patent/KR20060051463A/en not_active Application Discontinuation
- 2005-09-30 CN CNA2005101079651A patent/CN1755526A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20060051463A (en) | 2006-05-19 |
TWI281704B (en) | 2007-05-21 |
JP2006100722A (en) | 2006-04-13 |
CN1755526A (en) | 2006-04-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |