TW200621373A - Method for immediately monitoring silt nozzle coating and apparatus thereof - Google Patents

Method for immediately monitoring silt nozzle coating and apparatus thereof

Info

Publication number
TW200621373A
TW200621373A TW093140814A TW93140814A TW200621373A TW 200621373 A TW200621373 A TW 200621373A TW 093140814 A TW093140814 A TW 093140814A TW 93140814 A TW93140814 A TW 93140814A TW 200621373 A TW200621373 A TW 200621373A
Authority
TW
Taiwan
Prior art keywords
optical sensors
coating
distance
optical
nozzle coating
Prior art date
Application number
TW093140814A
Other languages
Chinese (zh)
Other versions
TWI268808B (en
Inventor
Ping-Yuan Hsieh
Chung-Ting Chen
Hong-Show Koo
Yu-Ting Liu
Shan-Wen Ke
Original Assignee
Allied Material Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Material Technology Corp filed Critical Allied Material Technology Corp
Priority to TW93140814A priority Critical patent/TWI268808B/en
Priority to JP2005037204A priority patent/JP2006181566A/en
Publication of TW200621373A publication Critical patent/TW200621373A/en
Application granted granted Critical
Publication of TWI268808B publication Critical patent/TWI268808B/en

Links

Landscapes

  • Coating Apparatus (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spray Control Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

A method for monitoring silt nozzle coating is used to control and adjust the film thickness immediately. A set of optical sensors is used to emit and receive optical signals to measure a distance between optical sensors and a substrate before coating. Another set of optical sensors is used to emit and receive optical signals to measure a distance between optical sensors and a coated film on the substrate after coating. An optical signal processor is used to calculate a difference between, the distance between optical sensors and a coated film after coating, and, the distance between optical sensors and a substrate before coating. A silt nozzle controller is used to adjust the film thickness according to the feedback difference.
TW93140814A 2004-12-27 2004-12-27 Method for immediately monitoring silt nozzle coating and apparatus thereof TWI268808B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW93140814A TWI268808B (en) 2004-12-27 2004-12-27 Method for immediately monitoring silt nozzle coating and apparatus thereof
JP2005037204A JP2006181566A (en) 2004-12-27 2005-02-15 Slit-used coating method and method and device for monitoring thickness of coating film in real time at slit-used coating step

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93140814A TWI268808B (en) 2004-12-27 2004-12-27 Method for immediately monitoring silt nozzle coating and apparatus thereof

Publications (2)

Publication Number Publication Date
TW200621373A true TW200621373A (en) 2006-07-01
TWI268808B TWI268808B (en) 2006-12-21

Family

ID=36735050

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93140814A TWI268808B (en) 2004-12-27 2004-12-27 Method for immediately monitoring silt nozzle coating and apparatus thereof

Country Status (2)

Country Link
JP (1) JP2006181566A (en)
TW (1) TWI268808B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111036467A (en) * 2018-10-15 2020-04-21 许铭案 Three-in-one spraying machine
TWI762748B (en) * 2018-03-23 2022-05-01 日商斯庫林集團股份有限公司 Substrate processing apparatus and substrate processing method
CN114535033A (en) * 2022-04-27 2022-05-27 河南银金达新材料股份有限公司 Processing method of polyester film with coating on surface

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100919622B1 (en) * 2007-12-05 2009-09-30 주식회사 탑 엔지니어링 Distance sensor of paste dispenser
GB201220155D0 (en) * 2012-11-08 2012-12-26 Samsung Lcd Nl R & D Ct Bv Method of manufacture
US11130300B2 (en) 2014-10-17 2021-09-28 Sumitomo Rubber Industries, Ltd. Pneumatic tire and method for producing same
JP6143889B2 (en) 2014-10-17 2017-06-07 住友ゴム工業株式会社 Rubber composition for pneumatic tire
JP6235990B2 (en) 2014-10-17 2017-11-22 住友ゴム工業株式会社 Sealant tire
EP3786574A1 (en) * 2019-08-26 2021-03-03 Sturm Maschinen- & Anlagenbau GmbH Sensor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI762748B (en) * 2018-03-23 2022-05-01 日商斯庫林集團股份有限公司 Substrate processing apparatus and substrate processing method
CN111036467A (en) * 2018-10-15 2020-04-21 许铭案 Three-in-one spraying machine
CN114535033A (en) * 2022-04-27 2022-05-27 河南银金达新材料股份有限公司 Processing method of polyester film with coating on surface
CN114535033B (en) * 2022-04-27 2022-07-19 河南银金达新材料股份有限公司 Processing method of polyester film with coating on surface

Also Published As

Publication number Publication date
JP2006181566A (en) 2006-07-13
TWI268808B (en) 2006-12-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees