TW200620489A - Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor - Google Patents
Strained fully depleted silicon on insulator semiconductor device and manufacturing method thereforInfo
- Publication number
- TW200620489A TW200620489A TW094137086A TW94137086A TW200620489A TW 200620489 A TW200620489 A TW 200620489A TW 094137086 A TW094137086 A TW 094137086A TW 94137086 A TW94137086 A TW 94137086A TW 200620489 A TW200620489 A TW 200620489A
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- semiconductor device
- method therefor
- fully depleted
- insulator semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 6
- 239000012212 insulator Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 125000006850 spacer group Chemical group 0.000 abstract 3
- 238000002955 isolation Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7845—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being a conductive material, e.g. silicided S/D or Gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78639—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a drain or source connected to a bulk conducting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78684—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/938—Lattice strain control or utilization
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/986,399 US7306997B2 (en) | 2004-11-10 | 2004-11-10 | Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200620489A true TW200620489A (en) | 2006-06-16 |
TWI380373B TWI380373B (en) | 2012-12-21 |
Family
ID=35658988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094137086A TWI380373B (en) | 2004-11-10 | 2005-10-24 | Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor |
Country Status (7)
Country | Link |
---|---|
US (2) | US7306997B2 (zh) |
EP (1) | EP1815531A1 (zh) |
JP (1) | JP2008520097A (zh) |
KR (1) | KR101122753B1 (zh) |
CN (1) | CN101061587B (zh) |
TW (1) | TWI380373B (zh) |
WO (1) | WO2006052379A1 (zh) |
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US7091071B2 (en) * | 2005-01-03 | 2006-08-15 | Freescale Semiconductor, Inc. | Semiconductor fabrication process including recessed source/drain regions in an SOI wafer |
US7446350B2 (en) * | 2005-05-10 | 2008-11-04 | International Business Machine Corporation | Embedded silicon germanium using a double buried oxide silicon-on-insulator wafer |
JP2006332243A (ja) * | 2005-05-25 | 2006-12-07 | Toshiba Corp | 半導体装置及びその製造方法 |
US7384851B2 (en) * | 2005-07-15 | 2008-06-10 | International Business Machines Corporation | Buried stress isolation for high-performance CMOS technology |
WO2007053382A1 (en) * | 2005-10-31 | 2007-05-10 | Advanced Micro Devices, Inc. | An embedded strain layer in thin soi transistors and a method of forming the same |
DE102005052055B3 (de) | 2005-10-31 | 2007-04-26 | Advanced Micro Devices, Inc., Sunnyvale | Eingebettete Verformungsschicht in dünnen SOI-Transistoren und Verfahren zur Herstellung desselben |
US7422950B2 (en) * | 2005-12-14 | 2008-09-09 | Intel Corporation | Strained silicon MOS device with box layer between the source and drain regions |
US7473593B2 (en) * | 2006-01-11 | 2009-01-06 | International Business Machines Corporation | Semiconductor transistors with expanded top portions of gates |
US7569434B2 (en) * | 2006-01-19 | 2009-08-04 | International Business Machines Corporation | PFETs and methods of manufacturing the same |
EP1833094B1 (en) * | 2006-03-06 | 2011-02-02 | STMicroelectronics (Crolles 2) SAS | Formation of shallow SiGe conduction channel |
US7613369B2 (en) * | 2006-04-13 | 2009-11-03 | Luxtera, Inc. | Design of CMOS integrated germanium photodiodes |
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US8154051B2 (en) * | 2006-08-29 | 2012-04-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | MOS transistor with in-channel and laterally positioned stressors |
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JP2008153515A (ja) * | 2006-12-19 | 2008-07-03 | Fujitsu Ltd | Mosトランジスタ、そのmosトランジスタの製造方法、そのmosトランジスタを利用したcmos型半導体装置、及び、そのcmos型半導体装置を利用した半導体装置 |
US20080157118A1 (en) * | 2006-12-29 | 2008-07-03 | Chartered Semiconductor Manufacturing Ltd. | Integrated circuit system employing strained technology |
US9640666B2 (en) * | 2007-07-23 | 2017-05-02 | GlobalFoundries, Inc. | Integrated circuit employing variable thickness film |
JP2009212413A (ja) * | 2008-03-06 | 2009-09-17 | Renesas Technology Corp | 半導体装置及び半導体装置の製造方法 |
US8421050B2 (en) * | 2008-10-30 | 2013-04-16 | Sandisk 3D Llc | Electronic devices including carbon nano-tube films having carbon-based liners, and methods of forming the same |
KR101592505B1 (ko) | 2009-02-16 | 2016-02-05 | 삼성전자주식회사 | 반도체 메모리 소자 및 이의 제조 방법 |
US8106456B2 (en) * | 2009-07-29 | 2012-01-31 | International Business Machines Corporation | SOI transistors having an embedded extension region to improve extension resistance and channel strain characteristics |
US7994062B2 (en) * | 2009-10-30 | 2011-08-09 | Sachem, Inc. | Selective silicon etch process |
CN102299092B (zh) * | 2010-06-22 | 2013-10-30 | 中国科学院微电子研究所 | 一种半导体器件及其形成方法 |
CN102376769B (zh) * | 2010-08-18 | 2013-06-26 | 中国科学院微电子研究所 | 超薄体晶体管及其制作方法 |
CN102487018B (zh) * | 2010-12-03 | 2014-03-12 | 中芯国际集成电路制造(北京)有限公司 | Mos晶体管及其形成方法 |
CN102122669A (zh) * | 2011-01-27 | 2011-07-13 | 上海宏力半导体制造有限公司 | 晶体管及其制作方法 |
US8455308B2 (en) | 2011-03-16 | 2013-06-04 | International Business Machines Corporation | Fully-depleted SON |
US9184214B2 (en) * | 2011-04-11 | 2015-11-10 | Globalfoundries Inc. | Semiconductor device exhibiting reduced parasitics and method for making same |
US20120326230A1 (en) * | 2011-06-22 | 2012-12-27 | International Business Machines Corporation | Silicon on insulator complementary metal oxide semiconductor with an isolation formed at low temperature |
WO2013020576A1 (en) * | 2011-08-05 | 2013-02-14 | X-Fab Semiconductor Foundries Ag | Semiconductor device |
US9136158B2 (en) * | 2012-03-09 | 2015-09-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lateral MOSFET with dielectric isolation trench |
US8664050B2 (en) | 2012-03-20 | 2014-03-04 | International Business Machines Corporation | Structure and method to improve ETSOI MOSFETS with back gate |
CN103779279B (zh) * | 2012-10-26 | 2017-09-01 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件的制造方法 |
CN102931092A (zh) * | 2012-10-26 | 2013-02-13 | 哈尔滨工程大学 | 一种自对准soi fd mosfet形成方法 |
US9525027B2 (en) * | 2014-03-13 | 2016-12-20 | Globalfoundries Inc. | Lateral bipolar junction transistor having graded SiGe base |
FR3025941A1 (fr) * | 2014-09-17 | 2016-03-18 | Commissariat Energie Atomique | Transistor mos a resistance et capacites parasites reduites |
CN105632909B (zh) * | 2014-11-07 | 2019-02-01 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法、电子装置 |
US9281305B1 (en) | 2014-12-05 | 2016-03-08 | National Applied Research Laboratories | Transistor device structure |
CN105742248A (zh) * | 2014-12-09 | 2016-07-06 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构的形成方法 |
US20230269061A1 (en) * | 2022-02-18 | 2023-08-24 | Psemi Corporation | Lna with tx harmonic filter |
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JP4173672B2 (ja) * | 2002-03-19 | 2008-10-29 | 株式会社ルネサステクノロジ | 半導体装置及びその製造方法 |
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FR2838237B1 (fr) * | 2002-04-03 | 2005-02-25 | St Microelectronics Sa | Procede de fabrication d'un transistor a effet de champ a grille isolee a canal contraint et circuit integre comprenant un tel transistor |
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US20040033677A1 (en) * | 2002-08-14 | 2004-02-19 | Reza Arghavani | Method and apparatus to prevent lateral oxidation in a transistor utilizing an ultra thin oxygen-diffusion barrier |
JP4546021B2 (ja) * | 2002-10-02 | 2010-09-15 | ルネサスエレクトロニクス株式会社 | 絶縁ゲート型電界効果型トランジスタ及び半導体装置 |
US6902991B2 (en) * | 2002-10-24 | 2005-06-07 | Advanced Micro Devices, Inc. | Semiconductor device having a thick strained silicon layer and method of its formation |
CN100378901C (zh) | 2002-11-25 | 2008-04-02 | 国际商业机器公司 | 应变鳍型场效应晶体管互补金属氧化物半导体器件结构 |
US6909186B2 (en) * | 2003-05-01 | 2005-06-21 | International Business Machines Corporation | High performance FET devices and methods therefor |
US8097924B2 (en) * | 2003-10-31 | 2012-01-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Ultra-shallow junction MOSFET having a high-k gate dielectric and in-situ doped selective epitaxy source/drain extensions and a method of making same |
US7037795B1 (en) * | 2004-10-15 | 2006-05-02 | Freescale Semiconductor, Inc. | Low RC product transistors in SOI semiconductor process |
-
2004
- 2004-11-10 US US10/986,399 patent/US7306997B2/en not_active Expired - Fee Related
-
2005
- 2005-10-12 KR KR1020077010284A patent/KR101122753B1/ko not_active IP Right Cessation
- 2005-10-12 JP JP2007541196A patent/JP2008520097A/ja active Pending
- 2005-10-12 WO PCT/US2005/036894 patent/WO2006052379A1/en active Application Filing
- 2005-10-12 EP EP05812228A patent/EP1815531A1/en not_active Withdrawn
- 2005-10-12 CN CN200580035899XA patent/CN101061587B/zh not_active Expired - Fee Related
- 2005-10-24 TW TW094137086A patent/TWI380373B/zh not_active IP Right Cessation
-
2007
- 2007-10-29 US US11/926,655 patent/US8502283B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN101061587A (zh) | 2007-10-24 |
JP2008520097A (ja) | 2008-06-12 |
CN101061587B (zh) | 2011-01-12 |
US20080054316A1 (en) | 2008-03-06 |
US7306997B2 (en) | 2007-12-11 |
US20060099752A1 (en) | 2006-05-11 |
KR20070084008A (ko) | 2007-08-24 |
EP1815531A1 (en) | 2007-08-08 |
WO2006052379A1 (en) | 2006-05-18 |
KR101122753B1 (ko) | 2012-03-23 |
US8502283B2 (en) | 2013-08-06 |
TWI380373B (en) | 2012-12-21 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |