TW200618129A - Substrate heating device - Google Patents

Substrate heating device

Info

Publication number
TW200618129A
TW200618129A TW094132156A TW94132156A TW200618129A TW 200618129 A TW200618129 A TW 200618129A TW 094132156 A TW094132156 A TW 094132156A TW 94132156 A TW94132156 A TW 94132156A TW 200618129 A TW200618129 A TW 200618129A
Authority
TW
Taiwan
Prior art keywords
substrate
heater
lifter pins
heating device
heating
Prior art date
Application number
TW094132156A
Other languages
English (en)
Inventor
Kazuo Nishizawa
Nobuyoshi Iwasaki
Hironori Ohashi
Original Assignee
Clean Technology Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clean Technology Kabushiki Kaisha filed Critical Clean Technology Kabushiki Kaisha
Publication of TW200618129A publication Critical patent/TW200618129A/zh

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW094132156A 2004-11-29 2005-09-16 Substrate heating device TW200618129A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004344263 2004-11-29
JP2005245055A JP2006179859A (ja) 2004-11-29 2005-08-25 基板加熱装置

Publications (1)

Publication Number Publication Date
TW200618129A true TW200618129A (en) 2006-06-01

Family

ID=36733633

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094132156A TW200618129A (en) 2004-11-29 2005-09-16 Substrate heating device

Country Status (3)

Country Link
JP (1) JP2006179859A (zh)
KR (1) KR20060059809A (zh)
TW (1) TW200618129A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI564668B (zh) * 2014-09-25 2017-01-01 上海和輝光電有限公司 產生光阻劑圖案的方法和裝置及其預烘裝置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2351107T3 (es) * 2007-11-30 2011-01-31 Komax Holding Ag Placa calefactora con elementos de elevación.
KR102630782B1 (ko) 2016-08-19 2024-01-31 삼성전자주식회사 기판 처리 장치
KR102671567B1 (ko) * 2021-12-17 2024-05-31 세메스 주식회사 가열 유닛 및 이를 포함하는 기판 처리 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI564668B (zh) * 2014-09-25 2017-01-01 上海和輝光電有限公司 產生光阻劑圖案的方法和裝置及其預烘裝置

Also Published As

Publication number Publication date
JP2006179859A (ja) 2006-07-06
KR20060059809A (ko) 2006-06-02

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