TW200618129A - Substrate heating device - Google Patents
Substrate heating deviceInfo
- Publication number
- TW200618129A TW200618129A TW094132156A TW94132156A TW200618129A TW 200618129 A TW200618129 A TW 200618129A TW 094132156 A TW094132156 A TW 094132156A TW 94132156 A TW94132156 A TW 94132156A TW 200618129 A TW200618129 A TW 200618129A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- heater
- lifter pins
- heating device
- heating
- Prior art date
Links
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004344263 | 2004-11-29 | ||
JP2005245055A JP2006179859A (ja) | 2004-11-29 | 2005-08-25 | 基板加熱装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200618129A true TW200618129A (en) | 2006-06-01 |
Family
ID=36733633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094132156A TW200618129A (en) | 2004-11-29 | 2005-09-16 | Substrate heating device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006179859A (zh) |
KR (1) | KR20060059809A (zh) |
TW (1) | TW200618129A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI564668B (zh) * | 2014-09-25 | 2017-01-01 | 上海和輝光電有限公司 | 產生光阻劑圖案的方法和裝置及其預烘裝置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2351107T3 (es) * | 2007-11-30 | 2011-01-31 | Komax Holding Ag | Placa calefactora con elementos de elevación. |
KR102630782B1 (ko) | 2016-08-19 | 2024-01-31 | 삼성전자주식회사 | 기판 처리 장치 |
KR102671567B1 (ko) * | 2021-12-17 | 2024-05-31 | 세메스 주식회사 | 가열 유닛 및 이를 포함하는 기판 처리 장치 |
-
2005
- 2005-08-25 JP JP2005245055A patent/JP2006179859A/ja active Pending
- 2005-09-16 TW TW094132156A patent/TW200618129A/zh unknown
- 2005-11-04 KR KR1020050105455A patent/KR20060059809A/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI564668B (zh) * | 2014-09-25 | 2017-01-01 | 上海和輝光電有限公司 | 產生光阻劑圖案的方法和裝置及其預烘裝置 |
Also Published As
Publication number | Publication date |
---|---|
JP2006179859A (ja) | 2006-07-06 |
KR20060059809A (ko) | 2006-06-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
USD643062S1 (en) | Metal transaction device | |
TW200618129A (en) | Substrate heating device | |
USD643064S1 (en) | Metal transaction device with gem-like surface | |
WO2005004681A3 (en) | Reversible cooking appliance | |
TW200721560A (en) | Metal and electronically conductive polymer transfer | |
JP2009158664A5 (zh) | ||
SG131872A1 (en) | Layer arrangement for the formation of a coating on a surface of a substrate,coating method,and substrate with a layer arrangement | |
TW200721524A (en) | Method of releasing high temperature films and/or devices from metallic substrates | |
TW200644086A (en) | A plasma enhanced atomic layer deposition system and method | |
WO2003014416A3 (en) | Plating device and method | |
USD591693S1 (en) | Control elements for an electrical device | |
RU2011141788A (ru) | Устройство отображения | |
WO2008060582A3 (en) | Coated substrates, organometallic films and methods for applying organometallic films to substrates | |
WO2007084952A3 (en) | Systems and methods for drying a rotating substrate | |
TW200612512A (en) | Substrate heating sapparatus | |
WO2011035041A3 (en) | Substrate transfer mechanism with preheating features | |
WO2005091790A3 (en) | Labels and labeling process | |
TW200745357A (en) | Evaporation source | |
TW200725703A (en) | Heater for depositing thin film | |
USD623690S1 (en) | Metal transaction device with gem-like surface | |
WO2008136228A1 (ja) | 基板温度制御装置用ステージ | |
GB0714980D0 (en) | Method for providing a contact on the back surface of a solar cell, and a solar cell with contacts provided | |
TW200629398A (en) | Wafer treating apparatus and method | |
FR3000667B1 (fr) | Dispositif de support pour supporter un corps, en particulier un corps humain | |
TW200607874A (en) | Sputtering device with gas injection assembly |