TW200608005A - Visual check apparatus and inspection system - Google Patents

Visual check apparatus and inspection system

Info

Publication number
TW200608005A
TW200608005A TW094113097A TW94113097A TW200608005A TW 200608005 A TW200608005 A TW 200608005A TW 094113097 A TW094113097 A TW 094113097A TW 94113097 A TW94113097 A TW 94113097A TW 200608005 A TW200608005 A TW 200608005A
Authority
TW
Taiwan
Prior art keywords
illumination
luminous energy
control part
determining part
controls
Prior art date
Application number
TW094113097A
Other languages
Chinese (zh)
Other versions
TWI272381B (en
Inventor
Akio Sanda
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200608005A publication Critical patent/TW200608005A/en
Application granted granted Critical
Publication of TWI272381B publication Critical patent/TWI272381B/en

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

To enhance working efficiency, when an operator confirms a defect, by providing illumination suitable for an operator for inspecting defects of a substrate. An illumination control part 486 is provided in a control part of a visual confirmation device. A direction determining part 486a and a luminous energy determining part 486b are provided further in the illumination control part 486. An illumination mechanism 46 is constituted into division ring illumination, arranged ring-like with a plurality of light sources. The direction determining part 486a and the luminous energy determining part 486b determine the illumination direction and illumination luminous energy, in response to a defect data 100 of information related to defects. The illumination control part 486 controls the illuminating mechanism 46 to be brought into the illumination direction determined by the direction determination part 486a, by selecting the lighting light source from among the plurality of light sources in the illumination mechanism 46, and controls the illuminating mechanism 46, to bring the luminous energy of the lighting light source into the luminous energy determined by the luminous energy determining part 486b.
TW94113097A 2004-08-20 2005-04-25 Visual check apparatus and inspection system TWI272381B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004241315A JP2006058170A (en) 2004-08-20 2004-08-20 Visual confirmation device and inspection system

Publications (2)

Publication Number Publication Date
TW200608005A true TW200608005A (en) 2006-03-01
TWI272381B TWI272381B (en) 2007-02-01

Family

ID=36080421

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94113097A TWI272381B (en) 2004-08-20 2005-04-25 Visual check apparatus and inspection system

Country Status (3)

Country Link
JP (1) JP2006058170A (en)
CN (1) CN100495000C (en)
TW (1) TWI272381B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630453B (en) * 2017-11-22 2018-07-21 牧德科技股份有限公司 Projection-type recheck machine and compensation method thereof

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4970901B2 (en) * 2006-10-30 2012-07-11 株式会社メガトレード Computer program for operating visual inspection device and review machine for visual inspection device
CN101393137B (en) * 2008-10-24 2011-02-02 胡伟 Appearance quality detection method for products, system and detection device
CN101922996B (en) * 2009-06-17 2012-03-28 财团法人金属工业研究发展中心 Selecting method and system thereof of detecting light source
CN101826289B (en) * 2010-05-11 2012-06-27 友达光电股份有限公司 Testing apparatus
CN102374994A (en) * 2010-08-18 2012-03-14 全友电脑股份有限公司 Automatic optical detection system and method
JP2016070800A (en) * 2014-09-30 2016-05-09 株式会社Screenホールディングス Observation support device, observation support method and program
TWI542869B (en) * 2015-03-03 2016-07-21 Machvision Inc Automatic dimming method for optical detection and its optical inspection machine
JP6815787B2 (en) * 2016-08-09 2021-01-20 オリンパス株式会社 Observation device, control method of observation device, control program of observation device
JP2018059830A (en) * 2016-10-06 2018-04-12 川崎重工業株式会社 Exterior appearance inspection method
JP7178171B2 (en) * 2017-12-28 2022-11-25 日立Geニュークリア・エナジー株式会社 Defect inspection method and defect inspection system
DE102018201957A1 (en) * 2018-02-08 2019-08-08 Krones Ag Method for controlling bottle cells and bottle washing machine
JP6638098B2 (en) * 2019-01-29 2020-01-29 株式会社キーエンス Inspection device
JP7415264B2 (en) * 2019-11-18 2024-01-17 マツダ株式会社 Gear inspection equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3197443B2 (en) * 1994-11-21 2001-08-13 松下電工株式会社 Soldering inspection method and hole and lead missing inspection method
JP4331306B2 (en) * 1999-03-17 2009-09-16 オリンパス株式会社 Image capture device
JP2003256814A (en) * 2002-02-27 2003-09-12 Olympus Optical Co Ltd Substrate checking device
CN1459628A (en) * 2002-05-24 2003-12-03 由田新技股份有限公司 Circuit board plate material surface defect instant informing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630453B (en) * 2017-11-22 2018-07-21 牧德科技股份有限公司 Projection-type recheck machine and compensation method thereof

Also Published As

Publication number Publication date
TWI272381B (en) 2007-02-01
JP2006058170A (en) 2006-03-02
CN100495000C (en) 2009-06-03
CN1737548A (en) 2006-02-22

Similar Documents

Publication Publication Date Title
TW200608005A (en) Visual check apparatus and inspection system
WO2012063149A3 (en) Methods for disaggregated sensing of artificial light and daylight distribution
EP1710566A3 (en) Defect inspection method and defect inspection system using the method
TW200619558A (en) Illumination unit and illumination apparatus
ATE414273T1 (en) DEVICE FOR INSPECTING A SURFACE
RU2012144005A (en) BACKLIGHT LED LAMP
TW200715005A (en) Light source unit for use in a lighting apparatus
TW200613816A (en) Surface light source device and liquid crystal display device
TW200643560A (en) Spread illuminating apparatus
WO2006049844A3 (en) High brightness light emitting diode light source
WO2006017595A3 (en) Elongated led illumination device
EP2105653A3 (en) Uniform intensity LED lighting system
NZ595171A (en) Lighting unit suitable for street illumination comprising rows of LED lights arranged behind a reflector unit, wherein the reflector unit comprises reflector elements with a first portion for total light reflection and a second portion for partial light reflection
TW200833999A (en) Lighting device and lighting method
WO2010062934A3 (en) Lighting fixtures and systems with high energy efficiency and visual quality
TW200736601A (en) Pattern defect inspecting apparatus, pattern defect inspecting method, and method of producing a photomask
WO2008087984A1 (en) Laser processing device and its processing method
EP2046095A3 (en) Illumination system
MY152517A (en) Escalator or moving walkway with led illumination
JP2010146923A (en) Illumination system
ATE335160T1 (en) LIGHTING SYSTEM
TW200707617A (en) An apparatus for inspecting a wafer
RU2009137605A (en) METHOD OF ORGANIZING ENERGY-SAVING ARTIFICIAL LIGHTING AND INTELLECTUAL DEVICE (OPTIONS)
TW200727031A (en) Light-emitting device and back light unit radiates with LEDs
JP2014035932A (en) Lighting control system and method

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees