200521437 五、發明說明（1) 【發明所屬之技術領域】 本發明係關於一種有機揮發氣體之微型感測器及复1 方法，特別是關於利用一懸置薄膜基座促使—微加埶：： 速加熱一氣體感測層，且維持恆定高溫，以加速髀^、 速率及提升感測精確度之微型感測器。 、-i 【先前技術】 隨著工業時代不斷演進，各種不同型態的有機揮 體、〔Vol^ti le Organic Chemical，v〇c〕時常出現二 生活的裱境當中，例如甲醛〔f〇rmaldehyde〕，其 ^ 之工業原料及溶劑，並廣泛用於室内裝潢塗裝且制 ί塗料ΐ存”途。雖然如&，但是近年環境醫學相：研 九郃陸、卞證貫長期暴露在甲醛等有機揮發性氣體下， 可能危害人體健康’甚至成為癌症等重大疾病之誘發因° Ϊ甲==體健康’工業製程或曰常居家環境二為 發性氣體之感測器的需求與日倶增。 機揮 習用的有機揮發性氣體感測方法之一係 一。graphy，GC〕。雖然，氣相層 測解析度向、誤差小及氣體種類選擇數多等優點，、 相層析儀卻具有體積魔大、講置成本極高及操作複二等亥： 點，以致於大幅降低其攜帶性及便利性， =、 隨時隨地進行偵測。 π於陕速的 (ίΐτ他Λ用Λ機揮發氣體之微型感測11，如*界專利組織 (PCT)國際申請案公開第03/007263號「_氧化碳感測器 200521437 五、發明說明（2) 及其使用方法〔Carbon Monoxide Sensor and Method 〇f Use〕」發明專利、美國專利第5, 9 58, 340號「固態化學感 測器〔Solid-State Chemical Sensor〕」發明專利、中 國公開第1，274, 084號「一種新型濕敏傳感器·的製備方 法」發明專利及中國公告第1，1 28, 353號「摻雜態聚笨胺 的氧化氮氣體傳感器的製備方法」發明專利，其揭示之微 型感測器係具有體積小、操作簡單之優點，因而有利於有 機揮發氣體之即使監測。基本上，該類微型感測器皆係在 一基板上至少形成一氣體感應層及一指叉電極組 〔interdigital electrodes〕，藉由適當選擇該氣體感 應層之材質，該氣體感應層將可對不同之特定氣體產生可 逆的物理化學反應，該特定氣體係如一氧化碳、二氧化口 碳、一氧化氮、濕氣、甲醛等各種無機氣體或有機揮發 體。在操作時’該氣體感應層隨著空氣中的特定氣體 度值而改變其電阻值，因此利用該指叉電極組測量該氣= 感應層之電阻值’即可經適當數位處理成為該特定 濃度值。 〃 < 雖然，上述各種微型感測 組係可測量特定氣體之濃度 際使用上的精確性及反應速 PCT公開第03/007263號專利 器，以加速該氣體感應層與 該氣體感應層於預定高溫， 體積明顯大於該氣體感應層 ，使用氣體感應層及指又電極 變化，然而該微型感測器在實 2卻顯得不足及低落。儘管‘ 曾揭示可藉由增設一微加熱/ 特定氣體之反應速率，並維持 然而由於該微型感測器之基板 ，以致於在實際上，該微力t熱200521437 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a micro-sensor for organic volatile gases and a complex method, and in particular, to use a suspended thin film base to promote-micro plus :: A micro-sensor that rapidly heats a gas sensing layer and maintains a constant high temperature to accelerate 髀, speed, and improve sensing accuracy. 、 -I [Previous technology] With the continuous evolution of the industrial age, various types of organic compounds, [Vol ^ ti le Organic Chemical, v〇c] often appear in the living environment of the second life, such as formaldehyde [f〇rmaldehyde 〕, Its industrial raw materials and solvents, and are widely used in interior decoration coatings and manufacturing coatings. "Although such as &, in recent years, environmental medicine: research Jiululu, Luzhengguan long-term exposure to formaldehyde and other organic Under volatile gas, it may endanger human health and even become a cause of major diseases such as cancer. Ϊ 甲 == 体 健康 'Industrial manufacturing process or daily living environment The demand for sensors which are noble gases is increasing day by day. One of the organic volatile gas sensing methods used in the machine is graphy, GC]. Although the gas phase layer has the advantages of small resolution, small error, and large number of gas types, phase chromatography has a volume Magic, high cost of installation, and second-class operation: point, so that its portability and convenience are greatly reduced, =, anytime, anywhere detection. ΠShaan Su's (ίΐτ 他 Λ uses vapour volatile gas Of Miniature sensing 11, such as the PCT International Application Publication No. 03/007263 "_Carbon oxide sensor 200521437 V. Description of the invention (2) and its use method [Carbon Monoxide Sensor and Method 〇f Use ] "Invention patent, U.S. Patent No. 5, 9 58, 340" Solid-State Chemical Sensor "invention patent, China Publication No. 1,274, 084" Preparation of a new type of humidity-sensitive sensor · Method "invention patent and China Announcement No. 1, 128, 353" patent preparation method of doped polybenzylamine nitrogen oxide gas sensor "invention patent, which reveals the miniature sensor system has the advantages of small size and simple operation Therefore, it is advantageous for the monitoring of organic volatile gases. Basically, this type of micro-sensor is formed on a substrate with at least a gas sensing layer and an interdigital electrode group. The material of the layer, the gas sensing layer can produce reversible physical and chemical reactions to different specific gases, such as carbon monoxide, carbon dioxide, nitrogen monoxide , Moisture, formaldehyde and other inorganic gases or organic volatiles. During operation, 'the gas sensing layer changes its resistance value with the specific gas degree value in the air, so the gas is measured using the finger electrode group = sensing layer The resistance value 'can be processed to a specific concentration value through appropriate digital processing. 〃 < Although the above-mentioned various micro-sensing groups can measure the accuracy of the specific gas concentration and the response speed in use, PCT Publication No. 03/007263 The patented device accelerates the gas sensing layer and the gas sensing layer to a predetermined high temperature, and the volume is significantly larger than the gas sensing layer. The gas sensing layer and the finger electrode are used to change. However, the miniature sensor appears insufficient and low in reality. . Although ‘it was revealed that the reaction rate can be maintained by adding a micro heating / specific gas, but due to the substrate of the micro sensor, in practice, the micro force t heat
200521437 五、發明說明（3) 器之熱能絕大部份被該基板吸收，而使熱能益 〜 加熱該氣體感應層，因而造成該 全用於 大幅提升反應速率。再者，該基板體積過2;:預期般 造成該氣體感應層難以恆定的維持於預定高溫诗^吸熱亦 耗費較多熱能。若該氣體感應層的溫度持g =化亚^必需 致測得之電阻值變化存在過多溫度變因，而形成過=導 訊，影響計數得到的氣體濃度之精確度。若兩二亦 能’其：使得微型感測器之電源供應裝置，:種 池’必需經常更換或充電，其亦會造成使用上之不丄= 此，上述各種微型感測器仍有必要進一步加以改良。口 一 其良亡述之缺點，其微型感測器設有 .Ζ、土座，愍置溥膜基座利用數個橋接部橋接一 支樓口 ’卩懸高設置-氣體感測層、—指叉電極組及 加熱器。由於該懸置薄膜基座相對減小該支撐台之體 因而使該微加熱器之熱能充份傳導加熱該氣體感測層，、且 能易於維持恆定高溫。藉此，本發明不但便於攜帶及即時 積測各種有機揮發氣體，且更能大幅提升氣體感測之靈敏 度、加速氣體感測之速率及有效節省耗電量。 【發明内容】 本發明主要目的係提供一種有機揮發氣體之微型感測器 及其製造方法，其係利用一懸置薄膜基座懸高設置一氣體 感測層、一指叉電極組及一微加熱器，使該微加熱器之熱 能充份傳導加熱該氣體感測層，且能維持恆定高溫，而使 本發明具有提高感測準確度、縮短感測時程及節省耗電量200521437 V. Description of the invention (3) Most of the thermal energy of the device is absorbed by the substrate, so that the thermal energy is benefited by heating the gas sensing layer, so that it is all used to greatly increase the reaction rate. In addition, the volume of the substrate is over 2 ;: It is expected that the gas sensing layer is difficult to maintain constant at a predetermined high temperature. The heat absorption also consumes a lot of heat energy. If the temperature of the gas-sensing layer is g = 亚, it is necessary to cause too much temperature change in the measured resistance value change to form a = lead, which affects the accuracy of the gas concentration obtained by counting. If two or two can also 'its: make the power supply device of the micro-sensor, the seed cell' must be frequently replaced or recharged, it will also cause inconvenience in use = this, the above-mentioned various micro-sensors still need to be further Improvement. One of the shortcomings of its good and bad, its micro-sensors are equipped with .Z, soil seat, the base of the diaphragm is bridged by a number of bridges to a building's hanging height setting-gas sensing layer,- Finger electrode group and heater. Since the suspended film base relatively reduces the size of the support table, the thermal energy of the micro-heater is fully conducted to heat the gas sensing layer, and it is easy to maintain a constant high temperature. Therefore, the present invention is not only convenient to carry and measure various organic volatile gases in real time, but also can greatly improve the sensitivity of gas sensing, accelerate the rate of gas sensing, and effectively save power consumption. [Summary of the Invention] The main purpose of the present invention is to provide a micro sensor for organic volatile gases and a method for manufacturing the same, which use a suspended film base to suspend a gas sensing layer, a finger electrode group, and a micro sensor. The heater enables the thermal energy of the micro-heater to fully conduct heat to heat the gas sensing layer, and can maintain a constant high temperature, so that the invention has the advantages of improving sensing accuracy, shortening the sensing time course and saving power consumption.
C:\L〇S〇*5\Fivc Contincnts\PK9365. 第10頁 200521437 五、發明說明（4) 之功效。 本發明次要目的係提供一種有機揮發氣體之微型感測器 及其製造方法，其係利用微機電技術堆疊設置一懸置薄^ 基座、一氣體感測層、一指叉電極組及一微加熱器，以構 成一微型感測器，而使本發明具有提升微型感測器之聚集 度之功效。 根據本發明之有機揮發氣體之微型感測器及其製造方 法，其包含一懸置薄膜基座、一微加熱器、一氣體感測層 及一指叉電極組。該微加熱器、氣體感測層及指叉電極二 設置於泫懸置薄膜基座之上。因此，該微加熱器直接快速 加熱該氣體感測層，該氣體感測層依特定氣體之濃度值改 變其電阻值，及該指又電極組量測該氣體感測層之電阻變 化，以數位處理得知該特定氣體之濃度值。 【實施方式】 t 為了讓本發明之上述和其他目的、特徵、和優點能更明 確被了解，下文將特舉本發明較佳實施例，並配合所附圖 式，作詳細說明如下。 第1圖揭示本發明有機揮發氣體之微型感測器之組合立 體圖；第2圖揭示本發明有機揮發氣體之微型感測器進行 數位處理之方塊示意圖；第3圖揭示本發明有機揮發氣體 之微型感測為之氣體感測層的電阻值與甲醛濃度之曲線 圖、，第4圖揭不本發明有機揮發氣體之微型感測器之製造 方法之流程方塊圖；第53至51圖揭示本發明有機揮發氣體 之微型感測器之製造方法之剖視圖；及第6a至“圖揭示本 200521437 五、發明說明（5) 發明有機揮發氣體之微型感測器之製造方法之立體圖。 清參照第1及2圖所示’本發明第一實施例之有機揮發^ 體之微型感測器1係包含一懸置薄膜基座〗〇、一微加熱x器^ 20、一氣體感測層30及一指叉電極組4〇，且該微型感測&器 1較佳配置一數位處理單元50、一顯示單元6〇 (或為警報7 器）及一電源供應單元70進行數位化處理。 ’" 請再參照第1圖所示，本發明之懸置薄膜基座j 〇係由絕 緣材料製成，例如矽、氮化矽、二氧化矽〔即玻璃或石 英〕等。該懸置薄膜基座1 〇係設有一凹孔丨丨、數個橋接部 12及一支撐台13。該凹孔n大致由該懸置薄膜基座1〇之環 牆〔未標示〕圍繞。該橋接部〗2延伸在該凹孔n之間，其 一端橋接於該懸置薄膜基座〗〇之本體，而另一端橋接支& 該支撐台13。該橋接部12之數量及形狀並未加以限制，但 該橋接部1 2及支撐台丨3之形狀較佳為χ形，或為完整之^薄 板狀:該微加熱器20係由導熱性佳之金屬或合金材料以濺 鍍或蒸鍍沈^積方式製成，例如鉑/鉻〔pt/Cr )或鉑/鈦 〔Pt/Tl、\等金屬或合金。該微加熱器20堆疊在該支撐台 1 3上，並Λ有至少一加熱端子2丨。該加熱端子21平貼於該 橋接部12上，並向外延伸以連接至該數位處理單元5〇。、 材ΠΐίΓ之所示，本發明之氣體感測層30係由感測 妖$20 = = ^洛鍍沈積方式製成之薄膜，其濺鍍於該微加 :20之表面’並具有依特定氣體之濃度值 =性，=測材料不同，其感測之特定氣體種^ R ° δ玄感】材料較佳係選自氧化鎳〔NiO〕、氧化錫 ^oc〇-5\F,vc Contincnts\PK9365.ptd 第12頁 200521437 五、發明說明（6) 〔SnO〕及其混合物，同時該感測 雜其他金屬離子，例如鋰〔L i〕 亦可依需求選擇摻 氣體係為各種有機揮發氣體述感Ω測材料可感測之C: \ L〇S〇 * 5 \ Fivc Contincnts \ PK9365. Page 10 200521437 V. The effect of the invention (4). A secondary object of the present invention is to provide a micro-sensor for organic volatile gas and a manufacturing method thereof. The micro-electromechanical technology is used to stack a suspended thin base, a gas sensing layer, a finger electrode group, and a The micro-heater constitutes a micro-sensor, so that the present invention has the effect of improving the aggregation degree of the micro-sensor. The organic volatile gas microsensor and the manufacturing method thereof according to the present invention include a suspended film base, a micro-heater, a gas sensing layer, and a finger electrode group. The micro-heater, the gas sensing layer and the interdigitated electrodes are arranged on the cymbal suspension film base. Therefore, the micro-heater directly heats the gas sensing layer directly, the gas sensing layer changes its resistance value according to the concentration value of a specific gas, and the finger and electrode group measures the resistance change of the gas sensing layer by digital The process knows the concentration value of the specific gas. [Embodiment] t In order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following describes the preferred embodiments of the present invention in detail with reference to the accompanying drawings. Figure 1 reveals a combined perspective view of the micro-sensor for organic volatile gases of the present invention; Figure 2 reveals a block diagram of the digital sensor of the organic volatile gases of the present invention for digital processing; and Figure 3 shows the miniature of the organic volatile gases of the present invention. The graph of the resistance value of the gas sensing layer and the concentration of formaldehyde. Figure 4 shows the block diagram of the manufacturing method of the micro-sensor of the organic volatile gas of the present invention; Figures 53 to 51 show the present invention. A cross-sectional view of a method for manufacturing a micro-sensor of organic volatile gas; and FIGS. 6a to "Figures reveal 200521437 V. Description of the invention (5) A perspective view of a method for manufacturing a micro-sensor of organic volatile gas invented. As shown in FIG. 2 'the micro-sensor 1 of the organic volatile body of the first embodiment of the present invention includes a suspended thin film base], a micro-heater x 20, a gas sensing layer 30, and a finger The fork electrode group 40 is configured with a digital processing unit 50, a display unit 60 (or an alarm device), and a power supply unit 70 for digital processing. please Referring to FIG. 1, the suspension film base j 〇 of the present invention is made of an insulating material, such as silicon, silicon nitride, silicon dioxide (ie, glass or quartz), etc. The suspension film base 1 〇 A recessed hole 丨, a plurality of bridge portions 12 and a support base 13. The recessed hole n is generally surrounded by a ring wall [not labeled] of the suspended film base 10. The bridge portion 2 extends in the Between the recesses n, one end is bridged to the body of the suspended film base, and the other end is bridged to the support base 13. The number and shape of the bridge portions 12 are not limited, but the bridge portion The shapes of 12 and the supporting table 3 are preferably χ-shaped, or a complete thin plate shape: the micro heater 20 is made of a metal or alloy material with good thermal conductivity by sputtering or evaporation deposition, For example, platinum / chromium [pt / Cr] or platinum / titanium [Pt / Tl, \ and other metals or alloys. The micro heater 20 is stacked on the support table 13 and has at least one heating terminal 2 丨. The heating The terminal 21 is flatly attached to the bridge portion 12 and extends outward to be connected to the digital processing unit 50. As shown by the material, the present invention The gas sensing layer 30 is a thin film made of the sensing demon $ 20 = = ^ Luo plating deposition method, which is sputtered on the surface of the micro plus: 20 'and has a concentration value according to a specific gas = property, = different measurement materials The specific gas species it senses ^ R ° δ Xuansen] The material is preferably selected from nickel oxide [NiO], tin oxide ^ oc〇-5 \ F, vc Contincnts \ PK9365.ptd Page 12 200521437 V. Invention Explanation (6) [SnO] and its mixture, and the sensing of other metal ions, such as lithium [L i], can also be selected according to the needs of the aeration system for various organic volatile gases.
Chemical，V0C〕，較佳係為含趁 A t 等官能基之有機揮發氣體。再者，基#^_基、綱基及趟基 俏仆姑粗Λ、Φ rY、丨* f 者該軋體感測層30另包含 催化材枓以加速感測速率，例如氧化鋁〔Μ 〇 〔T i 02〕、氧化錯〔z r 02〕、氧化錄「Γ 2 3 = 料共沈積複合形成該氣體感測層3〇， 仁亦可早獨形成一催化層32〔如第6b圖所示〕。 ;，再參照第1圖所示，本發明之指又電極組4〇係堆疊於 該氣體感測層30之上方，並由導電性佳之金屬或合金材料 製成，例如··金〔Au〕/鉻〔Cr〕、金〔Au〕/欽〔η〕、 銀〔Ag〕/ 鉻〔Cr〕、銀〔Ag〕/ 鈦〔Ti〕、鋁〔M〕 〔Cr〕或鋁〔A1〕/鈦〔Ti〕。該指叉電極組4〇之二端£」 分別設有一電性端子41，該電性端子41亦平貼於該橋接部 1 2上’並向外延伸以連接至該數位處理單元5 〇。 請再參照第1圖所示，本發明之數位處理單元5 〇係一積 體電路晶片，其輸入端連接於該微型感測器1之電氣端子 4 1及加熱端子2 1，並内建一濾波器5 1、一訊號轉換器5 2、 一溫度控制器5 3及一數位訊號處理器5 4，且其輸出端可連 接一顯示單元60 (或為警報器），及可藉由一電源供應單 元70提供所需電源。該濾波器5丨用以接收及過濾由該指叉 電極組4 0之電氣端子4 1輪入之類比電壓訊號，以便降低該 類比電壓訊號的雜訊值，進而提高訊號/雜訊（S/N )比Chemical, VOC] is preferably an organic volatile gas containing a functional group such as A t. In addition, the base # ^ _ 基, Gang base, and base base are thick Λ, Φ rY, 丨 * f. The rolling body sensing layer 30 further includes a catalytic material to accelerate the sensing rate, such as alumina [M 〇 [T i 02], oxidation error [zr 02], oxidation record "Γ 2 3 = co-deposition of the material to form the gas sensing layer 30, Ren can also form a catalytic layer 32 alone [as shown in Figure 6b Show] .; Referring again to Figure 1, the finger group 40 of the present invention is stacked on top of the gas sensing layer 30 and is made of a metal or alloy material with good conductivity, such as gold. [Au] / Cr [Cr], Gold [Au] / Cin [η], Silver [Ag] / Chrom [Cr], Silver [Ag] / Titanium [Ti], Aluminum [M] [Cr], or Aluminum [A1 ] / Titanium [Ti]. The two ends of the interdigitated electrode group 40 are provided with an electrical terminal 41, which is also flatly attached to the bridge portion 12 'and extends outward to connect to The digital processing unit 50. Please refer to FIG. 1 again. The digital processing unit 50 of the present invention is an integrated circuit chip, and its input end is connected to the electrical terminal 41 and the heating terminal 21 of the micro sensor 1, and a built-in Filter 5 1. A signal converter 5 2. A temperature controller 5 3 and a digital signal processor 54. The output can be connected to a display unit 60 (or an alarm) and can be powered by a power supply. The supply unit 70 provides required power. The filter 5 丨 is used to receive and filter the analog voltage signal from the electrical terminals 41 of the finger electrode group 40 in order to reduce the noise value of the analog voltage signal, thereby increasing the signal / noise (S / N) ratio
:\L〇E〇-5\Fivc Cornincnts\PK9365.ptd 第13頁 200521437 五、發明說明（7) 值，以增進該類比電壓訊號之精確 以將該濾波器51輸出之類比電壓訊；二、轉換器52用 壓訊號。該溫度控制器53可經由::v轉換為數位電 熱器20之溫度變化，以使溫度維控制該微加 調整至所需溫度。該數位訊號處理器；：：垃或快速 號轉換器52之數位電壓訊號，以計算【：：#=訊 電阻值…該電阻值推算出特定==測r; =該數位訊號處理器54亦可用以調控 ： 作動。該顯示單元60係如各種平面顯示器 :及：得之特定氣體濃度值（若為警報具：二 提：：f間中之voc濃度過高…屬不健康、危V安全 之％。该電源供應單元70用於提供該數 =單元6° (或為警報器）所需之電源。該顯4二 (或為警報益）及電源供應單元7〇係屬習 j6 於此不再予詳細說明。 又備、故 請參照第3圖所示’當本發明之微型感測器i使用曱醛氣 體做為有機揮發氣體進行氣體感測試驗時，該數位 兀50之溫度控制器53係維持該微加熱器2〇溫度為攝^ 度。此時’該二指叉電極組40之間所量測到的氣 30之電阻值係與曱醛氣體之濃度成正相關。由此可=，、j二 於戎懸置薄膜基座1 0有利於使該微加熱器2 〇在耗費 電量下’快速的加熱該氣體感測層30及維持其值定㈤/声 因此使電阻值能與氣體濃度形成幾乎為直線線性之:X ’ 關係，結果使得該微型感測器1對於甲醛濃度之偵測靈目敏: \ L〇E〇-5 \ Fivc Cornincnts \ PK9365.ptd Page 13 200521437 V. Description of the invention (7) value to improve the accuracy of the analog voltage signal to output the analog voltage signal of the filter 51; 2. The converter 52 uses a voltage signal. The temperature controller 53 can convert the temperature change of the digital electric heater 20 via :: v to make the temperature control control the micro-heater to adjust to the required temperature. The digital signal processor ::: or the digital voltage signal of the fast signal converter 52 to calculate [:: # = signal resistance value ... the resistance value is extrapolated to specific == measurer; = the digital signal processor 54 also Can be used to regulate: Act. The display unit 60 is, for example, various flat-panel displays: and: the specific gas concentration value obtained (if it is an alarm: second mention:: the voc concentration in f is too high ... it is unhealthy and dangerous to V%). The power supply unit 70 is used to provide the power required for the number of units = 6 ° (or an alarm). The display 42 (or an alarm benefit) and the power supply unit 70 are gen j6 and will not be described in detail here. Please refer to Figure 3 for reference. When the micro-sensor i of the present invention uses a formaldehyde gas as an organic volatile gas for a gas sensing test, the temperature controller 53 of the digital 50 maintains the micro-heating. The temperature of the device 20 is in degrees. At this time, the resistance value of the gas 30 measured between the two-finger electrode group 40 is positively related to the concentration of the formaldehyde gas. From this, it can be expressed that The suspended film base 10 is beneficial for the micro-heater 20 to quickly heat the gas sensing layer 30 and maintain its value ㈤ / sound under power consumption, so that the resistance value can be formed almost to the gas concentration. The linear relationship: X ', the result is that the miniature sensor 1 Sensitive detection
C:Mog〇-5\Five Contincnts\PK9365.ptd 第14頁 200521437 五、發明說明（8) 度達到最佳狀態〔10.74?/ppm(歐姆/百萬分之 =可知本發明…玄微型感測器丄之感測刀裝置-二；量 =到微量之甲搭濃度’同理亦可用以精確量 有機揮發氣體之濃度值。 ^ Ύ 請參照第4至6圖所示，其將於下文詳細揭示 微機電技術製造該微型感測器1之主要流程步驟。x月利用 型：所：’本發明有機揮發氣體之微 面，以形成具該凹孔η之懸置薄膜基座10。 之表 广係“夕、氮化…氧切、玻璃或石英玄^ a =所不，该絕緣基板1〇a較佳預先進行表面清潔。如第 5 c圖所示’在形成該凹孔〗丨後， 、 -步由該凹孔"之底側鑽m形成需求選擇進 .^ 取 逋孔11 a。本發明伤矸 二同-懸置薄膜基座10上之不同位置分 ^月，編 同一懸置薄膜基座1 〇在加工後係 器j。 说你j切割形成數個微型感測 測：m4及5d圖所示，本發明有機揮發氣體之微型威 上延伸數個橋接部12=基座10'凹孔11 座1 0進一步堆疊一支撐#】 芽口 。5亥懸置薄膜基 台13，今以形成該橋接部12及支推 ..^^ 前，該橋接部12已預先加工&該懸置薄膜基座10之 成薄板狀。 成父又在該支樓台13上，且形 C：\Lo£〇-5\Fivc Conlincnts\PK9365.pid 第15頁 麵 200521437 五、發明說明（9) 請參照第4、5e及6a圖所示，本發明有機揮發氣體之微 型感測器之製造方法第三步驟係在該支撐台1 3上形成該微 加熱器2 0。δ亥彳;ά加熱器2 0係由麵/絡或叙/欽等金屬或人金 材料或多晶矽（polysi 1 icon )等材料以濺鍍（或蒸錢）王 沈積方式製成。該微加熱器2 0可形成網狀、柵狀咬巧單之 薄片狀’且其設有至少一加熱端子21。該加熱端子平貼 於該橋接部1 2上，並可向外延伸。 請參照第4、5f、5g及6b至6d圖所示，本發明有機揮 氣體之Μ型感測器之製造方法第四步驟係在該微加熱器2 〇 上形成該氣體感測層30。該氣體感測層3〇係由氧镇' ° 化錫等材料…沈積方式製成之薄膜，其亦；：；鐘二 其他金屬，以增加其感測效能。再者，該氣體感測層另 可包含氧化鋁、氧化鈦、氧化锆、氧化鎵等催化材料 加速感測速率。該催化材料可與該感測材料共沈積複丨 成該氣體感測層30，或選擇單獨形成一催化層31 (如第化 圖所不〕。如第5f及5g所示，當單獨形成該催化層31時， =催化層3 i即可用以電性阻隔該氣體感測層3 〇及微加敎写 二：i6b!所示，當該催化材料直接複合於該氣體感測 :器20:开，!欲雙重確保絕緣效果時，則可預先在該微加 二:緣層32 ’以電性阻隔該氣體感測層30及丨· 雷阳益 以避免該微加熱器20影響該氣體感測層3〇之 料劁* : : ί緣層32係由矽、氮化矽或二氧化矽等絕緣材 _ ，如第6b及6〇圖所示，本發明亦可同時設置 4催化層3 1及絕緣層3 2。 C：\L〇fio.5\pivc c〇ntinents\PK9365. PUl 第16頁 200521437 五、發明說明（ίο) 請”第4,、，5h及6e圖所示，本發明有機揮發氣體之微 型感測益之製造方法第五步驟係在該氣體感測層3 〇上形成 一指叉電極組40。該指又電極組40係由具金/鉻、金/鈦、 銀/鉻、銀/欽、銘/路或鋁/鈦等複合材料製成。兮#叉電 極組40之二端分別設有一電性端子41，該電性端^亦平 貼於該橋接部1 2上，並可向外延伸。 請參，第4、5i及6f圖所示，本發明有機揮發氣體之微 型感測器之製造方法第六步驟係蝕刻該橋接部丨2及支严二 13之下表面，以縮減其厚度。本發明係經由該通孔113#對^ 該支撐板i〇b之下表面進行蝕刻。該支撐板1〇b蝕刻愈薄， 該橋接部1 2及支撐台1 3對該微加熱器2〇之加熱效率的影響 愈低，且愈有利於維持該氣體感測層3〇之恆定高溫，=& 少熱能耗損。惟，該蝕刻製程並非本發明製造方法中 對必要步驟。最後，如第2圖所示，將該微型感測器1 熱端子21及電性端子41連接至該數位處理單元5〇 /輸入 端，即可構成一有機揮發氣體之量測儀器成品。 p。如上所述，相較於各種習用微型感測器不具有微加熱 器，或微加熱器無法快速加熱及維持恆溫等缺點，第^圖 之本發明利用該懸置薄膜基座1〇之架構確實能使該微加埶 =20易於加速加熱及維持怪定高溫，進而提高氣體感測之 準確度、縮短氣體感測之時程及有效節省耗電量。 雖然本發明已利用前述較佳實施例詳細揭示，然其並 二以限定本發明，任何熟習此技藝者，在不脫離本發明之 神和範圍内，當可作各種之更動與修改，因此本發明之 -\L〇£〇.5\Fivc C〇ntincnts\PK9365.pid 第17頁 200521437 五、發明說明（11) 保護範圍當視後附之申請專利範圍所界定者為準。 C:\L〇B〇-5\Five Contincnts\PKlJ365.ptd 第18頁 200521437 第1圖··本發明有機揮發 。 乳體之微型感測器之組合立 第2圖··本發明有機揮發 之方塊示意圖。 、體之微型感測器進行數位 第3圖·•太称ae 士 w . 圖式簡單說明 【圖式簡單說明 圖 理之方塊不意圖。 ·一π 第3圖··本發明右她你 層的電阻值與甲醛、農声*氣體之微型感測器之氣體感測 〆辰及之曲綠θ 第4圖··本發明右地故 冰圖。 十资听有機揮發齑 L φC: Mog〇-5 \ Five Contincnts \ PK9365.ptd Page 14 200521437 V. Description of the invention (8) Degree reached the best state [10.74? / Ppm (ohm / parts per million = can know the invention ... The device of the sensing knife of the device-2; the amount = the concentration of traces of nails can be used to accurately measure the concentration of organic volatile gases. ^ Ύ Please refer to Figures 4 to 6, which will be described in detail below. Reveal the main process steps of the micro-electromechanical technology for manufacturing the miniature sensor 1. The month-of-month use type: so: 'the micro-facet of the organic volatile gas of the present invention to form a suspended film base 10 with the recess η. The system "Xi, Nitriding ... Oxygen cutting, glass or quartz Xa ^ a = No, the surface of the insulating substrate 10a is preferably cleaned in advance. As shown in Figure 5c 'after the recess is formed' ,,-Steps are formed by the bottom hole m of the recessed hole. ^ Take the hole 11 a. The wounds of the present invention are the same-different positions on the suspended film base 10 are divided into months and edited the same Suspended film base 1 〇 After processing, the device j. Say you j cut into several micro-sensing: as shown in m4 and 5d, the present invention has A number of bridges are extended on the micro-wafer of the organic volatile gas 12 = base 10 ′ recessed hole 11 seat 1 0 further stacked with a support #】 Bud mouth. The film base 13 is suspended by 5H, and now the bridge 12 and 12 are formed. Before pushing .. ^^, the bridge portion 12 has been processed in advance & the suspension film base 10 is formed into a thin plate shape. The father is again on the supporting platform 13 and has a shape of C: \ Lo £ 〇-5 \ Fivc Conlincnts \ PK9365.pid Page 15 200521437 V. Description of the invention (9) Please refer to Figures 4, 5e and 6a. The third step of the method for manufacturing the micro-sensor for organic volatile gases of the present invention is on the support. The micro-heater 2 0 is formed on the stage 13. The heater 20 is made of metal such as surface / network or Syria / chin or metal material or polysilicon (polysi 1 icon) by sputtering (or Steamed money) made by the king deposition method. The micro-heater 20 can be formed into a web-like, grid-like, thin sheet-like shape and is provided with at least one heating terminal 21. The heating terminal is flatly attached to the bridge portion 1 2 It can be extended outward. Please refer to Figures 4, 5f, 5g, and 6b to 6d. The gas-sensing layer 30 is formed on the micro-heater 20. The gas-sensing layer 30 is a thin film made of materials such as oxygen and tin, etc., which is also deposited in: Other metals to increase its sensing efficiency. Furthermore, the gas sensing layer may further include alumina, titanium oxide, zirconia, gallium oxide and other catalytic materials to accelerate the sensing rate. The catalytic material may be co-existed with the sensing material. Deposition is performed to form the gas sensing layer 30, or a catalytic layer 31 is formed separately (as shown in the figure). As shown in sections 5f and 5g, when the catalytic layer 31 is formed separately, the = catalyst layer 3 i can be used to electrically block the gas sensing layer 3 0 and micro-addition 2: i6b! The material is directly compounded with the gas sensor: device 20: on, if you want to double ensure the insulation effect, you can add two in advance: the edge layer 32 'to electrically block the gas sensing layer 30 and 丨 · Leiyang To prevent the micro heater 20 from affecting the material of the gas sensing layer 30 *:: The edge layer 32 is made of insulating material such as silicon, silicon nitride or silicon dioxide, as shown in Figures 6b and 60. As shown, the present invention can also be provided with 4 catalytic layers 31 and insulating layers 32 at the same time. C: \ L〇fio.5 \ pivc c〇ntinents \ PK9365. PUl Page 16 200521437 V. Description of the Invention (please refer to Figures 4, 5, 5h and 6e). The fifth step of the manufacturing method of the test benefit is to form a finger electrode group 40 on the gas sensing layer 30. The finger and electrode group 40 is made of gold / chrome, gold / titanium, silver / chrome, silver / chin , Ming / Lu or aluminum / titanium and other composite materials. Xi # Fork electrode group 40 is provided with an electrical terminal 41 at each of the two ends, the electrical terminal ^ is also flatly attached to the bridge portion 12 and can be Please refer to Figures 4, 5i and 6f. The sixth step of the method for manufacturing the organic volatile gas micro-sensor of the present invention is to etch the lower surface of the bridge section 2 and the support section 13 to reduce Its thickness. In the present invention, the lower surface of the support plate i0b is etched through the through hole 113 #. The support plate 10b is etched thinner, and the bridge portion 12 and the support table 13 are micro-heated. The lower the effect of the heating efficiency of the device 20, and the more beneficial it is to maintain a constant high temperature of the gas sensing layer 30, the less thermal energy loss. However, the etching process is not The necessary steps in the manufacturing method of the invention. Finally, as shown in FIG. 2, the thermal sensor 21 and the electrical terminal 41 of the micro sensor 1 are connected to the digital processing unit 50 / input terminal to form an organic volatilizer. The finished product of the gas measuring instrument. P. As mentioned above, compared with various conventional micro-sensors, they do not have micro heaters, or the micro heaters cannot heat quickly and maintain a constant temperature. The structure of the film base 10 is indeed able to make the micro plus 埶 = 20 easy to accelerate heating and maintain the strange high temperature, thereby improving the accuracy of gas sensing, shortening the time duration of gas sensing and effectively saving power consumption. The present invention has been disclosed in detail using the foregoing preferred embodiments, but it is also used to limit the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Zhi- \ L〇 £ 〇.5 \ Fivc C〇ntincnts \ PK9365.pid Page 17 200521437 V. Description of Invention (11) The scope of protection shall be determined by the scope of the attached patent application. C: \ L〇 B〇-5 \ Five Contincnts \ PKlJ3 65.ptd Page 18 200521437 Figure 1. The organic volatilization of the present invention. The combination of micro-sensors of milk. Figure 2. The schematic diagram of the organic volatilization of the present invention. Figure 3 • The name is too called ae, w. The diagram is briefly explained. [The diagram is not intended to explain the square of the diagram. · Π Figure 3 · · The present invention shows the resistance value of your layer, formaldehyde, agricultural sound, and gas. The gas sensor of the miniature sensor and the green curve θ Figure 4 · The ice map on the right of the present invention. Shi Zi Ting Organic Volatile Plutonium L φ
之流程方塊圖。 乳體之微型感測器之製造方A ^ u a u i £gj 方法之剖視圖 一… 第6a至6f圖··本發明 機揮發氣體之微型感測器之 第5 a至5 i圖：太；^ X 機揮發氣體之微型感測器之製造 製造 1 微型感測器 10 10b 支撐板 11 12 橋接部 13 21 加熱端子 30 32 絕緣層 40 50 數位處理單 元51 53 溫度控制器 54 70 電源供應單元 :\L〇i〇-5\Five Cornincnts\PK9365.pul 心置薄膜基座1 〇 a絕緣基板 凹孔 Ha通孔 2〇微加熱器 =體感測層31催化層 $又電極組41電氣;子 52訊號轉換器 °凡就處理器60顯示單元 第19頁Process block diagram. Manufacture of milky miniature sensor A ^ uaui £ gj Sectional view of method one ... Figures 6a to 6f ... Figures 5a to 5i of the miniature sensor for volatile gases of the present invention: too; ^ X Manufacture of micro-sensors for volatile gases 1 Micro-sensors 10 10b Support plate 11 12 Bridge 13 13 Heating terminals 30 32 Insulation layer 40 50 Digital processing unit 51 53 Temperature controller 54 70 Power supply unit: \ L 〇i〇-5 \ Five Cornincnts \ PK9365.pul Heart film base 1 〇a Insulating substrate recessed hole Ha through hole 2 Micro heater = Body sensing layer 31 Catalytic layer $ Electrode group 41 electrical; sub 52 signal Converter ° Where the processor 60 display unit 第 19 页