TW201115140A - Gas sensor capable of simultaneously sensing oxygen and carbon dioxide, manufacturing method thereof and its gas sensor system - Google Patents

Gas sensor capable of simultaneously sensing oxygen and carbon dioxide, manufacturing method thereof and its gas sensor system Download PDF

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TW201115140A
TW201115140A TW98135935A TW98135935A TW201115140A TW 201115140 A TW201115140 A TW 201115140A TW 98135935 A TW98135935 A TW 98135935A TW 98135935 A TW98135935 A TW 98135935A TW 201115140 A TW201115140 A TW 201115140A
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Taiwan
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sensing
oxygen
carbon dioxide
heating member
gas sensor
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TW98135935A
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Chinese (zh)
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Long-Ming Fu
Jia-Yan Li
Zhi-Ming Zhang
Jin-Feng Jiang
Chang-Ben Chen
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Metal Ind Res & Dev Ct
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Publication of TW201115140A publication Critical patent/TW201115140A/en

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Abstract

The present invention provides a gas sensor capable of simultaneously sensing oxygen and carbon dioxide, manufacturing method thereof and its gas sensor system. The gas sensor manufactured by the manufacturing method includes a substrate, a first sensing unit and a second sensing unit. By simultaneously forming a plurality of first and second conductive members and first and second heating members on the substrate, the manufacturing process can be simplified and thus the operating time can be reduced. Further, in cooperation with coated oxide capable of reacting with oxygen and carbon dioxide to generate electrical signals for simultaneously detecting the concentrations of oxygen and carbon dioxide, the practicability of gas sensing can be relatively increased. In addition, the gas sensor can be combined with other units to constitute an integrated gas sensor system.

Description

201115140 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種氣體感測器,特別是指一種可同 時感測氧氣與二氧化碳的氣體感測器》 【先前技術】 一般化學實驗室和品管檢驗室内利用原子或分子吸收 光譜、原子或分子激發螢光光譜以及氣相層析儀等,是最 常用的氣體分析設備,這些儀器雖然具有較佳的靈敏度及 準確度,但儀器的構造複雜、耗電量高,以及價格昂貴’ 往往造成使用上的限制。 而半導體氣體感測器便成為克服上述問題之簡易型偵 測氣體的裝置,該半導體氣體感測器是用來將偵測到的氣 體濃度轉變成電信號輸出,可用以偵測各種氣體,其應用 範圍例如:空氣清淨機、漏氣警報器、換氣扇、空調換氣監 視器,以及酒精檢測等。 詳細來說,半導體氣體感測器包括有陶瓷基板、電極 、感測材料層,及加熱器,其原理是利用感測材料層之氧 化物表面吸附氣體含量多寡時產生的電阻變化,以監測感 測器周圍的氣體濃度變化。但是,這種氣體感測器只能監 測單一種類的氣體,例如圖1所示,是一種「二氧化碳 的氣體感測器,該感測器之感測材料層〖1是結合如〇2及 La2〇3的感測材料,利用將感測材料層u與二氧化碳結人 會發生變化而產生電訊號,經該兩電極丨3量測後,可判別 空氣中c〇2濃度,不過,由於加熱器12是配置在該基板 201115140 側,°亥加熱益12在通電加熱的過程中,往往對於感測材 料層11 成加熱不均勻的現象,因而必需令該加熱器加 熱至^高的溫度(如_t),才能夠使該氣體感測器對於 co2濃度具有較佳的量測靈敏度,因此導致加熱之能源過度 消耗。 氧氣」的氣體感測器來看 右以 - ...... Μ 如美國專利 US2_/0081473 A1,是利用半導體製程製作偵測氧氣氣體 的感測器’其所使用之氧化物半導體感測層的材料為飾離 子(cerium ions)及給離子(hafnium 以9 : ι的比例 混合而成,此種材料所製作之感測器只能用於偵測氧氣氣 體,且其工作溫度需加熱至6〇〇t方有較佳之反應,其工作 溫度高且偵測氣體的種類有限。 如上述之兩種氣體感測器,其所偵測的氧氣及二氧化 碳需具有不同感測材料層,而每—種氣體感測器的製程不 同也使其作業較為繁複,因&,如何簡化製作氣體感測器 的作業時間’同時增加氣體感測的實用性’能夠以單 測器來同時測知二氧化碳與氧氣之濃度,“前開發氣體 感測器相關領域者所需解決的課題。 【發明内容】 因此’本發明之目的,卽在楹 、即在楗供一種可同時感測氧氣 與二氧化碳的氣體感測器’可提高氣體感測之實用性。 二 本發明之另一目的,即在提供-種可同時感测氧氣血 氧化碳的氣體感測器之製造方法,可有效簡化製程作業 201115140 "本發明之又-目的,即在提供—種可同時感測氧氣與 二氧化碳的氣體感測系統,可提高偵測靈敏度。 、 於是,本發明可同時感測氧氣與二氧化碳的氣體感剩 器’包含-基板、-第一感測單元,及一第二感測單元。 該基板具有相連接的一第一設置面,及一第二設置面 0 该第-感測單元具有多數相間隔地設置在該基板之第 -設置面上的第一導電件、至少一設置在該第一設置面上 的第一加熱件,及一鍍附於該等第一導電件與第一加熱件 上的第一感測層,其中,該第一加熱件是位於兩個第一、導 電件之間,而每一第一感測層是一種氧化物,能與氧氣結 合會發生變化而產生電訊號。 該第二感測單元具有多數相間隔地設置在該基板之第 二設置面上的第二導電件、至少一設置在該第二設置面上 的第二加熱件,及一鍍附於該等第二導電件與第二加熱件 上的第二感測層,其中,該第二加熱件是位於兩個第二導 電件之間,而每一第二感測層是一種氧化物,能與二氧化 碳結合會發生變化而產生電訊號。 又’本發明可同時感測氧氣與二氧化碳的氣體感測器 之製造方法,包含下列步驟:(a)成型一基板;(b)在該基板 上同時形成有多數第一導電件、第二導電件、至少一第一 加熱件,及至少一第二加熱件;(勹將一種與氧氣結合會發 隻'化而產生電祝说的氧化物,錄附在該等第一導電件與 第一加熱件上而形成多數第一感測層;(幻將一種與二氧化 201115140 碳S會發生變化而產生電訊號的氧化物鍍附在該等第二 導電件與第二加熱件上而形成多數第二感測層。 本發月可同時感測氧氣與二氧化碳的氣體感測系 統,包含一個前已述及的氣體感測器、一與該氣體感測器 之第加熱件及第二加熱件電連接的溫度控制單元、—與 該氣體感測器之該等第—導電件及第二導電件電連接的介 面電路單元、—與好面電路單元電連接㈣波單元、一 與該滤波單S電連接的訊號轉接單元、—與該溫度控制單 7G及H;轉接單%電連接的數位訊號處理單元,及一與該 等單元電連接並供應電源的電源供應器。 ^ ^ 本發明的功效在於,藉由在該基板上同時形成有第一 ^電件、第二導電件、第一加熱件,及第二加熱件,而將 導電件與加熱件的加工製程簡化’可縮短其作業時間而 且,配合鍍附有可與氧氣及二氧化碳發生變化而產生電訊 號的氧化物’進而在使用時能夠同時偵測氧氣與二氧化碳 的濃度,相對提南其氣體感測之實用性。 【實施方式】 、有關本發明之前述及其他技術内容、特點與功效,在 下配σ參考圖式之較佳實施例的詳細說明中,將可清楚 的呈現。 一氣化碳的 公共空間環 、一第一感 产 圖、3所示,本發明可同時感測氧氣與 乳體感測器可應用在車内空間空氣品質監測、 境品質監測等範圍,其較佳實施例包含—基板2 測單元3,及一第二感測單元4。 201115140 該基板2為石英材質所製成 接的第一設置面2卜及一第二設置面22/2具有兩相連 =-感測單元3具有兩相間隔地設置在該基板2之 第一扠置面2〗上的第—逡雪 #電件31、一設置在該第-設置面 、一加熱件32,及-鑛附於該等第—導電件3】與 ^二熱件% i的第—感測層33 ’其令’該第—加熱件 疋立於兩第-導電件31之間,在本實施例中,該第一感 測層33疋利用將二氧化錫咖〇2)鍵附在該等第一導電件η ”第加熱件32上’即該第一感測層%與氧氣結合會發 生變化而!生電訊號,另外,該等第—導電件31及第一加 熱件33在該第—設置面21上呈指又狀,而且其材質皆為 導電性高的白金。 該第二感測單元4具有兩相間隔地設置在該基板2之 第二設置面22上的第二導電件41、一設置在該第二設置面 22上的第二加熱件42 ,及一鍍附於該等第二導電件μ與 第二加熱件42上的第二感測層43,其中,該第二加熱件 42是位於兩第二導電件41之間’在本實施例中,該第二感 測層43是利用將二氧化錫與三氧化二鋼共鍵(Sn〇2+La2⑻ 在該等第二導電件41與第二加熱件42上,即每一第二感 測層43與二氧化碳結合會發生變化而產生電訊號,另外, 該等第二導電件41及第二加熱件42在該第二設置面。上 呈指叉狀,而且其材質皆為導電性高的白金。 首先,將該第一加熱件32與第二加熱件42施加電壓 運用6玄基板2為導熱性差的石英材質,其特性可將高严 201115140 侷限在第一加妖件32盘望-‘也/4· ㈣叮 ”第-加熱件42上,再配合指又狀 二 以增加接觸面積,快速提高加熱效率,藉此使第 感測層33與第二感測層43迅速地將溫度提升到工田 度2贼,進而提升第—感測層33與第二感測層4 ^201115140 VI. Description of the Invention: [Technical Field] The present invention relates to a gas sensor, and more particularly to a gas sensor capable of simultaneously sensing oxygen and carbon dioxide. [Prior Art] General Chemistry Laboratory and The quality control equipment uses atomic or molecular absorption spectroscopy, atomic or molecular excitation fluorescence spectroscopy, and gas chromatograph. It is the most commonly used gas analysis equipment. Although these instruments have better sensitivity and accuracy, the instrument structure Complexity, high power consumption, and high price often result in restrictions on use. The semiconductor gas sensor is a simple gas detecting device for overcoming the above problems. The semiconductor gas sensor is used to convert the detected gas concentration into an electrical signal output, which can be used to detect various gases. Applications include air cleaners, air leak alarms, ventilation fans, air conditioning ventilation monitors, and alcohol testing. In detail, the semiconductor gas sensor includes a ceramic substrate, an electrode, a sensing material layer, and a heater, and the principle is to use the resistance change generated when the oxide surface of the sensing material layer adsorbs the gas content to monitor the sense. The concentration of gas around the detector changes. However, this gas sensor can only monitor a single type of gas. For example, as shown in Figure 1, it is a "carbon dioxide gas sensor. The sensing material layer of the sensor is combined with 〇2 and La2. The sensing material of the crucible 3 is generated by changing the sensing material layer u and the carbon dioxide junction, and the concentration of c〇2 in the air can be discriminated by the measurement of the two electrodes ,3, however, due to the heater 12 is disposed on the side of the substrate 201115140. During the heating and heating process, the heating material layer 11 tends to be unevenly heated, so the heater must be heated to a high temperature (such as _ t), the gas sensor can have better measurement sensitivity for the co2 concentration, thus causing excessive consumption of heating energy. The gas sensor of the oxygen gas looks right - ... U.S. Patent No. 2/0081473 A1 is a sensor for detecting oxygen gas by a semiconductor process. The material of the oxide semiconductor sensing layer used is cerium ions and ion ions (hafnium 9: ι). Proportioned mixture The sensor made of this material can only be used to detect oxygen gas, and its working temperature needs to be heated to 6 〇〇t for better reaction, its working temperature is high and the type of detection gas is limited. The two kinds of gas sensors need to have different sensing material layers for the oxygen and carbon dioxide detected, and the process of each gas sensor is different, which makes the operation more complicated. The working time of the measuring device 'at the same time increasing the practicality of gas sensing' enables simultaneous measurement of the concentration of carbon dioxide and oxygen by a single detector, "a problem that needs to be solved in the field of gas sensor related development. [Content of the invention] Therefore, the object of the present invention is to improve the utility of gas sensing by providing a gas sensor capable of simultaneously sensing oxygen and carbon dioxide. 2. Another object of the present invention is to provide - A method for manufacturing a gas sensor capable of simultaneously sensing oxygen blood carbon monoxide, which can effectively simplify the process operation 201115140 " the purpose of the present invention is to provide oxygen at the same time The gas sensing system of carbon dioxide can improve the detection sensitivity. Thus, the present invention can simultaneously sense the gas-sensing device of the oxygen and carbon dioxide, including the substrate, the first sensing unit, and the second sensing unit. The substrate has a first arrangement surface connected thereto, and a second installation surface 0. The first sensing unit has a plurality of first conductive members disposed at intervals on the first surface of the substrate, at least one of which is disposed at a first heating member on the first setting surface, and a first sensing layer plated on the first conductive member and the first heating member, wherein the first heating member is located at two first, Between the conductive members, and each of the first sensing layers is an oxide that changes in combination with oxygen to generate an electrical signal. The second sensing unit has a plurality of second conductive members disposed at intervals on the second mounting surface of the substrate, at least one second heating member disposed on the second mounting surface, and a plating plate a second sensing layer and a second sensing layer on the second heating member, wherein the second heating member is located between the two second conductive members, and each of the second sensing layers is an oxide capable of Carbon dioxide binding changes to produce electrical signals. Further, the present invention provides a method for manufacturing a gas sensor for simultaneously sensing oxygen and carbon dioxide, comprising the steps of: (a) molding a substrate; (b) simultaneously forming a plurality of first conductive members and second conductive materials on the substrate. a member, at least one first heating member, and at least one second heating member; (勹 an oxide that combines with oxygen to generate an electric oxide, is attached to the first conductive member and the first Forming a plurality of first sensing layers on the heating member; (a magical layer is formed by plating an oxide that changes with the carbon dioxide 201115140 carbon S to generate an electrical signal to form a plurality of the second conductive member and the second heating member Second sensing layer. The gas sensing system capable of simultaneously sensing oxygen and carbon dioxide, comprising a gas sensor as described above, a heating element and a second heating element of the gas sensor a temperature control unit electrically connected, a interface circuit unit electrically connected to the first conductive member and the second conductive member of the gas sensor, an electrical connection with the good surface circuit unit (four) wave unit, and a filter S electrical connection signal a unit, a digital signal processing unit electrically connected to the temperature control unit 7G and H; a transfer unit, and a power supply unit electrically connected to the units and supplying power. ^ ^ The effect of the present invention is A first electric component, a second conductive component, a first heating component, and a second heating component are simultaneously formed on the substrate, and the processing process of the conductive component and the heating component is simplified, the working time can be shortened, and the plating is matched. With the oxide which can change the oxygen signal and the carbon dioxide to generate the electric signal, the concentration of oxygen and carbon dioxide can be detected at the same time, and the utility of the gas sensing is relatively advanced. [Embodiment] The foregoing and other technical contents, features, and functions will be clearly described in the detailed description of the preferred embodiment of the σ reference pattern. A common space ring of vaporized carbon, a first sensory map, and 3 The invention can simultaneously sense that the oxygen and the emulsion sensor can be applied to the indoor space air quality monitoring, the environment quality monitoring and the like, and the preferred embodiment comprises the substrate 2 Element 3, and a second sensing unit 4. 201115140 The substrate 2 is made of quartz material and the first setting surface 2b and a second setting surface 22/2 have two connections=-the sensing unit 3 has two a first portion of the substrate 2 disposed on the first fork surface 2 of the substrate 2, an electric device 31, a first set surface, a heating member 32, and a metal attached to the first The first sensing layer 33 of the conductive member 3 and the second heat member % i is disposed between the two first conductive members 31. In the embodiment, the first sensing The layer 33 is attached to the first conductive member η "the heating member 32 by using a tin dioxide curry 2) bond, that is, the first sensing layer % is combined with oxygen to change; the power generation signal, and The first conductive member 31 and the first heating member 33 are pointed and shaped on the first mounting surface 21, and the materials are all platinum having high conductivity. The second sensing unit 4 has a second conductive member 41 disposed on the second mounting surface 22 of the substrate 2 at intervals, a second heating member 42 disposed on the second mounting surface 22, and a second sensing unit 4 a second sensing layer 43 plated on the second conductive member 51 and the second heating member 42, wherein the second heating member 42 is located between the two second conductive members 41. In this embodiment, The second sensing layer 43 is formed by co-bonding tin dioxide and aluminum oxide (Sn〇2+La2(8) on the second conductive member 41 and the second heating member 42, that is, each second sensing layer. 43 is combined with carbon dioxide to generate a signal, and the second conductive member 41 and the second heating member 42 are in the shape of a fork on the second setting surface, and the materials are all of high conductivity platinum. First, the first heating element 32 and the second heating element 42 are applied with a voltage. The 6-shaped substrate 2 is made of a quartz material having poor thermal conductivity, and its characteristics can limit the high-strength 201115140 to the first plus-devil piece 32-- /4· (4) 叮" the first heating element 42, and then match the finger and shape 2 to increase the contact area, and quickly improve the heating efficiency Whereby the first sensing layer 33 and the second sensing layer 43 rapidly raising the temperature of the work 2 thief field, thereby improving - of the sense layer 33 and the second sensing layer 4 ^

測特性。 蒞A 除此之外,由於該等第-導電件31、第—加熱件32、 第二導電件41、第二加熱件42皆為白金材質,對於該第— 感測層33與第二感測層43而言具有良好催化作用,所以 能夠提高感測靈敏度。 在此要說明的是,本發明為可同時感測氧氣與二氧化 碳的氣體感測器’其量測電阻值與氣體濃度變化為成對應 關係’且氣體濃度愈高,量測之電阻值變化愈高,但量測 之電阻值會受到溫度影響,在實驗過程中,該第—加熱件 32與第二加熱件42的工作溫度在2〇〇。〇至3〇〇t>c為出現較 佳反應靈敏度之工作溫度範圍。 如圖4、5所不,為氧氣感測與二氧化碳感測之結果關 係圖,是本實施例在工作溫度25〇〇c之狀態,表示電阻值與 濃度變化為一線性關係,兩者的靈敏度分別為534 3 Ω/%氧 氣濃度與15.8 ΚΩ/lOOOppm二氧化碳濃度,由於任何製程 之微小變動都會造成此反應溫度之改變,所以工作溫度以 200°C 至 300°C 為佳。 如上所述,利用該第一加熱件32設置於第一感測層Μ 與基板2之間’且第二加熱件42設置於第二感測層43與 基板2之間,使其能充份且均勻地對第一感測層33與第二 201115140 感測層43加熱,因此,在量測氣體濃度時,可維持恆定高 /m而達到較佳的加溫效果,使其具有提高氣體濃度感測準 確度’進而縮短感測時間而減少電量的消耗。Measuring characteristics. In addition, since the first conductive member 31, the first heating member 32, the second conductive member 41, and the second heating member 42 are all made of white gold, for the first sensing layer 33 and the second feeling The measurement layer 43 has a good catalytic effect, so the sensing sensitivity can be improved. It should be noted that the present invention is a gas sensor capable of simultaneously sensing oxygen and carbon dioxide, and the measured resistance value and the gas concentration change are in a corresponding relationship', and the higher the gas concentration, the more the measured resistance value changes. High, but the measured resistance value is affected by temperature. During the experiment, the operating temperature of the first heating element 32 and the second heating element 42 is 2 〇〇. 〇 to 3〇〇t>c is the operating temperature range where the sensitivity of the reaction is good. As shown in FIGS. 4 and 5, the relationship between oxygen sensing and carbon dioxide sensing is a state in which the operating temperature is 25 〇〇c, indicating that the resistance value and the concentration change are linear, and the sensitivity of the two is The 534 3 Ω/% oxygen concentration and the 15.8 ΚΩ/lOOOppm carbon dioxide concentration, respectively, are caused by small changes in any process, so the operating temperature is preferably 200 ° C to 300 ° C. As described above, the first heating member 32 is disposed between the first sensing layer Μ and the substrate 2 and the second heating member 42 is disposed between the second sensing layer 43 and the substrate 2 to make it sufficient. And uniformly heating the first sensing layer 33 and the second 201115140 sensing layer 43. Therefore, when measuring the gas concentration, a constant height/m can be maintained to achieve a better heating effect, so that the gas concentration is increased. Sensing accuracy 'and thus shortening the sensing time and reducing the consumption of power.

又’該第一感測層33與第二感測層43分別依據環境 中氡氣與二氧化碳之氣體濃度的不同而改變其電阻值,提 咼感測氣體濃度的靈敏度,所以,本發明利用兩種不同的 氣體感測材料,同時整合能偵測氧氣、二氧化碳,且在工 作/嚴度200 C至300 C之間有較佳的反應效果,此一工作溫 度遠比習知技術的加熱感測溫度6〇〇。〇或1〇〇〇1以上低了 許多自然可以無需尚熱就可以快速反應,實用性上大為 提升° .、、、 如圖2、6所示,上述可同時感測氧氣與二氧化碳的氣 體感測器之產品,是利用以下所述之製造方法所製成,該 製造方法包含下列步驟: / 首先’如步驟51所示’成型一由石英材質所製成的基 接著’如步驟52所示’在該基板2上同時形成有兩 ^第-導電件31、兩個第二導電件41、—第_加熱件I 及一第二加熱件42。 〇、、Ί文 1王,、孔軋 '结合會發生變化 而產生電訊號的二氧化錫,㈣在該等第_導電件η —加熱件32上而形成一第一感測層33。 變化=生所示,將一種與二氧化碳結合會發生 匕而產生電訊號的二氧化錫與三氧化二鑭共 二導電件41與第二加熱件42上,形成-第二感測層43。 201115140 如圖7所示’由本發明可同時感測氧氣與二氧化碳的 氣體感測器,即可組成可同時感測氧氣與二氧化碳的氣體 感測系統’該氣體感測系統包含與該氣體感測器62電連接 之一溫度控制單以】及—介面電路單元〇電連接該介 面電路單元63的叙單元64、—電連接該滤波單元料的 訊遽轉接單元65、—電連接該溫度控制單元61與訊號轉接 車疋65的數位訊號處理單元66、一電連接該數位訊號處理 早:66的顯示器67,及一與該溫度控制單元η、介面電 ,單元63、渡波單元64、訊號轉接單元65、數位訊號處理 早兀66電連接並供應電源的電源供應器68。 該溫度控制單S 61可與如圖2所示之第^加熱件Μ 與第-加熱件42電連接以提供_穩定電壓,使氣體感測器 =之溫度維持於-高溫⑽t至縱c),湘該介面電路 早兀63電連接該等第—導電件31與該等第二導電件41, 將所接收到電訊號(即該氣體感_ 62輸出之電阻值)轉換 成類比電壓值 < 後再利H皮單元64過遽此類比輸出電 壓訊號,以降低其中所含有的雜訊值,該濾波單S 64輸出( 之類比電壓訊號透過該訊號轉接單元65轉換為數位訊號,1 該數位訊號處理單元66接收該訊號轉接單元&輸出之數 位電壓訊號並分別計算出該氣體感測ϋ 62之感測層電阻值 ,由電阻值推算出之環境氧氣與二氧化碳氣體濃度,將圖4 、5之結果關係圖顯示於該顯示器上。 因此’利用本發明之可同時感測氧氣與二氧化碳的氣 體感測益彳自仃將溫度維持在最佳的工作溫度,亦為線 10 201115140 性關係良好、穩定度高、靈敏度高及響應時間短之優點, 而且可同時提供準確的氧氣與二氧化碳氣體濃度訊號之整 合式氣體感測系統。 综上所述,藉由在該基板2上同時形成有該等第一導 電件31、第二導電件41、第一加熱件32,及第二加熱件 42,將其加工製程簡化,藉此縮短其作業時間,而且,配 σ鍍附有與氧及二氧化碳發生變化而產生電訊號的氧化物 進而在使用時能夠同時偵測氧氣與二氧化碳的濃度,相 對提尚其氣體感測之實用性,故確實能達成本發明之目的 〇 惟以上所述者,僅為本發明之較佳實施例而已,當不 月b以此限定本發明實施之範圍,即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾,皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一示意圖’說明習知的氣體感測器; 圖2是一立體圖,說明本發明可同時感測氧氣與二氧 化碳的氣體感測器之較佳實施例; 圖3是一示意圖’輔助說明圖2之態樣; 圖4疋一關係圖’說明氧氣濃度與電阻值的關係; 圖5是一關係圖,說明二氧化碳濃度與電阻值的關係 9 圖6是一方塊圖,說明本發明可同時感測氧氣與二氧 化石厌的氣體感測器之製造方法的較佳實施例;及 201115140 圖7是一方塊圖,說明本發明可同時感測氧氣與二氧 化碳的氣體感測系統之較佳實施例。Moreover, the first sensing layer 33 and the second sensing layer 43 respectively change the resistance value according to the gas concentration of the helium gas and the carbon dioxide in the environment, thereby improving the sensitivity of the sensing gas concentration. Therefore, the present invention utilizes two Different gas sensing materials, combined with the ability to detect oxygen and carbon dioxide, and have a better reaction between work and severity of 200 C to 300 C. This operating temperature is far better than the heating sensor of the prior art. The temperature is 6 〇〇. 〇 or 1〇〇〇1 or more is much lower. Naturally, it can react quickly without the need for heat, and the practicality is greatly improved. As shown in Fig. 2 and 6, the above-mentioned gas capable of simultaneously sensing oxygen and carbon dioxide. The product of the sensor is manufactured by the manufacturing method described below, which comprises the following steps: / First, 'forming a base made of quartz material as shown in step 51, then 'as in step 52 A two-first conductive member 31, two second conductive members 41, a first heating member I and a second heating member 42 are simultaneously formed on the substrate 2. 〇, Ί 1 1 king, 孔 ' ', the combination of the change will produce a signal of tin dioxide, (d) on the first _ conductive member η - heating element 32 to form a first sensing layer 33. As shown in Fig. 2, a second sensing layer 43 is formed by combining a second conductive member 41 and a second heating member 42 with a type of tin dioxide and antimony trioxide which are combined with carbon dioxide to generate an electric signal. 201115140 As shown in FIG. 7, 'the gas sensor capable of simultaneously sensing oxygen and carbon dioxide can form a gas sensing system capable of simultaneously sensing oxygen and carbon dioxide'. The gas sensing system includes the gas sensor a temperature control unit of the electrical connection unit is connected to the interface unit 64 of the interface circuit unit 63, a signal switching unit 65 electrically connected to the filter unit material, and electrically connected to the temperature control unit. 61 is connected to the digital signal processing unit 66 of the signal transfer 疋 65, a display 67 electrically connected to the digital signal processing early: 66, and a temperature control unit η, interface power, unit 63, wave unit 64, signal turn The connection unit 65 and the digital signal processing device 66 are electrically connected to the power supply 68. The temperature control unit S 61 can be electrically connected to the heating element Μ and the heating element 42 as shown in FIG. 2 to provide a stable voltage, and the temperature of the gas sensor is maintained at - high temperature (10) t to vertical c) The interface circuit is electrically connected to the first conductive member 31 and the second conductive member 41 to convert the received electrical signal (ie, the resistance value of the gas sense _ 62 output) into an analog voltage value < After the H-cell unit 64 passes the output voltage signal to reduce the noise value contained therein, the filter S 64 output (such as the analog voltage signal is converted into a digital signal through the signal switching unit 65, 1 The digital signal processing unit 66 receives the digital voltage signals output by the signal switching unit & and calculates the sensing layer resistance value of the gas sensing unit 62, and the ambient oxygen and carbon dioxide gas concentrations calculated from the resistance values. The relationship diagrams of Figures 4 and 5 are shown on the display. Therefore, the gas sensing of oxygen and carbon dioxide can be simultaneously sensed by the present invention, and the temperature is maintained at the optimum operating temperature, which is also the line 10 201115140 Sexual relationship Good integrated, high sensitivity, short response time, and integrated gas sensing system that can provide accurate oxygen and carbon dioxide gas concentration signals at the same time. In summary, by forming simultaneously on the substrate 2 The first conductive member 31, the second conductive member 41, the first heating member 32, and the second heating member 42 simplify the processing process thereof, thereby shortening the working time thereof, and the σ plating is accompanied by oxygen and The oxide of the carbon dioxide generated by the change of carbon dioxide can simultaneously detect the concentration of oxygen and carbon dioxide at the time of use, and the practicality of the gas sensing is relatively improved, so that the object of the present invention can be achieved. It is only the preferred embodiment of the present invention, and the simple equivalent changes and modifications made by the present invention in the scope of the invention and the description of the invention are still in the present invention. BRIEF DESCRIPTION OF THE DRAWINGS [Brief Description] FIG. 1 is a schematic view illustrating a conventional gas sensor; FIG. 2 is a perspective view illustrating the present invention. A preferred embodiment of a gas sensor for sensing oxygen and carbon dioxide; FIG. 3 is a schematic view of the second embodiment of FIG. 2; FIG. 4 is a diagram showing the relationship between the oxygen concentration and the resistance value; Diagram of the relationship between the concentration of carbon dioxide and the resistance value. FIG. 6 is a block diagram showing a preferred embodiment of the method for manufacturing a gas sensor capable of simultaneously sensing oxygen and sulphur dioxide in the present invention; and 201115140 FIG. It is a block diagram illustrating a preferred embodiment of the gas sensing system of the present invention that can simultaneously sense oxygen and carbon dioxide.

12 201115140 【主要元件符號說明】 2…… •…基板 21 .·.· 5又 置面 22 .…第二 5又 置面 3…… *· % - 感 測單元 31•.… •…% — 導 電件 32..… .…卜 加 熱件 33...·· 感 測層 4 ...... •…第二 感 測單元 41 .··.第二 導 電件 42...·· •…第二 加 熱件 43 ….第二 感 測層 51 〜54,· ·-步驟 61....... ••溫度控制單元 62....... *氣體感測Is 63....... -*介面電路單元 64....... ••濾波單元 65....... ·-訊號轉換單元 66······· ••數位訊號處理 早兀 t « » · t « » ••顯示器 68....... ••電源供應器12 201115140 [Description of main component symbols] 2... •...substrate 21 .··· 5 is placed on the surface 22 .... the second 5 is placed on the surface 3... *· % - Sensing unit 31•.... •...% — Conductive member 32.....b.heating member 33...··sensing layer 4...•...second sensing unit 41..·.second conductive member 42...·· ...the second heating member 43 ....the second sensing layer 51 to 54, ·- - step 61....... ••temperature control unit 62....... *gas sensing Is 63.. ..... -*Interface circuit unit 64....... ••Filter unit 65....... ·-Signal conversion unit 66·······•• Digital signal processing early t « » · t « » •• Display 68....... •• Power supply

1313

Claims (1)

201115140 七、申請專利範圍: 種*τ同時感測氧氣與二氧化碳的氣體感測器,包含: 基板’具有相連接的一第一設置面,及一第二設 置面; ° 一第一感測單元,具有多數相間隔地設置在該基板 之第一設置面上的第一導電件、至少一設置在該第一設 置面上的第—加熱件,及一鍍附於該等第一導電件與第 一加熱件上的第一感測層,其中,該第一加熱件是位於 :個第一導電件之間’而該第一感測層是一種氧化物, 月與氧氣結合會發生變化而產生電訊號;及 —第二感測單元,具有多數相間隔地設置在該基名 之第二設置面上的第二導電件、至少一設置在該第二言 置面上的第二加熱件,及一鍍附於該等第二導電件與痛 二加熱件上的第二感測層’纟中’該第二加熱件是位方 :個第:導電件之間’而該第二感測層是一種氧化物 能與二氧化碳結合會發生變化而產生電訊號。 2. 3. 依據申請專利範圍帛i項所述之可同時感測氧氣盘二章 化碳的氣體感測器’該等第一導電件、第二導電件、驾 一加熱件,及第二加熱件設置在該基板上是呈指叉狀 依據申請專利範圍帛2項所述之可同時感測氧氣盘二。 化碳的氣體感測器,其中,該第一感測層為二氧化❹ 鍍附而成。 之可同時感測氧氣與二氧 第二感測層為二氧化錫與201115140 VII. Patent Application Range: A gas sensor that simultaneously senses oxygen and carbon dioxide, comprising: a substrate having a first set surface connected thereto and a second setting surface; ° a first sensing unit Having a plurality of first conductive members spaced apart from each other on the first mounting surface of the substrate, at least one first heating member disposed on the first mounting surface, and a plating plate attached to the first conductive members a first sensing layer on the first heating member, wherein the first heating member is located between: the first conductive members' and the first sensing layer is an oxide, and the combination of the moon and the oxygen changes Generating a telecommunication signal; and - a second sensing unit having a plurality of second conductive members spaced apart from each other on the second setting surface of the base name, and at least one second heating member disposed on the second speaking surface And a second sensing layer attached to the second conductive member and the painful heating member, wherein the second heating member is a square: a first: between the conductive members and the second feeling The measurement layer is an oxide that can change in combination with carbon dioxide. Generating electrical signals. 2. The gas sensor capable of simultaneously sensing the oxygen disk of the oxygen cylinder according to the scope of the patent application 帛i', the first conductive member, the second conductive member, the driving one heating member, and the second The heating member is disposed on the substrate in an interdigitated manner to simultaneously sense the oxygen disk 2 according to the scope of the patent application. A carbon gas sensor, wherein the first sensing layer is plated with ruthenium dioxide. Simultaneously sensing oxygen and dioxin, the second sensing layer is tin dioxide and 依據申請專利範圍第3項所述 化碳的氣體感測器,其中,該 14 4. 201115140 —乳化一鋼所共鑛而成。 5. 依據申請專利範圍第4項所述 Λ 7迩之了同時感測氧氣與二氧 化奴的氣體感測器,該等第一導電 一 守电仟、弟二導電件、第 加熱件,及第二加熱件的材質為白金。 6. :據中請專利㈣第5項所述之可同時感測氧氣與二氧 7 一兔的氣體感測器’其中,該基板為石英材質所製成。 .種可同時感測氧氣與二氧化碳的氣體感測器之製造方 法,包含: • (a)成型一基板; ⑻在該基板上同時形成有多數第—導電件、多數第 二導電件、至少一第一加熱件’及至少—第二加熱件; ⑷將-種與氧氣結合會發生變化而產生電訊號的氧 化物’鍍附在該等第—導雷件盘 导冤件興第—加熱件上而形成一 第一感測層;及 ⑷將-種與二氧化碳結合會發生變化而產生電訊號 的氧化物錄附在該等第二導電件與第二加熱件上而形成 鲁 一第二感測層。 8 ·依據申清專利範圍第7适μ,+,々—Γ 固弟7項所述之可同時感測氧氣與二氧 化碳的氣體感測器之製造方法,其中該步驟⑼中,該等 第-導電件、第二導電件、第一加熱件,及第二加熱件 設置在該基板上是呈指又狀。 9.依據申請專利範圍第8項所述之可同時感測氧氣與二氧 化碳的氣體感測器之製造方法’其中該步驟⑷中,是將 二氧化錫賤鍍在該等第一導電件與第一加熱件上而形成 15 201115140 第一感測層。 ίο.依射請專利範圍第9項所述之可同時感測氧氣应二氣 化碳的氣體感測器之製造方法,其中該步驟⑷令,是將 二氧化錫與三氧化二鋼共鑛在該等第二導電件與第一加 熱件上而形成第二感測層。 η.依據申請專利範圍第10項所述之可同時感測氧氣鱼二氧 化碳的氣體感測器之製造方法,其中該步驟⑻中該基 板上所形成的第一導電件'第二導電件、第一加熱件, 及第二加熱件的材質為白金。 4 12. 依射請專利範圍第u項所述之可同時感測氧氣與二氣 化碳的氣體感測器之製造方法,其中該步驟⑷中,該基 板為石英材質。 13. -種可同時感測氧氣與二氧化碳的氣體感測系統,包含 一氣體感測器,具有一基板、一第一感測單元,及 一第二感測單TL ,其中,該基板具有相連接的一第一設 置面,及一第二設置面,該第一感測單元具有多數相間 _ 隔地設置在該基板之第一設置面上的第一導電件、至少 。又置在a亥第一设置面上的第一加熱件,及一鑛附於該 等第一導電件與第一加熱件上的第一感測層,該第一加 熱件是位於兩個第一導電件之間,而每一第一感測層是 一種氧化物,能與氧氣結合會發生變化而產生電訊號, 第二感測單元具有多數相間隔地設置在該基板之第二設 置面上的第二導電件、至少一設置在該第二設置面上的 16 201115140 第二加熱件,及一鍍附於該等第二導電件與第二加熱件 上的第二感測層,該第二加熱件是位於兩個第二導電件 之間’而每一第二感測層是一種氧化物,能與二氧化碳 結合會發生變化而產生電訊號; 一溫度控μα,與肖第_力0熱件及第二加熱件電 連接, 一介面電路單元,與該等第一導電件及第二導電件 電連接; 一濾波單元,與該介面電路單元電連接; 一訊號轉接單元,與該濾波單元電連接; 一數位訊號處理單元,盥嗜,、田许祕 „ /、及/皿度控制单元及訊號轉 接單元電連接;及 -電源供應器’與該溫度控制單^、介面電路單元 、濾波單元、訊號轉接單元、數位訊號處理單元電連接 並供應電源。 Η.依據中請專利範㈣13項所述之可同時感測氧氣與二氧 化碳的氣體感測系統,該等第一導電件、第二導電件、 第一加熱件,及第二加熱件設置在該基板上是呈指又狀 〇 依據中請專利範圍冑u項所述之可同時感測氧氣盘二氧 化碳的氣體m统,其中,該第_感測層為二氧化錫 所鍍附而成。 16.依據中請專利範圍帛15項所述之可同時感測氧氣與二氧 化碳的氣體感測系統,其中’該第二感測層為二氧化錫 17 201115140 與二氧化二鋼所共鍵而成。 17. 依據申請專利範圍第16項所述之可同時感測氧氣與二氧 化碳的氣體感測系統,該等第一導電件、第二導電件、 第一加熱件’及第二加熱件的材質為白金。 18. 依據申請專利範圍第17項所述之可同時感測氧氣與二氧 化碳的氣體感測系統,其中,該基板為石英材質所製成 〇 19•依據t請專㈣圍第18項所述之可同時感測氧氣與二氧 化碳的氣體感測系統,其中,該溫度控制單元控制該帛 · 加熱件及第一加熱件的工作溫度為2〇〇«>c至3〇〇°c之間According to the carbon sensor of claim 3, the carbon sensor is formed by embedding a steel. 5. According to the fourth aspect of the patent application, the gas sensor for sensing oxygen and sulphur dioxide at the same time, the first conductive one, the second conductive member, the second conductive member, the heating member, and The second heating member is made of white gold. 6. According to the fifth aspect of the patent (4), the gas sensor capable of simultaneously sensing oxygen and nitrous oxide, wherein the substrate is made of quartz. A method for manufacturing a gas sensor capable of simultaneously sensing oxygen and carbon dioxide, comprising: • (a) molding a substrate; (8) simultaneously forming a plurality of first conductive members, a plurality of second conductive members, at least one on the substrate a first heating member 'and at least a second heating member; (4) an oxide oxide that changes in combination with oxygen to generate an electrical signal is attached to the first - guide member, a guide member, a heating member Forming a first sensing layer thereon; and (4) depositing an oxide that changes in combination with carbon dioxide to generate an electrical signal is attached to the second conductive member and the second heating member to form a second sense of Lu Measuring layer. 8 · According to the application scope of the patent scope of the patent, the method of manufacturing the gas sensor capable of simultaneously sensing oxygen and carbon dioxide, as described in item 7 of the seventh paragraph, wherein in the step (9), the first The conductive member, the second conductive member, the first heating member, and the second heating member are disposed on the substrate in a shape of a finger. 9. A method of manufacturing a gas sensor capable of simultaneously sensing oxygen and carbon dioxide according to claim 8 of the patent application, wherein in the step (4), tin dioxide is plated on the first conductive member and the first A heating element is formed to form a 15 201115140 first sensing layer. Ίο. The method for manufacturing a gas sensor capable of simultaneously sensing oxygen should be two gasified carbon according to item 9 of the patent scope, wherein the step (4) is to combine the tin dioxide with the sulphur dioxide. A second sensing layer is formed on the second conductive member and the first heating member. The method for manufacturing a gas sensor capable of simultaneously sensing oxygen fish carbon dioxide according to claim 10, wherein the first conductive member formed on the substrate in the step (8) is a second conductive member, A heating member and a second heating member are made of platinum. 4 12. According to the invention, a method for manufacturing a gas sensor capable of simultaneously sensing oxygen and two carbonized carbon, as described in the above-mentioned patent scope, wherein the substrate is made of quartz. 13. A gas sensing system capable of simultaneously sensing oxygen and carbon dioxide, comprising a gas sensor having a substrate, a first sensing unit, and a second sensing unit TL, wherein the substrate has a phase a first setting surface of the connection, and a second setting surface, the first sensing unit has a plurality of first conductive members disposed at a first surface of the substrate, at least. And a first heating member disposed on the first setting surface of the ahai, and a first sensing layer attached to the first conductive member and the first heating member, the first heating member is located at two Between one of the conductive members, and each of the first sensing layers is an oxide, which can change with oxygen to generate an electrical signal, and the second sensing unit has a plurality of spaced apart portions disposed on the second mounting surface of the substrate. a second conductive member, at least one 16 201115140 second heating member disposed on the second mounting surface, and a second sensing layer plated on the second conductive member and the second heating member, The second heating element is located between the two second conductive members' and each of the second sensing layers is an oxide, which can change with carbon dioxide to generate electrical signals; a temperature control μα, and Xiao Di force 0 The hot component and the second heating component are electrically connected, an interface circuit unit is electrically connected to the first conductive component and the second conductive component; a filtering unit is electrically connected to the interface circuit unit; a signal switching unit, and The filtering unit is electrically connected; a digital signal Unit, 盥,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The unit and the digital signal processing unit are electrically connected and supplied with power. Η. According to the gas sensing system capable of simultaneously sensing oxygen and carbon dioxide as described in the above-mentioned Patent Model (4), the first conductive member, the second conductive member, and the first a heating element and a second heating element disposed on the substrate are in the form of a finger and a gas. The gas system can simultaneously sense the carbon dioxide of the oxygen disk according to the scope of the patent application, wherein the first sensing The layer is plated with tin dioxide. 16. According to the scope of patent application 帛15, the gas sensing system capable of simultaneously sensing oxygen and carbon dioxide, wherein 'the second sensing layer is tin dioxide 17 201115140 is co-bonded with the second steel dioxide. 17. According to the scope of claim 16, the gas sensing system capable of simultaneously sensing oxygen and carbon dioxide, the first conductive member, the second conductive member, the first The heating member 'and the second heating member are made of white gold. 18. The gas sensing system capable of simultaneously sensing oxygen and carbon dioxide according to claim 17 of the patent application, wherein the substrate is made of quartz. • According to t, please refer to the gas sensing system for sensing oxygen and carbon dioxide simultaneously according to item 18 of the special (4), wherein the temperature control unit controls the operating temperature of the heating element and the first heating element to be 2〇〇. «>c to 3〇〇°c 1818
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US9201035B2 (en) 2012-02-09 2015-12-01 Industrial Technology Research Institute Gas detecting system, device and method
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CN109580724A (en) * 2017-09-29 2019-04-05 萧育仁 Mini type gas sensor and its manufacturing method
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9201035B2 (en) 2012-02-09 2015-12-01 Industrial Technology Research Institute Gas detecting system, device and method
TWI688766B (en) * 2013-08-09 2020-03-21 日商新宇宙電機股份有限公司 Environmental monitoring system
TWI603080B (en) * 2016-08-05 2017-10-21 Micro gas sensor and its manufacturing method
US20180038816A1 (en) * 2016-08-05 2018-02-08 National Applied Research Laboratories Miniature gas sensor and method for manufacturing the same
US10533962B2 (en) * 2016-08-05 2020-01-14 National Applied Research Laboratories Miniature gas sensor and method for manufacturing the same
CN109580724A (en) * 2017-09-29 2019-04-05 萧育仁 Mini type gas sensor and its manufacturing method
CN113514503A (en) * 2020-04-10 2021-10-19 中国石油化工股份有限公司 Gas sensing system and gas sensor
CN113514503B (en) * 2020-04-10 2023-09-12 中国石油化工股份有限公司 Gas sensing system and gas sensor

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