SU1835913A1 - Integral semiconductor pressure transducer and process of its manufacture - Google Patents

Integral semiconductor pressure transducer and process of its manufacture

Info

Publication number
SU1835913A1
SU1835913A1 SU4790763/10A SU4790763A SU1835913A1 SU 1835913 A1 SU1835913 A1 SU 1835913A1 SU 4790763/10 A SU4790763/10 A SU 4790763/10A SU 4790763 A SU4790763 A SU 4790763A SU 1835913 A1 SU1835913 A1 SU 1835913A1
Authority
SU
USSR - Soviet Union
Prior art keywords
manufacture
pressure transducer
semiconductor pressure
converter
frame
Prior art date
Application number
SU4790763/10A
Other languages
Russian (ru)
Inventor
В.И. Евдокимов
В.С. Папков
И.И. Смыслов
М.В. Суровиков
Original Assignee
Научно-Производственное Объединение По Автоэлектронике И Автотракторному Электрооборудованию
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Научно-Производственное Объединение По Автоэлектронике И Автотракторному Электрооборудованию filed Critical Научно-Производственное Объединение По Автоэлектронике И Автотракторному Электрооборудованию
Priority to SU4790763/10A priority Critical patent/SU1835913A1/en
Application granted granted Critical
Publication of SU1835913A1 publication Critical patent/SU1835913A1/en

Links

Abstract

FIELD: measurement technology. SUBSTANCE: profiled membrane of converter is formed by flat plate 1 and frame 2 produced from identical monocrystalline material with matching of their equivalent crystallographic directions. Plate 1 and frame 2 can be attached by different methods: diffusion welding in vacuum directly or through more easily melted layer with thin layer of binder, for instance, glass cement, adhesive and so on. EFFECT: enhanced precision and sensitivity of converter, facilitated manufacture. 5 cl, 3 dwg
SU4790763/10A 1990-02-14 1990-02-14 Integral semiconductor pressure transducer and process of its manufacture SU1835913A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4790763/10A SU1835913A1 (en) 1990-02-14 1990-02-14 Integral semiconductor pressure transducer and process of its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4790763/10A SU1835913A1 (en) 1990-02-14 1990-02-14 Integral semiconductor pressure transducer and process of its manufacture

Publications (1)

Publication Number Publication Date
SU1835913A1 true SU1835913A1 (en) 1995-09-10

Family

ID=60521824

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4790763/10A SU1835913A1 (en) 1990-02-14 1990-02-14 Integral semiconductor pressure transducer and process of its manufacture

Country Status (1)

Country Link
SU (1) SU1835913A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2464539C1 (en) * 2011-07-08 2012-10-20 Открытое акционерное общество "Научно-исследовательский институт физических измерений" Semiconductor pressure transducer
CZ307320B6 (en) * 2017-08-28 2018-05-30 Bd Sensors S.R.O. A shaped separating membrane of a pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2464539C1 (en) * 2011-07-08 2012-10-20 Открытое акционерное общество "Научно-исследовательский институт физических измерений" Semiconductor pressure transducer
CZ307320B6 (en) * 2017-08-28 2018-05-30 Bd Sensors S.R.O. A shaped separating membrane of a pressure sensor

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