SU1835913A1 - Integral semiconductor pressure transducer and process of its manufacture - Google Patents
Integral semiconductor pressure transducer and process of its manufactureInfo
- Publication number
- SU1835913A1 SU1835913A1 SU4790763/10A SU4790763A SU1835913A1 SU 1835913 A1 SU1835913 A1 SU 1835913A1 SU 4790763/10 A SU4790763/10 A SU 4790763/10A SU 4790763 A SU4790763 A SU 4790763A SU 1835913 A1 SU1835913 A1 SU 1835913A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- manufacture
- pressure transducer
- semiconductor pressure
- converter
- frame
- Prior art date
Links
Abstract
FIELD: measurement technology. SUBSTANCE: profiled membrane of converter is formed by flat plate 1 and frame 2 produced from identical monocrystalline material with matching of their equivalent crystallographic directions. Plate 1 and frame 2 can be attached by different methods: diffusion welding in vacuum directly or through more easily melted layer with thin layer of binder, for instance, glass cement, adhesive and so on. EFFECT: enhanced precision and sensitivity of converter, facilitated manufacture. 5 cl, 3 dwg
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4790763/10A SU1835913A1 (en) | 1990-02-14 | 1990-02-14 | Integral semiconductor pressure transducer and process of its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4790763/10A SU1835913A1 (en) | 1990-02-14 | 1990-02-14 | Integral semiconductor pressure transducer and process of its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1835913A1 true SU1835913A1 (en) | 1995-09-10 |
Family
ID=60521824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4790763/10A SU1835913A1 (en) | 1990-02-14 | 1990-02-14 | Integral semiconductor pressure transducer and process of its manufacture |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1835913A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2464539C1 (en) * | 2011-07-08 | 2012-10-20 | Открытое акционерное общество "Научно-исследовательский институт физических измерений" | Semiconductor pressure transducer |
CZ307320B6 (en) * | 2017-08-28 | 2018-05-30 | Bd Sensors S.R.O. | A shaped separating membrane of a pressure sensor |
-
1990
- 1990-02-14 SU SU4790763/10A patent/SU1835913A1/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2464539C1 (en) * | 2011-07-08 | 2012-10-20 | Открытое акционерное общество "Научно-исследовательский институт физических измерений" | Semiconductor pressure transducer |
CZ307320B6 (en) * | 2017-08-28 | 2018-05-30 | Bd Sensors S.R.O. | A shaped separating membrane of a pressure sensor |
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