SG80623A1 - Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series - Google Patents

Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

Info

Publication number
SG80623A1
SG80623A1 SG9901943A SG1999001943A SG80623A1 SG 80623 A1 SG80623 A1 SG 80623A1 SG 9901943 A SG9901943 A SG 9901943A SG 1999001943 A SG1999001943 A SG 1999001943A SG 80623 A1 SG80623 A1 SG 80623A1
Authority
SG
Singapore
Prior art keywords
adsorption
recovery
exhaust
membrane
series
Prior art date
Application number
SG9901943A
Inventor
James Hsu-Kuang Yang
Iosif Chernyakov
Thomas Hsiao-Ling Hsiung
Alexander Schwarz
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Priority to SG9901943A priority Critical patent/SG80623A1/en
Publication of SG80623A1 publication Critical patent/SG80623A1/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
SG9901943A 1999-04-26 1999-04-26 Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series SG80623A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG9901943A SG80623A1 (en) 1999-04-26 1999-04-26 Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG9901943A SG80623A1 (en) 1999-04-26 1999-04-26 Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

Publications (1)

Publication Number Publication Date
SG80623A1 true SG80623A1 (en) 2001-05-22

Family

ID=20430338

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9901943A SG80623A1 (en) 1999-04-26 1999-04-26 Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

Country Status (1)

Country Link
SG (1) SG80623A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5730779A (en) * 1996-10-31 1998-03-24 Air Products And Chemicals, Inc. Fluorochemical recovery and recycle using membranes
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
US5814127A (en) * 1996-12-23 1998-09-29 American Air Liquide Inc. Process for recovering CF4 and C2 F6 from a gas

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
US5730779A (en) * 1996-10-31 1998-03-24 Air Products And Chemicals, Inc. Fluorochemical recovery and recycle using membranes
US5814127A (en) * 1996-12-23 1998-09-29 American Air Liquide Inc. Process for recovering CF4 and C2 F6 from a gas

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