SG134178A1 - Microstructure formation technique - Google Patents

Microstructure formation technique

Info

Publication number
SG134178A1
SG134178A1 SG200600144-0A SG2006001440A SG134178A1 SG 134178 A1 SG134178 A1 SG 134178A1 SG 2006001440 A SG2006001440 A SG 2006001440A SG 134178 A1 SG134178 A1 SG 134178A1
Authority
SG
Singapore
Prior art keywords
microstructure
formation technique
microstructure formation
fabricating
mould
Prior art date
Application number
SG200600144-0A
Inventor
Li Zhongli
Xu Yuan
Lim Chee Yen
Jiang Huixin
Yuan Ling Christina Tan
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG200600144-0A priority Critical patent/SG134178A1/en
Publication of SG134178A1 publication Critical patent/SG134178A1/en

Links

Landscapes

  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatment Of Fiber Materials (AREA)

Abstract

A method of fabricating a microstructure and a method of fabricating a mould for microstructures. The method of fabricating the microstructure comprises the steps of providing a mould comprising a template structure; forming a first material layer on a surface of the template structure; forming a microstructure layer on the first material layer; releasing the microstructure layer from the mould.
SG200600144-0A 2006-01-09 2006-01-09 Microstructure formation technique SG134178A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200600144-0A SG134178A1 (en) 2006-01-09 2006-01-09 Microstructure formation technique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200600144-0A SG134178A1 (en) 2006-01-09 2006-01-09 Microstructure formation technique

Publications (1)

Publication Number Publication Date
SG134178A1 true SG134178A1 (en) 2007-08-29

Family

ID=38799262

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200600144-0A SG134178A1 (en) 2006-01-09 2006-01-09 Microstructure formation technique

Country Status (1)

Country Link
SG (1) SG134178A1 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002072189A2 (en) * 2001-03-14 2002-09-19 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
US20030173690A1 (en) * 2002-03-18 2003-09-18 Sumitomo Chemical Company, Limited Die for molding optical panel, process for production thereof, and use thereof
US20040126707A1 (en) * 2002-12-27 2004-07-01 Industrial Technology Research Institute Method for manufacturing 3-D high aspect-ratio microneedle array device
US20040200368A1 (en) * 2003-03-20 2004-10-14 Masahiko Ogino Mold structures, and method of transfer of fine structures
US20040243063A1 (en) * 2000-08-21 2004-12-02 The Cleveland Clinic Foundation Microneedle array module and method of fabricating the same
US20050147925A1 (en) * 2002-04-05 2005-07-07 Harchanko John S. System and method for analog replication of microdevices having a desired surface contour
US20050170639A1 (en) * 2004-01-30 2005-08-04 Ping Mei Forming a semiconductor device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040243063A1 (en) * 2000-08-21 2004-12-02 The Cleveland Clinic Foundation Microneedle array module and method of fabricating the same
WO2002072189A2 (en) * 2001-03-14 2002-09-19 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
US20040146611A1 (en) * 2001-03-14 2004-07-29 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
US20030173690A1 (en) * 2002-03-18 2003-09-18 Sumitomo Chemical Company, Limited Die for molding optical panel, process for production thereof, and use thereof
US20050147925A1 (en) * 2002-04-05 2005-07-07 Harchanko John S. System and method for analog replication of microdevices having a desired surface contour
US20040126707A1 (en) * 2002-12-27 2004-07-01 Industrial Technology Research Institute Method for manufacturing 3-D high aspect-ratio microneedle array device
US20040200368A1 (en) * 2003-03-20 2004-10-14 Masahiko Ogino Mold structures, and method of transfer of fine structures
US20050170639A1 (en) * 2004-01-30 2005-08-04 Ping Mei Forming a semiconductor device

Similar Documents

Publication Publication Date Title
SG140481A1 (en) A method for fabricating micro and nano structures
WO2009002644A3 (en) Methods of making hierarchical articles
TW200607753A (en) Nanostructures and method of making the same
TW200724479A (en) Nano-array and fabrication method thereof
DE602008004848D1 (en) STRUCTURE WITH A GETTER LAYER AND A LAYER FOR ADJUSTMENT AND METHOD FOR THEIR PRODUCTION
NL1034761A1 (en) Method for producing embossed resin layer material.
EP2584408A3 (en) Imprint method and imprint apparatus
EP1905070A4 (en) Mold for forming a molding member and method of fabricating a molding member using the same
EP2505548A3 (en) Micromechanical sound transducer having a membrane support with tapered surface
HK1151562A1 (en) Method for obtaining a metal microstructure and microstructure obtained according to said method
TW200633075A (en) CMOS-MEMS process
TW200621920A (en) Method for forming coating material and the material formed thereby
EP1944270A4 (en) Method for producing clay thin film and clay thin film
EP2009148A4 (en) Group iii-v nitride layer and method for producing the same
EP2174780B8 (en) Rollable tile structure, production method and use
WO2010047769A8 (en) Reduction of stress during template separation from substrate
WO2007124209A3 (en) Stressor integration and method thereof
FR2957280B1 (en) PROCESS FOR PRODUCING A METAL COMPLEX
WO2007019487A3 (en) Method and system for fabricating thin devices
HK1091905A1 (en) A manufacturing method of the microstructure body using a nanoimprint technology with a organic/inorganic hybrid material, and a microstructure body manufactured by this method
TW200802544A (en) Composite substrate and method for making the same
WO2008102621A1 (en) Pressure sensitive adhesive member having crest-shaped microstructure
PL1979635T3 (en) Method of making shaped composites
WO2009083487A3 (en) Method for obtaining a metal microstructure and microstructure obtained according to said method
TW200633846A (en) Method of separating a mold from a solidified layer disposed on a substrate