SG115590A1 - Lithographic projection apparatus and device manufacturing method - Google Patents
Lithographic projection apparatus and device manufacturing methodInfo
- Publication number
- SG115590A1 SG115590A1 SG200306868A SG200306868A SG115590A1 SG 115590 A1 SG115590 A1 SG 115590A1 SG 200306868 A SG200306868 A SG 200306868A SG 200306868 A SG200306868 A SG 200306868A SG 115590 A1 SG115590 A1 SG 115590A1
- Authority
- SG
- Singapore
- Prior art keywords
- device manufacturing
- projection apparatus
- lithographic projection
- lithographic
- manufacturing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02258163 | 2002-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG115590A1 true SG115590A1 (en) | 2005-10-28 |
Family
ID=32731513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200306868A SG115590A1 (en) | 2002-11-27 | 2003-11-24 | Lithographic projection apparatus and device manufacturing method |
Country Status (6)
Country | Link |
---|---|
US (2) | US7141340B2 (ja) |
JP (1) | JP4023541B2 (ja) |
KR (1) | KR100589232B1 (ja) |
CN (1) | CN100357830C (ja) |
SG (1) | SG115590A1 (ja) |
TW (1) | TWI243969B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG115590A1 (en) * | 2002-11-27 | 2005-10-28 | Asml Netherlands Bv | Lithographic projection apparatus and device manufacturing method |
US7012674B2 (en) * | 2004-01-13 | 2006-03-14 | Asml Holding N.V. | Maskless optical writer |
US7500218B2 (en) * | 2004-08-17 | 2009-03-03 | Asml Netherlands B.V. | Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same |
WO2006047127A1 (en) * | 2004-10-21 | 2006-05-04 | Saint-Gobain Ceramics & Plastics, Inc. | Optical lens elements, semiconductor lithographic patterning apparatus, and methods for processing semiconductor devices |
US20060232753A1 (en) | 2005-04-19 | 2006-10-19 | Asml Holding N.V. | Liquid immersion lithography system with tilted liquid flow |
US7268357B2 (en) * | 2005-05-16 | 2007-09-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Immersion lithography apparatus and method |
US7508491B2 (en) * | 2006-04-12 | 2009-03-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilized to reduce quantization influence of datapath SLM interface to dose uniformity |
DE102007028371B4 (de) | 2007-06-13 | 2012-05-16 | Seereal Technologies S.A. | Einrichtung zur Lichtmodulation |
US8514475B2 (en) * | 2010-10-27 | 2013-08-20 | Lawrence Livermore National Security, Llc | Electro-optic device with gap-coupled electrode |
JP5731063B2 (ja) | 2011-04-08 | 2015-06-10 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置、プログラマブル・パターニングデバイス、及びリソグラフィ方法 |
TWI467162B (zh) * | 2011-04-18 | 2015-01-01 | Ind Tech Res Inst | 電光調變裝置、電光檢測器及其檢測方法 |
US8975601B1 (en) | 2013-11-25 | 2015-03-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for electron beam lithography |
US8969836B1 (en) | 2013-11-26 | 2015-03-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for electron beam lithography |
US9690208B2 (en) | 2013-12-10 | 2017-06-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mirror array in digital pattern generator (DPG) |
US10437082B2 (en) * | 2017-12-28 | 2019-10-08 | Tetravue, Inc. | Wide field of view electro-optic modulator and methods and systems of manufacturing and using same |
KR102568796B1 (ko) | 2018-06-15 | 2023-08-21 | 삼성전자주식회사 | 광변조 소자 및 이를 포함하는 장치 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5523193A (en) * | 1988-05-31 | 1996-06-04 | Texas Instruments Incorporated | Method and apparatus for patterning and imaging member |
DE69128103T2 (de) * | 1990-04-05 | 1998-04-02 | Seiko Epson Corp | Optische Vorrichtung |
ATE123885T1 (de) * | 1990-05-02 | 1995-06-15 | Fraunhofer Ges Forschung | Belichtungsvorrichtung. |
JP3257556B2 (ja) | 1990-09-21 | 2002-02-18 | セイコーエプソン株式会社 | 光学装置 |
US6392689B1 (en) * | 1991-02-21 | 2002-05-21 | Eugene Dolgoff | System for displaying moving images pseudostereoscopically |
US5229872A (en) * | 1992-01-21 | 1993-07-20 | Hughes Aircraft Company | Exposure device including an electrically aligned electronic mask for micropatterning |
WO1997033205A1 (en) * | 1996-03-06 | 1997-09-12 | Philips Electronics N.V. | Differential interferometer system and lithographic step-and-scan apparatus provided with such a system |
WO1998028665A1 (en) * | 1996-12-24 | 1998-07-02 | Koninklijke Philips Electronics N.V. | Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device |
US5998069A (en) * | 1998-02-27 | 1999-12-07 | Micron Technology, Inc. | Electrically programmable photolithography mask |
US6261728B1 (en) * | 1998-10-19 | 2001-07-17 | Vanguard International Semiconductor Corporation | Mask image scanning exposure method |
JP2000330814A (ja) * | 1999-05-19 | 2000-11-30 | Toshiba Corp | 二重化サーバシステム |
JP2002194626A (ja) * | 2000-12-21 | 2002-07-10 | Mitsubishi Rayon Co Ltd | 炭素繊維、炭素繊維強化複合材料、炭素繊維の製造方法 |
US6619359B2 (en) * | 2001-02-16 | 2003-09-16 | Brooks Automation, Inc. | Pellicle mounting apparatus |
SG115590A1 (en) * | 2002-11-27 | 2005-10-28 | Asml Netherlands Bv | Lithographic projection apparatus and device manufacturing method |
-
2003
- 2003-11-24 SG SG200306868A patent/SG115590A1/en unknown
- 2003-11-26 JP JP2003394959A patent/JP4023541B2/ja not_active Expired - Fee Related
- 2003-11-26 KR KR1020030084669A patent/KR100589232B1/ko not_active IP Right Cessation
- 2003-11-26 TW TW092133174A patent/TWI243969B/zh not_active IP Right Cessation
- 2003-11-26 US US10/721,789 patent/US7141340B2/en not_active Expired - Fee Related
- 2003-11-26 CN CNB2003101240786A patent/CN100357830C/zh not_active Expired - Fee Related
-
2006
- 2006-11-13 US US11/595,968 patent/US20070058145A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP4023541B2 (ja) | 2007-12-19 |
US20040145712A1 (en) | 2004-07-29 |
CN100357830C (zh) | 2007-12-26 |
TWI243969B (en) | 2005-11-21 |
US7141340B2 (en) | 2006-11-28 |
KR20040047673A (ko) | 2004-06-05 |
CN1503062A (zh) | 2004-06-09 |
TW200421045A (en) | 2004-10-16 |
US20070058145A1 (en) | 2007-03-15 |
KR100589232B1 (ko) | 2006-06-14 |
JP2004214625A (ja) | 2004-07-29 |
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