SG11202112200TA - Device for treating gaseous pollutants - Google Patents

Device for treating gaseous pollutants

Info

Publication number
SG11202112200TA
SG11202112200TA SG11202112200TA SG11202112200TA SG11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA
Authority
SG
Singapore
Prior art keywords
gaseous pollutants
treating gaseous
treating
pollutants
gaseous
Prior art date
Application number
SG11202112200TA
Inventor
Chee Wei Chan
Original Assignee
Ecosys Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecosys Pte Ltd filed Critical Ecosys Pte Ltd
Publication of SG11202112200TA publication Critical patent/SG11202112200TA/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/76Gas phase processes, e.g. by using aerosols
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01NGAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/10Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
    • F01N3/24Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
    • F01N3/26Construction of thermal reactors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23CMETHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C5/00Disposition of burners with respect to the combustion chamber or to one another; Mounting of burners in combustion apparatus
    • F23C5/08Disposition of burners
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23CMETHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C6/00Combustion apparatus characterised by the combination of two or more combustion chambers or combustion zones, e.g. for staged combustion
    • F23C6/02Combustion apparatus characterised by the combination of two or more combustion chambers or combustion zones, e.g. for staged combustion in parallel arrangement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/24Incineration of waste; Incinerator constructions; Details, accessories or control therefor having a vertical, substantially cylindrical, combustion chamber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44Details; Accessories
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/08Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases using flares, e.g. in stacks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23MCASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00Casings; Linings; Walls
    • F23M5/08Cooling thereof; Tube walls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2251/00Reactants
    • B01D2251/10Oxidants
    • B01D2251/102Oxygen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2251/00Reactants
    • B01D2251/10Oxidants
    • B01D2251/104Ozone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2251/00Reactants
    • B01D2251/10Oxidants
    • B01D2251/11Air
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2251/00Reactants
    • B01D2251/20Reductants
    • B01D2251/202Hydrogen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2251/00Reactants
    • B01D2251/20Reductants
    • B01D2251/208Hydrocarbons
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/55Compounds of silicon, phosphorus, germanium or arsenic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/55Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553Compounds comprising hydrogen, e.g. silanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2258/00Sources of waste gases
    • B01D2258/02Other waste gases
    • B01D2258/0216Other waste gases from CVD treatment or semi-conductor manufacturing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01NGAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/10Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
    • F01N3/24Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
    • F01N3/38Arrangements for igniting
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00Specific waste
    • F23G2209/14Gaseous waste or fumes
    • F23G2209/142Halogen gases, e.g. silane

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Toxicology (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
SG11202112200TA 2019-11-21 2020-11-18 Device for treating gaseous pollutants SG11202112200TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962938658P 2019-11-21 2019-11-21
PCT/SG2020/050669 WO2021101444A2 (en) 2019-11-21 2020-11-18 Device for treating gaseous pollutants

Publications (1)

Publication Number Publication Date
SG11202112200TA true SG11202112200TA (en) 2021-12-30

Family

ID=75980951

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202112200TA SG11202112200TA (en) 2019-11-21 2020-11-18 Device for treating gaseous pollutants

Country Status (7)

Country Link
US (1) US20220134281A1 (en)
JP (2) JP7195439B2 (en)
KR (1) KR20220017469A (en)
CN (1) CN113939687B (en)
SG (1) SG11202112200TA (en)
TW (1) TWI741880B (en)
WO (1) WO2021101444A2 (en)

Family Cites Families (25)

* Cited by examiner, † Cited by third party
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EP0311599B1 (en) * 1985-12-09 1990-11-07 A. Ahlstrom Corporation A circulating fluidized bed reactor and a method of separating solid material from the flue gases
FR2591509B1 (en) * 1985-12-17 1989-10-27 Labo Electronique Physique ANTI-POLLUTION DEVICE FOR THE ELIMINATION OF TOXIC GASES USED IN THE DEVELOPMENT OF GROUP III-V SEMICONDUCTOR MATERIALS.
US4661056A (en) * 1986-03-14 1987-04-28 American Hoechst Corporation Turbulent incineration of combustible materials supplied in low pressure laminar flow
US6322756B1 (en) * 1996-12-31 2001-11-27 Advanced Technology And Materials, Inc. Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
GB2323312B (en) * 1997-03-21 2001-08-08 Korea M A T Co Ltd Gas scrubber and methods of disposing a gas using the same
US6969250B1 (en) * 1998-12-01 2005-11-29 Ebara Corporation Exhaust gas treating device
KR100328632B1 (en) 1999-08-14 2002-03-23 조현기 Composite gas scrubber system
KR100379153B1 (en) * 1999-12-03 2003-04-08 (주)대우 Furnace for sludge incineration
JP2001355820A (en) 2000-06-12 2001-12-26 Sumitomo Seika Chem Co Ltd Method and device for treating exhaust gas
JP2004092985A (en) 2002-08-30 2004-03-25 Koike Sanso Kogyo Co Ltd Exhaust gas treatment apparatus
TWI255897B (en) * 2003-12-09 2006-06-01 Deisccant Technology Corp Processing system and processing method for hydrogen exhausts
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
JP2007522649A (en) * 2003-12-23 2007-08-09 ジョン シー. シューマカー、 Exhaust conditioning system for semiconductor reactor
JP5356813B2 (en) * 2007-07-06 2013-12-04 カンケンテクノ株式会社 Exhaust gas abatement system
US8192693B2 (en) * 2008-02-12 2012-06-05 Innovative Engineering Solutions, Inc. Apparatus for dynamic oxidation of process gas
KR101417233B1 (en) * 2008-07-25 2014-07-08 제이티에스 인터내셔날 가부시키가이샤 Method for incinerating waste by two-stage swirling flow fluidized bed incinerator
TWI398293B (en) * 2010-11-08 2013-06-11 Orient Service Co Ltd Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
CN102865584B (en) 2011-07-07 2016-03-30 深圳市华懋环保节能设备有限公司 Seriation L-type non-phase transformation super heat-conductive pipe heat reclamation type VOCs incinerator
JP2014134350A (en) 2013-01-11 2014-07-24 Edwards Kk Inlet nozzle and detoxification device
JP2015010800A (en) 2013-07-01 2015-01-19 小池酸素工業株式会社 Exhaust gas treatment device
GB2544520A (en) * 2015-11-19 2017-05-24 Edwards Ltd Effluent gas treatment apparatus and method
KR101791478B1 (en) * 2016-06-02 2017-10-31 박영배 Treating system of waste gas
CN206973584U (en) * 2017-05-24 2018-02-06 昆山国显光电有限公司 Process tail gas processing unit
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CN110081462B (en) * 2019-04-29 2021-04-02 天津天成智造科技有限公司 Low-pollution combustion chamber

Also Published As

Publication number Publication date
TW202122152A (en) 2021-06-16
JP7195439B2 (en) 2022-12-23
WO2021101444A2 (en) 2021-05-27
KR20220017469A (en) 2022-02-11
CN113939687B (en) 2024-05-31
JP7377332B2 (en) 2023-11-09
TWI741880B (en) 2021-10-01
JP2023009111A (en) 2023-01-19
US20220134281A1 (en) 2022-05-05
WO2021101444A3 (en) 2021-07-15
JP2022512140A (en) 2022-02-02
CN113939687A (en) 2022-01-14

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