SG11202112200TA - Device for treating gaseous pollutants - Google Patents
Device for treating gaseous pollutantsInfo
- Publication number
- SG11202112200TA SG11202112200TA SG11202112200TA SG11202112200TA SG11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA SG 11202112200T A SG11202112200T A SG 11202112200TA
- Authority
- SG
- Singapore
- Prior art keywords
- gaseous pollutants
- treating gaseous
- treating
- pollutants
- gaseous
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/76—Gas phase processes, e.g. by using aerosols
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
- F01N3/24—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
- F01N3/26—Construction of thermal reactors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C5/00—Disposition of burners with respect to the combustion chamber or to one another; Mounting of burners in combustion apparatus
- F23C5/08—Disposition of burners
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C6/00—Combustion apparatus characterised by the combination of two or more combustion chambers or combustion zones, e.g. for staged combustion
- F23C6/02—Combustion apparatus characterised by the combination of two or more combustion chambers or combustion zones, e.g. for staged combustion in parallel arrangement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/24—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having a vertical, substantially cylindrical, combustion chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/44—Details; Accessories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/08—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases using flares, e.g. in stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
- F23M5/00—Casings; Linings; Walls
- F23M5/08—Cooling thereof; Tube walls
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/102—Oxygen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/104—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/11—Air
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/20—Reductants
- B01D2251/202—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/20—Reductants
- B01D2251/208—Hydrocarbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/553—Compounds comprising hydrogen, e.g. silanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
- F01N3/24—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
- F01N3/38—Arrangements for igniting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Toxicology (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962938658P | 2019-11-21 | 2019-11-21 | |
PCT/SG2020/050669 WO2021101444A2 (en) | 2019-11-21 | 2020-11-18 | Device for treating gaseous pollutants |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202112200TA true SG11202112200TA (en) | 2021-12-30 |
Family
ID=75980951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202112200TA SG11202112200TA (en) | 2019-11-21 | 2020-11-18 | Device for treating gaseous pollutants |
Country Status (7)
Country | Link |
---|---|
US (1) | US20220134281A1 (en) |
JP (2) | JP7195439B2 (en) |
KR (1) | KR20220017469A (en) |
CN (1) | CN113939687B (en) |
SG (1) | SG11202112200TA (en) |
TW (1) | TWI741880B (en) |
WO (1) | WO2021101444A2 (en) |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0311599B1 (en) * | 1985-12-09 | 1990-11-07 | A. Ahlstrom Corporation | A circulating fluidized bed reactor and a method of separating solid material from the flue gases |
FR2591509B1 (en) * | 1985-12-17 | 1989-10-27 | Labo Electronique Physique | ANTI-POLLUTION DEVICE FOR THE ELIMINATION OF TOXIC GASES USED IN THE DEVELOPMENT OF GROUP III-V SEMICONDUCTOR MATERIALS. |
US4661056A (en) * | 1986-03-14 | 1987-04-28 | American Hoechst Corporation | Turbulent incineration of combustible materials supplied in low pressure laminar flow |
US6322756B1 (en) * | 1996-12-31 | 2001-11-27 | Advanced Technology And Materials, Inc. | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
GB2323312B (en) * | 1997-03-21 | 2001-08-08 | Korea M A T Co Ltd | Gas scrubber and methods of disposing a gas using the same |
US6969250B1 (en) * | 1998-12-01 | 2005-11-29 | Ebara Corporation | Exhaust gas treating device |
KR100328632B1 (en) | 1999-08-14 | 2002-03-23 | 조현기 | Composite gas scrubber system |
KR100379153B1 (en) * | 1999-12-03 | 2003-04-08 | (주)대우 | Furnace for sludge incineration |
JP2001355820A (en) | 2000-06-12 | 2001-12-26 | Sumitomo Seika Chem Co Ltd | Method and device for treating exhaust gas |
JP2004092985A (en) | 2002-08-30 | 2004-03-25 | Koike Sanso Kogyo Co Ltd | Exhaust gas treatment apparatus |
TWI255897B (en) * | 2003-12-09 | 2006-06-01 | Deisccant Technology Corp | Processing system and processing method for hydrogen exhausts |
US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
JP2007522649A (en) * | 2003-12-23 | 2007-08-09 | ジョン シー. シューマカー、 | Exhaust conditioning system for semiconductor reactor |
JP5356813B2 (en) * | 2007-07-06 | 2013-12-04 | カンケンテクノ株式会社 | Exhaust gas abatement system |
US8192693B2 (en) * | 2008-02-12 | 2012-06-05 | Innovative Engineering Solutions, Inc. | Apparatus for dynamic oxidation of process gas |
KR101417233B1 (en) * | 2008-07-25 | 2014-07-08 | 제이티에스 인터내셔날 가부시키가이샤 | Method for incinerating waste by two-stage swirling flow fluidized bed incinerator |
TWI398293B (en) * | 2010-11-08 | 2013-06-11 | Orient Service Co Ltd | Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes |
CN102865584B (en) | 2011-07-07 | 2016-03-30 | 深圳市华懋环保节能设备有限公司 | Seriation L-type non-phase transformation super heat-conductive pipe heat reclamation type VOCs incinerator |
JP2014134350A (en) | 2013-01-11 | 2014-07-24 | Edwards Kk | Inlet nozzle and detoxification device |
JP2015010800A (en) | 2013-07-01 | 2015-01-19 | 小池酸素工業株式会社 | Exhaust gas treatment device |
GB2544520A (en) * | 2015-11-19 | 2017-05-24 | Edwards Ltd | Effluent gas treatment apparatus and method |
KR101791478B1 (en) * | 2016-06-02 | 2017-10-31 | 박영배 | Treating system of waste gas |
CN206973584U (en) * | 2017-05-24 | 2018-02-06 | 昆山国显光电有限公司 | Process tail gas processing unit |
SG10202001081TA (en) | 2017-07-07 | 2020-03-30 | Siw Eng Pte Ltd | Device and system for controlling decomposition oxidation of gaseous pollutants |
CN110081462B (en) * | 2019-04-29 | 2021-04-02 | 天津天成智造科技有限公司 | Low-pollution combustion chamber |
-
2020
- 2020-11-18 JP JP2021532355A patent/JP7195439B2/en active Active
- 2020-11-18 KR KR1020227000122A patent/KR20220017469A/en unknown
- 2020-11-18 CN CN202080006102.8A patent/CN113939687B/en active Active
- 2020-11-18 SG SG11202112200TA patent/SG11202112200TA/en unknown
- 2020-11-18 WO PCT/SG2020/050669 patent/WO2021101444A2/en active Application Filing
- 2020-11-20 TW TW109140750A patent/TWI741880B/en active
-
2021
- 2021-11-09 US US17/522,613 patent/US20220134281A1/en active Pending
-
2022
- 2022-11-02 JP JP2022176133A patent/JP7377332B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW202122152A (en) | 2021-06-16 |
JP7195439B2 (en) | 2022-12-23 |
WO2021101444A2 (en) | 2021-05-27 |
KR20220017469A (en) | 2022-02-11 |
CN113939687B (en) | 2024-05-31 |
JP7377332B2 (en) | 2023-11-09 |
TWI741880B (en) | 2021-10-01 |
JP2023009111A (en) | 2023-01-19 |
US20220134281A1 (en) | 2022-05-05 |
WO2021101444A3 (en) | 2021-07-15 |
JP2022512140A (en) | 2022-02-02 |
CN113939687A (en) | 2022-01-14 |
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