SG11201901725WA - Vacuum coating apparatus - Google Patents

Abstract

WO 18/05 0 27 0 Al 11111M Ws:AMMON. (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 22 March 2018 (22.03.2018) WIP0 I PCT ill~~~~~~~~ 011101010VIIIOH o o olmooliololomoilowo oimIE (10) International Publication Number WO 2018/050270 Al (51) International Patent Classification: C23C 14/50 (2006.01) C23C 14/04 (2006.01) (21) International Application Number: PCT/EP2017/001051 (22) International Filing Date: 06 September 2017 (06.09.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 16 002 019.4 16 September 2016 (16.09.2016) EP (71) Applicant: SATISLOH AG [CH/CH]; Neuhofstrasse 12, 6340 Baar (CH). (72) Inventors: MORENI, Franco; Via Maestri del lavoro 11, 21057 Olgiate Olona (VA) (IT). COREA, Antonio; Via Don Puglisi 9, 20018 Sedriano (Ml) (IT). VISCOMI, Giuseppe; Via Torino 11, 20030 Senago (Ml) (IT). (74) Agent: OPPERMANN, Mark; OPPERMANN & OPPER- MANN, Am Wiesengrund 35, 63075 Offenbach (DE). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4.1700) Published: — with international search report (Art. 21(3)) (54) Title: VACUUM COATING APPARATUS (57) : A box coating apparatus (10) for vacuum coating of substrates comprises a vacuum chamber (12) containing an evapora- tion source (14) and a substrate holder (16) formed as a dome vis-a- vis to the evaporation source and rotatable about an axis (R). A mask- ing arrangement (20) is located in between for partially shadowing the substrates on the substrate holder relative to the evaporation source. The masking arrangement comprises a fixed masking portion (22) sta- tionary in the vacuum chamber, and a plurality of gradient sector por- tions (24, 26, 28) carrying gradient shields assigned to the substrates on the substrate holder, for forming a gradient mask. The gradient sector portions can be rotated about said axis between a gradient mask open position where they are stored behind the fixed masking portion, and a gradient mask closed position where they are spread like a fan between the evaporation source and the substrate holder.