SG11201601197UA - Particle collector system and dust collection method - Google Patents

Particle collector system and dust collection method

Info

Publication number
SG11201601197UA
SG11201601197UA SG11201601197UA SG11201601197UA SG11201601197UA SG 11201601197U A SG11201601197U A SG 11201601197UA SG 11201601197U A SG11201601197U A SG 11201601197UA SG 11201601197U A SG11201601197U A SG 11201601197UA SG 11201601197U A SG11201601197U A SG 11201601197UA
Authority
SG
Singapore
Prior art keywords
dust collection
collection method
collector system
particle collector
particle
Prior art date
Application number
SG11201601197UA
Inventor
Yoshiaki Tatsumi
Yu Saito
Toshifumi Sugawara
Original Assignee
Creative Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Creative Tech Corp filed Critical Creative Tech Corp
Publication of SG11201601197UA publication Critical patent/SG11201601197UA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02Plant or installations having external electricity supply
    • B03C3/04Plant or installations having external electricity supply dry type
    • B03C3/06Plant or installations having external electricity supply dry type characterised by presence of stationary tube electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/40Electrode constructions
    • B03C3/41Ionising-electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/40Electrode constructions
    • B03C3/45Collecting-electrodes
    • B03C3/47Collecting-electrodes flat, e.g. plates, discs, gratings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/40Electrode constructions
    • B03C3/45Collecting-electrodes
    • B03C3/49Collecting-electrodes tubular
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/66Applications of electricity supply techniques
    • B03C3/68Control systems therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00Details of magnetic or electrostatic separation
    • B03C2201/24Details of magnetic or electrostatic separation for measuring or calculating parameters, efficiency, etc.
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00Details of magnetic or electrostatic separation
    • B03C2201/32Checking the quality of the result or the well-functioning of the device
SG11201601197UA 2013-09-02 2014-08-02 Particle collector system and dust collection method SG11201601197UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013181593 2013-09-02
PCT/JP2014/070406 WO2015029698A1 (en) 2013-09-02 2014-08-02 Particle collector system and dust collection method

Publications (1)

Publication Number Publication Date
SG11201601197UA true SG11201601197UA (en) 2016-03-30

Family

ID=52586272

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201601197UA SG11201601197UA (en) 2013-09-02 2014-08-02 Particle collector system and dust collection method

Country Status (7)

Country Link
US (1) US10005087B2 (en)
JP (1) JP6362017B2 (en)
KR (1) KR102253772B1 (en)
CN (1) CN105492121B (en)
SG (1) SG11201601197UA (en)
TW (1) TWI637789B (en)
WO (1) WO2015029698A1 (en)

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EA039705B1 (en) * 2015-09-28 2022-03-02 Массачусетс Инститьют Оф Текнолоджи Systems and methods for collecting a species
CN106964490A (en) * 2017-04-27 2017-07-21 刘伟乐 Remote controlled indoor electrostatic precipitation system
CN107159462A (en) * 2017-04-27 2017-09-15 刘伟乐 Indoor electrostatic precipitation system
CN106984435A (en) * 2017-04-27 2017-07-28 刘伟乐 Indoor dust pelletizing system
CN107159465A (en) * 2017-04-27 2017-09-15 刘伟乐 Dust pelletizing system for indoor air purification
JP7005288B2 (en) 2017-11-02 2022-01-21 株式会社ニューフレアテクノロジー Dust collector
CN108279334A (en) * 2017-12-29 2018-07-13 国网北京市电力公司 Monitoring method and device, system
DE102018205333A1 (en) * 2018-04-10 2019-10-10 BSH Hausgeräte GmbH Electrostatic filter unit and ventilation unit with electrostatic filter unit
US20230381791A1 (en) * 2020-09-24 2023-11-30 Creative Technology Corporation Dust collector and dust collection method
US11150564B1 (en) * 2020-09-29 2021-10-19 Taiwan Semiconductor Manufacturing Co., Ltd. EUV wafer defect improvement and method of collecting nonconductive particles
JP2023055411A (en) 2021-10-06 2023-04-18 株式会社クリエイティブテクノロジー Electrical dust collector for press die and press die using the same
WO2023058652A1 (en) 2021-10-06 2023-04-13 株式会社クリエイティブテクノロジー Electric dust collector and dust collection method using same

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US3837145A (en) * 1972-07-27 1974-09-24 T Festner Electrostatic precipitator wall panel
DE2641114C3 (en) * 1976-09-13 1981-05-14 Metallgesellschaft Ag, 6000 Frankfurt Process for the production of a plastic electrostatic precipitator in honeycomb form
JPS5451074A (en) 1977-09-30 1979-04-21 Denki Onkyo Co Ltd Electric dust collector
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US5401299A (en) * 1993-02-26 1995-03-28 Crs Industries, Inc. Air purification apparatus
JPH08222353A (en) * 1995-02-13 1996-08-30 Toshiba Corp Discharge device
JPH08229432A (en) * 1995-03-01 1996-09-10 Nippondenso Co Ltd Air cleaner
JP4350180B2 (en) 1998-04-15 2009-10-21 パナソニックエコシステムズ株式会社 Electric dust collecting filter and manufacturing method thereof
JP4418193B2 (en) 2003-08-22 2010-02-17 東京エレクトロン株式会社 Particle removal apparatus, particle removal method, and plasma processing apparatus
AT500959B1 (en) * 2004-11-09 2007-05-15 Carl M Dr Fleck METHOD AND FILTER ARRANGEMENT FOR SEPARATING RUSSIAN PARTICLES
JP4866543B2 (en) * 2004-11-24 2012-02-01 株式会社クリエイティブ テクノロジー Electrostatic adsorber and sheet-like adsorbent transfer method using this electrostatic adsorber
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US7964012B2 (en) * 2005-08-03 2011-06-21 Hollingsworth & Vose Company Filter media with improved conductivity
WO2007077897A1 (en) * 2005-12-28 2007-07-12 Ngk Insulators, Ltd. Dust catching electrode and dust catcher
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KR20090039721A (en) * 2006-07-19 2009-04-22 코닌클리케 필립스 일렉트로닉스 엔.브이. Electrostatic particle filter
JP4753092B2 (en) 2007-07-18 2011-08-17 株式会社安川電機 Substrate transfer robot having dustproof mechanism and semiconductor manufacturing apparatus having the same
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US8491683B1 (en) * 2012-10-10 2013-07-23 International Business Machines Corporation Computer system including electrodes for automated dust filter cleaning

Also Published As

Publication number Publication date
TW201521878A (en) 2015-06-16
CN105492121B (en) 2017-12-29
KR102253772B1 (en) 2021-05-18
TWI637789B (en) 2018-10-11
WO2015029698A1 (en) 2015-03-05
US20160207051A1 (en) 2016-07-21
US10005087B2 (en) 2018-06-26
KR20160047470A (en) 2016-05-02
JP6362017B2 (en) 2018-07-25
JPWO2015029698A1 (en) 2017-03-02
CN105492121A (en) 2016-04-13

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