SG11201600906YA - Resin sheet for electronic device encapsulation and method for manufacturing electronic device package - Google Patents

Resin sheet for electronic device encapsulation and method for manufacturing electronic device package

Info

Publication number
SG11201600906YA
SG11201600906YA SG11201600906YA SG11201600906YA SG11201600906YA SG 11201600906Y A SG11201600906Y A SG 11201600906YA SG 11201600906Y A SG11201600906Y A SG 11201600906YA SG 11201600906Y A SG11201600906Y A SG 11201600906YA SG 11201600906Y A SG11201600906Y A SG 11201600906YA
Authority
SG
Singapore
Prior art keywords
electronic device
resin sheet
encapsulation
device package
manufacturing
Prior art date
Application number
SG11201600906YA
Inventor
Tsuyoshi Ishizaka
Eiji Toyoda
Jun Ishii
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of SG11201600906YA publication Critical patent/SG11201600906YA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/19Manufacturing methods of high density interconnect preforms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/96Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568Temporary substrate used as encapsulation process aid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/12105Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135Double encapsulation or coating and encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape
    • H01L2924/1816Exposing the passive side of the semiconductor or solid-state body
    • H01L2924/18162Exposing the passive side of the semiconductor or solid-state body of a chip with build-up interconnect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress
    • H01L2924/3511Warping
SG11201600906YA 2013-08-09 2014-07-04 Resin sheet for electronic device encapsulation and method for manufacturing electronic device package SG11201600906YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013167055A JP6259608B2 (en) 2013-08-09 2013-08-09 Resin sheet for sealing electronic device and method for manufacturing electronic device package
PCT/JP2014/067921 WO2015019769A1 (en) 2013-08-09 2014-07-04 Resin sheet for electronic device encapsulation and method for manufacturing electronic device package

Publications (1)

Publication Number Publication Date
SG11201600906YA true SG11201600906YA (en) 2016-03-30

Family

ID=52461108

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201600906YA SG11201600906YA (en) 2013-08-09 2014-07-04 Resin sheet for electronic device encapsulation and method for manufacturing electronic device package

Country Status (5)

Country Link
JP (1) JP6259608B2 (en)
CN (1) CN105453252B (en)
SG (1) SG11201600906YA (en)
TW (1) TW201513278A (en)
WO (1) WO2015019769A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9761540B2 (en) 2015-06-24 2017-09-12 Micron Technology, Inc. Wafer level package and fabrication method thereof
JP6788344B2 (en) * 2015-12-21 2020-11-25 京セラ株式会社 Electronic components and manufacturing methods for electronic components
JP6461031B2 (en) * 2016-03-16 2019-01-30 東芝メモリ株式会社 Manufacturing method of semiconductor device
JP2018051892A (en) * 2016-09-28 2018-04-05 京セラ株式会社 Thermosetting resin sheet, production method of the same, and sealing method of electronic component
CN106684057B (en) 2016-12-30 2019-10-22 华为技术有限公司 Chip-packaging structure and its manufacturing method
JP6894076B2 (en) * 2017-03-31 2021-06-23 ナガセケムテックス株式会社 Manufacturing method of mounting structure and laminated sheet used for this
JP6975547B2 (en) * 2017-03-31 2021-12-01 ナガセケムテックス株式会社 Manufacturing method of mounting structure and laminated sheet used for it
TWI645523B (en) * 2017-07-14 2018-12-21 矽品精密工業股份有限公司 Package structure and the manufacture thereof
WO2019017283A1 (en) 2017-07-21 2019-01-24 株式会社村田製作所 Electronic component
CN111108595A (en) * 2017-09-29 2020-05-05 长濑化成株式会社 Method for manufacturing mounting structure and laminated sheet used therein
CN111108596B (en) * 2017-09-29 2023-07-18 长濑化成株式会社 Method for manufacturing mounting structure and sheet used therein
JP7119817B2 (en) * 2018-09-18 2022-08-17 昭和電工マテリアルズ株式会社 semiconductor equipment
WO2020241505A1 (en) * 2019-05-31 2020-12-03 パナソニックIpマネジメント株式会社 Sheet-like sealing material, sheet for sealing and semiconductor device
WO2022024369A1 (en) * 2020-07-31 2022-02-03 国立大学法人東北大学 Method for manufacturing semiconductor device, method for manufacturing apparatus comprising semiconductor device, semiconductor device, and apparatus comprising semiconductor device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11310766A (en) * 1998-04-28 1999-11-09 Hitachi Chem Co Ltd Epoxy resin molding material for sealing and electronic part device
JP2008288433A (en) * 2007-05-18 2008-11-27 Yaskawa Electric Corp Resin molding method of mounting board, equipment therefor, and resin molded mounting board
JP2010109246A (en) * 2008-10-31 2010-05-13 Yaskawa Electric Corp Semiconductor device, and method of manufacturing the same
TW201032300A (en) * 2009-02-27 2010-09-01 Advanced Semiconductor Eng Chip scale package and method of fabricating the same
JP2011054806A (en) * 2009-09-02 2011-03-17 Renesas Electronics Corp Semiconductor device and method of manufacturing the same
JP2011216849A (en) * 2010-03-17 2011-10-27 Tdk Corp Electronic circuit module component, and method of manufacturing the same
JP2013004848A (en) * 2011-06-20 2013-01-07 Semiconductor Components Industries Llc Semiconductor device and manufacturing method of the same

Also Published As

Publication number Publication date
JP2015035567A (en) 2015-02-19
CN105453252B (en) 2018-10-26
TW201513278A (en) 2015-04-01
WO2015019769A1 (en) 2015-02-12
JP6259608B2 (en) 2018-01-10
CN105453252A (en) 2016-03-30

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