SG11201600283XA - Piezoelectric resonator and method for manufacturing the same - Google Patents

Piezoelectric resonator and method for manufacturing the same

Info

Publication number
SG11201600283XA
SG11201600283XA SG11201600283XA SG11201600283XA SG11201600283XA SG 11201600283X A SG11201600283X A SG 11201600283XA SG 11201600283X A SG11201600283X A SG 11201600283XA SG 11201600283X A SG11201600283X A SG 11201600283XA SG 11201600283X A SG11201600283X A SG 11201600283XA
Authority
SG
Singapore
Prior art keywords
manufacturing
same
piezoelectric resonator
resonator
piezoelectric
Prior art date
Application number
SG11201600283XA
Inventor
Keiichi Umeda
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of SG11201600283XA publication Critical patent/SG11201600283XA/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0407—Temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
SG11201600283XA 2013-08-21 2014-08-06 Piezoelectric resonator and method for manufacturing the same SG11201600283XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013171570 2013-08-21
PCT/JP2014/070761 WO2015025716A1 (en) 2013-08-21 2014-08-06 Piezo-resonator and process for production thereof

Publications (1)

Publication Number Publication Date
SG11201600283XA true SG11201600283XA (en) 2016-02-26

Family

ID=52483496

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201600283XA SG11201600283XA (en) 2013-08-21 2014-08-06 Piezoelectric resonator and method for manufacturing the same

Country Status (5)

Country Link
US (1) US10069473B2 (en)
JP (1) JP6132022B2 (en)
CN (1) CN105659495B (en)
SG (1) SG11201600283XA (en)
WO (1) WO2015025716A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201501005YA (en) * 2012-09-13 2015-05-28 Murata Manufacturing Co Vibrating device and manufacturing method therefor
US9705470B1 (en) * 2014-02-09 2017-07-11 Sitime Corporation Temperature-engineered MEMS resonator
WO2016051025A1 (en) * 2014-10-03 2016-04-07 Teknologian Tutkimuskeskus Vtt Oy Temperature compensated plate resonator
US10676349B1 (en) 2016-08-12 2020-06-09 Sitime Corporation MEMS resonator
US10734968B2 (en) 2016-08-26 2020-08-04 Samsung Electro-Mechanics Co., Ltd. Bulk acoustic resonator and filter including the same
CN106385242B (en) * 2016-09-12 2018-11-09 重庆大学 GHz silicon substrate ScAlN film Resonators and preparation method thereof
GB2606319B (en) * 2017-07-07 2023-03-08 Skyworks Solutions Inc Substituted aluminum nitride for improved acoustic wave filters
WO2019102952A1 (en) * 2017-11-22 2019-05-31 株式会社村田製作所 Piezoelectric device and piezoelectric device manufacturing method
JP6703320B2 (en) * 2017-11-22 2020-06-03 株式会社村田製作所 Piezoelectric device and method for manufacturing piezoelectric device
JP7151096B2 (en) * 2018-02-21 2022-10-12 株式会社デンソー Piezoelectric film, manufacturing method thereof, piezoelectric film laminate, manufacturing method thereof
JP7081981B2 (en) * 2018-05-28 2022-06-07 太陽誘電株式会社 Aluminum Nitride Films, Piezoelectric Devices, Resonators, Filters and Multiplexers
WO2020026611A1 (en) 2018-07-30 2020-02-06 株式会社村田製作所 Piezoelectric device
DE102018132904B4 (en) * 2018-12-19 2020-10-29 RF360 Europe GmbH Piezoelectric material and piezoelectric device
CN113285014A (en) * 2021-05-14 2021-08-20 中国科学技术大学 Single crystal doped film, piezoelectric film for acoustic wave resonator and preparation method thereof
US20240228282A1 (en) * 2021-05-20 2024-07-11 National Institute Of Advanced Industrial Science And Technology ScAlN LAMINATE AND MANUFACTURING METHOD THEREOF

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2889375B1 (en) * 2005-07-29 2008-02-15 Temex Sas Soc Par Actions Simp HYBRID RESONANT STRUCTURE
WO2007138840A1 (en) * 2006-05-30 2007-12-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
JP5190841B2 (en) * 2007-05-31 2013-04-24 独立行政法人産業技術総合研究所 Piezoelectric thin film, piezoelectric body and manufacturing method thereof, and piezoelectric resonator, actuator element, and physical sensor using the piezoelectric thin film
DE102008025691B4 (en) 2007-05-31 2011-08-25 National Institute Of Advanced Industrial Science And Technology Piezoelectric thin film, piezoelectric material and piezoelectric thin film forming method
US9679765B2 (en) * 2010-01-22 2017-06-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation
JP5643056B2 (en) 2010-11-01 2014-12-17 太陽誘電株式会社 Elastic wave device
JP5877043B2 (en) * 2011-11-22 2016-03-02 太陽誘電株式会社 Duplexer
JP5811276B2 (en) * 2012-05-17 2015-11-11 株式会社村田製作所 Surface acoustic wave device
CN107112977B (en) * 2015-01-06 2020-07-14 株式会社村田制作所 Piezoelectric film and piezoelectric resonator
US10164605B2 (en) * 2016-01-26 2018-12-25 Avago Technologies International Sales Pte. Limited Bulk acoustic wave resonator with piezoelectric layer comprising lithium niobate or lithium tantalate
US10658564B2 (en) * 2016-11-24 2020-05-19 Huawei Technologies Co., Ltd. Surface acoustic wave device

Also Published As

Publication number Publication date
JPWO2015025716A1 (en) 2017-03-02
JP6132022B2 (en) 2017-05-24
US20160156332A1 (en) 2016-06-02
WO2015025716A1 (en) 2015-02-26
CN105659495A (en) 2016-06-08
CN105659495B (en) 2018-06-19
US10069473B2 (en) 2018-09-04

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