SG10201406984RA - Semicondcutor device and method offorming embedded wafer level chip scale packages - Google Patents

Semicondcutor device and method offorming embedded wafer level chip scale packages

Info

Publication number
SG10201406984RA
SG10201406984RA SG10201406984RA SG10201406984RA SG10201406984RA SG 10201406984R A SG10201406984R A SG 10201406984RA SG 10201406984R A SG10201406984R A SG 10201406984RA SG 10201406984R A SG10201406984R A SG 10201406984RA SG 10201406984R A SG10201406984R A SG 10201406984RA
Authority
SG
Singapore
Prior art keywords
wafer level
chip scale
level chip
scale packages
embedded wafer
Prior art date
Application number
SG10201406984RA
Inventor
Yaojian Lin
Pandi C Marimuthu
Il Kwon Shim
Byung Joon Han
Original Assignee
Stats Chippac Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/070,509 external-priority patent/US9704824B2/en
Application filed by Stats Chippac Ltd filed Critical Stats Chippac Ltd
Publication of SG10201406984RA publication Critical patent/SG10201406984RA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015—Shape
    • H01L2924/10155—Shape being other than a cuboid
    • H01L2924/10156—Shape being other than a cuboid at the periphery
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
SG10201406984RA 2013-11-02 2014-10-27 Semicondcutor device and method offorming embedded wafer level chip scale packages SG10201406984RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/070,509 US9704824B2 (en) 2013-01-03 2013-11-02 Semiconductor device and method of forming embedded wafer level chip scale packages

Publications (1)

Publication Number Publication Date
SG10201406984RA true SG10201406984RA (en) 2015-06-29

Family

ID=53348180

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201800413PA SG10201800413PA (en) 2013-11-02 2014-10-27 Semiconductor device and method of forming embeddedwafer level chip scale packages
SG10201406984RA SG10201406984RA (en) 2013-11-02 2014-10-27 Semicondcutor device and method offorming embedded wafer level chip scale packages

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201800413PA SG10201800413PA (en) 2013-11-02 2014-10-27 Semiconductor device and method of forming embeddedwafer level chip scale packages

Country Status (3)

Country Link
CN (1) CN104701195B (en)
SG (2) SG10201800413PA (en)
TW (1) TWI651783B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10366956B2 (en) 2015-06-10 2019-07-30 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device and manufacturing method thereof
US20170098628A1 (en) * 2015-10-05 2017-04-06 Mediatek Inc. Semiconductor package structure and method for forming the same
US10123419B2 (en) * 2016-03-30 2018-11-06 Intel Corporation Surface-mountable power delivery bus board
TWI622142B (en) 2016-11-07 2018-04-21 財團法人工業技術研究院 Chip package and chip packaging method
TWI664683B (en) * 2017-03-16 2019-07-01 佳邦科技股份有限公司 Method of manufacturing semiconductor package
CN107342256A (en) * 2017-06-26 2017-11-10 矽力杰半导体技术(杭州)有限公司 Semiconductor technology and semiconductor structure
US10283424B1 (en) * 2018-03-08 2019-05-07 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer structure and packaging method
CN109002806A (en) * 2018-07-27 2018-12-14 星科金朋半导体（江阴）有限公司 A kind of rear road packaging method of QFN product
TWI670779B (en) * 2018-11-16 2019-09-01 典琦科技股份有限公司 Method for manufacturing chip package
TWI703615B (en) * 2019-08-12 2020-09-01 矽品精密工業股份有限公司 Method for fabricating electronic package
US11538787B2 (en) * 2020-10-30 2022-12-27 Advanced Semiconductor Engineering, Inc. Method and system for manufacturing a semiconductor package structure
CN112885793A (en) * 2021-03-12 2021-06-01 苏州晶方半导体科技股份有限公司 Chip packaging structure and manufacturing method thereof

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JPH0574932A (en) * 1991-09-17 1993-03-26 Fujitsu Ltd Dicing method for semiconductor wafer
CN101521165B (en) * 2008-02-26 2012-01-11 上海凯虹电子有限公司 Chip-scale packaging method
US20110014746A1 (en) * 2009-07-17 2011-01-20 Stats Chippac, Ltd. Semiconductor Device and Method of Forming Conductive TSV in Peripheral Region of Die Prior to Wafer Singulaton
EP2453474A1 (en) * 2010-11-10 2012-05-16 Nxp B.V. Semiconductor device packaging method and semiconductor device package
US8659166B2 (en) * 2010-11-18 2014-02-25 Headway Technologies, Inc. Memory device, laminated semiconductor substrate and method of manufacturing the same
US8642385B2 (en) * 2011-08-09 2014-02-04 Alpha & Omega Semiconductor, Inc. Wafer level package structure and the fabrication method thereof
CN103035578B (en) * 2011-10-06 2017-08-18 新科金朋有限公司 Form the semiconductor devices and method of the reconstructed wafer with compared with larger vector
CN103117232B (en) * 2011-11-16 2015-07-01 美新半导体（无锡）有限公司 Wafer-level packaging method and packaging structure thereof
TWI463619B (en) * 2012-06-22 2014-12-01 矽品精密工業股份有限公司 Semiconductor package and method of forming the same

Also Published As

Publication number Publication date
TWI651783B (en) 2019-02-21
SG10201800413PA (en) 2018-03-28
TW201519331A (en) 2015-05-16
CN104701195B (en) 2019-11-29
CN104701195A (en) 2015-06-10

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