SG10201402685TA - Robot arm control apparatus, substrate transfer apparatus,substrate processing apparatus, robot arm control method, and program - Google Patents

Robot arm control apparatus, substrate transfer apparatus,substrate processing apparatus, robot arm control method, and program

Info

Publication number
SG10201402685TA
SG10201402685TA SG10201402685TA SG10201402685TA SG10201402685TA SG 10201402685T A SG10201402685T A SG 10201402685TA SG 10201402685T A SG10201402685T A SG 10201402685TA SG 10201402685T A SG10201402685T A SG 10201402685TA SG 10201402685T A SG10201402685T A SG 10201402685TA
Authority
SG
Singapore
Prior art keywords
robot arm
arm control
arm
program
distal end
Prior art date
Application number
SG10201402685TA
Inventor
Shinozaki Hiroyuki
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201402685TA publication Critical patent/SG10201402685TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B25J9/1651—Programme controls characterised by the control loop acceleration, rate control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/43—Speed, acceleration, deceleration control ADC
    • G05B2219/43033—Sinusoidal acceleration profile
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

ROBOT ARM CONTROL APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, ROBOT ARM CONTROL METHOD, AND PROGRAM A robot arm control apparatus controlling the operation of a robot arm device having at least two arm portions and at least two rotational joints configured to rotate the arm portions includes a control unit configured to control rotation of the joints to move generally rectilinearly the distal end of a predetermined arm portion of the arm portions except the most proximal arm portion thereof. The control unit controls the rotation of the joints so that the motion acceleration of the distal end of the predetermined arm portion when the distal end is moved generally rectilinearly results in coincidence with a predetermined temporal transition. The motion acceleration with the predetermined temporal transition is such that, when the motion acceleration is expressed as function a of time, derivative a obtained by differentiating the function with respect to the time shows a continuous transition with respect to changes in the time. Fig. 2 -21 -
SG10201402685TA 2013-05-31 2014-05-28 Robot arm control apparatus, substrate transfer apparatus,substrate processing apparatus, robot arm control method, and program SG10201402685TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013115095A JP2014233774A (en) 2013-05-31 2013-05-31 Robot arm control device, substrate transportation device, substrate processing device, robot arm control method and program

Publications (1)

Publication Number Publication Date
SG10201402685TA true SG10201402685TA (en) 2014-12-30

Family

ID=51986000

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201402685TA SG10201402685TA (en) 2013-05-31 2014-05-28 Robot arm control apparatus, substrate transfer apparatus,substrate processing apparatus, robot arm control method, and program

Country Status (6)

Country Link
US (1) US20140358280A1 (en)
JP (1) JP2014233774A (en)
KR (1) KR20140141471A (en)
CN (1) CN104209945A (en)
SG (1) SG10201402685TA (en)
TW (1) TW201509616A (en)

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JP6111563B2 (en) 2012-08-31 2017-04-12 セイコーエプソン株式会社 robot
JP5962340B2 (en) * 2012-08-31 2016-08-03 セイコーエプソン株式会社 robot
JP6203702B2 (en) † 2014-11-18 2017-09-27 信越化学工業株式会社 Solution for spray drying using hypromellose acetate succinate and method for producing solid dispersion
CN105234930B (en) * 2015-10-15 2017-05-24 哈尔滨工程大学 Control method of motion of redundant mechanical arm based on configuration plane
US10369702B2 (en) * 2016-10-17 2019-08-06 Raytheon Company Automated work piece moment of inertia (MOI) identification system and method for same
US11027435B2 (en) 2018-12-04 2021-06-08 Raytheon Company Automated work piece testing system and method for same
US11198227B2 (en) 2018-12-04 2021-12-14 Raytheon Company Adjustable ballast system and method for same

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JP2808119B2 (en) * 1988-07-28 1998-10-08 ファナック株式会社 Acceleration / deceleration control method
JP3350310B2 (en) * 1995-08-22 2002-11-25 株式会社荏原製作所 Robot arm linear actuator
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
JPH11123677A (en) * 1997-10-27 1999-05-11 Fujitsu Ltd Conveying speed control method and its device of conveyer robot
US6320345B1 (en) * 1998-03-05 2001-11-20 Nikon Corporation Command trajectory for driving a stage with minimal vibration
US6216058B1 (en) * 1999-05-28 2001-04-10 Brooks Automation, Inc. System of trajectory planning for robotic manipulators based on pre-defined time-optimum trajectory shapes
EP1250218B1 (en) * 1999-12-16 2010-07-14 Panasonic Corporation Controlling method and apparatus for positioning a robot
JP3900789B2 (en) * 2000-04-14 2007-04-04 セイコーエプソン株式会社 Motor speed / acceleration determination method, acceleration / deceleration generation method, acceleration / deceleration control method, acceleration / deceleration control device, and motor control device
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JP3955217B2 (en) * 2002-02-15 2007-08-08 株式会社不二越 Industrial robot control method and control apparatus
DE10315525B4 (en) * 2003-04-04 2006-04-13 Siemens Ag Control method for jerk-limited speed control of a movable machine element of a numerically controlled industrial processing machine
US7130716B2 (en) * 2003-04-22 2006-10-31 Berkeley Process Control, Inc. System of path planning for robotic manipulators based on maximum acceleration and finite jerk constraints
US7286890B2 (en) * 2005-06-28 2007-10-23 Tokyo Electron Limited Transfer apparatus for target object
WO2008039943A2 (en) * 2006-09-27 2008-04-03 Vserv Tech Wafer processing system with dual wafer robots capable of asynchronous motion
US7919940B2 (en) * 2007-10-21 2011-04-05 Ge Intelligent Platforms, Inc. System and method for jerk limited trajectory planning for a path planner
CN101508113B (en) * 2009-03-11 2010-10-27 哈尔滨工业大学 Robot track programming method based cosine second-order
US8600554B2 (en) * 2010-06-04 2013-12-03 Institute Of Automation, Chinese Academy Of Sciences System and method for robot trajectory generation with continuous accelerations
JP2012187649A (en) * 2011-03-09 2012-10-04 Kawada Kogyo Kk Vibration suppression method for working arm
WO2013039550A2 (en) * 2011-09-13 2013-03-21 Persimmon Technologies Corporation Method for transporting a substrate with a substrate support

Also Published As

Publication number Publication date
KR20140141471A (en) 2014-12-10
JP2014233774A (en) 2014-12-15
US20140358280A1 (en) 2014-12-04
TW201509616A (en) 2015-03-16
CN104209945A (en) 2014-12-17

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