SE7611989L - Etsningsanordning - Google Patents
EtsningsanordningInfo
- Publication number
- SE7611989L SE7611989L SE7611989A SE7611989A SE7611989L SE 7611989 L SE7611989 L SE 7611989L SE 7611989 A SE7611989 A SE 7611989A SE 7611989 A SE7611989 A SE 7611989A SE 7611989 L SE7611989 L SE 7611989L
- Authority
- SE
- Sweden
- Prior art keywords
- etching device
- etching
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/647,796 US3999564A (en) | 1976-01-09 | 1976-01-09 | Continuous etching and etched material recovery system |
Publications (1)
Publication Number | Publication Date |
---|---|
SE7611989L true SE7611989L (sv) | 1977-07-10 |
Family
ID=24598302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7611989A SE7611989L (sv) | 1976-01-09 | 1976-10-28 | Etsningsanordning |
Country Status (7)
Country | Link |
---|---|
US (1) | US3999564A (sv) |
JP (1) | JPS5288239A (sv) |
DE (1) | DE2651675A1 (sv) |
FR (1) | FR2337770A1 (sv) |
GB (1) | GB1542704A (sv) |
NL (1) | NL7700113A (sv) |
SE (1) | SE7611989L (sv) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2917597A1 (de) * | 1979-04-30 | 1980-11-13 | Siemens Ag | Verfahren zur regenerierung ammoniakalischer aetzloesungen zum aetzen von metallischem kupfer |
DE3324450A1 (de) * | 1983-07-07 | 1985-01-17 | ELO-CHEM Ätztechnik GmbH, 7758 Meersburg | Ammoniumsulfathaltige aetzloesung sowie verfahren zur regeneration der aetzloesung |
DE3422276A1 (de) * | 1984-06-15 | 1985-12-19 | Walter Holzer | Vorrichtung und arbeitsverfahren zum aetzen von leiterplatten |
EP0393270A1 (en) * | 1989-04-21 | 1990-10-24 | Ming-Hsing Lee | Process for etching copper with ammoniacal etchant solution and reconditioning the used etchant solution |
DE3936363A1 (de) * | 1989-11-02 | 1991-05-08 | Hoellmueller Maschbau H | Verfahren zum aetzen von gegenstaenden sowie aetzanlage |
US5015322A (en) * | 1990-02-23 | 1991-05-14 | Mcdonnell Douglas Corporation | Tank arrangement particularly designed for chemical milling operations |
US5143102A (en) * | 1990-03-12 | 1992-09-01 | Graymills Corporation | High pressure parts cleaner and method |
JP3142195B2 (ja) * | 1993-07-20 | 2001-03-07 | 大日本スクリーン製造株式会社 | 薬液供給装置 |
US5733441A (en) * | 1996-06-27 | 1998-03-31 | United Microelectronics Corporation | Pre-wet system for a filter |
US6372111B1 (en) | 2000-01-18 | 2002-04-16 | David K. Watts | Method and apparatus for reclaiming a metal from a CMP process for use in an electroplating process |
US6362103B1 (en) | 2000-01-18 | 2002-03-26 | David K. Watts | Method and apparatus for rejuvenating a CMP chemical solution |
US6475403B2 (en) * | 2000-01-31 | 2002-11-05 | Matsushita Electric Industrial Co., Ltd. | Etching method and apparatus |
US6503363B2 (en) * | 2000-03-03 | 2003-01-07 | Seh America, Inc. | System for reducing wafer contamination using freshly, conditioned alkaline etching solution |
US20080217296A1 (en) * | 2007-03-07 | 2008-09-11 | United Microelectronics Corp. | Etching apparatus for semiconductor processing apparatus and method thereof for recycling etchant solutions |
CN103721476B (zh) * | 2013-12-20 | 2017-09-29 | 鞍钢股份有限公司 | 一种盐酸再生机组含酸废水回收装置及方法 |
CN114276813B (zh) * | 2022-01-30 | 2023-08-25 | 广东东方锆业科技股份有限公司 | 一种碱性蚀刻液的制备方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3266502A (en) * | 1964-09-14 | 1966-08-16 | Western Technology Inc | Chemical milling machine |
US3327721A (en) * | 1965-05-28 | 1967-06-27 | Keith L Carlson | Etching apparatus |
US3427198A (en) * | 1965-10-22 | 1969-02-11 | Inland Steel Co | Method and apparatus for automatic control of pickling system |
US3526560A (en) * | 1967-02-13 | 1970-09-01 | Chemcut Corp | Etchant regeneration apparatus |
NL7202652A (sv) * | 1971-03-08 | 1972-09-12 | ||
US3933544A (en) * | 1971-03-08 | 1976-01-20 | Firma Hans Hollmuller, Maschinenbau | Method of etching copper and copper alloys |
US3705061A (en) * | 1971-03-19 | 1972-12-05 | Southern California Chem Co In | Continuous redox process for dissolving copper |
CA989283A (en) * | 1972-02-09 | 1976-05-18 | Gerald J. Roelants | Continuous etching process |
DE2237804A1 (de) * | 1972-03-07 | 1973-09-13 | Southern California Chem Co | Kontinuierliches redox-verfahren und vorrichtung zum loesen von kupfer |
FR2175746B1 (sv) * | 1972-03-16 | 1976-04-30 | Shipley Co |
-
1976
- 1976-01-09 US US05/647,796 patent/US3999564A/en not_active Expired - Lifetime
- 1976-10-28 SE SE7611989A patent/SE7611989L/sv unknown
- 1976-10-29 GB GB7644971A patent/GB1542704A/en not_active Expired
- 1976-11-12 DE DE19762651675 patent/DE2651675A1/de active Pending
- 1976-11-19 JP JP13937376A patent/JPS5288239A/ja active Granted
- 1976-11-25 FR FR7635580A patent/FR2337770A1/fr not_active Withdrawn
-
1977
- 1977-01-07 NL NL7700113A patent/NL7700113A/xx not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
FR2337770A1 (fr) | 1977-08-05 |
JPS554836B2 (sv) | 1980-02-01 |
US3999564A (en) | 1976-12-28 |
JPS5288239A (en) | 1977-07-23 |
NL7700113A (nl) | 1977-07-12 |
GB1542704A (en) | 1979-03-21 |
DE2651675A1 (de) | 1977-07-14 |
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