SE523309E - Metod, elektrod och apparat för att skapa mikro- och nanostrukturer i ledande material genom mönstring med masterelektrod och elektrolyt - Google Patents
Metod, elektrod och apparat för att skapa mikro- och nanostrukturer i ledande material genom mönstring med masterelektrod och elektrolytInfo
- Publication number
- SE523309E SE523309E SE0102144A SE0102144A SE523309E SE 523309 E SE523309 E SE 523309E SE 0102144 A SE0102144 A SE 0102144A SE 0102144 A SE0102144 A SE 0102144A SE 523309 E SE523309 E SE 523309E
- Authority
- SE
- Sweden
- Prior art keywords
- electrode
- nanostructures
- patterning
- electrolyte
- conductive materials
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/07—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0117—Pattern shaped electrode used for patterning, e.g. plating or etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Electroplating Methods And Accessories (AREA)
- Micromachines (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Printing Methods (AREA)
- Weting (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Priority Applications (19)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0102144A SE523309E (sv) | 2001-06-15 | 2001-06-15 | Metod, elektrod och apparat för att skapa mikro- och nanostrukturer i ledande material genom mönstring med masterelektrod och elektrolyt |
RU2003136088/02A RU2296820C2 (ru) | 2001-06-15 | 2002-06-17 | Способ и электрод для определения и репликации шаблонов в проводящих материалах |
DK02739042.6T DK1404899T3 (da) | 2001-06-15 | 2002-06-17 | Fremgangsmåde og elektrode til at definere og duplikere strukturer i ledende materialer |
EP10182946.3A EP2322694B1 (en) | 2001-06-15 | 2002-06-17 | Method for defining and replicating structures in conducting materials |
PCT/SE2002/001179 WO2002103085A1 (en) | 2001-06-15 | 2002-06-17 | Method and electrode for defining and replicating structures in conducting materials |
ES02739042T ES2397919T3 (es) | 2001-06-15 | 2002-06-17 | Procedimiento y electrodo para definir y reproducir estructuras en materiales conductores |
KR1020037016336A KR101250685B1 (ko) | 2001-06-15 | 2002-06-17 | 전도 재료의 구조를 정의하고 복제하는 방법 및 전극 |
PT2739042T PT1404899E (pt) | 2001-06-15 | 2002-06-17 | Método e elétrodo para definir e replicar estruturas em materiais condutores |
EP02739042A EP1404899B1 (en) | 2001-06-15 | 2002-06-17 | Method and electrode for defining and replicating structures in conducting materials |
ES10182946.3T ES2645700T3 (es) | 2001-06-15 | 2002-06-17 | Procedimiento para definir y reproducir estructuras en materiales conductores |
JP2003505393A JP4546078B2 (ja) | 2001-06-15 | 2002-06-17 | 伝導材料中の構造を定義し、複製するための方法及び電極 |
CA2462098A CA2462098C (en) | 2001-06-15 | 2002-06-17 | Method and electrode for defining and replicating structures in conducting materials |
CNB028119266A CN1294296C (zh) | 2001-06-15 | 2002-06-17 | 确定与复制导电材料中的结构的方法与电极 |
US10/734,223 US7790009B2 (en) | 2001-06-15 | 2003-12-15 | Method and electrode for defining and replicating structures in conducting materials |
HK05104929A HK1072083A1 (en) | 2001-06-15 | 2005-06-13 | Method and electrode for defining and replicating structures in conducting materials |
US11/716,166 US20070151858A1 (en) | 2001-06-15 | 2007-03-09 | Method and electrode for defining and replicating structures in conducting materials |
JP2009142804A JP2009235578A (ja) | 2001-06-15 | 2009-06-15 | 伝導材料中の構造を画定し、複製するための方法及び電極 |
US12/801,219 US20110000784A1 (en) | 2001-06-15 | 2010-05-27 | Method and electrode for defining and replicating structures in conducting materials |
US13/417,808 US8741113B2 (en) | 2001-06-15 | 2012-03-12 | Method and electrode for defining and replicating structures in conducting materials |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0102144A SE523309E (sv) | 2001-06-15 | 2001-06-15 | Metod, elektrod och apparat för att skapa mikro- och nanostrukturer i ledande material genom mönstring med masterelektrod och elektrolyt |
Publications (4)
Publication Number | Publication Date |
---|---|
SE0102144D0 SE0102144D0 (sv) | 2001-06-15 |
SE0102144L SE0102144L (sv) | 2002-12-19 |
SE523309C2 SE523309C2 (sv) | 2004-04-13 |
SE523309E true SE523309E (sv) | 2009-10-26 |
Family
ID=20284507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0102144A SE523309E (sv) | 2001-06-15 | 2001-06-15 | Metod, elektrod och apparat för att skapa mikro- och nanostrukturer i ledande material genom mönstring med masterelektrod och elektrolyt |
Country Status (13)
Country | Link |
---|---|
US (4) | US7790009B2 (sv) |
EP (2) | EP2322694B1 (sv) |
JP (2) | JP4546078B2 (sv) |
KR (1) | KR101250685B1 (sv) |
CN (1) | CN1294296C (sv) |
CA (1) | CA2462098C (sv) |
DK (1) | DK1404899T3 (sv) |
ES (2) | ES2397919T3 (sv) |
HK (1) | HK1072083A1 (sv) |
PT (1) | PT1404899E (sv) |
RU (1) | RU2296820C2 (sv) |
SE (1) | SE523309E (sv) |
WO (1) | WO2002103085A1 (sv) |
Families Citing this family (68)
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-
2001
- 2001-06-15 SE SE0102144A patent/SE523309E/sv not_active IP Right Cessation
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2002
- 2002-06-17 ES ES02739042T patent/ES2397919T3/es not_active Expired - Lifetime
- 2002-06-17 DK DK02739042.6T patent/DK1404899T3/da active
- 2002-06-17 RU RU2003136088/02A patent/RU2296820C2/ru not_active IP Right Cessation
- 2002-06-17 KR KR1020037016336A patent/KR101250685B1/ko active IP Right Grant
- 2002-06-17 CA CA2462098A patent/CA2462098C/en not_active Expired - Lifetime
- 2002-06-17 EP EP10182946.3A patent/EP2322694B1/en not_active Expired - Lifetime
- 2002-06-17 PT PT2739042T patent/PT1404899E/pt unknown
- 2002-06-17 CN CNB028119266A patent/CN1294296C/zh not_active Expired - Fee Related
- 2002-06-17 WO PCT/SE2002/001179 patent/WO2002103085A1/en active Application Filing
- 2002-06-17 EP EP02739042A patent/EP1404899B1/en not_active Expired - Lifetime
- 2002-06-17 ES ES10182946.3T patent/ES2645700T3/es not_active Expired - Lifetime
- 2002-06-17 JP JP2003505393A patent/JP4546078B2/ja not_active Expired - Fee Related
-
2003
- 2003-12-15 US US10/734,223 patent/US7790009B2/en not_active Expired - Fee Related
-
2005
- 2005-06-13 HK HK05104929A patent/HK1072083A1/xx not_active IP Right Cessation
-
2007
- 2007-03-09 US US11/716,166 patent/US20070151858A1/en not_active Abandoned
-
2009
- 2009-06-15 JP JP2009142804A patent/JP2009235578A/ja active Pending
-
2010
- 2010-05-27 US US12/801,219 patent/US20110000784A1/en not_active Abandoned
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2012
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Also Published As
Publication number | Publication date |
---|---|
CN1294296C (zh) | 2007-01-10 |
RU2296820C2 (ru) | 2007-04-10 |
US20110000784A1 (en) | 2011-01-06 |
JP2009235578A (ja) | 2009-10-15 |
US20070151858A1 (en) | 2007-07-05 |
DK1404899T3 (da) | 2013-02-04 |
ES2397919T3 (es) | 2013-03-12 |
JP2004530050A (ja) | 2004-09-30 |
EP1404899A1 (en) | 2004-04-07 |
CN1555428A (zh) | 2004-12-15 |
SE523309C2 (sv) | 2004-04-13 |
US8741113B2 (en) | 2014-06-03 |
JP4546078B2 (ja) | 2010-09-15 |
KR20040028781A (ko) | 2004-04-03 |
EP2322694A1 (en) | 2011-05-18 |
ES2645700T3 (es) | 2017-12-07 |
EP1404899B1 (en) | 2012-10-31 |
RU2003136088A (ru) | 2005-05-10 |
SE0102144D0 (sv) | 2001-06-15 |
CA2462098A1 (en) | 2002-12-27 |
KR101250685B1 (ko) | 2013-04-03 |
SE0102144L (sv) | 2002-12-19 |
US20120228128A1 (en) | 2012-09-13 |
CA2462098C (en) | 2014-01-14 |
WO2002103085A1 (en) | 2002-12-27 |
PT1404899E (pt) | 2013-01-28 |
US7790009B2 (en) | 2010-09-07 |
HK1072083A1 (en) | 2005-08-12 |
EP2322694B1 (en) | 2017-08-02 |
US20040154828A1 (en) | 2004-08-12 |
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